Radio frequency drive device and radio frequency power supply system

Abstract

The application provides a radio frequency driving device and a radio frequency power supply system, and relates to the technical field of radio frequency. The radio frequency driving device comprises a radio frequency driving unit and a driving adjusting unit. The radio frequency driving unit is used for being connected between a direct current power supply and a radio frequency generating device, receiving direct current electric energy output by the direct current power supply, and converting the direct current electric energy into target electric energy and outputting the target electric energy to the radio frequency generating device to drive the radio frequency generating device. The driving adjusting unit is connected between the direct current power supply, the radio frequency driving unit and the ground. The driving adjusting unit has a first connection state and a second connection state. When the driving adjusting unit is in the first connection state, the direct current electric energy is continuously transmitted to the radio frequency driving unit. When the driving adjusting unit is in the second connection state, the direct current electric energy is stopped from being transmitted to the radio frequency driving unit, and the electric energy of the radio frequency driving unit is discharged to the ground. The application can protect the radio frequency generating device.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency driving device and a radio frequency power supply system. Background Art

[0002] With the rapid development of radio frequency (RF) technology, RF power systems are increasingly being used in high-power scenarios to provide the required RF power to loads. RF generators are often used to generate and transmit RF power to the loads. However, RF generators are susceptible to reflected power, and large amounts of reflected power can destroy the generator in a short period of time. Therefore, protecting RF generators has become a critical issue. Summary of the Invention

[0003] The present application provides a radio frequency driving device and a radio frequency power supply system, which can quickly and effectively protect a radio frequency generating device to prevent the radio frequency generating device from being destroyed.

[0004] In a first aspect, a radio frequency driving device is provided, comprising a radio frequency driving unit and a driving adjustment unit. The radio frequency driving unit is configured to be connected between a DC power supply and a radio frequency generating device to receive DC power output by the DC power supply, and to convert the DC power into target power and output it to the radio frequency generating device to drive the radio frequency generating device. The driving adjustment unit is connected between the DC power supply, the radio frequency driving unit, and the ground, and has a first connection state and a second connection state. The driving adjustment unit is configured to continuously transmit the DC power to the radio frequency driving unit when in the first connection state, and to stop transmitting the DC power to the radio frequency driving unit when in the second connection state, and to discharge the power of the radio frequency driving unit to the ground.

[0005] In one possible embodiment, the RF drive unit includes an energy storage module and a voltage regulation module, wherein the energy storage module and the voltage regulation module are sequentially connected between the drive adjustment unit and the RF generating device, wherein the energy storage module is used to receive and charge according to the DC power to store electrical energy, and the voltage regulation module is used to adjust the voltage value of the input DC power to obtain the target electrical energy. When the drive adjustment unit is in the first connection state, the DC power is continuously transmitted to the energy storage module and the voltage regulation module, the energy storage module stores electrical energy, and the voltage regulation module converts the electrical energy into the target electrical energy; when the drive adjustment unit is in the second connection state, the DC power stops being transmitted to the energy storage module and the voltage regulation module, the voltage regulation module stops outputting the target electrical energy, and the drive adjustment unit discharges the electrical energy stored in the energy storage module to the ground.

[0006] In one possible embodiment, the drive regulation unit includes a switch module, a first discharge module, and a second discharge module. The switch module is connected between the DC power supply and the energy storage module. The switch module is configured to be in a first on state or a first off state to respectively connect or disconnect the connection path between the DC power supply and the energy storage module, thereby correspondingly allowing the DC power to continue to be transmitted or stop being transmitted to the energy storage module and the voltage regulation module. The first discharge module is connected in parallel with the switch module between the DC power supply and the energy storage module and is connected to ground. The first discharge module is configured to be in a second on state or a second off state to correspondingly discharge or stop discharging the electrical energy stored in the energy storage module. The second discharge module is connected between the connection point between the switch module and the energy storage module and ground. The second discharge module is configured to be in a third on state or a third off state to correspondingly discharge or stop discharging the electrical energy stored in the energy storage module. Wherein, when the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the drive adjustment unit is in the first connected state; when the switch module is in the first off-state, the first discharge module is in the second on-state and / or the second discharge module is in the third on-state, the drive adjustment unit is in the second connected state.

[0007] In one possible embodiment, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state. When the first discharge module is in the second conduction state and the second discharge module is in the third conduction state, the drive adjustment unit is in the first discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third disconnection state, the drive adjustment unit is in the second discharge connection state; when the first discharge module is in the second disconnection state and the second discharge module is in the third conduction state, the drive adjustment unit is in the third discharge connection state. The drive adjustment unit discharges the electrical energy stored in the energy storage module at a decreasing rate when the drive adjustment unit is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively.

[0008] In one possible implementation, the first discharge module includes a first diode, a first inductor, and a first switch. The cathode of the first diode is connected to the connection point between the DC power supply and the switch module, the anode of the first diode is connected to one end of the first inductor, the other end of the first inductor is connected to the connection point between the switch module and the energy storage module, one end of the first switch is connected to the connection point between the anode of the first diode and one end of the first inductor, and the other end of the first switch is grounded. The first switch is turned on or off to correspondingly place the first discharge module in the second on state or the second off state.

[0009] In one possible implementation, the second discharge module includes a first resistor and a second switch. One end of the first resistor is connected to a connection point between the switch module and the energy storage module, and the other end of the first resistor is selectively grounded via the second switch. The second switch is turned on or off to correspondingly place the second discharge module in the third on state or the third off state.

[0010] In a possible implementation, the RF driving device further includes a control unit, where the control unit is connected to at least the driving adjustment unit, and the control unit is configured to control the driving adjustment unit to be in the first connection state or the second connection state.

[0011] In one possible embodiment, the RF driving device further includes a parameter acquisition unit configured to connect to the RF generating device to acquire a first parameter of the RF generating device. The control unit is further connected to the parameter acquisition unit and configured to receive the first parameter and, when the first parameter does not meet a first preset condition, control the driving adjustment unit to be in the first connection state, and, when the first parameter meets the first preset condition, control the driving adjustment unit to be in the second connection state.

[0012] In a possible implementation manner, the first parameter includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to a first preset value.

[0013] In a second aspect, a radio frequency power supply system is also provided, comprising a DC power supply, a radio frequency generator, and a radio frequency driver. The radio frequency driver comprises a radio frequency driver unit and a driver adjustment unit. The radio frequency driver unit is configured to be connected between the DC power supply and the radio frequency generator to receive the DC power output by the DC power supply, and to convert the DC power into target power and output it to the radio frequency generator to drive the radio frequency generator. The driver adjustment unit is connected between the DC power supply, the radio frequency driver unit, and the ground. The driver adjustment unit has a first connection state and a second connection state. The driver adjustment unit is configured to continuously transmit the DC power to the radio frequency driver unit when in the first connection state, and to stop transmitting the DC power to the radio frequency driver unit when in the second connection state, and to discharge the power of the radio frequency driver unit to the ground.

[0014] The RF driving device and RF power supply system of the present application are configured to receive the DC power output by the DC power supply by providing an RF driving unit connected between the DC power supply and the RF generating device, and convert the DC power into target power and output it to the RF generating device to achieve driving of the RF generating device. In addition, a driving adjustment unit is provided between the DC power supply, the RF driving unit and the ground, and the driving adjustment unit is configured to have a first connection state and a second connection state. Thus, when the RF generating device does not need protection, the RF driving unit is in the first connection state, so that the DC power is continuously transmitted to the RF driving unit, thereby obtaining the target power and driving the RF generating device to generate RF power. When the RF generating device needs protection, the RF driving unit is in the second connection state, so that the DC power stops being transmitted to the RF driving unit, thereby stopping obtaining the target power and stopping driving the RF generating device to generate RF power, and discharging the power of the RF driving unit to the ground. Therefore, the RF generating device can be quickly and effectively protected to prevent the RF generating device from being destroyed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 FIG. 4 is a block diagram of a radio frequency driving device in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a block diagram of a radio frequency driving device in another embodiment of the present application.

[0018] Figure 3 Schematic diagram of a driving adjustment unit in one embodiment of the present application.

[0019] Figure 4 Schematic diagram of a circuit of a driving adjustment unit in an embodiment of the present application.

[0020] Figure 5 FIG. 4 is a block diagram of a radio frequency driving device in another embodiment of the present application.

[0021] Figure 6 FIG. 1 is a circuit diagram of a radio frequency driving unit in an embodiment of the present application.

[0022] Figure 7 Schematic diagram of a radio frequency power supply system in one embodiment of the present application.

[0023] Explanation of the accompanying drawings: 1000, RF power supply system, DC, direct current power supply, DC1, direct current power, PA, RF generating device, 10, RF driving device, 100, RF driving unit, 110, energy storage module, C1, first capacitor, 120, voltage regulation module, S4, fourth switch, L2, second inductor, D2, second diode, C2, second capacitor, 200, drive adjustment unit, 210, switch module, S3, third switch, 220, first discharge module, D1, first diode, L1, first inductor, S1, first switch, 230, second discharge module, R1, first resistor, S2, second switch, 300, control unit, 400, parameter acquisition unit, P1, first parameter, DC2, target power, GND, ground. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0026] In the following, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "multiple" means two or more.

[0027] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0028] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency driving device in an embodiment of the present application. Figure 1 As shown, the present application provides a radio frequency driving device 10, which includes a radio frequency driving unit 100 and a driving adjustment unit 200. The radio frequency driving unit 100 is used to be connected between a direct current power supply DC and a radio frequency generating device PA to receive direct current power DC1 output by the direct current power supply DC, and convert the direct current power DC1 into target power DC2 and output it to the radio frequency generating device PA to drive the radio frequency generating device PA. The driving adjustment unit 200 is connected between the direct current power supply DC, the radio frequency driving unit 100 and the ground GND. The driving adjustment unit 200 has a first connection state and a second connection state. The driving adjustment unit 200 is used to continuously transmit the direct current power DC1 to the radio frequency driving unit 100 when in the first connection state, and to stop transmitting the direct current power DC1 to the radio frequency driving unit 100 when in the second connection state, and to discharge the power of the radio frequency driving unit 100 to the ground GND.

[0029] Thus, the RF driving device 10 in the present application receives the DC power DC1 output by the DC power DC by providing a RF driving unit 100 connected between the DC power supply DC and the RF generating device PA, and converts the DC power DC1 into the target power DC2 and outputs it to the RF generating device PA, so as to achieve driving of the RF generating device PA, and provides a driving adjustment unit 200 connected between the DC power supply DC, the RF driving unit 100 and the ground GND, and configures the driving adjustment unit 200 to have a first connection state and a second connection state, so as to achieve driving of the RF generating device PA when the RF generating device PA is not in operation. When protection is needed, it is in the first connection state, so that the DC power DC1 is continuously transmitted to the RF driving unit 100, and then the target power DC2 is obtained to drive the RF generating device PA to generate RF power. When the RF generating device PA needs to be protected, it is in the second connection state, so that the DC power DC1 stops being transmitted to the RF driving unit 100, and then the target power DC2 is stopped and the driving of the RF generating device PA to generate RF power is stopped, and the power of the RF driving unit 100 is discharged to the ground GND, which can quickly and effectively protect the RF generating device PA and prevent the RF generating device PA from being destroyed.

[0030] In one or more embodiments, the DC power supply DC may include a DC source that outputs DC power DC1, and may also include an AC source that outputs AC power and a rectifier device, wherein the rectifier device is used to rectify the AC power into DC power DC1, so that the DC power supply DC outputs DC power DC1.

[0031] In one or more embodiments, the RF driving unit 100 can convert DC power DC1 into DC target power DC2 according to the needs of the RF generating device PA, or convert DC power DC1 into AC target power DC2 to drive the RF generating device PA.

[0032] In one or more embodiments, the RF generator PA may be driven according to the target power DC2 to generate RF power and transmit the RF power to a load. The RF generator PA may include a RF power amplifier.

[0033] See also Figure 2 , Figure 2 FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 2As shown, the radio frequency driving unit 100 comprises an energy storage module 110 and a voltage adjustment module 120, the energy storage module 110 and the voltage adjustment module 120 are sequentially connected between the driving adjustment unit 200 and the radio frequency generating device PA, the energy storage module 110 is used for receiving and charging according to the direct current electric energy DC1 to store electric energy, and the voltage adjustment module 120 is used for adjusting the voltage value of the input direct current electric energy DC1 to obtain the target electric energy DC2. Wherein, when the driving adjustment unit 200 is in the first connection state, the direct current electric energy DC1 is continuously transmitted to the energy storage module 110 and the voltage adjustment module 120, the energy storage module 110 stores electric energy, and the voltage adjustment module 120 converts the electric energy into the target electric energy DC2; when the driving adjustment unit 200 is in the second connection state, the direct current electric energy DC1 stops being transmitted to the energy storage module 110 and the voltage adjustment module 120, the voltage adjustment module 120 stops outputting the target electric energy DC2, and the driving adjustment unit 200 discharges the electric energy stored in the energy storage module 110 to the ground GND.

[0034] Therefore, the radio frequency driving device 10 in the application can realize the storage and conversion of the direct current electric energy DC1 by setting the radio frequency driving unit 100 to comprise the energy storage module 110 and the voltage adjustment module 120, and the energy storage module 110 can not only maintain the stable operation of the voltage adjustment module 120, but also control the voltage value at the voltage adjustment module 120, especially when the radio frequency generating device PA needs to be protected, the driving adjustment unit 200 is in the second connection state, and the direct current electric energy DC1 can be inhibited from being transmitted to the energy storage module 110 and the voltage adjustment module 120, and the electric energy stored in the energy storage module 110 can be discharged to the ground GND to quickly reduce the voltage value at the energy storage module 110 and the voltage value at the voltage adjustment module 120, thereby protecting the radio frequency generating device PA.

[0035] Specifically, the size of the reflected power is related to the voltage value of the radio frequency electric energy generated by the radio frequency generating device PA, and in the high-power scene, the voltage value of the radio frequency electric energy is very high, and the voltage value of the corresponding target electric energy DC2 also needs to be very high, so the reflected power generated when the impedance is not matched is very large, which will destroy the radio frequency generating device PA in a very short time. Therefore, by quickly reducing the voltage value at the energy storage module 110 and the voltage value at the voltage adjustment module 120, the reflected power is also quickly reduced, which can effectively avoid the radio frequency generating device PA from being destroyed.

[0036] In one or more embodiments, the energy storage module 110 and the voltage adjustment module 120 can also be connected to the ground GND.

[0037] Please refer to Figure 3 , Figure 3 for the block diagram of the driving adjustment unit in an embodiment of the application. As shown in the figure, the driving adjustment unit 200 comprises a first connection unit 210 and a second connection unit 220, the first connection unit 210 is connected between the energy storage module 110 and the voltage adjustment module 120, and the second connection unit 220 is connected between the voltage adjustment module 120 and the radio frequency generating device PA. Figure 1 、 Figure 3 As shown, the drive regulation unit 200 includes a switch module 210, a first discharge module 220, and a second discharge module 230. The switch module 210 is connected between the DC power supply DC and the energy storage module 110. The switch module 210 is configured to be in a first on state or a first off state to respectively connect or disconnect the connection path between the DC power supply DC and the energy storage module 110, thereby correspondingly allowing the DC power DC1 to continue to be transmitted or stop being transmitted to the energy storage module 110 and the voltage regulation module 120. The first discharge module 220 is connected in parallel with the switch module 210 between the DC power supply DC and the energy storage module 110 and is connected to ground GND. The first discharge module 220 is configured to be in a second on state or a second off state to correspondingly discharge or stop discharging the electrical energy stored in the energy storage module 110. The second discharge module 230 is connected between the connection point between the switch module 210 and the energy storage module 110 and the ground GND. The second discharge module 230 is configured to be in a third on-state or a third off-state to correspondingly discharge or stop discharging the electrical energy stored in the energy storage module 110. When the switch module 210 is in the first on-state, the first discharge module 220 is in the second off-state, and the second discharge module 230 is in the third off-state, the drive adjustment unit 200 is in the first connected state. When the switch module 210 is in the first off-state, the first discharge module 220 is in the second on-state, and / or the second discharge module 230 is in the third on-state, the drive adjustment unit 200 is in the second connected state.

[0038] Therefore, the above-mentioned RF driving device 10 in the present application, by setting the switch module 210 of the driving adjustment unit 200 in the first conductive state or the first disconnected state, respectively turns on or off the connection path between the DC power supply DC and the energy storage module 110, and correspondingly realizes continuous transmission or stop of transmission of DC power DC1 to the energy storage module 110 and the voltage regulation module 120, and by setting the first discharge module 220 and the second discharge module 230, not only can the electric energy stored in the energy storage module 110 be discharged or stopped, but also the first discharge module 220 and / or the second discharge module 230 can be selected according to actual needs to discharge the electric energy stored in the energy storage module 110, thereby better protecting the RF generating device PA.

[0039] Furthermore, the first discharge module 220 and / or the second discharge module 230 may discharge the electric energy stored in the energy storage module 110 to the ground GND.

[0040] In one or more embodiments, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state. When the first discharge module 220 is in the second conduction state and the second discharge module 230 is in the third conduction state, the drive adjustment unit 200 is in the first discharge connection state; when the first discharge module 220 is in the second conduction state and the second discharge module 230 is in the third disconnection state, the drive adjustment unit 200 is in the second discharge connection state; when the first discharge module 220 is in the second disconnection state and the second discharge module 230 is in the third conduction state, the drive adjustment unit 200 is in the third discharge connection state. The drive adjustment unit 200 discharges the electrical energy stored in the energy storage module 110 at a decreasing rate when in the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively.

[0041] Thus, the above-mentioned RF driving device 10 in the present application, by configuring the second connection state to include the first discharge connection state, the second discharge connection state and the third discharge connection state, and by configuring the driving adjustment unit 200 to sequentially reduce the discharge speed of the electric energy stored in the energy storage module 110 when they are in the first discharge connection state, the second discharge connection state and the third discharge connection state, respectively. When the RF generating device PA needs to be protected, the driving adjustment unit 200 can be placed in one of the first discharge connection state, the second discharge connection state and the third discharge connection state according to actual needs, thereby effectively preventing the RF generating device PA from being destroyed.

[0042] Please also refer to Figure 4 , Figure 4 FIG. 1 is a circuit diagram of a driving adjustment unit in an embodiment of the present application. Figure 1 、 Figure 4 As shown, the first discharge module 220 includes a first diode D1, a first inductor L1, and a first switch S1. The cathode of the first diode D1 is connected to the connection point between the DC power supply DC and the switch module 210. The anode of the first diode D1 is connected to one end of the first inductor L1. The other end of the first inductor L1 is connected to the connection point between the switch module 210 and the energy storage module 110. One end of the first switch S1 is connected to the connection point between the anode of the first diode D1 and one end of the first inductor L1. The other end of the first switch S1 is grounded GND. The first switch S1 is turned on or off to correspondingly place the first discharge module 220 in the second on state or the second off state.

[0043] Therefore, the RF driving device 10 in the present application, by providing the first discharge module 220 coordinated with the first diode D1, the first inductor L1, and the first switch S1, can utilize the unidirectional conduction characteristic of the first diode D1 when the first switch S1 is disconnected to prevent the first inductor L1 from being charged or discharged. Furthermore, when the first switch S1 is turned on, based on the voltage difference across the first inductor L1, the electric energy stored in the energy storage module 110 enters the first inductor L1 through the other end of the first inductor L1, thereby charging the first inductor L1, and continuously discharges the electric energy to the ground GND through the first switch S1.

[0044] like Figure 1 、 Figure 4 As shown, the second discharge module 230 includes a first resistor R1 and a second switch S2. One end of the first resistor R1 is connected to the connection point between the switch module 210 and the energy storage module 110, and the other end of the first resistor R1 is selectively connected to the ground GND through the second switch S2. The second switch S2 is turned on or off to correspondingly place the second discharge module 230 in a third on state or a third off state.

[0045] Therefore, the RF driving device 10 in the present application, by providing the second discharge module 230 coordinated with the first resistor R1 and the second switch S2, can make the first resistor R1 not consume electrical energy when the second switch S2 is disconnected, and can make the first resistor R1 consume electrical energy when the second switch S2 is turned on, and continuously discharge the electrical energy to the ground GND through the second switch S2.

[0046] It should be noted that the energy consumption rate of the first resistor R1 is lower than the energy discharge rate of the first inductor L1, so that the energy discharge rate of the second discharge module 230 is lower than the energy discharge rate of the first discharge module 220, and thus when the first discharge module 220 is in the second conduction state and the second discharge module 230 is in the third conduction state, the drive adjustment unit 200 can be in the first discharge connection state; when the first discharge module 220 is in the second conduction state and the second discharge module 230 is in the third disconnection state, the drive adjustment unit 200 can be in the second discharge connection state; when the first discharge module 220 is in the second disconnection state and the second discharge module 230 is in the third conduction state, the drive adjustment unit 200 can be in the third discharge connection state.

[0047] like Figure 4 As shown, the switch module 210 includes a third switch S3 , which is connected between the DC power supply DC and the energy storage module 110 , and has a first on state and a first off state.

[0048] See also Figure 5 , Figure 5FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 5 As shown, the RF driving device 10 further includes a control unit 300 , which is connected to at least the driving adjustment unit 200 . The control unit 300 is configured to control the driving adjustment unit 200 to be in a first connection state or a second connection state.

[0049] Therefore, the RF driving device 10 in the present application is provided with a control unit 300 to control the connection state of the driving adjustment unit 200 .

[0050] In one or more embodiments, the control unit 300 can control the drive adjustment unit 200 to be in the first connection state or the second connection state by respectively controlling the on or off state of the first switch S1, the second switch S2, and the third switch S3, that is, controlling the drive adjustment unit 200 to be in any one of the first connection state, the first discharge connection state, the second discharge connection state, and the third discharge connection state.

[0051] like Figure 5 As shown, the RF driving device 10 further includes a parameter acquisition unit 400, which is configured to connect to the RF generator PA to obtain a first parameter P1 of the RF generator PA. The control unit 300 is also connected to the parameter acquisition unit 400. The control unit 300 is configured to receive the first parameter P1 and control the driving adjustment unit 200 to be in a first connection state when the first parameter P1 does not meet a first preset condition, and to control the driving adjustment unit 200 to be in a second connection state when the first parameter P1 meets the first preset condition.

[0052] Thus, the above-mentioned RF driving device 10 in the present application, by setting the parameter acquisition unit 400 to obtain the first parameter P1 of the RF generating device PA, can enable the control unit 300 to control the connection state of the driving adjustment unit 200 according to the first parameter P1, and is specifically configured to control the driving adjustment unit 200 to be in the first connection state when the first parameter P1 does not meet the first preset condition, and to control the driving adjustment unit 200 to be in the second connection state when the first parameter P1 meets the first preset condition.

[0053] In one or more embodiments, the first parameter P1 includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to the first preset value.

[0054] Therefore, the above-mentioned RF driving device 10 in the present application configures the first parameter P1 to include a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to the first preset value, so that the control unit 300 can control the driving adjustment unit 200 to be in the second connection state when the reflected power value is too large, that is, when the reflected power value is greater than or equal to the first preset value, thereby protecting the RF generating device PA.

[0055] In one or more embodiments, the first parameter P1 may also include one or more parameters such as voltage standing wave ratio, reflection coefficient, transmission power ratio, etc., and the first preset condition is the relationship between the corresponding parameter and the first preset value.

[0056] In one or more embodiments, the parameter acquisition unit 400 may further be connected to the energy storage module 110 or the voltage regulation module 120 to obtain a voltage value at the energy storage module 110 or a voltage value at the voltage regulation module 120. The control unit 300 is further configured to receive the voltage value at the energy storage module 110 or the voltage value at the voltage regulation module 120, and when the drive regulation unit 200 is in the second connection state, control the drive regulation unit 200 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state according to the voltage value at the energy storage module 110 or the voltage value at the voltage regulation module 120.

[0057] Furthermore, the control unit 300 controls the drive adjustment unit 200 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively, based on the relationship between the voltage value at the energy storage module 110 or the voltage value at the voltage adjustment module 120 and the first voltage threshold, the second voltage threshold, and the third voltage threshold. The first voltage threshold, the second voltage threshold, and the third voltage threshold decrease in sequence.

[0058] Therefore, the control unit 300 determines whether the RF generating device PA needs to be protected based on the relationship between the reflected power value and the first preset value, and determines the protection strength required for the RF generating device PA based on the relationship between the voltage value at the energy storage module 110 or the voltage value at the voltage regulation module 120 and the first voltage threshold, the second voltage threshold, and the third voltage threshold, thereby effectively preventing the RF generating device PA from being destroyed.

[0059] Please also refer to Figure 6 , Figure 6 FIG. 1 is a circuit diagram of a radio frequency driving unit in an embodiment of the present application. Figure 1 、 Figure 6As shown, the energy storage module 110 can include a first capacitor C1, one end of the first capacitor C1 being connected to a connection point between the drive adjustment unit 200 and the voltage adjustment module 120, and the other end of the first capacitor C1 being grounded GND. The voltage adjustment module 120 can include a fourth switch S4, a second diode D2, a second inductor L2, and a second capacitor C2, the fourth switch S4 and the second inductor L2 being connected in sequence between the energy storage module 110 and the radio frequency generating device PA, the negative electrode of the second diode D2 being connected to a connection point between the fourth switch S4 and the second inductor L2, the positive electrode of the second diode D2 being grounded GND, one end of the second capacitor C2 being connected to a connection point between the second inductor L2 and the radio frequency generating device PA, and the other end of the second capacitor C2 being grounded GND.

[0060] Thus, the fourth switch S4, the second diode D2, the second inductor L2, and the second capacitor C2 of the voltage adjustment module 120 constitute a step-down (BUCK) circuit to adjust the voltage value of the input direct current power DC1, and further obtain the target power DC2.

[0061] In one or more embodiments, the voltage adjustment module 120 can also be a step-up circuit, a step-up-step-down circuit, or the like voltage adjustment circuit.

[0062] In one or more embodiments, the control unit 300 can also be connected to the voltage adjustment module 120. Specifically, when the drive adjustment unit 200 is in the first connection state, the control unit 300 can control the fourth switch S4 to be alternately turned on and turned off with a certain conduction duty ratio to adjust the voltage value of the input direct current power DC1, and further obtain the target power DC2. When the drive adjustment unit 200 is in the second connection state, the control unit 300 can control the fourth switch S4 to be alternately turned on and turned off with a certain conduction duty ratio, or directly control the fourth switch S4 to remain turned off.

[0063] In one or more embodiments, the control unit 300 can be a general-purpose processor such as a central processing unit (CPU), a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic device, a discrete gate logic device, a transistor logic device, or the like logic control device, and can also be a micro control unit (MCU) or the like microprocessor.

[0064] The RF driving device 10 of the present application, through the above-mentioned structure, can adopt the disconnection and leakage methods according to the specific needs of the RF generating device PA, and the driving adjustment unit 200 has multiple leakage connection states to quickly and effectively protect the RF generating device PA according to actual conditions to prevent the RF generating device PA from being destroyed.

[0065] See also Figure 7 , Figure 7 FIG. 1 is a schematic diagram of a radio frequency power supply system 1000 in an embodiment of the present application. Figure 7 As shown, the present application further provides a radio frequency power supply system 1000, which includes a direct current power supply DC, a radio frequency generating device PA, and the radio frequency driving device 10 in any of the aforementioned embodiments.

[0066] Please refer again Figure 1 .like Figure 1 As shown, the RF driving device 10 includes an RF driving unit 100 and a driving adjustment unit 200. The RF driving unit 100 is used to be connected between a DC power supply DC and an RF generator PA to receive DC power DC1 output by the DC power supply DC, and convert the DC power DC1 into target power DC2 and output it to the RF generator PA to drive the RF generator PA. The driving adjustment unit 200 is connected between the DC power supply DC, the RF driving unit 100, and the ground GND. The driving adjustment unit 200 has a first connection state and a second connection state. The driving adjustment unit 200 is used to continuously transmit the DC power DC1 to the RF driving unit 100 when in the first connection state, and to stop transmitting the DC power DC1 to the RF driving unit 100 when in the second connection state, and to discharge the power of the RF driving unit 100 to the ground GND.

[0067] The more specific structure of the RF driving device 10 can be found in the relevant content of the RF driving device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0068] The RF driving device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can adopt the disconnection and leakage methods according to the specific needs of the RF generating device PA, and the driving adjustment unit 200 has multiple leakage connection states to quickly and effectively protect the RF generating device PA according to actual conditions to prevent the RF generating device PA from being destroyed.

[0069] In the multiple embodiments provided in this application, it should be understood that the disclosed devices and equipment can be implemented in other ways. For example, the device embodiments described above are merely illustrative; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0070] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0071] In addition, the functional units in various embodiments of the present invention may be integrated into a single processing unit, each unit may be physically included separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or hardware plus software functional units.

[0072] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A radio frequency driving device, characterized in that: include: a radio frequency driving unit, configured to be connected between a DC power supply and a radio frequency generating device, to receive DC power outputted by the DC power supply, and to convert the DC power into target power and output it to the radio frequency generating device, so as to drive the radio frequency generating device; a drive adjustment unit connected between the DC power supply, the RF drive unit, and ground, the drive adjustment unit having a first connection state and a second connection state, the drive adjustment unit being configured to continuously transmit the DC power to the RF drive unit in the first connection state, and to stop transmitting the DC power to the RF drive unit and discharge the power of the RF drive unit to ground in the second connection state; In which, the RF driving unit includes an energy storage module and a voltage regulation module, and the energy storage module and the voltage regulation module are sequentially connected between the driving adjustment unit and the RF generating device; the driving adjustment unit includes a switch module, a first discharge module and a second discharge module, the switch module is connected between the DC power supply and the energy storage module, the first discharge module and the switch module are connected in parallel between the DC power supply and the energy storage module, and are connected to the ground, and the second discharge module is connected between the connection point between the switch module and the energy storage module and the ground.

2. The radio frequency driving device according to claim 1, characterized in that: The energy storage module is used to receive and charge according to the DC power to store electric energy, and the voltage regulation module is used to regulate the voltage value of the input DC power to obtain the target electric energy; Specifically, when the drive adjustment unit is in the first connection state, the DC power is continuously transmitted to the energy storage module and the voltage adjustment module, the energy storage module stores the power, and the voltage adjustment module converts the power into the target power; when the drive adjustment unit is in the second connection state, the DC power stops being transmitted to the energy storage module and the voltage adjustment module, the voltage adjustment module stops outputting the target power, and the drive adjustment unit discharges the power stored in the energy storage module to the ground.

3. The radio frequency driving device according to claim 2, characterized in that: The switch module is configured to be in a first on state or a first off state to respectively connect or disconnect a connection path between the DC power supply and the energy storage module, thereby correspondingly enabling the DC power to continue to be transmitted or stop being transmitted to the energy storage module and the voltage regulation module; The first discharge module is configured to be in a second on state or a second off state to correspondingly discharge or stop discharging the electrical energy stored in the energy storage module; The second discharge module is configured to be in a third on state or a third off state to correspondingly discharge or stop discharging the electric energy stored in the energy storage module; Wherein, when the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the drive adjustment unit is in the first connected state; when the switch module is in the first off-state, the first discharge module is in the second on-state and / or the second discharge module is in the third on-state, the drive adjustment unit is in the second connected state.

4. The radio frequency driving device according to claim 3, characterized in that: The second connection state includes a first discharge connection state, a second discharge connection state and a third discharge connection state; When the first discharge module is in the second on-state and the second discharge module is in the third on-state, the drive adjustment unit is in the first discharge connection state; when the first discharge module is in the second on-state and the second discharge module is in the third off-state, the drive adjustment unit is in the second discharge connection state; when the first discharge module is in the second off-state and the second discharge module is in the third on-state, the drive adjustment unit is in the third discharge connection state; The driving adjustment unit sequentially reduces a discharge speed of the electric energy stored in the energy storage module when the driving adjustment unit is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively.

5. The radio frequency driving device according to claim 4, characterized in that: The first discharge module includes a first diode, a first inductor, and a first switch, wherein the cathode of the first diode is connected to the connection point between the DC power supply and the switch module, the anode of the first diode is connected to one end of the first inductor, the other end of the first inductor is connected to the connection point between the switch module and the energy storage module, one end of the first switch is connected to the connection point between the anode of the first diode and one end of the first inductor, and the other end of the first switch is grounded; The first switch is turned on or off to correspondingly place the first discharge module in the second on state or the second off state.

6. The radio frequency driving device according to claim 4, characterized in that: The second discharge module includes a first resistor and a second switch, one end of the first resistor is connected to the connection point between the switch module and the energy storage module, and the other end of the first resistor is selectively grounded through the second switch; The second switch is turned on or off to correspondingly place the second discharge module in the third on state or the third off state.

7. The radio frequency driving device according to claim 2, characterized in that: The RF driving device further includes a control unit, which is connected to at least the driving adjustment unit, and is configured to control the driving adjustment unit to be in the first connection state or the second connection state.

8. The radio frequency driving device according to claim 7, characterized in that: The RF driving device further includes a parameter acquisition unit, which is configured to connect to the RF generating device to acquire a first parameter of the RF generating device; The control unit is also connected to the parameter acquisition unit, and the control unit is used to receive the first parameter, and when the first parameter does not meet the first preset condition, control the drive adjustment unit to be in the first connection state, and when the first parameter meets the first preset condition, control the drive adjustment unit to be in the second connection state.

9. The radio frequency driving device according to claim 8, characterized in that: The first parameter includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to a first preset value.

10. A radio frequency power supply system, characterized in that: The invention comprises a direct current power supply, a radio frequency generating device and the radio frequency driving device according to any one of claims 1 to 9.

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