Detection device for measurement, control and maintenance of precision instrument and detection method thereof

Abstract

The invention relates to the technical field of precision instrument detection, and particularly discloses a detection device for measurement, control and maintenance of a precision instrument and a detection method thereof.The detection device comprises a supporting bottom frame, a supporting top frame and a protective cover and further comprises a detection environment analysis module and a detection precision analysis module. A plurality of electromagnetic shock absorbers and air springs which are uniformly distributed between the supporting bottom frame and the supporting top frame play an effective role in inhibiting high-frequency vibration and low-frequency vibration respectively, so that a relatively wide vibration frequency range can be covered, and vibration interference of different frequencies can be effectively coped with; the vibration energy of the precision instrument in the detection process can be buffered and dispersed to a certain extent, so that the detection precision of the precision instrument is effectively improved, the detection environment analysis module and the detection precision analysis module work cooperatively, precision abnormity is found in time, whether calibration or maintenance is needed or not is determined, and the detection efficiency is improved. And the accuracy, reliability and stability of the precision instrument in the detection process are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of precision instrument detection, and in particular to a detection device and a detection method for precision instrument measurement, control and maintenance. Background Art

[0002] In modern science and technology and industry, precision instruments are widely used, and their measurement accuracy plays a decisive role in many key processes and scientific research. Whether in semiconductor manufacturing, aerospace engineering, or in high-precision metrology laboratories, precision instruments must maintain a high degree of accuracy and reliability. However, precision instruments face many challenges in the process of measurement, control, maintenance and inspection. They have strict requirements on the inspection environment, and slight vibrations, changes in temperature and humidity, and external interference may seriously affect the measurement accuracy. Traditional detection methods often find it difficult to comprehensively and accurately evaluate and control these influencing factors, resulting in deviations and uncertainties in the test results, and cannot meet the increasingly high performance requirements of precision instruments.

[0003] At present, some detection devices on the market mostly use a single type of shock-absorbing element for shock absorption, which cannot effectively deal with vibration interference in a wide frequency range, causing precision instruments to be easily affected by vibration during detection and produce measurement errors. In terms of instrument positioning and fixing methods, common fixture fixing may cause mechanical damage to precision instruments, especially for instruments with high surface accuracy or fragile structure, affecting their integrity and measurement accuracy. Moreover, the weight loading process mostly relies on manual operation, which is not only inefficient, but also easy to introduce errors due to human factors, such as hand shaking or inaccurate placement. In addition, the temperature and humidity control of the detection environment lacks accuracy and intelligence, and cannot be dynamically adjusted according to the characteristics of the instrument and actual detection needs, thereby increasing the negative impact of environmental factors on detection accuracy. At the same time, the existing detection devices lack a complete detection system, making it difficult to conduct a comprehensive and in-depth analysis and evaluation of the detection environment and instrument accuracy, and cannot promptly discover potential problems and provide effective solutions, limiting the effective measurement, control and maintenance of precision instruments.

[0004] Therefore, we proposed a detection device for precision instrument measurement, control and maintenance. Summary of the invention

[0005] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a detection device and a detection method for precision instrument measurement, control and maintenance, in order to solve the above-mentioned technical defects.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a detection device for precision instrument measurement, control and maintenance, comprising a support base, a support top frame and a protective cover, a support top frame is arranged above the support base, and a protective cover is also fixedly arranged on the top of the support top frame, a rubber connection pad is fixedly arranged on the top of the support base, and a plurality of electromagnetic shock absorbers and air springs are fixedly arranged on the top of the rubber connection pad;

[0007] A plurality of electromagnetic shock absorbers and air springs are evenly distributed on the top of the rubber connection pad, and the tops of the plurality of electromagnetic shock absorbers and air springs are fixedly connected to the bottom of the support top frame, a vacuum adsorption plate is fixedly arranged in the middle of the top of the support top frame, and a movable closing plate is also slidably arranged on the front of the protective cover;

[0008] The two sides of the top of the supporting top frame are also fixedly provided with weight placing racks, the top of the inside of the protective cover is fixedly provided with an electric slide 1, and the bottom of the electric slide 1 is slidably provided with a movable rack, the bottom of the movable rack is fixedly provided with an electric slide 2, and both sides of the bottom of the electric slide 2 are slidably provided with micro-electric cylinders, and the bottom ends of the driving ends of the two micro-electric cylinders are fixedly provided with electric clamps;

[0009] It also includes a detection environment analysis module and a detection accuracy analysis module;

[0010] A detection environment analysis module is used to process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage to obtain a vibration stability state index of the detection device corresponding to the detection environment, and analyze the stability state of the detection device corresponding to the detection environment based on the vibration stability state index;

[0011] The detection accuracy analysis module is used to analyze the accuracy detection of the precision instrument corresponding to each detection stage, and obtain the detection accuracy status of the precision instrument corresponding to each detection stage.

[0012] Furthermore, a temperature and humidity regulator is fixedly installed on the back of the protective cover, and both output ends of the temperature and humidity regulator extend to the inside of the protective cover. An operation panel is also fixedly installed on the top of the protective cover, and the inside of the operation panel is electrically connected to the precision instrument to be measured through a wire.

[0013] Furthermore, support feet are slidably arranged around the bottom of the support base, and adjusting bolts are rotatably arranged around the top of the support base, the bottom ends of the four adjusting bolts are respectively connected to the internal threads of the four support feet, and a level sensor is arranged inside the support base.

[0014] Furthermore, the method of processing and analyzing the vibration parameters of the detection device at each sampling time point in each detection stage is as follows:

[0015] The vibration frequency and vibration amplitude of the detection device at each sampling time point in each detection stage are monitored and data collected in real time by a vibration sensor, and the vibration frequency and vibration amplitude of the detection device at each sampling time point in each detection stage are obtained, which are respectively recorded as ZP i and ZF i, wherein i=1, 2, ..., n, i values ​​are all integers, i represents the number of each sampling time point, and n represents the total number of the sampling time points;

[0016] According to the formula Calculate the vibration intensity index ZQ of the detection device corresponding to each detection stage;

[0017] According to the specific characteristics and usage scenarios of the precision instrument to be tested, the reference vibration intensity index of the detection device corresponding to each detection stage is manually set, which is recorded as ZQC;

[0018] According to the formula Calculate the vibration stability index ZW of the detection device corresponding to the detection environment, where It is expressed as the average value of the vibration amplitude of the detection device corresponding to each detection stage.

[0019] Furthermore, when the vibration stability state index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; when the vibration stability state index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument.

[0020] Furthermore, the method of analyzing the accuracy of the precision instrument corresponding to each detection stage is as follows:

[0021] The weights of each mass are numbered and recorded as Mj, j = 1, 2, ..., m, j represents the number of each mass weight, m ​​represents the total number of each mass weight, and the weights of each mass are placed on the precision instrument in sequence, and the measurement reading of the precision instrument corresponding to each weight placement is obtained, which is recorded as Rj;

[0022] By using the least squares method to fit a straight line y=ax+b, where x is the weight and y is the measured reading, according to the formula The linearity index XL of the precision instrument corresponding to each detection stage is calculated, ΔL is represented by the linearity deviation value of the precision instrument corresponding to each detection stage, and ΔLmax is represented by the deviation value calculated under the condition of the maximum allowable linearity deviation.

[0023] Furthermore, the weights of each mass are repeatedly placed on the precision instrument for p times, p ≥ 3, and the measurement readings of the precision instrument corresponding to each weight placement are obtained, recorded as Rjk, k = 1, 2, ..., p, according to the formula Calculate the repeatability index CR, σ of the precision instrument corresponding to each detection stage Rj It is expressed as the standard deviation of the readings measured by the precision instrument after each weight is placed. It is expressed as the average value of the measurement readings of the precision instrument after each weight is placed.

[0024] Furthermore, by obtaining the corresponding measurement readings of the weights of each mass on the precision instrument, the difference between the measurement readings and the mass of the weights of each mass is calculated, and the absolute value is taken as the accuracy deviation of the precision instrument corresponding to each detection stage, and then the accuracy deviations corresponding to the weights of each mass are summed and divided by the number of weights of each mass to obtain the accuracy index of the precision instrument corresponding to each detection stage, which is recorded as ZA;

[0025] According to the formula The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is calculated, w1, w2 and w3 respectively represent the weight coefficients determined according to the importance of the influence of various indicators on the detection accuracy of the precision instrument, and w1+w2+w3=1.

[0026] Furthermore, a comparison is made between the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage and the detection accuracy coefficient threshold artificially set according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good; otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

[0027] Furthermore, a detection method for a detection device for precision instrument measurement, control and maintenance comprises the following steps:

[0028] Step 1: First, an effective horizontal adjustment system is formed by the support feet that are slidably arranged around the bottom of the support frame and the adjustment bolts that are rotatably arranged around the top. By rotating the adjustment bolts, the extension or retraction length of the support feet is controlled because the adjustment bolts are connected to the internal threads of the support feet, so that the detection device is placed in a horizontal state;

[0029] Step 2: Process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage through the detection environment analysis module built into the detection device, and obtain the vibration stability state index of the detection device corresponding to the detection environment through comprehensive calculation and analysis of the vibration intensity index and vibration amplitude of the detection device corresponding to each detection stage. If the vibration stability state index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; if the vibration stability state index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument;

[0030] Step 3: After determining that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, the precision instrument is placed inside the protective cover by sliding the movable closing plate upwards, and the bottom of the precision instrument is adsorbed and positioned by the vacuum adsorption plate on the top of the supporting top frame, and then the movable closing plate is reset. The environmental parameters of the precision instrument during the test are intelligently controlled by the temperature and humidity regulator, so that the precision instrument is in a reasonable detection environment state inside the protective cover;

[0031] Step 4: By setting weight placement racks on both sides of the top of the support frame, a special placement position is provided for the weights. When performing precision detection operations on precision instruments, the electric slide 1, electric slide 2 and electric clamps are combined with the structural design, and the electric clamps at the bottom of the two micro-electric cylinder drive ends can realize automatic grasping and release of the weights;

[0032] Step 5. Utilize the accuracy detection and analysis of the precision instrument corresponding to each detection stage, place weights of various masses on the precision instrument in turn, obtain the measurement reading of the precision instrument after each weight is placed, and repeatedly place weights of various masses on the precision instrument to obtain the measurement reading of the precision instrument after each weight is placed, obtain the detection accuracy coefficient of the precision instrument corresponding to each detection stage after comprehensive calculation and analysis, compare and analyze the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage and the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument, if the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy state of the precision instrument corresponding to each detection stage is good, otherwise, it means that the detection accuracy state of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

[0033] The beneficial effects achieved by the present invention using the above structure are as follows:

[0034] 1. When performing measurement, control, maintenance and inspection of mechanical precision instruments, the movable closing plate is slid upward to place the precision instrument inside the protective cover, and the vacuum adsorption plate on the top of the support frame is used to adsorb and position the bottom of the precision instrument to ensure the stability of the precision instrument during the inspection process. In addition, a number of electromagnetic shock absorbers and air springs evenly distributed between the support base and the support top frame can effectively suppress high-frequency vibrations and low-frequency vibrations, respectively, and can cover a wider vibration frequency range, effectively cope with vibration interference of different frequencies, and can also buffer and disperse the vibration energy of the precision instrument during the inspection process to a certain extent, thereby effectively improving the inspection accuracy of the precision instrument.

[0035] 2. By setting up weight placement racks on both sides of the top of the supporting top frame, a special placement position is provided for the weights. When performing precision testing of precision instruments and other operations, combined with the structural design of electric slide 1, electric slide 2 and electric clamps, the electric clamps at the bottom of the two micro-electric cylinder drive ends can realize automatic grasping and releasing of the weights. During the testing process, this function can accurately load the weights onto the precision instrument according to the preset program or the instructions of the tester, avoiding the errors that may be caused by manual placement of weights.

[0036] 3. An effective horizontal adjustment system is formed by the support feet that slide around the bottom of the support frame and the adjusting bolts that rotate around the top. By rotating the adjusting bolts, the extension or retraction length of the support feet can be accurately controlled due to their internal threaded connection with the support feet. This design allows the device to be easily adjusted to a horizontal state when placed on an uneven ground. When subjected to external vibration or interference, the stable support structure can reduce the shaking of the device and provide a relatively stable detection environment for precision instruments. This is of great significance for preventing precision instruments from being damaged or causing measurement errors due to shaking. In particular, when used in conjunction with shock-absorbing components such as electromagnetic shock absorbers and air springs in the device, the shock-absorbing effect can be better exerted, further improving the stability and reliability of precision instrument detection.

[0037] 4. In the present invention, the detection environment analysis module and the detection accuracy analysis module work together. The detection environment analysis module uses a vibration sensor to monitor and collect the vibration frequency and amplitude at the sampling time points of each detection stage, and calculates the vibration intensity index and the stable state index through the formula, so as to accurately judge the vibration stability of the detection environment, and can effectively distinguish whether the impact of vibration on the detection accuracy of precision instruments is within an acceptable range, provide a scientific basis for whether to change the detection environment, and ensure the suitability of the detection environment; the detection accuracy analysis module uses weights of different masses and multiple placement operations to calculate the linearity index, repeatability index and accuracy index respectively, and comprehensively obtains the detection accuracy coefficient. By comparing with the threshold, the accuracy status of the precision instrument in each detection stage can be accurately evaluated, so as to timely discover accuracy anomalies and determine whether calibration or maintenance is needed, thereby ensuring the accuracy, reliability and stability of the precision instrument during the detection process, and overall improving the comprehensiveness, accuracy and effectiveness of the detection device for the measurement, control, maintenance and detection of precision instruments. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0039] Figure 1 A schematic diagram of a detection device for measuring, controlling and maintaining a precision instrument according to an embodiment of the present invention;

[0040] Figure 2 A schematic diagram of a supporting chassis, a protective cover and a movable closing plate structure according to an embodiment of the present invention;

[0041] Figure 3 A schematic diagram of the internal structure of the protective cover according to an embodiment of the present invention;

[0042] Figure 4 A schematic diagram of a support foot and an adjusting bolt structure according to an embodiment of the present invention;

[0043] Figure 5 It is a principle block diagram of the detection environment analysis module and the detection accuracy analysis module according to an embodiment of the present invention.

[0044] In the figure, 1. Support base; 2. Rubber connecting pad; 3. Electromagnetic shock absorber; 4. Air spring; 5. Support top frame; 6. Protective cover; 7. Movable closing plate; 8. Vacuum adsorption plate; 9. Weight placement rack; 10. Electric slide 1; 11. Movable rack; 12. Electric slide 2; 13. Micro electric cylinder; 14. Electric clamp; 15. Temperature and humidity regulator; 16. Operation panel; 17. Support foot; 18. Adjustment bolt. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0047] Embodiment 1:

[0048] See also Figures 1 to 4 As shown, a detection device for measuring and controlling maintenance of precision instruments comprises a support base frame 1, a support top frame 5 and a protective cover 6. A support top frame 5 is arranged above the support base frame 1, and a protective cover 6 is also fixedly arranged on the top of the support top frame 5. A rubber connection pad 2 is fixedly arranged on the top of the support base frame 1, and a plurality of electromagnetic shock absorbers 3 and air springs 4 are fixedly arranged on the top of the rubber connection pad 2. The rubber connection pad 2 arranged on the top of the support base frame 1 also plays an auxiliary shock absorption role. The rubber material itself has good elasticity and damping properties, which can further disperse and absorb vibration energy. When the vibration is transmitted from the support base frame 1, the rubber connection pad 2 can consume part of the energy in the initial stage of vibration transmission, thereby reducing the burden of the subsequent electromagnetic shock absorber 3 and the air spring 4, and also enhancing the stability of the entire shock absorption system.

[0049] Several electromagnetic shock absorbers 3 and air springs 4 are evenly distributed on the top of the rubber connection pad 2, and the tops of several electromagnetic shock absorbers 3 and air springs 4 are fixedly connected to the bottom of the support frame 5. A vacuum adsorption plate 8 is fixedly arranged in the middle of the top of the support frame 5. The vacuum adsorption plate 8 in the middle of the top of the support frame 5 is used to adsorb the bottom of the precision instrument. In the measurement, control, maintenance and inspection process of mechanical precision instruments, this adsorption method can provide stable positioning for the instrument. Compared with the traditional fixture fixing method, the vacuum adsorption plate 8 will not cause mechanical extrusion and damage to the instrument, especially for some precision instruments with high surface accuracy requirements or relatively fragile structures, it can better ensure their integrity. At the same time, the vacuum adsorption force can be evenly distributed on the bottom of the instrument to ensure that the instrument will not be displaced due to slight external force interference during the inspection process, thereby improving the accuracy and reliability of the inspection;

[0050] A movable closing plate 7 is also slidably provided on the front of the protective cover 6. The protective cover 6 fixed on the top of the supporting top frame 5 can provide a relatively closed detection environment for the precision instrument. During the detection process, the protective cover 6 can prevent external dust, debris and other pollutants from entering, avoiding damage to the precision instrument. For example, in a dusty industrial environment or outdoor detection scene, the protective cover 6 can effectively isolate dust and prevent it from entering the instrument to affect the accuracy and normal operation of the instrument. The movable closing plate 7 slidingly provided on the front of the protective cover 6 facilitates the placement and removal of the precision instrument while ensuring the protective performance. When the instrument needs to be placed in the protective cover 6, the movable closing plate 7 can be slid upwards. The operation is simple and quick. This design can meet the protection requirements without causing inconvenience to the detection work due to the existence of the protective structure.

[0051] It should be noted that when conducting measurement, control, maintenance and inspection of mechanical precision instruments, the movable closing plate 7 is slid upward to place the precision instrument into the interior of the protective cover 6, and the bottom of the precision instrument is adsorbed and positioned using the vacuum adsorption plate 8 on the top of the support frame 5 to ensure the stability of the precision instrument during the inspection process. In addition, a number of electromagnetic shock absorbers 3 and air springs 4 are evenly distributed between the support base 1 and the support top frame 5 to effectively suppress high-frequency vibrations and low-frequency vibrations, respectively, and can cover a wider range of vibration frequencies, effectively cope with vibration interference of different frequencies, and can also buffer and disperse the vibration energy of the precision instrument during the inspection process to a certain extent, thereby effectively improving the inspection accuracy of the precision instrument.

[0052] Furthermore, weight placing racks 9 are fixedly arranged on both sides of the top of the supporting top frame 5, an electric slide 10 is fixedly arranged on the top of the inside of the protective cover 6, and a movable frame 11 is slidably arranged at the bottom of the electric slide 10, an electric slide 2 12 is fixedly arranged at the bottom of the movable frame 11, and micro electric cylinders 13 are slidably arranged on both sides of the bottom of the electric slide 2 12, and electric clamps 14 are fixedly arranged at the bottom of the driving ends of the two micro electric cylinders 13;

[0053] It should be noted that by arranging weight placement racks 9 on both sides of the top of the support top frame 5, a special placement position is provided for the weights. When performing precision detection of precision instruments such as electronic balances, combined with the structural design of electric slide 10, electric slide 2 12 and electric clamp 14, the electric clamp 14 at the bottom of the driving end of two micro-electric cylinders 13 can realize automatic grasping and release of the weights. During the detection process, this function can accurately load the weights onto the precision instrument according to the preset program or the instructions of the tester, avoiding the errors that may be caused by manual placement of weights. For example, manual placement of weights may affect the test results due to hand shaking or inaccurate placement, while the electric clamp 14 can be operated in a stable and precise manner to ensure that the position and strength of each weight loading are consistent, thereby improving the accuracy and repeatability of the detection. This automated operation method can also reduce the workload of manual operation, especially in complex test processes that require a large amount of weight loading and unloading, which can significantly improve the detection efficiency and the detection accuracy of precision instruments.

[0054] Furthermore, a temperature and humidity regulator 15 is fixedly provided on the back of the protective cover 6, and the two output ends of the temperature and humidity regulator 15 extend to the interior of the protective cover 6; an operation panel 16 is fixedly provided on the top of the protective cover 6, and the interior of the operation panel 16 is electrically connected to the precision instrument to be measured through a wire; the environmental parameters of the precision instrument during the test are intelligently regulated by the temperature and humidity regulator 15 to ensure that the precision instrument is in a reasonable detection environment state inside the protective cover 6, thereby reducing the influence of environmental parameters on the detection accuracy of the precision instrument.

[0055] Furthermore, support feet 17 are slidably provided around the bottom of the support frame 1, and adjusting bolts 18 are rotatably provided around the top of the support frame 1, and the bottom ends of the four adjusting bolts 18 are respectively connected to the internal threads of the four support feet 17, and a level sensor is provided inside the support frame 1;

[0056] It should be noted that an effective horizontal adjustment system is formed by the support feet 17 slidingly arranged around the bottom of the support base 1 and the adjusting bolts 18 rotatably arranged around the top. By rotating the adjusting bolts 18, since they are connected to the internal threads of the support feet 17, the extension or retraction length of the support feet 17 can be accurately controlled. This design allows the device to be easily adjusted to a horizontal state when placed on an uneven ground. When subjected to external vibration or interference, the stable support structure can reduce the shaking of the device and provide a relatively stable detection environment for precision instruments. This is of great significance for preventing precision instruments from being damaged or causing measurement errors due to shaking. In particular, when used in conjunction with shock-absorbing components such as electromagnetic shock absorbers 3 and air springs 4 in the device, the shock-absorbing effect can be better exerted, further improving the stability and reliability of precision instrument detection. For example, in actual use environments such as laboratories or industrial sites, it is often difficult to ensure that the ground is absolutely flat. Through this fine horizontal adjustment, it is ensured that the precision instrument is in a horizontal position during the detection process. For mechanical precision instruments that require high-precision horizontal placement, such as high-precision electronic balances, this is an important factor in ensuring their measurement accuracy.

[0057] Embodiment 2:

[0058] See also Figure 5 As shown, specifically, this embodiment also proposes a detection system for publicly explaining the internal settings of the detection device in Example 1, including a detection environment analysis module and a detection accuracy analysis module;

[0059] A detection environment analysis module is used to process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage to obtain a vibration stability state index of the detection device corresponding to the detection environment, and analyze the stability state of the detection device corresponding to the detection environment based on the vibration stability state index;

[0060] The vibration frequency and vibration amplitude of the detection device at each sampling time point in each detection stage are monitored and data collected in real time by a vibration sensor, and the vibration frequency and vibration amplitude of the detection device at each sampling time point in each detection stage are obtained, which are respectively recorded as ZP i and ZF i, wherein i=1, 2, ..., n, i values ​​are all integers, i represents the number of each sampling time point, and n represents the total number of the sampling time points;

[0061] According to the formula Calculate the vibration intensity index ZQ of the detection device corresponding to each detection stage;

[0062] According to the specific characteristics and usage scenarios of the precision instrument to be tested, the reference vibration intensity index of the detection device corresponding to each detection stage is manually set, which is recorded as ZQC;

[0063] According to the formula Calculate the vibration stability index ZW of the detection device corresponding to the detection environment, where It is expressed as the average value of the vibration amplitude of the detection device corresponding to each detection stage;

[0064] When the vibration stability state index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; when the vibration stability state index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument.

[0065] The detection accuracy analysis module is used to analyze the accuracy detection of the precision instrument corresponding to each detection stage, and obtain the detection accuracy status of the precision instrument corresponding to each detection stage;

[0066] The weights of each mass are numbered and recorded as Mj, j = 1, 2, ..., m, j represents the number of each mass weight, m ​​represents the total number of each mass weight, and the weights of each mass are placed on the precision instrument in sequence, and the measurement reading of the precision instrument corresponding to each weight placement is obtained, which is recorded as Rj;

[0067] By using the least squares method to fit a straight line y=ax+b, where x is the weight and y is the measured reading, according to the formula The linearity index XL of the precision instrument corresponding to each detection stage is calculated, ΔL is represented by the linearity deviation value of the precision instrument corresponding to each detection stage, and ΔLmax is represented by the deviation value calculated under the condition of the maximum allowable linearity deviation;

[0068] Repeat placing weights of different masses on the precision instrument for p times, p ≥ 3, and obtain the measurement reading of the precision instrument after each weight placement, recorded as Rjk, k = 1, 2, ..., p, according to the formula Calculate the repeatability index CR, σ of the precision instrument corresponding to each detection stage Rj It is expressed as the standard deviation of the readings measured by the precision instrument after each weight is placed. It is expressed as the average value of the readings measured by the precision instrument after each weight is placed;

[0069] By obtaining the corresponding measurement readings of the weights of each mass on the precision instrument, the difference between the measurement readings and the mass of the weights of each mass is calculated, and the absolute value is taken as the accuracy deviation of the precision instrument corresponding to each detection stage, and then the accuracy deviations corresponding to the weights of each mass are summed and divided by the number of weights of each mass to obtain the accuracy index of the precision instrument corresponding to each detection stage, which is recorded as ZA;

[0070] According to the formula Calculate the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage, w1, w2 and w3 represent the weight coefficients determined according to the importance of each indicator on the detection accuracy of the precision instrument, and w1+w2+w3=1;

[0071] The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is compared and analyzed with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

[0072] In a specific embodiment, the present invention cooperates with the detection environment analysis module and the detection accuracy analysis module. The detection environment analysis module monitors and collects the vibration frequency and amplitude at the sampling time points of each detection stage with the help of a vibration sensor, and calculates the vibration intensity index and the stable state index through the formula, so as to accurately judge the vibration stability of the detection environment, and can effectively distinguish whether the impact of vibration on the detection accuracy of precision instruments is within an acceptable range, provide a scientific basis for whether to change the detection environment, and ensure the suitability of the detection environment; the detection accuracy analysis module uses weights of different masses and multiple placement operations to calculate the linearity index, repeatability index and accuracy index respectively, and comprehensively obtains the detection accuracy coefficient, which can be compared with the threshold to accurately evaluate the accuracy status of the precision instrument in each detection stage, so as to timely discover accuracy anomalies and determine whether calibration or maintenance is needed, thereby ensuring the accuracy, reliability and stability of the precision instrument during the detection process, and overall improving the comprehensiveness, accuracy and effectiveness of the detection device for the measurement, control, maintenance and detection of precision instruments.

[0073] Embodiment 3:

[0074] Specifically, this embodiment also discloses a detection method for a detection device for precision instrument measurement, control and maintenance, comprising the following steps:

[0075] Step 1: First, an effective horizontal adjustment system is formed by the support feet 17 that are slidably arranged around the bottom of the support frame 1 and the adjustment bolts 18 that are rotatably arranged around the top. By rotating the adjustment bolts 18, which are connected to the inner threads of the support feet 17, the extension or retraction length of the support feet 17 is controlled to put the detection device in a horizontal position;

[0076] Step 2: Process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage through the detection environment analysis module built into the detection device, and obtain the vibration stability state index of the detection device corresponding to the detection environment through comprehensive calculation and analysis of the vibration intensity index and vibration amplitude of the detection device corresponding to each detection stage. If the vibration stability state index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; if the vibration stability state index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument;

[0077] Step 3: After determining that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, the precision instrument is placed inside the protective cover 6 by sliding the movable closing plate 7 upwards, and the bottom of the precision instrument is adsorbed and positioned by the vacuum adsorption plate 8 on the top of the supporting top frame 5, and then the movable closing plate 7 is reset, and the environmental parameters of the precision instrument during the test are intelligently regulated by the temperature and humidity regulator 15, so that the precision instrument is in a reasonable detection environment state inside the protective cover 6;

[0078] Step 4: By arranging weight placement racks 9 on both sides of the top of the support top frame 5, a special placement position is provided for the weights. When performing precision detection operations of precision instruments, the electric slide 10, the electric slide 2 12 and the electric clamp 14 and other structural designs are combined, and the electric clamp 14 at the bottom of the driving end of the two micro-electric cylinders 13 can realize automatic grasping and release of the weights;

[0079] Step 5. Utilize the accuracy detection and analysis of the precision instrument corresponding to each detection stage, place weights of various masses on the precision instrument in turn, obtain the measurement reading of the precision instrument after each weight is placed, and repeatedly place weights of various masses on the precision instrument to obtain the measurement reading of the precision instrument after each weight is placed, obtain the detection accuracy coefficient of the precision instrument corresponding to each detection stage after comprehensive calculation and analysis, compare and analyze the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage and the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument, if the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy state of the precision instrument corresponding to each detection stage is good, otherwise, it means that the detection accuracy state of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

[0080] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0081] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0082] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the attached claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0083] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A detection device for precision instrument measurement, control and maintenance, characterized in that: The invention comprises a supporting bottom frame (1), a supporting top frame (5) and a protective cover (6); a supporting top frame (5) is arranged above the supporting bottom frame (1), and a protective cover (6) is also fixedly arranged on the top of the supporting top frame (5); a rubber connecting pad (2) is fixedly arranged on the top of the supporting bottom frame (1), and a plurality of electromagnetic shock absorbers (3) and air springs (4) are fixedly arranged on the top of the rubber connecting pad (2); A plurality of electromagnetic shock absorbers (3) and air springs (4) are evenly distributed on the top of the rubber connection pad (2), and the tops of the plurality of electromagnetic shock absorbers (3) and air springs (4) are fixedly connected to the bottom of the support top frame (5), a vacuum adsorption plate (8) is fixedly arranged in the middle of the top of the support top frame (5), and a movable closing plate (7) is also slidably arranged on the front of the protective cover (6); The two sides of the top of the supporting top frame (5) are also fixedly provided with weight placing frames (9); the top of the inside of the protective cover (6) is fixedly provided with an electric slide table (10), and the bottom of the electric slide table (10) is slidably provided with a movable frame (11); the bottom of the movable frame (11) is fixedly provided with an electric slide table (12), and the two sides of the bottom of the electric slide table (12) are slidably provided with micro-electric cylinders (13), and the bottom ends of the driving ends of the two micro-electric cylinders (13) are fixedly provided with electric clamps (14); It also includes a detection environment analysis module and a detection accuracy analysis module; A detection environment analysis module is used to process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage to obtain a vibration stability state index of the detection device corresponding to the detection environment, and analyze the stability state of the detection device corresponding to the detection environment based on the vibration stability state index; The detection accuracy analysis module is used to analyze the accuracy detection of the precision instrument corresponding to each detection stage, and obtain the detection accuracy status of the precision instrument corresponding to each detection stage.

2. A detection device for measuring, controlling and maintaining a precision instrument according to claim 1, characterized in that: A temperature and humidity regulator (15) is also fixedly arranged on the back of the protective cover (6), and both output ends of the temperature and humidity regulator (15) extend into the interior of the protective cover (6). An operation panel (16) is also fixedly arranged on the top of the protective cover (6), and the interior of the operation panel (16) is electrically connected to the precision instrument to be measured via a wire.

3. A detection device for measuring, controlling and maintaining a precision instrument according to claim 2, characterized in that: Support feet (17) are slidably arranged around the bottom of the support base (1), and adjustment bolts (18) are rotatably arranged around the top of the support base (1), the bottom ends of the four adjustment bolts (18) are respectively connected to the internal threads of the four support feet (17), and a level sensor is arranged inside the support base (1).

4. A detection device for measuring, controlling and maintaining a precision instrument according to claim 3, characterized in that: The method of processing and analyzing the vibration parameters of the detection device at each sampling time point in each detection stage is as follows: The vibration frequency and vibration amplitude of the detection device at each sampling time point in each detection stage are monitored and collected in real time by a vibration sensor, and the vibration frequency and vibration amplitude of the detection device at each sampling time point in each detection stage are obtained, which are recorded as ZPi and ZFi respectively, wherein i=1, 2, ..., n, i values ​​are all integers, i represents the number of each sampling time point, and n represents the total number of the sampling time points; According to the formula Calculate the vibration intensity index ZQ of the detection device corresponding to each detection stage; According to the specific characteristics and usage scenarios of the precision instrument to be tested, the reference vibration intensity index of the detection device corresponding to each detection stage is manually set, which is recorded as ZQC; According to the formula Calculate the vibration stability index ZW of the detection device corresponding to the detection environment, where It is expressed as the average value of the vibration amplitude of the detection device corresponding to each detection stage.

5. A detection device for measuring, controlling and maintaining a precision instrument according to claim 4, characterized in that: When the vibration stability state index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; when the vibration stability state index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument.

6. A detection device for measuring, controlling and maintaining a precision instrument according to claim 5, characterized in that: The method of accuracy detection and analysis of the precision instrument corresponding to each detection stage is as follows: The weights of each mass are numbered and recorded as Mj, j = 1, 2, ..., m, j represents the number of each mass weight, m ​​represents the total number of each mass weight, and the weights of each mass are placed on the precision instrument in sequence, and the measurement reading of the precision instrument corresponding to each weight placement is obtained, which is recorded as Rj; By using the least squares method to fit a straight line y=ax+b, where x is the weight and y is the measured reading, according to the formula The linearity index XL of the precision instrument corresponding to each detection stage is calculated, ΔL is represented by the linearity deviation value of the precision instrument corresponding to each detection stage, and ΔLmax is represented by the deviation value calculated under the condition of the maximum allowable linearity deviation.

7. A detection device for measuring, controlling and maintaining a precision instrument according to claim 6, characterized in that: Repeat placing weights of different masses on the precision instrument for p times, p ≥ 3, and obtain the measurement reading of the precision instrument after each weight placement, recorded as Rjk, k = 1, 2, ..., p, according to the formula Calculate the repeatability index CR, σ of the precision instrument corresponding to each detection stage Rj It is expressed as the standard deviation of the readings measured by the precision instrument after each weight is placed. It is expressed as the average value of the measurement readings of the precision instrument after each weight is placed.

8. A detection device for measuring, controlling and maintaining a precision instrument according to claim 7, characterized in that: By obtaining the corresponding measurement readings of the weights of each mass on the precision instrument, the difference between the measurement readings and the mass of the weights of each mass is calculated, and the absolute value is taken as the accuracy deviation of the precision instrument corresponding to each detection stage, and then the accuracy deviations corresponding to the weights of each mass are summed and divided by the number of weights of each mass to obtain the accuracy index of the precision instrument corresponding to each detection stage, which is recorded as ZA; According to the formula The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is calculated, w1, w2 and w3 respectively represent the weight coefficients determined according to the importance of the influence of various indicators on the detection accuracy of the precision instrument, and w1+w2+w3=1.

9. A detection device for measuring, controlling and maintaining a precision instrument according to claim 8, characterized in that: The detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is compared and analyzed with the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument. If the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is good. Otherwise, it means that the detection accuracy status of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

10. A detection method based on the detection device for precision instrument measurement, control and maintenance according to claim 9, characterized in that: The following steps are involved: Step 1: First, an effective horizontal adjustment system is formed by the support feet (17) slidably arranged around the bottom of the support base frame (1) and the adjustment bolts (18) rotatably arranged around the top. By rotating the adjustment bolts (18), the extension or retraction length of the support feet (17) is controlled due to the internal thread connection of the adjustment bolts (18) and the support feet (17), so that the detection device is placed in a horizontal state; Step 2: Process and analyze the vibration parameters of the detection device at each sampling time point in each detection stage through the detection environment analysis module built into the detection device, and obtain the vibration stability state index of the detection device corresponding to the detection environment through comprehensive calculation and analysis of the vibration intensity index and vibration amplitude of the detection device corresponding to each detection stage. If the vibration stability state index ZW of the detection device corresponding to the detection environment is greater than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, and the impact on the detection accuracy of the precision instrument is within an acceptable range; if the vibration stability state index ZW of the detection device corresponding to the detection environment is less than 1, it means that the vibration stability of the detection device corresponding to the current detection environment is poor, and the detection environment of the detection device needs to be changed to reduce the impact on the detection accuracy of the precision instrument; Step 3: After determining that the vibration stability of the detection device corresponding to the current detection environment is relatively stable, the precision instrument is placed inside the protective cover (6) by sliding the movable closing plate (7) upwards, and the bottom of the precision instrument is adsorbed and positioned using the vacuum adsorption plate (8) on the top of the supporting top frame (5), and then the movable closing plate (7) is reset, and the environmental parameters of the precision instrument during the test are intelligently regulated by the temperature and humidity regulator (15), so that the precision instrument is in a reasonable detection environment state inside the protective cover (6); Step 4: by arranging weight placement racks (9) on both sides of the top of the supporting top frame (5), a special placement position is provided for the weights. When performing precision detection operations on precision instruments, the electric slide 1 (10), the electric slide 2 (12) and the electric clamp (14) and other structural designs are combined, and the electric clamp (14) at the bottom of the driving end of the two micro electric cylinders (13) can realize automatic grasping and releasing of the weights; Step 5. Utilize the accuracy detection and analysis of the precision instrument corresponding to each detection stage, place weights of various masses on the precision instrument in turn, obtain the measurement reading of the precision instrument after each weight is placed, and repeatedly place weights of various masses on the precision instrument to obtain the measurement reading of the precision instrument after each weight is placed, obtain the detection accuracy coefficient of the precision instrument corresponding to each detection stage after comprehensive calculation and analysis, compare and analyze the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage and the detection accuracy coefficient threshold value set artificially according to the specific characteristics and accuracy requirements of the precision instrument, if the detection accuracy coefficient ZC of the precision instrument corresponding to each detection stage is less than the set detection accuracy coefficient threshold value, it means that the detection accuracy state of the precision instrument corresponding to each detection stage is good, otherwise, it means that the detection accuracy state of the precision instrument corresponding to each detection stage is abnormal, and the precision instrument needs to be calibrated or maintained.

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