A wafer box with protective limiting device

Abstract

The present invention relates to the field of semiconductor carrier technology, and in particular to a wafer box with a protective limiting device, which includes a bottom plate, a wafer storage box, a box cover, and a limiting assembly. The limiting assembly includes a limiting seat, a top assembly, a rotating plate, a limiting frame, and a rotating wheel. The limiting seat includes a connecting cross bar, a connecting arm, and a top blocking plate. The top assembly includes a connecting portion, a top protrusion, a connecting rod, a tensile sheet, and a reinforcing rib. Compared with the prior art, the present invention is provided with the wafer storage box for inserting wafers, and the limiting assembly is provided to top the wafers, thereby effectively preventing the wafers from being damaged. At the same time, by providing the top assembly, the top action has a protective limit, thereby preventing the rigid top from damaging the wafers. By providing the wafer storage box for loading 6-inch wafers, the cooperation of the fixing portion and the fixing assembly enables 6-inch wafers to be transported on an 8-inch wafer production line.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor carriers, and in particular to a wafer box with a protective limiting device. Background Art

[0002] Wafer box, also known as wafer carrier, is a type of semiconductor carrier. It is a precision carrier designed for semiconductor wafers and plays a vital role in semiconductor production. It is mainly used to place and transport wafers, which simplifies the transportation process of wafers, reduces the risk of wafer contamination, and ensures the smooth flow of wafers between different production links.

[0003] In the prior art, wafers are inserted into placement slots of wafer boxes for transportation, which may cause the wafers to vibrate and shift during transportation, resulting in the possibility of damage to the stored wafers.

[0004] Moreover, with the rapid development of semiconductor technology, the specifications of wafers are increasing, and wafers of different specifications also lead to different production processes. One specification of wafer corresponds to a wafer transport box of one size. For example, the structure and principle of the 6-inch production line with the carrier's automation equipment are different from those of the 8-inch automation equipment. For example, when a new production line is built, in order to reduce investment during the initial verification of the tape-out, it is generally verified on a 6-inch production line. When the technology is mature, it is later switched to mass production on an 8-inch production line. In this way, the investment in verification is greatly reduced, and the output can be rapidly increased during production. However, since the automation equipment used in production is a precision high-tech product with huge value, it will cost a lot to make two sets of equipment, so a wafer box that can transport 6-inch wafers on 8-inch automation equipment is needed. Summary of the invention

[0005] In view of this, the present invention provides a wafer box with a protective limiting device to solve the above technical problems.

[0006] A wafer box with a protective limiting device comprises a bottom plate, a wafer storage box arranged on the bottom plate, a box cover snapped on the bottom plate, and a limiting assembly arranged in the box cover. The limiting assembly comprises a limiting seat fixed on the box cover, a top-stop assembly arranged on the limiting seat, two rotating plates arranged on the limiting seat, a limiting frame connected to the rotating plate, and a rotating wheel arranged on the limiting frame. The limiting seat comprises a connecting cross bar, two connecting arms arranged perpendicular to the connecting cross bar, and four groups of top-stopping plates arranged on the connecting arms. The two ends of the connecting cross bar are fixed to the top of the box cover by fasteners, and the connecting cross bar is parallel to the top surface of the box cover. The connecting arm is arranged perpendicular to the connecting cross bar and extends toward the top surface away from the box cover, and the connecting arm is parallel to the side wall of the box cover. The abutting assembly comprises two connecting parts respectively arranged on the connecting arms, two abutting protrusions connected to the connecting parts, a connecting rod arranged between the two abutting protrusions, two stretching sheets arranged on both sides of the connecting rod, and multiple reinforcing ribs arranged on the connecting parts and the connecting rod. The connecting part is arranged perpendicular to the connecting arm, and the two connecting parts extend relative to each other. Each of the abutting protrusions is a U-shaped structure, and the two ends of each of the abutting protrusions are respectively connected to the connecting part and the connecting rod, and the top extends toward the side wall of the box cover, and in the absence of external force, the vertex of the abutting protrusion vertically abuts on the side wall of the box cover. Each of the stretching sheets is a sheet film-like structure extending parallel to the abutting direction of the abutting protrusion. One end of the stretching sheet is connected to the connecting rod, and the other end is vertically connected to the connecting arm. In the direction perpendicular to the stretching sheet and the abutting protrusion, the free edges of the two stretching sheets form an arc, and the curvature of the arc relative to the abutting protrusion is negative. The stretching sheet is located on the side of the abutting assembly away from the side wall of the box cover, and is also filled inside the U-shaped structure of the abutting protrusion. The reinforcing rib is a strip-shaped protrusion, which is arranged on the other side of the abutting assembly close to the side wall of the box cover. The strength of the stretching sheet is less than the structural strength of the wafer.

[0007] Furthermore, the bottom plate is a rectangular plate-shaped structure and includes a fixing component arranged on the bottom plate and a positioning component arranged on the bottom plate. The fixing component and the positioning component are both arranged on the plate surface of the bottom plate which is buckled by the box cover.

[0008] Furthermore, the wafer storage box is a container for placing multiple wafers, which includes a plurality of storage slots arranged on the inner wall of the wafer storage box, and a fixing portion arranged at the bottom of the wafer storage box. The wafer storage box is open on one side, the storage slots are arranged on the inner wall of the wafer storage box, and the fixing portion is arranged on one side of the storage slots close to the bottom plate.

[0009] Furthermore, the box cover is a rectangular box with an opening on one side, and the interior is a receiving cavity for placing the wafer storage box, and the opening of the box cover is buckled on the bottom plate.

[0010] Furthermore, a plurality of buffer abutting members are arranged on the box cover, and the buffer abutting members are located on the inner wall of the box cover and at the top of the box cover away from the bottom plate.

[0011] Furthermore, each of the buffer abutment members includes a base connected to the box cover, two connecting plates arranged on the base, a spring plate connected to the two connecting plates, two deformation grooves respectively located at the connection between the spring plate and the connecting plate, and an abutment portion arranged on the base.

[0012] Furthermore, the two connecting plates and the two spring sheets form a diamond-shaped structure, the two deformation grooves are respectively located at the connection between the connecting plates and the spring sheets, the two notches are arranged facing each other, and the abutting portion is a U-shaped structure, which is arranged on the base and protrudes toward the spring sheets.

[0013] Furthermore, the two rotating plates are spaced apart and arranged in parallel between the two connecting arms, each of the rotating plates includes a rotating shaft inserted between the insertion holes of the two connecting arms, a rotating fin arranged on the rotating shaft, and a connecting rod arranged on the rotating fin, the two rotating shafts are spaced apart and arranged in parallel between the two connecting arms, the rotating fin is integrally formed with the rotating shaft, and the extending direction is the radial direction of the rotating shaft, and the connecting rod is located at the center of the rotating fin.

[0014] Furthermore, a supporting column is arranged on the limiting frame, and the supporting column is arranged toward the supporting assembly and can be supported on the connecting rod.

[0015] Furthermore, the rotating wheel is arranged at the bottom of the limiting frame away from the buffering and abutting member, and the axial direction of the rotating wheel is consistent with the axial direction of the rotating shaft.

[0016] Compared with the prior art, the wafer box with protective limiting device provided by the present invention is used to insert wafers by setting the fixing component and the wafer storage box, and the limiting component is set to push the wafers, which can effectively prevent the damage to the wafers due to vibration or collision during transportation. At the same time, by setting the pushing component, the pushing effect of the limiting component on the wafer has a protection limit. When the force of the wafer storage box on the limiting component exceeds the strength of the tensile sheet, the limiting component will deform, thereby preventing the rigid push from damaging the wafer, which can effectively protect the wafer from being damaged during transportation. At the same time, by setting the wafer storage box that can be used to load 6-inch wafers, the wafer storage box is fixed by the cooperation of the fixing part and the fixing component. The equipment interface, opening and closing action, and size specifications of the bottom plate and the box cover are matched with the parameters of the 8-inch wafer production line, so that 6-inch wafers can be transported on the 8-inch wafer production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of a wafer box with a protective limiting device provided by the present invention.

[0018] Figure 2 for Figure 1 A schematic structural diagram of a bottom plate of a wafer box with a protective limiting device.

[0019] Figure 3 for Figure 1 A schematic diagram of a wafer box with a protective limiting device having a base plate and a wafer storage box.

[0020] Figure 4 for Figure 1 Schematic diagram of the cross-sectional structure of a wafer box with a protective limiting device in a vertical section.

[0021] Figure 5 for Figure 4 An enlarged schematic diagram of a wafer box with a protective limiter at point A.

[0022] Figure 6 for Figure 1 A schematic structural diagram of a limiting component of a wafer box with a protective limiting device.

[0023] Figure 7 for Figure 1 A schematic structural diagram of a limiting component of a wafer box with a protective limiting device from another perspective.

[0024] Figure 8 for Figure 1 A partial structural schematic diagram of a limiting component of a wafer box with a protective limiting device.

[0025] Explanation of the reference numerals in the accompanying drawings: base plate 10, fixing assembly 11, positioning assembly 12, wafer storage box 20, storage slot 21, fixing portion 22, box cover 30, buffer abutment 31, base 311, connecting plate 312, spring sheet 313, deformation groove 314, abutment portion 315, limiting assembly 40, limiting seat 41, connecting cross bar 411, connecting arm 412, abutment baffle 413, abutment assembly 42, connecting portion 421, abutment protrusion 422, connecting rod 423, stretching sheet 424, reinforcing rib 425, rotating sheet 43, rotating shaft 431, rotating fin 432, connecting rod 433, limiting frame 44, abutment column 441, rotating wheel 45. DETAILED DESCRIPTION

[0026] The specific embodiments of the present invention are further described in detail below. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the protection scope of the present invention.

[0027] like Figures 1 to 8 As shown, it is a schematic diagram of the structure of the wafer box with a protective limiting device provided by the present invention. The wafer box with a protective limiting device includes a base plate 10, a wafer storage box 20 arranged on the base plate 10, a box cover 30 buckled on the base plate 10, and a limiting component 40 arranged in the box cover 30. It can be imagined that the wafer box with a protective limiting device also includes some other functional modules such as a locking component, a lifting handle, etc., which are well known to those skilled in the art and will not be described one by one here.

[0028] The bottom plate 10 may be a rectangular plate-shaped structure, and includes a fixing component 11 disposed on the bottom plate 10, and a positioning component 12 disposed on the bottom plate 10. In addition, a plurality of other components are disposed on the bottom plate 10, including but not limited to a locking component, a check valve, and a guide component, etc., which are all common technologies used in the field of mechanical equipment, and therefore will not be described in detail one by one here.

[0029] The fixing assembly 11 and the positioning assembly 12 are both arranged on the plate surface of the bottom plate 10 which is engaged by the box cover 30. For example, in one embodiment of the present application, in order to enable the operation of 6-inch wafers on an 8-inch production line, the bottom plate 10 is a structure using an 8-inch wafer box, so that its corresponding equipment interface and opening and closing actions can be docked with the 8-inch wafer production line, and the position and size of the fixing assembly 11 and the positioning assembly 12 are used to carry 6-inch wafers, so that the wafer box can enable 6-inch wafers to be used on an 8-inch production line.

[0030] The wafer storage box 20 can be a container for placing multiple wafers, which includes a plurality of storage slots 21 arranged on the inner wall of the wafer storage box 20 and a fixing portion 22 arranged at the bottom of the wafer storage box 20.

[0031] The wafer storage box 20 is open on one side to facilitate the insertion of wafers therein. The storage slot 21 is arranged on the inner wall of the wafer storage box 20, and the extension direction of the slot is horizontally arranged for the insertion of wafers. The fixing portion 22 is arranged on the side of the storage slot 21 close to the base plate 10, and is used to cooperate with the fixing assembly 11, so as to clamp the wafer storage box 20 and limit and fix it, so that during transportation, the wafer storage box 20 will not move relative to the base plate 10. In addition, the wafer storage box 20 is also provided with an anti-foolproof component that cooperates with the positioning assembly 12, which is a prior art widely used in the field of mechanical matching and is something that can be thought of by those skilled in the art, so it is only briefly described here, and is not illustrated one by one in the drawings of the specification.

[0032] Accordingly, in order to meet the requirement of producing 6-inch wafers on an 8-inch production line, the wafer storage box 20 is used to load 6-inch wafers, that is, the specification of the storage slot 21 is for inserting 6-inch wafers.

[0033] The box cover 30 is a rectangular box with a single-side opening, and the interior is a receiving cavity for placing the wafer storage box 20. The opening of the box cover 30 is snapped on the bottom plate 10 to form a closed rectangular box, so that the wafers can be placed in the wafer storage box 20 and will not be contaminated by dust or other substances during transportation. Accordingly, a circle of sealing gaskets is also provided on the edge where the box cover 30 contacts the bottom plate 10, or on the bottom plate 10, to ensure the sealing performance of the interior formed by the box cover 30 and the bottom plate 10 after the two are in contact.

[0034] The box cover 30 is provided with a plurality of buffering and abutting members 31, which are located on the inner wall of the box cover 30 and at the top of the box cover 30 away from the bottom plate 10, so as to abut the wafer storage box 20 when the box cover 30 is buckled on the bottom plate 10. The buffering and abutting members 31 can be an integrally formed plastic member with a certain elasticity, so as to play a buffering role during transportation and avoid the possibility of damage to the wafer due to vibration during rigid connection.

[0035] Each of the buffer abutment members 31 includes a base 311 connected to the box cover 30, two connecting plates 312 arranged on the base 311, an elastic sheet 313 connected to the two connecting plates 312, two deformation grooves 314 respectively located at the connection between the elastic sheet 313 and the connecting plate 312, and an abutment portion 315 arranged on the base 311.

[0036] The base 311 is fixed on the box cover 30. Accordingly, the box cover 30 is provided with a fixing seat connected to the base 311 and reinforcing ribs arranged on the fixing seat. The corresponding structures are common technologies in the industrial field, so they are only briefly described here.

[0037] The two connecting pieces 312 and the two elastic pieces 313 form a diamond-shaped structure, so that when the elastic pieces 313 are subjected to external force, they will deform toward the base 311 to play a buffering and resisting role.

[0038] The two deformation grooves 314 are respectively located at the connection between the connecting piece 312 and the spring sheet 313. The two grooves are arranged opposite to each other so that the spring sheet 313 is elastic relative to the connecting piece 312. When it is squeezed by external force and approaches the abutting portion 315, it will generate elastic reaction force due to deformation.

[0039] The abutting portion 315 is a U-shaped structure, which is disposed on the base 311 and protrudes toward the elastic sheet 313 to abut against the elastic sheet 313 when it is deformed, thereby preventing the elastic sheet 313 from deforming too much and causing the wafer storage box 20 to be separated from the fixing assembly 11. Accordingly, the distance between the abutting portion 315 and the elastic sheet 313 can be set according to the actual parameters of the fixing assembly 11, which is not limited here.

[0040] In addition, a lifting portion is provided on the top of the box cover 30 away from the bottom plate 10, and two lifting handles are provided on both sides to facilitate the clamping and holding by a crane or a manipulator, which are common technologies on wafer boxes and should be content that can be thought of by those skilled in the art, so only a brief description is given here, and they are not marked one by one in the drawings of the specification. The size, height and other parameters of the box cover 30 and its lifting portion should meet the transportation requirements of the 8-inch wafer production line, that is, they can be transported with the crane system of the 8-inch wafer production line.

[0041] The limiting assembly 40 is fixedly disposed inside the box cover 30, and includes a limiting seat 41 fixed on the box cover 30, a resisting assembly 42 disposed on the limiting seat 41, two rotating pieces 43 disposed on the limiting seat 41, a limiting frame 44 connected to the rotating piece 43, and a rotating wheel 45 disposed on the limiting frame 44.

[0042] The limiting seat 41 includes a connecting crossbar 411, two connecting arms 412 arranged perpendicular to the connecting crossbar 411, and four groups of stoppers 413 arranged on the connecting arms 412. The two ends of the connecting crossbar 411 are fixed to the box cover 30 by fasteners such as screws, specifically fixed to the top of the box cover 30, so that the connecting crossbar 411 is parallel to the top surface of the box cover 30. The connecting arm 412 is arranged perpendicular to the connecting crossbar 411 and extends toward the opening of the box cover 30, and the connecting arm 412 is parallel to the side wall of the box cover 30, so as to form a frame structure for setting the rotating piece 43 and the limiting frame 44 together with the connecting crossbar 411. The stopper 413 is arranged on the connecting arm 412, and is used to limit the rotating piece 43 and limit its rotation angle, which will be described in detail below in conjunction with the limiting frame 44.

[0043] The abutting assembly 42 includes two connecting parts 421 respectively arranged on the connecting arm 412, two abutting protrusions 422 connected to the connecting parts 421, a connecting rod 423 arranged between the two abutting protrusions 422, two stretching sheets 424 arranged on both sides of the connecting rod 423, and multiple reinforcing ribs 425 arranged on the connecting parts 421 and the connecting rod 423. All structures on the abutting assembly 42 and the limiting seat 41 are integrally injection molded to ensure the integrity of the structure and the uniformity of the force.

[0044] The connecting portion 421 is arranged perpendicular to the connecting arm 412, and the two connecting portions 421 extend relative to each other, so as to serve as a base for connecting the abutting assembly 42 with the connecting arm 412. An inclined rib plate and a reinforcing plate arranged perpendicular to the rib plate are also arranged at the connection between the connecting portion 421 and the connecting arm 412, so as to strengthen the structure and prevent the connection between the two from being easily deformed.

[0045] Each of the abutting protrusions 422 is a U-shaped structure, and the two ends of each of the abutting protrusions 422 are respectively connected to the connecting portion 421 and the connecting rod 423, and the top extends toward the side wall of the box cover 30. In the absence of external force, the top of the abutting protrusion 422 vertically abuts against the side wall of the box cover 30, thereby avoiding the possibility that the free end of the connecting arm 412 is deformed toward the side wall of the box cover 30 due to force, thereby maintaining the limit frame 44 against the wafer inserted in the wafer storage box 20.

[0046] The connecting rod 423 is used to connect the two abutting protrusions 422 and can abut the corresponding structure of the limiting frame 44 , which will be described in detail below in conjunction with the limiting frame 44 .

[0047] Each of the stretching sheets 424 is a sheet-like structure extending parallel to the abutting direction of the abutting protrusion 422. One end of the stretching sheet 424 is connected to the connecting rod 423, and the other end is vertically connected to the connecting arm 412. In the direction perpendicular to the stretching sheet 424 and the abutting protrusion 422, the free edges of the two stretching sheets 424 form an arc, and the curvature of the arc relative to the abutting protrusion 422 is negative. The stretching sheet 424 is located on the side of the abutting component 42 away from the side wall of the box cover 30, and is also filled in the U-shaped structure of the abutting protrusion 422. Therefore, when the limiting component 40 is subjected to external force, the abutting top end of the abutting component 42 is subjected to force and the two free ends of the abutting protrusion 422 of the U-shaped structure are unfolded, that is, deformed toward the side wall of the box cover 30. The stretching sheet 424 will also unfold and deform when unfolding, thereby providing sufficient elastic buffering for the abutting component 42 to prevent the wafers stored in the wafer storage box 20 from being damaged by too much impact force when the wafer storage box 20 is impacted. At the same time, the stretching sheet 424 is arc-shaped, like a bow, and it can quickly recover after being unfolded, so that the abutting component 42 can immediately abut on the wafer, that is, the wafer is abutted between the abutting top of the abutting component 42 and the end of the storage slot 21 of the wafer storage box 20, so that the abutting component 42 has both buffering ability and rapid abutment ability, thereby forming a flexible abutment rather than a rigid abutment, thereby preventing damage to the wafer as much as possible.

[0048] The reinforcing rib 425 is a strip-shaped protrusion, which is arranged on the other side of the abutting assembly 42 close to the side wall of the box cover 30 to strengthen the structural strength of the connecting part 421 and the connecting rod 423 to prevent the connecting part 421 and the connecting rod 423 from being deformed too much when impacted, causing the wafers stored in the wafer box to move significantly, thereby causing damage due to impact.

[0049] The two rotating pieces 43 are spaced apart and arranged in parallel between the two connecting arms 412, and an insertion hole is arranged at the connection of the connecting arms 412, so that the rotating piece 43 can rotate on the limiting seat 41. Each rotating piece 43 includes a rotating shaft 431 inserted between the insertion holes of the two connecting arms 412, a rotating fin 432 arranged on the rotating shaft 431, and a connecting rod 433 arranged on the rotating fin 432.

[0050] The two rotating shafts 431 are arranged between the two connecting arms 412 in a spaced and parallel manner. Accordingly, the connecting arm 412 is provided with a socket for inserting the rotating shaft 431, and the abutting stopper 413 is arranged at the edge of the socket. The rotating fin 432 is integrally formed with the rotating shaft 431, and the extending direction is the radial direction of the rotating shaft 431. The abutting stopper 413 is used to limit the rotation angle of the rotating fin 432. The connecting rod 433 is located at the center of the rotating fin 432, and is used to connect the limiting frame 44.

[0051] The limiting frame 44 is connected to the two rotating pieces 43. When the wafer storage box 20 is placed on the fixing assembly 11, the limiting frame 44 can abut against the wafer inserted in the wafer storage box 20. The limiting frame 44 is provided with a abutting column 441, which is arranged toward the abutting assembly 42 and can abut against the connecting rod 423, so that when the box cover 30 is lifted, the limiting frame 44 drives the rotating piece 43 to rotate downward due to its own weight, and the rotating piece 43 hits the abutting stopper 413, thereby reducing the possibility of damage to the abutting stopper 413 due to the impact force.

[0052] The rotating wheel 45 is arranged at the bottom of the limit frame 44 away from the buffer abutment 31, and the axial direction of the rotating wheel 45 is consistent with the axial direction of the rotating shaft 431, so that when the box cover 30 is covered on the base plate 10, the rotating wheel 45 will come into contact with the base plate 10 and make the limit frame 44 move upward, and the limit frame 44 drives the rotating plate 43 to rotate, so that the limit frame 44 approaches the wafer storage box 20 and abuts against the wafer inserted in the wafer storage box 20, so that the wafer is confined in the storage slot 21 without displacement and collision due to movement and transportation.

[0053] It is conceivable that due to different modes of transportation, such as using an overhead crane to transport a wafer box, the wafer box will inevitably shake, so the wafer storage box 20 will impact the limit assembly 40, generating a resisting force. The use of a completely rigid resist can ensure that the wafer storage box 20 will not be displaced, but there is also a risk of damaging the wafer. Therefore, the limit assembly 40 must have a certain buffering elasticity. While the limit assembly 40 is not easily deformed by providing the resisting protrusion 422, the strength of the stretch sheet 424 is less than the structural strength of the wafer. Therefore, when the external force is capable of destroying the wafer, the stretch sheet 424 can no longer withstand the external force, and the free end of the limit assembly 40 deforms toward the side wall of the box cover 30, thereby protecting the wafer.

[0054] In addition, the moving distance of the limiting frame 44 is enough to support the wafer storage box 20 loaded with 6-inch wafers, thereby realizing the transportation of 6-inch wafers on an 8-inch wafer production line.

[0055] Compared with the prior art, the wafer box with protective limiting device provided by the present invention is used to insert wafers by setting the fixing component 11 and the wafer storage box 20, and by setting the limiting component 40 to push against the wafers, it can effectively prevent the wafers from being damaged due to vibration or collision during transportation. At the same time, by setting the pushing component 42, the pushing effect of the limiting component 40 on the wafer has a protective limit. When the force of the wafer storage box 20 on the limiting component 40 exceeds the strength of the stretching plate 424, the limiting component 40 will be deformed, thereby preventing the rigid pushing from damaging the wafer, and can effectively protect the wafer from being damaged during transportation. At the same time, by setting up the wafer storage box 20 that can be used to load 6-inch wafers, the wafer storage box 20 is fixed through the cooperation of the fixing part 22 and the fixing component 11, and the equipment interface, opening and closing action, and size specifications of the base plate 10 and the box cover 30 are matched with the parameters of the 8-inch wafer production line, so that 6-inch wafers can be transported on the 8-inch wafer production line.

[0056] The above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modification, equivalent substitution or improvement within the spirit of the present invention is included in the scope of the claims of the present invention.

Claims

1. A wafer box with a protective limiter, characterized in that: The wafer box with a protective limiting device includes a bottom plate, a wafer storage box arranged on the bottom plate, a box cover snapped on the bottom plate, and a limiting component arranged in the box cover, wherein the limiting component includes a limiting seat fixed on the box cover, a top-up component arranged on the limiting seat, two rotating plates arranged on the limiting seat, a limiting frame connected to the rotating plate, and a rotating wheel arranged on the limiting frame, wherein the limiting seat includes a connecting cross bar, two connecting cross bars arranged perpendicular to the connecting cross bar, and a rotating wheel arranged on the limiting frame. The box cover is provided with a connecting arm, and four groups of top blocking pieces arranged on the connecting arms, the two ends of the connecting cross bar are fixed to the top of the box cover by fasteners, and the connecting cross bar is parallel to the top surface of the box cover, the connecting arm is arranged perpendicular to the connecting cross bar, and extends away from the top surface of the box cover, and the connecting arm is parallel to the side wall of the box cover, the top blocking assembly includes two connecting parts respectively arranged on the connecting arms, two top blocking protrusions connected to the connecting parts, a connecting rod arranged between the two top blocking protrusions, and two connecting rods arranged on The stretching sheets on both sides of the connecting rod, and multiple reinforcing ribs arranged on the connecting part and the connecting rod, the connecting part is arranged perpendicular to the connecting arm, and the two connecting parts extend relative to each other, each of the abutting protrusions is a U-shaped structure, and the two ends of each of the abutting protrusions are respectively connected to the connecting part and the connecting rod, and the top extends toward the side wall of the box cover, and in the absence of external force, the top of the abutting protrusion vertically abuts against the side wall of the box cover, and each of the stretching sheets is a sheet-membrane structure extending parallel to the abutting direction of the abutting protrusion, One end of the stretch sheet is connected to the connecting rod, and the other end is vertically connected to the connecting arm. In the direction perpendicular to the stretch sheet and the abutting protrusion, the free edges of the two stretch sheets form an arc, and the curvature of the arc relative to the abutting protrusion is negative. The stretch sheet is located on the side of the abutting assembly away from the side wall of the box cover, and also fills the inside of the U-shaped structure of the abutting protrusion. The reinforcing rib is a strip protrusion, which is arranged on the other side of the abutting assembly close to the side wall of the box cover. The strength of the stretch sheet is less than the structural strength of the wafer.

2. The wafer box with protective limiting device according to claim 1, characterized in that: The bottom plate is a rectangular plate-shaped structure and includes a fixing component arranged on the bottom plate and a positioning component arranged on the bottom plate. The fixing component and the positioning component are both arranged on the plate surface of the bottom plate which is buckled by the box cover.

3. The wafer box with protective limiting device according to claim 1, characterized in that: The wafer storage box is a container for placing multiple wafers, which includes multiple storage slots arranged on the inner wall of the wafer storage box, and a fixing portion arranged at the bottom of the wafer storage box. The wafer storage box is open on one side, the storage slots are arranged on the inner wall of the wafer storage box, and the fixing portion is arranged on one side of the storage slots close to the bottom plate.

4. The wafer box with protective limiting device according to claim 1, characterized in that: The box cover is a rectangular box with an opening on one side, and the interior is a receiving cavity for placing the wafer storage box. The opening of the box cover is buckled on the bottom plate.

5. The wafer box with protective limiting device according to claim 1, characterized in that: The box cover is provided with a plurality of buffer abutting members, and the buffer abutting members are located on the inner wall of the box cover and at the top of the box cover away from the bottom plate.

6. The wafer box with protective limiting device according to claim 5, characterized in that: Each of the buffer abutment members includes a base connected to the box cover, two connecting plates arranged on the base, an elastic sheet connected to the two connecting plates, two deformation grooves respectively located at the connection between the elastic sheet and the connecting plate, and an abutment portion arranged on the base.

7. The wafer box with protective limiting device according to claim 6, characterized in that: The two connecting plates and the two spring sheets form a diamond-shaped structure, the two deformation grooves are respectively located at the connection between the connecting plates and the spring sheets, the two notches are arranged facing each other, and the abutting portion is a U-shaped structure, which is arranged on the base and protrudes toward the spring sheets.

8. The wafer box with protective limiting device according to claim 5, characterized in that: The two rotating plates are spaced apart and arranged in parallel between the two connecting arms, each of the rotating plates includes a rotating shaft inserted between the insertion holes of the two connecting arms, a rotating fin arranged on the rotating shaft, and a connecting rod arranged on the rotating fin. The two rotating shafts are spaced apart and arranged in parallel between the two connecting arms, the rotating fin is integrally formed with the rotating shaft, and the extending direction is the radial direction of the rotating shaft, and the connecting rod is located at the center of the rotating fin.

9. The wafer box with protective limiting device according to claim 1, characterized in that: The limiting frame is provided with a push-up column, which is arranged toward the push-up assembly and can push against the connecting rod.

10. The wafer box with protective limiting device according to claim 8, characterized in that: The rotating wheel is arranged at the bottom of the limiting frame away from the buffering and abutting member, and the axial direction of the rotating wheel is consistent with the axial direction of the rotating shaft.

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