Substrate transport equipment

Abstract

A substrate transport apparatus includes: a frame; a drive section connected to the frame; and an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to the at least one articulated arm link such that a joint is formed between the end effector and the articulated arm link, with an arm joint pivot axis disposed such that the end effector rotates about the arm joint pivot axis relative to the at least one articulated arm link. The articulated arm has a drive belt transfer device having a drive pulley and a driven pulley, where the driven pulley is connected to the articulated wrist.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application is a non-provisional application and claims the benefit of U.S. Provisional Application No. 62,964,817, filed on January 23, 2020, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0002] The exemplary embodiments relate generally to robotic transport devices and, more particularly, to robotic drive transfer arrangements. Background Art

[0003] Typically, some robotic manipulators employ a metal belt and pulley drive system to drive the rotation of the various articulated links of the robotic manipulator. The metal belts are conventionally coupled to the respective pulleys by screws to transfer torque between the pulleys and the belts. The conventional screw-type coupling between the belt and the pulleys may limit the range of motion of the pulleys because the belt may reverse direction and fold over on itself if the pulleys rotate beyond the contact angle between the belt and the pulleys. Thus, the joints of the robotic manipulators driven by conventional belt and pulley drive systems are typically limited to about 360° of rotation or less (e.g., about + / - 180° of rotation). BRIEF DESCRIPTION OF THE DRAWINGS

[0004] The foregoing aspects and other features of the disclosed embodiments are explained in the following description taken in conjunction with the accompanying drawings, in which: Figures 1A-1E illustrates an exemplary substrate transport apparatus according to aspects of the disclosed embodiments; Figure 2A-2E illustrates an exemplary substrate processing apparatus according to aspects of the disclosed embodiments; Figure 3A According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of a portion of a substrate transport device; Figure 3B According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of a portion of a substrate transport device; Figure 3C According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of a portion of a substrate transport device; Figure 3D is a schematic illustration of a portion of a substrate processing apparatus according to aspects of the disclosed embodiments; Figure 4A -C illustrates aspects of the disclosed embodiments Figures 1A-1E An exemplary transfer device of a substrate transport device, Figure 4D It is a cross-sectional view; Figure 5AThe present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Figure 5B The present invention illustrates various aspects of the disclosed embodiments. Figure 5A a cross-sectional view of the portion of an exemplary transfer device; Figure 6 The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Figure 7 The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Figures 8A-8C The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Fig. 9A and Fig. 9B The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Fig. 10A and Fig. 10B The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Fig.11 The present invention illustrates various aspects of the disclosed embodiments. Fig. 9A , Fig. 9B , Fig. 10A and Fig. 10B a cross-sectional view of the portion of an exemplary transfer device; Fig. 12A The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Fig. 12B and Fig. 12C The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E A portion of an exemplary transfer device of a substrate transport device; Fig.13A and Fig. 13B Schematically illustrates various aspects of the disclosed embodiments. Figures 1A-1E Opposing belt loops of a top pulley portion and a bottom pulley portion of an exemplary transfer device of a substrate transport apparatus; Fig.14illustrates an exemplary graph for a given non-circular pulley, the graph illustrating the difference in length of a belt wound around the non-circular pulley for a given rotation angle of the non-circular pulley, in accordance with aspects of the disclosed embodiments; Fig.15 The present invention illustrates various aspects of the disclosed embodiments. Figures 1A-1E An exemplary graph of vibration frequency in a transfer device of a transport device versus drive pulley angle; Fig.16 According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of an exemplary belt configuration of a transfer device of a transport device; Fig.17A According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of an exemplary belt configuration of a transfer device of a transport device of Fig. 17B is a cross-sectional view as indicated; Fig.18A According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of an exemplary belt configuration of a transfer device of a transport device; Fig.18B According to various aspects of the disclosed embodiments Figures 1A-1E A schematic illustration of an arm link of a transport device, the arm link comprising Fig.18A An exemplary belt configuration of a transfer device; Fig.19A and Fig.19B illustrates an exemplary belt mounting fixture in accordance with aspects of the disclosed embodiments; Fig. 20 are exemplary methods according to aspects of the disclosed embodiments; Fig.21 are exemplary methods according to aspects of the disclosed embodiments; and Fig. 22 are exemplary methods according to aspects of the disclosed embodiments. DETAILED DESCRIPTION

[0005] refer to Figures 1A-2E , a schematic diagram of a substrate processing apparatus or tool incorporating aspects of the disclosed embodiments as further disclosed herein is shown. Although aspects of the disclosed embodiments will be described with reference to the accompanying drawings, it should be understood that aspects of the disclosed embodiments may be embodied in many forms. In addition, any suitable size, shape or type of element or material may be used.

[0006] Aspects of the disclosed embodiments described herein provide a belt and pulley torque transmission drive configuration for a robotic manipulator. Generally, it is expected in the semiconductor processing industry to increase the number of processing modules in semiconductor processing equipment (i.e., these processing equipment can be referred to as high-density processing module tools). In order to transport substrates to and from an increased number of tools, the substrate transport equipment must meet increased reach requirements. Aspects of the disclosed embodiments provided herein provide increased joint angle rotation (compared to the conventional transport arm described above) to provide an arm movement that facilitates transporting substrates to any processing module of the high-density processing module tool. The increased joint angle rotation is achieved by, for example, a belt and pulley torque transmission drive configuration of aspects of the disclosed embodiments, which provides a drive pulley and / or a driven pulley to rotate a rotation angle RR, which is defined by a drive (or reduction) ratio between an input (e.g., drive) pulley and an output (e.g., driven) pulley (wherein the drive ratio is the ratio between the diameter of the drive pulley and the diameter of the driven pulley). In one aspect of the disclosed embodiment, the rotation of the drive pulley can be about 320° of rotation (e.g., about + / - 160° from the mid-point of travel position described herein). With a drive pulley rotation of about 320° and a 2:1 ratio between the drive pulley and the driven pulley, the driven pulley can rotate up to about 640° (e.g., about + / - 320° from the mid-point of travel). With a 3:1 ratio between the drive pulley and the driven pulley, the driven pulley can rotate up to about 960° (e.g., about + / - 480° from the mid-point of travel). Driven pulley rotations greater than about 360° provide an increased range of motion for the robotic manipulator due to, for example, increased travel in an articulated link of the robotic manipulator.

[0007] refer to Figures 1A-1E, exemplary substrate transport devices 100-104 are illustrated and will be described in more detail below. Each of the substrate transport devices 100-104 generally includes: a frame 110F; a drive section 110, which is connected to the frame 110F; and an articulated arm (e.g., also referred to as a transport arm, such as transport arms 120-124), which has at least one articulated arm link (e.g., an upper arm link 130 or an upper arm link 130 and a forearm link 131), which is operably connected to the drive section 110 so that the articulated arm rotates relative to the frame 110F about a pivot axis (e.g., a shoulder axis SX described herein) and extends and retracts relative to the pivot axis (e.g., the shoulder axis SX). As will be described in greater detail herein, the transport arm has an end effector 140, 140A, 140B, 141, 142 that is pivotally mounted to the at least one articulated arm link, thereby forming a joint (e.g., wrist joint 336—see FIG. 2 ) between the end effector 140, 140A, 140B, 141, 142 and the at least one articulated arm link. Figure 3A ), wherein an arm joint pivot axis (eg, wrist joint WX) is configured such that the end effector 140, 140A, 140B, 141, 142 rotates about the wrist axis WX relative to the at least one articulated arm link.

[0008] Although the transport arms 120-124 are described herein as having a SCARA arm configuration, in other aspects the transport arms may have any suitable configuration. Figure 1A , the substrate transport apparatus 100 includes a transport arm 120 and a drive section 110. The transport arm 120 is coupled to the output of the drive section 110 (as will be described herein) and includes an upper arm link 130 rotatably coupled to the drive section 110 at a rotating shoulder axis SX, a forearm link 131 rotatably coupled to the upper arm link 130 at a rotating elbow axis EX, and at least one single-ended end effector (e.g., substrate holder) 140 rotatably coupled to the forearm link 131 at a rotating wrist axis WX. Here, the end effector 140 includes a single substrate holding position 140H disposed on a single side of the wrist axis WX. In other aspects, the end effector 140 may include more than one substrate holding position arranged side by side in substantially the same plane or stacked one above the other on a single side of the wrist axis WX. In one aspect, the rotation of the end effector 140 can be driven by, for example, the upper arm link 130, so that the end effector 140 remains aligned with the extension and retraction axis of the transport member 100. In other aspects, the end effector 140 can be coupled to a corresponding drive motor of the drive section 110 so that the rotation of the end effector 140 about the wrist axis WX is independent of the movement of the upper arm link 130 and the forearm link 131 (although the rotation can be coordinated with such movement).

[0009] Reference now Figure 1B , the substrate transport device 101 is substantially similar to the transport device 100. However, in this regard, the transport arm 101 includes at least one double-disc-shaped end effector 141 having at least two opposing substrate holding positions 140H1, 140H2 (e.g., a double disk). For example, the end effector 141 extends on opposite sides of the wrist axis WX, so that each opposing end 141E1, 141E2 of the end effector 141 has at least one corresponding substrate holding position 140H1, 140H2 (e.g., the substrate holding positions 140H1, 140H2 are diametrically opposed across the wrist axis WX). In this example, the end effector 141 is illustrated as a substantially rigid end effector that is not articulated between the ends 141E1, 141E2 (where the wrist axis WX is disposed between the ends 141E1, 141E2). Also note that while a single substrate holding station 140H1, 140H2 is illustrated on each end 141E1, 141E2 for purposes of explanation only, in other aspects, one or more of the ends 141E1, 141E2 may have more than one substrate holding station arranged one above the other in a stack or arranged side by side in substantially the same plane. In one aspect, the rotation of the end effector 141 may be slaved to, for example, the upper arm link 130, such that the end effector 141 remains aligned with the extension and retraction axis of the transport 100. In other aspects, the end effector 141 may be coupled to a respective drive motor of the drive section 110 such that the rotation of the end effector 141 about the wrist axis WX is independent of the movement of the upper arm link 130 and the forearm link 131 (although the rotation may be coordinated with such movement).

[0010] refer to Figure 1C, the substrate transport device 101 is substantially similar to the transport device 100. However, in this regard, the transport arm 102 includes two single-ended end effectors 140A, 140B. Here, each of the single-ended end effectors 140A, 140B is substantially similar to the end effector 140 described above. In other aspects, the transport arm 102 may include two dual-disc end effectors, wherein each of the dual-disc end effectors is substantially similar to the dual-disc end effector 141 described above. In one aspect, each of the end effectors 140A, 140B can be independently rotated about the wrist axis WX relative to the other end effector 140A, 140B, wherein each end effector is coupled to a respective drive motor of the drive section 110. In other aspects, the end effectors 140A, 140B may be differentially coupled to a common drive motor of the drive section in any suitable manner such that when one end effector 140A, 140B rotates, the other end effector 140A, 140B rotates in an opposite direction about the wrist axis WX at the same rotational rate.

[0011] refer to Figure 1D In this regard, the transport arm 123 includes an upper arm link 130 rotatably coupled to the drive section 110 and at least one end effector 140A, 140B rotatably coupled to the upper arm link 130 without any intervening arm link (i.e., the at least one end effector 140A, 140B is directly coupled to the upper arm link 130). In this example, the upper arm link 130 is a substantially non-articulated link between the shoulder axis SX and the wrist axis WX. Each of the at least one end effector 140A, 140B may be substantially similar to the end effectors 140, 140A, 140B described above. Although two single-ended end effectors 140A, 140B are illustrated for exemplary purposes only, in other aspects, the transport arm 123 may have only one single-ended end effector 140. In still other aspects, the substrate transport arm 123 may include one or more dual-disc end effectors substantially similar to the dual-disc end effector 141 described above. Here, each of the end effectors may be independently rotatable relative to the upper arm link 130 (such as by a respective drive motor of the drive section).

[0012] refer to Figure 1E, the substrate transport device 104 includes a transport arm 124 that is substantially similar to the transport arm 120, however, in this regard, the transport arm 120 includes at least one side-by-side disc-shaped end effector 142. In this example, the side-by-side disc-shaped end effector 142 includes two side-by-side (e.g., double disc-shaped) substrate holding positions 140S1, 140S2, however, in other aspects, there may be more than two side-by-side substrate holding positions. As described above, the side-by-side substrate holding positions are substantially located in the same plane. The side-by-side substrate holding positions 140S1, 140S2 provide for substantially simultaneous picking up of substrates from and placing of substrates to the side-by-side substrate holding stations, as will be described herein.

[0013] refer to Figures 1A-2E , illustrates processing equipment (such as, for example, semiconductor tool stations 200-203) according to aspects of the disclosed embodiments. Although a semiconductor tool station is illustrated in the figures, aspects of the disclosed embodiments described herein may be applied to any tool station or application that employs a robotic manipulator. In the illustrated example, the tool stations 200, 202, 203 are illustrated as cluster tools. ， However, aspects of the disclosed embodiments may be applied to any suitable tool station, such as, for example, a linear tool station, such as described in U.S. Pat. No. 8,398,355, entitled “Linearly Distributed Semiconductor Workpiece Processing Tool”, issued on March 19, 2013, and U.S. Pat. No. 7,901,539, entitled “Apparatus and Methods for Transporting and Processing Substrates”, issued on March 8, 2011, the disclosures of which are incorporated herein by reference in their entirety. The tool station 200-203 generally includes an atmospheric front end 211, a vacuum load lock 212, and a vacuum back end 213. In other aspects, the tool station may have any suitable configuration. Components of each of the front end 211, the load lock 212, and the back end 213 may be connected to a controller 299, which may be part of any suitable control architecture, such as, for example, a cluster architecture control. The control system can be a closed-loop controller having a master controller, a cluster controller, and an autonomous remote controller, such as those disclosed in U.S. Patent No. 7,904,182, entitled "Scalable Motion Control System," issued on March 8, 2011, the disclosure of which is incorporated herein by reference in its entirety. In other aspects, any suitable controller and / or control system can be utilized.

[0014] refer to Figure 2A In one aspect, the front end 211 generally includes a loadport module 220 and a mini-environment 221, such as, for example, an equipment front end module (EFEM). The loadport module 220 can be a box opener / loader to tool standard (BOLTS) interface that complies with SEMI standards E15.1, E47.1, E62, E19.5, or E1.9 for 300 mm loadports, SEMI standards for 450 mm loadports, front opening or bottom opening boxes / pods and boxes. In other aspects, the loadport module 220 can be configured as a 200 mm, 300 mm, and / or 450 mm substrate or wafer interface or any other suitable substrate interface, such as, for example, larger or smaller substrates or a flat panel for a flat panel display. Although in Figure 2A 21 . Three load port modules are shown, but in other aspects, any suitable number of load port modules can be incorporated into the front end 211. The load port module 220 can be configured to receive a substrate carrier or box 250 from an overhead conveyor system, an automatic guided vehicle, a human guided vehicle, a rail guided vehicle, or according to any other suitable conveying method. The load port module 220 can dock with the mini environment 221 through a load port 240. The load port 240 can allow a substrate to pass between the substrate box 250 and the mini environment 221. The mini environment 221 generally includes any suitable atmospheric transfer robot 222, which can be incorporated with one or more aspects of the disclosed embodiments described herein. In one aspect, the robot 222 can be a track mounted robot, such as a track mounted robot described in, for example, U.S. Patent No. 6,002,840, the disclosure of which is incorporated herein by reference in its entirety. The mini environment 221 can provide a controlled clean zone for substrates to be transferred between multiple load port modules.

[0015] The vacuum load lock 212 may be located between the micro environment 221 and the back end 213, and connected to the micro environment 221 and the back end 213. Note that the term vacuum as used herein may refer to a high vacuum, such as 10 -5 Torr or less. Load lock 212 typically includes an atmospheric slot valve and a vacuum slot valve. The slot valve can provide environmental isolation, which is used to evacuate the load lock after loading the substrate from the atmospheric front end and maintain the vacuum in the transport chamber when the lock is vented with an inert gas (such as nitrogen). Load lock 11010 (or microenvironment 221) can also include an aligner for aligning the reference point of the substrate to the desired position for processing. In other aspects, the vacuum load lock can be located in any suitable position of the processing equipment and have any suitable configuration.

[0016] The vacuum back end 213 typically includes: a transport chamber 214; one or more in-line processing stations 230 (e.g., a processing station having at least two substrate holding stations disposed in a common housing); and any suitable vacuum transfer robot 280, which may include one or more aspects of the disclosed embodiments described herein. The transfer robot 280 may be located within the transport chamber 214 to transport substrates between the load lock 212 and the various processing stations 230. The processing stations 230 may operate on the substrates through various deposition, etching, or other types of processes to form circuits or other desired structures on the substrates. Typical processes include, but are not limited to, thin film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (such as ion implantation), metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, forming nitrides, vacuum lithography, epitaxy (EPI), wire bonders and evaporation, or other thin film processes using vacuum pressure. The processing stations 230 are connected to the transport chamber 214 to allow substrates to be transferred from the transport chamber 214 to the processing stations 230, and vice versa. In this regard, the processing stations 230 are each illustrated as having two side-by-side substrate holding stations, however, in other aspects, such as Figure 2B As illustrated in FIG. 1 , the processing station 230A may have a single substrate holding station, wherein the processing stations 230A are arranged side by side.

[0017] Still reference Figure 2A , and as described above, the transport chamber 214 has a longitudinally extending rectangular configuration, wherein three processing stations 230 are arranged along each lateral side to form two rows of opposing processing stations 230 (in other aspects, more or less than three processing stations may be provided on each of the lateral sides). Note that for exemplary purposes only, the substrate transport apparatus 100 is illustrated as being at least partially in Figure 2A The transport chamber 214 may be within the transport chamber 214 (e.g., a portion of the drive housing 322 may be located outside the sealed atmosphere of the transport chamber 214), noting that the transport chamber 214 may include any one of the transport devices 100-104. As an example, Figure 2E The transport chamber 214 is illustrated with the transport device 104 at least partially disposed therein.

[0018] In other areas, such as Figure 2B As shown in FIG. 1 , transport chamber 214A (which is substantially similar to transport chamber 214) has a multi-sided, six-sided configuration, wherein each side of the transport chamber has two substrate holding stations (including load locks 212) coupled thereto. As described above, and as Figure 2B As shown in FIG. 1 , the processing stations 230 each have a single substrate holding station therein and are arranged in pairs on different sides of the transport chamber 214. In other aspects, a processing station 230 having two substrate holding stations (such as Figure 2A ) can be set in Figure 2B Note that for exemplary purposes only, the substrate transport apparatus 101 is illustrated as being at least partially disposed on different sides of the transport chamber 214. Figure 2B Note that the transport chamber 214A may include any one of the transport devices 100-104.

[0019] refer to Figure 2C , which illustrates a diagram similar to Figure 2A However, the transport chamber 214B includes a processing station 230 at the longitudinal end of the transport chamber 214B opposite to the (multiple) load locks 212. As can be appreciated, any one of the individual processing stations 230 in series can be used. Figure 2B Note that for exemplary purposes only, the substrate transport apparatus 102 is illustrated as being at least partially disposed in Figure 2C Note that the transport chamber 214B may include any one of the transport devices 100 - 104 .

[0020] refer to Figure 2D , which is basically similar to Figure 2A The transport chamber 214C of the transport chamber 214 in FIG. 1 is a transport chamber 214C having a substantially square configuration, however, the transport chamber 214C has a substantially square configuration, wherein two substrate holding stations may be coupled to each of the four sides of the transport chamber 214C. Figure 2D In the example shown in , both the processing station 230 and the processing station 230A are coupled to respective sides of the transport chamber 214C. Here, instead of the processing station being coupled to the side of the transport chamber 214C opposite to the loading lock(s) 212, other(s) loading locks 212A may be coupled to the transport chamber 214C such that the transport chamber 214C may be communicatively coupled to another transport chamber 214X, which may be substantially similar to any of the transport chambers 214, 214A, 214B, 214C. In this manner, the substrate processing tool 203 may be extended linearly to include any suitable number of transport chambers and processing stations. Note that for exemplary purposes only, the substrate transport apparatus 103 is illustrated as being at least partially in Figure 2D Note that the transport chamber 214C may include any one of the transport devices 100-104.

[0021] refer to Figure 3A and Figure 3B, a substrate transport device 320 is illustrated. The substrate transport device 320 generally illustrates each of the substrate transport devices 100-104 (and the transport device 222) described above. As can be appreciated, each of the robotic transport devices 100-104, 222 described above may include at least one arm link driven by at least one torque transmission belt. For example, the transport arm 120-124 has a drive belt transfer device 390, which has: a drive pulley 342 and an idler pulley 344, which have a predetermined reduction ratio; and at least one belt 350, 351 connecting the drive pulley 342 and the idler pulley 344, and the drive belt transfer device extends and retracts the transport arm 120-124, thereby moving the end effector 140, 140A, 140B, 141, 142 through the end effector extension stroke 399 or retraction stroke 398, respectively. Each of the extension stroke 399 and the retraction stroke 389 may be referred to as an arm motion stroke, which extends or retracts the transport arms 120-124 and moves the end effectors 140, 140A, 140B, 141, 142 through the corresponding end effector strokes (e.g., Figure 2A As will be described in more detail below, the at least one belt 350, 351 is wrapped around at least one of the pulleys 342, 344 (to which the at least one belt 350, 351 is connected, i.e., to the connected pulley(s)), so that the at least one belt 350, 351 is overwrapped relative to itself (or is overwrapped on itself) (see e.g. Figure 4B , Figure 4C , Figure 7 , Fig. 9B , Fig. 10B Figure 13 Fig.16 ), so the transmission device generates the end effector 140, 140A, 140B, 141, 142 relative to the at least one articulated arm link (for example, the upper arm link 326 or the forearm link 328) about the wrist axis WX as a rotation position MID ( Figure 2A ) to the maximum travel rotation position MAX of the end effector ( Figure 2A ), more than about + / - 180° of rotation RR. In one aspect, the end effector 140, 140A, 140B, 141, 142 is at a maximum extension stroke (such as a maximum stroke rotation position MAX— Figure 2A ) and the maximum retraction stroke MAXR ( Figure 2A ) is at least about + / - 300° (and in some aspects greater than about + / - 360°).

[0022] like Figure 3A and Figure 3B In the picture ，An exemplary torque transmission belt configuration for use in a robotic transport device, such as those described herein, is illustrated in accordance with aspects of the disclosed embodiments with respect to a robotic transport device 320, which is representative of any of the transport devices described herein. Figure 3A and Figure 3BAs can be seen in the figure, the robotic transport device 320 includes a transport arm 324 mounted to any suitable frame 110F, which in one aspect forms a drive housing 322, while in other aspects, the drive housing 322 is coupled to the frame 110F in any suitable manner. In one aspect, the transport arm 324 can be a SCARA arm and can include an upper arm 326 having a proximal end and a distal end, a forearm 328 having a proximal end and a distal end, and at least one substrate support or end effector 330 configured to hold one or more substrates thereon. The proximal end of the upper arm 326 is rotatably connected to the base 322 at a shoulder joint 332. The proximal end of the forearm 328 is rotatably connected to the distal end of the upper arm 326 at an elbow joint 334. The one or more substrate supports 330 can be rotatably connected to the distal end of the forearm 328 at a wrist joint 336. In addition to the SCARA arms illustrated herein, other examples of arm configurations that may be employed with aspects of the disclosed embodiments include, but are not limited to, the arm configurations described in U.S. Patent Application No. 12 / 117,415, filed on May 8, 2008, entitled “Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism” and International Patent Application No. PCT / US13 / 25513, filed on February 11, 2013, entitled “Substrate Processing Apparatus”, and International Patent Application No. PCT / US13 / 25513, filed on December 2, 2019, entitled “Substrate Processing Apparatus 62 / 942,544 to" Dual Yaw Transfer Arm" (the disclosures of which are incorporated herein by reference in their entirety), or any other suitable transport arm that uses belts and / or belts for transferring torque from one pulley to another to operate the transport arm, regardless of whether these belts and / or belts are located within the drive section (e.g., as a side-by-side motor in a drive shaft arrangement) and / or within the arm linkage.Suitable examples of torque transfer bands to which aspects of the disclosed embodiments may be applied include those described in U.S. patent application Ser. No. 14 / 469,260, filed on Aug. 26, 2014, and entitled “Substrate Transport Apparatus,” U.S. Pat. No. 5,778,730, issued on Jul. 14, 1998, and entitled “Robotic Joint Using Metallic Bands,” and U.S. Pat. No. 5,682,795, issued on Nov. 4, 1997, and entitled “Robotic Joint Using Metal Bands,” the disclosures of each of which are incorporated herein by reference in their entireties.

[0023] The drive housing 322 may include one or more servos or motors 370M, 371M configured to drive respective drive shafts. The transport drive housing 322 may be employed in any suitable atmospheric or vacuum robotic transport, such as those described above. The drive section 110 may include a drive housing 322 having at least one drive shaft 339, 340 at least partially disposed therein. As may be appreciated, where there are two or more drive shafts, the drive shafts may have any suitable arrangement, such as a coaxial or side-by-side arrangement. Although in Figure 3A1 and 2, but in other aspects, the drive section 110 may include any suitable number of drive shafts. The drive shafts 339, 340 may be mechanically supported or magnetically suspended (e.g., substantially without contact) within the drive housing 322 in any suitable manner, such as described in U.S. Patent No. 8,283,813, entitled “Robot Drive with Magnetic Spindle Bearings,” issued on October 9, 2012, and U.S. Patent No. 8,008,884, entitled “Substrate Processing Apparatus with Motors Integral to Chamber Walls,” issued on August 30, 2011, the disclosures of which are incorporated herein by reference in their entireties. Each drive shaft 339, 340 of the drive section 110 may be driven by a respective motor 370M, 371M, wherein each motor includes a stator STAT and a rotor ROT. Note that the drive motor described herein may be a permanent magnet motor, a variable reluctance motor (having at least one salient pole with a corresponding coil unit and at least one corresponding rotor having at least one salient pole made of a magnetically conductive material), or any other suitable drive motor. The stator(s) may be at least partially fixed within the drive housing 322, and the rotor(s) may be fixed to the respective drive shafts 339, 340 in any suitable manner. In one aspect, the stator(s) STAT may be located in an "external" or "non-sealed" environment that is isolated from the atmosphere in which the transport arm(s) 324 operate (the atmosphere in which the transport arm(s) operate is referred to herein as a "sealed" environment, which may be a vacuum or any other suitable environment) by adopting any suitable isolation wall or barrier, while the rotor(s) ROT are located within the sealed environment. Note that the term "isolation wall" as used herein may refer to a wall made of any suitable non-ferromagnetic material that may be disposed between a moving portion of a robot drive and / or sensor (associated with the drive) and a corresponding stationary portion of the robot drive and / or sensor. Here, the first drive shaft 339 is drivably connected to one of the motors 370M, 371M for driving the upper arm 326 to rotate about the shoulder joint 332. The second drive shaft 340 (which is concentric with the first drive shaft in this respect) is drivably connected to the other of the motors 370M, 371M for driving the forearm 328 to rotate about the elbow joint 334. Note that the motors 370M, 371M for driving each of the arm links (e.g., the upper arm, forearm, and / or end effector) may be connected in any suitable manner to any suitable controller, such as the controller 11091 for controlling substrate pick-up and substrate placement operations of the robotic transport apparatus 320.

[0024] As in Figure 3A and Figure 3B As can be seen in FIG. 1 , the first pulley 342 is connected to the drive shaft 340 at, for example, the shoulder joint 332, such that as the drive shaft 340 rotates, the first pulley 342 rotates with the drive shaft 340. The second pulley 344 can be rotatably mounted to, for example, the shaft S1 at the elbow joint 334 (e.g., using any suitable bearing B1), and connected to the forearm 328 in any suitable manner (such as, via the shaft 354 (which can be fixed to the upper arm 326)), such that as the second pulley 344 rotates, the forearm 328 rotates with the second pulley 344. As can be appreciated, the first pulley and the second pulley can have any suitable diameters (e.g., drive ratio) relative to each other, such that in one aspect, the pulleys can have the same diameter or different diameters (e.g., the driving pulley can be smaller than the driven pulley, or vice versa). As can also be appreciated, the first pulley 342 and the second pulley 344 can be the driving pulley and the driven pulley, respectively. The second pulley 342 may be coupled to the first pulley 342 in any suitable manner, such as by one or more torque transfer belts 350 (in Figure 3A and Figure 3B 34). The torque transfer belts 350, 351 are illustrated in FIG. 34. The torque transfer belts 350, 351 may be constructed of any suitable material capable of transferring torque from the first pulley 342 to the second pulley 344. In one aspect, the torque transfer belts may be metal belts constructed of any suitable metal.

[0025] As described above, the torque transfer belts 350, 351 form dual opposing belts where at least one end of each torque transfer belt is wrapped relative to itself to achieve greater joint angle rotation, for example, when compared to conventional transport arms (such as those described above). Figures 4A-4C Illustration about Figure 3A 342 and driven or second pulley 344 of the exemplary belt and pulley configuration, however, note that Figures 4A-4C The belt and pulley arrangement illustrated in FIG. 1 may represent any belt and pulley arrangement of the transport apparatus described herein. Figure 4AAs can be seen in the figure, each of the pulleys 442, 444 can have a substantially circular configuration, however, in other aspects, as will be described in more detail below, the pulley can have a cam-like circumferential profile. As can also be appreciated, the pulleys 442, 444 are illustrated as having a substantially 1:1 drive ratio, however, in other aspects, any suitable drive ratio as indicated herein can be provided. Each pulley 442, 444 can include a pulley pair, and include a top pulley portion 442T, 444T and a bottom pulley portion 442B, 444B. In some aspects, the top pulley portion 442T, 444T is separated and different from the corresponding bottom pulley portion 442B, 444B, wherein the top pulley portion 442T is stacked above the bottom pulley portion 442B to form the pulley 442, and the top pulley portion 444T is stacked above the bottom pulley portion 444B to form the pulley 444. Having separate and distinct top and bottom pulley portions can make it easier to wrap the opposing belts around the respective pulley portions, as compared to wrapping two respective opposing belts around a single integral pulley. As can be appreciated, the stacked top pulley portions 442T, 444T and the respective bottom pulley portions 442B, 444B can be coupled to one another so that both the top pulley portions 442T, 444T and the respective bottom pulley portions 442B, 444B rotate with one another as a unit and act as a single integral pulley about a respective axis of rotation. The stacked top pulley portions 442T, 444T and the respective bottom pulley portions 442B, 444B can also reduce manufacturing costs, such as utilizing non-circular pulleys, as compared to the manufacturing costs of, for example, a double-layered single integral pulley having substantially opposing cam profiles on each layer of the pulley.

[0026] Still reference Figures 4A-4C, the torque transmission belts 350, 351 may not form a continuous circular belt around the pulleys 342, 344. Instead, one end of the torque transmission belt 350 may be at least partially wrapped around the first pulley 342 (e.g., in a clockwise direction) and attached to the first pulley, while the other end of the torque transmission belt 350 may be at least partially wrapped around the second pulley 344 (e.g., in a counterclockwise direction) and attached to the second pulley. The ends of the torque transmission belt 350 may be attached to the respective pulleys 342, 344 in any suitable manner, such as by using pins or any other suitable removable or non-removable chemical or mechanical fasteners, as will be described in more detail herein. A second torque transfer belt 351, substantially similar to torque transfer belt 350, may be attached at its ends to pulleys 342, 344 in a manner substantially similar to that described above with respect to torque transfer belt 350, however, the direction in which torque transfer belt 351 is wound around pulleys 342, 344 may be reversed (e.g., one end of torque transfer belt 351 is wound around pulley 342 in a counterclockwise direction, and the other end of torque transfer belt 351 is wound around pulley 344 in a clockwise direction). This dual torque transfer belt configuration places both torque transfer belts 350, 351 under constant tension so that neither torque transfer belt is slack.

[0027] As described above, at least one end of each torque transmission belt 350, 351 is wrapped and wound relative to itself, so that the transmission device generates a rotation position MID (the midpoint of the end effector (or the other articulated arm link) of the end effector (or the other articulated arm link) relative to the other articulated arm link about the corresponding joint pivot axis from the end effector (or the other articulated arm link) to the end effector (or the other articulated arm link) stroke. Figure 2A ) to the maximum travel rotation position MAX of the end effector (or another articulated arm link) ( Figure 2A ) is rotated by more than about 180°. Figure 4B and Figure 4C , a belt such as belt 351 wrapped around a pulley such as pulley 342 is illustrated in FIG, wherein the belt pitch is exaggerated for clarity of the wrapped winding. Figure 4B and Figure 4C As can be seen in some aspects of the disclosed embodiments, the at least one belt 350, 351 is wrapped so that the belt loop is spiraled onto itself on the respective pulley. To facilitate the wrapped winding of the belt 351 (or any other belt described herein) onto the respective pulley, the coupling between the belt 351 and the pulley 342 can be provided from the outer peripheral belt seating surface PSS ( Figure 4C ) moves to the inside of the pulley, where Figure 4C 34 and the end 351E of the belt 351 passes through the belt channel BP into the interior of the pulley 342 (described in more detail herein).

[0028] Reference again Figure 3A and Figure 3B As can be appreciated, for example, any suitable transmission device (such as, for example, the torque transmission belt and pulley transmission devices described herein) can be used to drive the substrate support 330 so that the longitudinal axis 330X of the substrate support 330 remains aligned with the extension and retraction axis of the robot arm 324. For example, referring to Figure 3B , the first pulley 342' may be fixed to the shaft S1 and extend at least partially into the forearm 328. The second pulley 344' may be rotatably mounted at the wrist joint 336 using any suitable bearing B2, such as mounted on the shaft S2 (which may be fixed to the forearm 328). The second pulley 344' may be connected to the end effector 330 in any suitable manner (such as by utilizing the shaft 354J') so that as the second pulley 344' rotates, the end effector 330 rotates with the second pulley 344'. A torque transfer belt 350', 351' substantially similar to the torque transfer belts 350, 351 may couple the first pulley 342' to the second pulley 344' so that relative movement between the forearm 328 and the upper arm 326 causes rotation of the second pulley 344', which in turn causes the end effector 330 to rotate relative to the upper arm and forearm, thereby maintaining the longitudinal axis 330X of the end effector aligned with the extension and retraction axis. In other aspects, a third motor and drive shaft may be added to the robotic transport 320 for driving the substrate support 330 to rotate about the wrist joint 336 in a manner substantially similar to that described herein with respect to the forearm.

[0029] As can be appreciated, refer again to Figure 3A , the substrate holder 330 is illustrated as a double-sided end effector (e.g., an end effector capable of holding one or more substrates on opposite sides of the end effector rotation axis or wrist joint), in other aspects, the substrate holders of the transport arms described herein may have any suitable configuration, such as, for example, a single-sided end effector, a batch end effector (e.g., capable of holding more than one substrate in a stacked or side-by-side manner), or a combination thereof. As may also be appreciated, the upper arm link 326 and the forearm link 328 of the transport arm 324 may have any suitable covers C1, C2 for sealing or otherwise isolating the interior of the arm link from the environment in which the transport arm operates, so that any particles generated by the belts and pulleys may not be transferred to the exterior of the arm link.

[0030] Reference now Figure 3C As can be appreciated, any suitable arm link of the robotic transport apparatus described herein may be slaved and driven by a torque transmission belt, such as those described herein. For example, Figure 3C1700 (which again may illustrate and represent any of the transport apparatuses described herein) includes an arm 1720 having a first or upper arm link 1721 and a second or forearm link 1722 rotatably mounted to the first arm link 1721. These arm links may be driven by any suitable drive section 1700, which may be substantially similar to the drive section 110 described above. In this regard, the drive section 1700 includes a coaxial drive shaft arrangement having an inner drive shaft 1262, an intermediate drive shaft 1261, and an outer drive shaft 1260, each of which is driven by a respective drive motor (not shown, but each motor may be substantially similar to the drive shafts described above with respect to FIG. Figure 3A and Figure 3B The outer drive shaft 1260 may be coupled to the first arm link 1721 about a drive rotation axis X (which may be coaxial with the shoulder axis SX) such that as the outer drive shaft 1260 rotates, the first arm link 1721 rotates therewith. The second arm link 1722 may be slaved to, for example, the housing 1701 of the drive section 1700 (or any other suitable location) such that the shoulder axis SX of the second arm link 1722 is constrained to travel along a substantially linear path as the base arm 1720 is extended and retracted (e.g., a single drive motor causes extension and retraction of the arm 1720). For example, the first pulley 1780 may be mounted substantially concentrically with the drive rotation axis X and grounded in any suitable manner, for example, to the housing 1701 of the drive section 1700 (or any other suitable portion of the transport device) such that the first pulley 1780 is rotationally stationary relative to the first arm link 1721. In other aspects, the first pulley 1780 can be rotationally fixed in any suitable manner. The driven or second pulley 1783 can be rotatably mounted at the elbow axis EX of the arm 1720 in any suitable manner, such as by any suitable bearing EXB. The second pulley 1783 can be coupled to the second arm link 1722 by, for example, the shaft 1763, so that as the second pulley 1783 rotates, the second arm link 1722 rotates with it. The pulleys 1780, 1783 can be coupled to each other in any suitable manner, such as by a torque transmission belt 1791 such as described herein. In one aspect, the pulleys 1780, 1783 can be coupled to each other, wherein at least two torque transmission belts terminate at either end of the pulleys and are then re-tensioned to each other to substantially eliminate slack and backlash as described above. In other aspects, any suitable transmission member can be used to couple the pulleys 780, 783.

[0031] In this regard, a coaxial main shaft (drive shaft arrangement) having an outer shaft 1271 and an inner shaft 1270 may be located at the shoulder axis SX of the second arm link 1722. The outer shaft 1271 may be driven by, for example, the intermediate drive shaft 1261 in any suitable manner. For example, a pulley 1781 may be coupled to the intermediate drive shaft 1261 such that as the drive shaft 1261 rotates, the pulley 1781 rotates with it. An idler pulley 1784 may be disposed within the first arm link 1721 for rotation about the elbow axis EX. The idler pulley 1784 may be coupled to the shaft 1765 such that as the idler pulley 1784 rotates, the shaft 1765 rotates with it. The shaft 1765 and the pulley 1784 may be supported in any suitable manner, such as by any suitable bearing EXB. The idler pulley 1784 may be coupled to the pulley 1781 in any suitable manner, such as by any suitable transfer device 1790 substantially similar to those described herein. The second idler pulley 1787 may also be coupled to the shaft 1765 within the second arm link 1722 such that the pulleys 1784 and 1787 rotate in unison. The shoulder pulley 1789 may be coupled to the shaft 1271 such that the shaft 1271 and the shoulder pulley 1789 rotate in unison. The second idler pulley 1787 may be coupled to the shoulder pulley 1789 in any suitable manner, such as by any suitable transfer device 1794 substantially similar to those described herein (e.g., where the idler pulley 1787 may be referred to as a drive pulley relative to the shoulder pulley 1789, and the shoulder pulley 1789 may be referred to as an idler pulley relative to the pulley 1787). In one aspect, the at least one belt of the transfer device 1794 is wrapped around the pulley 1789 relative to itself.

[0032] The inner shaft 1270 of the coaxial spindle can be driven by, for example, the inner drive shaft 1262 in any suitable manner. For example, the pulley 1782 can be coupled to the inner drive shaft 1262 so that as the drive shaft 1262 rotates, the pulley 1782 rotates with it. An idler pulley 1785 can be disposed within the first arm link 1721 for rotation about the elbow axis EX. The idler pulley 1785 can be coupled to the shaft 1764 so that as the idler pulley 1785 rotates, the shaft 1764 rotates with it. The shaft 1764 and the pulley 1785 can be supported in any suitable manner, such as using any suitable bearing EXB. The idler pulley 1785 can be coupled to the pulley 1782 in any suitable manner, such as by any suitable transmission device 1792 substantially similar to those described herein. The second idler pulley 1786 can also be coupled to the shaft 1764 within the second arm link 1722 so that the pulleys 1785 and 1786 rotate in unison. Shoulder pulley 1788 may be coupled to inner shaft 1270 such that shaft 1270 and shoulder pulley 1788 rotate in unison. Second idler pulley 1786 may be coupled to shoulder pulley 1788 in any suitable manner, such as by any suitable transfer device 1793 substantially similar to those described herein (e.g., where idler pulley 1786 may be referred to as a drive pulley relative to shoulder pulley 1788, and shoulder pulley 1788 may be referred to as an idler pulley relative to pulley 1786). In one aspect, the at least one belt of transfer device 1793 is wrapped around pulley 1788 relative to itself.

[0033] Note that one or more of the pulleys 1780-1789 may be substantially similar to those described herein. For example, in some aspects, one or more of the pulleys 1780-1789 may have a circular shape or a non-circular shape. In some aspects, one or more of the pulleys 1780-1789 may have a top pulley portion and a bottom pulley portion that are coupled together to form a stacked or paired pulley. As can be appreciated, the belt of the transfer device 1790-1794 may be wound around one or more of the corresponding coupled pulleys so as to be wrapped relative to itself in the manner described herein.

[0034] As can be appreciated, in one aspect, any suitable end effector(s) EE1, EE2 (such as those described herein) can be mounted to shafts 1270, 1271 in any suitable manner such that rotation of pulleys 1788, 1789 causes rotation of end effector(s) EE1, EE2 about a joint pivot axis (e.g., wrist axis WX). Here, each of the end effectors is individually connected to a respective pulley 1788, 1789 so as to rotate independently relative to each other about a joint pivot axis (e.g., wrist axis WX).

[0035] In another aspect, any suitable transfer arm 1214 (such as those described herein, e.g., having any suitable number of arm links and end effectors) may be mounted to the shafts 1270, 1271 such that the arm 1720 is configured as a "boom" or "base" type arm for transporting the transfer arm 1214 through, e.g., an elongated transport chamber, as described in International Patent Application No. PCT / US13 / 25513, entitled "Substrate Processing Apparatus," filed on February 11, 2013, the disclosure of which was previously incorporated herein by reference in its entirety. For example, with reference to Figure 3D , illustrates an automation or transfer module 2030 according to aspects of the disclosed embodiments, wherein substrates are transferred between process tool modules 2025, 2026, 2040 by the automation module 2030 in a single touch of the substrate. The process tool modules can be coupled to the automation module 2030 in any suitable manner (e.g., side by side, stacked one above the other, and / or any other suitable arrangement), such as through ports 2030P1-2030P6 of the automation module 2030. The automation module 2030 includes a transfer robot 2080. In one aspect, the transfer robot 2080 can include a drive section 2081, which can be substantially similar to those described above. A boom or base arm 2082B can be rotatably mounted to the drive section 2081, and one or more multi-link arms 2082 having one or more corresponding substrate holders 2083 can be rotatably mounted to the base arm 2082B at a shoulder axis SX. The drive section 2081 can be configured to rotate the arm(s) 2082 and the end effector(s) 2083 as a unit about the shoulder axis SX so that the arm(s) 2082 can transfer substrates in the direction of arrow 2400 (e.g., along the longitudinal axis of the automation module 2030 and / or the vacuum tunnel) as well as in the direction of arrow 2401 for transferring substrates to both lateral sides of the automation module 2030. As can be appreciated, the base arm 2082B can rotate about the axis BX for transporting the one or more multi-link arms 2082 and their end effectors along the length of the automation module 2030 in the direction 2400.

[0036] Reference again Figure 3C Any one or more of the transport devices described herein may include any suitable Z-axis drive 1203. The Z-axis drive 1203 may be configured to move the transfer arm in a direction 1799 that is substantially perpendicular to the extension / retraction axis of the transport arm.

[0037] Reference again Figures 4A-4C , aspects of the disclosed embodiments provide that each belt is wrapped more than one turn around at least one of the pulleys to which the belt is connected. Figure 4B and Figure 4C Schematically illustrates an example of a belt 351 that is wrapped more than one turn around pulley 342 so that belt 351 is wrapped around itself, noting that other belts described herein may be wrapped in the same manner as described with respect to Figures 4A-4C 342, 344 (including top and bottom portions 342T, 342B, 344T, 344B when the pulley is a two-piece pulley) are illustrated as having a substantially circular configuration, in other aspects, the pulleys may have a cam-like circumferential profile based on the rotation angle of the pulley (e.g., forming a variable diameter for a non-circular pulley) so that the motion output (e.g., releasing / unwinding the belt around the pulley) and the motion input (e.g., winding / winding the belt around the pulley) are smooth (e.g., so as to substantially minimize induced vibrations caused by the belt moving on the stepped pulley surface that may be formed by the belt loops around the pulley). In one aspect, the cam-like circumferential profile of the pulleys may form a compensator (as will be described in more detail herein) that maintains a steady state or substantially constant tension in the relative belts and a steady state or substantially constant drive ratio between the pulleys (e.g., with a variability of less than about 1%). In the event that one or more of the pulleys (such as, for example, pulleys 342, 344 (including top and bottom portions 342T, 342B, 344T, 344B when the pulleys are two-piece pulleys)) are non-circular pulleys, the drive ratio between the pulleys 342, 344 can be a variable drive ratio. If desired, any variability in the drive ratio can be resolved by the controller 299, where the variable drive ratio can be modeled and compensated for (e.g., resolved) by the controller 299 (e.g., the controller forms a drive ratio resolver or otherwise includes a drive ratio resolver). For example, non-circular pulleys or sprockets are described in U.S. Patent No. 4,865,577, issued on September 12, 1989, entitled "Noncircular Drive," the disclosure of which is incorporated herein by reference in its entirety. A person skilled in the art of robotic manipulation equipment will understand how to model the variable drive ratio and generate the corresponding motion control of the transport arm described herein based on U.S. Patent No. 4,865,577 and what is known to those skilled in the art regarding robotic motion control, so that further discussion of the modeling and motion control generation is omitted from this description. As can be appreciated, any pulley coupled to a common belt described herein may have a variable drive ratio as described herein, while in other aspects, any pulley coupled to a common belt may have a substantially constant drive ratio.

[0038] Also refer to Figure 4D In some aspects, the outer peripheral belt seating surface PSS of a pulley (such as pulley 342) and a belt (such as belt 351) can be curved (eg, Figure 4D ), however, in other aspects, the curvature can be convex. Such curvature of the outer peripheral belt seating surface PSS and the belt can promote self-tracking / alignment of the belt relative to the pulley to substantially prevent axial slippage of the belt along the axial direction 477 of the pulley.

[0039] refer to Figure 4A , Figure 4C , Figure 5A , Figure 5B , Figure 6 and Figure 7 , one exemplary connection of a belt to a pulley will be described in accordance with aspects of the disclosed embodiments. Note that the connection between belt 351 and top pulley portion 342T will be described for exemplary purposes only, and that the connection described herein may be employed with any of the pulleys / pulley portions and belts described herein. In some aspects, such as where the pulleys are non-circular, it is also noted that each bottom pulley portion may be substantially similar but opposite to the corresponding top pulley portion (as will be described herein) to account for the varying lengths of the relative belt loops around the pulleys. As described in Figure 4A , Figure 4C , Figure 5A and Figure 7 510 , the top pulley portion 342T includes a belt channel BP that extends from the outer peripheral belt seating surface PSS to an orifice 510 on the interior (e.g., within the peripheral circumferential limit) of the top pulley portion 342T. The belt channel BP is formed in the top pulley portion 342T so as to have an inner wall BPW1 (e.g., the side of the belt channel BP closest to the pulley center) and an outer wall BPW2 (e.g., the side of the belt channel BP closest to the outer peripheral belt seating surface PSS). The belt channel BP leads to the outer peripheral belt seating surface PSS such that the inner wall BPW1 is substantially tangential to the outer peripheral belt seating surface PSS so as to provide a smooth transition of the belt 351 from the outer peripheral belt seating surface PSS into the belt channel BP. The belt channel BP extends along an arcuate path to the orifice 510, wherein the distance between the belt channel BP and the outer peripheral belt seating surface PSS increases along the arcuate path toward the orifice 510.

[0040] As in Figure 5A As can be seen in FIG. 5 , the belt channel BP leads to the aperture 510 such that the end 351E1 of the belt 351 at least partially extends into the aperture 510. The end 351E of the belt 351 includes a retainer aperture 600. The pulley 542 includes a retainer member 530 ( Figure 5B , Figure 6 and Figure 7) of the cross-aperture 501, the retainer member extending in a direction transverse to and across at least a portion of one or more of the belt passage BP and the aperture 510 so as to extend through the retainer aperture 600 of the belt 351 (see Figure 5B , Figure 6 and Figure 7 ). When the belt end 351E is at least partially inserted into the aperture 510 and the retainer member 530 extends through both the cross aperture 501 and the retainer aperture 600, the belt 351 is substantially prevented from being pulled from the belt channel because the retainer member 530 anchors the end 351E of the belt 351 to the top pulley portion 342T. The retainer member 530 can be held in place at least by tension applied to the retainer member 530 by the belt 351, such as when the belt 351 is tensioned against the opposing belt 350 as described herein. The retainer member 530 can be any suitable retainer, such as a pin, a clip, a bolt, etc.

[0041] As in Figure 7 As can be seen in FIG. 1 , the belt channel BP has a width 700 between the inner wall BPW1 and the outer wall BPW2, which is slightly larger than the width 620 of the belt 351 (see also FIG. 1 ). Figure 6 ), so that substantially no steps are formed between the layers of belt loops at the exit 750 of the belt passage BP, where the belt 351 transitions from being seated on the outer peripheral belt seating surface PSS of the pulley 342 to being seated on itself (i.e., the belt loops lap onto themselves, where the overlapping (inner) belt loops have outer (radially relative to the pulley axis) belt loops seated on the inner belt loops). This substantially step-free transition at the exit 750 of the belt passage BP supports the belt 351 and substantially maintains the vibration level that may be generated by the winding and unwinding of the belt 351 from the top pulley portion 342T at a substantially constant level, as will be described herein. In this regard, the belt passage BP and / or the orifice 510 may be formed in any suitable manner, such as by electrical discharge machining (EDM). In some aspects, the orifice 510 may be omitted. Note that the outer peripheral belt seating surface PSS may be formed by grinding, milling, etc., so as to have any suitable circular or non-circular profile.

[0042] refer to Fig. 8A , Figure 8B and Figure 8C, another exemplary connection of a belt to a pulley according to aspects of the disclosed embodiments will be described. Note that the connection between the belt 351 and the top pulley portion 342T will be described for exemplary purposes only, and the connection described herein can be employed with any pulley / pulley portion and belt described herein. In some aspects, such as in the case where the pulley is non-circular, it is also noted that each bottom pulley portion can be substantially similar but opposite to the corresponding top pulley portion (as will be described herein) to account for the length variation of the relative belt loops around the pulley. In this regard, the top pulley portion 342T includes a body 800 and a clamp portion 810 that is coupled to the body 800 in any suitable manner to form an outer peripheral belt seating surface PSS. In one aspect, the body 800 includes a clamp coupling surface 850, and the clamp portion 810 includes a mating body coupling surface 851 that is in substantial contact with the clamp coupling surface 850 when the body 800 and the clamp portion 810 are coupled to each other. For example, the clamp portion 810 is coupled to the body 800 using any suitable fasteners 820 (e.g., bolts, screws, etc.) and alignment features 821 (e.g., pins, grooves, etc.) such that the clamp portion 810 can be decoupled from and coupled to the body 800 in a repeatable manner (e.g., in substantially the same spatial relationship each time the clamp portion 810 is coupled to the body 800). The body 800 may include an aperture 830 through which the fastener 820 is accessible such that the outer peripheral band seating surface PSS remains free of fastener holes / protrusions.

[0043] In this regard, a belt channel BP is formed between the body 800 and the clamp portion 810 and extends at least partially along one or more of the clamp coupling surface 850 and the mating body coupling surface 851. Fig. 8A In the example shown in , the belt channel BP is formed in the mating body coupling surface 851, however, in other aspects, the belt channel can be formed in the clamp coupling surface 850 or in both the clamp coupling surface 850 and the mating body coupling surface 851. In this regard, the end 351E of the belt 351 can include a fastener clearance aperture 890 and a retainer aperture 600. In this regard, one or more of the alignment features 821 pass through the retainer aperture 600 to anchor the end 351E of the belt 351 to the top pulley portion 342T without the fastener 820 substantially contacting the fastener clearance aperture 890. In other aspects, the belt 351 can be anchored to the top pulley portion 342T by compression (e.g., friction) between the clamp portion 810 and the body 800. In other aspects, the belt 351 can be anchored to the top pulley portion 342T in any suitable manner.

[0044] In a manner similar to that described above, the belt channel BP has a width 700 between the inner wall BPW1 and the outer wall BPW2 (the inner wall BPW1 being formed by the body 800 and the outer wall BPW2 being formed by the clamp portion 810) that is slightly greater than or substantially equal to the width 620 of the belt 351 (see also Figure 6 ), so that substantially no step is formed between the belt loop layers at the exit 750 of the belt passage BP, wherein the belt 351 transitions from being seated on the outer peripheral belt seating surface PSS of the pulley 342 to being seated on itself (i.e., with Figure 7 ). Such substantially step-free transition at the outlet 750 of the belt channel BP supports the belt 351 and substantially maintains the vibration level that may be generated by the winding and unwinding of the belt 351 from the top pulley portion 342T at a substantially constant level, as will be described herein. In this regard, the belt channel BP and the outer peripheral belt seating surface PSS can be formed in any suitable manner, wherein, for example, the clamp portion 810 is connected to the body 800. In one aspect, the belt channel BP, the orifice 830 and / or the outer peripheral belt seating surface PSS can be formed by electrical discharge machining. In other aspects, the outer peripheral belt seating surface PSS can be formed by grinding, milling, etc., so as to have any suitable circular or non-circular profile.

[0045] refer to Fig. 9A , Fig. 9B and Fig.11 , another exemplary connection of a belt to a pulley will be described in accordance with aspects of the disclosed embodiments. Note that the connection between belt 351 and top pulley portion 342T will be described for exemplary purposes only, and that the connection described herein may be employed with any of the pulleys / pulley portions and belts described herein. In some aspects, such as where the pulleys are non-circular, it is also noted that each bottom pulley portion may be substantially similar to but opposite of the corresponding top pulley portion (as will be described herein) to account for the variation in length of the relative belt loops around the pulleys. In this regard, pulley 342 (and top pulley portion 342T) may be substantially similar to the connection described above with respect to Figure 4A-7342T (and the top pulley portion), however, in this regard, the pulley includes a belt tensioner 900 on the interior of the top pulley portion 342T (the bottom pulley portion 342B includes a belt tensioner in a similar manner) that is movable along the belt passage BP in a direction 920. In this regard, the belt tensioner 900 is at least partially disposed within the aperture 910 into which the belt passage BP opens. Here, the retainer member 530 (which extends through the retainer aperture 600 in the end 351E of the belt 351) extends into the recess 930 in the belt tensioner 900 so as to move along the direction 920 with the belt tensioner 900. As can be appreciated, because the retainer member 530 extends through the end 351E of the belt 351, the end 351E of the belt 351 also moves along the direction 920 with the belt tensioner 900 so as to tighten or loosen the tension in the belt 351.

[0046] The belt tensioner 900 may be moved in direction 920 in any suitable manner. For example, a wedge or other suitable spacer (substantially similar to a spacer) may be driven between the side 940 of the belt tensioner 900 and the opposing wall 941 of the aperture 910. Fig. 12B and Fig. 12C The wedge 1086 in the belt tensioner 900 is moved in the direction 920 and increases the tension in the belt 351. In other aspects, the belt tensioner 900 can be combined with the jack screw mechanism 1210 (see Fig. 12A 1210 is coupled to the top pulley portion 342T (note that the bottom pulley portion may include a similar jackscrew mechanism). Here, the jackscrew mechanism 1210 includes a base 1212 that is fixed to the top pulley portion 342T (so as not to move relative to the top pulley portion). The base 1212 includes a threaded aperture into which the jackscrew 1211 is inserted. The jackscrew may be fixed to the belt tensioner 900 (such as with a clamp or the like that allows the jackscrew to rotate relative to the belt tensioner 900 while limiting axial movement between the jackscrew and the belt tensioner) so as to pull the belt tensioner 900 and the end 351E of the belt 350 in the direction 920 to increase the tension in the belt 351.

[0047] refer to Fig. 10A , Fig. 10B and Fig.11, another exemplary connection of a belt to a pulley will be described in accordance with aspects of the disclosed embodiments. Note that the connection between belt 351 and top pulley portion 342T will be described for exemplary purposes only, and that the connection described herein may be employed with any of the pulleys / pulley portions and belts described herein. In some aspects, such as where the pulleys are non-circular, it is also noted that each bottom pulley portion may be substantially similar to but opposite of the corresponding top pulley portion (as will be described herein) to account for the variation in length of the relative belt loops around the pulleys. In this regard, pulley 342 (and top pulley portion 342T) may be substantially similar to the connection described above with respect to Figure 4A-7 The pulley (and top pulley portion) described above, however, in this regard, the top pulley portion 342T includes a belt entry aperture BA rather than a belt channel BP. Compared to electrical discharge machining, the belt entry aperture BA can be formed by conventional machining processes, such as by casting, forging, milling, etc. (although electrical discharge machining can be used to form the entry aperture BA). As shown in Fig. 10A and Fig. 10B , the entry aperture BA is substantially larger than the width 620 of the belt 351. The entry aperture BA can be formed with a belt coupling support surface 1010 that is tangentially away from the outer peripheral belt seating surface PSS so as to form a smooth (e.g., tangential) transition between the outer peripheral belt seating surface PSS and the belt coupling support surface 1010. In this regard, the top pulley portion 342T includes a belt tensioner 900 on the interior of the top pulley portion 342T (the bottom pulley portion 342B includes a belt tensioner in a similar manner). The belt tensioner 900 is substantially similar to the belt tensioners described above and can be moved in a direction 920 in a manner similar to those described above so that the end 351E of the belt 351 moves within the aperture 910 in the direction 920 to increase or decrease the tension in the belt 351 as described above. In one aspect, such as in the case where the belt itself is not wrapped around a pulley (such as, on a non-circular or cam-shaped drive pulley described herein, or described below) Figure 16-18A In the case of the aspect shown in the figure), the belt tensioner can be incorporated into Fig. 12B and Fig. 12C600. In this regard, each belt anchor point 1200 includes a base 1084 to which a pin 1062 is mounted. The end of the corresponding belt includes a hole (e.g., a retainer aperture 600) through which a handle 1080 of the pin 1062 protrudes. A retaining spring clip 1082 or other suitable retainer is attached to the handle 1080 to secure the belt to the handle 1080 (note that a retaining spring clip configuration may also be employed with respect to the retainer 530 described above, wherein the clip is mounted on the retainer 530 through the aperture 510, 910 between the belt and the wall of the aperture 510, 910). The handle 1080 protrudes from the base 1084 to provide an attachment location for the belt. In other aspects, the handle 1080 may protrude directly from the circumferential edge or side of the pulley / pulley portion. In one aspect, the hole in the band segment is slightly larger than the handle 1080, and the retaining clip 1082 does not hold the band tightly, allowing the band to pivot freely about the handle 1080. In one aspect, the base 1084 is an adjustable base that provides for position adjustment of the pin 1062 to thereby adjust the tension of the band. For example, the screw 1086 enters a threshold opening in the pulley / pulley portion and holds a tightening wedge 1088 adjacent to the pulley / pulley portion. One face of the tightening wedge 1088 engages a diagonal surface 1090 of the base 1084. To increase the tension in the band, the screw 1086 is tightened, thereby pushing the tightening wedge 1088 downward in the direction of arrow A. This pushes the wedge 1088 against the diagonal surface 1090, thereby forcing the base 1084 to slide in the direction of arrow B. Conversely, to reduce the tension in the band, the screw 1086 is loosened. In other aspects, the belt can be coupled to the pulley / pulley portion and other pulleys of the transport arm in any suitable manner. Suitable examples of belt anchor points can be found in U.S. Patent No. 5,778,730, issued July 14, 1998, the disclosure of which is incorporated herein by reference in its entirety.

[0048] refer to Figure 3C , Fig.13A , Fig. 13B , Fig.14 and Fig.15In one aspect, the disclosed embodiments include a set of spiral pulley transfer pairs whose profiles (e.g., driven and drive sides) can be uniquely determined so that variations in drive ratio and belt tension are minimized due to the multiple wrapping effects of the overwound belt. Input transfer design variables include (but are not limited to) belt thickness, nominal drive ratio, pulley-to-pulley distance, and belt bend radius. For example, a torque transfer device (such as, for example, transfer device 1794, which may be substantially similar to any of the torque transfer devices described above) includes dual opposing belts 1300, 1301 (substantially similar to those dual opposing belts described above) having a winding geometry on at least one of the pulleys 1787, 1789 that provides for rotation of the end effector EE1, EE2 (which may be similar to the end effectors 140, 140A, 140B, 141, 142 described above) about the joint pivot axis or wrist axis WX (relative to the articulated arm link 1722) at a predetermined reduction ratio, the rotation being end-to-end of the end effector stroke (such as at Figure 2A Note that while transfer device 1794 and pulleys 1787, 1789 are used for exemplary purposes, any other transfer device and corresponding pulley described herein may be similarly configured as transfer device 1794 and pulleys 1787, 1789.

[0049] The winding geometry of the dual opposing belts 1300, 1301 achieves asymmetric winding and unwinding rates of the respective opposing belts 1030, 1301 so that at least one of the pulleys 1787, 1789 connected to these belts (in this example, both pulleys 1787, 1789 exhibit asymmetric winding and unwinding rates) rotates together. In order to compensate for the asymmetric winding and unwinding of the belts, the other pulley 1787, 1789 of the at least one of the pulleys 1787, 1789 connected to each other by the opposing belts 1300, 1301 is configured with a compensator, which is arranged to compensate for the asymmetric winding and unwinding of the respective opposing belts 1300, 1301 so as to maintain a substantially constant tension on each of the opposing belts 1300, 1301 throughout the end effector stroke. As will be described herein, the compensator has a geometry that produces asymmetric unwinding and winding rates of the corresponding relative belts 1300, 1301 on the other pulley 1787, 1789 in order to allow the other pulley 1787, 1789 to rotate together, which are commensurate with the asymmetric winding and unwinding rates of the corresponding relative belts 1300, 1301 on at least one of the pulleys 1787, 1789.

[0050] In this regard, pulley 1787 includes a top pulley portion 1787T and a bottom pulley portion 1787B, which may be substantially similar to the pulley portions 342T, 342B described above. Each of the top pulley portion 1787T and the bottom pulley portion 1787B has a non-circular pulley profile having a cam-like protrusion 1370, 1371 for each of the respective opposing belts 1300, 1301, wherein the respective cam protrusions 1370, 1371 of the respective non-circular profiles form a compensator for the asymmetric winding rate and unwinding rate of pulley 1789. The respective cam lobes 1370, 1371 of the respective non-circular pulley profiles are arranged out of phase (e.g., the start / end points of the cam lobes 1371 of the top pulley portion 1787T are at different rotation angles relative to the start / end points of the cam lobes 1370 of the bottom pulley portion 1787B relative to, for example, the axis EX) on the pulley circumference, with a difference of degrees (see Fig.13A and Fig. 13B ) defines the compensator geometry. Here, each of the cam lobes 1370, 1371 includes a respective cam-like outer peripheral band seating surface PSS1T, PSS1B, as will be described in more detail below.

[0051] Similarly, pulley 1789 includes a top pulley portion 1789T and a bottom pulley portion 1789B, which may be substantially similar to the pulley portions 342T, 342B described above. In this regard, each of the top pulley portion 1789T and the bottom pulley portion 1789B has a non-circular pulley profile having a cam-like protrusion 1372, 1373 for each of the respective opposing belts 1300, 1301, wherein the respective cam protrusions 1372, 1373 of the respective non-circular profiles form a compensator for the asymmetric winding rate and unwinding rate of pulley 1787. The respective cam lobes 1372, 1373 of the respective non-circular pulley profiles are arranged out of phase (e.g., the start / end points of the cam lobes 1372 of the top pulley portion 1789T are at different rotation angles relative to the start / end points of the cam lobes 1373 of the bottom pulley portion 1789B relative to, for example, the axis EX) on the pulley circumference, the difference being a degree (see Fig.13A and Fig. 13B ) defines the compensator geometry. Here, each of the cam lobes 1372, 1373 includes a corresponding cam-shaped outer peripheral band seating surface PSS2T, PSS2B, as will also be described in more detail below.

[0052] The cam-shaped outer peripheral belt seating surfaces PSS1T, PSS1B, PSS2T, PSS2B at least partially define the winding geometry of the dual opposing belts 1300, 1301 around their respective pulleys. In one aspect, the winding geometry provides a travel midpoint from the end effector travel (e.g., such as Figure 2A position MID) to either end (e.g., such as for a rotation of at least 360° RR Figure 2A The end effector EE1, EE2 rotation RR of more than substantially 180° (position MAX, MAXR in the stroke), and in some aspects, the rotation RR is greater than about + / - 300° or greater than about + / - 360° from the midpoint of the stroke. In one aspect, the cam-like outer peripheral belt seating surface PSS1T, PSS1B, PSS2T, PSS2B can be formed integrally with the corresponding pulley (such as when the pulley is cast, forged, machined, etc.). In other aspects, the cam-like outer peripheral belt seating surface PSS1T, PSS1B, PSS2T, PSS2B can be formed on the corresponding pulley, such as having a "sacrificial belt loop" on at least the driven side of the transfer device. The sacrificial belt loop can provide reduced belt tension variability, reduced wear and / or reduced particle generation.

[0053] In this example, pulley 1789 may be referred to as an idler pulley or driven pulley (to which end effector EE1 or EE2 is connected), and pulley 1787 may be referred to as a drive pulley. As described above, idler pulley 1789 is a non-circular pulley. Idler pulley 1789 has a belt seating surface (e.g., the respective cam-shaped outer peripheral belt seating surfaces PSS2T, PSS2B of the top pulley portion 1789T and the bottom pulley portion 1789B) having a non-circular radial periphery (see Fig.13A and Fig. 13B ), on which the at least one belt 1300, 1301 is seated when the belt 1300, 1301 is wound and dispensed from the idler pulley 1789. The drive pulley 1787 is also a non-circular pulley having a belt seating surface (e.g., the respective cam-shaped outer peripheral belt seating surfaces PSS1T, PSS1B of the top pulley portion 1787T and the bottom pulley portion 1787B) having a non-circular radial periphery (see Fig.13A and Fig. 13B), at least one belt 1300, 1301 is seated on the non-circular radial periphery when the belt 1300, 1301 is wound and dispensed from the drive pulley 1787. Although in the example provided both the idler pulley and the drive pulley are non-circular, in other aspects the idler pulley can be circular and the drive pulley can be non-circular, or vice versa. The pulley profiles of the idler pulley 1789 and the drive pulley 1787 (e.g., (e.g., the respective cam-like outer peripheral belt seating surfaces PSS1T, PSS1B, PSS2T, PSS2B of the respective top pulley portions 1787T, 1789T and bottom pulley portions 1787B, 1789B) engage the winding and unwinding of the respective relative belt 1300, 1301 so as to maintain a substantially constant reduction ratio between the idler pulley 1789 and the drive pulley 1787 in each rotational direction throughout the end effector extension and retraction strokes.

[0054] As in Figure 3C , 13A 1787, the top pulley portion 1787T and the bottom pulley portion 1787B of the pulley 1787 are stacked one above the other and coupled to each other so as to rotate in unison about the axis EX. The profiles of the cam-like outer peripheral belt seating surfaces PSS1T, PSS1B of the top pulley portion 1787T and the bottom pulley portion 1787B are arranged relative to each other so as to compensate for the rate at which the top belt 1300 and the bottom belt 1301 are dispensed or retracted by the respective top pulley portion 1787T and the bottom pulley portion 1787B. Similarly, the top pulley portion 1789T and the bottom pulley portion 1789B of the pulley 1789 are stacked one above the other and coupled to each other so as to rotate in unison about the axis EX.

[0055] The profiles of the cam-shaped outer peripheral belt seating surfaces PSS2T, PSS2B of the top pulley portion 1789T and the bottom pulley portion 1789B are arranged relative to each other so as to compensate for the rates at which the top belt 1300 and the bottom belt 1301 are dispensed or retracted by the respective top pulley portion 1789T and the bottom pulley portion 1789B. For example, the stacked pulley portions 1787T, 1787B may be arranged relative to each other so that the cam-shaped outer peripheral belt seating surfaces PSS1T, PSS1B are opposite. For example, when the pulley portion 1787T dispenses / unwinds (or retracts / winds) the belt 1030 from the smaller radius portion of the cam-shaped outer peripheral belt seating surface PSS1T, the pulley portion 1787B dispenses / unwinds (or retracts / winds) the belt 1301 from the larger radius portion of the cam-shaped outer peripheral belt seating surface PSS1B, as shown in FIG. Fig.13A and Fig. 13BSimilarly, the stacked pulley portions 1788T, 1789B may be arranged relative to each other so that the cam-shaped outer peripheral belt seating surfaces PSS2T, PSS2B are opposite. For example, when the pulley portion 1789T dispenses / unwinds (or retracts / winds) the belt 1030 from the smaller radius portion of the cam-shaped outer peripheral belt seating surface PSS2T, the pulley portion 1789B dispenses / unwinds (or retracts / winds) the belt 1301 from the larger radius portion of the cam-shaped outer peripheral belt seating surface PSS2B, as shown in FIG. Fig.13A and Fig. 13B Note that Fig.13A , belt 1300 is shown as being wound around pulley portion 1787T and unwound from pulley portion 1789T, while belt 1301 is wound around pulley portion 1789B and unwound from pulley portion 1787B; and in Fig.13A , belt 1300 is shown unwound from pulley portion 1787T and wound around pulley portion 1789T, while belt 1301 is unwound from pulley portion 1789B and wound around pulley portion 1787B).

[0056] The profile of the cammed outer peripheral belt seating surfaces PSS1T, PSS1B, PSS2T, PSS2B can be determined using the following equations to determine the respective lengths of the top and bottom belts wrapped around a respective one of the top pulley portions 1787T, 1789T and the bottom pulley portions 1787B, 1789B, [1] in, [2] and [3] In the above equations [1]-[3], L is the length of the belt wound around the corresponding pulley portion, D0 is the minimum diameter of the cam-shaped outer peripheral belt seating surface PSS1, D1 is the maximum diameter of the cam-shaped outer peripheral belt seating surface PSS1, φ0 is the angle (with respect to a predetermined reference position) at which the cam profile begins, φ1 is the angle (with respect to a predetermined reference position) at which the cam profile ends, and h is the thickness of the belt. Note that Fig.14 An exemplary graph is illustrated for a given non-circular pulley (such as pulley 1787) illustrating the difference in length of one of the belts 1300, 1301 of the opposing belts wound around the non-circular pulley for a given rotation angle of the non-circular pulley, which length difference is "absorbed" or compensated for during winding and unwinding of the belt 1300, 1301 from the non-circular pulley (such as pulley 1787) by a compensator coupled to the other pulley (such as pulley 1789) of the opposing belt, as described above. Fig.13A and Fig. 13B As shown in the figure.

[0057] Also refer to Fig.15 , the graph illustrates the transfer device (such as, Fig.13A and Fig. 13B 1787) relative to the angle of the drive pulley 1787. The graph illustrates the vibration frequency (e.g., corresponding to belt tension) at a drive pulley (such as pulley 1787) in both clockwise (CW) and counterclockwise (CCW) rotational directions, and identifies the mid-point of travel of the rotation (which may coincide with the mid-point of travel of the end effector). Fig.15 In the graph, the curves are shown for: Fig. 10A and Fig. 10B A circular pulley with a belt anchor (e.g., the belt anchor is machined using conventional manufacturing techniques) as shown in (i.e., identified as "circular machined" on the graph); Fig. 9A and Fig. 9B A circular pulley with a belt anchor (eg, formed by EDM) as shown in FIG. 1 (ie, identified as “Circular EDM” on the graph); Fig. 10A and Fig. 10B A non-circular pulley with a belt anchor (eg, machined using conventional manufacturing techniques) as shown in (ie, identified as "spiral machined" on the graph); and Fig. 9A and Fig. 9B A non-circular pulley with a belt anchor (e.g., formed by EDM) is shown in FIG. (i.e., identified as "Spiral EDM" on the graph). In this example, the tension on the belt is set to about 39 Hz at the mid-point of travel. As shown in FIG. Fig.15 It can be seen that the tension at the drive pulley is substantially stable throughout the stroke. Also note that the non-circular drive pulley and non-circular idler pulley pair provides the most stable belt tension compared to other pulley combinations (e.g., a round drive pulley with a round idler pulley, a non-circular drive pulley with a round idler pulley, or a round drive pulley with a non-circular idler pulley).

[0058] refer to Fig.16 , an exemplary transmission device is illustrated, which includes a driving pulley 1600 and an idler pulley / driven pulley 1601, which can be substantially similar to any driving pulley and idler pulley pair described herein. The driving pulley 1600 and the idler pulley 1601 are connected to each other by relative belts 1610, 1611, which are substantially similar to the relative belts described herein. For exemplary purposes only, the drive ratio between the driving pulley 1600 and the idler pulley 1601 is about 2: 1, however, any suitable drive ratio can be used. Fig.16The pulley and belt configuration illustrated in FIG. 1 provides at least + / - about 320° rotation of the idler pulley 1601 as the drive pulley 1600 rotates without wrapping (e.g., overlapping) the belts 1610, 1611. Here, the about + / - 320° rotation of the idler pulley 1601 is based on a nominal (nominal relative to the slightly variable drive ratio of non-circular pulleys) drive ratio of about 2:1. Note, however, that this aspect of the disclosed embodiment can be extended to different drive ratios while substantially avoiding belt loops on the drive pulley 1600, depending on the desired angular travel of the idler pulley.

[0059] refer to Fig.17A and Fig. 17B In one aspect of the disclosed embodiment, the belts 1710, 1711 are configured to be wound around the respective pulleys 1700, 1701 for multiple turns without overlap of the belt along the circumference of the pulley (i.e., the belt rests on itself). In this example, the pulleys 1700, 1701 can be circular pulleys, but in other respects the pulleys can be substantially similar to any of the pulleys described above. The opposing belts 1710, 1711 are also substantially similar to those opposing belts described above, however, in this example, the terminal ends of the belts 1710, 1711 have a tooth configuration to provide for the belts 1710, 1711 to be wound around the pulleys 1700, 1711 for multiple turns without overlap of the belts. This aspect of the disclosed embodiment can provide a substantially constant drive ratio between the pulleys 1700, 1701.

[0060] For example, belt 1711 includes a center belt segment 1720. A first band spanner segment 1721E1B is integrally formed with (or coupled to in any suitable manner) a first end of the center belt segment 1720. Belt teeth 1722, 1723 are integrally formed with (or coupled to in any suitable manner) the first band spanner segment 1721E1B and extend from the first band segment 1721E1B in a direction opposite the center belt segment 1720, wherein each of the belt teeth 1722, 1723 is coupled to pulley 1701 in a manner similar to that described herein. A second band segment 1721E2B is integrally formed with (or coupled to in any suitable manner) a second end of the center belt segment 1720 (i.e., opposite the first band segment 1721E1B). Belt teeth 1724, 1725 are integrally formed with (or coupled to) the second belt segment 1721E2B in any suitable manner and extend from the second belt segment 1721E2B in a direction opposite to the center belt segment 1720, wherein each of the belt teeth 1724, 1725 is coupled to the pulley 1700 in a manner similar to that described herein.

[0061] Similarly, belt 1710 includes a center belt segment 1740. A first belt segment 1741E1B is integrally formed with (or coupled to in any suitable manner) a first end of the center belt segment 1740. Belt teeth 1742, 1743 are integrally formed with (or coupled to in any suitable manner) the first belt segment 1741E1B and extend from the first belt segment 1741E1B in a direction opposite the center belt segment 1740, wherein each of the belt teeth 1742, 1743 is coupled to pulley 1701 in a manner similar to that described herein. A second belt segment 1741E2B is integrally formed with (or coupled to in any suitable manner) a second end of the center belt segment 1740 (i.e., opposite the first belt segment 1741E1B). Belt teeth 1744, 1745 are integrally formed with (or coupled to) second belt segment 1741E2B in any suitable manner and extend from second belt segment 1741E2B in a direction opposite to center belt segment 1740, wherein each of belt teeth 1744, 1745 is coupled to pulley 1700 in a manner similar to that described herein.

[0062] The teeth 1742 and teeth 1743 of the belt 1710 are spaced apart from each other along the axial height of the pulley 1701 by a distance 1731 that is greater than the height 1733 of the center belt segment 1740 so as to form a combined belt end height 1732 relative to the axial height of the pulley 1701. The distance 1731 between the teeth 1742, 1743 provides for the winding of the center belt segment 1740 and the center belt segment 1720 of the belt 1711 around the pulley 1701 without the center belt segments 1740, 1720 overlapping on the teeth 1742, 1743. Similarly, the teeth 1744 and teeth 1745 of the belt 1710 are spaced apart from each other along the axial height of the pulley 1700 by a distance 1731 that is greater than the height 1733 of the center belt segment 1740 so as to form a combined belt end height 1732 relative to the axial height of the pulley 1700. The distance 1731 between the teeth 1744 , 1745 provides for winding of the center belt segment 1740 of the belt 1710 and the center belt segment 1720 of the belt 1711 around the pulley 1700 without the center belt segments 1740 , 1720 overlapping on the teeth 1744 , 1745 .

[0063] The teeth 1722 and teeth 1723 of the belt 1711 are spaced a distance 1730 from one another along the axial length of the pulley 1701 that is greater than the combined height 1732 of the teeth 1742, 1743 (e.g., greater than the height of each tooth and the space 1731 between the teeth 1742, 1743). The spacing of the teeth 1722, 1723 by the distance 1730 provides for the winding of the teeth 1742, 1743 of the belt 1710 around the pulley 1701 and the winding of the central belt sections 1720, 1740 of the belts 1710, 1711 around the pulley 1701. To avoid overlap of the first belt section 1721E1B (from which the teeth 1722, 1723 extend) on the belt 1710, the first belt section 1721E1B includes channels 1790, 1791 through which the teeth 1742, 1743 pass. Channels 1790 , 1791 are shaped and sized such that the walls of channels 1790 , 1791 do not substantially contact a respective one of teeth 1742 , 1743 so as to substantially prevent overlap of belt 1711 on belt 1710 .

[0064] The teeth 1724 and 1725 of the belt 1711 are also spaced a distance 1730 from one another along the axial length of the pulley 1700 that is greater than the combined height 1732 of the teeth 1744, 1745 (e.g., greater than the height of each tooth and the space 1731 between the teeth 1744, 1745). The spacing of the teeth 1724, 1725 by the distance 1730 provides for the winding of the teeth 1744, 1745 of the belt 1710 around the pulley 1700 and the winding of the central belt sections 1720, 1740 of the belts 1710, 1711 around the pulley 1700. To avoid overlap of the second belt section 1721E2B (from which the teeth 1724, 1725 extend) on the belt 1710, the second belt section 1721E2B also includes passages 1790, 1791 through which the teeth 1744, 1745 pass. Channels 1790 , 1791 are shaped and dimensioned such that the walls of channels 1790 , 1791 do not substantially contact a respective one of teeth 1744 , 1745 so as to substantially prevent overlap of belt 1711 on belt 1710 .

[0065] refer to Fig.18A and Fig.18B, illustrates a relative belt and pulley configuration according to aspects of the disclosed embodiment. In this regard, the belt 1800, 1801 is wrapped around the pulleys 1820, 1821 so that the two pulleys 1820, 1821 accommodate multiple turns of the belt 1800, 1801 without the belts 1800, 1801 substantially overlapping themselves or each other. This aspect of the disclosed embodiment can also provide a substantially constant drive ratio between the pulleys 1820, 1821. Here, the axial length of at least one of the pulleys 1820, 1821 depends on the pulley-to-pulley distance 1899. For example, the belt 1800 is wrapped around at least the pulley 1821 so that the belt loop spirals along its own side, wherein the wound belt 1800 has coil edges 1805, 1806 juxtaposed along the pulley axis 1821AX (which pulley axis may coincide with the wrist axis WX or any other suitable axis of the transport arm described herein). Similarly, the belt 1801 is wrapped around at least the pulley 1821 so that the belt loop spirals along its own side, wherein the wound belt 1801 has coil edges 1807, 1808 juxtaposed along the pulley axis 1821AX. The belts 1800, 1801 can be wound around the pulley 1820 (which can be referred to as the drive pulley) so that the angular travel of the belts 1800, 1801 through the pulley 1820 does not overlap on themselves. In other aspects, the belts 1800, 1801 can be wound around the pulley 1820 in a manner similar to that described with respect to the pulley 1821.

[0066] As in Fig.18B 18, this aspect of the disclosed embodiment can be scaled for different arm link 1850 lengths by providing another transfer device 1860 within the arm link 1850 of the drive pulley 1820. The other transfer device 1860 can be substantially similar to any of the transfer devices described above, or the other transfer device 1860 can be substantially similar to a conventional single-turn belt pulley transfer device (where the belt is wrapped around the respective pulleys a single turn or less, and the belt is not wrapped / overlapped). Here, the distance 1881 between the pulley 1822 of the other transfer device 1860 and the pulley 1820 can be increased or decreased depending on the overall length of the arm link 1850, while keeping the distance 1899 between the pulleys 1820, 1821 the same.

[0067] refer to Fig.19A and Fig.19B , an exemplary belt mounting fixture 1900 is illustrated. The belt mounting fixture 1900 may be provided or otherwise mounted ( Fig. 20, frame 2000) within an arm link adjacent to at least one of the corresponding pulleys to wind the belt around the corresponding pulley so that the belt is wound around the at least one of the corresponding pulleys multiple times. The belt mounting fixture 1900 includes a belt tensioner 1910 on which a pair of guide wheels 1911, 1912 are pivotally mounted. The guide wheels 1911, 1912 are biased by the belt tensioner 1910 (e.g., in any suitable manner) against a pulley 1944 (which can be substantially similar to any pulley described herein). The guide wheels 1911, 1912 are disposed at different heights corresponding to the height of the belt being wound. For example, the guide wheel 1911 is disposed at a height for winding the belt 350 around the bottom pulley portion 1944B, while the guide wheel 1912 is disposed at a height for winding the belt 351 around the top pulley portion 1944T. In one aspect, the height of the guide wheels 1911, 1912 may be adjustable for winding a belt around two or more stacked pulleys (such as, Figure 3C ). Each of the guide wheels 1911, 1912 includes a tension member 1911T, 1912T, which may be an adjustable friction brake that increases and / or decreases the force required to rotate the respective guide wheel 1911, 1912, wherein the guide wheels are configured to frictionally engage the respective belt 350, 351 with substantially no slip between the guide wheels and the belt. The belt mounting fixture 1900 also includes at least one belt height gauge 1915 that aligns the belt on the pulley 1944 at a respective height (at Fig.19A and Fig.19B 19, belt height gauge 1915 is shown in a position for installing belt 351, however, to install belt 350, another belt height gauge may be provided, or belt height gauge 1915 may be moved to the side of pulley 1944 opposite position 1916 to install belt 350). Belt height gauge 1915 may include grooves or other alignment features to achieve height alignment of the belt with the pulley.

[0068] To install, for example, belt 351 on top pulley portion 1944T, belt 351 may be anchored to top pulley portion 1944T ( ) at belt anchor 1966 (which may be substantially similar to any of the belt anchors described herein) in the manner described above. Fig. 20 , block 2010). The belt anchor 1966 may be positioned adjacent to the guide wheel 1911. The belt 351 extends from the belt anchor 1966 to between the top pulley portion 1944T and the guide wheel 1911 and is aligned at a predetermined height by the belt height gauge 1915. The top pulley portion 1944T may be driven or rotated (eg, in the direction 1999) in any suitable manner about the axis AX (which may be any of the pulley axes described herein). Fig. 20, block 2020), such as by any suitable drive motor, or by hand using, for example, a knob 1940 coupled to the top pulley portion 1944T. As the top pulley portion 1944T rotates in the winding direction 1999, the guide wheel 1911 provides a moving resistance on the belt 351 to tighten the belt against the pulley 1944 ( Fig. 20 , block 2030). After the desired number of loops are provided on the top pulley portion 1944T, the guide wheel 1911 maintains the tension of the loops on the top pulley portion 1944T ( Fig. 20 , box 2040).

[0069] To mount, for example, belt 350 on bottom pulley portion 1944B, belt 350 may be anchored to bottom pulley portion 1944B in the manner described above at any suitable belt anchor in a manner substantially similar to that described above with respect to belt anchor 1966. Fig. 20 , block 2010). The belt anchor of the bottom pulley portion 1944B can be positioned adjacent to the guide wheel 1912. The belt 350 extends from the belt anchor to between the bottom pulley portion 1944B and the guide wheel 1912 and is aligned at a predetermined height by the belt height gauge 1915. The bottom pulley portion 1944B can be driven or rotated (eg, in the direction 1998) in any suitable manner about the axis AX (which can be any of the pulley axes described herein). Fig. 20 , block 2020), such as by any suitable drive motor, or by hand using, for example, a knob (similar to knob 1940) coupled to bottom pulley portion 1944B. As bottom pulley portion 1944B rotates in winding direction 1998, guide wheel 1912 provides a resistance to movement on belt 350 to tension the belt against bottom pulley portion 1944B ( Fig. 20 , block 2030). After providing the desired number of loops on the bottom pulley portion 1944B, the guide wheel 1912 maintains the tension of the loops on the bottom pulley portion 1944B ( Fig. 20 , box 2040).

[0070] As can be appreciated, in the pulley portion Fig.19AIn the case of stacking one above the other as shown in FIG. 1 , the bottom pulley portion 1944B can be wound before the top pulley portion 1944T so that the bottom pulley portion can be driven to rotate by, for example, the knob 1940. Here, the top pulley portion and the bottom pulley portion can be independently rotated about the axis AX to facilitate winding the belts 350, 351 in opposite winding directions 1998, 1999. After the belts 350, 351 are wound around the respective top pulley portions 1944T and bottom pulley portions 1944B, and with tension maintained on the belt loops by the respective guide wheels 1911, 1912, the top pulley portion 1944T and the bottom pulley portion 1944B can be locked together in any suitable manner ( Fig. 20 , block 2050), so that the top pulley portion 1944T and the bottom pulley portion 1944B rotate as a unit about the axis AX.

[0071] The free ends of the belts 350, 351 may be anchored to another pulley in the transfer device ( 1900 ) in any suitable manner, with tension on the belt loops maintained by guide wheels 1911, 1912. Fig. 20 , block 2060), such that the belts 350, 351 are tensioned against each other, as described above. In the event that the belts 350, 351 are to be wound multiple turns around the other pulley in an opposing winding, the belts 350, 351 may be wound in a manner substantially similar to that described above with respect to pulley 1944, while the tension in the belt loop is maintained by the belt mounting fixture 1910 of pulley 1944 during the opposing winding.

[0072] According to aspects of the disclosed embodiments, Figures 1A-2E and Fig.21 According to the method, a substrate transport device 100, 101, 102, 103, 104 ( Fig.21 , block 2100). The end effectors 140, 140A, 140B, 141, 142 are moved through the end effector extension stroke 399 or retraction stroke 389, respectively, using a drive belt transfer device (as described above). Fig.21, box 2110), the drive belt transmission device has: a driving pulley and an idler pulley, which have a predetermined reduction ratio; and at least one belt connecting the driving pulley and the idler pulley (as described above), the drive belt transmission device extends and retracts the articulated arm 120-124, wherein the at least one belt is wound around at least one of the driving pulley and the idler pulley, so that the at least one belt is wrapped relative to itself, so that the transmission device with a predetermined reduction ratio rotates the end effector relative to the at least one articulated arm link about the joint pivot axis from the end effector stroke midpoint rotation position of the end effector more than substantially 180° (for example, the rotation RR is at least about 360°) to the maximum stroke rotation position of the end effector, and in other aspects, the rotation of the end effector from the stroke midpoint can be greater than about + / - 300° or greater than about + / - 360°.

[0073] According to aspects of the disclosed embodiments, Figures 1A-2E and Fig. 22 According to the method, a substrate transport device 100, 101, 102, 103, 104 ( Fig. 22 , block 2200). Move end effectors 140, 140A, 140B, 141, 142 ( Fig. 22 , box 2210) through a corresponding end effector stroke, wherein the articulated arm 120-124 has a drive belt transfer device, the drive belt transfer device having: a drive pulley and an idler pulley, which have a predetermined reduction ratio; and a dual opposing belt (as described above) connecting these pulleys, the drive belt transfer device extends and retracts the articulated arm 120-124 through an arm motion stroke that extends or retracts the articulated arm 120-124, and wherein the dual opposing belt (as described above) has a wrap geometry (as described above) on at least one of the pulleys, the wrap geometry providing a rotation of the end effector 140, 140A, 140B, 141, 142 about a joint pivot axis (e.g., wrist axis WX) with a predetermined reduction ratio, the rotation being an end effector rotation of greater than about 360° from end to end of the end effector stroke.

[0074] According to one or more aspects of the disclosed embodiment, a substrate transport device includes: frame; a drive section connected to the frame; and an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis; wherein the articulated arm has an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so as to allow the end effector to rotate relative to the at least one articulated arm link about the arm joint pivot axis, and wherein the articulated arm has a drive belt transmission device having: a drive pulley and an idler pulley having a predetermined reduction ratio; and at least one belt connecting the drive pulley and the idler pulley, the drive belt transmission device extends and retracts the articulated arm so as to move the end effector through an end effector extension or retraction stroke, respectively; and wherein the at least one belt is wound around at least one of the drive pulley and the idler pulley so that the at least one belt is wrapped relative to itself so that a transmission device having a predetermined reduction ratio causes the end effector to rotate relative to the at least one articulated arm link about the joint pivot axis from a midpoint rotational position of the end effector stroke of the end effector stroke to a maximum stroke rotational position by more than substantially 180°.

[0075] In accordance with one or more aspects of the disclosed embodiment, rotation of the end effector exceeds approximately 360° end to end of end effector travel.

[0076] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is wrapped relative to itself.

[0077] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is wrapped such that the belt loop is spiraled onto itself on the pulley.

[0078] In accordance with one or more aspects of the disclosed embodiment, the at least one tape is overwound such that the tape turns overlap upon themselves.

[0079] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is overwound such that the belt turns spirally along its own sides, wherein the wound belt has coil edges juxtaposed along the pulley axis.

[0080] In accordance with one or more aspects of the disclosed embodiment, an idler pulley is coupled to the end effector such that rotation of the idler pulley rotates the end effector about the joint pivot axis.

[0081] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is wrapped relative to itself around an idler pulley.

[0082] In accordance with one or more aspects of the disclosed embodiment, the idler pulley is a non-circular pulley.

[0083] According to one or more aspects of the disclosed embodiment, the idler pulley has a belt seating surface having a non-circular radial periphery on which the at least one belt seats as the belt is wound and dispensed from the idler pulley.

[0084] In accordance with one or more aspects of the disclosed embodiment, the drive pulley is a non-round pulley.

[0085] According to one or more aspects of the disclosed embodiments, the idler pulley and the drive pulley have pulley profiles that engage respective opposing belts that are wound and unwound so as to maintain a substantially constant reduction ratio between the idler pulley and the drive pulley in each rotational direction throughout the end effector extension or retraction stroke.

[0086] In accordance with one or more aspects of the disclosed embodiment, an end effector has a substrate holding station thereon.

[0087] In accordance with one or more aspects of the disclosed embodiment, an end effector has more than one substrate holding stations, at least two of the more than one substrate holding stations being on opposite ends of the end effector.

[0088] In accordance with one or more aspects of the disclosed embodiment, the end effector has more than one end effector, each end effector being individually connected to a respective idler pulley for independent rotation relative to each other about a joint pivot axis.

[0089] According to one or more aspects of the disclosed embodiment, a substrate transport device includes: frame; a drive section connected to the frame; and an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis; wherein the articulated arm has an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so that the end effector rotates relative to the at least one articulated arm link about the arm joint pivot axis, and wherein the articulated arm has a drive belt transmission device having: a drive pulley and an idler pulley having a predetermined reduction ratio; and a dual opposing belt connecting these pulleys, the drive belt transmission device extends and retracts the articulated arm through an arm movement stroke, which extends or retracts the articulated arm and moves the end effector through a corresponding end effector stroke; and wherein the dual opposing belt has a wrap geometry on at least one of the pulleys that provides for rotation of the end effector about the joint pivot axis at a predetermined reduction ratio, the rotation being greater than about 360° of end effector rotation from end to end of end effector travel.

[0090] In accordance with one or more aspects of the disclosed embodiment, the wrap geometry provides for more than substantially 180° of end effector rotation from a midpoint of travel to either end of the end effector travel.

[0091] According to one or more aspects of the disclosed embodiment, the winding geometry enables asymmetric winding and unwinding rates of respective opposing belts to co-rotate the at least one of the pulleys.

[0092] According to one or more aspects of the disclosed embodiment, another pulley of at least one of the pulleys connected to each other by relative belts is constructed with a compensator, which is arranged to compensate for asymmetric winding and unwinding of the corresponding relative belts so as to maintain a substantially constant tension on each of the relative belts throughout the end effector stroke.

[0093] According to one or more aspects of the disclosed embodiments, the compensator has a geometry that produces, for co-rotation of the other pulley, asymmetric unwinding and winding rates of the corresponding relative belt on the other pulley, which are commensurate with the asymmetric winding and unwinding rates of the corresponding relative belt on at least one of the pulleys.

[0094] According to one or more aspects of the disclosed embodiment, the other pulley has a respective non-circular pulley profile with a cam lobe for each of the respective opposing belts, the respective cam lobes of the respective non-circular profile forming a compensator.

[0095] In accordance with one or more aspects of the disclosed embodiment, respective cam lobes of respective non-circular pulley profiles are disposed out of phase on the pulley circumference, the degree of difference defining the compensator geometry.

[0096] In accordance with one or more aspects of the disclosed embodiment, the at least one of the pulleys is an idler pulley and the other pulley is a drive pulley.

[0097] According to one or more aspects of the disclosed embodiment, the idler pulley and the drive pulley have pulley profiles that engage respective opposing belts that are wound and unwound so as to maintain a substantially constant reduction ratio between the idler pulley and the drive pulley in each rotational direction throughout the end effector stroke.

[0098] According to one or more aspects of the disclosed embodiment, the idler pulley has a belt seating surface having a non-circular radial periphery on which the at least one belt seats as the belt is wound and dispensed from the idler pulley.

[0099] In accordance with one or more aspects of the disclosed embodiment, the drive pulley is a non-round pulley.

[0100] In accordance with one or more aspects of the disclosed embodiment, each of the opposing bands is wrapped relative to itself.

[0101] In accordance with one or more aspects of the disclosed embodiment, each of the opposing belts is overwound such that the belt loop is spiraled onto itself over the pulley.

[0102] In accordance with one or more aspects of the disclosed embodiment, each of the opposing straps is overwound such that the strap turns overlap upon themselves.

[0103] In accordance with one or more aspects of the disclosed embodiment, each of the opposing belts is overwound such that the belt turns spirally along its own sides, wherein the wound belt has coil edges juxtaposed along the pulley axis.

[0104] In accordance with one or more aspects of the disclosed embodiment, the at least one of the pulleys is an idler pulley coupled to the end effector such that rotation of the idler pulley rotates the end effector about the joint pivot axis.

[0105] In accordance with one or more aspects of the disclosed embodiment, each of the opposing belts is wrapped relative to itself around an idler pulley.

[0106] According to one or more aspects of the disclosed embodiment, a method includes: A substrate transport device is provided, wherein the substrate transport device comprises: frame; a drive section connected to the frame; an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis; and an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so that the end effector rotates relative to the at least one articulated arm link about the arm joint pivot axis; using a drive belt transmission device to move the end effector through the end effector extension or retraction stroke, respectively, the drive belt transmission device having: a drive pulley and an idler pulley having a predetermined reduction ratio; and at least one belt connecting the drive pulley and the idler pulley, the drive belt transmission device extending and retracting the articulated arm; and wherein the at least one belt is wound around at least one of the drive pulley and the idler pulley so that the at least one belt is wrapped relative to itself so that a transmission device having a predetermined reduction ratio causes the end effector to rotate relative to the at least one articulated arm link about the joint pivot axis from a midpoint rotational position of the end effector stroke of the end effector stroke to a maximum stroke rotational position by more than substantially 180°.

[0107] In accordance with one or more aspects of the disclosed embodiment, rotation of the end effector is over approximately 360° of end-to-end end effector travel.

[0108] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is wrapped relative to itself.

[0109] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is wrapped such that the belt loop is spiraled onto itself on the pulley.

[0110] In accordance with one or more aspects of the disclosed embodiment, the at least one tape is overwound such that the tape turns overlap upon themselves.

[0111] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is overwound such that the belt turns spirally along its own sides, wherein the wound belt has coil edges juxtaposed along the pulley axis.

[0112] In accordance with one or more aspects of the disclosed embodiment, an idler pulley is coupled to the end effector such that rotation of the idler pulley rotates the end effector about the joint pivot axis.

[0113] In accordance with one or more aspects of the disclosed embodiment, the at least one belt is wrapped relative to itself around an idler pulley.

[0114] In accordance with one or more aspects of the disclosed embodiment, the idler pulley is a non-circular pulley.

[0115] According to one or more aspects of the disclosed embodiment, the idler pulley has a belt seating surface having a non-circular radial periphery on which the at least one belt seats as the belt is wound and dispensed from the idler pulley.

[0116] In accordance with one or more aspects of the disclosed embodiment, the drive pulley is a non-round pulley.

[0117] According to one or more aspects of the disclosed embodiments, the idler pulley and the drive pulley have pulley profiles that engage respective opposing belts that are wound and unwound so as to maintain a substantially constant reduction ratio between the idler pulley and the drive pulley in each rotational direction throughout the end effector extension or retraction stroke.

[0118] In accordance with one or more aspects of the disclosed embodiment, an end effector has a substrate holding station thereon.

[0119] In accordance with one or more aspects of the disclosed embodiment, an end effector has more than one substrate holding stations, at least two of the more than one substrate holding stations being on opposite ends of the end effector.

[0120] In accordance with one or more aspects of the disclosed embodiment, the end effector has more than one end effector, each end effector being individually connected to a respective idler pulley for independent rotation relative to each other about a joint pivot axis.

[0121] According to one or more aspects of the disclosed embodiment, a method includes: A substrate transport device is provided, wherein the substrate transport device comprises: frame; a drive section connected to the frame; an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis; and an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so that the end effector rotates relative to the at least one articulated arm link about the arm joint pivot axis; and moving the end effector through a corresponding end effector stroke, wherein the articulated arm has a drive belt transmission device having: a drive pulley and an idler pulley having a predetermined reduction ratio; and a dual opposing belt connecting the pulleys, the drive belt transmission device extending and retracting the articulated arm through an arm movement stroke that extends or retracts the articulated arm; wherein the dual opposing belt has a wrap geometry on at least one of the pulleys that provides for rotation of the end effector about the joint pivot axis at a predetermined reduction ratio, the rotation being greater than about 360° of end effector rotation from end to end of end effector travel.

[0122] In accordance with one or more aspects of the disclosed embodiment, the wrap geometry provides for more than substantially 180° of end effector rotation from a midpoint of travel to either end of the end effector travel.

[0123] According to one or more aspects of the disclosed embodiment, the winding geometry enables asymmetric winding and unwinding rates of respective opposing belts to co-rotate the at least one of the pulleys.

[0124] According to one or more aspects of the disclosed embodiment, the method further includes compensating for asymmetric winding and unwinding of the respective opposing belts using a compensator or another pulley to maintain substantially constant tension on each of the opposing belts throughout the end effector stroke.

[0125] According to one or more aspects of the disclosed embodiment, the method further includes: in order to make the other pulley rotate together, using the geometry of the compensator to produce asymmetric unwinding rates and winding rates of the corresponding relative belt on the other pulley, which are commensurate with the asymmetric winding rate and unwinding rate of the corresponding relative belt on at least one of the pulleys.

[0126] According to one or more aspects of the disclosed embodiment, the other pulley has a respective non-circular pulley profile with a cam lobe for each of the respective opposing belts, the respective cam lobes of the respective non-circular profile forming a compensator.

[0127] In accordance with one or more aspects of the disclosed embodiment, respective cam lobes of respective non-circular pulley profiles are disposed out of phase on the pulley circumference, the degree of difference defining the compensator geometry.

[0128] In accordance with one or more aspects of the disclosed embodiment, the at least one of the pulleys is an idler pulley and the other pulley is a drive pulley.

[0129] According to one or more aspects of the disclosed embodiment, the idler pulley and the drive pulley have pulley profiles that engage respective opposing belts that are wound and unwound so as to maintain a substantially constant reduction ratio between the idler pulley and the drive pulley in each rotational direction throughout the end effector stroke.

[0130] According to one or more aspects of the disclosed embodiment, the idler pulley has a belt seating surface having a non-circular radial periphery on which the at least one belt seats as the belt is wound and dispensed from the idler pulley.

[0131] In accordance with one or more aspects of the disclosed embodiment, the drive pulley is a non-round pulley.

[0132] In accordance with one or more aspects of the disclosed embodiment, each of the opposing bands is wrapped relative to itself.

[0133] In accordance with one or more aspects of the disclosed embodiment, each of the opposing belts is overwound such that the belt loop is spiraled onto itself over the pulley.

[0134] In accordance with one or more aspects of the disclosed embodiment, each of the opposing straps is overwound such that the strap turns overlap upon themselves.

[0135] In accordance with one or more aspects of the disclosed embodiment, each of the opposing belts is overwound such that the belt turns spirally along its own sides, wherein the wound belt has coil edges juxtaposed along the pulley axis.

[0136] In accordance with one or more aspects of the disclosed embodiment, the at least one of the pulleys is an idler pulley coupled to the end effector such that rotation of the idler pulley rotates the end effector about the joint pivot axis.

[0137] In accordance with one or more aspects of the disclosed embodiment, each of the opposing belts is wrapped relative to itself around an idler pulley.

[0138] It should be understood that the foregoing description only illustrates aspects of the disclosed embodiments. Various alternatives and modifications may be devised by those skilled in the art without departing from the aspects of the disclosed embodiments. Therefore, the aspects of the disclosed embodiments are intended to encompass all such alternatives, modifications and variations that fall within the scope of any appended claims. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be used to advantage, and such a combination is still within the scope of the aspects of the disclosed embodiments.

Claims

1. A substrate transport device for transferring a substrate in a transport chamber, the substrate transport device comprising: a frame disposed in the transport chamber, the transport chamber having chamber ends and chamber lateral sides extending between the chamber ends, each chamber lateral side having at least four processing station openings extending therethrough; a drive section connected to the frame; as well as an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis for transferring substrates to and away from each of the at least four processing station openings in each of the chamber lateral sides; and wherein the articulated arm has an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so as to allow the end effector to rotate relative to the at least one articulated arm link about the arm joint pivot axis, and wherein the articulated arm has a drive belt transfer device having a drive pulley and a driven pulley, wherein the driven pulley is connected to the articulated wrist, wherein at least one belt is wound around at least one of the connected pulleys so that the at least one belt is wrapped relative to itself so that the drive belt transfer device can produce a rotation of the end effector in excess of 180° up to 480° in either direction about the joint between the end effector and the at least one articulated arm link so as to position the end effector at each of the at least four processing station openings in each of the lateral side portions of the chamber to perform transfer of the substrate to and from each of the at least four processing station openings in each of the lateral side portions of the chamber.

2. The substrate transporting device according to claim 1, wherein: The at least one belt is wrapped so that the belt loop is spiraled onto itself on the pulley.

3. The substrate transporting device according to claim 2, wherein: The at least one tape is overwound such that the tape loop overlaps upon itself.

4. The substrate transporting device according to claim 2, wherein: The at least one belt is overwound such that the belt loop spirals along its own edge, wherein the wound belt has coil edges juxtaposed along the pulley axis.

5. The substrate transporting device according to claim 1, wherein: At least one of the connected pulleys is an idler pulley coupled to the end effector such that rotation of the idler pulley rotates the end effector about the joint pivot axis.

6. The substrate transporting device according to claim 5, wherein: The at least one belt is wrapped relative to itself around the idler pulley.

7. The substrate transporting device according to claim 5, wherein: The idler pulley is a non-circular pulley.

8. The substrate transporting device according to claim 5, wherein: The idler pulley has a belt seating surface having a non-circular radial periphery on which the at least one belt seats as the belt is wound and dispensed from the idler pulley.

9. The substrate transporting device according to claim 5, wherein: Another one of the at least one of the connected pulleys is a drive pulley, wherein the drive pulley is a non-round pulley.

10. The substrate transporting device according to claim 9, wherein: The idler pulley and the drive pulley have pulley profiles that engage respective opposing belts that wind and unwind so as to maintain a constant reduction ratio between the idler pulley and the drive pulley in each rotational direction throughout the end effector extension and retraction strokes.

11. The substrate transporting device according to claim 1, wherein: The end effector has a substrate holding station thereon.

12. A substrate transport device for transferring a substrate in a transport chamber, the substrate transport device comprising: a frame disposed in the transport chamber, the transport chamber having chamber ends and chamber lateral sides extending between the chamber ends, each chamber lateral side having at least four processing station openings extending therethrough; a drive section connected to the frame; as well as an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis for transferring substrates to and away from each of the at least four processing station openings in each of the chamber lateral sides; wherein the articulated arm has an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so that the end effector rotates relative to the at least one articulated arm link about the arm joint pivot axis, and wherein the articulated arm has a drive belt transfer device having a pulley and a dual opposing belt connecting the pulleys, the drive belt transfer device extending and retracting the articulated arm through an arm movement stroke, the arm movement stroke extending or retracting the articulated arm and moving the end effector through a corresponding end effector stroke; and wherein the dual opposing belt has a wrapping geometry on at least one of the pulleys, the wrapping geometry determining a rotation of the end effector about the joint pivot axis, the rotation providing at least 300° of end effector rotation end-to-end of the end effector stroke so as to position the end effector at each of the at least four processing station openings in each of the chamber lateral sides to perform transfer of the substrate to and away from each of the at least four processing station openings in each of the chamber lateral sides.

13. The substrate transporting apparatus according to claim 12, wherein: The wrap geometry provides at least 145° of end effector rotation from a midpoint of travel to either end of the end effector travel.

14. The substrate transporting apparatus according to claim 12, wherein: The winding geometry enables respective asymmetric winding and unwinding rates of the relative belts to co-rotate the at least one of the pulleys.

15. The substrate transporting apparatus according to claim 14, wherein: Another pulley of at least one of the pulleys connected to each other by the respective opposing belts is configured with a compensator arranged to compensate for the asymmetric winding and unwinding of the respective opposing belts so as to maintain a constant tension on each of the opposing belts throughout the end effector stroke.

16. The substrate transporting apparatus according to claim 15, wherein: The compensator has a geometry that produces, for co-rotation of the other pulley, asymmetric unwinding and winding rates of the respective opposing belts on the other pulley, commensurate with asymmetric winding and unwinding rates of the respective opposing belts on at least one of the pulleys.

17. The substrate transporting apparatus according to claim 15, wherein: The further pulley has a respective non-circular pulley profile with a cam lobe for each of the respective opposing belts, the respective cam lobe of the respective non-circular pulley profile forming the compensator.

18. The substrate transporting apparatus according to claim 17, wherein: The respective cam lobes of the respective non-circular pulley profiles are disposed out of phase on the pulley circumference by a degree that defines the compensator geometry.

19. The substrate transporting apparatus of claim 15, wherein: The at least one of the pulleys is an idler pulley and the other pulley is a drive pulley.

20. The substrate transport apparatus of claim 19, wherein: The idler pulley and the drive pulley have pulley profiles that engage the respective opposing belts as they are wound and unwound so as to maintain a constant reduction ratio between the idler pulley and the drive pulley in each rotational direction throughout the end effector stroke.

21. The substrate transport apparatus of claim 19, wherein: The idler pulley has a belt seating surface having a non-circular radial periphery on which the at least one belt seats as the belt is wound and dispensed from the idler pulley.

22. The substrate transport apparatus of claim 21, wherein: Another one of the at least one of the connected pulleys is a drive pulley, wherein the drive pulley is a non-round pulley.

23. The substrate transport apparatus of claim 12, wherein: Each of the opposing belts is wrapped relative to itself.

24. The substrate transport apparatus of claim 23, wherein: Each of the opposing belts is wrapped so that the belt loop is spiraled onto itself on the pulley.

25. The substrate transport apparatus of claim 23, wherein: Each of the opposing straps is overwound such that the strap turns overlap upon themselves.

26. The substrate transport apparatus of claim 23, wherein: Each of the opposing belts is overwound such that the belt loop spirals along its own edge, wherein the wound belt has coil edges juxtaposed along the pulley axis.

27. The substrate transport apparatus of claim 12, wherein: The at least one of the pulleys is an idler pulley coupled to the end effector such that rotation of the idler pulley rotates the end effector about the joint pivot axis.

28. The substrate transport apparatus of claim 27, wherein: Each of the opposing belts is wrapped relative to itself around the idler pulley.

29. A method comprising: A substrate transport apparatus is provided for transferring substrates in a transport chamber having chamber ends and chamber lateral sides extending between the chamber ends, each chamber lateral side having at least four processing station openings extending therethrough, wherein the substrate transport apparatus comprises: frame; a drive section connected to the frame; an articulated arm having at least one articulated arm link operably connected to the drive section such that the articulated arm rotates relative to the frame about a pivot axis and extends and retracts relative to the pivot axis; and an end effector pivotally mounted to the at least one articulated arm link so as to form a joint between the end effector and the at least one articulated arm link, wherein an arm joint pivot axis is arranged so that the end effector rotates relative to the at least one articulated arm link about the arm joint pivot axis; moving the end effector through an extension stroke and a retraction stroke, respectively, using a drive belt transfer having pulleys and at least one belt connecting the pulleys, the drive belt transfer extending and retracting the articulated arm for transferring substrates to and from each of the at least four processing station openings in each of the lateral sides of the chamber; and wherein said at least one belt is wound around at least one of said connected pulleys so that said at least one belt is wrapped relative to itself so that said drive belt transfer device produces a rotation of said end effector relative to said at least one articulated arm link of at least 145° about said joint pivot axis from a rotational position at the midpoint of the end effector stroke of said end effector to a rotational position at the maximum stroke of said end effector so as to position said end effector at each of said at least four processing station openings in each of said lateral sides of said chamber to perform transfer of said substrate to and away from each of said at least four processing station openings in each of said lateral sides of said chamber.

30. The method of claim 29, wherein: The end effector has a rotation range of at least + / - 300° in either direction between a maximum extended stroke and a maximum retracted stroke at a midpoint rotational position of the end effector stroke.

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