Micro-textured tool with nano-tio2 coating and its preparation method

Abstract

The application discloses a micro-textured cutter with a TiO2 coating and a preparation method thereof, the cutter substrate material is a cemented carbide, multi-directional rhombic micro-textures are processed on a rake face, and the coating is a TiO2 coating with a nanometer thickness; the preparation method comprises the following steps: pre-treating the cemented carbide substrate, polishing the surface of the cemented carbide by using diamond sandpaper so that the surface is in a mirror state, processing multi-directional rhombic micro-textures on the surface of the cemented carbide cutter substrate by using a laser processing method, depositing a TiO2 coating on the textured surface by using an atomic layer deposition method, and performing annealing post-treatment on the coating in a nitrogen atmosphere. The micro-textures reduce the contact area between the cutter and chips, efficiently collect the chips and coating particles, and thus improve the friction condition in the cutting process. The cutter is suitable for cutting operations of low-hardness metal materials, prolongs the service life of the cutter, and improves the cutting machining efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of mechanical cutting tools, in particular to a micro-textured tool with a nano-TiO2 coating and a preparation method thereof. BACKGROUND

[0002] The innovation of cutting machining technology, especially the improvement of cutting tool technology, is the key to promote the development of this field. New machining methods such as dry cutting and high-speed cutting have higher requirements for tool performance, prompting the industry to explore new tool materials, surface micro-texture, coating technology and geometric structure optimization.

[0003] Surface texturing and coating treatment of cemented carbide tools have become an important way to improve performance. Surface texturing technology forms a micro-texture array with specific size and shape on the tool surface through precise machining. Compared with smooth surface, this specific micro-textured surface exhibits more excellent tribological performance. It can effectively reduce the tool-chip contact area during machining, and has the function of capturing chips and storing lubricating materials, thereby optimizing the cutting process. Surface coating technology as an advanced surface modification method, through coating a thin film with specific performance on the tool surface, aims to improve the cutting performance of the tool, prolong its service life and improve the machining efficiency.

[0004] However, the bonding problem between the coating and the substrate material has always been a key factor restricting the performance of the coated tool. Traditional coating manufacturing technologies, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), have their own advantages, but also have obvious limitations. CVD technology has high deposition temperature, which easily causes thermal damage to the tool substrate material, and the coating thickness control is not accurate, and the shape retention is poor. While PVD technology has a relatively low coating bonding force, and is mainly suitable for planar structure deposition, which is difficult to meet the needs of complex structures. ALD technology realizes atomic-level precision control of coating thickness through saturated chemical adsorption self-limiting reaction, and exhibits strong bonding force. In addition, its low-temperature deposition characteristics effectively reduce residual thermal stress, and high shape retention ensures high step coverage of the coating on complex structures, especially effectively covering micro-texture structures. When the coating material reaches the nanoscale, its physical and mechanical properties are significantly improved, showing a lower friction coefficient. More importantly, the synergistic effect between surface texturing technology and surface coating technology is expected to further improve the cutting performance of the tool. How to combine surface texturing technology and ALD deposition technology to develop a new type of nano-scale coating tool with high bonding strength is a technical problem that needs to be solved. SUMMARY

[0005] Invention purposes: The purpose of the present application is to overcome the shortcomings of the prior art, and to provide a micro-textured tool with a nano-TiO2 coating and a preparation method thereof. The micro-texture significantly reduces the contact area between the tool and the chip, and provides a containing place for the detached coating particles and the chip, thereby reducing the friction coefficient and wear during cutting. The present application further improves the coating film base bonding strength and the physical and mechanical properties of the coating, and improves the cutting performance of the tool. The synergistic effect of the micro-texture and the coating in the present application significantly reduces the cutting resistance, and greatly improves the cutting performance and service life of the tool.

[0006] Technical scheme: The micro-textured tool with a nano-TiO2 coating of the present application, the base material of the tool is a hard alloy material, the tool base surface has a micro-texture, the micro-texture is a multi-directional rhombic micro-texture, and the coating is a nano-thickness TiO2 hard coating.

[0007] The preparation method of the micro-textured tool with a nano-TiO2 coating of the present application comprises the following steps:

[0008] The preparation method of the micro-textured tool with a nano-TiO2 coating of the present application comprises the following steps:

[0009] Step (1), tool base material pretreatment: polish the hard alloy base to a mirror surface with diamond sandpaper with mesh numbers of 240-600-2000-8000 in turn, ultrasonic clean with anhydrous ethanol and deionized water for 15 min respectively to remove surface impurities and swarf.

[0010] Step (2), processing tool surface micro-texture: use nanosecond laser to process rhombic micro-texture on the mirror surface, the process is as follows:

[0011] Step (2.1), draw the two-dimensional morphology of rhombic micro-texture in software such as CAD software, and import it into the processing software;

[0012] Step (2.2), preheat the laser and galvanometer for 30 min using laser processing equipment to constant power;

[0013] Step (2.3), place the polished sample on the X-Y displacement table of the equipment, adjust the knob to make the sample located at the center of the laser processing area; adjust the Z direction displacement table to make the surface to be processed away from the lens at a set distance, and complete the focusing;

[0014] Step (2.4), according to the material properties of the cemented carbide substrate and the design requirements of the micro-texture, adjust the parameters of the laser processing equipment, including laser scanning speed, laser power, laser frequency scanning times, to ensure the accuracy and efficiency of laser processing;

[0015] Step (2.5), start the laser processing program, use high energy density laser beam to ablate the surface of the cemented carbide substrate, form micro-texture with predetermined shape and size; the micro-texture reduces the contact area between the tool and the chip, and provides a place for the detached coating particles and the chip, thereby reducing the friction coefficient and wear in the cutting process.

[0016] Step (3), atomic layer deposition of nanoscale TiO2 coating:

[0017] (3.1) ultrasonic cleaning of the micro-textured tool obtained in step (2) with acetone, anhydrous ethanol and deionized water respectively, and drying with nitrogen gun to remove organic impurities, inorganic impurities and static charge;

[0018] (3.2) place the cleaned micro-textured tool in the quartz tube deposition chamber, with the rake face of the micro-textured tool perpendicular to the airflow direction;

[0019] (3.3) after the pressure in the deposition chamber is reduced to 0.5 Pa, nitrogen gas is introduced into the pipeline at a flow rate of 50-200 sccm;

[0020] (3.4) heat the deposition chamber with a tube furnace at a heating rate of 4-6 ℃ / min to 200 ℃, while heating the TiCl4 source bottle and H2O source bottle with a heating belt, heating the TiCl4 source bottle and H2O source bottle to 30-50 ℃, and after heating, keeping warm for 1-1.5 h; after keeping warm, open the valves of the TiCl4 source bottle and H2O source bottle at the same time, control the introduction of TiCl4 and H2O vapor by pneumatic valve, perform atomic layer deposition cycle, the cycle is TiCl4-N2 cleaning-H2O-N2 cleaning, the preset cycle number is 500-2000, and the deposited coating thickness is 50-200 nm.

[0021] (3.5) repeat the preset deposition cycle to deposit TiO2 coating with different thickness by changing the cycle number;

[0022] (4) TiO2 coating annealing: place the micro-textured coated tool obtained in step (3) in a tube furnace, evacuate the tube to a pressure of 0.5 Pa; introduce nitrogen gas and anneal in a nitrogen atmosphere to obtain a TiO2 coated micro-textured tool; the tube furnace has a heating rate of 4-6 ℃ / min, a keeping warm time of 3-4 h and a keeping warm temperature of 400-800 ℃; after annealing, a TiO2 coated micro-textured tool with anatase structure or rutile structure is obtained.

[0023] In step (3.4), the process of one cycle of atomic layer deposition is as follows:

[0024] (3.4.1) TiCl4 precursor is introduced into the reaction cavity by using N2, so that the TiCl4 precursor diffuses to the surface of the micro-textured tool to achieve a chemical saturation adsorption reaction, in which Ti atoms replace H atoms in the hydroxyl groups on the surface of the substrate to generate a reaction byproduct HCl;

[0025] (3.4.2) After the chemical saturation adsorption reaction, the residual TiCl4 precursor and the reaction byproduct HCl obtained in step (1) are removed by purging with N2 for 10-20 s;

[0026] (3.4.3) H2O precursor is introduced into the reaction cavity by using N2, so that the H2O precursor diffuses to the surface of the micro-textured tool to achieve a chemical saturation adsorption reaction, in which the hydroxyl groups in H2O replace the Cl atoms adsorbed on the surface of the substrate in step (1) to generate a TiO2 thin film and form new surface hydroxyl groups, which provide an attachment point for the next cycle, and generate a byproduct HCl;

[0027] (3.4.4) After the reaction in step (3.4.3), the residual H2O and the reaction byproduct HCl obtained in step (3) are removed by purging with N2 for 10-20 s.

[0028] The diamond-shaped micro-texture is processed on the surface of the hard alloy by laser processing. The laser processing parameters are as follows: the scanning speed is 50 mm / s, the laser power is 12 W, the laser frequency is 20 kHz, and the scanning number is 1. The diamond-shaped micro-texture has a side length of 200-500 μm, a groove width of 50 μm, and a groove depth of 20 μm. The micro-texture fills the entire tool-chip contact area, and the distance between the micro-texture and the main cutting edge and the minor cutting edge is 0.1-0.2 mm. After processing, the surface is polished with 2000-mesh SiC sandpaper to remove the protrusions recast on the edge of the micro-texture and reduce the irregular profile of the surface. When the diamond-shaped side length is 400 μm, the best wear-reducing effect is achieved.

[0029] The diamond-shaped micro-texture has three orientations with a phase difference of 120°, a diamond-shaped side length of 200-500 μm, a groove width of 50 μm, and a groove depth of 20 μm.

[0030] The micro-texture region covers at least the tool-chip contact area on the rake face.

[0031] The distance between the micro-texture and the main cutting edge and the minor cutting edge is 0.1-0.2 mm.

[0032] In step (3.4), TiCl4 is heated to 40-50 DEG C, H2O is heated to 40-50 DEG C, high-purity nitrogen is used as the carrier gas and cleaning gas, the deposition temperature is 200 DEG C, the deposition pressure is 0.5 Pa, and the deposition thickness is 50-200 nm.

[0033] Working principle: The tool substrate material of the present application is cemented carbide, and a multi-oriented rhombic micro-texture is machined on the rake face, and a nanoscale thick TiO2 coating is coated. The micro-texture of the micro-textured coating tool is manufactured by laser machining, the TiO2 coating is prepared by atomic layer deposition (ALD) technology, the coating thickness is accurately controlled at 50-200 nm, and then annealing treatment is carried out to enhance its stability. The micro-texture in the present application reduces the contact area between the tool and the chip, and also has the function of efficiently collecting the chip and the coating particles falling off, thereby improving the friction condition in the cutting process. The coating and the substrate of the coating tool exhibit excellent bonding force, ensuring the high stability of the coating. The surface hardness of the coating is extremely high, and the wear resistance is excellent, which significantly improves the overall durability of the tool.

[0034] Advantages: Compared with the prior art, the present application has the following advantages:

[0035] (1) The present application processes a multi-oriented rhombic micro-texture on the surface of the cemented carbide tool by the combined process method of nanosecond laser machining and atomic layer deposition, and deposits a nanoscale TiO2 coating. The micro-texture technology reduces the actual contact area between the tool surface and the chip, realizes the reduction of frictional resistance, and provides a space for accommodating the chip, thereby effectively relieving the adhesion phenomenon between the tool and the chip.

[0036] (2) The atomic layer deposition ALD technology relies on the saturated chemical adsorption and reaction of chemical precursors on the surface of the substrate. In each deposition cycle, the precursor molecules are introduced into the reaction chamber and chemically adsorbed on the active sites of the substrate surface to form a monolayer. This adsorption is self-limiting, that is, when the surface active sites are completely occupied, the excess precursor molecules cannot continue to be adsorbed, thereby ensuring that only one atomic layer is deposited in each cycle, realizing the accurate control of the thickness of the coating at the atomic scale, and exhibiting high uniformity and conformality, as well as excellent step coverage, ensuring effective and uniform coverage of the micro-texture morphology.

[0037] (3) In addition, the deposition temperature of ALD is low, which avoids the potential damage of high temperature to the tool substrate material and reduces the generation of residual thermal stress. The coating and the tool substrate exhibit strong bonding force, which is due to the stable chemical bond connection formed by the atomic layer in the nanocoating through chemical saturated adsorption, which has a high energy state and is not easy to be damaged or fallen off, and has higher bonding strength than traditional coatings.

[0038] (4) The present application implements annealing post-processing on the deposited coating, further filling the pores and defects in the coating, making the coating structure more dense and uniform, thereby reducing the residual stress of the coating, reducing the stress concentration phenomenon, and improving the bonding strength and hardness of the coating. This processing process also promotes the growth and phase change of the grains in the coating, and optimizes the microstructure of the coating.

[0039] (5) The TiO2 coating deposited by the atomic layer deposition ALD technology of the present application has high hardness and excellent heat resistance, providing protection for the micro-textured structure, and further strengthening the tool substrate. The presence of micro-texture not only increases the specific surface area of the tool substrate surface, but also provides more active sites for coating deposition, accelerating the deposition efficiency of the coating. In the cutting process, the nanoparticles produced by the nanocoating material can enter the grooves of the micro-texture, forming a sliding-rolling composite friction pair with the chips, thereby improving the friction condition, and the synergistic effect of micro-texture and coating reduces the cutting resistance and greatly improves the cutting performance and service life of the tool.

[0040] (6) The tool of the present application is suitable for cutting operations of low-hardness metal materials, greatly prolonging the service life of the tool and significantly improving the production efficiency of cutting processing. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 It is a schematic diagram of the three-dimensional structure of the micro-textured tool 100 with a nano-TiO2 coating in the embodiment of the present application, including a rake face 10, a micro-texture array 11 processed on the rake face 10, and a deposited nano-TiO2 coating 20;

[0042] Figure 2 It is a schematic diagram of the specific form and arrangement of the micro-texture array 11 processed on the rake face 10 in the embodiment of the present application;

[0043] Figure 3 It is the coating structure on the micro-texture in the embodiment of the present application, clearly showing how the deposited nano-TiO2 coating 20 uniformly covers the surface of the micro-texture array 11;

[0044] Figure 4 It is a flowchart of the preparation method of the micro-textured tool with a nano-coating in the present application;

[0045] Figure 5 It is a flowchart of the atomic layer deposition coating in the present application;

[0046] Figure 6 It is a single-cycle flowchart of the atomic layer deposition coating in the present application. DETAILED DESCRIPTION

[0047] Embodiment:

[0048] The micro-textured turning tool with a nano-TiO2 coating has a hard alloy material as a tool base material, and a micro-texture on a tool base surface.

[0049] Embodiment 1

[0050] The preparation method of the micro-textured turning tool with a nano-TiO2 coating is as follows:

[0051] Step (1), tool base material pretreatment: polishing the hard alloy base to a mirror surface by using diamond sandpaper with mesh numbers of 240-600-2000-8000 in sequence, and ultrasonic cleaning with anhydrous ethanol and deionized water for 15 min respectively to remove surface impurities and swarf.

[0052] Step (2), processing tool surface micro-texture: processing rhombus micro-texture on the mirror surface by using nanosecond laser, and the laser parameters are scanning speed of 50 mm / s, laser power of 12 W, laser frequency of 20 kHz, and scanning number of 1 time, the processed rhombus micro-texture has a side length of 300 μm, a groove width of 50 μm, and a groove depth of 20 μm, fills the entire tool-chip contact area, and the distance from the main cutting edge to the auxiliary cutting edge is 0.1 mm; after processing, the surface is polished by using 2000 mesh SiC sandpaper to remove the protrusions recast on the edge of the micro-texture and reduce the irregular profile of the surface.

[0053] Step (3), atomic layer deposition to manufacture nano-TiO2 coating: ultrasonic cleaning the micro-textured tool obtained in step (2) with acetone, anhydrous ethanol and deionized water respectively, and blowing dry with a nitrogen gun to remove organic impurities, inorganic impurities and static charge; placing the cleaned micro-textured tool in a quartz tube deposition cavity, with the micro-textured surface perpendicular to the airflow direction, pumping the pressure in the deposition cavity to 0.5 Pa, then introducing nitrogen with a flow rate of 50 sccm; heating the deposition cavity with a tube furnace at a heating rate of 5 ℃ / min to 200 ℃, and heating the TiCl4 source bottle and H2O source bottle with a heating belt to 40 ℃, and keeping the TiCl4 source bottle and H2O source bottle at 40 ℃ for 1.5 h after heating; after keeping warm, opening the source bottle valve, and performing atomic layer deposition cycle, one complete cycle is TiCl4 (1 s) - N2 cleaning (10 s) - H2O (1 s) - N2 cleaning (10 s), the preset cycle number is 500, and the deposited coating thickness is 50 nm.

[0054] Step (4), TiO2 coating annealing: the micro-textured coating tool obtained in step (3) is placed in a tube furnace, the pressure in the tube is vacuumed to 0.5 Pa, nitrogen is introduced, and annealing is carried out in a nitrogen atmosphere; the tube furnace has a heating rate of 5 ℃ / min, the holding time is 3 h, and the holding temperature is 400 ℃; after the annealing is completed, the TiO2 coating micro-textured tool with an anatase structure is obtained.

[0055] Example 2

[0056] The preparation method of the micro-textured turning tool with a nano-TiO2 coating according to the present application is as follows:

[0057] Step (1), tool substrate material pretreatment: the hard alloy substrate is polished to a mirror surface by using diamond sandpaper with mesh numbers of 240-600-2000-8000 in sequence, and is ultrasonically cleaned with anhydrous ethanol and deionized water for 15 min, respectively, to remove surface impurities and swarf.

[0058] Step (2), processing tool surface micro-texture: rhombic micro-texture is processed on the mirror surface by using a nanosecond laser, and the laser parameters used are a scanning speed of 50 mm / s, a laser power of 12 W, a laser frequency of 20 kHz, and a scanning number of 1 time; the rhombic micro-texture has a side length of 400 μm, a groove width of 50 μm, and a groove depth of 20 μm, fills the entire tool-chip contact area, and is 0.2 mm away from the main cutting edge and the secondary cutting edge of the tool; after the processing is completed, the surface is polished by using 2000-mesh SiC sandpaper to remove protrusions recast on the edge of the micro-texture and reduce the irregular profile of the surface.

[0059] Step (3), atomic layer deposition to manufacture a nano-TiO2 coating: the micro-textured tool obtained in step (2) is ultrasonically cleaned with acetone, anhydrous ethanol, and deionized water, respectively, and is blown dry with a nitrogen gun to remove organic impurities, inorganic impurities, and static charges; the cleaned micro-textured tool is placed in a quartz tube deposition cavity with the micro-textured surface perpendicular to the airflow direction, the pressure in the deposition cavity is vacuumed to 0.5 Pa, nitrogen is introduced, and the nitrogen flow is 200 sccm; the deposition cavity is heated by using a tube furnace, the heating rate is 5 ℃ / min, the temperature is heated to 200 ℃, and the TiCl4 source bottle and the H2O source bottle are heated by using a heating belt, the TiCl4 source bottle and the H2O source bottle are heated to 50 ℃, and after the heating is completed, the temperature is maintained for 1 h; after the temperature maintaining is completed, the source bottle valve is opened, and an atomic layer deposition cycle is carried out, one complete cycle is that TiCl4 is introduced (1 s)-N2 cleaning (20 s)-H2O is introduced (1 s)-N2 cleaning (20 s), the preset cycle number is 1000, and the deposited coating thickness is 100 nm.

[0060] Step (4), TiO2 coating annealing: the micro-textured coating cutter obtained in step (3) is placed in a tube furnace, the tube is vacuumed to make the pressure 0.5 Pa, nitrogen is introduced, and annealing is carried out in a nitrogen atmosphere; the tube furnace has a heating rate of 5 ℃ / min, the holding time is 4 h, and the holding temperature is 800 ℃; after the annealing is completed, the TiO2 coating micro-textured cutter with a rutile structure is obtained.

Claims

1. A micro-textured tool with a nano-TiO2 coating, characterized by: The tool base material is a cemented carbide material, and the tool base surface has a microtexture, which is a multi-oriented diamond microtexture, and the coating is a TiO2 hard coating; the diamond microtexture has three orientations, with a phase difference of 120°; the multi-oriented diamond microtexture is: the periodically distributed honeycomb hexagonal unit is divided into three adjacent diamond sub-units, and the orientation difference between the three diamond sub-units is 120°; the diamond sub-unit is formed by connecting three adjacent vertices of the hexagon and the midpoint of the hexagon; every six diamond sub-units arranged around a common vertex form a combined structure; the multi-oriented diamond microtexture is arranged in a honeycomb periodic pattern as a whole, forming a geometric morphology with multi-directional grooves on the tool surface.

2. A method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 1, characterized in that: The process is as follows: pre-treating the cemented carbide substrate, grinding and polishing the cemented carbide surface to a mirror finish using diamond sandpaper; machining a multi-oriented diamond microtexture on the surface of the cemented carbide tool substrate through laser processing; depositing a TiO2 coating on the textured surface using atomic layer deposition; and post-annealing the coating in a nitrogen atmosphere.

3. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 2, characterized in that: The following steps are involved: Step (1), pretreatment of the tool substrate material: grinding and polishing the cemented carbide substrate to a mirror surface with diamond sandpaper with a mesh size of 240-600-2000-8000, and ultrasonically cleaning with anhydrous ethanol and deionized water; Step (2), machining tool surface micro-texture: using nanosecond laser to machine diamond-shaped micro-texture on the mirror surface, the process is as follows: Step (2.1), draw the two-dimensional morphology of the diamond microtexture in the software and import it into the processing software; Step (2.2), using laser processing equipment, preheat the laser and galvanometer to a constant power; In step (2.3), place the polished sample at the center of the laser processing area; adjust the Z-axis translation stage to focus on the surface to be processed; Step (2.4), adjusting the laser scanning speed, laser power, and laser frequency scanning times of the laser processing equipment according to the material properties of the cemented carbide substrate and the design requirements of the microtexture; Step (2.5), ablating the surface of the cemented carbide substrate using a laser beam to form a micro-texture of a predetermined shape and size; Step (3) is to manufacture the TiO2 coating by atomic layer deposition, the process is as follows: (3.1) Ultrasonic cleaning of the micro-textured tool obtained in step (2) using acetone, anhydrous ethanol, and deionized water, and drying using a nitrogen gun; (3.2) Place the cleaned micro-textured tool in the deposition chamber, with the rake surface of the micro-textured tool perpendicular to the airflow direction; (3.3) Evacuate the deposition chamber, introduce nitrogen into the pipeline, and control the flow rate; (3.4) Heating the deposition chamber, the TiCl4 source bottle, and the H2O source bottle, and maintaining the temperature at the set temperature; after the temperature is maintained, the valves of the TiCl4 source bottle and the H2O source bottle are opened simultaneously, and the introduction of TiCl4 and H2O vapors is controlled by a pneumatic valve to perform an atomic layer deposition cycle. The cycle is TiCl4 introduction - N2 cleaning - H2O introduction - N2 cleaning, and one layer of coating is deposited in one cycle; (3.5) Repeating the preset deposition cycle to deposit TiO2 coatings of varying thickness by varying the number of cycles; (4) TiO2 coating annealing: placing the micro-textured coating tool obtained in step (3) in a tube furnace and evacuating the tube; Nitrogen was introduced and annealing was performed in a nitrogen atmosphere to obtain a TiO2 coated micro-textured tool.

4. The method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 3, wherein: In step (3.4), the process of one cycle of atomic layer deposition is: (3.4.1) A TiCl4 precursor is introduced into the reaction chamber using N2, causing it to diffuse onto the surface of the micro-textured tool, achieving a chemical saturation adsorption reaction. Ti atoms replace the H atoms in the hydroxyl groups on the substrate surface, generating HCl as a reaction byproduct. (3.4.2) After the chemical saturation adsorption reaction is completed, use N2 to purge for 10 to 20 seconds to remove the residual TiCl4 precursor and the reaction byproduct HCl obtained in step (1) in the deposition chamber; (3.4.3) Using N2 to introduce a H2O precursor into the reaction chamber, the H2O precursor diffuses onto the surface of the micro-textured tool to achieve a chemical saturation adsorption reaction, where the hydroxyl groups in the H2O replace the Cl atoms adsorbed on the substrate surface in step (1), producing a TiO2 film and forming new surface hydroxyl groups, which provide attachment points for the next cycle and generate HCl as a byproduct; (3.4.4) After the reaction in step (3.4.3), use N2 to purge for 10 to 20 seconds to remove the residual H2O and the reaction by-product HCl obtained in step (3) in the deposition chamber.

5. The method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 3, wherein: Laser processing was used to produce diamond micro-texture on the surface of cemented carbide; the laser processing parameters were: scanning speed of 50 mm / s, laser power of 12 W, laser frequency of 20 kHz, and scanning times of 1.

6. The method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 5, characterized in that: The side length of the diamond-shaped micro-texture is 200-500 μm, the groove width is 50 μm, and the depth is 20 μm.

7. The method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 5, characterized in that: The micro-textured area at least covers the tool-chip contact area on the rake face.

8. The method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 5, wherein: The distance between the micro texture and the main cutting edge and the secondary cutting edge of the tool is 0.1 to 0.2 mm.

9. The method for preparing a micro-textured cutting tool with a nano-TiO2 coating according to claim 3, wherein: In step (3.4), TiCl4 is heated to 40-50°C, H2O is heated to 40-50°C, high-purity nitrogen is used as carrier gas and cleaning gas, the deposition temperature is 200°C, the deposition pressure is 0.5 Pa, and the deposition thickness is 50-200 nm.

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