Structured light microscopic system

Abstract

A structured light microscopic system relates to the technical field of optical detection equipment and comprises a light source system, a double telecentric projection system, a relay system and an image detection assembly. The light source system is configured to provide structured light for the double telecentric projection system; the double telecentric projection system is configured to receive the structured light output by the light source system and project the structured light to the relay system according to a preset zoom ratio; the relay system is configured to receive the structured light output by the double telecentric projection system, perform relay transmission and output parallel structured light used for irradiating a preset field angle of the sample to be detected; and the image detection assembly is configured to receive a detection light beam formed by the structured light reflected by the sample to be detected and output corresponding imaging information. According to the invention, higher light energy transmission efficiency can be realized, and higher detection resolution can be provided.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection equipment, and in particular to a structured light microscopy system. Background Art

[0002] With the development of science and technology information, people's demand for product volume and quality is increasingly inclined towards miniaturization, so the demand for material microstructure detection in the industrial field has also emerged. Each terminal business always hopes that the internal components of the product conform to its own theoretical design to meet people's needs. On the other hand, it can also help related industry practitioners to master the processing rules and physical nature of microscopic materials.

[0003] As early as 1665, humans used optical microscopes to break through the observation limitations of the human eye, but the wave nature of light limits the resolution of optical microscopes. The lateral resolution of traditional optical bright field microscopes can only reach 200nm, which is difficult to meet the detection accuracy in the current industrial field.

[0004] The objects to be measured are often of a certain size, so optical microscopy imaging technology can be generally divided into two categories according to the detection mode: point scanning imaging technology and wide-field imaging technology. In the field of optical microscopy, people have been pursuing the ability to obtain three-dimensional detailed information of samples in a larger imaging area. However, this goal is limited by: First, the presence of scattered light will lead to the generation of background light, resulting in the superposition of background signals from other areas in addition to the information on the focal plane of the objective lens, making it impossible to accurately obtain a three-dimensional tomographic image of the sample; second, it is limited by the field of view of the microscope objective and the speed of taking pictures. Microscopic imaging of large samples at the centimeter level takes a long time, which is not only a great challenge to the stability and life of the imaging system itself, but also difficult for the imaging sample to maintain its properties unchanged for a long time in the imaging environment, which will also increase the complexity of the equipment.

[0005] Laser confocal microscopy is a typical representative of point scanning imaging technology. It uses a highly focused laser beam to scan the surface of the sample to be tested point by point. The generated light signal is filtered by the imaging optical path detection pinhole and then detected and collected by the photomultiplier tube. Since only the light signal generated at the laser focus can pass through the detection pinhole, laser confocal microscopy technology has extremely low background noise, and by scanning the sample to be tested point by point and layer by layer, it can achieve three-dimensional tomography. However, this detection method is less efficient in detecting samples of the same size. If you want to obtain accurate results, the internal equipment will be more complicated, the cost will increase sharply, and the vibration performance requirements of the detection platform are also very high.

[0006] Widefield imaging technology uses a high-speed array photoelectric image sensor to obtain a complete two-dimensional image at the same time, with advantages such as fast speed and high image grayscale. However, as mentioned above, due to the limitations of the sample's defocus signal, ordinary bright field microscopes do not have high-precision three-dimensional tomography capabilities.

[0007] Structured light microscopy technology is a type of three-dimensional morphology microscopy wide-field imaging technology. This technology uses a specially modulated structured light field to illuminate the sample to be tested, and uses an algorithm to extract the focal plane information from the acquired images of different phases. Through Z-axis scanning, high-precision three-dimensional tomography can be achieved. The higher the Z-axis resolution requirement, the higher the modulation frequency of the corresponding structured light field.

[0008] In structured light microscopy, only when the spatial frequency f1 of the structured light field is greater than the spatial frequency f2 that the adjacent defocused area can carry, can the interference signal of the defocused area be eliminated through the post-processing algorithm to achieve three-dimensional tomography. The light energy transmission efficiency of the optical system that transmits the structured light field is an important factor affecting the spatial frequency. In theory, the more light energy is transmitted, the higher the spatial frequency.

[0009] Existing patents 200810071628.5, 201110448980.8 and 201210402820.4 propose a structured light illumination microscope system based on a digital micromirror device. In this method, the illumination light source is collimated and then directly illuminated on a beam splitter prism or a reflector, and then transmitted to the DMD reflection surface through the beam splitter prism or the reflector. The light reflected from the micromirror surface enters the microscope objective lens after passing through a single group of lenses of a primary configuration, and finally illuminates the sample to be tested to form a structured light field. This type of optical path structure is simple. On the one hand, the light directly emitted by the light source is often uneven, so it is impossible to form a spatially uniform structured light field on the surface of the sample to be tested; on the other hand, the focal length and aperture of the single group of lenses of this primary configuration are determined by the microscope objective lens and the digital micromirror device. Therefore, the optical system of this primary configuration has low light energy transmission efficiency and cannot form a high spatial frequency structured light field, and this type of system has limited measures for handling stray light. Summary of the invention

[0010] The main technical problem solved by the present invention is that the existing structured light microscopy system has low light energy transmission efficiency and cannot form a high spatial frequency structured light field.

[0011] According to the first aspect, an embodiment provides a structured light microscopy system, including: a light source system, a dual telecentric projection system, a relay system, and an image detection component;

[0012] The light source system is configured to provide structured light to the dual telecentric projection system;

[0013] The dual telecentric projection system is configured to receive the structured light output by the light source system and project the structured light to the relay system at a preset zoom ratio;

[0014] The relay system is configured to receive the structured light output by the dual telecentric projection system, perform relay transmission, and output parallel structured light of a preset field angle for illuminating the sample to be tested;

[0015] The image detection component is configured to receive a detection light beam formed by structured light reflected by the sample to be tested, and output corresponding imaging information.

[0016] In one embodiment, the preset zoom ratio of the dual telecentric projection system is 0.6-1.4.

[0017] In one embodiment, the dual telecentric projection system includes an image-side lens group and an object-side lens group; an entrance pupil surface of the image-side lens group overlaps with an exit pupil surface of the object-side lens group.

[0018] In one embodiment, the entrance pupil diameter of the image-side lens group is the same as the exit pupil diameter of the object-side lens group, and the image-side field of view of the object-side lens group is the same as the object-side field of view of the image-side lens group.

[0019] In one embodiment, the structured light microscopy system also includes an aperture stop with a variable aperture; the aperture stop is arranged between the image-side lens group and the object-side lens group, and is located at the overlapping position; the aperture stop is configured to adjust the range of the output light beam of each field of view in the dual telecentric projection system to adjust the brightness of the structured light output by the dual telecentric projection system.

[0020] In one embodiment, in the light transmission direction, the object-side field of view diameter of the relay system is greater than or equal to the image-side field of view diameter of the dual-telecentric projection system.

[0021] In one embodiment, the structured light microscopy system further includes a field diaphragm with a variable aperture; the field diaphragm is located between the dual telecentric projection system and the relay system, and is arranged on the imaging plane of the dual telecentric projection system, and the field diaphragm is configured to adjust the field of view of the structured light.

[0022] In one embodiment, the optical axis of the dual telecentric projection system is perpendicular to the optical axis of the relay system, and the structured light microscopy system also includes a second reflector, which is arranged at the position where the optical axis of the dual telecentric projection system intersects the optical axis of the relay system, and is configured to reflect the structured light emitted by the dual telecentric projection system to the light incident surface of the relay system.

[0023] In one embodiment, a microscope objective lens is further included, and the microscope objective lens is configured to receive the parallel structured light output by the relay system and image the parallel structured light onto the sample to be tested;

[0024] The image-side field of view of the relay system is greater than or equal to the object-side field of view of the microscope objective.

[0025] In one embodiment, the optical axis of the microscope objective is perpendicular to the optical axis of the relay system and to the platform for carrying the sample to be tested. The structured light microscope system also includes a beam splitter, which is arranged at the intersection of the optical axis of the relay system and the optical axis of the microscope objective, and is configured to reflect the parallel structured light output by the relay system to the microscope objective. The microscope objective receives a detection light beam formed by the structured light reflected by the sample to be tested, and outputs the detection light beam to the beam splitter. The detection light beam transmitted by the beam splitter illuminates the image detection component.

[0026] In one embodiment, the light source system includes a light source component, a differential component, an integral component, and a structured light field modulation component;

[0027] The light source assembly includes a light source and a collimation assembly, and is configured to provide an illumination beam;

[0028] The light source is configured to provide a non-parallel illumination beam, and the light source is an extended light source;

[0029] The collimating component is configured to receive the illumination beam output by the light source, collimate the illumination beam, and output the illumination beam with a preset field of view angle;

[0030] The differentiation component is configured to perform differentiation processing on the illumination light beam provided by the light source component to form a plurality of sub-beams;

[0031] The integral component is configured to perform an integral process on the multiple sub-beams output by the differential component, and converge the multiple sub-beams to the structured light field modulation component, so that each sub-beam overlaps in the illumination area of ​​the structured light field modulation component to form a uniform illumination beam;

[0032] The structured light field modulation component is configured to receive the illumination light beam output by the integration component, modulate the illumination light beam and output structured light.

[0033] In one embodiment, the differential component includes a fly-eye lens, which has a plurality of micro-lenses in an array, and is configured to receive an illumination light beam provided by a light source component, and to perform differentiation processing on the illumination light beam through the micro-lenses to form multiple sub-beams; the integral component includes at least two Fourier lenses, and the Fourier lenses are configured to converge the multiple sub-beams output by the differential component; and the multiple sub-beams are converged to a structured light field modulation component through at least two Fourier lenses.

[0034] According to the structured light microscopy system of the above embodiment, the double telecentric projection system can better receive structured light and better cascade with the relay system, thereby avoiding the excessive size of the next-level optical system, which leads to unreasonable spatial layout of the overall equipment; through the secondary configuration optical system of the finite conjugate double telecentric projection system + infinite conjugate relay system, the transmission efficiency of light energy is improved, and a high spatial frequency structured light field is formed, which can improve the transmission efficiency of light energy and is beneficial to improving the resolution of the Z axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A schematic diagram of the structure of a structured light microscopy system provided in one embodiment of the present application (I);

[0036] Figure 2 A schematic diagram of the structure of a light source system provided in one embodiment of the present application (I);

[0037] Figure 3 A schematic diagram of the structure of a light source system provided in one embodiment of the present application (II);

[0038] Figure 4 A schematic diagram of the structure of a structured light microscopy system provided in one embodiment of the present application (II);

[0039] Figure 5 A schematic diagram of the structure of a structured light microscopy system provided in one embodiment of the present application (III);

[0040] Figure 6 A schematic diagram of the structure of a dual telecentric projection system provided by an embodiment of the present application;

[0041] Figure 7 A modulation transfer function curve of a dual telecentric projection system provided by an embodiment of the present application;

[0042] Figure 8 A schematic diagram of structured light field light transmission provided by an embodiment of the present application;

[0043] Fig. 9 A schematic diagram of a dual telecentric projection system and a relay system combination provided by an embodiment of the present application;

[0044] Fig.10 A schematic diagram of the structure of a relay system provided in one embodiment of the present application;

[0045] Fig.11 A modulation transfer function curve of a relay system provided by an embodiment of the present application;

[0046] Fig.12 A lateral uniformity curve of a structured light field generated by a structured light microscopy system provided by an embodiment of the present application;

[0047] Fig.13 A vertical uniformity curve of a structured light field generated by a structured light microscopy system provided in one embodiment of the present application;

[0048] Fig.14 A distortion curve of a structured light microscopy system provided in one embodiment of the present application;

[0049] Fig.15A relative illumination curve of a structured light microscopy system provided in one embodiment of the present application.

[0050] Reference numerals: 100-light source system; 11-light source assembly; 111-light source; 112-aspherical lens; 113-aspherical lens; 12-differential assembly; 13-integral assembly; 131-Fourier lens, 132-Fourier lens; 14-first reflector; 15-transmission-reflection assembly; 16-structured light field modulation assembly; 200-double telecentric projection system; 21-object lens group; 211-double convex positive lens; 212-curved lens Moon positive lens; 213-double concave negative lens; 22-image side lens group; 221-double concave negative lens; 222-double convex positive lens; 223-meniscus positive lens; 300-relay system; 31-double concave negative lens; 32-meniscus positive lens; 33-double convex positive lens; 4-aperture diaphragm; 5-field diaphragm; 6-second reflector; 700-transmission assembly; 71-microscope objective; 72-beam splitter; 73-tube lens; 800-image detection assembly. DETAILED DESCRIPTION

[0051] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0052] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0053] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0054] Structured light 3D detection technology uses a predefined optical pattern (such as stripes, grids, etc.) to project onto the surface of an object. Due to the different surface features and shapes of the object, the projected light pattern will be deformed. These deformations can be captured by sensors such as cameras and analyzed by image processing algorithms to reconstruct the 3D shape of the object. Common light patterns include stripes, grids, dots, etc. It is widely used in industrial inspection, medical imaging and computer vision.

[0055] Devices that can generate structured light include digital micromirror devices (DMDs), reflective liquid crystal elements (LCOS), spatial light modulators (SLMs), and gratings. However, no matter which modulation method is used, if a high-resolution structured light field is required, the light source system needs to provide a uniform illumination beam, and the projection system needs to project the structured light onto the sample to be tested at a magnification and with controlled distortion. At present, the existing optical systems mostly use a primary optical system configuration to realize the projection of structured light onto the sample to be tested, which has low light energy transmission efficiency and low Z-axis resolution.

[0056] In view of the low light energy transmission efficiency of the traditional primary configuration optical system, this application combines the material adaptability requirements in engineering practice and proposes a secondary configuration optical system of finite conjugate double telecentric projection system + infinite conjugate relay system to improve the transmission efficiency of light energy. Further on this basis, the variable aperture diaphragm and variable field of view diaphragm can be integrated to provide double protection for the elimination of stray light, while also increasing the diversity of the structured light field, thereby increasing the material adaptability in engineering practice.

[0057] like Figures 1 to 4 As shown, an embodiment of the present application provides a structured light microscopy system, which may include: a light source system 100 , a dual telecentric projection system 200 , a relay system 300 , and an image detection component 800 .

[0058] The light source system 100 is configured to provide structured light to the dual telecentric projection system 200 .

[0059] The dual telecentric projection system 200 is configured to receive the structured light output by the light source system 100 and project the structured light to the relay system 300 at a preset zoom ratio.

[0060] The relay system 300 is configured to receive the structured light output by the dual telecentric projection system 200, perform relay transmission, and output parallel structured light with a preset field angle for illuminating the sample to be tested.

[0061] The image detection component 800 is configured to receive a detection light beam formed by structured light reflected by the sample to be tested and output corresponding imaging information. The image detection component 800 may be a photoelectric image sensor, which is specifically determined by the wavelength of light provided by the light source component 11 .

[0062] In some embodiments, the parallel structured light output by the relay system 300 can be directly projected onto the surface of the sample to be tested, and the image detection component 800 receives the detection beam formed by the structured light reflected by the sample to be tested. In other embodiments, the structured light microscopy system may further include a transmission component 700, which is configured to image the structured light output by the relay system 300 onto the sample to be tested; receive the detection beam formed by the structured light reflected by the sample to be tested, and output the detection beam.

[0063] The dual telecentric projection system 200 fully receives the structured light, so that the optical system has high light energy utilization. The dual telecentric system ensures that the projected light beam and the received image maintain less distortion in the entire field of view by using a telecentric lens, thereby providing more accurate measurement results. Due to the reduction of geometric distortion in the field of view, the dual telecentric system can provide a high-resolution structured light field, making the capture of details more accurate.

[0064] The relay system 300 couples the structured light into the transmission component 700, so that the surface of the structured light field modulation component 16 forms an equivalent conjugate with the sample to be measured. Then, the relay system 300 realizes the conversion from finite conjugate to infinite conjugate, so that the position of the sample to be measured on the optical axis is not limited. This configuration can make the entire optical system more flexible and applicable while maintaining high precision and geometric accuracy. This design can effectively handle high-precision optical measurement tasks and can adapt to different application requirements.

[0065] The transmission system of structured light is composed of a secondary configuration of a dual telecentric projection system 200 and a relay system 300, wherein the dual telecentric projection system 200 is used to transmit as much light energy of the light source system 100 as possible to the next component, and its characteristic is a finite conjugate optical system. The relay system 300 is used to connect the transmission component 700 and the dual telecentric projection system 200, and its characteristic is that the light transmission direction is transformed from a finite yoke to an infinite yoke. The spatial frequency capacity of the structured light transmission system is the product of the dual telecentric projection system 200 and the relay system 300:

[0066] MTF = MTF (dual telecentric) × MTF (relay).

[0067] In the theoretical system of optical technology, it should be known that the spatial frequency depends only on the optical system. The larger the aperture (D / f, the ratio of relative aperture to focal length) of the optical system, the better the aberration correction and the higher the light energy transmission efficiency, that is, the higher the diffraction-limited spatial frequency that the optical system can transmit.

[0068] Therefore, in order to improve the efficiency of light energy transmission, it is manifested as follows: the aperture of the dual telecentric system 200 is matched with the optical expansion of the light source system 100, so as to transmit a higher spatial frequency to the relay system 300. The relay system 300 is used to connect the transmission component 700 and the dual telecentric projection system 200. Its ability to transmit spatial frequency is the key and should not be lower than the dual telecentric projection system. By reasonably matching the magnification of the dual telecentric projection system 200 and the focal length of the relay system 300, it is possible to achieve an increase in spatial frequency, which is lacking in the primary configuration, because the focal length and pupil diameter of the primary configuration are directly determined by the structured light field control device and the microscope objective. The present application uses a secondary configuration and introduces a dual telecentric projection system 200 to improve the efficiency of light energy transmission.

[0069] The modulated structured light field is irradiated onto the surface of the sample to be tested. When the spatial frequency f1 of the structured light field can pass through the transmission component 700 smoothly, and the frequency is greater than the spatial frequency f2 that the adjacent defocused area can carry, that is, only the focal plane and a small part of the defocused area nearby can be modulated by the structured light field. After the surface information of the object to be tested is modulated by the structured light field, it passes through the transmission component 700 (for example, Figure 4 The image is finally recorded by the image detection component 800, wherein the information of the defocused area is also recorded, but with the change of the phase of the structured light field, the recorded defocused information will not change, and only the focal plane and the surrounding area will change due to the phase. Therefore, the defocused information can be filtered out through the post-processing algorithm, thereby achieving the effect of three-dimensional tomography.

[0070] In addition, the structured light transmission system is composed of a secondary configuration of a dual telecentric projection system 200 and a relay system 300, which ensures the efficiency of light energy transmission while extending the geometric path of light beam propagation, making it possible to add more mechanical extinction means other than optical extinction means, such as a sunshade, a stray light diaphragm, extinction teeth, extinction paint, etc.

[0071] For example, Figure 4 As shown, the dual telecentric projection system 200 receives structured light provided by the light source system 100, and its characteristic is that the entrance pupil and exit pupil of the system are both located at infinity. The object side telecentricity can regard the light source system 100 as an extended point light source, and can better receive the structured light output by the light source system 100. The image side telecentricity can transmit the exit pupil in parallel to the next optical system for cascading, so as to avoid the next optical system being too large in size, resulting in unreasonable spatial layout of the overall equipment.

[0072] Each optical system and optical component is described in detail below according to the light propagation order of the microscope system. The specific implementation method provided in the embodiment of the present application does not limit the optical system or optical component to only the described implementation method, and the embodiment of the present application is not limited to the specific implementation method.

[0073] like Figure 2 As shown, the light source system 100 is configured to provide structured light to the dual telecentric projection system 200 ; in some embodiments, the light source system 100 may include a light source component 11 , a differential component 12 , an integral component 13 , and a structured light field modulation component 16 .

[0074] The light source assembly 11 is configured to provide an illumination light beam.

[0075] The differentiation component 12 is configured to perform differentiation processing on the illumination light beam provided by the light source component 11 to form a plurality of sub-beams.

[0076] The integration component 13 is configured to integrate the multiple sub-beams output by the differentiation component 12, and converge the multiple sub-beams to the structured light field modulation component 16, so that each sub-beam overlaps in the illumination area of ​​the structured light field modulation component 16 to form a uniform illumination beam (illumination spot).

[0077] The structured light field modulation component 16 is configured to receive the illumination light beam output by the integration component 13 , modulate the illumination light beam and output structured light.

[0078] The illumination beam generated by the light source component 11 is differentiated by the differentiating component 12 and integrated by the integrating component 13 in turn, thereby generating a uniform illumination beam (illumination spot) on the structured light field modulation component 16. The structured light field modulation component 16 modulates the uniform illumination beam to generate uniform structured light.

[0079] The structured light microscopy system provided in the embodiment of the present application obtains a uniform illumination beam through the differential component 12 and the integral component 13, thereby obtaining a uniform structured light through the structured light field modulation component 16. By using the dual telecentric projection system 200 to improve the resolution of the microscopy system, combined with the uniform structured light for projection, a uniform and high-resolution structured light field can be formed on the sample to be tested. At the same time, the relay system 300 can make the microscopy system have a more flexible design, which is conducive to the miniaturization of the microscopy system.

[0080] In one embodiment, the light source assembly 11 may include a light source 111 and a collimating assembly.

[0081] The light source 111 is configured to provide a non-parallel illumination light beam, and the light source 111 may be an extended light source.

[0082] The collimating assembly is configured to receive the illumination light beam output by the light source 111 , collimate the illumination light beam, and output the illumination light beam with a preset field of view angle.

[0083] In one embodiment, the light source assembly 11 may include at least two light sources 111 , each light source 111 providing an illumination light beam of a different wavelength band.

[0084] The present application embodiment does not limit the wavelength band of the light provided by the light source 111. For example, Figure 4 As shown, the light source 111 may be one, for example, a 450nm blue light LED light source, or a complex white light LED light source; Figure 5 As shown, the light source 111 may be three, for example, composed of RGB three-color LED light sources, and the fusion of multi-color light sources can be achieved through a dichroic mirror. The dichroic mirror can transmit light of some bands and reflect light of other bands.

[0085] For example, the collimating assembly can be composed of aspheric lenses, such as Figure 4 Aspherical lens 112 and aspherical lens 113 are shown in FIG. 1 ; for another example, three spherical lenses can also be implemented, and one aspherical lens plus two spherical lenses can still be implemented.

[0086] For example, the collimating component is used to receive light of a certain spatial angle radiated by the light source 111, so that the light becomes parallel light with a certain field of view angle after being transmitted through the collimating component composed of two aspheric lenses. The special thing is that the field of view angle matches the subsequent differential component 12 (such as a compound eye lens) to ensure the rationality of the light spot differentiation and avoid generating too much stray light here.

[0087] Generally, the light source 111 is an extended light source, which can be regarded as composed of countless point light sources. First, the collimation component here is used to collimate these point light sources respectively, considering the cost relationship, such as Figure 4 As shown, only two aspherical lenses can be used to quasi-collimate each point light source. Even if strict collimation cannot be achieved, it only needs to match the subsequent differential component 12. Generally, the degree of collimation will affect the utilization efficiency of the light source 111; secondly, the optical axis of the collimation component is aligned with the center of the extended light source. Therefore, the point light source outside the center of the extended light source forms a light beam with a certain field of view angle after passing through the collimation component to match the differential component 12 (such as a compound eye lens).

[0088] In one embodiment, the structured light field modulation component 16 may include a digital micromirror device (DMD); the integration component 13 converges multiple sub-beams to form a uniform illumination beam, and irradiates the surface of the digital micromirror device, and the digital micromirror device reflects the illumination beam to form structured light.

[0089] DMD has a very fast light field refresh frequency, uses micromirrors instead of moving gratings to change the phase, eliminates system errors caused by moving parts, and makes the system itself reliable. Of course, the structured light field modulation component 16 provided in the embodiment of the present application does not exclude the use of reflective liquid crystal elements (LCOS), spatial light modulators (SLM) and gratings.

[0090] like Figure 3 and Figure 4 As shown, in one embodiment, the differential component 12 may include a fly-eye lens, which has a plurality of micro-lenses in an array, and the fly-eye lens is configured to receive the illumination beam provided by the light source component 11, and perform differentiation processing on the illumination beam through the micro-lenses to form multiple sub-beams. The integral component 13 may include at least two Fourier lenses, and the Fourier lenses are configured to converge the multiple sub-beams output by the differential component 12; the multiple sub-beams are converged to the structured light field modulation component 16 through at least two Fourier lenses.

[0091] For example, the differential processing of the illumination beam can also be achieved through other forms such as a homogenizing rod; and depending on the homogenizing area, the manifestation of the homogenizing device will be slightly different. For example, the DMD micromirror mentioned in the above embodiment constitutes a rectangular area, so the sub-eye of the compound eye is a rectangle, and the length-to-width ratio is equivalent to that of the DMD. The conical square rod can also achieve rectangular area homogenization. In other words, the embodiment of the present application does not limit the specific implementation method of the differential component 12. In addition to the above-mentioned compound eye lens and square rod, it can also be formed by other optical elements, or a combination of the above-mentioned optical elements.

[0092] The integration component 13 is used to re-integrate the differentiated light source 111 so that each differentiated light source (sub-beam) can be evenly spread out and irradiated on the surface of the DMD micromirror.

[0093] It is difficult to realize the above-mentioned integration effect with a single Fourier lens, and it requires a large cost to design or manufacture such a Fourier lens. The present application realizes the above-mentioned integration effect by using at least two Fourier lenses, such as Figure 4 The Fourier lens 131 and the Fourier lens 132 shown in the figure can converge multiple sub-beams to the same irradiation area through multiple convergences, thereby reducing the requirements on the optical performance of a single Fourier lens.

[0094] In the embodiment of the present application, the integration component 13 converges the multiple sub-beams, such as Figure 3 As shown, each sub-beam overlaps in the illumination area of ​​the structured light field modulation component 16, so that the illumination spot irradiated on the structured light field modulation component 16 is more uniform. In addition to using a Fourier lens, it is not excluded to use a combination of one or more commonly used spherical lenses such as a plurality of convex lenses and concave lenses to achieve the above-mentioned integration effect.

[0095] like Figure 4 As shown, in one embodiment, the light source assembly 11 may further include at least one first reflector 14. The at least one first reflector 14 is disposed between two Fourier lenses, and the first reflector 14 is configured to receive the illumination light beam output by one Fourier lens and reflect it to the other Fourier lens.

[0096] The first reflector 14 is used to deflect the light path, so that the light path is miniaturized and has a reasonable layout. Figure 4 As shown, the first reflector 14 can be disposed between the Fourier lens 131 and the Fourier lens 132 , so that the Fourier lens 131 and the Fourier lens 132 can be disposed at a right angle, occupying a smaller space volume.

[0097] like Figure 4 As shown, in one embodiment, the light source system 100 may further include a transmission-reflection component 15 .

[0098] The transmission-reflection component 15 is arranged between the integral component 13 and the structured light field modulation component 16; the illumination light beam output by the integral component 13 is reflected or refracted by the transmission-reflection component 15, and irradiates the structured light field modulation component 16 according to a preset incident angle; the structured light output by the structured light field modulation component 16 is reflected by the transmission-reflection component 15 to the dual telecentric projection system 200.

[0099] For example, the first reflector 14 can cooperate with the transmission-reflection component 15 to adjust the incident angle of the illumination light beam incident on the transmission-reflection component 15, so that the exit angle of the illumination light beam in the transmission-reflection component 15 can be adjusted, and finally the structured light field modulation component 16 is irradiated according to the preset incident angle.

[0100] The transmission-reflection component 15 may include a combination of one or more prisms and reflectors, and irradiates the illumination light beam output by the integration component 13 onto the structured light field modulation component 16 at a preset incident angle by refraction or reflection, and transmits the structured light field modulation component 16 output by reflection to form a structured light dual-telecentric projection system 200.

[0101] The principles of refraction and reflection can be used to adjust the incident angle or the output angle of the light beam. Generally speaking, the angle range that can be adjusted by reflection is wider and can be selected according to actual optics.

[0102] like Figure 4 As shown, in one embodiment, the transmission-reflection component 15 may include an RTIR prism; the illumination light beam output by the integral component 13 is refracted by the RTIR prism and irradiated onto the structured light field modulation component 16 at a preset incident angle; the structured light output by the structured light field modulation component 16 is reflected by the transmission-reflection component 15 to the dual telecentric projection system 200.

[0103] The light output from the integrator assembly 13 can be transmitted through the RTIR prism and refracted at the same time, and the structured light formed by the reflection of the DMD micromirror can be vertically emitted, and can be totally reflected at the RTIR prism and output to the dual telecentric projection system 200.

[0104] Of course, the transmission-reflection component 15 can also use a combination of a TIR prism and a reflector to achieve the above functions, and is not limited to using an RTIR prism. The first reflector 14 and the RTIR prism are used to turn the light path inward, so that the overall device space layout is reasonable and tends to be miniaturized. The special thing is that the incident angle of the first reflector 14 has a certain relationship with the RTIR prism, so that the light finally enters the DMD micromirror surface at 24° (for example, the specific angle is determined according to the device parameters of the DMD micromirror).

[0105] The above is a detailed description of the light source system 100 . The following is a description of the dual telecentric projection system 200 .

[0106] like Figure 4 and Figure 6 As shown, in one embodiment, the dual telecentric projection system 200 may include an image-side lens group 22 and an object-side lens group 21 ; the entrance pupil surface of the image-side lens group 22 overlaps with the exit pupil surface of the object-side lens group 21 .

[0107] When the entrance pupil plane of the image-side lens group 22 in the dual telecentric projection system 200 overlaps with the exit pupil plane of the object-side lens group 21, light transmission can be maximized, aberrations and distortions can be reduced, the adjustment and calibration process can be simplified, the complexity of the system can be reduced, and the optical performance of the system can be improved. This design helps to achieve efficient, stable and high-quality optical imaging.

[0108] like Figure 4 and Figure 6 As shown, in one embodiment, the structured light microscopy system can also include an aperture stop 4 with a variable aperture; the aperture stop 4 is arranged between the image-side lens group 22 and the object-side lens group 21, and is located at the overlapping position; the aperture stop 4 is configured to adjust the range of the output light beams of each field of view in the dual-telecentric projection system 200, so as to adjust the brightness of the structured light output by the dual-telecentric projection system 200.

[0109] In some embodiments, the entrance pupil diameter of the image-side lens group is the same as the exit pupil diameter of the object-side lens group, and the image-side field of view of the object-side lens group is the same as the object-side field of view of the image-side lens group.

[0110] Generally, there is a position inside the projection system where the aperture size of each field of view is the same. Placing a variable aperture diaphragm 4 there can achieve uniform brightness changes within the overall field of view of the structured light field. The variable aperture diaphragm 4 is placed between the dual telecentric projection light paths, and can flexibly adjust the brightness of the structured light field according to the changes in the sample to be tested.

[0111] The dual-telecentric projection system 200 can be regarded as consisting of an object lens group 21 and an image lens group 22. Its characteristics are that the exit pupil of the object lens group 21 overlaps with the entrance pupil of the image lens group 22, and the diameters of the entrance pupil and the exit pupil are the same. The image field angle of the object lens group 21 is the same as the object field angle of the image lens group 22. The variable aperture diaphragm is placed at the overlap between the object lens group 21 and the image lens group 22. Its function is to flexibly adjust the brightness changes of the structured light field according to the changes of the sample to be tested. It is also the first guarantee for intercepting the further transmission of stray light of the illumination optical system.

[0112] In one embodiment, the preset zoom ratio of the dual telecentric projection system 200 can be 0.6-1.4. The dual telecentric projection system 200 needs to consider the spatial volume of the overall device, so the magnification of the dual telecentric projection system 200 and the focal length f of the relay system 300 should be reasonably allocated. In order to ensure the efficiency of light energy transmission and avoid a certain system from bearing too much optical focal length, resulting in an inflated system cost, the magnification of the dual telecentric projection system 200 is reasonably set at 0.6-1.4X.

[0113] In the embodiment of the present application, the specific implementation method of the object lens group 21 and the image lens group 22 is not limited, and the above-mentioned technical effects can be achieved. Some specific implementation methods are provided below for example description.

[0114] For example, Figure 4 and Figure 6 As shown, the object lens group 21 may include a double convex positive lens 211, a meniscus positive lens 212 and a double concave negative lens 213, and the structured light output by the structured light field modulation component 16 passes through the double convex positive lens 211, the meniscus positive lens 212 and the double concave negative lens 213 in sequence.

[0115] The image-side lens group 22 may include a first cemented lens and a meniscus positive lens 223 . The first cemented lens is formed by cementing a double concave negative lens 221 and a double convex positive lens 222 . The structured light output by the object-side lens group 21 passes through the double concave negative lens 221 , the double convex positive lens 222 and the meniscus positive lens 223 in sequence.

[0116] like Figure 4 and Figure 6 As shown, the dual telecentric projection system 200 is characterized in that its structure along the light transmission direction is composed of six lenses: positive-positive, negative-negative, positive-positive.

[0117] The structure along the direction of light transmission can also be expressed as six lenses, positive, negative, positive, positive and negative, such as a double convex positive lens, a meniscus positive lens, a double concave negative lens, a meniscus / plano-convex positive lens, and a first cemented lens formed by gluing a double convex positive lens and a meniscus negative lens.

[0118] It can also be shown that its structural form along the direction of light transmission is composed of seven symmetrical lenses of negative, positive, positive, negative, positive and negative, including a first cemented lens formed by cementing a meniscus negative lens and a double convex positive lens, a meniscus positive lens, a double concave negative lens, a meniscus positive lens, and a second cemented lens formed by cementing a double convex positive lens and a meniscus negative lens, wherein the combination of the first cemented lens and the meniscus positive lens and the combination of the meniscus positive lens and the second cemented lens form a symmetrical or quasi-symmetrical structural form, and both meniscus lenses face the aperture.

[0119] The dual-telecentric projection system 200 receives light reflected from the surface of the DMD micromirror. The image-side telecentricity is for better receiving the light reflected from the surface of the DMD micromirror, and the object-side telecentricity can be better cascaded with the next-level optical system to avoid the next-level optical system being too large, resulting in unreasonable overall equipment space layout.

[0120] Considering the spatial volume of the whole equipment, the magnification of the dual telecentric projection system 200 and the focal length f of the relay system 300 must be reasonably allocated. In order to avoid a certain system bearing too much optical focal length, resulting in an inflated system cost, the magnification of the dual telecentric projection system 200 is reasonably set at 0.6-1.4X, and the focal length f of the relay system 300 can range from 66mm to 155mm; for example, the magnification of the dual telecentric projection system 200 is 1.2X, such as Figure 7 As shown, the modulation transfer function of the dual telecentric projection system 200 in the DMD space is @200lp / mm>0.4, corresponding to a spatial frequency of 167lp / mm in the conjugate space, and it can be seen that the dual telecentric optical path can transmit a higher spatial frequency. Among them, lines of different colors represent different field of view positions; each color has two lines: a dotted line and a solid line, representing the meridian plane MTF value and the sagittal plane MTF value, respectively, wherein the meridian plane MTF curve of the 0° field of view coincides with the sagittal MTF curve.

[0121] The above is a detailed description of the dual telecentric projection system 200 , and the relay system 300 will be described below.

[0122] In some embodiments, in order to maximize the light energy transmission efficiency of the system, in the light transmission direction, the object field diameter of the relay system 300 is greater than or equal to the image field diameter of the dual telecentric projection system 200. The transmission component may include a microscope objective lens 71; the microscope objective lens 71 is configured to receive the structured light output by the relay system 300 and image it onto the sample to be tested; the image field angle of the relay system 300 is greater than or equal to the object field angle of the microscope objective lens 71.

[0123] In the embodiments of the present application, the specific implementation method of the relay system 300 is not limited, and the above technical effects can be achieved. Some specific implementation methods are provided below for example.

[0124] For example, Figure 4 , Figures 8 to 10 As shown, the relay system 300 may include a biconcave negative lens 31 , a meniscus positive lens 32 , and a biconvex positive lens 33 .

[0125] The structured light output by the double telecentric projection system 200 passes through the double concave negative lens 31 , the meniscus positive lens 32 , and the double convex positive lens 33 in sequence.

[0126] like Figure 4 , Figures 8 to 10 As shown, the relay system 300 is characterized in that its structure along the light transmission direction is composed of three single lenses, negative, positive and positive, including a double concave negative lens, a meniscus positive lens, and a double convex positive lens.

[0127] It can also be shown that along the direction of light transmission, its structural form is composed of a cemented lens of a negative lens and a positive lens and a single positive lens; it can also be shown that along the direction of light transmission, its structural form is composed of a single positive lens and a cemented lens of a negative lens and a positive lens.

[0128] The relay system 300 is mainly used to connect the dual telecentric projection system 200 and the microscope objective lens 71 optical system in series, so as to maximize the light energy utilization of the system. The present invention uses the existing Nikon microscope objective lens 71 model CFI TU Plan Fluor BD (5-100X) as an example:

[0129] 5X 10X 20X 50X 100X NA 0.15 0.3 0.45 0.8 0.9 f 40 20 10 4 2 Pupil diameter 12 12 9 6.4 3.6 Field of view 5 2.5 1.25 0.5 0.25

[0130] Given the size of the DMD micromirror target surface X0×Y0 mm, based on the 200 magnification of the dual telecentric projection system, according to the formula:

[0131] y = f × tan(θ).

[0132] It can be calculated that the focal length range of the relay system 300 is 66mm-155mm. It can be seen that the smaller the double telecentricity ratio, the larger the focal length of the relay system 300. The consequence is that the total length of the system becomes longer, which is not conducive to the miniaturization of the system and will reduce the spatial frequency that the overall optical system can transmit.

[0133] like Fig.10 As shown, the focal length f of the relay system 300 is calculated to be 77 mm, and its structure is composed of three lenses, negative, positive and positive, with a total optical length of no more than 16 mm, and they are not far from each other, and can be placed in a short tube at the same time during the structural layout; Fig.11As shown, the modulation transfer function of the relay system 300 in the image space is @150lp / mm>0.3, which can just connect to the spatial frequency of the previous dual telecentric projection system 200. Among them, the lines of different colors represent different field of view positions; each color has two lines: a dotted line and a solid line, representing the meridian plane MTF value and the sagittal plane MTF value respectively, wherein the meridian plane MTF curve of the 0° field of view coincides with the sagittal MTF curve surface.

[0134] Based on the combination of the above dual telecentric projection system 200 and the relay system 300, other optical elements may be added to improve the function, performance or compactness of the structured light microscopy system.

[0135] like Figure 4 As shown, in one embodiment, the structured light microscopy system may further include a second reflector 6 , which is disposed between the dual telecentric projection system 200 and the relay system 300 ; the second reflector 6 is configured to receive the structured light output by the dual telecentric projection system 200 and reflect it to the relay system 300 .

[0136] The second reflector 6 is used to deflect the light path, so that the transmission component 700 can be arranged on one side, reducing the longitudinal dimension, making the light path miniaturized and reasonably laid out.

[0137] For example, the optical axis of the dual telecentric projection system 200 is perpendicular to the optical axis of the relay system 300, and the second reflector 6 is arranged at the position where the optical axis of the dual telecentric projection system 200 intersects with the optical axis of the relay system 300, and is configured to reflect the structured light emitted by the dual telecentric projection system 200 to the light incident surface of the relay system 300.

[0138] like Figure 4 and Fig. 9 As shown, in one embodiment, the structured light microscopy system can also include a field stop 5 with a variable aperture. The field stop 5 is located between the dual telecentric projection system 200 and the relay system 300, and is arranged on the imaging surface of the dual telecentric projection system 200. The field stop 5 is configured to adjust the field of view of the structured light.

[0139] After the structured light reflected by the structured light field modulation component 16 passes through the dual telecentric projection system 200, it will first be projected and imaged in sequence. Placing the field of view aperture 5 here to form a conjugate can achieve adjustable field of view of the structured light field.

[0140] The field of view aperture 5 is placed at a position conjugated with the structured light field adjustment component 16 through the dual telecentric projection system 200. Its function is to flexibly adjust the field of view of the structured light field according to changes in test requirements. It is also the second guarantee for intercepting the transmission of stray light from the illumination optical system to the lower optical system.

[0141] The above is a detailed description of the dual telecentric projection system 200 and the relay system 300 . The transmission component 700 will be described below.

[0142] like Figure 4 As shown, in some embodiments, the transmission component 700 may include a microscope objective 71 , a beam splitter 72 , and a tube lens 73 .

[0143] The microscope objective lens 71 is configured to receive the parallel structured light output by the relay system 300 and image the light onto the sample to be tested; the image-side field of view of the relay system 300 is greater than or equal to the object-side field of view of the microscope objective lens 71 .

[0144] The optical axis of the microscope objective 71 is perpendicular to the optical axis of the relay system 300 and to the platform for carrying the sample to be tested. The beam splitter 72 is arranged at the position where the optical axis of the relay system 300 and the optical axis of the microscope objective 71 intersect, and is configured to reflect the parallel structured light output by the relay system 300 to the microscope objective 71. The microscope objective 71 receives the detection light beam formed by the structured light reflected by the sample to be tested, and outputs the detection light beam to the beam splitter 72. The detection light beam transmitted by the beam splitter 72 irradiates the image detection component 800.

[0145] The tube lens 73 is configured to image the detection beam to the image detection assembly 800 .

[0146] In the embodiment of the present application, the specific implementation method of the transmission component 700 is not limited, and the above-mentioned technical effects can be achieved. On the basis of the above, optical elements such as filters, polarizers, dichroic mirrors or reflectors can be added. In some embodiments, the tube lens 73 can be integrated into the image detection component 800.

[0147] In summary, after the structured light microscopy system example is transmitted by the light source system 100, the dual telecentric projection system 200, the relay system 300 and the transmission component 700, the uniformity of the light spot formed on the surface of the sample to be tested in the horizontal and vertical directions is as follows: Fig.12 and Fig.13 As shown, they are all above 95%, meeting the requirements of spatial uniformity.

[0148] like Fig.14 As shown in the figure, the absolute value of the distortion of the structured light field is within 0.05%, which means that the test results are less affected by the lateral distortion of the structured light field. Fig.14 The distortion curves of RGB colors are shown, and it can be seen that the distortion of different wavelengths in the microscope system is within 0.05%; Fig.15 As shown, the relative illumination of the structured light field after being transmitted through the three-stage optical system is above 95%, which means that the spatial uniformity of the light field is less affected by the three-stage optical system.

[0149] In summary, the structured light microscopy system provided in the embodiments of the present application has at least the following technical effects:

[0150] The microscope system provided in the present application can improve the efficiency of light energy transmission by using a double telecentric projection system 200 within a certain magnification range, because the pupil of the microscope objective lens used is fixed and infinitely conjugated, while the light transmitted by the structured light field control device is finitely conjugated. If there is no double telecentric system, and the finite yoke is directly converted to an infinite yoke, then the light energy transmission efficiency of the primary optical system configuration is reduced relative to the secondary configuration of the double telecentric projection system + relay system used in this patent, that is, the spatial frequency of the transmission is reduced, which is not conducive to the improvement of the Z-axis resolution proposed in this patent; the double telecentric projection system 200 can also effectively avoid the increase in the volume of the next-level relay system 300, because the pupil of the telecentric system is at infinity relative to the non-telecentric system, and is transmitted in parallel to the next optical system.

[0151] The microscope system provided in the present application can also integrate a variable aperture diaphragm and a variable field of view diaphragm into the system by using a secondary configuration of a dual telecentric projection system + a relay system. On the one hand, it can increase the diversity of the structured light field, so that the present invention has good material adaptability and diversity of detection methods. On the other hand, it can reduce the propagation of stray light.

[0152] The microscope system provided in the present application uses a secondary configuration of a dual telecentric projection system + a relay system, which can not only improve the transmission efficiency of light energy, but also extend the geometric path of light beam propagation, so that more stray light elimination measures can be added to further reduce potential stray light propagation.

[0153] The microscope system provided by the present application can use a compound eye lens and a Fourier lens, and the radiation light of the light source 111 source is homogenized by the differential component 12 and the integral component 13 of the illumination light source system 100, projected once by the double telecentric projection system 200, turned by the second reflector 6, coupled by the relay system 300, the beam splitter 72, and the microscope objective 71, so that the object plane of the microscope objective 71 forms an equivalent conjugate with the structured light field modulation component 16, thereby forming a structured light field with clear boundaries and high uniformity. The spatially non-uniform light field originally radiated by the light source 111 can be uniformly irradiated to the surface of the structured light field modulation component 16, and the structured light field modulated by the structured light field modulation component 16 finally has spatial uniformity, avoiding measurement errors caused by uneven illumination within the field of view.

[0154] The embodiments of the present application provide a structured light field with high uniformity, adjustable brightness, adjustable field of view and fast refresh speed, aiming at the use requirements of the structured light microscopy system with improved Z-axis resolution. It has high light energy utilization rate and reasonable equipment space layout, and meets the use requirements of industrial inspection equipment with high timeliness, miniaturization and high adaptability.

[0155] The microscopic system provided in the present application creatively proposes an internal refractive light path. By using the first reflector 14, the second reflector 6, and the RTIR prism, the optical system has the characteristics of miniaturization. The RTIR prism can reduce the complexity of installation and increase the stability and reliability of the system.

[0156] This document is described with reference to various exemplary embodiments. However, those skilled in the art will recognize that changes and modifications may be made to the exemplary embodiments without departing from the scope of this document. For example, various operating steps and components for performing the operating steps may be implemented in different ways (e.g., one or more steps may be deleted, modified, or incorporated into other steps) depending on the specific application or considering any number of cost functions associated with the operation of the system.

[0157] Although the principles of this invention have been shown in various embodiments, many modifications of structures, arrangements, proportions, elements, materials and components particularly suitable for specific environments and operational requirements can be used without departing from the principles and scope of this invention. The above modifications and other changes or amendments will be included in the scope of this invention.

[0158] The foregoing specific description has been described with reference to various embodiments. However, those skilled in the art will recognize that various modifications and changes can be made without departing from the scope of the present disclosure. Therefore, the consideration of the present disclosure will be illustrative rather than restrictive, and all these modifications will be included in its scope. Similarly, the advantages, other advantages and solutions to the problems of various embodiments have been described above. However, the benefits, advantages, solutions to the problems and any elements that can produce these, or make them more clear, should not be interpreted as critical, necessary or necessary. The term "include" and any other variants used in this article are all non-exclusive inclusions, so that the process, method, article or device including the list of elements not only includes these elements, but also includes other elements that are not explicitly listed or do not belong to the process, method, system, article or device. In addition, the term "coupled" and any other variants used in this article refer to physical connections, electrical connections, magnetic connections, optical connections, communication connections, functional connections and / or any other connections.

[0159] Those skilled in the art will appreciate that many changes may be made to the details of the above-described embodiments without departing from the basic principles of the invention. Therefore, the scope of the present invention should be determined solely by the claims.

Claims

1. A structured light microscopy system, characterized in that: include: Light source system, dual telecentric projection system, relay system and image detection components; The light source system is configured to provide structured light to the dual telecentric projection system; The dual telecentric projection system is configured to receive the structured light output by the light source system and project the structured light to the relay system at a preset zoom ratio; The relay system is configured to receive the structured light output by the dual telecentric projection system, perform relay transmission, and output parallel structured light of a preset field angle for illuminating the sample to be tested; The image detection component is configured to receive a detection light beam formed by the sample to be tested reflecting the structured light, and output corresponding imaging information.

2. The structured light microscopy system according to claim 1, characterized in that: The preset zoom ratio of the dual telecentric projection system is 0.6-1.

4.

3. The structured light microscopy system according to claim 1, wherein: The dual telecentric projection system comprises an image-side lens group and an object-side lens group; an entrance pupil surface of the image-side lens group overlaps with an exit pupil surface of the object-side lens group.

4. The structured light microscopy system according to claim 3, characterized in that: The entrance pupil diameter of the image-side lens group is the same as the exit pupil diameter of the object-side lens group, and the image-side field of view of the object-side lens group is the same as the object-side field of view of the image-side lens group.

5. The structured light microscopy system according to claim 3, characterized in that: The structured light microscopy system also includes an aperture stop with a variable aperture; the aperture stop is arranged between the image-side lens group and the object-side lens group and is located at the overlapping position; the aperture stop is configured to adjust the range of the output light beams of each field of view in the dual telecentric projection system to adjust the brightness of the structured light output by the dual telecentric projection system.

6. The structured light microscopy system according to claim 1, wherein: In the light transmission direction, the object-side field of view diameter of the relay system is greater than or equal to the image-side field of view diameter of the dual-telecentric projection system.

7. The structured light microscopy system according to claim 1, wherein: The structured light microscopy system also includes a field of view diaphragm with a variable aperture; the field of view diaphragm is located between the dual telecentric projection system and the relay system and is arranged on the imaging surface of the dual telecentric projection system, and the field of view diaphragm is configured to adjust the field of view of the structured light.

8. The structured light microscopy system according to claim 1, wherein: The optical axis of the dual telecentric projection system is perpendicular to the optical axis of the relay system. The structured light microscopy system also includes a second reflector, which is arranged at the position where the optical axis of the dual telecentric projection system intersects the optical axis of the relay system, and is configured to reflect the structured light emitted by the dual telecentric projection system to the light incident surface of the relay system.

9. The structured light microscopy system according to claim 1, wherein: It also includes a microscope objective lens, which is configured to receive the parallel structured light output by the relay system and image the parallel structured light onto the sample to be tested; The image-side field of view of the relay system is greater than or equal to the object-side field of view of the microscope objective lens.

10. The structured light microscopy system according to claim 9, characterized in that: The optical axis of the microscope objective is perpendicular to the optical axis of the relay system and perpendicular to the platform for carrying the sample to be tested. The structured light microscope system also includes a beam splitter, which is arranged at the position where the optical axis of the relay system and the optical axis of the microscope objective intersect, and is configured to reflect the parallel structured light output by the relay system to the microscope objective. The microscope objective receives a detection light beam formed by the sample to be tested reflecting the structured light, and outputs the detection light beam to the beam splitter. The detection light beam transmitted by the beam splitter irradiates the image detection component.

11. The structured light microscopy system according to claim 1, wherein: The light source system includes a light source component, a differential component, an integral component and a structured light field modulation component; The light source assembly includes a light source and a collimating assembly, and is configured to provide an illumination beam; The light source is configured to provide a non-parallel illumination beam, and the light source is an extended light source; The collimating assembly is configured to receive the illumination beam output by the light source, collimate the illumination beam, and output an illumination beam with a preset field of view angle; The differentiation component is configured to perform differentiation processing on the illumination light beam provided by the light source component to form a plurality of sub-beams; The integral component is configured to perform an integral process on the multiple sub-beams output by the differential component, and converge the multiple sub-beams to the structured light field modulation component, so that each sub-beam overlaps in the illumination area of ​​the structured light field modulation component to form a uniform illumination beam; The structured light field modulation component is configured to receive the illumination light beam output by the integration component, modulate the illumination light beam and output structured light.

12. The structured light microscopy system according to claim 11, wherein: The differential component includes a fly-eye lens, which has a plurality of micro-lenses in an array, and is configured to receive the illumination beam provided by the light source component, and to perform differentiation processing on the illumination beam through the micro-lenses to form multiple sub-beams; the integral component includes at least two Fourier lenses, and the Fourier lenses are configured to converge the multiple sub-beams output by the differential component; The multiple sub-beams are converged to the structured light field modulation component through at least two of the Fourier lenses.

Images