Constraint scheme based on equipment control production information

Abstract

The invention discloses a constraint scheme based on equipment management and control production information, and relates to the technical field of industrial equipment management and control. The method comprises the steps of setting constraints by means of By Eqp, by means of By Load Port or by means of By Chamber, selecting a machine, Load Port or Chamber which need to be set, setting conditions and configuring the constraints; according to the method and the system, the constraint is set through the By Eqp, the By Load Port or the By Chamber, the dispatching rule of the Lot on a machine table and the setting constraint of the three schemes can be freely controlled, so that the Load Port, the equipment and the Chamber do not influence each other, when a factory enters a full-automatic mode, the production process is ensured to be orderly carried out, meanwhile, the production process can be effectively scheduled and managed, and the production efficiency and the product quality are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of industrial equipment control, and in particular to a constraint scheme based on equipment control production information. Background Art

[0002] Factory equipment control is an indispensable management tool in modern manufacturing. Its core advantages are to improve equipment utilization, reduce maintenance costs, and improve production efficiency. By managing the entire life cycle of factory equipment, factory equipment control can significantly reduce equipment failure rates and extend equipment life, thereby ensuring the continuity and stability of production. Specifically, factory equipment control can monitor equipment status in real time, automatically warn of potential failures, and support intelligent scheduling and maintenance management, so that factories can maintain efficient operation during the production process. In terms of improving equipment utilization, factory equipment control can minimize the idle time of equipment during the production process by optimizing equipment scheduling and usage plans, thereby greatly improving the actual utilization of equipment.

[0003] Work dispatching, that is, the function of the factory equipment control system to select and sort the available workpieces for processing in various processing centers. The dispatching rules include first-come-first-served, earliest delivery date, earliest job delivery date, shortest processing time, key ratio, and key ratio;

[0004] When the factory is producing, different lots have different equipment, load ports and chambers. Some lots can only be assigned to specific machines, and some lots can only be assigned to specific chambers. When the factory enters the fully automatic mode, the lot cannot be assigned to the planned equipment, so the production efficiency and product quality cannot be ensured.

[0005] In response to the above problems, the inventors proposed a constraint solution based on equipment control production information to solve the above problems. Summary of the invention

[0006] In order to solve the above-mentioned problem, the purpose of the present invention is to provide a constraint solution based on equipment control production information.

[0007] In order to solve the above technical problems, the present invention adopts the following technical solutions: a constraint solution based on equipment control production information, including the following methods:

[0008] By EqpSet constraints

[0009] S1: This setting is for the host machine. Select the machine you want to set.

[0010] S2. Set conditions, including:

[0011] 1: ProductName: product name;

[0012] 2. Recipe: recipe;

[0013] 3: Stage Name: stage name;

[0014] 4: Lot Id: batch number;

[0015] 5: PlanName: plan name;

[0016] 6: Reticle Id: Reticle name;

[0017] 7: ...and so on Lot's basic information;

[0018] 8: Daily Wafer Count: The number of wafers that the machine runs every day;

[0019] 9: TotalWaferCount: the total number of wafers run by the machine;

[0020] 10: The last digit of the Lot ID;

[0021] S3. After setting, configure the Action of the constraint:

[0022] 1: Trackable: Indicates that the machine only allows the lot assignments that meet the above setting conditions;

[0023] 2: Non-Trackable: Indicates that all machines can be assigned work except for the lot set in the above conditions;

[0024] S4, Configuration start time: indicates when the constraint takes effect;

[0025] S5. Configuration expiration time: indicates when the constraint becomes invalid.

[0026] Preferably, By Load Port sets the constraint

[0027] S1. This setting is for the device's LoadPort. After selecting the device, select LoadPort.

[0028] S2. Set conditions, including:

[0029] 1: ProductName: product name;

[0030] 2. Recipe: recipe;

[0031] 3: Stage Name: stage name;

[0032] 4: Lot Id: batch number;

[0033] 5: PlanName: plan name;

[0034] 6: Reticle Id: Reticle name;

[0035] 7: ...and so on Lot's basic information;

[0036] 8: Daily Wafer Count: The number of wafers that the machine runs every day;

[0037] 9: TotalWaferCount: the total number of wafers run by the machine;

[0038] 10: The last digit of the Lot ID;

[0039] S3. After setting, configure the Action of the constraint:

[0040] 1: Trackable: Indicates that the Load Port of the device only allows the Lots with the above setting conditions to be dispatched;

[0041] 2: Non-Trackable: Indicates that all LoadPorts of this device can be assigned tasks except the Lots in the above setting conditions;

[0042] S4, Configuration start time: indicates when the constraint takes effect;

[0043] S5. Configuration expiration time: indicates when the constraint becomes invalid.

[0044] Preferably, By Chamber sets constraints

[0045] S1. This setting is for the Chamber in the device. After selecting the device, you need to select the corresponding Chamber.

[0046] S2. Set conditions, including:

[0047] 1: ProductName: product name;

[0048] 2. Recipe: recipe;

[0049] 3: Stage Name: stage name;

[0050] 4: Lot Id: batch number;

[0051] 5: PlanName: plan name;

[0052] 6: Reticle Id: Reticle name;

[0053] 7: ...and so on Lot's basic information;

[0054] 8: Daily Wafer Count: The number of wafers that the machine runs every day;

[0055] 9: TotalWaferCount: the total number of wafers run by the machine;

[0056] 10: The last digit of the Lot ID;

[0057] S3. After setting, configure the Action of the constraint:

[0058] 1: Trackable: Indicates that the Chamber of this device only allows the lot with the above setting conditions to be assigned;

[0059] 2: Non-Trackable: Indicates that all Chambers of this equipment can be assigned work except for the Lots of the above setting conditions;

[0060] S4, Configuration start time: indicates when the constraint takes effect;

[0061] S5. Configuration expiration time: indicates when the constraint becomes invalid.

[0062] Compared with the prior art, the present invention has the following beneficial effects:

[0063] In the present invention, by setting constraints by By Eqp, By LoadPort or By Chamber, the rules for assigning lots on the machine can be freely controlled, and the setting constraints of the three schemes can make the Load Port, equipment and Chamber not affect each other. When the factory enters the full-automatic mode, the production process is ensured to proceed in an orderly manner. At the same time, the production process can be effectively scheduled and managed to ensure production efficiency and product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0065] Figure 1 This is a schematic diagram of the first embodiment of the present invention.

[0066] Figure 2This is a schematic diagram of the second embodiment of the present invention.

[0067] Figure 3 This is a schematic diagram of the third embodiment of the present invention. DETAILED DESCRIPTION

[0068] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0069] Embodiment 1: Figure 1 As shown, the present invention provides a constraint solution based on equipment control production information, including the following methods:

[0070] By EqpSet constraints

[0071] S1: This setting is for the host machine. Select the machine you want to set.

[0072] S2. Set conditions, including:

[0073] 1: ProductName: product name;

[0074] 2. Recipe: recipe;

[0075] 3: Stage Name: stage name;

[0076] 4: Lot Id: batch number;

[0077] 5: PlanName: plan name;

[0078] 6: Reticle Id: Reticle name;

[0079] 7: ...and so on Lot's basic information;

[0080] 8: Daily Wafer Count: The number of wafers that the machine runs every day;

[0081] 9: TotalWaferCount: the total number of wafers run by the machine;

[0082] 10: The last digit of the Lot ID;

[0083] S3. After setting, configure the Action of the constraint:

[0084] 1: Trackable: Indicates that the machine only allows the lot assignments that meet the above setting conditions;

[0085] 2: Non-Trackable: Indicates that all machines can be assigned work except for the lot set in the above conditions;

[0086] S4, Configuration start time: indicates when the constraint takes effect;

[0087] S5. Configuration expiration time: indicates when the constraint becomes invalid;

[0088] Multiple constraints can be configured on the same machine. The operating rules are as follows:

[0089] 1: For multiple Trackable constraints, a lot that meets only one constraint is allowed to be assigned to the machine. If all constraints are not met, the lot is blocked and is not allowed to be assigned to the machine.

[0090] 2: For multiple non-trackable constraints, if one of them meets the constraint condition, the lot is not allowed to be assigned to the machine. Only when the lot does not meet all the set constraints can it be assigned;

[0091] 3: When Trackable and Non-Trackable are set at the same time, Non-Trackable has a higher priority than Trackable. As long as one of the Non-Trackable constraints meets the basic information of the Lot, work is not allowed to be dispatched. When all are not met, the Trackable constraints are checked, and only when one of the Trackable constraints meets the basic information of the Lot, the Lot is allowed to be dispatched on the machine.

[0092] Embodiment 2: Figure 2 As shown, the present invention provides a constraint solution based on equipment control production information, including the following methods:

[0093] By Load Port Setting Constraints

[0094] S1. This setting is for the device's LoadPort. After selecting the device, select LoadPort.

[0095] S2. Set conditions, including:

[0096] 1: ProductName: product name;

[0097] 2. Recipe: recipe;

[0098] 3: Stage Name: stage name;

[0099] 4: Lot Id: batch number;

[0100] 5: PlanName: plan name;

[0101] 6: Reticle Id: Reticle name;

[0102] 7: ...and so on Lot's basic information;

[0103] 8: Daily Wafer Count: The number of wafers that the machine runs every day;

[0104] 9: TotalWaferCount: the total number of wafers run by the machine;

[0105] 10: The last digit of the Lot ID;

[0106] S3. After setting, configure the Action of the constraint:

[0107] 1: Trackable: Indicates that the Load Port of the device only allows the Lots with the above setting conditions to be dispatched;

[0108] 2: Non-Trackable: Indicates that all LoadPorts of this device can be assigned tasks except the Lots in the above setting conditions;

[0109] S4, Configuration start time: indicates when the constraint takes effect;

[0110] S5. Configuration expiration time: indicates when the constraint becomes invalid.

[0111] After the setting is completed, the equipment with the set Load Port will be dispatched according to the above settings, and other Load Ports, equipment and Chambers will not be affected.

[0112] Embodiment 3: Figure 3 As shown, the present invention provides a constraint solution based on equipment control production information, including the following methods:

[0113] By Chamber Set Constraints

[0114] S1. This setting is for the Chamber in the device. After selecting the device, you need to select the corresponding Chamber.

[0115] S2. Set conditions, including:

[0116] 1: ProductName: product name;

[0117] 2. Recipe: recipe;

[0118] 3: Stage Name: stage name;

[0119] 4: Lot Id: batch number;

[0120] 5: PlanName: plan name;

[0121] 6: Reticle Id: Reticle name;

[0122] 7: ...and so on Lot's basic information;

[0123] 8: Daily Wafer Count: The number of wafers that the machine runs every day;

[0124] 9: TotalWaferCount: the total number of wafers run by the machine;

[0125] 10: The last digit of the Lot ID;

[0126] S3. After setting, configure the Action of the constraint:

[0127] 1: Trackable: Indicates that the Chamber of this device only allows the lot with the above setting conditions to be assigned;

[0128] 2: Non-Trackable: Indicates that all Chambers of this equipment can be assigned work except for the Lots of the above setting conditions;

[0129] S4, Configuration start time: indicates when the constraint takes effect;

[0130] S5. Configuration expiration time: indicates when the constraint becomes invalid.

[0131] After the settings are completed, the equipment in the chamber will be assigned according to the above settings, and other chambers, equipment and LoadPort will not be affected.

[0132] Constraint (CSN) operating rules:

[0133] 1. When dispatching a lot, the MES system will obtain all the constraints (CSN) set on the machine;

[0134] 2. First check the load port constraint (CSN), then check the chamber, and finally check the Eqp;

[0135] 3. The check logic is as follows (taking the constraint (CSN) set by By Eqp as an example):

[0136] (1): First, confirm whether there are any Non-Trackable constraints (CSN). If so, check all the Non-Trackable constraints (CSN) set. When a constraint (CSN) condition matches the information of the Lot, the Lot is not allowed to be assigned to the machine. When all the constraints (CSN) conditions do not match the Lot, then check the Trackable constraints (CSN);

[0137] (2): When there is a Trackable constraint (CSN) that satisfies the basic information of the Lot, it means that the Lot is allowed to be assigned to the machine. When all Trackable constraints (CSN) are not satisfied, the Lot is not allowed to be assigned to the machine.

[0138] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A constraint scheme based on equipment control production information, characterized in that: The following methods are included: By Eqp set constraints S1: This setting is for the host machine. Select the machine you want to set. S2. Set conditions, including: 1: Product Name: product name; 2. Recipe: recipe; 3: Stage Name: stage name; 4: Lot Id: batch number; 5: Plan Name: plan name; 6: Reticle Id: Reticle name; 7: ...and so on Lot's basic information; 8: Daily Wafer Count: The number of wafers that the machine runs every day; 9: Total Wafer Count: the total number of wafers run by the machine; 10: The last digit of the Lot ID; S3. After setting, configure the Action of the constraint: 1: Trackable: Indicates that the machine only allows the lot assignments that meet the above setting conditions; 2: Non-Trackable: Indicates that all tasks can be assigned to this machine except the lot set in the above conditions; S4, Configuration start time: indicates when the constraint takes effect; S5. Configuration expiration time: indicates when the constraint becomes invalid.

2. A constraint scheme based on equipment control production information as claimed in claim 1, characterized in that: The following methods are included: By Load Port Setting Constraints S1. This setting is for the device's Load Port. After selecting the device, select the Load Port. S2. Set conditions, including: 1: Product Name: product name; 2. Recipe: recipe; 3: Stage Name: stage name; 4: Lot Id: batch number; 5: Plan Name: plan name; 6: Reticle Id: Reticle name; 7: ...and so on Lot's basic information; 8: Daily Wafer Count: The number of wafers that the machine runs every day; 9: Total Wafer Count: the total number of wafers run by the machine; 10: The last digit of the Lot ID; S3. After setting, configure the Action of the constraint: 1: Trackable: Indicates that the Load Port of the device only allows the Lots with the above setting conditions to be dispatched; 2: Non-Trackable: Indicates that all load ports of the device can be assigned tasks except the lot of the above setting conditions; S4, Configuration start time: indicates when the constraint takes effect; S5. Configuration expiration time: indicates when the constraint becomes invalid.

3. A constraint scheme based on equipment control production information as claimed in claim 1, characterized in that: The following methods are included: By Chamber Set Constraints S1. This setting is for the Chamber in the device. After selecting the device, you need to select the corresponding Chamber. S2. Set conditions, including: 1: Product Name: product name; 2. Recipe: recipe; 3: Stage Name: stage name; 4: Lot Id: batch number; 5: Plan Name: plan name; 6: Reticle Id: Reticle name; 7: ...and so on Lot's basic information; 8: Daily Wafer Count: The number of wafers that the machine runs every day; 9: Total Wafer Count: the total number of wafers run by the machine; 10: The last digit of the Lot ID; S3. After setting, configure the Action of the constraint: 1: Trackable: Indicates that the Chamber of this device only allows the lot with the above setting conditions to be assigned; 2: Non-Trackable: Indicates that except for the lot of the above setting conditions, all other chambers can be assigned work in this chamber. S4, Configuration start time: indicates when the constraint takes effect; S5. Configuration expiration time: indicates when the constraint becomes invalid.

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