A device and method for controlling jet morphology and satellite droplet behavior and size.

Abstract

This invention discloses a device and method for controlling jet morphology and satellite droplet behavior and size. The device's droplet generator nozzle produces jets of different morphologies, with the main droplet and satellite droplets exhibiting different motion states. A droplet control component, located directly below the droplet generator, adjusts the jet morphology and controls the behavior and size of the satellite droplets. A droplet image acquisition component, located to the side of the droplet control component, dynamically acquires the jet morphology and satellite droplet behavior and size. This invention can precisely control the jet morphology and satellite droplet generation process, achieving stable separation and adjustable size of the satellite droplets. It can monitor jet and droplet behavior in real time, ensuring that the satellite droplets remain relatively stable with the main droplet before separating from it. It allows for secondary adjustment of droplet size and utilizes micron-level electrodes to precisely intervene in local areas of the jet, achieving a breakthrough in smaller satellite droplet sizes. This invention can be widely applied to high-precision droplet control requirements.

Description

Technical Field

[0001] This invention relates to a liquid jet morphology control device, specifically to a jet morphology and satellite droplet behavior size control device and method. Background Technology

[0002] Ultra-high-throughput droplets generated by Rayleigh instability jet fracture have the advantages of uniform and adjustable droplet size and spacing, and are widely used in semiconductor fields such as wafer cleaning and extreme ultraviolet lithography light source generation. However, with the increasing demands for cleaning efficiency in wafer cleaning and plasma conversion efficiency after tin droplets are bombarded by lasers in extreme ultraviolet lithography, the demand for even smaller micron-sized droplets is constantly increasing.

[0003] Currently, the tin droplet size required in extreme ultraviolet (EUV) lithography light sources is 40-60 micrometers. Based on the mass conservation of the liquid column during jet fracture, obtaining tin droplets of this size requires a perforated plate micro-orifice size of 20-30 micrometers. Ensuring the roundness and dimensional accuracy of these micro-orifices within this size range poses a significant challenge to existing perforated plate laser processing equipment. Furthermore, small-diameter micro-orifices face a higher risk of crystallization and particle deposition blockage compared to large-diameter micro-orifices, which greatly reduces the effective utilization rate of the perforated plate. Simultaneously, small-diameter micro-orifices require a higher input back pressure than large-diameter micro-orifices, placing higher demands on the sealing and safety of the gas path.

[0004] Currently, there are methods that cleverly utilize satellite droplets—byproducts generated during jet fracture—as target droplets to reduce the size of the target droplets, while avoiding the limitations of processing equipment and working conditions associated with small-aperture micropores. However, this method does not control the satellite droplets before they separate from the main droplet, and in reality, the generation of satellite droplets during jet fracture involves many uncertainties. Satellite droplets are not generated under all input parameters, and even when they are generated, they are not stable. This is because the development of higher harmonics on the jet surface creates two fracture points between adjacent expansion sections of the liquid column, and the slender liquid neck between these fracture points contracts to form satellite droplets. However, due to the combined influence of jet parameters and disturbance parameters, the formation of fracture points is not synchronous in time, and the momentum difference means that most satellite droplets quickly merge into the main droplet within the range where they can be generated. Maintaining the stability of the satellite droplets relative to the main droplet under long-distance working conditions, thereby obtaining a stable and uniform stream of satellite droplets through electric field separation, is particularly difficult. Furthermore, in engineering applications, the size of the resulting satellite droplets is difficult to adjust due to fixed operating parameters. Achieving the target droplet size presents a dilemma: adjusting the original set parameters, ultimately affecting equipment operation. Moreover, the ultimate satellite droplet size is limited by jet parameters and disturbance parameters; currently, there are still some gaps in solutions for overcoming these original parameter constraints. Summary of the Invention

[0005] To address the problems existing in the background art, the present invention provides a jet morphology and satellite droplet behavior and size control device and method to solve the problems of satellite droplet process window limitation, lack of stability, difficulty in secondary control and original parameter limitation. By using multiple electrodes, the behavior control, size control and jet morphology control of satellite droplets and the induction of satellite droplet generation can be achieved before the satellite droplets can be deflected by the deflection electrode.

[0006] The technical solution adopted in this invention is:

[0007] I. A device for controlling jet morphology and satellite droplet behavior size:

[0008] The ultra-high flux droplet generator has a downward-facing nozzle and, under initially set flow parameters and piezoelectric excitation, is used to generate vertical jets of different shapes. The main droplet and satellite droplets in each jet shape have different motion states; the ultra-high flux is specifically 15k-1MHz.

[0009] The droplet control component, located directly below the ultra-high flux droplet generator, is used for jet morphology adjustment and control of the behavior and size of satellite droplets.

[0010] The droplet image acquisition component, located to the side of the droplet control component, is used to dynamically acquire the morphology of the jet and the behavior and size of the satellite droplets.

[0011] The droplet control assembly includes a droplet charging electrode, two jet local axial electrodes, two droplet deflection electrodes, and an electrode controller. The droplet charging electrode is a ring structure and coaxially threaded onto the nozzle of the ultra-high flux droplet generator. The two jet local axial electrodes are arranged horizontally and alternately below the droplet charging electrode. Each of the two jet local axial electrodes has a through hole at its center and is coaxial with the droplet charging electrode. After the jet is generated, it passes through the central through holes of the droplet charging electrode and the two jet local axial electrodes in sequence. The two droplet deflection electrodes are arranged vertically and parallel on both sides of the jet in a symmetrical manner. The droplet charging electrode is connected to the positive terminal of a high-voltage DC power supply, and the metal shell of the ultra-high flux droplet generator is connected to... The high-voltage DC power supply has a ground terminal. One jet local axial electrode located above is connected to the positive terminal of the high-voltage DC power supply, and another jet local axial electrode located below is connected to the ground terminal of the high-voltage DC power supply. Two droplet deflection electrodes are connected to the positive terminal and the ground terminal of the high-voltage DC power supply, respectively. The specific connection method is determined by the deflection direction of the droplets. The high voltage is greater than 500 volts. A uniform electric field parallel to the jet direction is formed between the two jet local axial electrodes, and a uniform electric field perpendicular to the jet direction is formed between the two droplet deflection electrodes. The droplet charging electrode, the two jet local axial electrodes, and the two droplet deflection electrodes are all electrically connected to the electrode controller that controls the voltage output. The electrode controller is electrically connected to the computer terminal.

[0012] The nozzle is made of insulating material and is also installed at the bottom of the ultra-high flux droplet generator through a threaded structure and is coaxial with the droplet generator to achieve insulation of the droplet charging electrode and the droplet generator, thus preventing the DC power supply from being short-circuited.

[0013] The inner diameter of the droplet charging electrode is greater than four times the jet diameter, and the through-hole diameter of the two jet local axial electrodes is greater than eight times the jet diameter, allowing the jet and the generated droplets to pass through.

[0014] The droplet control assembly further includes two micrometer-scale axial electrodes, two micrometer-scale deflection electrodes, and two micrometer-scale irregularly distributed electrodes. During extreme size adjustment of the satellite droplet, the two jet local axial electrodes are replaced with two micrometer-scale axial electrodes, and the two droplet deflection electrodes are replaced with two micrometer-scale deflection electrodes. Two micrometer-scale irregularly distributed electrodes are horizontally arranged symmetrically on the upper and lower sides of the droplet in the jet. Each micrometer-scale irregularly distributed electrode is located between one micrometer-scale axial electrode and two micrometer-scale deflection electrodes. Each of the two micrometer-scale irregularly distributed electrodes has a through-hole at its center. The droplet charging electrodes are coaxial; a micrometer-sized axial electrode at the top is connected to the positive terminal of a high-voltage DC power supply, and a micrometer-sized axial electrode at the bottom is connected to the ground terminal of the high-voltage DC power supply. Two micrometer-sized deflection electrodes are connected to the positive terminal and ground terminal of the high-voltage DC power supply, respectively. A micrometer-sized irregularly distributed electrode at the top is connected to the positive terminal of the high-voltage DC power supply, and a micrometer-sized irregularly distributed electrode at the bottom is connected to the ground terminal of the high-voltage DC power supply. The two micrometer-sized axial electrodes, two micrometer-sized deflection electrodes, and two micrometer-sized irregularly distributed electrodes are all electrically connected to an electrode controller that controls the voltage output. The influence of the micrometer-sized electrodes on the slender droplet is far greater than its influence on the main droplet; the influence of the electric field force on the main droplet can be ignored.

[0015] The droplet image acquisition component includes a high-speed camera, a camera displacement platform, and a displacement platform controller. The high-speed camera is mounted on the camera displacement platform, which is electrically connected to the displacement platform controller. The high-speed camera and the displacement platform controller are electrically connected to a computer. The computer controls the displacement platform to move up and down through the displacement platform controller, thereby moving the high-speed camera up and down. The high-speed camera faces the jet region, and the computer controls the high-speed camera to dynamically acquire the shape of the jet and the behavior and size of the satellite droplets.

[0016] One application of the ultra-high throughput droplet generator of the present invention is the generation of light source in extreme ultraviolet lithography machines. A heating device must be installed on the side wall of the droplet generator to keep the tin inside the droplet generator cavity in a molten state. The insulating nozzle needs to be replaced with a high-temperature resistant material, such as quartz. The droplet generation environment needs to be set to a vacuum.

[0017] II. A control method for a jet morphology and satellite droplet behavior size control device:

[0018] 1) Set the initial values ​​of the jet parameters and disturbance parameters of the droplet generator, generate a jet through the droplet generator, and continuously acquire images of the droplets after the jet breaks through the high-speed camera.

[0019] 2) Determine whether the motion state of the satellite droplet in the jet remains stable over long distance based on the image of the droplet after the jet breaks. If it does not remain stable over long distance, adjust the motion state of the satellite droplet through the droplet charging electrode and the two local axial electrodes of the jet until it remains stable over long distance.

[0020] 3) After the satellite droplet's motion state remains stable over a long distance, determine whether the current satellite droplet size has reached the target size. If the current satellite droplet has not reached the target size, adjust the size of the satellite droplet through two jet local axial electrodes until it reaches the target size, and then separate the stable satellite droplet flow of the target size through two droplet deflection electrodes.

[0021] 4) When the target size is smaller than the limit size of the satellite droplet, two micron-sized axial electrodes, two micron-sized deflection electrodes, and two micron-sized irregularly distributed electrodes are arranged. The two micron-sized axial electrodes and two micron-sized irregularly distributed electrodes adjust the size of the satellite droplet until it reaches the target size smaller than the limit size of the satellite droplet. The two micron-sized deflection electrodes separate a stable satellite droplet flow with the target size smaller than the limit size of the satellite droplet.

[0022] In step 2), when the motion state of the satellite droplets in the jet remains stable over a long distance, i.e., the jet becomes a second-state jet, each second-state satellite droplet in the second-state jet is always located between two adjacent second-state main droplets and maintains a long distance exceeding a preset distance threshold. The second-state main droplet is the main droplet that remains relatively stable with the satellite droplets in the charged state after charging. If the current satellite droplet reaches the target size, the droplet charging electrode is opened and the voltage of the two droplet deflection electrodes is adjusted to separate the second-state satellite droplets in the horizontal direction, thereby obtaining a stable second-state satellite droplet flow. However, most of the obtained satellite droplet motion state images cannot be stably generated and remain stable at a long distance with the main droplets. According to the deformation process of the jet breakage neck, the satellite droplets cannot remain stable at a long distance but... The controllable behavior is divided into two types. When the motion state of the satellite droplets in the jet does not remain stable over a long distance, it is divided into two unstable states. The first unstable state is when the jet changes to the first-form jet. At this time, the liquid toughness of the first-form jet produces the first-state satellite droplets. The first-state satellite droplets are located between two adjacent first-state main droplets and maintain a short distance of less than a preset distance threshold before merging with a first-state main droplet located below them. The first-state main droplet is the main droplet that is about to merge with the satellite droplet in the uncharged state. The second unstable state is when the jet changes to the third-form jet. At this time, the liquid toughness of the third-state main droplets in the third-form jet has several liquid necks that have the tendency to break and form satellite droplets, but have not completely broken. The third-state main droplets are the main droplets with multiple liquid necks that have not broken.

[0023] When the jet is in the first unstable state, although the first-state satellite droplet of the first-state jet can separate from the first-state main droplet, it will quickly merge with the first-state main droplet after flying a certain distance. If the droplets are charged at this time, the electrostatic force between the droplets is still insufficient to offset the velocity difference between the first-state satellite droplet and the first-state main droplet. The first-state satellite droplet will gradually approach the first-state main droplet and eventually merge with it. By charging the droplets, the first-state main droplet and the first-state satellite droplet can be charged with different amounts of the same induced charge. Based on the principle of separation of the satellite droplet and the main droplet in the deflection electric field, it is known that under the same electric field strength, their offset distances are different. By adding a local axial electrode between the droplet charging electrode and the droplet deflection electrode to form a local axial electric field, the first-state satellite droplet can return to the middle position of the first-state main droplet through the combined action of axial electric field force and electrostatic force, maintaining a relatively stable state with the first-state main droplet. Opening the droplet charging electrode and increasing the two through the electrode controller The voltage of the local axial electrode of the jet is adjusted until the first jet changes to the second jet. The second-state satellite droplet is subject to electrostatic force and can maintain a relatively equidistant distance from the charged second-state main droplet before and after it, which makes it easier to separate the second-state satellite droplet. If the current satellite droplet reaches the target size, the two droplet deflection electrodes are located below the lower local axial electrode of the jet. By adjusting the voltage of the two droplet deflection electrodes, the second-state satellite droplet is separated in the horizontal direction after the second-state jet passes through the two local axial electrodes, thereby obtaining a stable second-state satellite droplet flow.

[0024] When the jet is in the second unstable state, the third-state jet, during the jet breakage process, has multiple liquid necks between the droplets, with one end not separating from the main droplet of the third state. These liquid necks tend to form satellite droplets with the main droplet of the third state. The droplets have multiple liquid necks between them when the jet has just left the nozzle and has not yet reached a stable state. The droplet charging electrode remains closed. The voltage of the two local axial electrodes of the jet is increased by the electrode controller until the third-state jet becomes the second-state jet. At this time, each third-state satellite droplet is always located between two adjacent fourth-state main droplets and maintains a long distance exceeding a preset distance threshold. The fourth-state main droplet is the main droplet separated under the action of the local axial electric field. The third-state satellite droplet is the satellite droplet that can maintain relative stability with the main droplet after separation under the action of the local axial electric field. The electric field exerts its influence on the droplets only by polarizing and charging the droplets through the local axial electrodes of the jet. The process involves using a liquid-toughened droplet that would not otherwise fracture under the influence of the local axial electric field of the jet to detach from the main droplet in the third state and form a satellite droplet in the third state, transforming it into a second-state jet. The satellite droplet in the third state and the main droplet in the fourth state can maintain a relatively stable state. If the current satellite droplet reaches the target size, the two droplet deflection electrodes are located between the two local axial electrodes of the jet. By adjusting the voltage of the two droplet deflection electrodes, the satellite droplet in the second state is separated in the horizontal direction when the second-state jet passes between the two local axial electrodes, thus obtaining a stable second-state satellite droplet flow. This allows the satellite droplet in the third state, obtained by separation based on the local axial electrodes of the jet, to be deflected into a stable second-state satellite droplet flow before leaving the range of the local axial electric field of the jet, preventing the satellite droplet in the third state from merging into the main droplet in the fourth state after leaving the axial electric field range.

[0025] By controlling the liquid toughness of the jet and the stability of the satellite droplets, the satellite droplets can be stably generated and maintain a stable separation from the main droplets over a long working distance. At this time, the main droplets and satellite droplets of different sizes are respectively connected to a pair of droplet deflection electrodes in the droplet control component to form a uniform electric field perpendicular to the jet direction. Utilizing the difference in mass-to-charge ratio between the satellite droplets and the main droplets, the main droplets with larger diameters have smaller radial offsets, while the satellite droplets with smaller diameters will have larger offsets. This principle can be used to separate the satellite droplets from the main droplets.

[0026] In step 3), if the current satellite droplet has not reached the target size, the two local axial electrodes of the jet are moved to the incompletely broken liquid toughening region in the second-mode jet. When the jet is in the fourth-mode jet, a slender liquid toughening is formed between every two adjacent fifth-mode main droplets, eventually breaking to form the fourth-mode satellite droplet. In the fourth-mode jet, the satellite droplet and the main droplet remain relatively stable, and the liquid toughening volume and satellite droplet size are adjustable. The fifth-mode main droplet is the main droplet before the secondary adjustment of the satellite droplet size, and the fourth-mode satellite droplet is the satellite droplet before the secondary adjustment of the satellite droplet size. This is achieved by increasing the voltage of the two local axial electrodes of the jet or decreasing the voltage of the two local axial electrodes of the jet. The spacing of the axial electrodes is adjusted until the fourth-mode jet transforms into the fifth-mode jet. The fifth-mode jet is divided into a sixth-mode main droplet and a fifth-mode satellite droplet. The size of the fifth-mode satellite droplet reaches the target size. The sixth-mode main droplet is the main droplet after secondary size adjustment of the satellite droplet, and the fifth-mode satellite droplet is the satellite droplet after secondary size adjustment of the satellite droplet. At this time, the two droplet deflection electrodes are located below one of the jet local axial electrodes. By adjusting the voltage of the two droplet deflection electrodes, after the fifth-mode jet passes through the two jet local axial electrodes, the fifth-mode satellite droplet is separated in the horizontal direction, thereby obtaining a stable fifth-mode satellite droplet flow.

[0027] The electrode controller adjusts the power supply voltage of the local axial electrode of the jet by controlling the local axial electrode. Utilizing the compression effect of the electrostatic force perpendicular to the interface at the dielectric interface in the electrostatic field, the entire jet deforms. The changes in the liquid tough volume and the size of the satellite droplets are observed. It is evident that during the jet fracture process in the fifth-mode jet, the volumes of the fifth-state main droplet and the fourth-state satellite droplet are redistributed. As the liquid tough volume decreases, the size of the fifth-state satellite droplet decreases accordingly. When the satellite droplet size decreases to meet the target droplet size, the adjustment of the power supply voltage of the local axial electrode of the jet is stopped. The fifth-state satellite droplet, meeting the size requirements, passes through the local axial electrode of the jet and enters the droplet deflection electrode. Similarly, due to polarization and charging, the fifth-state satellite droplet can be separated from the sixth-state main droplet flow, finally obtaining a stable fifth-state satellite droplet flow that meets the size requirements.

[0028] The satellite droplet behavior control method can obtain a stable satellite droplet flow. However, the satellite droplet size obtained after determining the jet parameters and disturbance parameters cannot be adjusted again. To avoid the situation where the satellite droplet size cannot meet the requirements, a droplet control component can be used to perform secondary regulation of the satellite droplet size. Based on the condition that the satellite droplet can maintain relative stability with the main droplet, it is applicable to situations where the liquid volume is limited by the original parameters and there is a physical limit value.

[0029] The aforementioned satellite droplet behavior and size control method suffers from a breakdown voltage in its local axial electrode. When the electrode plate breaks down, the jet cannot break apart to generate droplets; therefore, electrode breakdown should be avoided. The satellite droplet size control method utilizes the transfer and redistribution of surface charge caused by fluid motion under an applied electric field. The change in interface shape due to the electrical stress perpendicular to the interface is achieved by balancing the electrical stress with interfacial tension. This alters the overall morphology of the jet but does not change the physical laws governing jet development. According to the jet instability principle, the smallest droplet can be obtained when the dimensionless wavenumber of the disturbance approaches 1 infinitely. By adjusting the disturbance amplitude input to the droplet generator, the jet morphology can be modified to obtain the smallest satellite droplet limited by the original input parameters. Furthermore, to ensure the separation of the small droplets from the main droplet during the pinch-off process, macroscopic electric field adjustments are insufficient to meet the overall force requirements of the jet. Therefore, a device capable of intervening in the jet only in a localized region is needed.

[0030] In step 4), when the target size is smaller than the limit size of the satellite droplet, the jet is in the sixth state. The liquid-toughened volume of the main droplet in the seventh state of the sixth state jet has a limit, and the sixth state jet cannot break to generate satellite droplets. The main droplet in the seventh state has a liquid-toughened volume limit and cannot break to form a main droplet connected to the satellite droplet. Therefore, increasing the voltage of the micrometer-scale axial electrode and the micrometer-scale irregularly distributed electrode increases the electric field strength at the liquid-toughened point between two adjacent main droplets of the jet, until the liquid-toughened point breaks, and the sixth state jet becomes the seventh state jet, separating to obtain the eighth state. The main droplet and the sixth-state satellite droplet are generated by the local control of the jet morphology to induce the formation of extremely small satellite droplets in the seventh-state jet. The eighth-state main droplet is the main droplet that separates from the fine liquid droplet after morphology control. The sixth-state satellite droplet is the satellite droplet formed after the fine liquid droplet separates from the main droplet. The size of the sixth-state satellite droplet reaches the target size smaller than the limit size of satellite droplets. By adjusting the voltage of the two micrometer-level deflection electrodes, the sixth-state satellite droplet is separated in the horizontal direction when the second-state jet passes between the two local axial electrodes of the jet, thereby obtaining a stable sixth-state satellite droplet flow.

[0031] Micrometer-scale irregularly distributed electrodes are positioned between micrometer-scale axial electrodes and micrometer-scale deflection electrodes. When the liquid toughness of the sixth-state jet is too small to generate satellite droplets, the electric field distribution of the liquid toughness in the seventh-state main droplets is adjusted to increase the local electric field intensity at the liquid toughness, thereby increasing the surface electric stress near the liquid toughness fracture point and promoting the formation of the fracture point. This achieves a breakthrough in overcoming the limitation of the original satellite droplet size being unable to be further reduced due to the liquid toughness volume. After appropriate adjustment by the electrode controller, the seventh-state jet develops and shows the separation of the liquid toughness from the eighth-state main droplet and the generation of extremely small sixth-state satellite droplets, whose size is smaller than the minimum value that the original parameters can achieve. At this point, through the micrometer-scale deflection electrodes, a sixth-state satellite droplet flow with a size exceeding the original parameter limitations can be obtained.

[0032] The beneficial effects of this invention are:

[0033] This invention addresses the limitations of satellite droplet processing windows, lack of stability, difficulty in secondary control, and susceptibility to original parameters. By connecting multiple electrodes of the droplet control component to the nozzle of the droplet generator, it precisely controls the jet morphology and satellite droplet generation process, achieving stable separation and adjustable size of the satellite droplets. Combined with a droplet image recognition component, it monitors and adjusts the satellite droplet generation process in real time based on the deformation process of different jet breakage necks through closed-loop feedback control. This enables precise control of satellite droplet behavior, ensuring stability of the main droplet and satellite droplets before separation at the deflection electrode, extending the satellite droplet's lifespan, and allowing the satellite droplet to remain stable at a longer distance from the main droplet before separation, thus widening the satellite droplet processing window. Furthermore, this device also addresses the challenge of maintaining relative stability between the satellite droplet and the main droplet while allowing for adjustable liquid volume. The size of the generated satellite droplets is controlled by a secondary adjustment based on local axial electrodes, avoiding the problem of modifying the original parameters required for size adjustment in traditional methods, thus meeting specific application requirements. Furthermore, this invention designs a jet morphology-controlled microsatellite droplet generation device, employing micron-level irregular distributed electrodes to precisely intervene in the jet only in local areas. This promotes the generation of smaller satellite droplets even when the original parameters limit the liquid volume, thus achieving a technological breakthrough in generating smaller droplets with the same large-aperture nozzle. This facilitates the generation of extremely microsatellite droplets to meet higher-demand applications and can be widely applied to high-precision droplet control requirements, such as extreme ultraviolet lithography light sources. It provides a stable and adjustable solution for generating small droplets from large apertures, possessing significant industrial application value and broad prospects. Attached Figure Description

[0034] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0035] Figure 2 This is a flowchart of the satellite droplet behavior control method of the present invention;

[0036] Figure 3 This is a schematic diagram illustrating the behavior control of satellite droplets during short-distance fusion with the main droplet after the satellite droplet is generated.

[0037] Figure 4 A schematic diagram illustrating the behavior control of satellite droplets in cases where the liquid has multiple liquid necks that tend to fracture and form satellite droplets but cannot completely fracture.

[0038] Figure 5 This is a flowchart of the satellite droplet size secondary control method of the present invention;

[0039] Figure 6 A schematic diagram illustrating satellite droplet size control under the condition that the satellite droplet and the main droplet remain relatively stable;

[0040] Figure 7 A schematic diagram illustrating the control of microsatellite droplet generation induced by localized jet morphology control.

[0041] In the diagram: 1. Jet, 2. Main droplet, 3. Satellite droplets, 4. Droplet generator, 5. Nozzle, 6. Droplet charging electrode, 7. Local axial electrode of the jet, 8. Droplet deflection electrode, 9. High-speed camera, 10. Camera displacement platform, 11. Displacement platform controller, 12. Electrode controller, 13. Micrometer-scale axial electrode, 14. Micrometer-scale deflection electrode, 15. Micrometer-scale irregularly distributed electrode, 101. First-mode jet, 102. Second-mode jet, 103. Third-mode jet, 104. Fourth-mode jet, 105. Fifth-mode jet, 10 6. Sixth-state jet, 107. Seventh-state jet, 201. First-state main droplet, 202. Second-state main droplet, 203. Third-state main droplet, 204. Fourth-state main droplet, 205. Fifth-state main droplet, 206. Sixth-state main droplet, 207. Seventh-state main droplet, 208. Eighth-state main droplet, 301. First-state satellite droplet, 302. Second-state satellite droplet, 303. Third-state satellite droplet, 304. Fourth-state satellite droplet, 305. Fifth-state satellite droplet, 306. Sixth-state satellite droplet. Detailed Implementation

[0042] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0043] like Figure 1As shown, the jet morphology and satellite droplet behavior size control device includes an ultra-high flux droplet generator 4, a droplet control component, and a droplet image acquisition component. The nozzle 5 of the ultra-high flux droplet generator 4 faces downward and, under initially set flow parameters and piezoelectric excitation, generates vertical jets 1 of different morphologies. The motion states of the main droplet 2 and satellite droplets 3 in each jet 1 are different; the ultra-high flux is specifically 15k-1MHz. The droplet control component is located directly below the ultra-high flux droplet generator 4 and is used for adjusting the morphology of the jet 1 and controlling the behavior size of the satellite droplets 3. The droplet image acquisition component is located to the side of the droplet control component and is used for dynamically acquiring the morphology of the jet 1 and the behavior size of the satellite droplets 3. The nozzle 5 is made of insulating material and is also installed to the bottom end of the ultra-high flux droplet generator 4 through a threaded structure, maintaining coaxiality with the droplet generator 4 to achieve insulation of the droplet charging electrode 6 and the droplet generator 4, preventing short circuit of the DC power supply.

[0044] The droplet control assembly includes a droplet charging electrode 6, two jet local axial electrodes 7, two droplet deflection electrodes 8, and an electrode controller 12. The droplet charging electrode 6 is a ring structure and is coaxially threaded onto the nozzle 5 of the ultra-high flux droplet generator 4. The two jet local axial electrodes 7 are arranged horizontally and alternately below the droplet charging electrode 6. Each of the two jet local axial electrodes 7 has a through hole at its center and is coaxial with the droplet charging electrode 6. After the jet 1 is generated, it passes through the central through holes of the droplet charging electrode 6 and the two jet local axial electrodes 7 in sequence. The two droplet deflection electrodes 8 are arranged vertically and parallel on both sides of the jet 1. The droplet charging electrode 6 is connected to the positive terminal of a high-voltage DC power supply. The metal shell of the ultra-high flux droplet generator 4 is connected to... A jet local axial electrode 7 located at the top is connected to the positive terminal of the high-voltage DC power supply, and a jet local axial electrode 7 located at the bottom is connected to the ground terminal of the high-voltage DC power supply. Two droplet deflection electrodes 8 are connected to the positive terminal and the ground terminal of the high-voltage DC power supply, respectively. The specific connection method is determined by the deflection direction of the droplets. The high voltage is greater than 500 volts. A uniform electric field parallel to the direction of jet 1 is formed between the two jet local axial electrodes 7, and a uniform electric field perpendicular to the direction of jet 1 is formed between the two droplet deflection electrodes 8. The droplet charging electrode 6, the two jet local axial electrodes 7, and the two droplet deflection electrodes 8 are all electrically connected to the electrode controller 12 that controls the voltage output. The electrode controller 12 is electrically connected to the computer. The inner diameter of the droplet charging electrode 6 is greater than four times the diameter of jet 1, and the diameter of the through holes of the two jet local axial electrodes 7 is greater than eight times the diameter of jet 1, allowing jet 1 and the generated droplets to pass through.

[0045] like Figure 7As shown, the droplet control assembly also includes two micrometer-scale axial electrodes 13, two micrometer-scale deflection electrodes 14, and two micrometer-scale irregularly distributed electrodes 15. During the extreme size adjustment of the satellite droplet 3, the two jet local axial electrodes 7 are replaced with two micrometer-scale axial electrodes 13, and the two droplet deflection electrodes 8 are replaced with two micrometer-scale deflection electrodes 14. Two micrometer-scale irregularly distributed electrodes 15 are horizontally arranged symmetrically on the upper and lower sides of the droplet in the jet 1. Each micrometer-scale irregularly distributed electrode 15 is located between one micrometer-scale axial electrode 13 and two micrometer-scale deflection electrodes 14. A through-hole is formed at the center of each of the two micrometer-scale irregularly distributed electrodes 15. The hole and the droplet charging electrode 6 are coaxial; a micron-sized axial electrode 13 located above is connected to the positive terminal of the high-voltage DC power supply, and a micron-sized axial electrode 13 located below is connected to the ground terminal of the high-voltage DC power supply. Two micron-sized deflection electrodes 14 are connected to the positive terminal and the ground terminal of the high-voltage DC power supply, respectively. A micron-sized irregularly distributed electrode 15 located above is connected to the positive terminal of the high-voltage DC power supply, and a micron-sized irregularly distributed electrode 15 located below is connected to the ground terminal of the high-voltage DC power supply. The two micron-sized axial electrodes 13, the two micron-sized deflection electrodes 14, and the two micron-sized irregularly distributed electrodes 15 are all electrically connected to the electrode controller 12 that controls the voltage output. The influence of the micron-sized electrodes 13, 14, and 15 on the slender droplet is much greater than its influence on the main droplet 2, and the influence of the electric field force on the main droplet 2 can be ignored.

[0046] The droplet image acquisition component includes a high-speed camera 9, a camera displacement platform 10, and a displacement platform controller 11. The high-speed camera 9 is mounted on the camera displacement platform 10, which is electrically connected to the displacement platform controller 11. The high-speed camera 9 and the displacement platform controller 11 are electrically connected to a computer. The computer controls the displacement platform 10 to move up and down via the displacement platform controller 11, thus moving the high-speed camera 9 up and down. The high-speed camera 9 faces the jet 1 region. The computer controls the high-speed camera 9 to dynamically acquire the morphology of the jet 1 and the behavior and size of the satellite droplets 3. The high-speed camera 9 focuses according to different focal length lenses to maintain a clear field of view for observing the jet 1 and the movement of the droplets. The high-speed camera 9 is connected to the computer via a signal line. The computer can control the high-speed camera 9 to capture images and perform real-time analysis and processing of the captured images. The camera displacement platform 10 is mounted on the base of the high-speed camera 9 and can be finely adjusted in the three-dimensional axial direction of the Cartesian coordinate system. The displacement platform controller 11 adjusts the camera displacement platform 10 in real time by changing the position of the desired observation interval via the computer.

[0047] Both the droplet deflection electrode 8 and the jet local axial electrode 7 are mounted on a precision moving platform. The information of the jet 1 and the satellite droplet 3 obtained by the droplet image acquisition component can be used by the electrode controller 12 to change the position of the electrodes 7 and 8 in real time, so as to achieve precise intervention on the shape of the jet 1 and precise control within the range of the satellite droplet 3 generation position.

[0048] One application of the ultra-high throughput droplet generator 4 of the present invention is the generation of light source in extreme ultraviolet lithography machines. A heating device must be installed on the side wall of the droplet generator 4 to keep the tin inside the cavity of the droplet generator 4 in a molten state. The insulating nozzle 5 needs to be replaced with a high-temperature resistant material, such as quartz. The droplet generation environment needs to be set to a vacuum.

[0049] The control method of the jet morphology and satellite droplet behavior size control device of the present invention is as follows:

[0050] 1) Set the initial values ​​of the jet parameters and disturbance parameters of the droplet generator 4, generate jet 1 through the droplet generator 4, and continuously acquire images of the droplets after the jet 1 breaks through the high-speed camera 9;

[0051] 2) Control the behavior of satellite droplet 3, such as... Figure 2 As shown, the motion state of the satellite droplet 3 in the jet 1 is determined by the image of the droplet after the jet 1 breaks. If it is not stable over a long distance, the motion state of the satellite droplet 3 is adjusted by the droplet charging electrode 6 and the two local axial electrodes of the jet until it is stable over a long distance.

[0052] When the motion state of the satellite droplets 3 in jet 1 remains stable over a long distance, that is, when jet 1 becomes the second-state jet 102, each second-state satellite droplet 302 of the second-state jet 102 is always located between two adjacent second-state main droplets 202 and maintains a long distance exceeding a preset distance threshold. The second-state main droplet 202 is the main droplet 2 that remains relatively stable with the satellite droplet 3 in the charged state after charging. The second-state satellite droplet 302 is the satellite droplet 3 that remains relatively stable with the main droplet 2 in the charged state after charging. If the current satellite droplet 3 reaches the target size, the droplet charging electrode 6 is turned on and the voltage of the two droplet deflection electrodes 8 is adjusted to separate the second-state satellite droplet 302 in the horizontal direction, thereby obtaining a stable second-state satellite droplet 302 flow. However, most of the obtained satellite droplet 3 motion state images cannot be stably generated and cannot maintain long-distance stability with the main droplet 2. According to the deformation process of the broken liquid neck of jet 1, the situation where the satellite droplet 3 cannot maintain long-distance stability but its behavior is controllable is classified as... There are two types of unstable states. When the motion state of the satellite droplet 3 in the jet 1 does not remain stable over a long distance, there are two unstable states. The first unstable state is when the jet 1 changes to the first-form jet 101. At this time, the liquid toughness of the first-form jet 101 generates the first-state satellite droplet 301. The first-state satellite droplet 301 is located between two adjacent first-state main droplets 201 and maintains a short distance less than a preset distance threshold before merging with a first-state main droplet 201 located below it. The first-state main droplet 201 is the main droplet 2 that is about to merge with the satellite droplet 3 in the uncharged state. The second unstable state is when the jet 1 changes to the third-form jet 103. At this time, the liquid toughness of the third-state main droplet 203 of the third-form jet 103 has several liquid necks that have the tendency to break and form satellite droplets 3, but have not completely broken. The third-state main droplet 203 is the main droplet 2 that has not broken and has multiple liquid necks.

[0053] like Figure 3 As shown, when jet 1 is in the first unstable state, although the first-state satellite droplet 301 of the first-state jet 101 can separate from the first-state main droplet 201, it will quickly merge with the first-state main droplet 201 after flying a certain distance. If the droplets are charged at this time to utilize the electrostatic force between the droplets, it is still insufficient to offset the velocity difference between the first-state satellite droplet 301 and the first-state main droplet 201. The first-state satellite droplet 301 will still gradually approach the first-state main droplet 201 and eventually merge with it. At this time, the first-state jet 101 is as follows: Figure 3As shown in the first column on the left. By charging the droplets, both the first-state main droplet 201 and the first-state satellite droplet 301 can be charged with different amounts of the same induced charge. Based on the principle that the satellite droplet 3 and the main droplet 2 separate in the deflection electric field, it is known that under the same electric field strength, their offset distances are different. Adding a jet local axial electrode 7 between the droplet charging electrode 6 and the droplet deflection electrode 8 creates a local axial electric field. Through the combined action of the axial electric force and electrostatic force, the first-state satellite droplet 301 can return to the middle position of the first-state main droplet 201, maintaining a relatively stable state with the first-state main droplet 201. Figure 3 As shown in the second column from the middle; the droplet charging electrode 6 is turned on and the voltage of the two jet local axial electrodes 7 is increased through the electrode controller 12 until the first-mode jet 101 changes to the second-mode jet 102, as shown. Figure 3 As shown in the third column from the right, the second-state satellite droplet 302, under the influence of electrostatic force, can maintain a relatively equidistant distance from the charged second-state main droplet 202 before and after it, which makes it easier to separate the second-state satellite droplet 302. When the current satellite droplet 3 reaches the target size, the two droplet deflection electrodes 8 are located below a jet local axial electrode 7. By adjusting the voltage of the two droplet deflection electrodes 8, after the second-state jet 102 passes through the two jet local axial electrodes 7, the second-state satellite droplet 302 is separated in the horizontal direction, thereby obtaining a stable flow of second-state satellite droplets 302.

[0054] like Figure 4 As shown, when jet 1 is in the second unstable state, the third-mode jet 103 exhibits a tendency for multiple liquid necks to form satellite droplets 3 during the breakup of the main droplet 203 in the third state, as well as the liquid necks between droplets when jet 1 has just left the nozzle 5 and has not yet formed a stable state. Figure 4As shown in the first column on the left, the droplet charging electrode 6 is always off. The voltage of the two local axial electrodes 7 of the jet is increased by the electrode controller 12 until the third-state jet 103 becomes the second-state jet 102. At this time, each third-state satellite droplet 303 is always located between two adjacent fourth-state main droplets 204 and maintains a long distance exceeding the preset distance threshold. The fourth-state main droplet 204 is the main droplet 2 after separation under the action of the local axial electric field. The third-state satellite droplet 303 is the satellite droplet 3 that can maintain relative stability with the main droplet 2 after separation under the action of the local axial electric field. The electric field acts on the droplet only by polarizing and charging the droplet through the local axial electrodes 7 of the jet, so that the liquid droplet that would not break under the influence of the local axial electric field 7 of the jet can separate from the third-state main droplet 203 and form the third-state satellite droplet 303, which is transformed into the second-state jet 102. The third-state satellite droplet 303 and the fourth-state main droplet 204 can maintain a relatively stable state, as shown in the figure. Figure 4 As shown in the second column on the right; when the current satellite droplet 3 reaches the target size, the two droplet deflection electrodes 8 are located between the two jet local axial electrodes 7. By adjusting the voltage of the two droplet deflection electrodes 8, when the second-mode jet 102 passes between the two jet local axial electrodes 7, the second-state satellite droplet 302 is separated in the horizontal direction to obtain a stable second-state satellite droplet 302 flow. The third-state satellite droplet 303 obtained based on the jet local axial electrode 7 can be deflected to obtain a stable second-state satellite droplet 302 flow before leaving the range of the jet local axial electric field 7, thus preventing the third-state satellite droplet 303 from merging into the fourth-state main droplet 204 after leaving the axial electric field range.

[0055] By controlling the liquid toughness of jet 1 and the stability of satellite droplets 3, satellite droplets 3 can be stably generated and maintain a stable separation from the main droplet 2 over a long working distance. This requires energizing the charging electrode 6 in the droplet control component. After passing through the charging electrode 6, jet 1 induces a charge on its surface opposite to the electrode polarity. The droplet generator 4 cavity is grounded to conduct excess charge to the ground. After the droplet breaks, the broken droplets carry a charge. At this time, the main droplet 2 and satellite droplets 3, which are of unequal size, form a uniform electric field perpendicular to the direction of jet 1 through a pair of droplet deflection electrodes 8 in the droplet control component connected to a high-voltage DC power supply. Utilizing the difference in mass-to-charge ratio between satellite droplets 3 and main droplets 2, the larger diameter main droplet 2 has a smaller radial offset, while the smaller diameter satellite droplet 3 will have a larger offset. This principle allows for the separation of satellite droplets 3 from main droplets 2.

[0056] The satellite droplet behavior control method can obtain a stable satellite droplet flow. However, the satellite droplet size obtained after determining the jet parameters and disturbance parameters cannot be adjusted again. To avoid the situation where the satellite droplet size cannot meet the requirements, a droplet control component can be used to perform secondary regulation of the satellite droplet size. The secondary regulation is based on the condition that the satellite droplet 3 can maintain relative stability with the main droplet 2. It is applicable to situations where the liquid volume is limited by the original parameters and there are limit values.

[0057] 3) After the satellite droplet 3 has maintained stable motion over a long distance, the size of the satellite droplet needs to be adjusted a second time, such as... Figure 5 As shown, it is determined whether the current size of the satellite droplet 3 has reached the target size. If the current size of the satellite droplet 3 has not reached the target size, the size of the satellite droplet 3 is adjusted by two jet local axial electrodes 7 until the target size is reached, and then the stable satellite droplet 3 flow of the target size is separated by two droplet deflection electrodes 8.

[0058] like Figure 6 As shown, if the current satellite droplet 3 does not reach the target size, the two jet local axial electrodes 7 are moved to the region in the second-mode jet 102 where the liquid toughness is not completely broken, such as... Figure 6 As shown in the first column on the left, when jet 1 is in the fourth state jet 104, a slender liquid duct forms between every two adjacent fifth state main droplets 205, eventually breaking to form a fourth state satellite droplet 304. In the fourth state jet 104, the satellite droplet 3 remains relatively stable with the main droplet 2, and the size of the liquid duct satellite droplet 3 is adjustable. The fifth state main droplet 205 is the main droplet 2 before the secondary adjustment of the satellite droplet 3 size, and the fourth state satellite droplet 304 is the satellite droplet 3 before the secondary adjustment of the satellite droplet 3 size. By increasing the voltage of the two jet local axial electrodes 7 or decreasing the distance between the two jet local axial electrodes 7, the fourth state jet 104 is transformed into the fifth state jet 105. The fifth-state jet 105 divides into a sixth-state main droplet 206 and a fifth-state satellite droplet 305. The size of the fifth-state satellite droplet 305 reaches the target size. The sixth-state main droplet 206 is the main droplet 2 after secondary size adjustment of the satellite droplet 3, and the fifth-state satellite droplet 305 is the satellite droplet 3 after secondary size adjustment of the satellite droplet 3. At this time, the two droplet deflection electrodes 8 are located below a jet local axial electrode 7. By adjusting the voltage of the two droplet deflection electrodes 8, after the fifth-state jet 105 passes through the two jet local axial electrodes 7, the fifth-state satellite droplet 305 is separated in the horizontal direction, thereby obtaining a stable fifth-state satellite droplet 305 flow.

[0059] Electrode controller 12 controls the local axial electrode 7 of the jet to adjust the power supply voltage. Utilizing the compressive effect of the electrostatic force perpendicular to the interface at the dielectric interface in the electrostatic field, the entire jet 1 is deformed. Changes in the liquid volume and the size of the satellite droplets 3 are observed. Figure 6 As shown in the second column on the right, it is clearly observable that the volumes of the fifth-state main droplet 205 and the fourth-state satellite droplet 304 are redistributed during the jet breakup process in the fifth-state jet 105. As the liquid volume decreases, the size of the fifth-state satellite droplet 305 decreases accordingly. When the size of the satellite droplet 305 decreases to meet the target droplet size, the adjustment of the power supply voltage of the jet local axial electrode 7 is stopped. The fifth-state satellite droplet 305 that meets the size requirements passes through the jet local axial electrode 7 and enters the droplet deflection electrode 8. Similarly, due to polarization charging, the fifth-state satellite droplet 305 can be separated from the sixth-state main droplet 206 flow, and finally a stable fifth-state satellite droplet 305 flow that meets the size requirements is obtained.

[0060] The satellite droplet 3 behavior control method can obtain a stable satellite droplet 3 flow. However, the size of the satellite droplet 3 obtained after determining the jet parameters and disturbance parameters cannot be adjusted again. To avoid the situation where the size of the satellite droplet 3 cannot meet the requirements, the droplet control component can be used to perform secondary adjustment of the size of the satellite droplet 3. Based on the fact that the satellite droplet 3 can maintain relative stability with the main droplet 2, it is suitable for situations where the liquid volume is limited by the original parameters and there is a physical limit value.

[0061] The local axial electrode 7 of the satellite droplet 3 behavior size control method has a breakdown voltage. When the electrode plate is broken down, the jet 1 will not be able to break and generate droplets, so electrode breakdown should be avoided. The satellite droplet 3 size control method utilizes the fact that fluid movement under the action of an external electric field leads to the transfer and redistribution of surface charge. The change in interface shape caused by the electric stress perpendicular to the interface is achieved by the interfacial tension balancing the electric stress. This changes the overall shape of the jet 1, but does not change the physical laws of jet 1 development. According to the jet instability principle, the smallest droplet can be obtained when the dimensionless wavenumber of the disturbance approaches 1 infinitely. By changing the disturbance amplitude input to the droplet generator 4, the jet shape 1 can be adjusted to obtain the smallest satellite droplet 3 limited by the original input parameters. On this basis, if the small liquid droplets in the process of the main droplet 2 being pinched off can be separated from the main droplet 2, the macroscopic electric field adjustment can no longer meet the requirements of the overall force of the jet. Therefore, a device that can intervene in the jet 1 only in a local area is needed.

[0062] 4) When the target size is smaller than the limit size of the satellite droplet 3, local control is required through the jet morphology to induce the generation of micro satellite droplets 3. First, two micron-sized axial electrodes 13, two micron-sized deflection electrodes 14, and two micron-sized irregularly distributed electrodes 15 are arranged. The two micron-sized axial electrodes 13 and the two micron-sized irregularly distributed electrodes 15 adjust the size of the satellite droplet 3 until it reaches the target size smaller than the limit size of the satellite droplet 3. The two micron-sized deflection electrodes 14 separate a stable stream of satellite droplets 3 with the target size smaller than the limit size of the satellite droplet 3.

[0063] like Figure 7 As shown, when the target size is smaller than the limit size of the satellite droplet 3, the jet 1 is the sixth-state jet 106. The liquid toughness volume of the seventh-state main droplet 207 of the sixth-state jet 106 has a limit value, and the sixth-state jet 106 breaks and cannot generate the satellite droplet 3. The seventh-state main droplet 207 has a liquid toughness volume limit and cannot break to form the main droplet 2 connected to the satellite droplet 3. Then, the voltage of the micron-scale axial electrode 13 and the micron-scale irregularly distributed electrode 15 is increased, which increases the electric field strength at the liquid toughness between two adjacent main droplets 2 of the jet 1 until the liquid toughness breaks. The sixth-state jet 106 becomes the seventh-state jet 107, and the eighth-state main droplet 20 is obtained. The satellite droplets 306 in the sixth state and the satellite droplets 306 in the seventh state are generated by local control of the jet morphology induced by the jet morphology of the jet. The main droplet 208 in the eighth state is the main droplet 2 that is separated from the fine liquid after morphology control. The satellite droplet 306 in the sixth state is the satellite droplet 3 formed after the fine liquid is separated from the main droplet 2. The size of the satellite droplet 306 in the sixth state reaches the target size smaller than the limit size of the satellite droplet 3. By adjusting the voltage of the two micron-level deflection electrodes 14, when the second state jet 102 passes between the two jet local axial electrodes 7, the satellite droplet 306 in the sixth state is separated in the horizontal direction, thereby obtaining a stable flow of satellite droplets 306 in the sixth state.

[0064] Micrometer-scale irregularly distributed electrode 15 is disposed between micrometer-scale axial electrode 13 and micrometer-scale deflection electrode 14. When the liquid toughness of the sixth-state jet 106 is too small to generate satellite droplets 3, the electric field distribution of the local liquid toughness between the main droplets 207 in the seventh state is adjusted to increase the local electric field intensity at the liquid toughness, thereby increasing the surface electric stress near the liquid toughness fracture point and promoting the formation of the fracture point. This achieves a breakthrough in overcoming the limitation that the size of the original satellite droplets 3 cannot be further reduced due to the liquid toughness volume. After appropriate adjustment by electrode controller 12, the seventh-state jet 107 develops and shows the separation of the liquid toughness from the eighth-state main droplet 208 and the generation of extremely small sixth-state satellite droplets 306, whose size is smaller than the minimum value that the original parameters can achieve. At this time, through the micrometer-scale deflection electrode 14, a sixth-state satellite droplet 306 flow with a size that breaks through the original parameter limitation can be obtained.

[0065] The above method is applied to situations where the volume of the liquid toughening agent is limited by the original parameters and cannot be controlled, and the electric field only acts on the local liquid toughening area of ​​the jet 1. This is achieved by adding irregularly distributed electrodes, which are micrometer-scale micro-electro-mechanical systems (MEMS) chips, to increase the electric field strength at finer liquid toughening areas. This strengthens the resistance of the electric field force to surface tension at the liquid neck of the liquid toughening agent, promoting the formation of liquid toughening fracture points.

[0066] The examples and descriptions above are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A control method for a jet morphology and satellite droplet behavior size control device, the jet morphology and satellite droplet behavior size control device comprising a droplet generator (4), a droplet control component and a droplet image acquisition component, wherein the nozzle (5) of the droplet generator (4) faces downward and is used to generate vertical jets (1) of different morphologies, and the main droplet (2) and satellite droplet (3) in each jet (1) have different motion states; the droplet control component is located directly below the droplet generator (4) and is used for adjusting the morphology of the jet (1) and controlling the behavior size of the satellite droplet (3); the droplet image acquisition component is located to the side of the droplet control component and is used for dynamically acquiring the morphology of the jet (1) and the behavior size of the satellite droplet (3); the droplet control component includes a droplet charging electrode (6). The droplet control assembly includes two jet local axial electrodes (7), two droplet deflection electrodes (8), and an electrode controller (12). The droplet control assembly also includes two micrometer-scale axial electrodes (13), two micrometer-scale deflection electrodes (14), and two micrometer-scale irregularly distributed electrodes (15). When adjusting the extreme size of the satellite droplet (3), the two jet local axial electrodes (7) are replaced with two micrometer-scale axial electrodes (13), and the two droplet deflection electrodes (8) are replaced with two micrometer-scale deflection electrodes (14). Two micrometer-scale irregularly distributed electrodes (15) are horizontally arranged on the upper and lower symmetrical sides of the droplet in the jet (1). The droplet image acquisition assembly includes a high-speed camera (9), a camera displacement platform (10), and a displacement platform controller (11). Its features include... include: 1) Set the initial values ​​of the jet parameters and disturbance parameters of the droplet generator (4), generate a jet (1) through the droplet generator (4), and continuously acquire images of the droplets after the jet (1) breaks through the high-speed camera (9); 2) Based on the image of the droplets after the jet (1) breaks, determine whether the motion state of the satellite droplet (3) in the jet (1) remains stable over a long distance. If it does not remain stable over a long distance, adjust the motion state of the satellite droplet (3) through the droplet charging electrode (6) and the two jet local axial electrodes (7) until it remains stable over a long distance. 3) After the motion state of the satellite droplet (3) remains stable over a long distance, it is determined whether the current size of the satellite droplet (3) has reached the target size. If the current size of the satellite droplet (3) has not reached the target size, the size of the satellite droplet (3) is adjusted by two jet local axial electrodes (7) until the target size is reached. Then, the stable target size satellite droplet (3) flow is separated by two droplet deflection electrodes (8). 4) When the target size is smaller than the limit size of the satellite droplet (3), two micron-sized axial electrodes (13), two micron-sized deflection electrodes (14) and two micron-sized irregularly distributed electrodes (15) are arranged. The two micron-sized axial electrodes (13) and two micron-sized irregularly distributed electrodes (15) adjust the size of the satellite droplet (3) until it reaches the target size smaller than the limit size of the satellite droplet (3). The two micron-sized deflection electrodes (14) separate a stable satellite droplet (3) flow with a target size smaller than the limit size of the satellite droplet (3).

2. The control method of the jet morphology and satellite droplet behavior size control device according to claim 1, characterized in that: In step 2), when the motion state of the satellite droplets (3) in the jet (1) remains stable over a long distance, that is, when the jet (1) becomes the second-mode jet (102), each second-mode satellite droplet (302) of the second-mode jet (102) is always located between two adjacent second-mode main droplets (202) and maintains a long distance exceeding the preset distance threshold. If the current satellite droplet (3) reaches the target size, the droplet charging electrode (6) is turned on and the voltage of the two droplet deflection electrodes (8) is adjusted to separate the second-mode satellite droplets (302) in the horizontal direction, thereby obtaining a stable second-mode satellite droplet (302) flow; when the motion state of the satellite droplets (3) in the jet (1) does not change, If long-distance stability is maintained, there are two unstable states. The first unstable state is that the jet (1) becomes the first-form jet (101). At this time, the liquid toughness of the first-form jet (101) generates the first-state satellite droplet (301). The first-state satellite droplet (301) is located between two adjacent first-state main droplets (201) and maintains a short distance less than the preset distance threshold before merging with a first-state main droplet (201) located below itself. The second unstable state is that the jet (1) becomes the third-form jet (103). At this time, the liquid toughness of the third-state main droplet (203) of the third-form jet (103) has several liquid necks that have the tendency to break and form satellite droplets (3) but have not completely broken.

3. The control method of the jet morphology and satellite droplet behavior size control device according to claim 2, characterized in that: When the jet (1) is in the first unstable state, the droplet charging electrode (6) is turned on and the voltage of the two jet local axial electrodes (7) is increased by the electrode controller (12) until the first jet (101) becomes the second jet (102). If the current satellite droplet (3) reaches the target size, the two droplet deflection electrodes (8) are located below the lower jet local axial electrode (7). By adjusting the voltage of the two droplet deflection electrodes (8), after the second jet (102) passes through the two jet local axial electrodes (7), the second state satellite droplet (302) is separated in the horizontal direction to obtain a stable second state satellite droplet (302) flow.

4. The control method of the jet morphology and satellite droplet behavior size control device according to claim 2, characterized in that: When the jet (1) is in the second unstable state, the droplet charging electrode (6) is always closed. The voltage of the two jet local axial electrodes (7) is increased by the electrode controller (12) until the third-state jet (103) becomes the second-state jet (102). At this time, each third-state satellite droplet (303) is always located between two adjacent fourth-state main droplets (204) and maintains a long distance exceeding the preset distance threshold. If the current satellite droplet (3) reaches the target size, the two droplet deflection electrodes (8) are located between the two jet local axial electrodes (7). By adjusting the voltage of the two droplet deflection electrodes (8), when the second-state jet (102) passes between the two jet local axial electrodes (7), the second-state satellite droplet (302) is separated in the horizontal direction to obtain a stable second-state satellite droplet (302) flow.

5. The control method of the jet morphology and satellite droplet behavior size control device according to claim 1, characterized in that: In step 3), if the current satellite droplet (3) has not reached the target size, a liquid toughening is formed between every two adjacent fifth-state main droplets (205), which eventually breaks to form a fourth-state satellite droplet (304), i.e., the jet (1) is a fourth-form jet (104). Then, the two jet local axial electrodes (7) are moved to the liquid toughening incompletely broken section of the second-form jet (102). The voltage of the two jet local axial electrodes (7) is increased or the distance between the two jet local axial electrodes (7) is decreased until the fourth-form jet (104) is divided. The sixth-state main droplet (206) and the fifth-state satellite droplet (305) are transformed into the fifth-state jet (105), and the size of the fifth-state satellite droplet (305) reaches the target size. At this time, the two droplet deflection electrodes (8) are located below a jet local axial electrode (7). By adjusting the voltage of the two droplet deflection electrodes (8), after the fifth-state jet (105) passes through the two jet local axial electrodes (7), the fifth-state satellite droplet (305) is separated in the horizontal direction, thereby obtaining a stable fifth-state satellite droplet (305) flow.

6. The control method of the jet morphology and satellite droplet behavior size control device according to claim 1, characterized in that: In step 4), when the target size is smaller than the limit size of the satellite droplet (3), that is, the liquid tough volume in the jet (1) is small and therefore cannot generate the satellite droplet (3), the jet (1) is the sixth-state jet (106). The liquid tough volume of the seventh-state main droplet (207) of the sixth-state jet (106) has a limit value and the sixth-state jet (106) breaks and cannot generate the satellite droplet (3). Then, the voltage of the micron-scale axial electrode (13) and the micron-scale irregularly distributed electrode (15) is increased, so that the electric field strength at the liquid tough point between two adjacent main droplets (2) of the jet (1) is increased. The jet increases until it undergoes fluid brittle fracture, and the sixth-state jet (106) becomes the seventh-state jet (107). The eighth-state main droplet (208) and the sixth-state satellite droplet (306) are separated. The size of the sixth-state satellite droplet (306) reaches the target size smaller than the limit size of the satellite droplet (3). By adjusting the voltage of the two micron-level deflection electrodes (14), the sixth-state satellite droplet (306) is separated in the horizontal direction when the second-state jet (102) passes between the two jet local axial electrodes (7), thereby obtaining a stable sixth-state satellite droplet (306) flow.

Images