Shutter device

Abstract

The embodiment of the invention provides a shutter device. The driving assembly comprises a driving part and a bidirectional rotating electromagnet, and the bidirectional rotating electromagnet is fixed to the fixing frame; the shading assembly is rotatably installed on the side, close to the fixing frame, of the bidirectional rotating electromagnet, the shading assembly can move between a complete shading position and a non-complete shading position, the driving part drives the bidirectional rotating electromagnet to do reciprocating motion, and the shading assembly is installed on the side, close to the fixing frame, of the bidirectional rotating electromagnet. Therefore, the shading assembly can move between the complete shading position and the non-complete shading position. The shading assembly is rotatably installed on the fixing frame, the bidirectional rotating electromagnet drives the shading assembly to move between the complete shading position and the non-complete shading position, response time is short, the torque of the bidirectional rotating electromagnet can be adjusted by changing the input voltage of the driving part, design is simple, control logic is easy to achieve, and reliability is high. And the cost is low.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a shutter device. Background Art

[0002] The exposure dose in the lithography machine is controlled by the opening / closing of the shutter blades, which requires the shutter to have characteristics such as high response, high speed, high repeatability, and high reliability. Currently, the shutter uses a voice coil motor for double-blade closed-loop control, and the completion time of the shutter blade opening-closing can reach tens of milliseconds, but this control method has high requirements on process accuracy and cost. Summary of the invention

[0003] In view of this, an embodiment of the present specification provides a shutter device, in which a shading component is rotatably mounted on a fixed frame, and the shading component is driven by a bidirectional rotating electromagnet to move between a complete shading position and a non-complete shading position. The response time is short, and the torque of the bidirectional rotating electromagnet can be adjusted by changing the input voltage of the driving unit.

[0004] The embodiments of this specification provide the following technical solutions: a shutter device, comprising:

[0005] Fixed frame;

[0006] A driving assembly, comprising a driving part and a bidirectional rotating electromagnet, wherein the bidirectional rotating electromagnet is fixed on the fixing frame;

[0007] A shading component is rotatably mounted on a side of the bidirectional rotating electromagnet close to the fixing frame, and the shading component can move between a complete shading position and a non-complete shading position.

[0008] The driving unit drives the bidirectional rotating electromagnet to perform reciprocating motion, so as to enable the shading component to move between the complete shading position and the incomplete shading position.

[0009] Preferably, the shading assembly comprises a cylindrical sleeve and shading blades, and the cylindrical sleeve and the shading blades are integrally formed.

[0010] The surface of the cylindrical sleeve is provided with a plurality of first openings, through which the cylindrical sleeve and the bidirectional rotating electromagnet are fixed.

[0011] The cylindrical sleeve is further provided with a first blind hole, and the cylindrical sleeve is sleeved on the bidirectional rotating electromagnet via the first blind hole.

[0012] The shading blade is a single shading blade.

[0013] Preferably, a plurality of first holes are provided on a side of the bidirectional rotating electromagnet close to the fixing frame, and the positions of the plurality of first holes of the bidirectional rotating electromagnet respectively correspond to the plurality of first holes of the fixing frame, and the bidirectional rotating electromagnet is fixed to the fixing frame via the first holes of the bidirectional rotating electromagnet and the first holes of the fixing frame.

[0014] The bidirectional rotating electromagnet further comprises a cylindrical pivot on one side close to the fixing frame, and the shading component is sleeved on the cylindrical pivot.

[0015] The bidirectional rotating electromagnet includes a first magnet connecting wire and a second magnet connecting wire.

[0016] Preferably, the shutter device further comprises a monitoring component for monitoring the position of the shading component.

[0017] The monitoring assembly includes a first state monitoring switch, a second state monitoring switch, a baffle, and a monitoring switch support seat.

[0018] The monitoring switch support seat is installed on the fixing frame.

[0019] The first state monitoring switch and the second state monitoring switch are respectively fixed to the monitoring switch support seat,

[0020] The baffle is connected to the shading assembly so that the baffle moves between the first state monitoring switch and the second state monitoring switch as the shading assembly moves, so as to monitor the opening and closing status of the shutter device.

[0021] Preferably, when the shading assembly is in the complete shading position, the blocking piece is located at the first state monitoring switch, and it is detected that the shutter device is in the closed state.

[0022] When the shading component is in a non-complete shading position, the blocking piece is located at the second state monitoring switch, and it is detected that the shutter device is in an open state.

[0023] Preferably, the driving unit comprises a driving board, and the driving board is electrically connected with a first signal line, a second signal line, a first magnet connecting line, a second magnet connecting line and a power line.

[0024] The reciprocating motion of the bidirectional rotating electromagnet is achieved by controlling the on-off of the first signal line and the second signal line.

[0025] Preferably, the driving unit further includes a host computer, and the host computer controls the on-off time of the first signal line and the second signal line.

[0026] Preferably, a surface of the shading blade away from the fixing frame is polished.

[0027] Preferably, the fixing means between the fixing frame and the driving assembly include top screw fixing and / or screw fixing, and the fixing means between the driving assembly and the shading assembly include top screw fixing and / or screw fixing.

[0028] Preferably, the drive assembly includes a first drive assembly and a second drive assembly.

[0029] The shading component includes a first shading component and a second shading component.

[0030] The first driving component and the second driving component drive the first shading component and the second shading component respectively.

[0031] In a completely light-shielding state, the first light-shielding component and the second light-shielding component are tightly fitted together, and in a non-completely light-shielding state, the first light-shielding component and the second light-shielding component are separated.

[0032] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0033] By rotatably mounting the shading component on a fixed frame, the shading component is driven to move between a complete shading position and a non-complete shading position by a bidirectional rotating electromagnet, the response time is short, and the torque of the bidirectional rotating electromagnet can be adjusted by changing the input voltage of the driving unit. The design is simple, the control logic is easy to implement, and the cost is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0035] Figure 1 is a structural schematic diagram of embodiment 1 of the shutter device provided by the present application;

[0036] Figure 2 is a side view of embodiment 1 of the shutter device provided by the present application;

[0037] Figure 3 is a schematic diagram of the shading blade of the shutter device of Example 1 provided by the present application being in a non-complete shading position;

[0038] Figure 4 is a schematic diagram of a driving unit of a shutter device provided by the present application;

[0039] Figure 5It is a schematic diagram of Example 2 of the shutter device provided in the present application.

[0040] In the figure, 1, fixing frame; 101, mounting portion; 102, supporting portion; 2, shading assembly; 201, shading blade; 202, cylindrical sleeve; 2021, first opening; 21, first shading assembly; 22, second shading assembly; 3, baffle; 4, first state monitoring switch; 5, second state monitoring switch; 6, screw; 7, first magnet connecting wire; 8, second magnet connecting wire; 9, bidirectional rotating electromagnet; 10, cylindrical pivot; 11, top screw; 12, drive board; 13, host computer; 14, first signal line; 15, second signal line; 16, power line. DETAILED DESCRIPTION

[0041] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0042] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0043] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0044] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0045] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0046] Patent network publication number CN108663871B discloses a shutter device, including a shading motion module and a motion control module, the motion control module controls the movement of the shading motion module, the shading motion module includes a shading unit, a driving unit and a signal measuring unit, the shading unit includes two blades, the motion control module sends a control signal, the driving unit receives the control signal and drives the two blades to operate, during continuous exposure, the signal measuring unit measures in real time and feeds back the operating status of the two blades to the motion control module, the motion control module calculates the error between the current exposure dose and the theoretical exposure dose according to the exposure dose size and control accuracy requirements, if the error is less than the control accuracy, the control signal is updated according to the feedback operating status, and the two blades are controlled to close and stop exposure, otherwise the exposure continues until the dose requirement is met.

[0047] The exposure dose in the lithography machine is controlled by the opening / closing of the shutter blades, which requires the shutter to have characteristics such as high response, high speed, high repeatability, and high reliability. Currently, the shutter uses a voice coil motor for double-blade closed-loop control, and the completion time of the shutter blade opening-closing can reach tens of milliseconds, but this control method has high requirements on process accuracy and cost.

[0048] The inventor has designed a shutter device after extensive and intensive experiments.

[0049] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0050] Example 1

[0051] like Figure 1-Figure 3 As shown, a shutter device is used for controlling exposure dose in photolithography, and the shutter device includes:

[0052] Fixed frame 1;

[0053] A driving assembly, comprising a driving part and a bidirectional rotating electromagnet 9, wherein the bidirectional rotating electromagnet 9 is fixed on a fixing frame 1;

[0054] The shading component 2 is rotatably mounted on a side of the bidirectional rotating electromagnet 9 close to the fixed frame 1. The shading component 2 can move between a complete shading position and a non-complete shading position.

[0055] The driving unit drives the bidirectional rotating electromagnet 9 to reciprocate, so as to realize the movement of the shading component 2 between the complete shading position and the incomplete shading position.

[0056] The bidirectional rotating electromagnet 9 is controlled by the driving unit to make reciprocating motion, and the bidirectional rotating electromagnet 9 drives the shading component 2 to move together, so that the shading component 2 can move between the complete shading position and the incomplete shading position. The response time is short, and the torque of the bidirectional rotating electromagnet 9 can be adjusted by changing the input voltage of the driving unit. The bidirectional rotating electromagnet 9 has a simple design, easy control logic to implement, and low cost. Compared with a double-blade closed-loop controlled voice coil shutter motor, the cost is less than one-tenth.

[0057] It should be noted that the response time of the bidirectional rotating electromagnet 9 can reach 4us, the reciprocating motion time is 40ms, and the output torque is 0.2N·m, which can ensure high stability during high-speed motion.

[0058] like Figure 1-Figure 3 As shown, in some embodiments, the shading assembly 2 includes a cylindrical sleeve 202 and a shading blade 201. The cylindrical sleeve 202 and the shading blade 201 are integrally formed. The surface of the cylindrical sleeve 202 is provided with a plurality of first openings 2021. The cylindrical sleeve 202 is fixed to the bidirectional rotating electromagnet 9 via the first openings 2021. The cylindrical sleeve 202 is also provided with a first blind hole. The cylindrical sleeve 202 is sleeved on the bidirectional rotating electromagnet 9 via the first blind hole. The shading blade 201 is a single shading blade 201. By setting an integrally formed cylindrical sleeve 202 and shading blades 201, and by opening a plurality of first openings 2021 on the cylindrical sleeve 202, the cylindrical sleeve 202 is connected to the bidirectional rotating electromagnet 9 through the first openings 2021, and at the same time, a first blind hole matching the bidirectional rotating electromagnet 9 is opened on the cylindrical sleeve 202, and the bidirectional rotating electromagnet 9 is at least partially inserted into the first blind hole to ensure the stability of the bidirectional rotating electromagnet 9 after being connected to the cylindrical sleeve 202. When the output shaft of the bidirectional rotating electromagnet 9 rotates, the shading assembly 2 is driven to rotate synchronously through the cylindrical sleeve 202, thereby realizing the reciprocating motion of the shading assembly 2 between the complete shading position and the incomplete shading position.

[0059] It should be noted that the single shading blade 201 is a cam-shaped blade. By using a cam-shaped blade as the single shading blade 201 for shading, the shading effect can be ensured and the control is convenient.

[0060] like Figure 1-Figure 3As shown, in some embodiments, a plurality of first holes are provided on a side of the bidirectional rotating electromagnet 9 close to the fixed frame 1, and the positions of the plurality of first holes of the bidirectional rotating electromagnet 9 correspond to the plurality of first holes of the fixed frame 1 respectively, and the bidirectional rotating electromagnet 9 is fixed to the fixed frame 1 via the first holes of the bidirectional rotating electromagnet 9 and the first holes of the fixed frame 1, and the side of the bidirectional rotating electromagnet 9 close to the fixed frame 1 also includes a cylindrical pivot 10, and the shading component 2 is sleeved on the cylindrical pivot 10, and the bidirectional rotating electromagnet 9 includes a first magnet connecting line 7 and a second magnet connecting line 8, and the first hole of the bidirectional rotating electromagnet 9 is corresponded to the first hole of the fixed frame 1 to realize a fixed connection between the bidirectional rotating electromagnet 9 and the fixed frame 1, and a cylindrical pivot 10 is formed on the bidirectional rotating electromagnet 9, and the cylindrical sleeve 202 of the shading component 2 is sleeved on the cylindrical pivot 10, and the forward and reverse rotation of the bidirectional rotating electromagnet 9 is controlled by the first magnet connecting line 7 and the second magnet connecting line 8.

[0061] like Figure 1-Figure 3 As shown, in some embodiments, the shutter device also includes a monitoring component to monitor the position of the shading component 2, the monitoring component includes a first state monitoring switch 4, a second state monitoring switch 5, a baffle 3, and a monitoring switch support seat, the monitoring switch support seat is installed on the fixing frame 1, the first state monitoring switch 4 and the second state monitoring switch 5 are respectively fixed to the monitoring switch support seat, the baffle 3 is connected to the shading component 2, so that the baffle 3 moves between the first state monitoring switch 4 and the second state monitoring switch 5 as the shading component 2 moves, so as to monitor the opening and closing of the shutter device, by setting the monitoring component, the monitoring component can monitor the position of the shading component 2, so as to determine whether the shading component 2 is in a complete shading position or a non-complete shading position, the monitoring component includes a first state monitoring switch 4 and a second state monitoring switch 5, respectively monitoring the shading component 2 when it is in different positions, the baffle 3 is connected to the shading component 2, when the bidirectional rotating electromagnet 9 drives the shading component 2 to move, the shading component 2 drives the baffle 3 to move together, so that the baffle 3 moves between the first state monitoring switch 4 and the second state monitoring switch 5, thereby realizing the monitoring of the position of the shading component 2.

[0062] It should be noted that the first state monitoring switch 4 and the second state monitoring switch 5 are symmetrically distributed about the rotation center point of the shading component 2 .

[0063] It should also be noted that, in the present embodiment, the baffle 3 is fixedly connected to the cylindrical sleeve 202, and in other embodiments, the baffle 3 may also be fixedly connected to the shading blade 201, and can be set according to actual conditions. In the present embodiment, the monitoring component is installed on the fixed frame 1, and in other embodiments, the monitoring component may also be installed in other positions, which can be selected according to actual conditions.

[0064] like Figure 1-Figure 3 As shown, in some embodiments, when the shading component 2 is in the complete shading position, the baffle 3 is located at the first state monitoring switch 4, and the shutter device is monitored to be in the closed state; when the shading component 2 is in the non-complete shading position, the baffle 3 is located at the second state monitoring switch 5, and the shutter device is monitored to be in the open state. When the shading component 2 moves to the complete shading position, the shading component 2 drives the baffle 3 to move to the first state monitoring switch 4, and the first state monitoring switch 4 is triggered by the baffle 3; when the shading component 2 moves to the non-complete shading position, the shading component 2 drives the baffle 3 to move to the second state monitoring switch 5, and the second state monitoring switch 5 is triggered by the baffle 3, thereby realizing the monitoring of the opening and closing of the shutter device.

[0065] like Figure 1-Figure 4 As shown, in some embodiments, the driving unit includes a driving board 12, and the driving board 12 is electrically connected to a first signal line 14, a second signal line 15, a first magnet connecting line 7, a second magnet connecting line 8 and a power line 16. By controlling the on and off of the first signal line 14 and the second signal line 15, the reciprocating motion of the bidirectional rotating electromagnet 9 is realized, and the repeatability and stability of the movement of the bidirectional rotating electromagnet 9 can be achieved, and the repeatability error is less than 0.5%. The bidirectional rotating electromagnet 9 is simple in design, the control logic is easy to implement, and the cost is low.

[0066] It should be noted that the input voltage of the driving board 12 is 12~48V. When the input voltage of the driving board 12 changes, the torque of the bidirectional rotating electromagnet 9 changes accordingly. The reciprocating motion of the bidirectional rotating electromagnet 9 is controlled by the driving board 12. The driving torque of the bidirectional rotating electromagnet 9 can be adjusted by the input voltage of the driving board 12. The driving force of the bidirectional rotating electromagnet 9 is directly related to the input voltage of the driving board 12. Ensuring the stability of the input voltage can ensure the accuracy of the driving force. The input voltage of the driving board 12 is 12~48V, and the torque of the bidirectional rotating electromagnet 9 can reach 0.2N·m.

[0067] like Figure 1-Figure 4 As shown, in some embodiments, the driving unit also includes a host computer 13, which controls the on and off time of the first signal line 14 and the second signal line 15. The power-on time of the first signal line 14 and the second signal line 15 is not controlled by the driving board 12, but is controlled by the host computer 13. The power-on time depends on the length of the signal. The longer the signal, the longer the power-on time. The signals of the first signal line 14 and the second signal line 15 cannot be energized at the same time.

[0068] like Figure 1-Figure 3As shown, in some embodiments, the side of the shading blade 201 away from the fixing frame 1 is polished, and the side of the shading blade 201 away from the fixing frame 1 is polished. By polishing the light-receiving surface of the shading blade 201, the reflectivity is greater than 90%, and the heat absorption is minimized to the greatest extent. The energy received by the bidirectional rotating magnet can be effectively reduced, and the operating temperature of the shutter device can be ensured.

[0069] like Figure 1-Figure 3 As shown, in some embodiments, the fixing method between the fixing frame 1 and the driving component includes fixing with a top screw 11 and / or fixing with a screw 6, and the fixing method between the driving component and the shading component 2 includes fixing with a top screw 11 and / or fixing with a screw 6. By adopting the screw 6 for connection, the stability of the connection between the fixing frame 1 and the driving component can be ensured. By adopting the top screw 11 for connection, the top screw 11 can freely adjust the tightening force within a certain range, can adapt to different working environments and requirements, can effectively prevent loosening, and at the same time, the installation difficulty and cost are low, and the tightening effect is good.

[0070] It should be noted that a plurality of top screws 11 are provided, and the plurality of top screws 11 are evenly distributed in a ring shape around the axis of the cylindrical sleeve 202 .

[0071] like Figure 1 As shown, in some embodiments, the fixing frame 1 includes a supporting portion 102 and a mounting portion 101, the supporting portion 102 and the mounting portion 101 are integrally formed, the supporting portion 102 includes two groups of supporting legs, the mounting portion 101 includes a mounting plate, the two groups of supporting legs are respectively arranged on opposite sides of the bottom of the mounting plate, the mounting plate is a rectangular plate, the shading assembly 2 is located on the front side of the mounting plate, the bidirectional rotating electromagnet 9 is arranged on the rear side of the mounting plate, and supporting legs are arranged on both sides of the bottom of the mounting plate, and the supporting legs support the mounting plate.

[0072] Example 2

[0073] like Figure 5As shown, the difference between Example 2 and Example 1 lies in the number of driving components and shading components. In Example 2, the driving component includes a first driving component and a second driving component, and the shading component 2 includes a first shading component 21 and a second shading component 22. The first driving component and the second driving component drive the first shading component 21 and the second shading component 22 respectively. In the state of complete shading, the first shading component 21 and the second shading component 22 are tightly fitted. In the state of incomplete shading, the first shading component 21 and the second shading component 22 are separated. The shading component includes the first shading component 21 and the second shading component 22. When the shading component is in the complete shading position, the first shading component 21 and the second shading component 22 are close to each other. At least partially fit together. When the shading component is in the incomplete shading position, the first shading component 21 and the second shading component 22 are in a close relationship. The light shading component 22 is separated, and shading is performed by using the first shading component 21 and the second shading component 22. The first shading component 21 and the second shading component 22 rotate synchronously in opposite directions, so that the first shading component 21 and the second shading component 22 can rotate in directions approaching each other or away from each other. When shading is required, the first shading component 21 and the second shading component 22 rotate in directions approaching each other to a complete shading position. At this time, the sides of the first shading component 21 and the second shading component 22 that are close to each other are fitted together. When no shading is performed, the first shading component 21 and the second shading component 22 rotate in directions away from each other, and the first shading component 21 and the second shading component 22 are separated. The first shading component 21 and the second shading component 22 can be used in combination, which can reduce the opening and closing angles of the shading components and reduce the movement time.

[0074] It should be noted that the sides of the first shading component 21 and the second shading component 22 that are close to each other are straight lines, so that the first shading component 21 and the second shading component 22 can fit together.

[0075] The same or similar parts between the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment described later, since it corresponds to the system, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0076] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A shutter device, characterized in that: include: Fixed frame; A driving assembly, comprising a driving part and a bidirectional rotating electromagnet, wherein the bidirectional rotating electromagnet is fixed on the fixing frame; A shading component is rotatably mounted on a side of the bidirectional rotating electromagnet close to the fixing frame, and the shading component can move between a complete shading position and a non-complete shading position. The driving unit drives the bidirectional rotating electromagnet to perform reciprocating motion, so as to enable the shading component to move between the complete shading position and the incomplete shading position.

2. The shutter device according to claim 1, characterized in that: The shading assembly comprises a cylindrical sleeve and shading blades, wherein the cylindrical sleeve and the shading blades are integrally formed. The surface of the cylindrical sleeve is provided with a plurality of first openings, through which the cylindrical sleeve and the bidirectional rotating electromagnet are fixed. The cylindrical sleeve is further provided with a first blind hole, and the cylindrical sleeve is sleeved on the bidirectional rotating electromagnet via the first blind hole. The shading blade is a single shading blade.

3. The shutter device according to claim 1, characterized in that: A plurality of first holes are provided on a side of the bidirectional rotating electromagnet close to the fixing frame, and the positions of the plurality of first holes of the bidirectional rotating electromagnet correspond to the plurality of first holes of the fixing frame respectively, and the bidirectional rotating electromagnet is fixed to the fixing frame via the first holes of the bidirectional rotating electromagnet and the first holes of the fixing frame. The bidirectional rotating electromagnet further comprises a cylindrical pivot on one side close to the fixing frame, and the shading component is sleeved on the cylindrical pivot. The bidirectional rotating electromagnet includes a first magnet connecting wire and a second magnet connecting wire.

4. The shutter device according to claim 1, characterized in that: The shutter device also includes a monitoring component for monitoring the position of the shading component. The monitoring assembly includes a first state monitoring switch, a second state monitoring switch, a baffle, and a monitoring switch support seat. The monitoring switch support seat is installed on the fixing frame. The first state monitoring switch and the second state monitoring switch are respectively fixed to the monitoring switch support seat, The baffle is connected to the shading assembly so that the baffle moves between the first state monitoring switch and the second state monitoring switch as the shading assembly moves, so as to monitor the opening and closing status of the shutter device.

5. The shutter device according to claim 4, characterized in that: When the shading assembly is in the fully shading position, the blocking piece is located at the first state monitoring switch, and it is detected that the shutter device is in the closed state. When the shading component is in a non-complete shading position, the blocking piece is located at the second state monitoring switch, and it is detected that the shutter device is in an open state.

6. The shutter device according to claim 1, characterized in that: The driving unit includes a driving board, and the driving board is electrically connected with a first signal line, a second signal line, a first magnet connecting line, a second magnet connecting line and a power line. The reciprocating motion of the bidirectional rotating electromagnet is achieved by controlling the on-off of the first signal line and the second signal line.

7. The shutter device according to claim 6, characterized in that: The driving unit further includes a host computer, and the host computer controls the on-off time of the first signal line and the second signal line.

8. The shutter device according to claim 2, characterized in that: A surface of the shading blade away from the fixing frame is polished.

9. The shutter device according to claim 1, characterized in that: The fixing method between the fixing frame and the driving assembly includes fixing with a jackscrew and / or fixing with a screw. The fixing method between the driving component and the shading component includes top screw fixing and / or screw fixing.

10. The shutter device according to any one of claims 1 to 9, characterized in that: The drive assembly comprises a first drive assembly and a second drive assembly, The shading component includes a first shading component and a second shading component. The first driving component and the second driving component drive the first shading component and the second shading component respectively. In the fully shading state, the first shading component and the second shading component fit closely together. In a non-complete light-shielding state, the first light-shielding component and the second light-shielding component are separated.

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