A multi-degree-of-freedom beam alignment adjustment system and method

Abstract

This invention provides a multi-degree-of-freedom beam alignment and adjustment system and method. The multi-degree-of-freedom beam alignment and adjustment system includes a light source, an alignment module, and an adjustment module. The alignment module has a rectangular frame structure, with its left side plate facing the light source. Circular holes are provided on both the left and right sides of the alignment module. The adjustment module includes a clamping assembly for holding optical elements, a turntable mechanism for rotating the optical elements, an upper adjustment mechanism for adjusting the pitch angle of the optical elements, and a lower adjustment mechanism for adjusting the yaw angle of the optical elements. The clamping assembly is mounted on the turntable mechanism, the turntable mechanism is mounted on the upper adjustment mechanism, and the upper adjustment mechanism is mounted on the lower adjustment mechanism. This invention uses the alignment module to check whether the beam is aligned, the adjustment module to adjust the attitude of the optical elements, and the combination of the alignment module and the adjustment module to achieve precise assembly and positioning of the measurement optical path.

Description

Technical Field

[0001] This invention relates to the field of precision optics, and in particular to a multi-degree-of-freedom beam alignment system and method. Background Technology

[0002] With the development of the semiconductor industry, chip integration is becoming increasingly higher, which has driven the transformation of corresponding processing and testing equipment. Precision optical methods are increasingly used in many equipment and instruments. Factors such as the installation position accuracy of optical components, the accuracy of automatic adjustment devices, and structural stability will affect the final overall performance of the optical path and directly determine the accuracy of the precision measurement of optical components.

[0003] The measurement of parameters such as transmittance and reflectance of optical elements is mostly done at fixed angles. However, for optical parameters that need to be measured continuously at different angles, a turntable is usually used to rotate the optical element continuously. In the process of setting up the measurement optical path, traditional, multi-round, iterative assembly and adjustment methods are usually used, which are time-consuming, have low accuracy, and cannot control the accuracy.

[0004] To achieve high-precision spatial positioning of optical components in the measurement optical path, optimization and improvement are typically achieved in two aspects. First, the dimensional accuracy of the components and mounting reference surfaces themselves is improved. This inevitably increases manufacturing costs, and for excessively high positional accuracy requirements, the manufacturing process is simply not feasible. Second, position adjustment components are used. However, directly using commercially available adjustment components through multi-layer stacking for alignment inevitably results in an overly large overall structure, an excessively high optical path center, and optical path instability. Summary of the Invention

[0005] The primary objective of this invention is to provide a multi-degree-of-freedom beam alignment and adjustment system that can solve the problem of rapid and accurate assembly and positioning of optical components.

[0006] The second objective of this invention is to provide a method for aligning and adjusting a multi-degree-of-freedom beam.

[0007] This invention provides a multi-degree-of-freedom beam alignment system, comprising:

[0008] A light source, which is used to emit a light beam;

[0009] The alignment module is used to check whether the beam is aligned. The alignment module has a rectangular frame structure, and both the left and right sides of the alignment module are provided with circular holes for the beam to pass through. The left side of the alignment module is positioned directly opposite the light source.

[0010] An adjustment module is provided for adjusting the attitude of an optical element, which can extend into the alignment module. The adjustment module includes a clamping assembly for holding the optical element, a turntable mechanism for rotating the optical element 360 degrees, an upper adjustment mechanism for adjusting the pitch angle of the optical element, and a lower adjustment mechanism for adjusting the yaw angle of the optical element. The clamping assembly is mounted on the turntable mechanism, the turntable mechanism is mounted on the upper adjustment mechanism, and the upper adjustment mechanism is mounted on the lower adjustment mechanism.

[0011] According to the present invention, a multi-degree-of-freedom beam alignment adjustment system is provided, wherein the alignment module includes a base, a left side plate, a right side plate, and a top plate. The base, the left side plate, the top plate, and the right side plate are arranged to form a rectangular frame structure. The circular hole on the left side plate is designated as the left circular hole, and the circular hole on the right side plate is designated as the right circular hole. The left circular hole and the right circular hole are arranged opposite each other.

[0012] According to the present invention, a multi-degree-of-freedom beam alignment adjustment system is provided on the left side plate, wherein an upper vertical slit and a lower vertical slit are respectively provided. The upper vertical slit and the lower vertical slit are located on the upper and lower sides of the left circular hole, respectively, and the upper vertical slit, the left circular hole and the lower vertical slit are all on the same vertical extension line.

[0013] According to the present invention, a multi-degree-of-freedom beam alignment adjustment system is provided, wherein an observation port is provided on the top plate, a transverse slit is provided on the upper surface of the base, and a connecting lug is provided on the bottom of the base.

[0014] According to the present invention, a multi-degree-of-freedom beam alignment and adjustment system is provided, wherein the clamping assembly includes a fixed plate and a pressure plate arranged in parallel, and a clamping gap is provided between the fixed plate and the pressure plate, and the optical element is clamped in the clamping gap; the pressure plate is provided with a plurality of threaded holes and fastening screws that are threadedly engaged with the threaded holes, the plurality of threaded holes being arranged sequentially at intervals along the length direction of the pressure plate, and the fastening screws being able to pass through the threaded holes and abut against the optical element.

[0015] According to the present invention, a multi-degree-of-freedom beam alignment adjustment system is provided, wherein the turntable mechanism includes a turntable and a turntable mounting plate, the clamping assembly is fixedly mounted on the turntable via the clamping mounting plate, and the turntable is rotatably mounted on the turntable mounting plate.

[0016] According to the present invention, a multi-degree-of-freedom beam alignment adjustment system includes an upper adjustment mechanism comprising a cover plate, an arc-shaped support block, and a bottom groove plate. The bottom surface of the arc-shaped support block is arc-shaped, and an upwardly protruding support platform is provided on the arc-shaped support block. Arc-shaped grooves are provided on the left and right sides of the support platform. The cover plate has an opening adapted to the support platform, and arc-shaped plates adapted to the arc-shaped grooves are provided on the left and right sides of the cover plate. The cover plate is fastened to the arc-shaped support block so that the support platform extends outside the opening. The two arc-shaped plates are correspondingly fitted into the two arc-shaped grooves. The bottom groove plate has an arc-shaped groove adapted to the arc-shaped surface, and the arc-shaped support block is fitted into the arc-shaped groove through the arc-shaped surface.

[0017] According to the present invention, a multi-degree-of-freedom beam alignment adjustment system includes a lower adjustment mechanism comprising a turntable and a base plate. A central pin is provided at the center of the base plate, and an adjusting column is provided on the right side of the base plate. The turntable has a central hole that mates with the central pin, through which the central pin passes. An arc-shaped groove that mates with the adjusting column is provided on the right side of the turntable, through which the adjusting column passes. A counterweight is provided on the left side of the turntable, and two screw mounting plates are provided on the right side of the turntable. The adjusting column is located between the two screw mounting plates, and each screw mounting plate is threaded with an adjusting screw, each adjusting screw being able to abut against the adjusting column. Two arc-shaped holes are provided on both the left and right sides of the turntable, and bolt holes corresponding to the arc-shaped holes are provided on the base plate. Each corresponding arc-shaped hole and bolt hole are connected by an adjusting bolt.

[0018] According to the present invention, a multi-degree-of-freedom beam alignment and adjustment system is provided, wherein the turntable mounting plate is connected to the bearing platform via a first connector, and the bottom groove plate is connected to the turntable via a second connector.

[0019] This invention also provides a multi-degree-of-freedom beam alignment adjustment method, employing the aforementioned multi-degree-of-freedom beam alignment adjustment system, specifically including:

[0020] Install and adjust the light source and alignment module so that the light beam of the light source passes through the left and right circular holes on the alignment module to determine the relative position of the light source and the alignment module;

[0021] Zero the turntable mechanism of the adjustment module until the reflected light is observed to return and pass through the left circular hole, so that the interface of the optical element is completely perpendicular to the beam.

[0022] Rotate the turntable of the turntable mechanism 360 degrees and check whether it is aligned by passing through the upper vertical slit, lower vertical slit and horizontal slit of the alignment module;

[0023] If the reflected beam does not completely fall into the upper vertical slit, the lower vertical slit, and the horizontal slit during the 360-degree rotation of the turntable, the pitch angle and yaw angle are adjusted by the upper and lower adjustment mechanisms of the adjustment module, respectively, until the reflected beam completely falls into the upper vertical slit, the lower vertical slit, and the horizontal slit during the 360-degree rotation of the turntable.

[0024] The multi-degree-of-freedom beam alignment and adjustment system provided by this invention uses a rectangular frame structure for the alignment module, with circular holes on its left and right side plates. By observing whether the beam emitted by the light source passes through the two circular holes on the alignment module, the precise position of the light source and the alignment module can be determined. The alignment module can be used to verify whether the beam passes perpendicularly through the theoretical optical element interface and to verify the perpendicularity between the starting zero position of the turntable mechanism and the beam. Since the adjustment module includes a clamping assembly, a turntable mechanism, an upper adjustment mechanism, and a lower adjustment mechanism, it can achieve stable clamping of the optical element, 360-degree rotation adjustment of the optical element, and adjustment of the pitch and yaw angles of the optical element. Therefore, the multi-degree-of-freedom beam alignment and adjustment system of this invention verifies beam alignment through the alignment module, adjusts the attitude of the optical element through the adjustment module, and achieves precise assembly and positioning of the measurement optical path through the combination of the alignment module and the adjustment module. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the overall assembly structure of the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0027] Figure 2 This is a schematic diagram of the split structure of the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0028] Figure 3 This is a schematic diagram of the alignment module in the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0029] Figure 4 This is a schematic diagram of the adjustment module in the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0030] Figure 5 This is a schematic diagram of the assembly of the upper adjustment mechanism in the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0031] Figure 6 This is a schematic diagram of the split structure of the upper adjustment mechanism in the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0032] Figure 7 This is a schematic diagram of the assembly of the lower adjustment mechanism in the multi-degree-of-freedom beam alignment adjustment system of the present invention;

[0033] Figure 8 This is a schematic diagram of the split structure of the lower adjustment mechanism in the multi-degree-of-freedom beam alignment adjustment system of the present invention.

[0034] Explanation of reference numerals in the attached figures:

[0035] 1. Light source;

[0036] 2. Alignment module; 201. Left round hole; 202. Right round hole; 203. Horizontal slit; 204. Lower vertical slit; 205. Upper vertical slit; 206. Observation port; 207. Connecting lug;

[0037] 3. Adjustment module; 301. Optical component; 302. Fixing plate; 303. Pressure plate; 304. Turntable; 305. Turntable mounting plate;

[0038] 306. Upper adjustment mechanism; 3061. Cover plate; 3062. Arc-shaped bearing block; 3063. Bottom groove plate; 3061A. Arc-shaped plate; 3061B. Elongated hole; 3062A. Bearing platform; 3062B. Arc-shaped groove; 3063A. Arc-shaped recess; 3063B. Fixing screw hole;

[0039] 307. Lower adjustment mechanism; 3071. Turntable; 3072. Base plate; 3073. First adjusting bolt; 3074. Second adjusting bolt; 3075. Third adjusting bolt; 3076. Fourth adjusting bolt; 3077. Counterweight; 3078. Adjusting column; 3079. First adjusting screw; 3080. Second adjusting screw; 3081. First screw mounting plate; 3082. Second screw mounting plate;

[0040] 308. Fastening screw; 309. Clamping mounting plate. Detailed Implementation

[0041] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0043] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. Furthermore, the terms "installed," "connected," and "linked" should be interpreted broadly; for example, they may refer to a fixed connection, a detachable connection, or an integral connection; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; and they may refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0044] like Figures 1 to 8 As shown, the multi-degree-of-freedom beam alignment and adjustment system of this invention includes a light source 1, an alignment module 2, and an adjustment module 3, wherein the light source 1 is used to emit a beam.

[0045] The alignment module 2 is used to check whether the beam is aligned. The alignment module 2 has a rectangular frame structure. The left side plate of the alignment module 2 is set facing the light source 1. Both the left and right side plates of the alignment module 2 are provided with circular holes for the beam to pass through.

[0046] The adjustment module 3 is used to adjust the posture of the optical element 301, which can extend into the rectangular frame of the alignment module 2. The adjustment module 3 includes a clamping assembly for holding the optical element 301, a turntable mechanism for driving the optical element 301 to rotate 360 ​​degrees, an upper adjustment mechanism 306 for adjusting the pitch angle of the optical element 301, and a lower adjustment mechanism 307 for adjusting the yaw angle of the optical element 301. The clamping assembly is mounted on the turntable mechanism, the turntable mechanism is mounted on the upper adjustment mechanism 306, and the upper adjustment mechanism 306 is mounted on the lower adjustment mechanism 307.

[0047] Since the alignment module 2 is set as a rectangular frame structure and round holes are set on the left and right side plates of the alignment module 2, the precise position of the light source 1 and the alignment module 2 can be determined by observing whether the light beam emitted by the light source 1 passes through the two round holes on the alignment module 2. The alignment module 2 can be used to check whether the light beam passes perpendicularly through the theoretical optical element interface and to check the perpendicularity between the starting zero position of the turntable mechanism and the light beam.

[0048] Since the adjustment module 3 is equipped with a clamping assembly, a turntable mechanism, an upper adjustment mechanism 306 and a lower adjustment mechanism 307, it can achieve stable clamping of the optical element 301, 360-degree rotation adjustment of the optical element 301, and adjustment of the pitch and yaw angles of the optical element 301.

[0049] Therefore, the multi-degree-of-freedom beam alignment and adjustment system of this invention uses alignment module 2 to check whether the beam is aligned, and adjustment module 3 to adjust the attitude of optical element 301. The combination of alignment module 2 and adjustment module 3 achieves precise assembly and positioning of the measurement optical path.

[0050] The multi-degree-of-freedom beam alignment adjustment system of this invention is suitable for scenarios with high requirements for optical device positioning accuracy and beam pointing accuracy, such as precision measurement optical paths and semiconductor equipment. It is particularly suitable for precision measurement optical path devices, and especially for high-precision adjustment of the perpendicularity of optical components.

[0051] In some embodiments of the present invention, the positive module 2 includes a base, a left side plate, a right side plate, and a top plate. The base, left side plate, top plate, and right side plate enclose a rectangular frame structure. The circular hole on the left side plate is designated as the left circular hole 201, and the circular hole on the right side plate is designated as the right circular hole 202. The left circular hole 201 and the right circular hole 202 are positioned opposite each other. A horizontal slit 203 is provided on the upper surface of the base. An upper vertical slit 205 and a lower vertical slit 204 are provided on the left side plate. The upper vertical slit 205 and the lower vertical slit 204 are located on the upper and lower sides of the left circular hole 201, respectively, and the upper vertical slit 205, the left circular hole 201, and the lower vertical slit 204 are all on the same vertical extension line. An observation port 206 is provided on the top plate for easy beam observation.

[0052] Because the alignment module 2 is set as the rectangular frame structure described above, it is convenient to process structures such as the left circular hole 201, the right circular hole 202, the horizontal slit 203, the lower vertical slit 204, the upper vertical slit 205, and the observation port 206 on the alignment module 2, thereby improving the processing accuracy and reducing the processing and manufacturing difficulty.

[0053] In addition, a connecting ear 207 is provided at the bottom of the base, which can be fixedly connected to an optical platform, etc.

[0054] In some embodiments of the present invention, the clamping assembly includes a fixed plate 302 and a pressure plate 303 arranged in parallel, with a clamping gap between the fixed plate 302 and the pressure plate 303, and the optical element 301 is clamped in the clamping gap. The pressure plate 303 has multiple threaded holes and fastening screws 308 that thread into the threaded holes. The multiple threaded holes are arranged sequentially at intervals along the length of the pressure plate 303, and the fastening screws 308 can pass through the threaded holes and abut against the optical element 301. That is, when the optical element 301 needs to be clamped and fixed by the clamping assembly, the fastening screws 308 are first loosened, then one side of the optical element 301 is inserted into the clamping gap, and then the fastening screws 308 are tightened until the end of the fastening screws 308 is in close contact with the optical element 301.

[0055] In some embodiments of the present invention, the turntable mechanism includes a turntable 304 and a turntable mounting plate 305. The clamping assembly is fixedly mounted on the turntable 304 via the clamping mounting plate 309. The turntable 304 is rotatably mounted on the turntable mounting plate 305, so that the rotation of the turntable 304 can drive the optical element 301 clamped on the clamping assembly to rotate synchronously.

[0056] In some embodiments of the present invention, the upper adjustment mechanism 306 includes a cover plate 3061, an arc-shaped support block 3062, and a bottom groove plate 3063. The bottom surface of the arc-shaped support block 3062 is arc-shaped, and an upwardly protruding support platform 3062A is provided on the arc-shaped support block 3062. Arc-shaped grooves 3062B are respectively provided on the left and right sides of the support platform 3062A. The cover plate 3061 has an opening adapted to the support platform 3062A. Arc-shaped plates 3061A adapted to the arc-shaped grooves 3062B are respectively provided on the left and right sides of the cover plate 3061. The cover plate 3061 is fastened to the arc-shaped support block 3062, so that the support platform 3062A extends outside the opening of the cover plate 3061, and the two arc-shaped plates 3061A are respectively fitted into the two arc-shaped grooves 3062B. The bottom groove plate 3063 is provided with an arc-shaped groove 3063A that matches the arc-shaped surface of the arc-shaped support block 3062. The arc-shaped support block 3062 fits into the arc-shaped groove 3063A through its arc-shaped surface. When the cover plate 3061, the arc-shaped support block 3062 and the bottom groove plate 3063 are assembled together, the cover plate 3061 and the bottom groove plate 3063 do not directly contact each other. The pitch angle between the arc-shaped support block 3062 and the bottom groove plate 3063 is adjusted through the embedded arc surface, which not only greatly improves the structural rigidity and increases the stability, but also saves space.

[0057] The cover plate 3061 has multiple elongated holes 3061B on its left and right sides, and the bottom groove plate 3063 has multiple fixing screw holes 3063B corresponding to the elongated holes 3061B. The corresponding elongated holes 3061B and fixing screw holes 3063B are connected by bolts. That is, before adjusting the pitch angle, the bolts are loosened. After the pitch angle is adjusted to the correct position, the cover plate 3061 and the bottom groove plate 3063 are fixed with bolts. Thus, the arc-shaped bearing block 3062 is fixed by fixing the cover plate 3061 and the bottom groove plate 3063.

[0058] The turntable mounting plate 305 and the load-bearing platform 3062A are connected by a first connector, which can be a screw.

[0059] In some embodiments of the present invention, the lower adjustment mechanism 307 includes a turntable 3071 and a base plate 3072. A central pin is provided at the center of the base plate 3072, and an adjusting column 3078 is provided on the right side of the base plate 3072. A central hole is provided on the turntable 3071 to cooperate with the central pin, through which the central pin passes, and the turntable 3071 rotates around the central pin as its axis of rotation. An arc-shaped groove is provided on the right side of the turntable 3071 to cooperate with the adjusting column 3078, through which the adjusting column 3078 passes. A counterweight 3077 is provided on the left side of the turntable 3071, and a first screw mounting plate 3081 and a second screw mounting plate 3082 are provided on the right side of the turntable 3071. An adjusting column 3078 is located between the first screw mounting plate 3081 and the second screw mounting plate 3082, and a first adjusting screw 3079 and a second adjusting screw 3080 are threadedly connected to the first screw mounting plate 3081 and the second screw mounting plate 3082 respectively. Each first adjusting screw 3079 and the second adjusting screw 3080 can abut against the two sides of the adjusting column 3078 respectively.

[0060] When adjusting the swing angle, first loosen the first adjusting screw 3079, then tighten the second adjusting screw 3080 while maintaining contact with the adjusting column 3078. This will cause the turntable 3071 to rotate clockwise, thus adjusting the clockwise angle of the turntable 3071. Alternatively, first loosen the second adjusting screw 3080, then tighten the first adjusting screw 3079 while maintaining contact with the adjusting column 3078. This will cause the turntable 3071 to rotate counterclockwise, thus adjusting the counterclockwise angle of the turntable 3071.

[0061] The turntable 3071 has two arc-shaped holes on each of its left and right sides. The base plate 3072 has bolt holes corresponding to these arc-shaped holes. The corresponding arc-shaped holes and bolt holes are connected by adjusting bolts: bolt 3073 (first adjusting bolt), bolt 3074 (second adjusting bolt), bolt 3075 (third adjusting bolt), and bolt 3076 (fourth adjusting bolt). Before adjusting the swing angle, all adjusting bolts must be loosened. After the turntable 3071's angle is adjusted to the correct position, the adjusting bolts are tightened to complete the swing angle adjustment. A counterweight 3077 is used to balance the mass of the turntable 3071 on both sides.

[0062] The bottom groove plate 3063 and the turntable 3071 are connected by a second connector, which can be a screw.

[0063] The specific method for performing multi-degree-of-freedom beam alignment adjustment using the multi-degree-of-freedom beam alignment adjustment system of this invention is as follows:

[0064] First, install and adjust the light source 1 and the alignment module 2 so that the beam of light source 1 passes through the left circular hole 201 and the right circular hole 202 on the alignment module 2 to determine the relative position of light source 1 and alignment module 2.

[0065] Then, the turntable 304 of the adjustment module 3 is zeroed. Theoretically, the optical element interface should be completely perpendicular to the beam at this time. Observe whether the reflected light returns and passes through the left circular hole 201. If it does not pass through the left circular hole 201, adjust the installation angle of the turntable 304 until the reflected light returns and passes through the left circular hole 201, so as to ensure that the optical element interface is vertical when the starting angle position is reached.

[0066] Then rotate the turntable 304 360 degrees and check whether it is aligned by aligning the upper vertical slit 205, lower vertical slit 204 and horizontal slit 203 of the alignment module 2.

[0067] If the reflected beam does not completely fall into the upper vertical slit 205, lower vertical slit 204, and horizontal slit 203 during the 360-degree rotation of the turntable, the pitch angle and yaw angle are adjusted by the upper adjustment mechanism 306 and lower adjustment mechanism 307 of the adjustment module 3, respectively, until the reflected beam completely falls into the upper vertical slit 205, lower vertical slit 204, and horizontal slit 203 during the 360-degree rotation of the turntable. At this time, it is proven that the beam is precisely aligned with the optical element and the optical path adjustment is completed.

[0068] Specifically, the alignment accuracy can be improved by reducing the beam diameter and adding a pinhole aperture between the light source 1 and the alignment module 2. In this embodiment, the widths of the upper vertical slit 205, lower vertical slit 204, and horizontal slit 203 can be determined based on the beam diameter and are of the same size as the beam diameter. The lengths of the upper vertical slit 205, lower vertical slit 204, and horizontal slit 203 determine the alignment accuracy, and the slit lengths are determined according to different measurement accuracy requirements. The alignment module 2 is made of a material with a low coefficient of thermal expansion, such as Invar, which can further improve the dimensional stability of the alignment module 2.

[0069] Specifically, the typical application scenarios of the multi-degree-of-freedom beam alignment adjustment system of this invention are as follows:

[0070] In semiconductor-related applications, the light source is typically an excimer light source at 248nm or 193nm. The beam has a very small divergence angle, approximating parallel light, and the spot size is usually 0.5mm (minimum not less than 0.2mm, as smaller ones are inconvenient for observation). The diameters of the two circular holes are set to 0.5mm, the widths of the upper vertical slit 205, lower vertical slit 204, and horizontal slit 203 are set to 0.5mm, the length of the horizontal slit 203 is set to 150mm, and the lengths of the upper vertical slit 205 and lower vertical slit 204 are both set to 70mm. The overall height of the two vertical slits joined together from top to bottom is also 150mm.

[0071] Alignment accuracy: Theoretically, the light spot is aligned when it falls completely into the slit at both ends after rotating one full turn on the turntable. However, the observation may produce an error of delta≤0.5mm / 2 (that is, when the light spot overlaps halfway at the ends of the slit, it is a case that can be observed and distinguished). The resulting deviation angle Δerr≤(0.5 / 2) / (150 / 2)rad≈0.19 degrees.

[0072] Maximum accuracy estimation: Based on the smallest observable spot size of 0.2mm, if the slit length is increased to 450mm, the adjustment accuracy can be improved to Δerr≤0.2 / (450 / 2)rad≈0.0509 degrees. Therefore, under normal circumstances, the adjustable accuracy of the alignment adjustment system in this embodiment is about 0.05 degrees. Any higher accuracy would result in the slit structure being too large or the spot size being too small, which would cause inconvenience to the adjustment.

[0073] By observing whether there are light spots or partial light spots around the circular aperture, it can be determined whether the returned light passes through the left circular aperture. After the beam is aligned, alignment module 2 can be removed, and a power meter or other detector can be installed on the right side of the optical element. The turntable starts moving from zero degrees and collects data at fixed intervals, usually rotating 0 to 60 degrees. Data is continuously collected and recorded to obtain a change curve.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-degree-of-freedom beam alignment and adjustment system, characterized in that, include: A light source, which is used to emit a light beam; The alignment module is used to check whether the beam is aligned. The alignment module has a rectangular frame structure, and both the left and right sides of the alignment module are provided with circular holes for the beam to pass through. The left side of the alignment module is positioned directly opposite the light source. An adjustment module is provided for adjusting the attitude of an optical element, which can extend into the alignment module. The adjustment module includes a clamping assembly for holding the optical element, a turntable mechanism for rotating the optical element 360 degrees, an upper adjustment mechanism for adjusting the pitch angle of the optical element, and a lower adjustment mechanism for adjusting the yaw angle of the optical element. The clamping assembly is mounted on the turntable mechanism, the turntable mechanism is mounted on the upper adjustment mechanism, and the upper adjustment mechanism is mounted on the lower adjustment mechanism. The alignment module includes a base, a left side plate, a right side plate, and a top plate. The base, the left side plate, the top plate, and the right side plate are arranged together to form a rectangular frame structure. The circular hole on the left side plate is designated as the left circular hole, and the circular hole on the right side plate is designated as the right circular hole. The left circular hole and the right circular hole are positioned opposite each other. An upper vertical slit and a lower vertical slit are respectively provided on the left side plate. The upper vertical slit and the lower vertical slit are located on the upper and lower sides of the left circular hole, respectively, and the upper vertical slit, the left circular hole and the lower vertical slit are all on the same vertical extension line. An observation port is provided on the top plate, a transverse slit is provided on the upper surface of the base, and a connecting lug is provided at the bottom of the base.

2. The multi-degree-of-freedom beam alignment system according to claim 1, characterized in that, The clamping assembly includes a fixed plate and a pressure plate arranged in parallel, with a clamping gap between the fixed plate and the pressure plate, and the optical element is clamped in the clamping gap; the pressure plate has a plurality of threaded holes and fastening screws that are threadedly engaged with the threaded holes, the plurality of threaded holes being arranged sequentially at intervals along the length direction of the pressure plate, and the fastening screws being able to pass through the threaded holes and abut against the optical element.

3. The multi-degree-of-freedom beam alignment system according to claim 2, characterized in that, The turntable mechanism includes a turntable and a turntable mounting plate. The clamping assembly is fixedly mounted on the turntable via the clamping mounting plate, and the turntable is rotatably mounted on the turntable mounting plate.

4. The multi-degree-of-freedom beam alignment system according to claim 3, characterized in that, The upper adjustment mechanism includes a cover plate, an arc-shaped support block, and a bottom groove plate. The bottom surface of the arc-shaped support block is arc-shaped, and the arc-shaped support block has an upwardly protruding support platform. Arc-shaped grooves are provided on the left and right sides of the support platform. The cover plate has an opening adapted to the support platform. Arc-shaped plates adapted to the arc-shaped grooves are provided on the left and right sides of the cover plate. The cover plate is fastened to the arc-shaped support block so that the support platform extends outside the opening. The two arc-shaped plates are correspondingly fitted into the two arc-shaped grooves. The bottom groove plate has an arc-shaped groove adapted to the arc-shaped surface. The arc-shaped support block is fitted into the arc-shaped groove through the arc-shaped surface.

5. The multi-degree-of-freedom beam alignment system according to claim 4, characterized in that, The lower adjustment mechanism includes a turntable and a base plate. A central pin is located at the center of the base plate, and an adjusting column is located on the right side of the base plate. The turntable has a central hole that mates with the central pin, through which the central pin passes. The right side of the turntable has an arc-shaped groove that mates with the adjusting column, through which the adjusting column passes. A counterweight is located on the left side of the turntable, and two screw mounting plates are located on the right side of the turntable. The adjusting column is located between the two screw mounting plates, and each screw mounting plate is threaded with an adjusting screw, which abuts against the adjusting column. Two arc-shaped holes are located on both the left and right sides of the turntable, and bolt holes corresponding to the arc-shaped holes are located on the base plate. Each corresponding arc-shaped hole and bolt hole is connected by an adjusting bolt.

6. The multi-degree-of-freedom beam alignment system according to claim 5, characterized in that, The turntable mounting plate is connected to the bearing platform via a first connector, and the bottom groove plate is connected to the turntable via a second connector.

7. A method for aligning and adjusting a multi-degree-of-freedom beam, characterized in that, The multi-degree-of-freedom beam alignment system as described in any one of claims 1 to 6 specifically includes: Install and adjust the light source and alignment module so that the light beam of the light source passes through the left and right circular holes on the alignment module to determine the relative position of the light source and the alignment module; Zero the turntable mechanism of the adjustment module until the reflected light is observed to return and pass through the left circular hole, so that the interface of the optical element is completely perpendicular to the beam. Rotate the turntable of the turntable mechanism 360 degrees and check whether it is aligned by passing through the upper vertical slit, lower vertical slit and horizontal slit of the alignment module; If the reflected beam does not completely fall into the upper vertical slit, the lower vertical slit, and the horizontal slit during the 360-degree rotation of the turntable, the pitch angle and yaw angle are adjusted by the upper and lower adjustment mechanisms of the adjustment module, respectively, until the reflected beam completely falls into the upper vertical slit, the lower vertical slit, and the horizontal slit during the 360-degree rotation of the turntable.

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