Piezoelectric unit, preparation method thereof and electronic equipment

Abstract

The invention discloses a piezoelectric unit, a preparation method thereof and electronic equipment, and relates to the technical field of piezoelectric device preparation, the piezoelectric unit comprises a substrate, a single crystal dielectric oxide layer, a first electrode layer, a perovskite type single crystal seed crystal layer and a piezoelectric layer which are laminated, and the lattice orientation rate (100) / ((100) + (001)) of the piezoelectric layer is in a range of 0.7-0.8. The piezoelectric unit disclosed by the invention has a relatively high piezoelectric constant, so that the piezoelectric unit can be better driven; and meanwhile, the dielectric constant of the piezoelectric layer is controlled within a relatively low range, so that the consumed electric energy and the emitted heat during driving are reduced.

Description

Technical Field

[0001] The present application relates to the technical field of piezoelectric device preparation, and in particular to a piezoelectric unit and a preparation method thereof and an electronic device. Background Art

[0002] In recent years, piezoelectric units made of piezoelectric materials such as lead zirconate titanate have been widely used in microelectromechanical systems (MEMS) such as sensors and actuators. Piezoelectric units formed by forming such piezoelectric bodies as thin films on substrates such as silicon and processed by MEMS are expected to be applied to a variety of MEMS devices, such as piezoelectric film print heads, MEMS speakers, MEMS micromirrors, and gyroscopes.

[0003] As a piezoelectric thin film material, the elements such as lead, zirconium, titanium and oxygen in the piezoelectric thin film material constitute a perovskite crystal structure. The ideal perovskite structure is a cubic lattice, but it also includes tetragonal and orthorhombic crystals that are deformed cubic crystals. Moreover, the orientation of the crystal has a great influence on the piezoelectric properties, especially the electromechanical conversion efficiency, dielectric constant and dielectric loss. The higher the piezoelectric constant, the more effectively it can be driven. The larger the capacitance, the greater the power consumption during driving and the heat generation of the component itself. At present, when preparing high-performance piezoelectric materials for use in MEMS components such as actuators, it is not possible to simultaneously meet the needs of increasing the piezoelectric constant and reducing the dielectric constant, and the prepared piezoelectric thin film materials do not have a good working state. Summary of the invention

[0004] The present application provides a piezoelectric unit, a preparation method thereof, and an electronic device. A single crystal dielectric oxide layer, a first electrode layer, and a perovskite single crystal seed layer that are consistent with the lattice orientation of the single crystal substrate are sequentially grown on a single crystal silicon substrate, and a piezoelectric film based on PZT with a certain thickness can be formed by a chemical solution deposition method, thereby being able to prepare a piezoelectric unit with a higher piezoelectric constant and a lower dielectric constant.

[0005] In a first aspect, the present application provides a piezoelectric unit comprising a stacked substrate, a single crystal dielectric oxide layer, a first electrode layer, a perovskite single crystal seed layer and a piezoelectric layer, wherein the lattice orientation rate of the piezoelectric layer is (100) / ((100)+(001)) in the range of 0.7 to 0.8.

[0006] In this embodiment, a single crystal dielectric oxide layer, a first electrode layer and a perovskite single crystal seed layer are sequentially grown on a single crystal silicon substrate, and a piezoelectric film based on PZT with a certain thickness can be formed by a chemical solution deposition method. The lattice orientation of the prepared piezoelectric unit can be consistent with the lattice orientation of the single crystal silicon substrate. For example, when the lattice orientation of the single crystal silicon substrate is (100), the (100) orientation ratio ((100) / ((100)+(001))) in the prepared piezoelectric layer can be increased, which can improve the piezoelectric constant of the piezoelectric layer so that the piezoelectric unit can be driven better; when the lattice orientation of the single crystal silicon substrate is (001), the (001) orientation ratio ((001) / ((100)+(001))) in the prepared piezoelectric layer can be increased to control the dielectric constant of the piezoelectric layer and reduce the power consumed and the heat generated during driving.

[0007] In a possible implementation, the substrate includes a single crystal silicon substrate or a single crystal SOI substrate with a lattice orientation of (100), so as to grow a piezoelectric unit with a lattice orientation of (100) accounting for a major proportion, thereby improving the piezoelectric constant of the piezoelectric unit.

[0008] In a possible implementation, the lattice orientation rate (100) / ((100)+(001)) of at least one of the single crystal dielectric oxide layer, the first electrode layer and the perovskite single crystal seed layer is in the range of 0.7 to 0.8. In this embodiment, on a single crystal substrate with a lattice orientation of (100), a single crystal dielectric oxide layer, a first electrode layer and a perovskite single crystal seed layer with a lattice orientation of (100) as the main proportion can be formed, so that the lattice orientation rate (100) / ((100)+(001)) of the piezoelectric layer grown on the perovskite single crystal seed layer is in the range of 0.7 to 0.8, which can improve the piezoelectric constant of the piezoelectric layer so that the piezoelectric unit can be driven better; the dielectric constant of the piezoelectric layer is controlled, and the power consumed and the heat generated during driving are reduced.

[0009] In a possible implementation, the piezoelectric unit further includes a second electrode layer, the second electrode layer is located on a side of the piezoelectric layer away from the first electrode layer, and the piezoelectric layer is located between the first electrode layer and the second electrode layer. The first electrode layer and the second electrode layer are located on both sides of the piezoelectric layer and can generate a certain potential difference to drive the piezoelectric layer to perform bending vibration.

[0010] In a possible implementation, the substrate is in a frame structure, and is provided with first through holes that are intersecting each other in the thickness direction;

[0011] The piezoelectric layer is located on one side of the substrate along the thickness direction, and includes at least one diaphragm, a second through hole is provided between the diaphragm and the substrate and / or between two adjacent diaphragms, at least a portion of the edge of the diaphragm is fixedly connected to the substrate to form a cantilever structure, the diaphragm covers a portion of the first through hole, and the second through hole is connected to the first through hole;

[0012] The piezoelectric unit further includes an organic film, and the organic film covers the diaphragm and the second through hole.

[0013] In this embodiment, a diaphragm actuation structure is provided so that the speaker unit has a cantilever structure. Since one end of the cantilever structure is suspended in the air, the actuation performance of the speaker unit is improved and the output power of the speaker unit can be increased.

[0014] In a second aspect, the present application provides an electronic device, comprising a housing and a piezoelectric unit as described in any one of the above items, wherein the housing encloses an inner cavity, and the piezoelectric unit is located in the inner cavity and fixed in the housing. The electronic device described in the present application, the piezoelectric unit in the electronic device has a higher piezoelectric constant and a smaller dielectric constant, and the piezoelectric unit has a high driving capability and a low driving heat generation.

[0015] In a possible implementation, the electronic device further includes a controller, which is electrically connected to the piezoelectric unit described above, and is used to control the vibration of the piezoelectric unit.

[0016] In a third aspect, the present application provides a method for preparing a piezoelectric unit, comprising the following steps:

[0017] forming a single crystal dielectric oxide layer, a first electrode layer and a perovskite type single crystal seed layer in sequence on a single crystal substrate, wherein the single crystal dielectric oxide layer is a single crystal oxide layer epitaxially grown on the single crystal substrate;

[0018] Coating a precursor liquid on the perovskite type single crystal seed crystal layer to form an intermediate, wherein the intermediate includes the single crystal substrate, the single crystal dielectric oxide layer, the first electrode layer, the perovskite type single crystal seed crystal layer and the precursor liquid;

[0019] The intermediate is dried, calcined and cooled to allow the precursor liquid to crystallize and solidify to form a piezoelectric layer.

[0020] In a possible implementation, the single crystal substrate includes a single crystal silicon substrate or a single crystal SOI substrate. The thickness of the single crystal substrate can be in the range of 300 microns to 800 microns, and the lattice orientation of the single crystal substrate can be a silicon substrate with a (100) crystal plane index or a silicon substrate with a (001) crystal plane index, which is used for the preparation of the piezoelectric unit of the present application, so as to form a lattice orientation required for the growth of the piezoelectric layer.

[0021] In a possible implementation, the lattice orientations of the single crystal silicon substrate and the single crystal SOI substrate are (100), so as to grow a piezoelectric unit in which the lattice orientation (100) accounts for a major proportion, thereby improving the piezoelectric constant of the piezoelectric unit.

[0022] In a possible implementation, the first electrode layer includes at least one of a platinum electrode layer, a silver electrode layer, a copper electrode layer, and a gold electrode layer to form an electrode layer on one side of the piezoelectric layer in the piezoelectric unit.

[0023] In a possible implementation, the perovskite single crystal seed layer is made of at least one material selected from the group consisting of strontium ruthenate, lead lanthanum titanate, and disodium lanthanum oxide tetrahydrate to form a piezoelectric unit with a perovskite structure.

[0024] In one possible implementation, after the steps of drying, calcining and cooling the intermediate, the steps of coating the precursor liquid, drying, calcining and cooling are repeated on the formed piezoelectric layer until a piezoelectric layer of a preset thickness is formed. Through multiple coating, drying, calcining and cooling steps, a piezoelectric layer with a high density and a certain thickness can be formed.

[0025] In a possible implementation, the step of coating a precursor liquid on the perovskite single crystal seed layer includes:

[0026] The precursor liquid contains zirconium and titanium. By adjusting the ratio of zirconium to titanium in the precursor liquid, the orientation rate (100) / ((100)+(001)) in the piezoelectric layer formed after drying, calcining and cooling is determined to be in the range of 0.7 to 0.8. The prepared piezoelectric unit has a higher piezoelectric constant and a smaller dielectric constant.

[0027] In one possible implementation, the ratio of the molar amount of zirconium element to the molar amount of titanium element in the precursor liquid is in the range of 0.5 to 1, so that the orientation rate (100) / ((100)+(001)) in the prepared piezoelectric unit is in the range of 0.7 to 0.8, and the prepared piezoelectric unit has a higher piezoelectric constant and a smaller dielectric constant.

[0028] In a possible implementation, the step of calcining the precursor liquid includes: heating to a first preset temperature until the precursor liquid is sintered and solidified; and continuing to heat to a second preset temperature to crystallize the precursor liquid. Pre-sintering is first performed at the first preset temperature, the precursor liquid is sintered and solidified, and then calcining is performed at the second preset temperature, and the solidified precursor is crystallized to form a piezoelectric layer of a single crystal phase. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic flow chart of a method for preparing a piezoelectric unit provided in an embodiment of the present application;

[0030] Figure 2 It is a schematic diagram of XRD characterization of a piezoelectric unit provided in this application;

[0031] Figure 3 It is a schematic diagram of the voltage and strain provided in the embodiment of the present application;

[0032] Figure 4 is a strain diagram of the (001) lattice orientation provided in an embodiment of the present application;

[0033] Figure 5 is a schematic diagram of strain of the (100) lattice orientation provided in an embodiment of the present application;

[0034] Figure 6 This is a schematic diagram of the correspondence between the piezoelectric constant d31 and the chromium content provided in the embodiment of the present application;

[0035] Figure 7 This is a schematic diagram of the dielectric constant and chromium content provided in the embodiment of the present application;

[0036] Figure 8 It is a schematic diagram of the structure of each layer of the piezoelectric unit provided in the embodiment of the present application;

[0037] Fig. 9 is a three-dimensional schematic diagram of a speaker unit provided in an embodiment of the present application;

[0038] Fig.10 This application provides Fig. 9 Exploded diagram of the structure of the speaker unit;

[0039] Fig.11 This application provides Fig. 9 A partial cross-sectional schematic diagram of the structure of the speaker unit;

[0040] Fig.12 This application provides Fig. 9 A three-dimensional schematic diagram of the diaphragm and base layer of the middle speaker unit;

[0041] Fig.13It is a schematic diagram of the structure of a true wireless headset provided in an embodiment of the present application;

[0042] Fig.14 This application provides Fig.13 A cross-sectional view of the true wireless earphones in Figure 2. DETAILED DESCRIPTION

[0043] The embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application.

[0044] For ease of understanding, the English abbreviations and related technical terms involved in the embodiments of the present application are explained and described below.

[0045] It should be clear that the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0046] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0047] It should be understood that the term "and / or" used in this article is only a description of the same field of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0048] The word "if" as used herein may be interpreted as "when" or "when" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrases "if it is determined" or "if (stated condition or event) is detected" may be interpreted as "when determining" or "in response to determining" or "when detecting (stated condition or event)" or "in response to detecting (stated condition or event)", depending on the context.

[0049] It should be understood that the terms “first”, “second”, etc. used in the present application are only used for the purpose of distinguishing the description, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0050] In the description of the present application, the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0051] When used in this application, “within the range of…”, unless it is separately specified that an end value is not included, it is assumed that both end values ​​of the range are included. For example, in the range of 1 to 5, the two values ​​1 and 5 are included.

[0052] Lattice orientation, also known as crystal orientation, generally refers to the directionality of the crystal. That is, the tendency to form covalent bonds in a certain direction. According to the quantum theory of covalent bonds, the strength of covalent bonds depends on the overlap of electron clouds. Due to the asymmetry of the distribution of non-full shell electrons, the lattice growth always forms bonds in the direction with the highest electron cloud density.

[0053] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integrated connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0054] This application provides a method for preparing a piezoelectric unit, referring to Figure 1 As shown, the following steps are included:

[0055] Step S100, forming a single crystal dielectric oxide layer, a first electrode layer and a perovskite type single crystal seed layer with a certain thickness on a single crystal substrate in sequence, wherein the single crystal dielectric oxide layer is a single crystal oxide layer epitaxially grown on the single crystal substrate;

[0056] First, a single crystal substrate is prepared. The single crystal substrate can be a single crystal silicon substrate or a silicon substrate on an insulating substrate (Silicon-On-Insulator, SOI). The SOI substrate introduces a buried oxide layer between the top silicon and the back substrate, which can achieve dielectric isolation of components in the integrated circuit and completely eliminate the parasitic latch effect in the bulk silicon CMOS circuit. This application takes a single crystal silicon substrate as an example.

[0057] Among them, the thickness of the single crystal silicon substrate can be in the range of 300 microns to 800 microns, and it can be a circular substrate. The radius of the circular substrate is related to the size of the piezoelectric unit to be formed, and the present application may not make specific restrictions. In addition, the lattice orientation of the single crystal silicon substrate can be a silicon substrate with a (100) crystal plane index, or a silicon substrate with a (001) crystal plane index, which is used for the preparation of the piezoelectric unit of the present application, so as to form the lattice orientation required for the piezoelectric layer to grow. It should be noted that when an SOI substrate is used, the SOI substrate can also use a single crystal substrate with a lattice orientation of (100) or (001).

[0058] In the present application, the single crystal substrate constitutes the substrate for preparing the piezoelectric unit, and the lattice orientations of the single crystal dielectric oxide layer, the first electrode layer, the perovskite single crystal seed layer and the piezoelectric layer grown thereon are all related to the single crystal substrate.

[0059] A single-crystalline dielectric oxide layer having a certain thickness is formed on a single-crystalline silicon substrate, wherein the single-crystalline dielectric oxide layer can be made of at least one of materials such as zirconium oxide (ZrO2), yttrium stabilized zirconium oxide (YSZ) and hafnium oxide (HfO2). The preparation thickness can be in the range of 20 nanometers to 100 nanometers to prepare a buffer layer located on the substrate. A single-crystalline dielectric oxide layer made of materials such as ZrO2 is used to form a buffer layer on a substrate (single-crystalline substrate). Specifically, the buffer layer can be formed on the substrate by a metal organic chemical vapor deposition (MOCVD) process, an electron beam evaporation process, a sputtering process or other applicable processes.

[0060] In one embodiment, the single crystal substrate serves as a vibration layer, and the single crystal dielectric oxide layer formed on the single crystal silicon substrate serves as a buffer layer. The thickness of the buffer layer may be about 60 nanometers, for example, in the range of 55 nanometers to 65 nanometers.

[0061] In one embodiment, the formed buffer layer can also be used as a vibration plate of the piezoelectric unit, and the stiffness of the vibration plate has an important influence on its natural frequency and resonant frequency. Higher stiffness can make the natural frequency of the vibration plate higher, thereby improving the frequency stability of the vibration plate. At the same time, when the piezoelectric unit is applied to the actuator, the sensitivity of the vibration plate is an important indicator. Higher stiffness can make the piezoelectric unit more sensitive to external excitation, and more easily produce displacement or response, thereby improving the performance of the actuator. In addition, the thickness of the buffer layer in this embodiment can be controlled within the range of 200 nanometers to 8000 nanometers, so that the buffer layer 120 has a certain stiffness. In addition, the buffer layer needs to have a larger thickness. The increase in thickness also means that the lateral size needs to be increased, and the lateral constraints on the buffer layer are also increased. The lateral constraints can make the buffer layer produce greater resistance when subjected to force, so the stiffness of the buffer layer is increased in combination with the increase in thickness.

[0062] Furthermore, the present application adopts a single crystal silicon substrate, for example, a single crystal silicon substrate with a lattice orientation of (100), and a single crystal oxide layer can be epitaxially grown on the single crystal silicon substrate. At this time, the lattice orientation of the dielectric oxide layer can be consistent with the lattice orientation of the single crystal silicon substrate to form a dielectric oxide layer with a lattice orientation of (100), and can serve as a seed layer for the subsequent growth of an electrode layer, a perovskite-type single crystal seed layer, and a piezoelectric layer, so that the grown seed layer can be a single crystal structure.

[0063] After forming the single crystal dielectric oxide layer, a first electrode layer is formed on the single crystal dielectric oxide layer. The first electrode layer can be made of at least one metal material such as platinum (Pt), silver (Ag), copper (Cu) and gold (Au). In the present application, the first electrode layer takes a Pt electrode as an example, and a layer of electrode film can be formed on the first buffer layer by sputtering.

[0064] In this application, since silicon has a lattice orientation of (100), ZrO2 grows on single crystal silicon (grows along the same orientation as silicon), and its lattice orientation is also (100). In addition, the electrode layer grown on ZrO2 will also grow along the same orientation, and the Pt electrode layer will also grow along the lattice orientation (100).

[0065] After forming the Pt electrode layer, a perovskite type single crystal seed layer is formed on the Pt electrode layer. Specifically, a single crystal seed layer having a perovskite type structure can be formed on the Pt electrode layer by a sputtering method or the like, using at least one material such as strontium ruthenate (SRO), lead lanthanum titanate (PLT) and disodium lanthanum oxide tetrahydrate (LNO). Specifically, the perovskite type single crystal seed layer forms a film layer structure on the Pt electrode layer. Since the Pt electrode layer is mostly lattice oriented (100), the perovskite type single crystal seed layer grown thereon can also grow along the (100) lattice orientation.

[0066] Step S200, coating a precursor liquid on the perovskite single crystal seed layer to form an intermediate, wherein the intermediate includes the single crystal substrate, the single crystal dielectric oxide layer, the first electrode layer, the perovskite single crystal seed layer and the precursor liquid.

[0067] The precursor liquid is an oxide containing elements such as lead, zirconium and titanium, which is used to form a piezoelectric layer material. For example, in this embodiment, the precursor liquid is Pb(Zr x Ti (1-x) )O3 as an example. The precursor liquid can be coated on the wafer (a wafer structure composed of a single crystal silicon substrate, a first electrode layer and a perovskite single crystal seed crystal layer) by a spin coater, and the precursor liquid can be in a sol state. And by controlling parameters such as the rotation speed of the spin coater, the spin coating time and the amount of spin coating liquid, the amount of the precursor liquid finally spin-coated on the wafer can be adjusted to achieve the preset designed piezoelectric layer thickness. Among them, x is the ratio of zirconium element to the total content of zirconium and titanium elements, and 1-x is the ratio of titanium element to the total content of zirconium and titanium elements. This ratio can affect the ratio of lattice orientation in the prepared piezoelectric layer.

[0068] Step S300, drying, calcining and cooling the intermediate so that the precursor liquid is crystallized and solidified to form a piezoelectric layer.

[0069] After the precursor liquid is applied, the precursor liquid can be heated and dried by a heating plate or an electric furnace, and the heating temperature can be in the range of 100°C to 150°C, and the heating can be in the range of 10 minutes to 30 minutes in the temperature range of 100°C to 150°C. Through this heating step, substances such as organic solvents present in the precursor liquid can be removed to form a denser piezoelectric layer.

[0070] After heating at 100°C to 150°C for 10 to 30 minutes, the material may be further heated to 600°C to 700°C for calcination using a rapid annealing furnace (RTA) or other equipment, and heated at 600°C to 700°C for 5 to 30 minutes. During the calcination process, oxygen and other gases may be introduced to form a denser seed layer after cooling.

[0071] In one embodiment, after the precursor liquid is dried, it can be heated to a temperature in the range of 200°C to 450°C, and kept heated at a temperature in the range of 200°C to 450°C for a period of 10 minutes to 30 minutes to pre-sinter the precursor liquid so that the precursor liquid is sintered and solidified. The solidified precursor is then heated to a temperature in the range of 600°C to 700°C for calcination so that the solidified precursor is crystallized to form a single crystal oriented piezoelectric layer.

[0072] The present application uses chemical solution deposition (CSD) to prepare a PZT thin film with a preferred lattice orientation of (100) on a Pt electrode layer, so that the prepared piezoelectric layer can contain a certain amount of crystal structure with a lattice orientation of (100).

[0073] In this embodiment, a single crystal dielectric oxide layer, a first electrode layer and a perovskite single crystal seed layer are sequentially grown on a single crystal silicon substrate, and a piezoelectric film based on PZT with a certain thickness can be formed by a chemical solution deposition method. The lattice orientation of the prepared piezoelectric unit can be consistent with the lattice orientation of the single crystal silicon substrate. For example, when the lattice orientation of the single crystal silicon substrate is (100), the (100) orientation ratio ((100) / ((100)+(001))) in the prepared piezoelectric layer can be increased, and the piezoelectric constant of the piezoelectric layer can be improved, so that the piezoelectric unit can be driven better; when the lattice orientation of the single crystal silicon substrate is (001), the (001) orientation ratio ((001) / ((100)+(001))) in the prepared piezoelectric layer can be increased to reduce the dielectric constant of the piezoelectric layer, and reduce the power consumed and the heat generated during driving.

[0074] In this embodiment, a piezoelectric unit is made of a single crystal silicon substrate with a lattice orientation of (100), and the reflection intensity of the prepared piezoelectric unit is characterized by 2θ-Xφ scanning measured by X-ray diffraction. Figure 2As shown, in the XRD graph below, the XRD peaks of (400) and (004) appear respectively, (100) and (400) are equivalent, and (001) and (004) are equivalent. Taking the Zr:Ti ratio of 43:57 and 53:47 as examples, when the Zr:Ti ratio is 63:37 and 53:47, there is only the (400) peak, and the proportion of the lattice oriented (100) is close to 100%. Taking the Zr:Ti ratio of 43:57 as an example, the reflection intensity of the lattice orientation (100) affects the sum of the mixed intensity of the lattice orientations (001) and (100) by about 80%. Taking the Zr:Ti ratio of 33:67 as an example, the reflection intensity of the lattice orientation (100) affects the sum of the mixed intensity of the lattice orientations (001) and (100) by about 75%. 43:57 and 33:67 are calculated according to the intensity ratio of the two peaks. For example, when the ratio is 33:67, the peak intensity of (400) is 724, and the peak intensity of (004) is 242, 724 / (724+242)=75%). When the Zr:Ti ratio is 63:37, it is calculated that (100) is about 75%. Among them, the Zr:Ti ratio is a molar ratio. By adjusting the ratio of Zr and Ti in the precursor solution, the proportion of lattice orientations (100) and (001) in the prepared piezoelectric unit can be adjusted to prepare a piezoelectric unit with a higher piezoelectric constant and dielectric constant.

[0075] In this embodiment, after the piezoelectric layer is formed, a second electrode layer and other structures are formed on the piezoelectric layer to form electrode layers on both the upper and lower sides of the piezoelectric layer, and the piezoelectric layer is located between the first electrode layer and the second electrode layer. Figure 3 As shown, electrode layers are formed above and below the piezoelectric layer deposited on the piezoelectric unit to form a simple vibration structural element. By studying the deformation amount, the lattice orientation film of (100) and (001) mixed proposed in this application is compared with the deformation amount of the piezoelectric film whose lattice orientation is completely (001). When a low voltage (in the range of 0 to 10V) is applied, the strain amount corresponding to the piezoelectric film whose lattice orientation is completely (001) is greater than the lattice orientation film of (100) and (001) mixed in this application. As the applied voltage increases, when the applied voltage reaches more than 10V, the strain amount corresponding to the lattice orientation film of (100) and (001) mixed in this application gradually exceeds the strain amount corresponding to the piezoelectric film whose lattice orientation is completely (001), so as to meet the requirements of more high-power devices for the vibration intensity of the piezoelectric unit.

[0076] See also Figure 4 As shown, when the lattice orientation is (001), the domains are aligned with the c-axis ( Figure 4 The vertically upward direction in the piezoelectric element is consistent with the direction of the voltage applied by the upper and lower electrode layers of the piezoelectric unit. Corresponding to the voltage applied in the c-axis direction, it can be observed that the lattice deforms in the linear extension direction corresponding to the voltage.

[0077] See also Figure 5 As shown, in the case of a lattice orientation of (100), the domains are oriented toward the a-axis ( Figure 4 When a voltage is applied along the c-axis, the piezoelectric element rotates 90° from the a-axis to the direction of the electric field (the c-axis in this case) and deforms. This strain is larger than the usual piezoelectric strain. For example, Figure 5 The deformation variable H2 is greater than Figure 4 The deformation variable H1 in .

[0078] In addition, domain rotation requires a relatively large electric field, see Figure 3 As shown, a threshold voltage that causes domain rotation can exist in the voltage range of 10V to 14V, so that after the applied voltage exceeds the threshold voltage, the deformation of the (100) lattice along the c-axis direction under the action of the voltage in the c-axis direction is greater than the deformation of the (001) lattice in the c-axis direction.

[0079] Moreover, the lattice orientation of the piezoelectric film in the piezoelectric unit prepared in the present application is mainly (100), which can account for 70% to 80% of the sum of the (100) and (001) lattice orientations. Most of the lattice orientations in the piezoelectric film are consistent in direction. When a higher voltage (voltage exceeding 10V) is applied, the degree of mutual cancellation of piezoelectric strains between adjacent crystals is reduced. In addition, the lattice with (100) lattice orientation has a larger deformation amount than the lattice with (001) lattice orientation, so that the prepared piezoelectric unit has higher piezoelectric properties.

[0080] In this embodiment, the dielectric constant can be measured using an impedance measuring instrument, such as a parallel plate method. The parallel plate method is also called the three-terminal method in the ASTM D150 standard. The principle is to insert a material or liquid sheet between two electrodes to form a capacitor, then measure its capacitance, and calculate the dielectric constant based on the measurement results. In the actual test device, the two electrodes are equipped on a test fixture that clamps the dielectric material. In this embodiment, the dielectric constant of the prepared single crystal oriented piezoelectric layer can be measured. When the orientation ratio of the lattice orientation (001) in the piezoelectric layer is close to 100%, the dielectric constant is about 500K, when the orientation ratio of the lattice orientation (100) in the piezoelectric layer is close to 100%, the dielectric constant is about 1000K, and when the piezoelectric layer is in an amorphous state, the dielectric constant is about 1800K. It can be seen that the formation of a single crystal piezoelectric layer can effectively reduce the dielectric constant of the piezoelectric unit, especially when the (001) crystal orientation ratio in the piezoelectric layer is high, the dielectric constant value is small. In this embodiment, the piezoelectric layer produced by the single crystal (100) silicon substrate in the above-mentioned embodiment can be controlled to have an orientation ratio (100) / ((100)+(001)) of the piezoelectric layer formed in the final form in the range of 0.7 to 0.8, so as to measure the dielectric constant of the piezoelectric unit to be around 900K. Compared with the piezoelectric layer of the amorphous structure, the dielectric constant has been significantly reduced. In addition, the orientation ratio of the lattice orientation (100) is relatively high, and the corresponding lattice has a larger deformation amount, so that the prepared piezoelectric unit has higher piezoelectric characteristics.

[0081] In one embodiment, in the step S200 and the step S300, a piezoelectric layer of a preset thickness may be formed by multiple coating, drying, calcining and cooling processes, wherein the thickness of the finally formed piezoelectric layer may be within 5 micrometers.

[0082] After the precursor liquid is spin-coated on the seed layer, and a piezoelectric layer having a certain thickness is formed through drying, calcining and cooling, the precursor liquid is spin-coated on the formed piezoelectric layer again, and a piezoelectric layer having a certain thickness is formed again through corresponding drying, calcining and cooling processes. After multiple (at least two) coating, drying, calcining and cooling processes, a piezoelectric layer of a final preset thickness is formed, for example, a preset thickness of 2 microns.

[0083] In a possible implementation, in step S300, the step of calcining the precursor liquid includes: gradually heating the precursor liquid to a plurality of calcination temperature values, and maintaining each calcination temperature value for a certain period of time.

[0084] In this embodiment, the precursor liquid can be first heated to a first preset temperature and maintained at the first preset temperature for a certain period of time, and the precursor liquid is sintered and solidified; after the precursor liquid is solidified, it is heated to a second preset temperature, which is greater than the first preset temperature, and maintained at the second preset temperature for a certain period of time, and the solidified precursor is crystallized to form a piezoelectric layer with a single crystal orientation.

[0085] For example, after the precursor liquid is dried, it can be heated to a temperature in the range of 200°C to 450°C and maintained at a temperature in the range of 200°C to 450°C for a heating time in the range of 10 minutes to 30 minutes to pre-sinter the precursor liquid so that the precursor liquid is sintered and solidified. The solidified precursor is then heated to a temperature in the range of 600°C to 700°C for calcination so that the solidified precursor is crystallized to form a single crystal oriented piezoelectric layer.

[0086] In one embodiment, in step S200, the ratio of zirconium element to titanium element in the precursor liquid can be adjusted to ensure that the orientation rate (100) / ((100)+(001)) in the piezoelectric layer formed after drying, calcination and cooling in step S300 is within the range of 0.7 to 0.8.

[0087] In this embodiment, the precursor liquid can be Pb(Zr x Ti (1-x) )O3 as an example, where x is the percentage of zirconium element in the precursor liquid to the sum of the total amount of zirconium element and titanium element.

[0088] Figure 6 A schematic diagram showing the ratio of the piezoelectric constant of the piezoelectric unit to the zirconium content in the precursor liquid, Figure 7 A schematic diagram showing the ratio of the dielectric constant of the piezoelectric unit to the zirconium content in the precursor liquid.

[0089] See also Figure 6 and Figure 7 As shown, the higher the proportion of zirconium in the precursor liquid, the higher the piezoelectric constant of the prepared piezoelectric layer and the larger the dielectric constant. Therefore, a piezoelectric layer with a higher piezoelectric constant can be formed by increasing the proportion of zirconium in the precursor liquid; and a piezoelectric layer with a lower dielectric constant can be formed by reducing the proportion of zirconium in the precursor liquid. In addition, according to the choice of the use scenario of the piezoelectric unit, and refer to Figure 6 and Figure 7 The relationship between the piezoelectric constant and dielectric constant and the composition ratio of the zirconium element in the precursor liquid can select a driving range that takes into account both low dielectric constant and high piezoelectric constant for high-performance actuators.

[0090] In one embodiment, the ratio of the zirconium content to the sum of the zirconium and titanium content in the precursor liquid can be limited to be within the range of 0.35 to 0.5, and the ratio of the molar amount of the zirconium element to the molar amount of the titanium element in the precursor liquid can be limited to be within the range of 0.5 to 1. In this case, the piezoelectric constant of the prepared piezoelectric layer can be within the range of 200N / C to 250N / C, and the dielectric constant can be within the range of 700K to 1400K. For example, the precursor liquid is composed of Pb(Zr x Ti (1-x) )O3 as an example, the value of x can be in the range of 0.35 to 0.5, while maintaining a relatively large piezoelectric constant, a more suitable dielectric constant characteristic value of less than 1500 is obtained.

[0091] The present application also provides a piezoelectric unit, which can be manufactured by the piezoelectric unit manufacturing method described in any of the above embodiments, see Figure 8 As shown, it includes a substrate and a piezoelectric layer that are stacked, and the lattice orientation ratio of the piezoelectric layer is (100) / ((100)+(001)) in the range of 0.7 to 0.8.

[0092] Among them, the piezoelectric unit includes a substrate 310, a single crystal dielectric oxide layer 320, a first electrode layer 330, a perovskite single crystal seed layer 340 and a piezoelectric layer 350 which are stacked in sequence. Each layer structure can be prepared by the preparation method of the above-mentioned embodiments, which will not be repeated here.

[0093] The stacked substrate 310, single crystal dielectric oxide layer 320, first electrode layer 330, perovskite single crystal seed layer 340 and piezoelectric layer 350 can all be layered structures, and each layer structure has the same shape and size on the extended plane, so that the piezoelectric unit forms a multi-layer composite structure.

[0094] Among them, the lattice orientation rate of the piezoelectric layer (100) / ((100)+(001)) is in the range of 0.7 to 0.8, and the lattice orientation rate of at least one layer among the single crystal dielectric oxide layer, the first electrode layer and the perovskite type single crystal seed crystal layer (100) / ((100)+(001)) can also be in the range of 0.7 to 0.8.

[0095] In one embodiment, a second electrode layer 360 is further disposed on the piezoelectric layer 350, and the second electrode layer 360 is located on a side of the piezoelectric layer 350 away from the first electrode layer 330, and the piezoelectric layer 350 is located between the first electrode layer 330 and the second electrode layer 360. The first electrode layer and the second electrode layer are located on both sides of the piezoelectric layer, and can generate a certain potential difference to drive the piezoelectric layer to perform bending vibration.

[0096] The piezoelectric unit described in the present application may be a piezoelectric device with certain functions, such as a Micro-Electro-Mechanical System (MEMS) piezoelectric sensor and a speaker.

[0097] For example, the present application takes a piezoelectric speaker as an example, and provides a speaker unit 10, see Figure 9-12 As shown, the speaker unit 10 is Fig.11 The substrate 110 is a piezoelectric layer 350 with a preferred lattice orientation of (100) prepared on the electrode layer by chemical solution deposition (CSD), and the lattice orientation rate of the piezoelectric layer 350 is (100) / ((100)+(001)) in the range of 0.7 to 0.8.

[0098] See also Fig.11 As shown, the base layer 120 is fixed on the circuit substrate 110, and the base layer 120 is provided with first through holes 121 that are interlinked in the thickness direction, and the first through holes 121 are located in the middle of the base layer 120, so that the base layer 120 forms a structure similar to a "U" shape. The frame structure around the first through hole 121 is fixed on the circuit substrate 110. The circuit substrate 110 is provided with fourth through holes 111 that are interlinked in the thickness direction, and the fourth through holes 111 are located in the middle of the circuit substrate 110, so that the circuit substrate 110 forms a structure similar to a "U" shape.

[0099] The fourth through hole 111 and the first through hole 121 are interlinked in the thickness direction. The first outer wall surface 1211 of the first through hole 121 (the inner wall surface of the middle cavity of the base layer 120) and the second outer wall surface 1111 of the fourth through hole 111 (the inner wall surface of the middle cavity of the circuit substrate 110) can be flush, and the first outer wall surface 1211 and the second outer wall surface 1111 are coplanar along the Z direction. Alternatively, the first outer wall surface 1211 and the second outer wall surface 1111 may not be coplanar along the Z direction, so that the base layer 120 and the circuit substrate 110 form a step structure at the connection. The width H1 of one side of the circuit substrate 110 along the X direction is greater than or equal to the width H2 of one side of the base layer 120 along the X direction, so that the circuit substrate 110 can better support the base layer 120, as well as support the diaphragm layer 130 and the organic film 140 disposed on the base layer 120.

[0100] In one embodiment, the width of the side edge of the circuit substrate 110 on one side in the X direction along the X direction is greater than or equal to the width of the side edge of the base layer 120 on one side in the X direction along the X direction. Meanwhile, the width of the side edge of the circuit substrate 110 on the opposite side in the X direction along the X direction is greater than or equal to the width of the side edge of the base layer 120 on the opposite side in the X direction. Alternatively, the width of one of the two sides of the circuit substrate 110 on one side in the X direction and on the opposite side in the X direction along the X direction is greater than or equal to the width of the side edge of the base layer 120 on the same side along the X direction, so that the circuit substrate 110 provides better support for the base layer 120.

[0101] In one embodiment, the width of the side edge of the circuit substrate 110 along the Y direction is greater than or equal to the width of the side edge of the base layer 120 along the Y direction. At the same time, the width of the side edge of the circuit substrate 110 along the Y direction is greater than or equal to the width of the side edge of the base layer 120 along the Y direction; or, the width of one of the two sides of the circuit substrate 110 along the Y direction on one side and the side in the Y direction is greater than or equal to the width of the side edge of the base layer 120 on the same side along the Y direction, so that the circuit substrate 110 provides better support for the base layer 120.

[0102] It should be noted that Fig.11 The dotted lines in the figure are only used to illustrate the positions of the first through hole 121 and the fourth through hole 111 to better show the structures of the circuit substrate 110 and the base layer 120 , and do not make any specific or special limitation on the structure of the speaker unit 10 .

[0103] See also Fig.10 and Fig.12As shown, a diaphragm layer 130 is provided on the base layer 120, and the diaphragm layer 130 is provided on the base layer 120 of the "U"-shaped structure, and is located on one side of the base layer 120 along the thickness direction. The diaphragm layer 130 includes a diaphragm 131. At least a portion of the edge of the diaphragm 131 is fixedly connected to the base layer 120 to form a cantilever structure 1311. The diaphragm 131 includes a fixed portion 131a and a suspended portion 131b. At least a portion of the edge of the fixed portion 131a of the diaphragm 131 is fixedly connected to the base layer 120, and the suspended portion 131b of the diaphragm 131 is suspended on the inner side of the base layer 120, and extends from the frame of the "U"-shaped structure of the base layer 120 toward one side of the second through hole 132, thereby forming a cantilever structure 1311. The diaphragm layer 130 includes at least one diaphragm 131. For example, the diaphragm layer 130 may include two diaphragms 131, namely a first diaphragm 1312 and a second diaphragm 1312 ( Fig.12 The diaphragm 131 covers part of the first through hole 121 , that is, the projection of at least part of the diaphragm 131 along the thickness direction coincides with the first through hole 121 .

[0104] A second through hole 132 is provided between the diaphragm 131 and the base layer 120 and between adjacent diaphragms 131 . The second through hole 132 and the first through hole 121 are interlinked. The second through hole 132 is located on one side of the first through hole 121 along the positive direction of the Y direction. Fig.12 As shown, the diaphragm 131 includes a first diaphragm 1312 and a second diaphragm 1313 which are relatively arranged on the base layer 120. The first diaphragm 1312 and the second diaphragm 1313 can both be isosceles trapezoids. The longer bottom sides of the isosceles trapezoids of the first diaphragm 1312 and the second diaphragm 1313 are fixedly connected to the frame structure of the base layer 120. The shorter bottom sides of the isosceles trapezoids of the first diaphragm 1312 and the second diaphragm 1313 are parallel to each other and opposite to each other. The first diaphragm 1312 has a first edge 1316 on a side close to the second diaphragm 1313, and the second diaphragm 1313 has a second edge 1317 on a side close to the first diaphragm 1312. The first edge 1316 and the second edge 1317 are separated by a second through hole 132.

[0105] In one embodiment, a second through hole 132 is provided between the diaphragm 131 and the base layer 120 . It is understandable that when the diaphragm layer 130 includes a diaphragm 131 , the second through hole 132 is formed by a portion of the edge of the diaphragm 131 and the base layer 120 .

[0106] The diaphragm layer 130 is deformed under the driving voltage, and the cantilever structure 1311 of the diaphragm layer 130 drives the diaphragm 131 to vibrate to achieve sound. By providing the diaphragm actuation structure, the speaker unit 10 has a cantilever structure. Since one end of the cantilever structure 1311 is suspended in the air, the actuation performance of the speaker unit 10 is improved, and the output power of the speaker unit 10 can be increased.

[0107] It should be noted that in this application Figures 9 to 12 The shape of the middle diaphragm 131 is only an example, and the shape of the diaphragm in the present application is not specifically limited.

[0108] See also Fig. 9 As shown, the organic film 140 is disposed on the diaphragm layer 130 and covers the diaphragm layer 130. The organic film 140 is disposed on one side of the diaphragm layer 130 along the Z direction along the thickness direction and is fixedly connected to the diaphragm layer 130. The organic film 140 completely closes the first through hole 121, that is, the projection of the organic film 140 along the thickness direction completely covers the first through hole 121. By providing the organic film 140 that completely closes the first through hole 121, the reduction of the sound pressure can be prevented without affecting the actuation action of the diaphragm 131.

[0109] The speaker unit 10 provided in this embodiment, on the one hand, by providing a diaphragm actuation structure, makes the speaker unit 10 have a cantilever structure, which can improve the output power of the speaker unit 10; on the other hand, by providing an organic film 140 that closes the first through hole 121, the sound pressure is prevented from decreasing without affecting the actuation action of the diaphragm 131. Therefore, through the above structural design, it is beneficial to minimize the size of the speaker unit 10 and maximize the sound pressure in a limited space. Therefore, the speaker unit 10 of the present application can take into account both miniaturization and increased output power, and can meet the performance requirements of active noise reduction.

[0110] In addition, the present application also provides an electronic device, comprising the piezoelectric unit described in any of the above embodiments, wherein the piezoelectric unit can be a speaker unit, etc., which uses the piezoelectric vibration characteristics as a drive to achieve functions such as sound generation and driving medium flow.

[0111] Specifically, the piezoelectric unit in this embodiment takes a speaker unit as an example, and the speaker unit can be applied to electronic devices such as headphones and hearing aids.

[0112] See also Fig.13 and Fig.14 As shown, Fig.13 This is a schematic structural diagram of a true wireless headset 100 according to an embodiment of the present application. Fig.14 for Fig.13The cross-sectional view of the true wireless headset 100 is shown. The true wireless headset 100 includes a speaker unit 10, a housing 20 and a controller (not shown in the figure), and the housing 20 may include a first housing 210 and a second housing 220, and the first housing 210 and the second housing 220 arranged opposite to each other enclose the inner cavity of the headset, and the speaker unit 10 is integrated in the inner cavity of the headset. The speaker unit 10 is arranged in the inner cavity of the headset, and the inner cavity of the headset is divided into a front cavity 230 and a rear cavity 240. The speaker unit 10 is provided with a front sound hole 250 and a rear sound hole 260, wherein the front sound hole 250 is connected to the front cavity 230, and the rear sound hole 260 is connected to the rear cavity 240, thereby forming the front sound channel and the rear sound channel of the true wireless headset 100. The speaker unit 10 is electrically connected to the controller. When the speaker unit 10 receives an electrical signal, the controller drives the speaker unit 10 to vibrate, converts the electrical signal into a sound signal, thereby playing the sound and transmitting the sound to the user's ear.

[0113] With the development of information communication technology and electronic devices, electronic devices such as headphones are developing towards miniaturization and portability. The speaker unit 10 built into the electronic device not only needs to evolve in the direction of miniaturization, but also needs to ensure that the acoustic performance of the speaker unit 10 reaches, for example, a sound pressure level or a wider bandwidth, to meet user needs.

[0114] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A piezoelectric unit, characterized in that: The invention comprises a substrate, a single crystal dielectric oxide layer, a first electrode layer, a perovskite single crystal seed layer and a piezoelectric layer which are stacked, wherein the lattice orientation rate (100) / ((100)+(001)) of the piezoelectric layer is in the range of 0.7 to 0.

8.

2. The piezoelectric unit according to claim 1, characterized in that The substrate includes a single crystal silicon substrate or a single crystal SOI substrate having a lattice orientation of (100).

3. The piezoelectric unit according to claim 1 or 2, characterized in that: A lattice orientation ratio (100) / ((100)+(001)) of at least one of the single crystalline dielectric oxide layer, the first electrode layer, and the perovskite type single crystalline seed layer is in the range of 0.7 to 0.

8.

4. The piezoelectric unit according to any one of claims 1 to 3, characterized in that: The piezoelectric unit further includes a second electrode layer, which is located on a side of the piezoelectric layer away from the first electrode layer, and the piezoelectric layer is located between the first electrode layer and the second electrode layer.

5. The piezoelectric unit according to claim 4, characterized in that: The substrate is in a frame structure and is provided with first through holes that intersect each other in the thickness direction; The piezoelectric layer is located on one side of the substrate along the thickness direction, and includes at least one diaphragm, a second through hole is provided between the diaphragm and the substrate and / or between two adjacent diaphragms, at least a portion of the edge of the diaphragm is fixedly connected to the substrate to form a cantilever structure, the diaphragm covers a portion of the first through hole, and the second through hole is connected to the first through hole; The piezoelectric unit further includes an organic film, and the organic film covers the diaphragm and the second through hole.

6. An electronic device, characterized in that: It comprises a shell and the piezoelectric unit according to any one of claims 1 to 5, wherein the shell encloses an inner cavity, and the piezoelectric unit is located in the inner cavity and fixed in the shell.

7. The electronic device according to claim 6, characterized in that: The electronic device further includes a controller, which is electrically connected to the piezoelectric unit and is used to control the vibration of the piezoelectric unit.

8. A method for preparing a piezoelectric unit, for preparing the piezoelectric unit according to any one of claims 1 to 7, characterized in that: The steps include: forming a single crystal dielectric oxide layer, a first electrode layer and a perovskite type single crystal seed layer in sequence on a single crystal substrate, wherein the single crystal dielectric oxide layer is a single crystal oxide layer epitaxially grown on the single crystal substrate; Coating a precursor liquid on the perovskite type single crystal seed crystal layer to form an intermediate, wherein the intermediate includes the single crystal substrate, the single crystal dielectric oxide layer, the first electrode layer, the perovskite type single crystal seed crystal layer and the precursor liquid; The intermediate is dried, calcined and cooled to allow the precursor liquid to crystallize and solidify to form a piezoelectric layer.

9. The method for preparing a piezoelectric unit according to claim 8, characterized in that: The single crystal substrate has a lattice orientation of (100).

10. The method for preparing a piezoelectric unit according to claim 8 or 9, characterized in that: The step of coating a precursor liquid on the perovskite type single crystal seed layer comprises: The precursor liquid contains zirconium and titanium. The ratio of zirconium to titanium in the precursor liquid is adjusted to ensure that the orientation rate (100) / ((100)+(001)) of the piezoelectric layer formed after drying, calcining and cooling is within the range of 0.7 to 0.

8.

11. The method for preparing a piezoelectric unit according to claim 10, characterized in that: The ratio of the molar amount of zirconium element to the molar amount of titanium element in the precursor liquid is in the range of 0.5 to 1.

12. The method for preparing a piezoelectric unit according to any one of claims 8 to 11, characterized in that: The step of calcining the precursor liquid comprises: Heating to a first preset temperature until the precursor liquid is sintered and solidified; Continue heating to a second preset temperature to allow the precursor liquid to crystallize.

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