Transmission mechanism and photoetching machine

Abstract

The invention provides a transmission mechanism and a photoetching machine, and belongs to the technical field of photoetching machines. According to the transmission mechanism, the first supporting unit capable of emitting sound waves and the second supporting unit capable of emitting light waves are arranged on the transmission path of the transmission mechanism, and the mover is supported through sound pressure generated between the first supporting unit and the mover and light pressure generated between the second supporting unit and the mover; therefore, the rotor does not make direct contact with the guide rail in the moving process, and the problem that friction exists in a traditional transmission method is solved.

Description

Technical Field

[0001] The present application relates to the technical field of photolithography machines, and in particular to a transmission mechanism and a photolithography machine. Background Art

[0002] In the transmission method of the lithography machine, there are many transmission methods that need to be transported. Generally speaking, the commonly used linear transport methods include ball screw transmission, synchronous belt transmission, gear rack transmission, linear motor transmission, etc. However, each has its own disadvantages. ① The ball screw transmission positioning accuracy is ±0.005mm, but there is still a problem of non-self-locking; ②The positioning accuracy of synchronous belt transmission is ±0.04mm. Due to the flexible transmission, there is overshoot, low-speed transmission and small transmission load. ③ The positioning accuracy of gear transmission is ±0.02mm. Because lubricating oil is required, it is easy to pollute the environment and the transmission noise is loud; ④The linear motor transmission positioning accuracy is ±0.001mm, because the stator is supported by the guide rail, there is friction, which affects the efficiency; ⑤ The magnetic suspension transmission mechanism has problems with magnetic field stability and electromagnetic interference; In summary, the transmission methods currently available on the market all have friction, which affects the transmission efficiency and accuracy. There is no calibration mechanism during motion to ensure accuracy, and there is no independent contactless suspension method. Summary of the invention

[0003] The embodiments of the present application provide a transmission mechanism and a photolithography machine to at least solve the friction problem existing in the current transmission methods on the market. Specifically: According to a first aspect of an embodiment of the present application, a transmission mechanism is provided, comprising a support unit arranged along a transmission path of the transmission mechanism, and a mover capable of moving along the transmission path of the transmission mechanism, wherein the support unit comprises a first support unit capable of emitting sound waves and a second support unit capable of emitting light waves, wherein the first support unit can cooperate with the mover moving along the transmission path and generate sound pressure for supporting the mover, and the second support unit can cooperate with the mover moving along the transmission path and generate light pressure for supporting the mover; in The first support unit is used to cooperate with the bottom of the mover and generate sound pressure to support the bottom of the mover, and / or the first support unit is used to cooperate with the side of the mover and generate sound pressure to support the side of the mover; The second supporting unit is used to cooperate with the bottom of the mover and generate light pressure to support the bottom of the mover, and / or the second supporting unit is used to cooperate with the side of the mover and generate light pressure to support the side of the mover.

[0004] In the above technical solution, the side portion of the mover includes the left and right sides of the mover, wherein at least one supporting unit for supporting the bottom of the mover is provided on the transmission path of the transmission mechanism, and at least one supporting unit for supporting the left and right sides of the mover is provided on the transmission path of the transmission mechanism; The support unit for supporting the bottom of the mover and the support unit for supporting the left and right sides of the mover act together on the mover, so that the mover can move on the transmission path of the transmission mechanism in a suspended manner.

[0005] In the above technical solution, the first support unit and the second support unit constitute a support module, and the support module includes a bottom support module for supporting the bottom of the mover, a left support module for supporting the left side of the mover, and a support module for supporting the right side of the mover; The bottom support module is used to cooperate with the bottom of the mover and generate sound pressure and light pressure to support the bottom of the mover, the left side support module is used to cooperate with the left side of the mover and generate sound pressure and light pressure to support the left side of the mover, and the right side support module is used to cooperate with the right side of the mover and generate sound pressure and light pressure to support the right side of the mover.

[0006] In the above technical solution, the bottom support modules are provided in multiple groups, and the multiple groups of bottom support modules are evenly distributed along the transmission path of the transmission mechanism; The left side support modules are provided in multiple groups, and the multiple groups of left side support modules are evenly distributed along the transmission path of the transmission mechanism; The right side support modules are provided in a plurality of groups, and the plurality of groups of the right side support modules are evenly distributed along the transmission path of the transmission mechanism.

[0007] In the above technical solution, the transmission mechanism further includes: A detection device, the detection device is used to detect the displacement of the mover in the left-right direction when the mover moves along the transmission path; A control device is used to adjust the support force of the left support module on the left side of the mover and / or adjust the support force of the right support module on the right side of the mover according to the displacement of the mover in the left and right directions when the mover moves.

[0008] In the above technical solution, the support module arranged in the left and right directions of the mover includes the first support unit for generating ultrasonic waves, and the first support unit is connected to a power source, wherein when the power source supplies current to the first support unit, the first support unit can cooperate with the bottom of the mover and generate sound pressure to support the bottom of the mover; By changing the current value inputted by the power supply to the first supporting unit, the supporting force of the first supporting unit on the mover in the left-right direction can be adjusted to correct the deviation of the mover in the left-right direction.

[0009] In the above technical solution, the detection device includes magnetic scales distributed on both sides of the mover in the left and right directions and arranged along the transmission path of the transmission mechanism, and the control device includes an industrial computer electrically connected to the magnetic scales.

[0010] In the above technical solution, the mover includes graphene that can produce a photoelectric effect under the illumination of a light source.

[0011] In the above technical solution, the transmission mechanism further includes light source reflectors distributed on both sides of the mover in the left and right directions and arranged along the transmission path of the transmission mechanism; The support unit includes a plurality of second support units distributed on both sides of the mover in the left and right directions and arranged along the transmission path of the transmission mechanism; The second supporting unit can emit composite light at an inclined angle to the light source reflecting member, and the inclined light beam reflected by the light source reflecting member can act on the surface of the mover at an inclined angle to drive the mover to move along the transmission path of the transmission mechanism.

[0012] In the above technical solution, the plurality of second support units arranged along the transmission path of the transmission mechanism are provided with currents of different magnitudes according to a preset rule; The plurality of second support units provided with currents of different magnitudes according to a preset rule can generate light pressures of different magnitudes at different positions on the side of the mover, so as to drive the mover to continuously move in the positive direction or the reverse direction along the transmission path of the transmission mechanism.

[0013] In the above technical solution, the transmission mechanism further includes an accordion cover, a dustproof sheet metal, an end cover plate and a bottom plate constituting its outer contour; The accordion cover, the dustproof sheet metal, the end cover plate and the bottom plate are enclosed to form a transmission mechanism with a linear guide rail.

[0014] The second aspect of the embodiment of the present application also provides a lithography machine, which includes the transmission mechanism provided by the first aspect of the embodiment.

[0015] After adopting the above technical solution, the present invention has the following beneficial effects compared with the prior art: 1. The transmission mechanism in the embodiment of the present application arranges a first support unit capable of emitting sound waves and a second support unit capable of emitting light waves on its transmission path, and supports the mover by the sound pressure generated between the first support unit and the mover and the light pressure generated between the second support unit and the mover, so that the mover does not directly contact the guide rail during movement, thereby solving the problem of friction in traditional transmission methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The three-dimensional structure of the transmission mechanism in the embodiment of the present application is shown in FIG. Figure 1 ; Figure 2 The three-dimensional structure of the transmission mechanism in the embodiment of the present application is shown in FIG. Figure 2 ; Figure 3 Schematic diagram of the longitudinal section structure of the transmission mechanism in the embodiment of the present application, in which the green is a schematic diagram of the light source, the pink is a schematic diagram of the mover, the cyan is a schematic diagram of the thrust of the light source, and the dark blue is a schematic diagram of the thrust of the sound source; Figure 4 The cross-sectional structure of the transmission mechanism in the embodiment of the present application is shown in a top view. Figure 1 , the mover in the figure moves in the positive direction, the green in the figure is a schematic diagram of the light source, the pink is a schematic diagram of the mover, and the red, orange, yellow, green, blue, indigo and purple are schematic diagrams of the mixed light in a beam of light; Figure 5 The cross-sectional structure of the transmission mechanism in the embodiment of the present application is shown in a top view. Figure 2 , the mover in the figure moves in the opposite direction, the green in the figure is a schematic diagram of the light source, the pink is a schematic diagram of the mover, and the red, orange, yellow, green, blue, indigo and purple are schematic diagrams of the mixed light in a beam of light; Figure 6 This is a working diagram of the transmission mechanism in the embodiment of the present application.

[0017] in: 100-motor; 200-first supporting unit; 300- second supporting unit; 400-light source reflector; 500-Detection device; 600-bellows cover; 700-dustproof sheet metal; 800-end cover plate; 900-base plate. DETAILED DESCRIPTION

[0018] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0019] Throughout the specification and claims, the following terms have at least the meanings explicitly associated herein, unless the context dictates otherwise. The meanings identified below do not necessarily limit the terms, but merely provide illustrative examples of the terms. In the description of the present invention, the phrase "in one embodiment" does not necessarily refer to the same embodiment, although it may refer to the same embodiment. Similarly, the phrase "in some embodiments" as used herein, when used multiple times, does not necessarily refer to the same embodiment, although it may refer to the same embodiment. As used herein, the term "or" is an inclusive "or" operator and is equivalent to the term "and / or", unless the context clearly dictates otherwise. The term "based on" is not exclusive and allows for additional factors not described, unless the context clearly dictates otherwise. The word "exemplary" means "used as an example, instance or illustration" in this article. Any embodiment described herein as "exemplary" is not necessarily interpreted as being superior or superior to other embodiments. The scope of the present invention is limited only by the scope of the appended claims, and any examples set forth in this specification are not intended to be limiting, but only to set forth some of the many possible embodiments of the claimed invention. The various embodiments provided by the present invention should not be interpreted as limiting the scope of protection of the present invention.

[0020] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0021] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0022] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0024] Background In the transmission method of the lithography machine, there are many transmission methods that need to be transported. Generally speaking, the commonly used linear transport methods include ball screw transmission, synchronous belt transmission, gear rack transmission, linear motor transmission, etc. However, each has its own disadvantages. ① The ball screw transmission positioning accuracy is ±0.005mm, but there is still a problem of non-self-locking; ②The positioning accuracy of synchronous belt transmission is ±0.04mm. Due to the flexible transmission, there is overshoot, low-speed transmission and small transmission load. ③ The positioning accuracy of gear transmission is ±0.02mm. Because lubricating oil is required, it is easy to pollute the environment and the transmission noise is loud; ④The linear motor transmission positioning accuracy is ±0.001mm, because the stator is supported by the guide rail, there is friction, which affects the efficiency; ⑤ The magnetic suspension transmission mechanism has problems with magnetic field stability and electromagnetic interference; In summary, the transmission methods currently available on the market all have friction, which affects the transmission efficiency and accuracy. There is no calibration mechanism during motion to ensure accuracy, and there is no independent contactless suspension method.

[0025] Based on this, Figure 1-Figure 6As shown, a first aspect of an embodiment of the present application provides a transmission mechanism, including a support unit arranged along a transmission path of the transmission mechanism, and a mover 100 capable of moving along the transmission path of the transmission mechanism, the support unit including a first support unit 200 (i.e., a sound source) capable of emitting sound waves and a second support unit 300 (i.e., a light source) capable of emitting light waves, the first support unit 200 can cooperate with the mover 100 moving along the transmission path, and generate sound pressure for supporting the mover 100, the second support unit 300 can cooperate with the mover 100 moving along the transmission path, and generate light pressure for supporting the mover 100; in The first support unit 200 is used to cooperate with the bottom of the mover 100 and generate sound pressure to support the bottom of the mover 100, and / or the first support unit 200 is used to cooperate with the side of the mover 100 and generate sound pressure to support the side of the mover 100; The second support unit 300 is used to cooperate with the bottom of the mover 100 and generate light pressure to support the bottom of the mover 100 , and / or the second support unit 300 is used to cooperate with the side of the mover 100 and generate light pressure to support the side of the mover 100 .

[0026] In the embodiment of the present application, the first support unit 200 (sound source) and the second support unit 300 (light source) cooperate with the mover 100 to generate sound pressure and light pressure respectively to support the mover 100. Specifically, the ultrasonic wave generates sound waves of a specific frequency, which form standing waves after encountering the reflector. The nodes on the standing waves generate stable pressure, which offsets the gravity of the mover 100, so that the mover 100 is suspended; the strong ion light irradiates the mover 100 to generate light pressure, which offsets the gravity of the mover 100 to achieve suspension. This contactless support method eliminates the traditional guide rail support and avoids the energy loss and reduced precision caused by the friction of the guide rail. The mover 100 will not come into contact with any solid parts during the transmission process, thereby reducing wear, extending the service life of the equipment, and improving the transmission efficiency and precision.

[0027] That is, the transmission mechanism in the embodiment of the present application eliminates the traditional mechanical transmission components, such as ball screws, synchronous belts, gears, etc., which generate friction and noise during operation. The sound source and light source generate almost no noise during operation, and do not require lubricating oil, thus avoiding environmental pollution. This environmentally friendly and low-noise design not only improves the comfort of the working environment, but also reduces interference with surrounding equipment and personnel. Especially in a precision lithography workshop, a low-noise and pollution-free environment helps to improve overall production efficiency and the stability of equipment.

[0028] Further, in some possible embodiments, the side of the mover 100 includes a left side and a right side of the mover 100, wherein at least one supporting unit for supporting the bottom of the mover 100 is provided on the transmission path of the transmission mechanism, and at least one supporting unit for supporting the left and right sides of the mover 100 is provided on the transmission path of the transmission mechanism; The support unit for supporting the bottom of the mover 100 and the support unit for supporting the left and right sides of the mover 100 act together on the mover 100, so that the mover 100 can move on the transmission path of the transmission mechanism in a suspended manner.

[0029] Specifically, the transmission path of the transmission mechanism is not only provided with a support unit for supporting the bottom of the mover 100, but also provided with at least one support unit for supporting the left and right sides of the mover 100. These support units act together on the mover 100 to make it move in a suspended manner on the transmission path. This all-round suspension support mechanism ensures that the mover 100 is supported uniformly in both the vertical and horizontal directions, thereby achieving high stability and balance of the mover 100 during the transmission process. There will be no contact friction between the mover 100 and the transmission path, which further reduces energy loss and wear, and improves transmission efficiency and the service life of the equipment.

[0030] Specifically, by setting support units at the bottom and left and right sides of the mover 100, the mover 100 is not only supported by sound pressure and light pressure in the vertical direction during transmission, but also by the correction effect of sound pressure in the horizontal direction. The magnetic scale detects the position of the mover 100 in real time and feeds back the signal to the industrial computer. The industrial computer adjusts the current of the sound source according to the feedback signal and changes the sound pressure to correct the mover 100. This multi-dimensional support and correction mechanism makes the mover 100 more stable during transmission without offset or jitter. Especially in high-precision lithography processes, the stability and accuracy of the mover 100 are crucial. Through all-round suspension support and high-precision position feedback, the mover 100 can maintain a high degree of stability and accuracy on the transmission path, ensuring high-quality completion of the lithography process.

[0031] Since the mover 100 is completely suspended during the transmission process and does not come into contact with any solid parts, friction is reduced. The combined effect of sound pressure and light pressure ensures the smooth movement of the mover 100 on the transmission path and reduces energy loss. This contactless transmission method significantly improves the transmission efficiency. The mover 100 can move to the target position faster, reducing the transmission time and improving production efficiency. At the same time, the vibration and noise caused by friction are reduced, further improving the smoothness and reliability of the equipment.

[0032] Further, in some possible implementations, the first support unit 200 and the second support unit 300 constitute a support module, and the support module includes a bottom support module for supporting the bottom of the mover 100, a left support module for supporting the left side of the mover 100, and a support module for supporting the right side of the mover 100; The bottom support module is used to cooperate with the bottom of the mover 100 and generate sound pressure and light pressure to support the bottom of the mover 100, the left support module is used to cooperate with the left side of the mover 100 and generate sound pressure and light pressure to support the left side of the mover 100, and the right support module is used to cooperate with the right side of the mover 100 and generate sound pressure and light pressure to support the right side of the mover 100.

[0033] Specifically, the first support unit 200 (sound source) and the second support unit 300 (light source) constitute a support module, which includes a bottom support module, a left support module and a right support module. Each module cooperates with the bottom, left and right sides of the mover 100, respectively, to generate corresponding sound pressure and light pressure, and jointly support the mover 100. This modular design makes the function of each support module more clear and detailed, and is convenient for design, manufacturing and maintenance. Each module can be adjusted and optimized independently, which improves the flexibility and maintainability of the system. For example, if a module fails, it can be quickly replaced or repaired without affecting the operation of the entire system. The bottom support module, the left support module and the right support module cooperate with the bottom, left and right sides of the mover 100, respectively, to generate sound pressure and light pressure, and jointly support the mover 100. This multi-point support mechanism ensures the stability and balance of the mover 100 on the transmission path. Through multi-point support, the mover 100 is subjected to uniform support force during transmission, reducing the instability and offset caused by single-point support. This precise multi-point support mechanism not only improves the stability and accuracy of the mover 100, but also ensures the smoothness and uniformity of the mover 100 during the transmission process, further improving the positioning accuracy and transmission efficiency of the lithography machine. Each support module can independently adjust the size of the sound pressure and light pressure. For example, when the magnetic scale detects that the mover 100 is biased to the left, the industrial computer can independently adjust the sound pressure of the left support module to increase it, while reducing the sound pressure of the right support module, thereby correcting the position of the mover 100. This efficient dynamic adjustment mechanism makes the position control of the mover 100 more precise and faster. By independently adjusting the sound pressure and light pressure of each support module, the offset of the mover 100 can be corrected in real time to ensure that the mover 100 always remains in the predetermined position on the transmission path, improving the response speed and control accuracy of the system.

[0034] Further, in some possible implementations, multiple groups of bottom support modules are provided, and the multiple groups of bottom support modules are evenly distributed along the transmission path of the transmission mechanism; There are multiple groups of left-side support modules, and the multiple groups of left-side support modules are evenly distributed along the transmission path of the transmission mechanism; There are multiple groups of right side support modules, and the multiple groups of right side support modules are evenly distributed along the transmission path of the transmission mechanism.

[0035] Specifically, multiple groups of bottom support modules, left support modules, and right support modules are respectively set and evenly distributed along the transmission path of the transmission mechanism. This evenly distributed support module design ensures that the mover 100 is subjected to uniform support force at each position on the transmission path. During the movement, the mover 100 can be stably supported no matter where it is, reducing the vibration and offset caused by uneven support force, and further improving the stability and accuracy of the transmission. The even distribution of multiple groups of support modules means that even if a support module fails, other support modules can still continue to provide support force to ensure the stable transmission of the mover 100. This design significantly improves the redundancy and reliability of the system. Even if some support modules fail, the system can still operate normally, reducing the downtime caused by single point failures and improving the availability and production efficiency of the equipment. Multiple groups of support modules are evenly distributed, and the position of the mover 100 can be adjusted more finely. The magnetic scale detects the position of the mover 100 in real time and feeds back the signal to the industrial computer. The industrial computer adjusts the sound pressure and light pressure of each support module according to the feedback signal to achieve precise position control. Through the fine adjustment of multiple groups of support modules, the position control of the mover 100 is more precise. This high-precision position control mechanism not only improves the positioning accuracy of the lithography machine, but also ensures the smoothness and uniformity of the transmission process, which is suitable for high-precision lithography processes.

[0036] Furthermore, in some possible implementations, the transmission mechanism further includes: A detection device 500, the detection device 500 is used to detect the displacement of the mover 100 in the left-right direction when it moves along the transmission path; The control device is used to adjust the support force of the left support module on the left side of the mover 100 and / or adjust the support force of the right support module on the right side of the mover 100 according to the displacement of the mover 100 in the left and right directions when the mover 100 moves.

[0037] In the embodiment of the present application, the detection device 500 is used to detect in real time the offset of the mover 100 in the left and right directions when it moves along the transmission path, and the control device adjusts the support force of the left support module and / or the right support module on the mover 100 according to the detected offset. This real-time position monitoring and feedback mechanism ensures the position accuracy of the mover 100 during the transmission process. The detection device 500 can accurately detect the offset of the mover 100 and feed back the signal to the control device in real time. The control device quickly adjusts the support force according to the feedback signal, thereby realizing the precise position control of the mover 100. This mechanism not only improves the positioning accuracy of the mover 100, but also ensures the stability and reliability of the transmission process. The control device dynamically adjusts the sound pressure and light pressure of the left support module and the right support module according to the offset feedback from the detection device 500. For example, if it is detected that the mover 100 is biased to the left, the control device will increase the support force of the right support module and reduce the support force of the left support module, thereby correcting the position of the mover 100. This precise dynamic adjustment mechanism makes the position control of the mover 100 more precise and fast. By adjusting the supporting force in real time, the mover 100 always remains in the predetermined position during the transmission process, reducing the offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring high-quality completion of the lithography process. Preferably, the detection device is a magnetic scale.

[0038] Further, in some possible implementations, the support module arranged in the left and right directions of the mover 100 includes a first support unit 200 for generating ultrasonic waves, and the first support unit 200 is connected to a power source, wherein when the power source supplies current to the first support unit 200, the first support unit 200 can cooperate with the bottom of the mover 100 and generate sound pressure to support the bottom of the mover 100; By changing the current value inputted by the power supply to the first supporting unit 200 , the supporting force of the first supporting unit 200 on the mover 100 in the left-right direction can be adjusted to correct the deviation of the mover 100 in the left-right direction.

[0039] Specifically, the support module arranged in the left and right directions of the mover 100 includes a first support unit 200 (sound source) for generating ultrasonic waves, and the first support unit 200 is connected to a power supply. By changing the current value input by the power supply to the first support unit 200, the support force of the first support unit 200 on the mover 100 in the left and right directions can be adjusted, thereby correcting the mover 100 in the left and right directions. This precise sound pressure control mechanism makes the correction of the mover 100 more precise and flexible. By adjusting the current value, the size of the sound pressure can be changed in real time, thereby accurately controlling the position of the mover 100 in the left and right directions. This mechanism not only improves the positioning accuracy of the mover 100, but also ensures the smoothness and stability of the transmission process, and is suitable for high-precision photolithography processes. By changing the current value of the power supply input, the first support unit 200 can respond quickly and adjust the sound pressure. For example, if it is detected that the mover 100 is biased to the left, the control device will increase the current of the right support module, thereby increasing the sound pressure on the right, and reduce the current of the left support module, thereby reducing the sound pressure on the left, to achieve the correction of the mover 100. This efficient dynamic adjustment mechanism makes the position control of the mover 100 faster and more accurate. By adjusting the current value in real time, the mover 100 always remains in the predetermined position during the transmission process, reducing the offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring the high-quality completion of the lithography process. The sound pressure is controlled by adjusting the current value, which simplifies the control logic. The control device only needs to adjust the current value of the power supply according to the offset feedback from the detection device 500 to achieve the deviation correction of the mover 100. This simplified control logic not only improves the response speed of the system, but also reduces the complexity and cost of the control system. Through simple current adjustment, precise position control is achieved, and the reliability and maintainability of the system are improved. This design makes the system easier to implement and maintain, and reduces the development and operation costs. By accurately controlling the current value, the first support unit 200 only generates the required sound pressure when necessary, avoiding unnecessary energy waste. This optimized energy consumption management mechanism ensures the efficient operation of the system. By accurately adjusting the current value, the system only consumes energy when necessary, reducing energy waste and improving energy utilization efficiency. This not only reduces operating costs, but also reduces the thermal load on the equipment, further improving the stability and reliability of the system.

[0040] Furthermore, in some possible implementations, the detection device 500 includes magnetic scales distributed on both sides of the mover 100 in the left and right directions and arranged along the transmission path of the transmission mechanism, and the control device includes an industrial computer electrically connected to the magnetic scales.

[0041] The magnetic scale is a high-precision displacement detection device 500, and its accuracy can reach ±0.000002mm, which is much higher than the traditional detection method (such as encoder ±0.002mm, rangefinder ±0.05mm). By arranging the magnetic scale on both sides of the mover 100 in the left and right directions, the position of the mover 100 on the transmission path can be detected in real time and accurately, especially the offset in the left and right directions. This high-precision position detection mechanism ensures that the position control of the mover 100 is more accurate and reliable. The magnetic scale feeds back the detected position signal to the industrial computer in real time. The industrial computer quickly calculates the offset of the mover 100 based on these signals, and adjusts the support force of the left support module and the right support module to realize the deviation correction of the mover 100. This real-time feedback and control mechanism makes the position adjustment of the mover 100 more timely and accurate. The industrial computer can quickly respond to the feedback signal of the magnetic scale and adjust the support force in real time to ensure that the mover 100 always remains in the predetermined position during the transmission process. This closed-loop control mechanism not only improves the positioning accuracy of the mover 100, but also ensures the stability and reliability of the transmission process, and is suitable for high-precision lithography processes. The combination of the magnetic scale and the industrial computer provides a detection and control mechanism with high reliability and stability. The magnetic scale can maintain high-precision detection even in harsh environments, and the industrial computer has powerful computing and control capabilities, which can quickly process feedback signals and make adjustments. This detection and control mechanism with high reliability and stability ensures the long-term stable operation of the system. Even in complex industrial environments, the magnetic scale and the industrial computer can maintain high accuracy and high response speed, reduce downtime caused by detection and control failures, and improve equipment availability and production efficiency. The industrial computer dynamically adjusts the sound pressure and light pressure of the left support module and the right support module according to the offset feedback from the magnetic scale. For example, if it is detected that the mover 100 is biased to the left, the industrial computer will increase the sound pressure of the right support module and reduce the sound pressure of the left support module, thereby correcting the position of the mover 100. This precise dynamic adjustment mechanism makes the position control of the mover 100 more precise and flexible. By adjusting the supporting force in real time, the mover 100 always remains in the predetermined position during the transmission process, reducing the offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring high-quality completion of the lithography process.

[0042] Furthermore, in some possible implementations, the mover 100 includes graphene that can generate a photoelectric effect under illumination of a light source.

[0043] Specifically, graphene is a material with excellent photoelectric properties. It can produce a photoelectric effect under the irradiation of strong ion light, eject electrons, and thus generate light pressure. This efficient light pressure generation mechanism ensures that the mover 100 can respond quickly under the irradiation of the light source and generate sufficient light pressure to achieve suspension and movement. The efficient photoelectric effect of graphene improves the response speed and stability of the system and ensures the smoothness and uniformity of the mover 100 during the transmission process. Graphene not only has excellent photoelectric properties, but also has the characteristics of light weight and high strength. The mover 100 uses graphene material, which can reduce the weight of the mover 100 while ensuring strength. The lightweight and high-strength mover 100 material reduces the inertia of the mover 100 and improves the dynamic response speed of the system. The mover 100 can accelerate and decelerate faster during the transmission process, which improves the transmission efficiency. At the same time, the high strength of graphene ensures the structural stability of the mover 100 during high-precision transmission, reduces the offset and jitter caused by material deformation, and further improves the positioning accuracy and transmission efficiency of the lithography machine. Graphene has excellent electrical conductivity and thermal stability, and can maintain stable performance in high current and high temperature environments. Excellent electrical conductivity ensures that the mover 100 can efficiently eject electrons and generate stable light pressure during the photoelectric effect. Thermal stability ensures that the mover 100 will not be thermally deformed or degraded under the irradiation of high-energy light sources, thereby improving the reliability and stability of the system. This material property enables the mover 100 to maintain high performance during long-term operation, reduces the frequency of maintenance and replacement, and reduces operating costs. The use of graphene materials not only improves the performance of the system, but also has the characteristics of environmental friendliness and low noise. Graphene does not produce harmful substances during the photoelectric effect process, and produces almost no noise during operation. This environmentally friendly and low-noise design not only improves the comfort of the working environment, but also reduces interference with surrounding equipment and personnel. Especially in precision lithography workshops, a low-noise and pollution-free environment helps to improve overall production efficiency and equipment stability.

[0044] Further, in some possible implementations, the transmission mechanism further includes a light source reflector 400 distributed on both sides of the mover 100 in the left and right directions and arranged along the transmission path of the transmission mechanism; preferably, the light source reflector is glass; The support unit includes a plurality of second support units 300 distributed on both sides of the mover 100 in the left and right directions and arranged along the transmission path of the transmission mechanism; The second support unit 300 can emit composite light at an inclined angle to the light source reflector 400 , and the inclined light beam reflected by the light source reflector 400 can act on the surface of the mover 100 at an inclined angle to drive the mover 100 to move along the transmission path of the transmission mechanism.

[0045] Specifically, the light source reflector 400 is distributed on both sides of the mover 100 in the left and right directions and arranged along the transmission path of the transmission mechanism. The second support unit 300 can emit a composite light to the light source reflector 400 at an inclined angle, and the inclined light beam reflected by the light source reflector 400 can act on the surface of the mover 100 at an inclined angle to drive the mover 100 to move along the transmission path of the transmission mechanism. This design enhances the driving effect of light pressure by the composite light and reflected light beam emitted at an inclined angle. The light pressure generated by the inclined light beam on the surface of the mover 100 can not only drive the mover 100 to move, but also achieve more refined control by adjusting the angle and intensity of the light beam. This enhanced light pressure driving mechanism improves the moving speed and accuracy of the mover 100 and ensures the smoothness and uniformity of the transmission process. By adjusting the inclination angle and intensity of the composite light emitted by the second support unit 300, the force of the light beam reflected by the light source reflector 400 on the mover 100 can be accurately controlled. This precise control mechanism makes the movement of the mover 100 more flexible and precise. This precise light pressure control mechanism not only improves the positioning accuracy of the mover 100, but also ensures the stability and reliability of the transmission process. By adjusting the angle and intensity of the light beam, the offset of the mover 100 can be corrected in real time to ensure that the mover 100 always remains in the predetermined position on the transmission path. This mechanism is particularly suitable for high-precision lithography processes, ensuring the high-quality completion of the lithography process. The combination of the light source reflector 400 and the second support unit 300 provides a driving mechanism with high stability and reliability. The light source reflector 400 can evenly reflect the light beam to ensure that each position of the mover 100 on the transmission path is subjected to uniform light pressure. The multi-point arrangement of the second support unit 300 further improves the redundancy of the system. This high stability and reliability driving mechanism ensures the long-term stable operation of the system. Even if some of the second support units 300 fail, the other support units can still continue to provide light pressure to ensure the stable transmission of the mover 100. This design reduces the downtime caused by drive failure and improves the availability and production efficiency of the equipment. By precisely controlling the inclination angle and intensity of the composite light emitted by the second support unit 300, the system only generates the required light pressure when necessary, avoiding unnecessary energy waste. This optimized energy consumption management mechanism ensures efficient operation of the system. By precisely adjusting the angle and intensity of the beam, the system consumes energy only when necessary, reducing energy waste and improving energy utilization efficiency. This not only reduces operating costs, but also reduces the heat load of the equipment, further improving the stability and reliability of the system.

[0046] Further, in some possible implementations, the plurality of second support units 300 arranged along the transmission path of the transmission mechanism are provided with currents of different magnitudes according to a preset rule; The plurality of second support units 300 to which currents of different magnitudes are provided according to a preset rule can generate light pressures of different magnitudes at different positions on the side of the mover 100 to drive the mover 100 to continuously move in the positive direction or the reverse direction along the transmission path of the transmission mechanism.

[0047] In the embodiment of the present application, the multiple second support units 300 arranged along the transmission path of the transmission mechanism are provided with currents of different sizes according to a preset rule. These currents of different sizes cause the second support units 300 to generate different sizes of light pressure at different positions on the side of the mover 100, thereby driving the mover 100 to continuously move in the positive direction or the reverse direction along the transmission path of the transmission mechanism. This fine light pressure gradient control mechanism makes the movement of the mover 100 more flexible and precise. By adjusting the current of the second support units 300 at different positions, a light pressure gradient can be created, and the mover 100 moves in a predetermined direction under the action of the light pressure gradient. This mechanism not only improves the movement speed and accuracy of the mover 100, but also ensures the smoothness and uniformity of the transmission process, and is suitable for high-precision lithography processes.

[0048] In the embodiment of the present application, by adjusting the current of the second support unit 300, the positive and reverse movement of the mover 100 can be achieved. For example, if the mover 100 needs to move in the positive direction, the current of the second support unit 300 in the front can be increased, and the current of the second support unit 300 in the rear can be reduced; conversely, if the mover 100 needs to move in the reverse direction, the current of the second support unit 300 in the front can be reduced, and the current of the second support unit 300 in the rear can be increased. This two-way movement capability makes the transmission mechanism more flexible and versatile. The mover 100 can move freely on the transmission path as needed, which not only improves the flexibility of the equipment, but also reduces the downtime caused by direction switching, and improves production efficiency. This mechanism is particularly suitable for lithography processes that require frequent changes in direction, ensuring the efficient completion of the lithography process.

[0049] In the embodiment of the present application, by precisely controlling the current of the second support unit 300, the system generates the required light pressure only when necessary, thus avoiding unnecessary energy waste. This efficient energy utilization mechanism ensures the efficient operation of the system. By precisely adjusting the current, the system consumes energy only when necessary, reducing energy waste and improving energy utilization efficiency. This not only reduces operating costs, but also reduces the thermal load of the equipment, further improving the stability and reliability of the system.

[0050] In the embodiment of the present application, by creating a light pressure gradient, the position of the mover 100 on the transmission path can be precisely controlled. The industrial computer dynamically adjusts the current of the second support unit 300 according to the offset feedback from the magnetic scale, thereby adjusting the light pressure gradient to achieve precise position control of the mover 100. This precise position control mechanism enables the mover 100 to always remain in the predetermined position during the transmission process, reducing offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring high-quality completion of the lithography process.

[0051] Further, in some possible implementations, the transmission mechanism further includes an accordion cover 600, a dustproof sheet metal 700, an end cover plate 800 and a bottom plate 900 constituting its outer contour; The bellows cover 600, the dustproof sheet metal 700, the end cover plate 800 and the bottom plate 900 form a transmission mechanism with a linear guide rail.

[0052] In the embodiment of the present application, the accordion cover 600, the dustproof sheet metal 700, the end cover plate 800 and the bottom plate 900 together constitute a closed protective structure, which can effectively protect the internal transmission components, such as the mover 100, the support unit, etc., to prevent dust, impurities and external interference from entering. This protection mechanism not only improves the reliability and stability of the system, but also extends the service life of the equipment. Through the protection of the accordion cover 600 and the dustproof sheet metal 700, the transmission mechanism can operate normally in a harsh industrial environment. The accordion cover 600 can be extended and retracted as the mover 100 moves, ensuring that the mover 100 is always in a protected state during the movement. This design improves the environmental adaptability of the transmission mechanism, enabling it to work normally in an environment with a lot of dust, high humidity or chemical corrosion. The dustproof sheet metal 700 and the end cover plate 800 further enhance the protection effect and reduce the failure and maintenance costs caused by environmental factors. The combination of the accordion cover 600, the dustproof sheet metal 700, the end cover plate 800 and the bottom plate 900 provides a structure that is easy to maintain and clean. These components can be quickly disassembled and installed, making it easy to maintain and clean the internal components. This design simplifies maintenance and cleaning work, reducing maintenance time and costs. Maintenance personnel can quickly open the protective structure to inspect, clean and replace internal components, improving the maintenance efficiency and availability of the equipment. The end cover plate 800 and the base plate 900 provide a stable support structure to ensure that the linear guides and other components of the transmission mechanism remain stable during operation. The accordion cover 600 and the dustproof sheet metal 700 provide flexible protection to ensure that the mover 100 is not disturbed by the outside world during movement. This design improves the overall structural stability of the transmission mechanism and reduces failures caused by structural deformation or vibration. The stable structure not only improves the accuracy and reliability of the transmission, but also ensures the high performance of the equipment during long-term operation.

[0053] Specific, combined Figure 1-Figure 6 As shown, the bottom light source, sound source and glass are located in the middle of the bottom plate 900, and the end covers 800 are located at both ends. The dustproof sheet metal 700 is located on both sides, which are connected by screws and pins. The magnetic scale is located on both sides of the bottom light source, which are connected by screws and pins. A magnetic scale is also fixed between each bottom plate 900 light source, which is connected by screws and pins. The light sources and sound sources on both sides are fixed on the dustproof sheet metal 700 on both sides, which are connected by screws and pins. The reflector is suspended above the bottom light source and sound source, and in the middle of the light sources and sound sources on both sides. No connection, suspended. The load is on the reflector, which is connected by screws and pins.

[0054] In order to more clearly understand the working principle of the transmission mechanism in the embodiment of the present application, Figure 1-Figure 6 To explain in detail: Working principle: Ultrasonic waves are a kind of pressure waves. Ultrasonic waves generate sound waves (transmitting waves) of a specific frequency. When encountering a reflector, they will return along the original path to form reflected waves. The superposition of the transmitting wave and the reflected wave can generate standing waves. There are a series of stationary nodes on the standing waves. These nodes have stable pressure. By adjusting the ultrasonic frequency, the pressure of these nodes can be offset by the gravity of the mover 100, so that the mover 100 on the nodes can be stably suspended.

[0055] Strong ion light can also produce a certain pressure on the irradiated object, which is called light pressure. Under the action of light, the mover 100 (graphene) produces a photoelectric effect, ejecting electrons, which eventually offset the gravity of the mover 100, thereby making it suspended.

[0056] The newly developed method, the double-layer pressure of sound pressure and light pressure at the bottom counteracts the gravity of the mover 100. The above explains the load-bearing suspension problem of the mover 100, eliminates the original guide rail support, reduces friction and movement energy loss, and reduces the risk of wear caused by contact.

[0057] The following is an explanation of the deviation correction problem of the mover 100.

[0058] When the mover 100 is moving, it may deviate to the left or right because it is suspended in the air and has no guide mechanism. For example, when the magnetic scale detects that the mover 100 deviates to the left, the magnetic scale feeds back the signal to the industrial computer, and the industrial computer gives a signal. By strengthening the current of the sound source (left), the voltage continues to increase, the amplitude of the sound source signal also increases, and the volume continues to increase, so that the sound pressure on the left increases, thereby increasing the pressure of the sound source (left) on the mover 100. At the same time, the current of the sound source (right) is reduced, and the sound pressure on the right is reduced, so that the pressure of the sound source (right) on the mover 100 is reduced. Through the regulation of the sound sources on both sides and the real-time feedback of the position of the magnetic scale, the position of the mover 100 reaches a precise position, and the sound sources (left) and (right) play a role in auxiliary support and preventing deviation for the mover 100.

[0059] It is worth noting that the grating ruler position feedback mentioned here has the following mechanisms with equivalent functions: 1. Motor plus encoder, working principle: while the motor drives the load to move, the encoder also rotates, and the distance moved is fed back by the number of revolutions of the encoder. Disadvantages: the moving object needs to be in direct contact with the base plate 900, and the accuracy is ±0.002mm. If installed in this mechanism, the space is relatively large and relatively limited; 2. Distance meter, working principle: installed at both ends of the load's moving stroke, the laser scans the load surface and then returns to the distance meter, and the distance back and forth is used to calculate the displacement position. Disadvantages: The accuracy is not as good as the current grating ruler, the accuracy is ±0.05mm, while the grating ruler accuracy is ±0.000002mm, and the installation space is relatively large; From the perspective of lithography equipment, considering the issues of accuracy and space installation, the rangefinder, motor and encoder are ruled out, so a grating ruler is more appropriate.

[0060] Working principle of the reciprocating drive of mover 100: Strong ion light can also produce a certain pressure on the object it irradiates, which is called light pressure. When strong ion light passes through glass at a certain angle, refraction will occur. Strong ion light is a composite light, which is a mixture of light waves of different colors. When strong ion light irradiates the glass, the part of the light wave that enters the glass first will be slowed down, which will change the angle of the entire wave, such as Figure 4 As shown, when the light pressure generated by the first refracted red light beam reaches the mover 100 first, the mover 100 moves in the direction of the arrow. When the pressure of the red light pressure decays, the orange light can generate a pressure on the mover 100, and this cycle repeats over and over again. New light pressure is continuously generated to make it move, and in conjunction with the real-time feedback of the position by the magnetic scale, it stops at the required position.

[0061] like Figure 4 As shown, when the current at a continues to increase, the brightness of the light at point a continues to increase, so that the light pressure at a continues to increase; the current at b continues to decrease, causing the light pressure at b to continue to weaken, making the light pressure at a larger than that at b, and the larger light pressure moves in the direction of the smaller light pressure, causing it to move in the direction of the arrow.

[0062] On the contrary, if Figure 5 As shown, when the current at point b continues to increase, the illumination at point b continues to increase, causing the light pressure at point b to continue to increase; the current at point a continues to decrease, causing the light pressure at point a to continue to weaken, causing the light pressure at point b to be greater than that at point a, and the light pressure with greater pressure moves in the direction of the smaller light pressure, moving in the direction of the arrow, so that the actuator 100 can move back and forth.

[0063] Furthermore, the second aspect of the embodiment of the present application also provides a lithography machine, which includes the transmission mechanism provided in the first aspect of the embodiment of the present application.

[0064] The lithography machine provided in the second aspect of the embodiment of the present application uses the transmission mechanism provided in the first aspect of the embodiment, and the transmission system of the lithography machine can realize contactless and high-precision movement control of the mover 100. In particular, the suspension mechanism of light pressure and sound pressure, as well as the high-precision position feedback and control of the magnetic scale and the industrial computer are used to ensure the position accuracy of the mover 100 during the transmission process. This high-precision transmission mechanism directly improves the alignment accuracy of the lithography machine, reduces the pattern offset caused by mechanical friction and vibration, thereby improving the resolution and consistency of the lithography pattern, and is suitable for manufacturing smaller size, higher density integrated circuits and other micro-nano structures. The modular design, multi-point support and real-time feedback control mechanism of the transmission mechanism enable the lithography machine to maintain a high degree of stability during operation. Even under long-term operation or high-frequency operation, stable performance can be maintained. The enhanced stability of the system means that the lithography machine can maintain high performance under a wider range of process conditions, reduce production interruptions caused by equipment failures, and improve production efficiency and equipment availability. The optimized design of the transmission mechanism, such as the elimination of traditional guide rails, the use of graphene movers, and precise light pressure and sound pressure control, not only improves transmission efficiency, but also reduces energy consumption and maintenance requirements. Reduced energy consumption and maintenance costs directly reduce the operating costs of the lithography machine. In addition, due to the improved system stability, the additional maintenance costs caused by equipment failure are reduced, further reducing the total cost of ownership (TCO). The efficient dynamic adjustment and bidirectional movement capability of the transmission mechanism enable the lithography machine to complete the transmission and alignment of the pattern faster, reducing the processing time of each wafer. The improved production efficiency means that more wafers can be processed in the same time, thereby increasing the production capacity of the lithography machine and meeting the needs of high-volume production. The flexible design of the transmission mechanism, such as adjustable light pressure and sound pressure, bidirectional movement capability, etc., enables the lithography machine to adapt to a variety of different lithography process requirements, including wafers of different sizes, different pattern densities and complex alignment requirements. This adaptability makes the lithography machine not only suitable for current processes, but also adapt to the needs of future technological development, extending the service life of the equipment and improving the return on investment.

[0065] In summary, these technical effects not only improve the performance and reliability of the lithography machine, but also ensure its efficient operation in high-precision lithography processes, and are suitable for modern semiconductor manufacturing and other high-precision micro-nano processing fields.

[0066] In the above-mentioned embodiments of the present application, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments. The steps shown in the relevant flow chart can be executed in a computer system such as a set of computer executable instructions, and although the logical order is shown in the flow chart, in some cases, the steps shown or described can be executed in an order different from that here. In other words, the order of steps described in the foregoing embodiments is only an example, and it is also within the scope of protection of the embodiments of the present application to reasonably adjust the order of steps based on the content of the embodiments of the present application.

[0067] The sequence of serial numbers or introduction of the embodiments of the present application is for description only and does not represent the superiority or inferiority of the embodiments.

[0068] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0069] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A transmission mechanism, characterized in that: The invention comprises a support unit arranged along a transmission path of the transmission mechanism, and a mover (100) capable of moving along the transmission path of the transmission mechanism, the support unit comprising a first support unit (200) capable of emitting sound waves and a second support unit (300) capable of emitting light waves, the first support unit (200) being capable of cooperating with the mover (100) moving along the transmission path and generating sound pressure for supporting the mover (100), and the second support unit (300) being capable of cooperating with the mover (100) moving along the transmission path and generating light pressure for supporting the mover (100); in The first support unit (200) is used to cooperate with the bottom of the mover (100) and generate sound pressure to support the bottom of the mover (100), and / or the first support unit (200) is used to cooperate with the side of the mover (100) and generate sound pressure to support the side of the mover (100); The second support unit (300) is used to cooperate with the bottom of the mover (100) and generate light pressure to support the bottom of the mover (100), and / or the second support unit (300) is used to cooperate with the side of the mover (100) and generate light pressure to support the side of the mover (100).

2. The transmission mechanism according to claim 1, characterized in that: The side portion of the mover (100) comprises a left side and a right side of the mover (100), wherein at least one support unit for supporting the bottom of the mover (100) is provided on the transmission path of the transmission mechanism, and at least one support unit for supporting the left and right sides of the mover (100) is provided on the transmission path of the transmission mechanism; The support unit for supporting the bottom of the mover (100) and the support unit for supporting the left and right sides of the mover (100) act together on the mover (100), so that the mover (100) can move on the transmission path of the transmission mechanism in a suspended manner.

3. The transmission mechanism according to claim 2, characterized in that: The first support unit (200) and the second support unit (300) constitute a support module, the support module comprising a bottom support module for supporting the bottom of the mover (100), a left support module for supporting the left side of the mover (100), and a support module for supporting the right side of the mover (100); The bottom support module is used to cooperate with the bottom of the mover (100) and generate sound pressure and light pressure for supporting the bottom of the mover (100), the left side support module is used to cooperate with the left side of the mover (100) and generate sound pressure and light pressure for supporting the left side of the mover (100), and the right side support module is used to cooperate with the right side of the mover (100) and generate sound pressure and light pressure for supporting the right side of the mover (100).

4. The transmission mechanism according to claim 3, characterized in that: The bottom support modules are provided in multiple groups, and the multiple groups of bottom support modules are evenly distributed along the transmission path of the transmission mechanism; The left side support modules are provided in multiple groups, and the multiple groups of left side support modules are evenly distributed along the transmission path of the transmission mechanism; The right side support modules are provided in a plurality of groups, and the plurality of groups of the right side support modules are evenly distributed along the transmission path of the transmission mechanism.

5. The transmission mechanism according to claim 4, characterized in that: The transmission mechanism also includes: A detection device (500), the detection device (500) being used to detect the offset of the mover (100) in the left-right direction when moving along the transmission path; A control device, the control device being used to adjust the support force of the left support module on the left side of the mover (100) and / or adjust the support force of the right support module on the right side of the mover (100) according to the offset of the mover (100) in the left and right directions when the mover (100) moves.

6. The transmission mechanism according to claim 5, characterized in that: The support module arranged in the left-right direction of the mover (100) comprises the first support unit (200) for generating ultrasonic waves, the first support unit (200) being connected to a power source, wherein when the power source supplies current to the first support unit (200), the first support unit (200) can cooperate with the bottom of the mover (100) and generate sound pressure for supporting the bottom of the mover (100); By changing the current value input by the power supply to the first support unit (200), the support force of the first support unit (200) on the mover (100) in the left and right directions can be adjusted to correct the deviation of the mover (100) in the left and right directions.

7. The transmission mechanism according to claim 5, characterized in that: The detection device (500) comprises magnetic scales distributed on both sides of the mover (100) in the left and right directions and arranged along the transmission path of the transmission mechanism, and the control device comprises an industrial computer electrically connected to the magnetic scales.

8. The transmission mechanism according to any one of claims 1 to 7, characterized in that: The mover (100) comprises graphene capable of generating a photoelectric effect under illumination of a light source.

9. The transmission mechanism according to any one of claims 1 to 7, characterized in that: The transmission mechanism further comprises light source reflectors (400) distributed on both sides of the mover (100) in the left-right direction and arranged along a transmission path of the transmission mechanism; The support unit comprises a plurality of second support units (300) distributed on both sides of the mover (100) in the left-right direction and arranged along the transmission path of the transmission mechanism; The second support unit (300) is capable of emitting composite light at an inclined angle toward the light source reflector (400), and the inclined light beam reflected by the light source reflector (400) is capable of acting on the surface of the mover (100) at an inclined angle, so as to drive the mover (100) to move along the transmission path of the transmission mechanism.

10. The transmission mechanism according to claim 9, characterized in that: A plurality of the second support units (300) arranged along the transmission path of the transmission mechanism are provided with currents of different magnitudes according to a preset rule; The plurality of second support units (300) to which currents of different magnitudes are provided according to a preset rule can generate light pressures of different magnitudes at different positions on the side of the mover (100), so as to drive the mover (100) to continuously move in a positive direction or a reverse direction along a transmission path of the transmission mechanism.

11. The transmission mechanism according to any one of claims 1 to 7, characterized in that: The transmission mechanism further comprises an accordion cover (600), a dustproof sheet metal (700), an end cover plate (800) and a bottom plate (900) constituting its outer contour; The accordion cover (600), the dustproof sheet metal (700), the end cover plate (800) and the bottom plate (900) are enclosed to form a transmission mechanism having a linear guide rail.

12. A photolithography machine, characterized in that: The invention comprises the transmission mechanism according to any one of claims 1 to 11.

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