Multi-phase electrode assembly, air microplasma generating device and aerosol monitoring device

Through multi-phase electrode assembly and air microplasma generating device, the problem that existing aerosol detection methods are difficult to achieve real-time online monitoring is solved, especially in high temperature or high pressure environments, efficient and stable detection of particulate matter such as sodium aerosol is achieved.

CN119676926BActive Publication Date: 2025-05-06CHENGDU ALIEBN SCI & TECH CO LTD
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Patent Information

Application Number
CN202510180732.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-02-19
Publication Date
2025-05-06
Estimated Expiration
2045-02-19

AI Technical Summary

Technical Problem

The existing aerosol detection methods are difficult to achieve real-time online monitoring, especially in high temperature or high pressure environments, and the equipment is large in size and complex in operation, which cannot meet the needs of on-site real-time detection.

Method used

Using a multi-phase electrode assembly and an air microplasma generator device, a stable air plasma is formed through an electrode pair arranged in an annular array and a passivated metal rod electrode, and uniform gas treatment and detection are achieved through a gas suction ring and an air nozzle.

Benefits of technology

It improves the stability of discharge and the plasma withstandability, reduces the voltage required to maintain the normal operation of the plasma, realizes real-time online analysis of particulate matter such as sodium aerosol, and improves the accuracy and stability of detection.

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Abstract

The present application provides a multi-phase electrode assembly, an air microplasma generating device and an aerosol monitoring device, wherein the multi-phase electrode assembly includes one or more groups of electrode pairs arranged in a ring array, and the electrode pairs are connected in parallel with each other, and each group of the electrode pairs includes two metal rod electrodes located on the same axis, and the two discharge ends of the two metal rod electrodes are arranged oppositely, and the gap between the two discharge ends forms an air discharge area. The air microplasma generating device includes a multi-phase electrode assembly, and the aerosol monitoring device includes an air microplasma generating device. The present application effectively improves the discharge efficiency through one or more parallel electrode pairs, thereby reducing the maintenance voltage required for air discharge, reducing the current in the discharge unit and the current limiter, thereby reducing the thermal effect therein, thereby improving the stability and service life of the entire device.
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Description

Technical Field

[0001] The present application belongs to the technical field of aerosol detection in air, and more specifically, relates to a multi-phase electrode assembly, an air microplasma generating device and an aerosol monitoring device. Background Art

[0002] In many industrial fields, the generation of aerosols is often accompanied by high temperature, high pressure or chemical reactions. These aerosols may contain heavy metal elements, acidic substances and toxic gases, which directly threaten production safety and employee health. For example, in industries such as metallurgy, chemical industry, and electric power, harmful elements in aerosols may cause safety accidents such as equipment corrosion, fire, and explosion, and even cause occupational diseases of workers' respiratory and cardiovascular systems. Therefore, real-time and accurate monitoring of the elemental composition in aerosols is crucial to ensure industrial production safety. By monitoring harmful elements in aerosols, abnormal components and concentration changes can be discovered in a timely manner, and potential safety hazards can be warned in advance.

[0003] At present, conventional aerosol detection methods include gravity sedimentation, filtration, laser scattering, etc. Although these methods have their own applications, they also have many limitations. Gravity sedimentation and filtration methods rely on sample collection and subsequent analysis, which usually takes a long time and is difficult to achieve real-time online monitoring; laser scattering can achieve rapid monitoring, but it often relies on carrier gas, and the equipment is large, the operation is complicated, and it is difficult to apply in high temperature or high pressure environments.

[0004] In addition, microwave plasma spectroscopy and mass spectrometry have also been applied to the field of aerosol detection. Although microwave induced plasma spectroscopy (MIP) can provide efficient elemental analysis, it often requires larger equipment and has certain challenges in stability and adaptability in high-temperature environments; mass spectrometry, especially technology based on inductively coupled plasma mass spectrometry (ICP-MS), can perform accurate elemental analysis, but requires sample pretreatment, and the equipment is large and expensive, which cannot meet the needs of on-site real-time detection. The most critical thing is that both MIP and ICP plasma usually require inert gas as the working gas to maintain plasma operation. Due to the difference in thermal conductivity between the monatomic molecules of the inert gas and the diatomic molecules such as nitrogen / oxygen in the air, MIP / ICP plasmas usually cannot withstand the introduction of large amounts of air samples.

[0005] In the prior art, although dielectric barrier discharge (DBD) can form a relatively stable air plasma, due to its discharge characteristics, the temperature of the plasma generated by DBD is relatively low, making it difficult to effectively excite the granular sodium aerosol, thus affecting its application in aerosol particle analysis. Various other analysis methods require separation or enrichment steps, which cannot meet the technical requirements of online real-time analysis of sodium aerosol. Summary of the invention

[0006] To solve the above problems, the technical solution adopted in the present application is: first, a multi-phase electrode assembly is provided, including one or more groups of electrode pairs arranged in a ring array, each group of the electrode pairs includes two metal rod electrodes located on the same axis, and the two discharge ends of the two metal rod electrodes are arranged opposite to each other, and the gap between the two discharge ends forms an air discharge area.

[0007] Optionally, the discharge end of the metal rod electrode is in the shape of an inner arc or a plane.

[0008] Optionally, the metal rod electrode is passivated.

[0009] Optionally, the discharge end of the metal rod electrode is provided with one or more grooves, and the central axis of the groove is the same as the central axis of the metal rod electrode.

[0010] Secondly, the present application also provides an air microplasma generating device, including the multi-phase electrode assembly provided above, and also including an electrode pair guide disk, an electrode fixing assembly, an air nozzle and a gas suction ring, the metal rod electrode is movably connected to the electrode pair guide disk, the electrode fixing assembly is used to fix the metal rod electrode on the electrode pair guide disk, the air nozzle and the gas suction ring are respectively arranged on both sides of the multi-phase electrode assembly, the air nozzle is used to spray out the gas to be tested sucked in from the outside air, the gas suction ring is a hollow annular structure, and a plurality of suction holes are evenly arranged along its length direction, and the gas suction ring is connected to a negative pressure mechanism.

[0011] Optionally, it also includes a spectrum receiving probe and a three-dimensional adjustment mechanism, wherein the three-dimensional adjustment mechanism is respectively connected to the spectrum receiving probe and the air nozzle, and is used to adjust the positions of the spectrum receiving probe and the air nozzle.

[0012] Optionally, the three-dimensional adjustment mechanism includes an X-axis translation stage, a Y-axis translation stage and a Z-axis guide rod, the Z-axis guide rod is perpendicular to the electrode pair guide disk and fixedly connected to the electrode pair guide disk, the spectral receiving probe is connected to the Y-axis translation stage, the Y-axis translation stage is connected to the X-axis translation stage, and the X-axis translation stage and the air nozzle are both slidably connected to the Z-axis guide rod.

[0013] Optionally, the air nozzle is aimed at the air discharge area; the spectrum receiving probe passes through the center of the gas suction ring and is located directly above the air discharge area, and the focus is aimed at the center of the air discharge area.

[0014] Optionally, the gas suction ring is slidably connected to the Z-axis guide rod.

[0015] Again, the present application also provides an aerosol monitoring device, including the above-mentioned air microplasma generating device, and also including an air sampling pump, a spectrometer, a controller, an analysis module and a power supply module, wherein the spectrometer is connected to the spectrum receiving probe, the output end of the air sampling pump is connected to the air nozzle, the analysis module is connected to the spectrometer, the controller is respectively connected to the spectrometer, the air microplasma generating device, and the air sampling pump, and the power supply module is used to power the spectrometer, the air sampling pump and the air microplasma generating device. The beneficial effect of the multi-phase electrode assembly provided by the present application is that the discharge electrode area is effectively reduced by the design of the groove, and the density of the discharge current is effectively increased without changing other discharge conditions, thereby improving the stability of the discharge and the bearing capacity of the plasma, and reducing the voltage required to maintain the normal operation of the plasma. The multi-phase design can reduce the current in the discharge unit and the current limiter, thereby greatly reducing the thermal effect therein, thereby improving the stability and service life of the entire device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 A schematic diagram of the planar structure of a multi-phase electrode assembly provided in an embodiment of the present application;

[0018] Figure 2 A schematic cross-sectional view of a metal rod electrode in a multi-phase electrode assembly provided in an embodiment of the present application Figure 1 ;

[0019] Figure 3 A side view of a metal rod electrode in a multi-phase electrode assembly provided in an embodiment of the present application Figure 1 ;

[0020] Figure 4 A schematic cross-sectional view of a metal rod electrode in a multi-phase electrode assembly provided in an embodiment of the present application Figure 2 ;

[0021] Figure 5 A side view of a metal rod electrode in a multi-phase electrode assembly provided in an embodiment of the present application Figure 2 ;

[0022] Figure 6 A schematic diagram of the structure of an air microplasma generating device provided in an embodiment of the present application;

[0023] Figure 7 A schematic diagram of the structure of a gas suction ring in an air microplasma generating device provided in an embodiment of the present application;

[0024] Figure 8 A schematic diagram of the structure of an aerosol monitoring device provided in an embodiment of the present application;

[0025] Fig. 9 This is a test chart when the sodium concentration in the air is 100 ppb provided in the embodiment of the present application;

[0026] Fig.10 This is a test chart when the sodium concentration in the air is 200 ppb provided in the embodiment of the present application;

[0027] Fig.11 This is a test chart when the sodium concentration in the air is 500 ppb provided in the embodiment of the present application;

[0028] Fig.12 This is a test chart provided in an embodiment of the present application when the sodium concentration in the air is 1000 ppb.

[0029] Among them, the reference numerals in the figure are:

[0030] 1. Metal rod electrode; 101. Groove; 102. Annular groove; 2. Electrode pair guide plate; 3. Electrode fixing assembly; 4. Air nozzle; 5. Spectrum receiving probe; 6. Gas suction ring; 61. Suction hole; 7. X-axis displacement stage; 8. Y-axis displacement stage; 9. Z-axis guide rod; 10. Air microplasma generating device; 11. Air sampling pump; 12. Spectrometer; 13. Analysis module; 14. Power module; 15. Voltage conversion module; 16. Controller; 17. Shell. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0032] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0033] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] In some embodiments of the present application, see Figure 1 , the number of electrode pairs is usually one to three groups.

[0036] After different combination experiments, the applicant found that using one to three sets of electrode pairs can achieve better discharge effect and service life within a controllable cost range. In other embodiments of the present application, the number of electrode pairs can also be four, five, six, etc., which is not limited in the present application.

[0037] Due to manufacturing errors, there is inevitably an electric field difference between the discharge electrodes, which will limit the synchronization and stability of the discharge. Reducing or eliminating this difference is an effective way to improve the discharge effect. The traditional electrode discharge form is to use a plate or the end face of a metal rod for discharge. Due to the corner effect, the discharge electric field difference easily causes the discharge plasma to be disturbed, thereby affecting the stability of the plasma. In order to overcome this shortcoming, in some embodiments of the present application, refer to Figure 2-Figure 5 The present application improves the geometric shape of the electrode, and changes the discharge end of the metal rod electrode 1 from the original plane to an inner arc shape and undergoes passivation treatment. Passivation discharge is used to avoid the plane corner effect as much as possible, reduce the instability of the electric field between different discharge electrodes, improve the stability of the air discharge micro plasma, and thus improve the stability of the detection instrument.

[0038] In some embodiments of the present application, see Figure 2and Figure 3 The discharge end of the metal rod electrode 1 is provided with a groove 101, and the groove 101 is located at the center of the metal rod electrode 1. Optionally, the groove 101 may be a spherical groove, an arc-shaped groove, or a columnar groove.

[0039] The traditional electrode rod adopts end-face discharge. Assuming that the radius of the electrode rod is r and the discharge current is I, the discharge cross-sectional area is pi*r^2 and the discharge current density is I / pi*r^2. The groove design can effectively reduce the discharge cross-sectional area. Assuming that the radius of the groove 101 is 1 / 2 of the electrode cylinder, its discharge cross-sectional area will be reduced to 3 / 4 of the original area. When the discharge current and the electrode rod diameter remain unchanged, the discharge current density can be increased to 4 / 3 of the original area, thereby increasing the micro plasma density and the sensitivity of the instrument.

[0040] In some embodiments of the present application, see Figure 4-Figure 5 The discharge end of the metal rod electrode 1 is provided with an annular groove 102 , and the central axis of the annular groove 102 is the same as the central axis of the metal rod electrode 1 .

[0041] In other embodiments of the present application, the number of the annular grooves 102 may be 2, 3, etc., and they are coaxially arranged with each other, which is not limited in the present application.

[0042] The use of the annular groove 102 structure can not only increase the discharge current density (same principle as above), but its limited discharge cross section can also ensure its full discharge, thereby ensuring the stability of the air microplasma discharge and the stability of the instrument measurement.

[0043] In some other embodiments of the present application, the groove 101 and the annular groove 102 may also be provided at the discharge end of the metal rod electrode 1 at the same time, which is not limited in the present application.

[0044] In addition, the present application also provides an air microplasma generating device 10 based on a multi-phase electrode assembly, including the multi-phase electrode assembly mentioned above, and also including an electrode pair guide disk 2, an electrode fixing assembly 3, an air nozzle 4 and a gas suction ring 6, the metal rod electrode 1 is movably connected to the electrode pair guide disk 2, the electrode fixing assembly 3 is used to fix the metal rod electrode 1 on the electrode pair guide disk 2, the air nozzle 4 and the gas suction ring 6 are respectively arranged on both sides of the multi-phase electrode assembly, and the air nozzle 4 is used to spray the gas to be tested sucked from the outside, see Figure 7 The gas suction ring 6 is a hollow ring structure, and a plurality of suction holes 61 are evenly arranged along its length direction. The gas suction ring 6 is connected to the negative pressure mechanism.

[0045] The electrode pair guide disk 2 is used to limit the angle of the electrode pair, the electrode fixing assembly 3 is used to fix the metal rod electrode 1 on the electrode pair guide disk 2, the air nozzle 4 is arranged on one side of the multi-phase electrode assembly, and is used to eject the gas to be tested sucked from the outside, and the gas suction ring 6 is arranged on the other side of the multi-phase electrode assembly, and is used to suck away the excess gas to be tested, while maintaining the internal gas flow stability. A plurality of parallel electrode pairs are connected to a power supply, and the gas in the air discharge area is ionized to generate a high-temperature, high-energy plasma. The gas to be tested is sent into the air discharge area through the air nozzle 4 to be exposed to the plasma, and the elements in the gas to be tested are excited and emit characteristic spectra. By analyzing the wavelength and intensity of these spectral lines, the elements present in the sample and their concentrations can be determined. The gas flow stability can be maintained by the adsorption effect of the gas suction ring 6, and the problem of the plasma spectrum being blocked by the traditional single-mouth gas suction nozzle is avoided.

[0046] In some embodiments of the present application, see Figure 6 , and also includes a spectrum receiving probe 5 and a three-dimensional adjustment mechanism, which is respectively connected to the spectrum receiving probe 5 and the air nozzle 4 and is used to adjust the positions of the spectrum receiving probe 5 and the air nozzle 4.

[0047] The spectrum receiving probe 5 is used to receive the air microplasma spectrum generated by the discharge. The front end of the probe is a double convex aspheric head lens, and the focal length is positioned in the middle of the microplasma. The three-dimensional adjustment mechanism is used to control the height and position of the spectrum receiving probe 5 and the air nozzle 4.

[0048] In some embodiments of the present application, see Figure 6 The three-dimensional adjustment mechanism includes an X-axis displacement table 7, a Y-axis displacement table 8 and a Z-axis guide rod 9. The Z-axis guide rod 9 is perpendicular to the electrode pair guide disk 2 and fixedly connected to the electrode pair guide disk 2. The spectrum receiving probe 5 is connected to the Y-axis displacement table 8, the Y-axis displacement table 8 is connected to the X-axis displacement table 7, and the X-axis displacement table 7 and the air nozzle 4 are both slidably connected to the Z-axis guide rod 9.

[0049] The Z-axis guide rod 9 vertically penetrates the electrode pair guide disk 2, and the air nozzle 4 is arranged below the electrode pair guide disk 2, and can slide on the Z-axis guide rod 9 to adjust the height of the air nozzle 4. The X-axis displacement stage 7 is arranged above the electrode pair guide disk 2, and can slide on the Z-axis guide rod 9 to adjust the height of the spectrum receiving probe 5. The Y-axis displacement stage 8 can move along the X-axis direction on the X-axis displacement stage 7 to adjust the position of the spectrum receiving probe 5 in the X-axis direction, and the spectrum receiving probe 5 can move along the Y-axis direction on the Y-axis displacement stage 8 to adjust the position of the spectrum receiving probe 5 in the Y-axis direction. The three-dimensional adjustment mechanism can ensure that the gas to be measured is vertically sampled to the exact center of the air discharge area of ​​multiple electrode pairs, thereby achieving the generation of stable micro plasma, while ensuring that the spectrum receiving probe 5 is located directly above the micro plasma, and the focus is precisely aligned with the center of the micro plasma. Such a design effectively improves the operational flexibility and detection accuracy of the entire device.

[0050] In some embodiments of the present application, the air nozzle 4 is perpendicular to the electrode pair and aligned with the center of the air discharge area; the spectrum receiving probe 5 passes through the center of the gas suction ring 6; the spectrum receiving probe 5 is located directly above the air discharge area and the focus is aligned with the center of the air discharge area.

[0051] By making the injection direction perpendicular to the electrode pair and the injection position located at the center of the electrode air discharge area, the uniform discharge and stability of the discharge microplasma can be ensured, thereby ensuring the stability of the detection results. In addition, by arranging the spectrum receiving probe 5 directly above the microplasma and focusing on the center of the microplasma, the spectrum emitted by the microplasma can be completely collected, thereby ensuring the high sensitivity of the instrument.

[0052] In other embodiments of the present application, the air nozzle 4 may also be parallel to the electrode pair to achieve left and right sampling. Optionally, the air nozzle 4 may also be set at other angles as long as the gas to be measured can be delivered to the electrode air discharge area, which is not limited in the present application.

[0053] In some embodiments of the present application, see Figure 6 , the gas suction ring 6 is slidably connected to the Z-axis guide rod 9. The gas suction ring 6 can slide on the Z-axis guide rod 9 to adjust its height, thereby ensuring the stability of gas flow and the complete reception of the micro plasma spectrum.

[0054] In a third aspect, the present application provides an aerosol monitoring device, see Figure 8, including the air microplasma generating device 10 provided in the second aspect, and also including an air sampling pump 11, a spectrometer 12, a controller 16, an analysis module 13 and a power module 14, the spectrometer 12 is connected to the spectrum receiving probe 5, the output end of the air sampling pump 11 is connected to the air nozzle 4, the analysis module 13 is connected to the spectrometer 12, the controller 16 is respectively connected to the spectrometer 12, the air microplasma generating device 10, and the air sampling pump 11, and the power module 14 is used to supply power to the spectrometer 12, the air sampling pump 11 and the air microplasma generating device 10.

[0055] The air sampling pump 11 inhales the gas to be tested from the outside and transports it to the air nozzle 4 in the air microplasma generating device 10 through a pipeline. The air microplasma generating device 10 generates a discharge microplasma. The spectrum receiving probe 5 transmits the optical signal of the discharge microplasma to the spectrometer 12 through an optical fiber. The analysis module 13 analyzes the spectrum signal to qualitatively and quantitatively analyze the elements in the gas to be tested. The controller 16 controls the actions and timing of the sampling pump, the spectrometer 12, and the air microplasma generating device 10. The power module 14 is used to supply power to the spectrometer 12, the air sampling pump 11, and the air microplasma generating device 10.

[0056] In some embodiments of the present application, a voltage conversion module 15 is also included, which is used to convert the voltage of the power module 14 into various voltages to power the spectrometer 12, the sampling pump, and the electrode pair. In some embodiments of the present application, a housing 17 is also included, which supports various parts and is made of aluminum alloy for easy heat dissipation.

[0057] The detection steps are as follows:

[0058] Step 1: The controller 16 controls the air sampling pump 11 to sample the gas to be tested from the outside and pump it to the air nozzle 4, and the power module 14 supplies power to the sampling pump.

[0059] Step 2: The controller 16 controls the voltage conversion module 15 to convert the low voltage of the power module 14 into high voltage and apply it to the three sets of electrode pairs. The air nozzle 4 pumps the air to be tested to the center of the air discharge area. The electrode pairs discharge to form a discharge micro plasma.

[0060] Step 3: The discharge microplasma emits a characteristic light signal, and the spectrum receiving probe 5 receives the light signal and transmits the light signal to the spectrometer 12 through the optical fiber. The spectrometer 12 splits the light signal to obtain the spectrum information emitted by the discharge microplasma.

[0061] Step 4: The spectrometer 12 transmits the spectrum information to the analysis module 13, which interprets the spectrum information to obtain the quantitative result of the Na element in the gas to be tested to determine whether there is Na aerosol in the air. If sodium aerosol is detected in the air, the device will alarm.

[0062] The aerosol monitoring device provided in the present application can not only measure the Na element in the gas to be measured, but also measure other elements, and the applicant does not limit it.

[0063] Figure 9-12 The test chart for real-time monitoring of different sodium content in the air provided by the embodiment of the present application, each set of data is repeatedly tested 10 times, the characteristic wavelength of Na is 588nm, and the concentration of Na can be seen by the spectral intensity at 588nm. It can be seen from the test results that the scheme of the present application has good repeatability, low detection limit and small fluctuation.

[0064] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An air microplasma generating device, characterized in that: It includes multiple groups of electrode pairs arranged in a ring array, and the electrode pairs are connected in parallel with each other, each group of the electrode pairs includes two metal rod electrodes located on the same axis, and the two discharge ends of the two metal rod electrodes are arranged opposite to each other, and the gap between the two discharge ends forms an air discharge area; it also includes an electrode pair guide plate, an electrode fixing component, an air nozzle and a gas suction ring, the metal rod electrode is movably connected to the electrode pair guide plate, the electrode fixing component is used to fix the metal rod electrode on the electrode pair guide plate, the air nozzle and the gas suction ring are respectively arranged on both sides of the electrode pair, the air nozzle is used to spray out the gas to be tested sucked in from the outside, the gas suction ring is a hollow ring structure, and a plurality of suction holes are evenly arranged along its length direction, and the gas suction ring is connected to a negative pressure mechanism.

2. The air microplasma generating device according to claim 1, characterized in that: The discharge end of the metal rod electrode is in an inner arc shape or a plane shape.

3. The air microplasma generating device according to claim 2, characterized in that: The metal rod electrode is passivated.

4. The air microplasma generating device according to claim 2, characterized in that: The discharge end of the metal rod electrode is provided with one or more grooves, and the central axis of the groove is the same as the central axis of the metal rod electrode.

5. The air microplasma generating device according to claim 1, characterized in that: It also includes a spectrum receiving probe and a three-dimensional adjustment mechanism, wherein the three-dimensional adjustment mechanism is respectively connected to the spectrum receiving probe and the air nozzle and is used to adjust the positions of the spectrum receiving probe and the air nozzle.

6. The air microplasma generating device according to claim 5, characterized in that: The three-dimensional adjustment mechanism includes an X-axis translation stage, a Y-axis translation stage and a Z-axis guide rod, wherein the Z-axis guide rod is perpendicular to the electrode pair guide disk and fixedly connected to the electrode pair guide disk, the spectrum receiving probe is connected to the Y-axis translation stage, the Y-axis translation stage is connected to the X-axis translation stage, and the X-axis translation stage and the air nozzle are both slidably connected to the Z-axis guide rod.

7. The air microplasma generating device according to claim 5, characterized in that: The air nozzle is aimed at the air discharge area; the spectrum receiving probe passes through the center of the gas suction ring and is located directly above the air discharge area, and the focus is aimed at the center of the air discharge area.

8. The air microplasma generating device according to claim 6, characterized in that: The gas suction ring is slidably connected to the Z-axis guide rod.

9. An aerosol monitoring device, comprising the air microplasma generating device according to any one of claims 5 to 8, characterized in that: It also includes an air sampling pump, a spectrometer, a controller, an analysis module and a power module. The spectrometer is connected to the spectrum receiving probe, the output end of the air sampling pump is connected to the air nozzle, the analysis module is connected to the spectrometer, the controller is respectively connected to the spectrometer, the air microplasma generating device and the air sampling pump, and the power module is used to supply power to the spectrometer, the air sampling pump and the air microplasma generating device.

Citation Information

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