Low-temperature rotary sample table

Abstract

The invention relates to the technical field of freezing scanning electron microscopes, in particular to a low-temperature rotating sample table. The device comprises a sample seat, an upper flange, a cold conduction module, a central shaft, a heat insulation seat and a bearing, the upper end of the heat insulation seat is connected with the central shaft, and the cold conduction module is connected with the central shaft through the bearing; the milling flat is arranged on the center shaft, the center shaft is connected with the upper flange through the milling flat, and the upper flange is rotationally connected with the cold conduction module; and the sample seat is horizontally inserted into the upper flange. The device is not limited by the angle, the sample base is provided with a temperature measuring probe and can rotate by 360 degrees at will, the upper bearing and the lower bearing are used for combined action, it is ensured that the sample base can still rotate horizontally in a threaded mode under the low-temperature working condition, multiple circles of balls are used for cold conduction, the temperature difference can be controlled to be 10 K or below while threaded rotation is achieved, fixing and pre-pressing are achieved, and surface attaching is tight; efficient transfer of lower cooling capacity is achieved, and insertion and extraction in the horizontal direction are facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of cryo-scanning electron microscopes, and in particular to a low-temperature rotating sample stage. Background Art

[0002] The rotating sample stage in the prior art can realize the rotation of the sample stage base to meet the needs of multi-angle and multi-viewing observation of the sample. The principle is that the insulation sleeve bears the rotational external force and drives the central shaft sleeve and the sample stage base to rotate. At the same time, the refrigerant block does not rotate because it is connected to the fixed end.

[0003] The rotating sample stage in the prior art also uses piezoelectric ceramics to drive the thrust ball bearing in reverse, so that the lower support cover of the thrust ball bearing drives the outer shell to rotate together, and the upper support cover and the base do not rotate relative to each other.

[0004] In summary, the sample stage for cryo-scanning electron microscopy in the prior art has the following technical problems:

[0005] 1. The angle is fixed and it is impossible to rotate 360° horizontally indefinitely;

[0006] 2. It cannot rotate smoothly at low temperatures;

[0007] 3. The thermal conductivity temperature difference cannot be within 10K;

[0008] 4. The temperature measuring wire and heating wire of the sample holder cannot be led out under the condition of infinite 360-degree rotation;

[0009] 5. The sample holder and the base cannot be separated. Summary of the invention

[0010] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a low-temperature rotating sample stage. The angle of the present invention is arbitrary, and it can rotate 360° horizontally indefinitely. It can rotate smoothly at low temperatures without jamming. The thermal conductivity temperature difference is within 10K. The temperature measuring wire and heating wire of the sample holder can be led out under infinite 360-degree rotation. The sample holder and the base are designed to be separable.

[0011] To achieve the above-mentioned and other related purposes, the present invention provides a low-temperature rotating sample stage, comprising:

[0012] A heat-insulating seat, the upper end of which is connected to the central axis;

[0013] A cooling module connected to the central shaft via a bearing;

[0014] A milling flat is arranged on the central axis, the central axis is connected to the upper flange through the milling flat, and the upper flange is rotatably connected to the cooling module;

[0015] The sample holder is horizontally inserted into the upper flange.

[0016] In one embodiment of the present invention, the upper flange and the cooling module are rotatably connected via a bearing.

[0017] In one embodiment of the present invention, the bearing includes a plurality of circles of balls, and the balls are used to support and rotate the upper flange and to conduct cooling to the cooling module.

[0018] In one embodiment of the present invention, a temperature measuring probe is arranged on the side of the sample holder, and the temperature measuring probe is connected to an elastic contact along the sample holder through a wire. The elastic contact contacts the conductive base on the upper flange as the sample holder is pushed in. The conductive base leads the wire along the upper flange to the conductive slip ring, and the conductive slip ring leads the wire out.

[0019] In one embodiment of the present invention, the cooling module comprises:

[0020] A cooling disk is connected to the central shaft via a bearing, and the upper flange is rotatably connected to the cooling disk;

[0021] A cooling inlet and outlet pipe, which is welded to the cooling disc;

[0022] A joint is welded to the cooling inlet and outlet pipes.

[0023] In one embodiment of the present invention, the conductive slip ring comprises:

[0024] A PCB board, the upper end of which is provided with the upper flange;

[0025] A brush, which is arranged at the bottom of the PCB board;

[0026] The slip ring lower plate is arranged at the bottom of the brush, and the cooling module is arranged at the bottom of the slip ring lower plate.

[0027] In one embodiment of the present invention, it further includes:

[0028] A limiting column is installed on the cooling inlet and outlet pipes.

[0029] In one embodiment of the present invention, a slide groove is provided on the upper flange, and a slide rail matched with the slide groove is provided on the sample holder. The sample holder moves along the slide groove through the slide rail to be horizontally inserted into the upper flange, so that the elastic contact can be pushed into contact with the conductive base on the upper flange as the sample holder is pushed in.

[0030] In one embodiment of the present invention, the bearing comprises an upper bearing and a lower bearing, the upper bearing is a thrust ball bearing, and the lower bearing is a deep groove ball bearing.

[0031] In one embodiment of the present invention, it further includes:

[0032] A base, which is fixed to the bottom of the sample holder, and the base and the sample holder rotate synchronously;

[0033] A cooling ring, wherein a canted coil spring is arranged between the cooling ring and the base, and the cooling ring is in a stationary state and does not rotate synchronously with the sample holder;

[0034] A cooling tube, which is arranged outside the cooling ring, and the cooling tube is in a stationary state and does not rotate synchronously with the sample holder;

[0035] When the coolant or cold air circulates in one direction through the cooling tube and flows out, the cooling ring will be cooled. The cooling ring transfers the cold energy to the sample holder through the canted coil spring, and the sample holder realizes rotation and cold energy extraction.

[0036] As described above, a low-temperature rotating sample stage of the present invention has the following beneficial effects:

[0037] (1) A low-temperature rotating sample stage of the present invention comprises a sample seat, an upper flange, a cooling module, a central axis, a heat-insulating seat, and a bearing. The present invention is not limited by angles, and the sample seat with a temperature measuring probe can rotate 360 ​​degrees at will.

[0038] (2) A low-temperature rotating sample stage of the present invention uses upper and lower bearings to work together to ensure that the sample holder can still rotate smoothly and horizontally under low-temperature conditions.

[0039] (3) A low-temperature rotating sample stage of the present invention uses multiple turns of balls for cooling, which can achieve smooth rotation while controlling the temperature difference below 10K.

[0040] (4) A low-temperature rotating sample stage of the present invention places a conductive slip ring between the upper flange and the cooling device, and all the wires of the sample holder can be led out through the lower plate of the conductive slip ring through brushes. In this way, the sample holder is not limited to being used for temperature measurement, but can also be used for placing heaters, Faraday cups, etc. As long as the wires are led out, they can be led out through the conductive slip ring.

[0041] (5) The sample holder of the low-temperature rotating sample stage of the present invention is fixed and pre-tightened by side extrusion of an elastic sheet, and the surface is tightly fitted, so that the cold energy below can be efficiently transferred, and it is convenient to insert and withdraw in the horizontal direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 This is an overall structural diagram of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0043] Figure 2A cross-sectional structural diagram of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0044] Figure 3 A schematic structural diagram of a cooling module of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0045] Figure 4 A schematic structural diagram of a cooling module of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0046] Figure 5 A schematic structural diagram of a cooling module of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0047] Figure 6 A schematic diagram of the structure of a conductive slip ring of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0048] Figure 7 A schematic diagram of the structure of a conductive slip ring of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0049] Figure 8 A schematic structural diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0050] Fig. 9 A schematic structural diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0051] Fig.10 A schematic cross-sectional structure diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0052] Fig.11 A schematic diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application before insertion.

[0053] Fig.12 A schematic diagram of a low-temperature rotating sample stage in an embodiment of the present application showing a state after a sample holder is inserted.

[0054] Fig.13 A schematic diagram of a sample seat bearing of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0055] Fig.14 A schematic diagram of a sample seat bearing of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0056] Fig.15 A schematic diagram of the application of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application.

[0057] Fig.16 A schematic diagram of a canted coil spring for a low-temperature rotating sample stage provided in an embodiment of the present application.

[0058] Component number description

[0059] 1 Sample holder

[0060] 2 Upper flange

[0061] 3 Cooling module

[0062] 4 Balls

[0063] 5 Center axis

[0064] 6 Insulation seat

[0065] 7 Fixing adjustment screw

[0066] 8 Bearings

[0067] 9 Limit column

[0068] 11 PCB board

[0069] 12 Slip ring lower plate

[0070] 13 Brush

[0071] 14 Canted coil spring

[0072] 15 Cooling pipe

[0073] 16 Cooling ring

[0074] 17 Base

[0075] 31 Cooling disc

[0076] 32 Cooling inlet and outlet pipes

[0077] 33 Connectors DETAILED DESCRIPTION

[0078] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0079] It should be noted that the illustrations provided in the following embodiments are only used to illustrate the basic concept of the present invention in a schematic manner, and thus the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0080] Terms such as first or second can be used to describe various components, but these components are not limited by the above terms. The above terms are used to distinguish one component from another component, for example, without departing from the scope of the concept according to the present disclosure, a first component can be referred to as a second component, and similarly, a second component can be referred to as a first component.

[0081] In addition, "connected / coupled" means that one component is directly electrically coupled to another component or is indirectly electrically coupled through another component. The singular form may include the plural form unless explicitly stated in the sentence. In addition, "include / comprise" or "includes / comprises" used in this specification indicates that one or more components, steps, operations, and elements exist or have been added. The specific structural or functional descriptions of the examples of the implementation of the concepts disclosed in this specification are only illustrated to describe the examples of the implementation of the concepts, and the examples of the implementation of the concepts can be implemented in various forms, but these descriptions are not limited to the examples of the implementation described in this specification.

[0082] According to the concept, various modifications and changes can be applied to the examples of the embodiments, so that the examples of the embodiments will be illustrated in the drawings and described in the specification. However, the examples of the embodiments according to the concept are not limited to the specific embodiments, but include all changes, equivalents or replacements included in the spirit and technical scope of the present disclosure.

[0083] It should be understood that when an element is described as being "coupled" or "connected" to another element, the element may be directly coupled or directly connected to the other element, or may be coupled or connected to the other element through a third element. Conversely, it should be understood that when an element is referred to as being "directly coupled to" or "directly coupled to" another element, no other element is placed between them. Other expressions describing the relationship between components (i.e., "between" and "directly between" or "adjacent to" and "directly adjacent to") need to be interpreted in the same manner.

[0084] The terms used in this specification are only used to describe specific examples of the embodiments and are not intended to limit the present disclosure. If there is no clear opposite meaning in the context, the singular form may include the plural form. In this specification, it should be understood that the term "including" or "having" indicates the presence of the features, quantities, steps, operations, components, parts or combinations thereof described in the specification, but the possibility of the presence or addition of one or more other features, quantities, steps, operations, components, parts or combinations thereof cannot be precluded.

[0085] If there is no contrary definition, all terms (including technical terms or scientific terms) used herein have the same meaning as those generally understood by ordinary technicians in the field. If the terms defined in the commonly used dictionary are not clearly defined in this specification, they should be interpreted as having the same meaning as in the context of the relevant technology, and not interpreted as ideal or overly formal meanings.

[0086] Descriptions of well-known components and processing techniques may be omitted so as not to unnecessarily obscure the embodiments of the disclosure.

[0087] Throughout the specification, the same reference numerals refer to the same elements. Thus, even if a reference numeral is not mentioned or described with reference to one figure, it may be mentioned or described with reference to another figure. Furthermore, even if a reference numeral is not shown in one figure, it may be mentioned or described with reference to another figure.

[0088] In addition, the logic level of the signal may be different or opposite to the described logic level. For example, a signal described as having a logic "high" level may alternatively have a logic "low" level, and a signal described as having a logic "low" level may alternatively have a logic "high" level.

[0089] The following will describe the various embodiments of the present disclosure in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present disclosure, many technical details are provided in order to enable the reader to better understand the present disclosure. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present disclosure can be implemented.

[0090] See also Figure 1 , Figure 2 , Figure 1 This is an overall structural diagram of a low-temperature rotating sample stage provided in an embodiment of the present application. Figure 2 A cross-sectional structural diagram of a low-temperature rotating sample stage provided in an embodiment of the present application. The present invention provides a low-temperature rotating sample stage, comprising a sample seat 1, an upper flange 2, a cooling module 3, a central axis 5, a heat-insulating seat 6, and a bearing 8, wherein the upper end of the heat-insulating seat 6 is connected to the central axis 5, and the cooling module 3 is connected to the central axis 5 through the bearing 8; a milling flat is arranged on the central axis 5, and the central axis 5 is connected to the upper flange 2 through the milling flat, and the upper flange 2 is rotatably connected to the cooling module 3; the sample seat 1 is horizontally inserted into the upper flange 2.

[0091] In one embodiment of the present invention, a low-temperature rotating sample stage of the present invention includes a sample seat 1, an upper flange 2, a cooling module 3, a central axis 5, a heat insulation seat 6, and a bearing 8, which can transfer low-temperature cooling to the sample seat 1 and can rotate horizontally 360° infinitely.

[0092] Specifically, the heat insulation seat 6 and the central shaft 5 are fixedly connected by screws.

[0093] Specifically, the upper flange 2 and the cooling module 3 are rotatably connected via a bearing 8 .

[0094] Specifically, the bearing 8 includes a plurality of circles of balls 4 , and the balls 4 are used to support and rotate the upper flange 2 and to conduct cooling to the cooling module 3 .

[0095] See also Figure 3 , Figure 4 , Figure 5 , Figure 3 A schematic structural diagram of a cooling module of a low-temperature rotating sample stage provided in an embodiment of the present application. Figure 4 A schematic structural diagram of a cooling module of a low-temperature rotating sample stage provided in an embodiment of the present application. Figure 5 A schematic diagram of the structure of a cooling module of a low-temperature rotating sample stage provided in an embodiment of the present application. The cooling module 3 includes: a cooling disc 31, a cooling inlet and outlet pipe 32, and a joint 33. The cooling disc 31 is connected to the central axis 5 through a bearing 8, and the upper flange 2 is rotatably connected to the cooling disc 31; the cooling inlet and outlet pipe 32 is welded to the cooling disc 31; and the joint 33 is welded to the cooling inlet and outlet pipe 32.

[0096] See also Figure 6 , Figure 7 , Figure 6 A schematic diagram of the structure of a conductive slip ring of a low-temperature rotating sample stage provided in an embodiment of the present application. Figure 7 The schematic diagram of the structure of a conductive slip ring of a low-temperature rotating sample stage provided in an embodiment of the present application. The conductive slip ring comprises a PCB board 11, a slip ring lower plate 12, and a brush 13. The upper end of the PCB board 11 is provided with the upper flange 2; the brush 13 is provided at the bottom of the PCB board 11; the slip ring lower plate 12 is provided at the bottom of the brush 13, and the bottom of the slip ring lower plate 12 is provided with the cooling module 3.

[0097] Specifically, the limiting column 9 is installed on the cooling inlet and outlet pipe 32 .

[0098] Specifically, a slide groove is provided on the upper flange 2, and a slide rail matched with the slide groove is provided on the sample holder 1. The sample holder 1 moves along the slide groove through the slide rail to be horizontally inserted into the upper flange 2, so that the elastic contact is pushed into contact with the conductive base on the upper flange 2 as the sample holder 1 is pushed in.

[0099] See also Figure 8 , Fig. 9 , Fig.10 , Fig.11 , Fig.12 , Figure 8 A schematic structural diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application. Fig. 9 A schematic structural diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application. Fig.10 A schematic cross-sectional structure diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application. Fig.11 A schematic diagram of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application before insertion. Fig.12 A schematic diagram of the state after the sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application is inserted. The position and connection relationship between the various components of a low-temperature rotating sample stage of the present invention are as follows: the cooling module 3 is connected to the central axis 5 through a bearing 8, the central axis 5 is flattened, the central axis 5 and the upper flange 2 are connected by flattening, the upper flange 2 and the cooling module 3 rotate relative to each other in a manner similar to the thrust ball bearing 8, and multiple turns of balls are arranged in the middle, which play a supporting and rotating role on the one hand and a cooling role on the other hand, the central axis 5 and the lower insulation seat 6 are connected by screws, and the sample seat 1 is inserted into the upper flange 2 by horizontal insertion. The temperature probe of the sample seat 1 is arranged on the side, and is connected to the elastic contact along the sample seat 1 through a wire. The elastic contact contacts the conductive base on the upper flange 2 as the sample seat 1 is pushed in, and the conductive base introduces the cable along the upper flange 2 into the rotating conductive slip ring, and the conductive slip ring is led to the lower slip ring through the brush, and the lower slip ring is led out through the cable.

[0100] In one embodiment of the present invention, the working principle of a low temperature rotating sample stage of the present invention is:

[0101] The external driving force drives the heat insulation seat 6 to rotate, the heat insulation seat 6 is fixedly connected to the central axis 5, the central axis 5 is fixedly connected to the upper flange 2, and the upper flange 2 is plugged and fixed to the sample holder 1, so that the heat insulation seat 6 and the sample holder 1 can rotate synchronously. Since the cooling module 3 is supported by the bearing 8, and the cooling module 3 is blocked by the limit rod on the inlet and outlet guide rod, the cooling module 3 will not rotate relative to the external driving force. In this way, the function of the low-temperature sample stage being able to rotate 360° at low temperature is realized.

[0102] In one embodiment of the present invention, the cooling working principle of a low-temperature rotating sample stage of the present invention is:

[0103] Cryogenic materials, not limited to liquid nitrogen or liquid helium, etc., enter and exit in one direction through the cooling module 3 to achieve cold exchange with the cooling module 3. The cooling module 3 transfers the cold energy to the ball 4, the ball 4 transfers the cold energy to the upper flange 2, and the upper flange 2 transfers the cold energy to the sample holder 1, thereby achieving the purpose of cooling. At the same time, the cooling module 3 transfers the cold energy to the central shaft 5, the central shaft 5 and the insulation block 6 are fixed, and the insulation seat plays an insulation role to prevent the cold energy from diffusing and transferring outward along the insulation seat.

[0104] In one embodiment of the present invention, a low-temperature rotating sample stage of the present invention realizes the 360° temperature measurement principle: the temperature on the sample holder 1 is closest to the sample temperature, so the temperature measurement accuracy is highest when the temperature measuring probe is installed on the sample holder 1, but at the same time, a problem is how to ensure that the probe connection line is led out without getting tangled when the rotating sample holder 1 rotates 360°. The temperature measuring probe connection line is passed through a conductive slip ring to achieve cable lead-out.

[0105] See also Fig.13 , Fig.14 , Fig.13 A schematic diagram of a sample seat bearing of a low-temperature rotating sample stage provided in an embodiment of the present application. Fig.14 A schematic diagram of a sample seat bearing of a cryogenic rotating sample stage provided in an embodiment of the present application. The upper bearing 8 of the cryogenic rotating sample stage of the present invention can use a thrust ball bearing, and the lower bearing 8 can use a deep groove ball bearing.

[0106] See also Fig.15 , Fig.16 , Fig.15 A schematic diagram of the application of a sample holder of a low-temperature rotating sample stage provided in an embodiment of the present application. Fig.16 A schematic diagram of a bevel coil spring for a low-temperature rotating sample stage provided in an embodiment of the present application. The specific implementation principle is: the base 17 is fixed to the power source, the sample holder 1 and the base 17 are fixed together, the base 17 and the sample holder 1 rotate synchronously together, and the cooling ring 16 and the cooling tube 15 are in a stationary state and will not rotate with the sample holder 1. In this way, when the coolant or gas flows out after circulating in one direction through the cooling tube 15, the cooling ring 16 will be cooled, and the cooling ring 16 will transfer the cold to the sample holder 1 through the bevel coil spring 14. As a result, the sample holder 1 realizes both the rotation function and the cold extraction function. The bevel coil spring 14 can provide a certain elasticity and a temperature transfer function.

[0107] In summary, a low-temperature rotating sample stage of the present invention includes a sample seat, an upper flange, a cooling module, a central axis, an insulating seat, and a bearing. The present invention is not limited to angles, and the sample seat with a temperature measuring probe can rotate 360 ​​degrees at will. The present invention uses the upper and lower bearings to work together to ensure that the sample seat can still rotate horizontally smoothly under low-temperature conditions. The present invention uses multiple turns of balls for cooling, which can achieve smooth rotation while controlling the temperature difference below 10K. The present invention places a conductive slip ring between the upper flange and the cooling device, and all the wires of the sample seat can be led out through the lower plate of the conductive slip ring through the brush. In this way, the sample seat is not limited to placing temperature measurement, but can also be placed on a heater, a Faraday cup, etc. As long as the wires are led out, they can be led out through a conductive slip ring. The present invention achieves fixation and pre-tightening by side extrusion of an elastic sheet, and the surface fits tightly, so that the cold below can be efficiently transferred, and insertion and extraction in the horizontal direction are convenient.

[0108] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A low temperature rotating sample stage, characterized in that: include: A heat-insulating seat (6), the upper end of which is connected to the central shaft (5); A cooling module (3) connected to the central shaft (5) via a bearing (8); A milling flattening portion, which is arranged on the central axis (5), the central axis (5) and the upper flange (2) are connected via the milling flattening portion, and the upper flange (2) and the cooling module (3) are rotatably connected; The sample holder (1) is horizontally inserted into the upper flange (2).

2. A low temperature rotating sample stage according to claim 1, characterized in that: The upper flange (2) and the cooling module (3) are rotatably connected via a bearing (8).

3. A low temperature rotating sample stage according to claim 2, characterized in that: The bearing (8) comprises a plurality of turns of balls (4), and the balls (4) are used to support and rotate the upper flange (2) and to conduct cooling to the cooling module (3).

4. A low temperature rotating sample stage according to claim 3, characterized in that: A temperature measuring probe is arranged on the side of the sample holder (1), and the temperature measuring probe is connected to an elastic contact through a wire along the sample holder (1). The elastic contact is pushed into contact with a conductive base on the upper flange (2) as the sample holder (1) is pushed in. The conductive base leads the wire along the upper flange (2) into a conductive slip ring, and the conductive slip ring leads the wire out.

5. A low temperature rotating sample stage according to claim 4, characterized in that: The cooling module (3) comprises: A cooling disk (31) is connected to the central shaft (5) via a bearing (8), and the upper flange (2) is rotatably connected to the cooling disk (31); A cooling inlet and outlet pipe (32) which is welded to the cooling disc (31); A joint (33) is welded to the cooling inlet and outlet pipes (32).

6. A low temperature rotating sample stage according to claim 5, characterized in that: The conductive slip ring comprises: A PCB board (11), the upper end of which is provided with the upper flange (2); A brush (13) is arranged at the bottom of the PCB board (11); A slip ring lower plate (12) is arranged at the bottom of the brush (13), and the cooling module (3) is arranged at the bottom of the slip ring lower plate (12).

7. The low temperature rotating sample stage according to claim 5, characterized in that: Also includes: A limiting column (9) is installed on the cooling inlet and outlet pipe (32).

8. The low temperature rotating sample stage according to claim 4, characterized in that: The upper flange (2) is provided with a slide groove, and the sample holder (1) is provided with a slide rail matched with the slide groove. The sample holder (1) moves along the slide groove via the slide rail to be horizontally inserted into the upper flange (2), so that the elastic contact is pushed into contact with the conductive base on the upper flange (2) as the sample holder (1) is pushed in.

9. The low temperature rotating sample stage according to claim 1, characterized in that: The bearing (8) comprises an upper bearing and a lower bearing, the upper bearing is a thrust ball bearing, and the lower bearing is a deep groove ball bearing.

10. The low temperature rotating sample stage according to claim 1, characterized in that: Also includes: A base (17) fixed to the bottom of the sample holder (1), wherein the base (17) and the sample holder (1) rotate synchronously; A cooling ring (16) is provided with a canted coil spring (14) between the cooling ring and the base (17); the cooling ring (16) is in a stationary state and does not rotate synchronously with the sample holder (1); A cooling tube (15) is arranged outside the cooling ring (16), and the cooling tube (15) is in a stationary state and does not rotate synchronously with the sample holder (1); When the coolant or cold air circulates in one direction through the cooling tube (15) and flows out, the cooling ring (16) is cooled. The cooling ring (16) transfers the cold energy to the sample holder (1) through the canted coil spring (14), and the sample holder (1) realizes rotation and cold energy extraction.

Images