Radio frequency drive device and radio frequency power supply system

Abstract

The application provides a radio frequency driving device and a radio frequency power supply system. The radio frequency driving device comprises an input end, an output end, N radio frequency driving units and a gating unit. The N radio frequency driving units are connected in parallel between the input end and the gating unit. The gating unit is connected between the N radio frequency driving units and the output end. The input end is used for connecting with a direct current power supply. The output end is used for connecting with a radio frequency generating device. Each radio frequency driving unit is used for receiving direct current power output by the direct current power supply through the input end and converting the direct current power into target power. The gating unit is used for selectively turning on the connection between one target radio frequency driving unit and the output end, so that the target power generated by the target radio frequency driving unit is output to the radio frequency generating device through the output end. The voltage values of the target power generated by the N radio frequency driving units are different from each other. The application can protect the radio frequency generating device.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency driving device and a radio frequency power supply system. Background Art

[0002] With the rapid development of radio frequency (RF) technology, RF power systems are increasingly being used in high-power scenarios to provide the required RF power to loads. RF generators are often used to generate and transmit RF power to the loads. However, RF generators are susceptible to reflected power, and large amounts of reflected power can destroy the generator in a short period of time. Therefore, protecting RF generators has become a critical issue. Summary of the Invention

[0003] The present application provides a radio frequency driving device and a radio frequency power supply system, which can quickly and effectively protect a radio frequency generating device to prevent the radio frequency generating device from being destroyed.

[0004] In a first aspect, a radio frequency driving device is provided, comprising an input terminal, an output terminal, N radio frequency driving units, and a gating unit. The N radio frequency driving units are connected in parallel between the input terminal and the gating unit, and the gating unit is connected between the N radio frequency driving units and the output terminal. The input terminal is configured to be connected to a DC power supply, and the output terminal is configured to be connected to a radio frequency generator. When the input terminal and the output terminal of the radio frequency driving device are connected to the DC power supply and the radio frequency generator, respectively, each radio frequency driving unit is configured to receive DC power outputted by the DC power supply via the input terminal and convert the DC power into target power. The gating unit is configured to selectively connect a target radio frequency driving unit to the output terminal, so that the target power generated by the target radio frequency driving unit is outputted to the radio frequency generator via the output terminal. The target power generated by the N radio frequency driving units has different voltage values, and when the target power of the target radio frequency driving unit is outputted to the radio frequency generator, the target power of the other N-1 radio frequency driving units ceases to be outputted to the radio frequency generator, where N ≥ 2.

[0005] In one possible embodiment, each RF drive unit includes a voltage regulation module and an energy storage module, which are sequentially connected between the input terminal and the gating unit. The voltage regulation module is configured to receive and regulate the voltage value of the DC power to obtain the target power, and the energy storage module is configured to charge according to the target power to store the power.

[0006] In a possible implementation, the radio frequency driving device further comprises at least one bleeding circuit. The at least one bleeding circuit comprises N first bleeding circuits, the N first bleeding circuits correspond to the N radio frequency driving units one by one, and each first bleeding circuit is connected between the voltage adjustment module and the energy storage module of the corresponding radio frequency driving unit, and is connected to the ground; and / or the at least one bleeding circuit comprises a second bleeding circuit, the second bleeding circuit is connected between the gating unit and the output terminal, and is connected to the ground. Each bleeding circuit has a first connection state and a second connection state, and each bleeding circuit is configured to, in the first connection state, enable the target electric energy to be continuously transmitted to the energy storage module or the radio frequency generating device, and in the second connection state, enable the target electric energy to stop being transmitted to the energy storage module or the radio frequency generating device, and correspondingly bleed the electric energy of the energy storage module or the radio frequency generating device to the ground.

[0007] In a possible implementation, the radio frequency driving device further comprises a control unit, the control unit is connected to each bleeding circuit and the gating unit respectively, and the control unit is configured to control each bleeding circuit to be in the first connection state or the second connection state, and control the gating unit to selectively turn on the connection between the target radio frequency driving unit and the output terminal.

[0008] In a possible implementation, the radio frequency driving device further comprises a parameter acquisition unit, the parameter acquisition unit is configured to be connected to the radio frequency generating device to acquire a first parameter of the radio frequency generating device. The control unit is further connected to the parameter acquisition unit, and the control unit is further configured to receive the first parameter, when the first parameter does not satisfy a first preset condition, control the gating unit to turn on the connection between the target radio frequency driving unit and the output terminal according to the first parameter, so that the target electric energy generated by the target radio frequency driving unit is output to the radio frequency generating device, and when the first parameter satisfies the first preset condition, control the gating unit to disconnect the connection between any radio frequency driving unit and the output terminal, so that the target electric energy generated by the any radio frequency driving unit is stopped to be output to the radio frequency generating device.

[0009] In a possible implementation, the control unit is further configured to, when the first parameter does not satisfy the first preset condition, control each of the discharge circuits to be in the first connection state, so that the target electric energy is continuously transmitted to the energy storage module or the radio frequency generating device; and, when the first parameter satisfies the first preset condition, control each of the discharge circuits to be in the second connection state, so that the target electric energy stops being transmitted to the energy storage module or the radio frequency generating device, and discharges the electric energy of each energy storage module and / or the radio frequency generating device to ground accordingly.

[0010] In a possible implementation manner, the first parameter includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to a first preset value.

[0011] In one possible embodiment, each discharge circuit includes a switch module, a first discharge module, and a second discharge module. The switch module is connected between the voltage regulation module and the energy storage module or between the gating unit and the output end. The switch module is configured to be in a first on state or a first off state to respectively turn on or off the connection path between the voltage regulation module and the energy storage module, thereby correspondingly allowing the target electric energy to continue to be transmitted to or stop being transmitted to the energy storage module; or, respectively turn on or off the connection path between the gating unit and the output end, thereby correspondingly allowing the target electric energy to continue to be transmitted to or stop being transmitted to the radio frequency generator. The first discharge module is connected in parallel with the switch module between the voltage regulation module and the energy storage module or between the gating unit and the output end, and is connected to the ground. The first discharge module is configured to be in a second on state or a second off state to correspondingly discharge or stop discharging the electric energy of the energy storage module; or, correspondingly discharge or stop discharging the electric energy of the radio frequency generator. The second discharge module is connected between the connection point between the switch module and the energy storage module and ground, or between the connection point between the switch module and the output terminal and ground. The second discharge module is configured to be in a third on-state or a third off-state to correspondingly discharge or stop discharging the electrical energy of the energy storage module; or to correspondingly discharge or stop discharging the electrical energy of the RF generating device. When the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the corresponding discharge circuit is in the first connected state; when the switch module is in the first off-state, the first discharge module is in the second on-state, and / or the second discharge module is in the third on-state, the corresponding discharge circuit is in the second connected state.

[0012] In one possible embodiment, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the first discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third disconnection state, the corresponding discharge circuit is in the second discharge connection state; when the first discharge module is in the second disconnection state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the third discharge connection state. The discharge rate of the electrical energy of any discharge circuit to the energy storage module or the RF generator decreases successively when the discharge circuit is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively.

[0013] In a second aspect, a radio frequency power supply system is also provided, comprising a direct current power supply, a radio frequency generator, and a radio frequency driver. The radio frequency driver comprises an input terminal, an output terminal, N radio frequency driver units, and a gating unit. The N radio frequency driver units are connected in parallel between the input terminal and the gating unit. The gating unit is connected between the N radio frequency driver units and the output terminal. The input terminal is configured to be connected to a direct current power supply, and the output terminal is configured to be connected to the radio frequency generator. When the input terminal and the output terminal of the radio frequency driver are connected to the direct current power supply and the radio frequency generator, respectively, each radio frequency driver unit is configured to receive direct current power outputted by the direct current power supply via the input terminal and convert the direct current power into target power. The gating unit is configured to selectively connect one target radio frequency driver unit to the output terminal, so that the target power generated by the target radio frequency driver unit is outputted to the radio frequency generator via the output terminal. The voltage values ​​of the target electric energy generated by the N RF driving units are different from each other, and when the target electric energy of the target RF driving unit is output to the RF generating device, the target electric energy of the other N-1 RF driving units stops being output to the RF generating device, wherein N≥2.

[0014] The radio frequency driving device and the radio frequency power supply system of the present application can output target electric energy with different voltage values to the radio frequency generating device by setting N radio frequency driving units connected in parallel, and the voltage values of the target electric energy generated by the N radio frequency driving units are different, and by setting a gating unit to selectively turn on the connection between one target radio frequency driving unit and the output end, so that the target electric energy generated by the target radio frequency driving unit is output to the radio frequency generating device through the output end, so that when the radio frequency generating device does not need protection, the target electric energy with higher voltage value is selected to be output to the radio frequency generating device to generate radio frequency electric energy, and when the radio frequency generating device needs protection, the target electric energy with lower voltage value is selected to be output to the radio frequency generating device to quickly reduce the reflected power, so as to quickly and effectively protect the radio frequency generating device and avoid the radio frequency generating device from being destroyed. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings needed to be used in the embodiments of the present application or the background art will be described below.

[0016] Figure 1 The block schematic diagram of the radio frequency driving device in an embodiment of the present application.

[0017] Figure 2 The block schematic diagram of the radio frequency driving unit in an embodiment of the present application.

[0018] Figure 3 The block schematic diagram of the radio frequency driving device in another embodiment of the present application.

[0019] Figure 4 The block schematic diagram of the bleeding circuit in an embodiment of the present application.

[0020] Figure 5 The circuit schematic diagram of the bleeding circuit in an embodiment of the present application.

[0021] Figure 6 The circuit schematic diagram of the radio frequency driving unit in an embodiment of the present application.

[0022] Figure 7 The block schematic diagram of the radio frequency driving device in another embodiment of the present application.

[0023] Figure 8 The schematic diagram of the radio frequency power supply system in an embodiment of the present application.

[0024] Explanation of the accompanying symbols: 1000, RF power supply system, DC, direct current power supply, DC1, direct current power, PA, RF generating device, 10, RF driving device, In, input end, Out, output end, 100, RF driving unit, 110, target RF driving unit, 120, voltage regulation module, S4, fourth switch, L2, second inductor, D2, second diode, 130, energy storage module, C1, first capacitor, 200, selection unit, S5, fifth switch, 300, discharge circuit, 310, first discharge circuit, 320, second discharge circuit, 330, switch module, S3, third switch, 340, first discharge module, D1, first diode, L1, first inductor, S1, first switch, 350, second discharge module, R1, first resistor, S2, second switch, 400, control unit, 500, parameter acquisition unit, P1, first parameter, DC2, target power, GND, ground. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0027] In the following, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "multiple" means two or more.

[0028] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0029] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency driving device in an embodiment of the present application. Figure 1 As shown, the present application provides a radio frequency driving device 10, which includes an input terminal In, an output terminal Out, N radio frequency driving units 100, and a gating unit 200. The N radio frequency driving units 100 are connected in parallel between the input terminal In and the gating unit 200. The gating unit 200 is connected between the N radio frequency driving units 100 and the output terminal Out. The input terminal In is used to connect to a direct current power supply DC, and the output terminal Out is used to connect to a radio frequency generator PA. When the input terminal In and the output terminal Out of the radio frequency driving device 10 are connected to the direct current power supply DC and the radio frequency generator PA, respectively, each radio frequency driving unit 100 is used to receive direct current power DC1 output by the direct current power supply DC through the input terminal In and convert the direct current power DC1 into target power DC2. The gating unit 200 is used to selectively conduct the connection between one target radio frequency driving unit 110 and the output terminal Out, so that the target power DC2 generated by the target radio frequency driving unit 110 is output to the radio frequency generator PA through the output terminal Out. The voltage values ​​of the target electric energy DC2 generated by the N RF driving units 100 are different from each other, and when the target electric energy DC2 of the target RF driving unit 110 is output to the RF generating device PA, the target electric energy DC2 of the other N-1 RF driving units 100 stops being output to the RF generating device PA, wherein N≥2.

[0030] Thus, the RF driving device 10 in the present application is configured with N RF driving units 100 connected in parallel, and the voltage values ​​of the target electric energy DC2 generated by the N RF driving units 100 are different from each other. It is possible to output target electric energy DC2 with different voltage values ​​to the RF generator PA, and by providing a gating unit 200 to selectively conduct the connection between one of the target RF driving units 110 and the output terminal Out, so that the target electric energy DC2 generated by the target RF driving unit 110 is output to the RF generator PA through the output terminal Out. In this way, when the RF generator PA does not need protection, the target electric energy DC2 with a higher voltage value can be selected to be output to the RF generator PA to generate RF electric energy, and when the RF generator PA needs protection, the target electric energy DC2 with a lower voltage value can be selected to be output to the RF generator PA, so as to quickly reduce the reflected power, quickly and effectively protect the RF generator PA, and prevent the RF generator PA from being destroyed.

[0031] Specifically, the magnitude of reflected power is related to the voltage of the RF power generated by the RF generator PA. In high-power scenarios, the voltage of the RF power is very high, and the corresponding voltage of the target power DC2 must also be very high. Therefore, when there is an impedance mismatch, the reflected power generated is very high, which can quickly destroy the RF generator PA. Therefore, by quickly reducing the voltage of the target power DC2, the reflected power is also quickly reduced, effectively preventing the RF generator PA from being destroyed.

[0032] It should be noted that the gating unit 200 can be used to disconnect all N RF driving units 100 from the output terminal Out. That is, the gating unit 200 can not conduct the connection between any target RF driving unit 110 and the output terminal Out, thereby disconnecting all N RF driving units 100 from the output terminal Out, so that the target electric energy DC2 generated by all RF driving units 100 stops being output to the RF generating device PA through the output terminal Out. In this way, the reflected power can be minimized and the RF generating device PA can be better protected.

[0033] Further, when the gating unit 200 switches on the connection between one of the N RF driving units 100 and the output terminal Out, the RF driving unit 100 switched on by the gating unit 200 is the target RF driving unit 110 .

[0034] In one or more embodiments, the voltage value of the target electric energy DC2 generated by at least one RF driving unit 100 is smaller than the second preset value, thereby ensuring that the RF generating device PA is not destroyed.

[0035] In one or more embodiments, the DC power supply DC may include a DC source that outputs DC power DC1, and may also include an AC source that outputs AC power and a rectifier device, wherein the rectifier device is used to rectify the AC power into DC power DC1, so that the DC power supply DC outputs DC power DC1.

[0036] In one or more embodiments, each RF driving unit 100 can convert DC power DC1 into DC target power DC2 according to the needs of the RF generating device PA, or convert DC power DC1 into AC target power DC2 to drive the RF generating device PA.

[0037] In one or more embodiments, the RF generator PA may be driven according to the target power DC2 to generate RF power and transmit the RF power to a load. The RF generator PA may include a RF power amplifier.

[0038] Please also refer to Figure 2 , Figure 2 FIG. 1 is a block diagram of a radio frequency driving unit in an embodiment of the present application. Figure 1 、 Figure 2 As shown, each RF driving unit 100 includes a voltage regulating module 120 and an energy storage module 130, which are sequentially connected between the input terminal In and the gating unit 200. The voltage regulating module 120 is used to receive and regulate the voltage value of the DC power DC1 to obtain the target power DC2, and the energy storage module 130 is used to charge according to the target power DC2 to store electrical energy.

[0039] Therefore, the RF driving device 10 in the present application can realize the conversion and storage of direct current energy DC1 by configuring the RF driving unit 100 to include a voltage regulating module 120 and an energy storage module 130 .

[0040] In one or more embodiments, the voltage regulation module 120 and the energy storage module 130 may also be connected to the ground GND.

[0041] Please also refer to Figure 3 , Figure 3 FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 2 、 Figure 3As shown, the RF driving device 10 further includes at least one bleeder circuit 300. The at least one bleeder circuit 300 includes N first bleeder circuits 310, the N first bleeder circuits 310 corresponding one-to-one to the N RF driving units 100, and each first bleeder circuit 310 is connected between the voltage regulating module 120 and the energy storage module 130 of the corresponding RF driving unit 100, and is connected to the ground GND; and / or the at least one bleeder circuit 300 includes a second bleeder circuit 320, the second bleeder circuit 320 is connected between the gating unit 200 and the output terminal Out, and is connected to the ground GND. Each discharge circuit 300 has a first connection state and a second connection state. Each discharge circuit 300 is configured to continuously transmit the target electric energy DC2 to the energy storage module 130 or the radio frequency generator PA when in the first connection state, and to stop transmitting the target electric energy DC2 to the energy storage module 130 or the radio frequency generator PA when in the second connection state, and to discharge the electric energy of the energy storage module 130 or the radio frequency generator PA to the ground GND accordingly.

[0042] Therefore, the RF driving device 10 in the present application can discharge the electric energy of the energy storage module 130 or the RF generating device PA to the ground GND when needed by providing the discharge circuit 300 connected to the corresponding position.

[0043] It should be noted that the first discharge circuit 310 and the second discharge circuit 320 differ only in connection positions. In fact, the first discharge circuit 310 and the second discharge circuit 320 can have the same circuit structure, that is, each first discharge circuit 310 and the second discharge circuit 320 has a first connection state and a second connection state.

[0044] In particular, each first discharge circuit 310 can be configured to continuously transmit the target power DC2 to the energy storage module 130 when in the first connection state, and to stop transmitting the target power DC2 to the energy storage module 130 when in the second connection state, and to discharge the power of the energy storage module 130 to the ground GND accordingly. Each second discharge circuit 320 can be configured to continuously transmit the target power DC2 to the RF generator PA when in the first connection state, and to stop transmitting the target power DC2 to the RF generator PA when in the second connection state, and to discharge the power of the RF generator PA to the ground GND accordingly.

[0045] like Figure 3As shown, the RF driving device 10 further includes a control unit 400, which is connected to at least each bleeder circuit 300 and the gating unit 200, respectively. The control unit 400 is used to control each bleeder circuit 300 to be in the first connection state or the second connection state, and to control the gating unit 200 to selectively conduct the connection between the target RF driving unit 110 and the output terminal Out.

[0046] Therefore, the RF driving device 10 in the present application is provided with a control unit 400 to control the connection state of each discharge circuit 300 and the gating unit 200 .

[0047] like Figure 3 As shown, the RF driving device 10 further includes a parameter acquisition unit 500, which is used to connect to the RF generating device PA to obtain a first parameter P1 of the RF generating device PA. The control unit 400 is also connected to the parameter acquisition unit 500, and the control unit 400 is further used to receive the first parameter P1, and when the first parameter P1 does not meet the first preset condition, control the gating unit 200 to conduct according to the first parameter P1. Figure 1 The connection between the target RF driving unit 110 and the output terminal Out is as shown in FIG. Figure 1 The target electric energy DC2 generated by the target RF driving unit 110 is output to the RF generating device PA, and when the first parameter P1 meets the first preset condition, the control gating unit 200 is controlled to disconnect the connection between any RF driving unit 100 and the output terminal Out, so that the target electric energy DC2 generated by any RF driving unit 100 stops being output to the RF generating device PA.

[0048] Therefore, the RF driving device 10 in the present application can obtain the first parameter P1 of the RF generating device PA by setting the parameter obtaining unit 500, so that the control unit 400 can control the gating unit 200 according to the first parameter P1.

[0049] In one or more embodiments, the control unit 400 is further configured to control each discharge circuit 300 to be in a first connection state when the first parameter P1 does not satisfy a first preset condition, so that the target electric energy DC2 is continuously transmitted to the energy storage module 130 or the RF generator PA; and to control each discharge circuit 300 to be in a second connection state when the first parameter P1 satisfies the first preset condition, so that the target electric energy DC2 stops being transmitted to the energy storage module 130 or the RF generator PA, and accordingly discharge the electric energy of each energy storage module 130 and / or the RF generator PA to the ground GND.

[0050] Therefore, in the RF driving device 10 of the present application, the control unit 400 is specifically configured to control each discharge circuit 300 to be in the first connection state when the first parameter P1 does not satisfy the first preset condition, and to control each discharge circuit 300 to be in the second connection state when the first parameter P1 satisfies the first preset condition.

[0051] Specifically, when the first parameter P1 does not meet the first preset condition, it indicates that the reflected power is low, and the target power DC2 can be normally output to the RF generator PA without controlling any bleeder circuit 300 to be in the second connection state. However, when the first parameter P1 meets the first preset condition, it indicates that the reflected power is high, and the target power DC2 cannot be continuously output to the RF generator PA. To protect the RF generator PA, each bleeder circuit 300 is controlled to be in the second connection state, so that the target power DC2 stops being transmitted to the energy storage module 130 or the RF generator PA, and the power of each energy storage module 130 and / or the RF generator PA is accordingly discharged to ground GND, thereby providing the fastest protection.

[0052] Furthermore, when at least one discharge circuit 300 includes N first discharge circuits 310 and one second discharge circuit 320, when the RF generating device PA needs to be protected, the power of each energy storage module 130 and the RF generating device PA can be discharged to the ground GND, which can further ensure that the RF generating device PA is not destroyed.

[0053] In one or more embodiments, the first parameter P1 includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to the first preset value.

[0054] Therefore, the above-mentioned RF driving device 10 in the present application configures the first parameter P1 to include a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to the first preset value. Therefore, when the reflected power value is too large, that is, when the reflected power value is greater than or equal to the first preset value, the control unit 400 can control the gating unit 200 to disconnect the connection between any RF driving unit 100 and the output terminal Out, and control each discharge circuit 300 to be in the second connection state, thereby protecting the RF generating device PA.

[0055] In one or more embodiments, the first parameter P1 may also include one or more parameters such as voltage standing wave ratio, reflection coefficient, transmission power ratio, etc., and the first preset condition is the relationship between the corresponding parameter and the first preset value.

[0056] Please also refer to Figure 4 , Figure 4 FIG. 1 is a block diagram of a discharge circuit in an embodiment of the present application. Figure 3 、 Figure 4As shown, each discharge circuit 300 includes a switch module 330, a first discharge module 340, and a second discharge module 350. The switch module 330 is connected between the voltage regulation module 120 and the energy storage module 130 or between the gating unit 200 and the output terminal Out. The switch module 330 is configured to be in a first on state or a first off state to respectively open or close the connection path between the voltage regulation module 120 and the energy storage module 130, thereby correspondingly allowing the target power DC2 to be continuously transmitted or stopped from being transmitted to the energy storage module 130; or to respectively open or close the connection path between the gating unit 200 and the output terminal Out, thereby correspondingly allowing the target power DC2 to be continuously transmitted or stopped from being transmitted to the radio frequency generating device PA. The first discharge module 340 is connected in parallel with the switch module 330 between the voltage regulation module 120 and the energy storage module 130, or between the selection unit 200 and the output terminal Out, and is connected to the ground GND. The first discharge module 340 is configured to be in a second on-state or a second off-state to discharge or stop discharging the electrical energy of the energy storage module 130, or to discharge or stop discharging the electrical energy of the RF generator PA. The second discharge module 350 is connected between the connection point between the switch module 330 and the energy storage module 130 and the ground GND, or between the connection point between the switch module 330 and the output terminal Out and the ground GND. The second discharge module 350 is configured to be in a third on-state or a third off-state to discharge or stop discharging the electrical energy of the energy storage module 130, or to discharge or stop discharging the electrical energy of the RF generator PA. Specifically, when the switch module 330 is in the first on-state, the first discharge module 340 is in the second off-state, and the second discharge module 350 is in the third off-state, the corresponding discharge circuit 300 is in the first connection state; when the switch module 330 is in the first off-state, the first discharge module 340 is in the second on-state and / or the second discharge module 350 is in the third on-state, the corresponding discharge circuit 300 is in the second connection state.

[0057] Thus, the RF driving device 10 of the present application sets the switch module 330 of each discharge circuit 300 in the first on state or the first off state to respectively open or close the connection path between the voltage regulation module 120 and the energy storage module 130 or between the gating unit 200 and the output terminal Out, thereby correspondingly achieving continuous transmission or stopping of the target electric energy DC2 to the energy storage module 130 or the RF generator PA. Furthermore, by setting the first discharge module 340 and the second discharge module 350, not only can the electric energy of the energy storage module 130 or the RF generator PA be discharged or stopped, but the first discharge module 340 and / or the second discharge module 350 can also be selected to discharge the electric energy of the energy storage module 130 or the RF generator PA according to actual needs, thereby better protecting the RF generator PA.

[0058] In one or more embodiments, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state. When the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third conduction state, the corresponding discharge circuit 300 is in the first discharge connection state. When the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third disconnection state, the corresponding discharge circuit 300 is in the second discharge connection state. When the first discharge module 340 is in the second disconnection state and the second discharge module 350 is in the third conduction state, the corresponding discharge circuit 300 is in the third discharge connection state. The discharge rate of the electrical energy of any discharge circuit 300 to the energy storage module 130 or the RF generator PA decreases in sequence when the discharge circuit 300 is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively.

[0059] Thus, the above-mentioned RF driving device 10 of the present application, by configuring the second connection state to include the first discharge connection state, the second discharge connection state and the third discharge connection state, and by configuring any discharge circuit 300 to sequentially reduce the discharge speed of the electric energy of the energy storage module 130 or the RF generating device PA when they are in the first discharge connection state, the second discharge connection state and the third discharge connection state, when the RF generating device PA needs to be protected, each discharge circuit 300 can be in one of the first discharge connection state, the second discharge connection state and the third discharge connection state according to actual needs, thereby effectively preventing the RF generating device PA from being destroyed.

[0060] In one or more embodiments, the parameter acquisition unit 500 may further be connected to the energy storage module 130 or the voltage regulation module 120 to obtain a voltage value at the energy storage module 130 or a voltage value at the voltage regulation module 120. The control unit 400 is further configured to receive the voltage value at the energy storage module 130 or the voltage value at the voltage regulation module 120, and when the drive regulation unit is in the second connection state, control each discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state according to the voltage value at the energy storage module 130 or the voltage regulation module 120.

[0061] Furthermore, the control unit 400 controls each discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively, based on the relationship between the voltage value at the energy storage module 130 or the voltage value at the voltage regulation module 120 and the first voltage threshold, the second voltage threshold, and the third voltage threshold. The first voltage threshold, the second voltage threshold, and the third voltage threshold decrease in sequence.

[0062] Therefore, the control unit 400 determines whether the RF generating device PA needs to be protected based on the relationship between the reflected power value and the first preset value, and determines the protection strength required for the RF generating device PA based on the relationship between the voltage value at the energy storage module 130 or the voltage value at the voltage regulation module 120 and the first voltage threshold, the second voltage threshold, and the third voltage threshold, thereby effectively preventing the RF generating device PA from being destroyed.

[0063] Please also refer to Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a discharge circuit in an embodiment of the present application. Figure 3 、 Figure 5 As shown, the first discharge module 340 includes a first diode D1, a first inductor L1, and a first switch S1. The cathode of the first diode D1 is connected to the connection point between the voltage regulation module 120 or the gating unit 200 and the switch module 330. The anode of the first diode D1 is connected to one end of the first inductor L1. The other end of the first inductor L1 is connected to the connection point between the switch module 330 and the energy storage module 130 or the output terminal Out. One end of the first switch S1 is connected to the connection point between the anode of the first diode D1 and one end of the first inductor L1. The other end of the first switch S1 is grounded GND. The first switch S1 is turned on or off to correspondingly place the first discharge module 340 in the second on state or the second off state.

[0064] Therefore, the RF driving device 10 in the present application, by providing the first discharge module 340 coordinated with the first diode D1, the first inductor L1, and the first switch S1, can utilize the unidirectional conduction characteristic of the first diode D1 when the first switch S1 is disconnected to prevent the first inductor L1 from being charged or discharged. Furthermore, when the first switch S1 is turned on, based on the voltage difference across the first inductor L1, the electric energy of the energy storage module 130 or the RF generating device PA enters the first inductor L1 through the other end of the first inductor L1, thereby charging the first inductor L1, and continuously discharges the electric energy to the ground GND through the first switch S1.

[0065] like Figure 3 、 Figure 5 As shown, the second discharge module 350 includes a first resistor R1 and a second switch S2. One end of the first resistor R1 is connected to the connection point between the switch module 330 and the energy storage module 130 or the output terminal Out. The other end of the first resistor R1 is selectively connected to the ground GND through the second switch S2. The second switch S2 is turned on or off to correspondingly place the second discharge module 350 in a third on state or a third off state.

[0066] It should be noted that the energy consumption rate of the first resistor R1 is lower than the energy discharge rate of the first inductor L1, so that the energy discharge rate of the second discharge module 350 is lower than the energy discharge rate of the first discharge module 340, and thus when the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third conduction state, the drive adjustment unit can be in the first discharge connection state; when the first discharge module 340 is in the second conduction state and the second discharge module 350 is in the third disconnection state, the drive adjustment unit can be in the second discharge connection state; when the first discharge module 340 is in the second disconnection state and the second discharge module 350 is in the third conduction state, the drive adjustment unit can be in the third discharge connection state.

[0067] like Figure 3 、 Figure 5 As shown, the switch module 330 includes a third switch S3, which is connected between the voltage regulation module 120 and the energy storage module 130 or between the gating module and the output terminal Out. The third switch S3 has a first on state and a first off state.

[0068] In one or more embodiments, the control unit 400 can control each discharge circuit 300 to be in the first connection state or the second connection state by respectively controlling the on or off state of the first switch S1, the second switch S2, and the third switch S3, that is, controlling each discharge circuit 300 to be in any one of the first connection state, the first discharge connection state, the second discharge connection state, and the third discharge connection state.

[0069] Please also refer to Figure 6 , Figure 6 FIG. 1 is a circuit diagram of a radio frequency driving unit in an embodiment of the present application. Figure 1 、 Figure 6 As shown, the voltage regulation module 120 may include a fourth switch S4, a second diode D2 and a second inductor L2. The fourth switch S4 and the second inductor L2 are connected in sequence between the DC power supply DC and the energy storage module 130. The cathode of the second diode D2 is connected to the connection point between the fourth switch S4 and the second inductor L2. The anode of the second diode D2 is grounded GND.

[0070] like Figure 1 、 Figure 6 As shown, the energy storage module 130 may include a first capacitor C1 , one end of the first capacitor C1 is connected to a connection point between the second inductor L2 and the gating unit 200 , and the other end of the second capacitor is grounded GND.

[0071] Therefore, the fourth switch S4 , the second diode D2 , the second inductor L2 and the first capacitor C1 of the voltage regulating module 120 form a buck circuit to regulate the voltage value of the input direct current power DC1 , thereby obtaining the target power DC2 .

[0072] In one or more embodiments, the voltage regulation module 120 may also be a voltage regulation circuit such as a boost circuit, a boost-buck circuit, or the like.

[0073] In one or more embodiments, the control unit 400 may be further connected to the voltage regulation module 120. Specifically, the control unit 400 may control the fourth switch S4 to alternately turn on and off at a certain duty cycle to adjust the voltage value of the input DC power DC1, thereby obtaining the target power DC2.

[0074] See also Figure 7 , Figure 7 FIG. 1 is a block diagram of a radio frequency driving device in another embodiment of the present application. Figure 7 As shown, the gating unit 200 may include at least one fifth switch S5. The number of the fifth switches S5 may be N, and the N fifth switches S5 correspond to the N RF driving units 100 one by one. Each fifth switch S5 is connected between the corresponding RF driving unit 100 and the output terminal Out. The conduction or disconnection of each fifth switch S5 enables the gating unit 200 to selectively conduct the connection between one of the target RF driving units 110 and the output terminal Out. Figure 7 As shown, the fifth switch S5 corresponding to the target RF driving unit 110 is turned on, and the other N-1 fifth switches S5 are turned off, so that the target RF driving unit 110 is connected to the output end Out, and the other N-1 RF driving units 100 are disconnected from the output end Out.

[0075] In one or more embodiments, the number of the fifth switch S5 may also be one ( Figure 7 (not shown), that is, the gating unit 200 may also include only one fifth switch S5, and the fifth switch S5 may be a single-pole multi-throw switch, such as a single-pole N-throw switch. The fixed end of the fifth switch S5 is connected to the output end Out, and the fifth switch S5 also includes N free ends, the N free ends are respectively connected to the N RF driving units 100, and the movable end of the fifth switch S5 is selectively connected to the N free ends, and then selectively connected to the N RF driving units 100, so that the gating unit 200 selectively connects one of the target RF driving units 110 and the output end Out. When the movable end of the fifth switch S5 is left floating, the movable end of the fifth switch S5 is disconnected from the N RF driving units 100, so that the gating unit 200 disconnects all N RF driving units 100 from the output end Out.

[0076] In one or more embodiments, the gating unit 200 includes Figure 7 In the structure shown, the control unit 400 can control the conduction or disconnection of each fifth switch S5 to enable the gating unit 200 to selectively connect one of the target RF driving units 110 to the output terminal Out. Alternatively, the control unit 400 can control all the fifth switches S5 to be disconnected to disconnect all the N RF driving units 100 from the output terminal Out, so that the target electric energy DC2 generated by all the RF driving units 100 stops being output to the RF generating device PA through the output terminal Out.

[0077] In one or more embodiments, when the gating switch includes a single-pole N-throw switch, the control unit 400 can control the movable end to be connected to one of the free ends, so that the gating unit 200 selectively connects one of the target RF driving units 110 to the output end Out. Alternatively, the control unit 400 can also control the movable end to not be connected to any free end, thereby disconnecting all N RF driving units 100 from the output end Out, so that the target electric energy DC2 generated by all RF driving units 100 stops being output to the RF generating device PA through the output end Out.

[0078] In one or more embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0079] The RF driving device 10 of the present application, through the above-mentioned structure, can select at most one target power DC2 to be output to the RF generating device PA according to the specific situation of the RF generating device PA, and cooperate with the use of a discharge circuit 300 with multiple discharge current connection states to quickly and effectively protect the RF generating device PA to prevent the RF generating device PA from being destroyed. It can also switch the target power DC2 for output to meet the actual needs of the load.

[0080] See also Figure 8 , Figure 8FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 8 As shown, the present application further provides a radio frequency power supply system 1000, which includes a direct current power supply DC, a radio frequency generating device PA, and the radio frequency driving device 10 in any of the aforementioned embodiments.

[0081] Please refer again Figure 1 .like Figure 1 As shown, the RF driving device 10 includes an input terminal In, an output terminal Out, N RF driving units 100, and a gating unit 200. The N RF driving units 100 are connected in parallel between the input terminal In and the gating unit 200. The gating unit 200 is connected between the N RF driving units 100 and the output terminal Out. The input terminal In is used to connect to a DC power supply DC, and the output terminal Out is used to connect to a RF generator PA. When the input terminal In and the output terminal Out of the RF driving device 10 are connected to the DC power supply DC and the RF generator PA, respectively, each RF driving unit 100 is used to receive DC power DC1 output by the DC power supply DC through the input terminal In and convert the DC power DC1 into target power DC2. The gating unit 200 is used to selectively connect one target RF driving unit 110 to the output terminal Out, so that the target power DC2 generated by the target RF driving unit 110 is output to the RF generator PA through the output terminal Out. The voltage values ​​of the target electric energy DC2 generated by the N RF driving units 100 are different from each other, and when the target electric energy DC2 of the target RF driving unit 110 is output to the RF generating device PA, the target electric energy DC2 of the other N-1 RF driving units 100 stops being output to the RF generating device PA, wherein N≥2.

[0082] The more specific structure of the RF driving device 10 can be found in the relevant content of the RF driving device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0083] The RF driving device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can select at most one target power DC2 to be output to the RF generating device PA according to the specific situation of the RF generating device PA, and cooperate with the use of a discharge circuit 300 with multiple discharge current connection states to quickly and effectively protect the RF generating device PA to prevent the RF generating device PA from being destroyed. It can also switch the target power DC2 for output to meet the actual needs of the load.

[0084] In the multiple embodiments provided in this application, it should be understood that the disclosed devices and equipment can be implemented in other ways. For example, the device embodiments described above are merely illustrative; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0085] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0086] In addition, the functional units in various embodiments of the present invention may be integrated into a single processing unit, each unit may be physically included separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or hardware plus software functional units.

[0087] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A radio frequency driving device, characterized in that: The device comprises an input end, an output end, N radio frequency driving units, and a gating unit, wherein the N radio frequency driving units are connected in parallel between the input end and the gating unit, and the gating unit is connected between the N radio frequency driving units and the output end. The input end is used to be connected to a DC power supply, and the output end is used to be connected to a radio frequency generating device. When the input end and the output end of the radio frequency driving device are respectively connected to the DC power supply and the radio frequency generating device, each radio frequency driving unit is used to receive the DC power output by the DC power supply through the input end and convert the DC power into target power. The gating unit is used to selectively conduct the connection between one of the target RF driving units and the output end, so that the target electric energy generated by the target RF driving unit is output to the RF generating device through the output end; The voltage values ​​of the target electric energy generated by the N radio frequency drive units are different from each other, and when the target electric energy of the target radio frequency drive unit is output to the radio frequency generating device, the target electric energy of the other N-1 radio frequency drive units stops being output to the radio frequency generating device, wherein N ≥ 2; Wherein, each of the RF driving units includes a voltage regulating module and an energy storage module, and the voltage regulating module and the energy storage module are sequentially connected between the input end and the gating unit; the RF driving device also includes at least one discharge circuit, and each discharge circuit includes a switch module, a first discharge module and a second discharge module, the switch module is connected between the voltage regulating module and the energy storage module or between the gating unit and the output end, the first discharge module and the switch module are connected in parallel between the voltage regulating module and the energy storage module or between the gating unit and the output end, and are connected to the ground, and the second discharge module is connected between the connection point between the switch module and the energy storage module and the ground or between the connection point between the switch module and the output end and the ground.

2. The radio frequency driving device according to claim 1, characterized in that: The voltage regulating module is used to receive and regulate the voltage value of the direct current electric energy to obtain the target electric energy, and the energy storage module is used to charge according to the target electric energy to store electric energy.

3. The radio frequency driving device according to claim 2, characterized in that: The at least one bleeder circuit includes N first bleeder circuits, the N first bleeder circuits correspond one-to-one to the N RF drive units, and each first bleeder circuit is connected between the voltage regulation module and the energy storage module of the corresponding RF drive unit and is connected to the ground; and / or the at least one bleeder circuit includes a second bleeder circuit, the second bleeder circuit is connected between the gating unit and the output end and is connected to the ground; Each discharge circuit has a first connection state and a second connection state. Each discharge circuit is configured to continuously transmit the target electrical energy to the energy storage module or the RF generating device when in the first connection state, and to stop transmitting the target electrical energy to the energy storage module or the RF generating device when in the second connection state, and to discharge the electrical energy of the energy storage module or the RF generating device to ground accordingly.

4. The radio frequency driving device according to claim 3, characterized in that: The RF driving device further includes a control unit, which is connected to at least each of the discharge circuits and the gating unit, respectively, and is configured to control each of the discharge circuits to be in the first connection state or the second connection state, and to control the gating unit to selectively conduct the connection between the target RF driving unit and the output end.

5. The radio frequency driving device according to claim 4, characterized in that: The RF driving device further includes a parameter acquisition unit, which is configured to connect to the RF generating device to acquire a first parameter of the RF generating device; The control unit is also connected to the parameter acquisition unit, and is further used to receive the first parameter. When the first parameter does not meet the first preset condition, the control unit controls the gating unit to connect the connection between the target RF driving unit and the output end according to the first parameter, so that the target electric energy generated by the target RF driving unit is output to the RF generating device; and when the first parameter meets the first preset condition, the control unit controls the gating unit to disconnect the connection between any RF driving unit and the output end, so that the target electric energy generated by any RF driving unit stops being output to the RF generating device.

6. The radio frequency driving device according to claim 5, characterized in that: The control unit is further configured to, when the first parameter does not satisfy the first preset condition, control each of the discharge circuits to be in the first connection state so that the target electric energy is continuously transmitted to the energy storage module or the radio frequency generating device; and, when the first parameter satisfies the first preset condition, control each of the discharge circuits to be in the second connection state so that the target electric energy stops being transmitted to the energy storage module or the radio frequency generating device, and discharge the electric energy of each energy storage module and / or the radio frequency generating device to ground accordingly.

7. The radio frequency driving device according to claim 6, characterized in that: The first parameter includes a reflected power value, and the first preset condition is that the reflected power value is greater than or equal to a first preset value.

8. The radio frequency driving device according to claim 3, characterized in that: The switch module is configured to be in a first on state or a first off state, so as to respectively open or open a connection path between the voltage regulating module and the energy storage module, thereby correspondingly causing the target electric energy to continue to be transmitted or stop being transmitted to the energy storage module; or to respectively open or open a connection path between the gating unit and the output end, thereby correspondingly causing the target electric energy to continue to be transmitted or stop being transmitted to the radio frequency generating device; The first discharge module is configured to be in a second on state or a second off state, so as to discharge or stop discharging the electric energy of the energy storage module; or discharge or stop discharging the electric energy of the radio frequency generating device; The second discharge module is configured to be in a third on state or a third off state, so as to discharge or stop discharging the electric energy of the energy storage module; or discharge or stop discharging the electric energy of the radio frequency generating device; When the switch module is in the first on-state, the first discharge module is in the second off-state, and the second discharge module is in the third off-state, the corresponding discharge circuit is in the first connection state; when the switch module is in the first off-state, the first discharge module is in the second on-state and / or the second discharge module is in the third on-state, the corresponding discharge circuit is in the second connection state.

9. The radio frequency driving device according to claim 8, characterized in that: The second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the first discharge connection state; when the first discharge module is in the second conduction state and the second discharge module is in the third disconnection state, the corresponding discharge circuit is in the second discharge connection state; when the first discharge module is in the second disconnection state and the second discharge module is in the third conduction state, the corresponding discharge circuit is in the third discharge connection state; Wherein, when any discharge circuit is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, the discharge speed of the electric energy of the energy storage module or the radio frequency generating device decreases successively.

10. A radio frequency power supply system, characterized in that: The invention comprises a direct current power supply, a radio frequency generating device and the radio frequency driving device according to any one of claims 1 to 9.

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