Electrostatic chuck processing device

Abstract

The present invention relates to the technical field of electrostatic chuck equipment, and provides an electrostatic chuck processing device, comprising an upper unit, a middle unit, and a lower unit concentrically connected to each other from top to bottom. The upper unit comprises a first disk body and a second disk body that cooperate to form a wavy first-connected gap on a horizontal plane. The gap is further provided with raised slide rails that are further close to the center of the first disk body and spaced apart to form a fixed slideway. The lower unit comprises a base with internal teeth, and the base is further provided with a base ring groove, and the base ring groove is provided with an undulating portion. The upper unit is used to control the movement trajectory of the cutting unit on it, the middle unit controls the horizontal sliding of the cutting unit, and the lower unit controls the up and down sliding of the cutting unit to achieve the gap between the electrostatic chucks. After lifting, the gap between the electrostatic chucks is expanded.

Description

Technical Field

[0001] The present invention relates to the technical field of electrostatic chuck equipment, and in particular to an electrostatic chuck processing device. Background Art

[0002] An electrostatic chuck is a precision handling tool widely used in the electronics, semiconductor, and liquid crystal display industries. It consists of an upper electrode and a lower electrode, located between them. It utilizes the principle of static electricity to generate an electrostatic field to attract and transport lightweight, thin workpieces such as sheets and lenses. However, over time, problems such as electrode damage, insulation material damage, and contamination accumulation can occur, necessitating disassembly for cleaning or replacement. To address this, we propose an electrostatic chuck processing device. Summary of the Invention

[0003] (1) Technical problems solved

[0004] In view of the deficiencies of the prior art, the present invention provides an electrostatic chuck processing device, which overcomes the deficiencies of the prior art, has a reasonable design and a compact structure, and solves the problems raised in the background art.

[0005] (2) Technical solution

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] An electrostatic chuck processing device, characterized in that it includes an upper unit, a middle unit, and a lower unit that are concentrically connected to each other from top to bottom, the upper unit including a first disk body and a second disk body that cooperate to form a wavy end-to-end connected gap on a horizontal plane, the gap further provided with raised slide rails that are further close to the center of the first disk body and spaced apart to form a fixed slideway, and the lower unit including a base having internal teeth, the base further provided with a base annular groove, and an undulating portion provided within the base annular groove;

[0008] It also includes a rotating unit and a cutting unit. The rotating unit is embedded in the inner wall of the middle unit and rotates on its inner wall. The cutting unit connected to the rotating unit cooperates along the trajectory of the gap and the undulating part. The cutting knife on the cutting unit is fixed along the slide and cooperates with the gap of the electrostatic suction cup. The cutting unit drives the base to rotate and lift it so that the electrostatic suction cup can be unfolded and disassembled.

[0009] Preferably, the cutting unit includes a cutting knife, a sliding rod, and a gear connected in sequence. The sliding rod corresponds to the gap so that the cutting unit slides along the gap. The gear engages with the internal teeth of the base to drive the base to rotate. The cutting knife extends to the second disk body and is inclined to correspond to the electrostatic suction cup.

[0010] Preferably, the bottom of the sliding rod is further connected to a limiting block that slides in cooperation with the strip groove.

[0011] Preferably, one end of the cutting blade is a sharp edge for easy insertion into the gap between the electrostatic chucks, and the other end has a wide edge for widening the gap between the electrostatic chucks.

[0012] Preferably, a plurality of through holes are provided along the cutting knife, and the cutting knife slides the dielectric liquid cut into the electrostatic suction cup out of the through holes, preventing the dielectric liquid from remaining on the cutting knife when the electrostatic suction cup is disassembled by the cutting knife, causing the dielectric liquid to flow out of the cutting knife.

[0013] Preferably, the rotating unit includes a central ring body and an extension plate. The extension plate is arranged around the central ring body and is provided with a strip groove for accommodating the sliding and lifting of the cutting unit.

[0014] Preferably, an arc-shaped flange is provided on the extension plate, and a groove is provided on the inner wall of the middle unit, and the arc-shaped flange and the groove form an embedded fit.

[0015] Preferably, a rotating drum is sleeved on the central ring body, and the rotating drum extends downward from the bottom of the lower unit and sleeves on the outer teeth, and the outer teeth are driven by a motor to rotate the rotating unit.

[0016] (3) Beneficial effects

[0017] The embodiment of the present invention provides an electrostatic chuck processing device. It has the following beneficial effects:

[0018] The upper unit is used to control the movement trajectory of the cutting unit on it, the middle unit controls the horizontal sliding of the cutting unit, and the lower unit controls the up and down sliding of the cutting unit to achieve embedding into the gap between the electrostatic suction cups. After lifting, the gap between the electrostatic suction cups is expanded. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the present invention;

[0020] Figure 2 It is a schematic diagram of the structure of the present invention;

[0021] Figure 3 For the present invention Figure 2 Bottom diagram of ;

[0022] Figure 4 For the present invention Figure 2 Explosion diagram of

[0023] Figure 5 This is a bottom schematic diagram of the layer unit and the rotating unit in the structure of the present invention;

[0024] Figure 6 is a schematic diagram of a rotating unit of the present invention;

[0025] Figure 7 is a schematic diagram of the cut-in unit of the present invention;

[0026] Figure 8 Schematic diagram of the lower unit of the present invention.

[0027] In the figure: 1. upper unit; 11. first disk body; 12. second disk body; 13. gap; 14. fixed rod; 2. middle unit; 3. rotating unit; 31. central ring body; 32. extension plate; 33. strip groove; 34. rotating drum; 35. external teeth; 4. cutting unit; 41. cutting knife; 42. sliding rod; 43. gear; 44. limit block; 45. through hole; 46. pointed edge; 47. wide side; 5. lower unit; 51. base; 52. base ring groove; 53. undulating part. DETAILED DESCRIPTION

[0028] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0029] Refer to the attached Figure 1-8The present invention provides an electrostatic suction cup processing device, comprising an upper unit (1) connected concentrically from top to bottom to provide an operating platform for placing an electrostatic suction cup to be processed, a middle unit (2) for connecting the upper and lower layers, transmitting power and positioning, and a lower unit (5) as a basic support for fixing the entire device. The lower unit (5) is connected to the housing of the device through a bearing. The lower unit (5) comprises a base (51) with internal teeth, a base ring groove (52) is further provided on the base of the base (51), and an undulating portion (53) is provided in the base ring groove (52). The undulating portion (53) provides support for the lifting of the cutting unit (4), and also includes a rotating unit (3) and a cutting unit (4). The upper unit (1) comprises a first disk body (11) and a second disk body (12) that cooperate to form a wave-shaped end-to-end connected gap (13) on a horizontal plane. The gap (13) is further provided with a base ring groove (52) that is further close to the first disk body. The center of a disk body (11) is provided with raised slide rails spaced apart to form a fixed slideway, and the fixed slideway can allow the cutting unit (4) to slide along a fixed orientation. Specifically, the cutting knife (41) is pressed against the gap of the electrostatic suction cup along the fixed slideway, so that the cutting knife 41 can enter the gap of the suction cup. The gear (43) fixedly connected to the bottom of the cutting knife (41) is engaged with the internal gear of the driving base (51). The driving base (51) rotates to lift it so that the electrostatic suction cup can be unfolded and disassembled. When in use, the electrostatic suction cup is fixed on the second disk body (12). The bottom of the second disk body (12) is also connected to a fixing rod (14). The fixing rod (14) passes downward through the middle unit (2) and the lower unit (5) and fixes them inside the box body of the entire device. The first disk body (11) is connected to the box body of the entire device through a connecting block. The first disk body (11) and the second disk body (12) are kept on the same horizontal plane.

[0030] The rotating unit (3) is embedded in the inner wall of the middle unit (2) and rotates on the inner wall. The cutting unit (4) connected to the rotating unit (3) cooperates along the track of the gap (13) and the undulating portion (53). The cutting unit (4) is inserted into the gap (13) and contacts the undulating portion (53) to achieve precise positioning, which is convenient for subsequent processing operations. The cutting knife (41) on the cutting unit (4) is abutted against the gap of the electrostatic suction cup along the fixed slide. The cutting unit (4) drives the base (51) to rotate and lift it, so that the electrostatic suction cup is unfolded and disassembled. The base (51) is rotated by gear meshing. The undulating portion (53) on the base (51) lifts the cutting unit (4), which is convenient for disassembling the electrostatic suction cup.

[0031] In this embodiment, the cutting unit (4) includes a cutting knife (41), a sliding rod (42), and a gear (43) connected in sequence. The sliding rod (42) corresponds to the gap (13) so that the cutting unit (4) slides along the gap (13). Since the gear (43) is fixed on (42) and engages with the internal teeth of the base (51), it can push the base (51) to rotate, and then the undulating part (53) is pressed against the sliding rod (42). The cutting knife (41) extends to the second disk body (12) and is inclined to correspond to the electrostatic suction cup.

[0032] In this embodiment, the bottom of the sliding rod (42) is also connected to a limit block (44) that slides with the strip groove (33) to prevent the entire cutting unit (4) from rotating within the strip groove (33), thereby better controlling the docking and disassembly of the cutting unit (4) and the electrostatic suction cup.

[0033] In this embodiment, one end of the cutting blade (41) is a sharp edge (46) for easy insertion into the gap between the electrostatic suction cups, and the wide edge (47) at the other end can expand the gap between the electrostatic suction cups. The wide edge (47) is used to expand the gap, and the undulating portion (53) is used to lift the cutting blade (41) to completely disassemble the electrostatic suction cups.

[0034] In this embodiment, a plurality of through holes (45) are provided along the cutting blade (41), and the cutting blade (41) causes the dielectric liquid cut into the electrostatic chuck to slide out from the through holes (45), thereby preventing the dielectric liquid from remaining on the cutting blade (41) when the electrostatic chuck is disassembled by the cutting blade (41), causing the dielectric liquid to flow out of the cutting blade (41), and preventing the dielectric liquid from remaining on the cutting blade (41) during the processing, thereby preventing the dielectric liquid from overflowing from the electrostatic chuck.

[0035] In this embodiment, the rotating unit (3) includes a central ring body (31) and an extension plate (32). The extension plate (32) is arranged around the central ring body (31) and is provided with a strip groove (33) for accommodating the sliding and lifting of the cutting unit (4). The extension plate (32) is provided with an arc flange, and the inner wall of the middle unit (2) is provided with a groove. The arc flange and the groove form an embedded fit to provide a stable rotating platform. The central ring body (31) is also sleeved with a rotating drum (34). The rotating drum (34) extends downward from the bottom of the lower unit (5) and is sleeved with external teeth (35). The external teeth (35) are driven by a motor to rotate the rotating unit (3).

[0036] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply the existence of any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or device comprising the element.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. An electrostatic chuck processing device, characterized in that: It includes an upper unit (1), a middle unit (2), and a lower unit (5) which are concentrically connected to each other from top to bottom; The upper unit (1) comprises a first disk (11) and a second disk (12) which cooperate to form a wave-shaped end-to-end connected gap (13) on a horizontal plane, and the gap (13) is further provided with raised slide rails which are further close to the center of the first disk (11) and are arranged at intervals to form a fixed slideway; The lower unit (5) comprises a base (51) having internal teeth, a base ring groove (52) is further provided on the base of the base (51), and an undulating portion (53) is provided in the base ring groove (52); The utility model also includes a rotating unit (3) and a cutting unit (4), wherein the rotating unit (3) is embedded in the inner wall of the middle unit (2) and rotates on the inner wall thereof, and the cutting unit (4) connected to the rotating unit (3) cooperates along the track of the gap (13) and the undulating portion (53), and the cutting knife (41) on the cutting unit (4) cooperates with the gap of the electrostatic suction cup along the fixed slide, and the cutting unit (4) drives the base (51) to rotate and lift it so that the electrostatic suction cup is unfolded and disassembled.

2. The electrostatic chuck processing device according to claim 1, wherein: The cutting unit (4) includes a cutting knife (41), a sliding rod (42), and a gear (43) connected in sequence. The sliding rod (42) corresponds to the gap (13) so that the cutting unit (4) slides along the gap (13). The gear (43) engages with the inner teeth of the base (51) to drive the base (51) to rotate. The cutting knife (41) extends to the second disk body (12) and is inclined to correspond to the electrostatic suction cup.

3. The electrostatic chuck processing device according to claim 2, wherein: The bottom of the sliding rod (42) is also connected to a limiting block (44) that is slidably engaged with the strip groove (33).

4. The electrostatic chuck processing device according to claim 1, wherein: One end of the cutting knife (41) is a sharp edge (46) for easy insertion into the gap between the electrostatic chucks, and the other end has a wide edge (47) for expanding the gap between the electrostatic chucks.

5. The electrostatic chuck processing device according to claim 1, wherein: A plurality of through holes (45) are provided along the cutting knife (41), and the cutting knife (41) causes the dielectric liquid in the electrostatic chuck to slide out from the through holes (45), thereby preventing the dielectric liquid from remaining on the cutting knife (41) when the electrostatic chuck is disassembled by the cutting knife (41), thereby preventing the dielectric liquid from flowing out from the cutting knife (41).

6. The electrostatic chuck processing device according to claim 1, wherein: The rotating unit (3) comprises a central ring body (31) and an extension plate (32). The extension plate (32) is arranged around the central ring body (31) and is provided with a strip groove (33) for accommodating the sliding and lifting of the cutting unit (4).

7. The electrostatic chuck processing device according to claim 6, wherein: The extension plate (32) is provided with an arc-shaped flange, and the inner wall of the middle layer unit (2) is provided with a groove, and the arc-shaped flange and the groove form an embedded fit.

8. The electrostatic chuck processing device according to claim 6, wherein: The central ring body (31) is also sleeved with a rotating drum (34), which extends downward from the bottom of the lower unit (5) and sleeves the outer teeth (35), and the outer teeth (35) are driven by a motor to rotate the rotating unit (3).

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