Planar motor, magnetic suspension planar motor and processing equipment
By adopting a substator in the shape of a triangular prism and a mover in the opposite magnetization direction, the decoupling of the plane motor in the Z-axis direction is achieved, and the problem of the difficulty of decoupling of the force caused by the square shape of the stator permanent magnet in the prior art is solved, and the stability and control accuracy of the system are improved.
Patent Information
- Application Number
- CN202411946721.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-03-25
AI Technical Summary
In existing planar motors, the shape of the stator permanent magnet is square, which makes it difficult to decouple force.
A substator with a prism shape is adopted, and by setting the first direction mover and the second direction mover, the number of substator covered by it is even and the magnetization direction is opposite, the magnetic field is perpendicular to the bottom surface of the mover, thereby generating zero electromagnetic force in the Z-axis direction and realizing the decoupling of force.
Through this design, the decoupling of the plane motor in the Z-axis direction is achieved, the mechanical design is simplified, and the stability and control accuracy of the system are improved.
Smart Images
Figure CN119696412A_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the field of motor technology, and more specifically, relates to a planar motor, a magnetically suspended planar motor and processing equipment. Background Art
[0002] Planar motor is a two-dimensional planar drive device with the characteristics of fast speed, fast response and high precision. It is widely used in semiconductor electronic chip production, precision machining, automated instrumentation manufacturing and intelligent robots. At present, the stator permanent magnets of planar motors are mostly square, and the transitional auxiliary permanent magnets are also small squares, which makes it difficult to achieve Halbach magnetic field distribution and force decoupling. Summary of the invention
[0003] The embodiments of the present application provide a planar motor, a magnetically suspended planar motor, and processing equipment, which can facilitate force decoupling.
[0004] In a first aspect, an embodiment of the present application provides a planar motor, comprising:
[0005] A stator, comprising a plurality of sub-stators, each of which is in the shape of a triangular prism, wherein the magnetization direction or magnetic field direction of each sub-stator is perpendicular to the triangular bottom surface of the sub-stator, and the magnetization directions or magnetic field directions of adjacent sub-stators are opposite;
[0006] A mover, comprising a first-direction mover and a second-direction mover, wherein the bottom surfaces of the first-direction mover and the second-direction mover are parallel to the triangular bottom surface of the sub-stator, the bottom surface of the first-direction mover can cover the bottom surfaces of an even number of the sub-stators, the bottom surface of the second-direction mover can cover the bottom surfaces of an even number of the sub-stators, the magnetization direction or magnetic field direction of half of the even number of the sub-stators is opposite to the magnetization direction or magnetic field direction of the other half of the sub-stators, and the magnetization direction or magnetic field direction of the mover is perpendicular to the bottom surface of the mover;
[0007] The first direction mover comprises a first direction mover 1 and a first direction mover 2, and the magnetic field directions or magnetization directions of the first direction mover 1 and the first direction mover 2 are opposite;
[0008] The second direction mover includes a second direction one mover and a second direction two mover, and the magnetic field directions or magnetization directions of the second direction one mover and the second direction two mover are opposite;
[0009] An angle between the first direction and the second direction is greater than 0° and less than 90°.
[0010] In some possible implementations of the first aspect, the mover further includes:
[0011] A third direction mover, comprising a third direction first mover and a third direction second mover;
[0012] The magnetic field direction or magnetization direction of the third direction one mover is opposite to the magnetic field direction or magnetization direction of the third direction two mover;
[0013] An angle between the third direction and the second direction is greater than 0° and less than 90°.
[0014] In some possible implementations of the first aspect, the first direction one mover and the first direction two mover are symmetrical about the first direction; the second direction one mover and the second direction two mover are symmetrical about the second direction.
[0015] In some possible implementations of the first aspect, the first direction mover is connected to the second direction mover.
[0016] In some possible implementations of the first aspect, the third direction mover is connected to the first direction mover and / or the second direction mover.
[0017] In some possible implementations of the first aspect, the contour shape of the orthographic projection of the first direction one mover, the first direction two mover, the second direction one mover, and the second direction two mover on the bottom surface of the stator is a parallelogram.
[0018] In some possible implementations of the first aspect, the triangular base of each of the sub-stators is an equilateral triangle, and an angle between the first direction and the second direction is 60°.
[0019] In some possible implementations of the first aspect, the stator is a permanent magnet, and the mover is a coil winding; or, the stator is a coil winding, and the mover is a permanent magnet.
[0020] In a second aspect, an embodiment of the present application provides a magnetic levitation planar motor, comprising any of the planar motors described above.
[0021] In a third aspect, an embodiment of the present application provides a processing device, comprising the planar motor described in any one of the above items.
[0022] The beneficial effects of the embodiments of the present application are:
[0023] Each sub-stator of the stator is in the shape of a triangular prism, and the magnetization direction (or magnetic field direction) of each sub-stator is perpendicular to the triangular base of the sub-stator. The magnetization directions (or magnetic field directions) of adjacent sub-stators are opposite. The number of sub-stators covered by the first direction mover and the second direction mover is an even number, and the number of sub-stators with the magnetization direction (or magnetic field direction) vertically upward and the number of sub-stators with the magnetization direction (or magnetic field direction) vertically downward are half respectively. The electromagnetic force generated in the thickness direction of the planar motor (i.e., the Z-axis direction) is 0, thereby achieving decoupling of the first direction mover and the second direction mover from the Z-axis direction, which can facilitate force decoupling. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.
[0025] Figure 1 A schematic diagram of the structure of a planar motor provided in one embodiment of the present application;
[0026] Figure 2 A schematic structural diagram of a stator of a planar motor provided in another embodiment of the present application;
[0027] Figure 3 A magnetic flux distribution diagram of a stator of a planar motor provided in another embodiment of the present application;
[0028] Figure 4 A magnetic flux distribution diagram of a stator of a planar motor provided in an embodiment of the present application;
[0029] Figure 5 A schematic structural diagram of a stator and a first direction mover of a planar motor provided in an embodiment of the present application;
[0030] Figure 6 An electromagnetic force curve generated by a first direction mover of a planar motor provided in an embodiment of the present application;
[0031] Figure 7 A schematic structural diagram of a stator and a second direction mover of a planar motor provided in an embodiment of the present application;
[0032] Figure 8 A schematic diagram of the structure of a planar motor provided by another embodiment of the present application;
[0033] Fig. 9 A schematic structural diagram of a stator and a third-direction mover of a planar motor provided in one embodiment of the present application;
[0034] Fig.10 A schematic diagram of position motion control of a planar motor provided in one embodiment of the present application. DETAILED DESCRIPTION
[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application clearer, the following Figures 1 to 10 It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0037] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0038] It should be understood that the term “and / or” used in the specification and appended claims of this application refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.
[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0040] The embodiments of the present application provide a planar motor capable of achieving two-dimensional planar movement.
[0041] Figure 1 This is a schematic diagram of the structure of a planar motor provided by an embodiment of the present application. Figure 1 The planar motor provided in the embodiment of the present application includes a stator 100 and a mover 200 .
[0042] The stator 100 includes a plurality of sub-stators 10. Each sub-stator 10 is in the shape of a triangular prism.
[0043] The sub-stator 10 can be a permanent magnet or a coil winding, that is, the stator 100 is a permanent magnet or a coil winding. If each sub-stator 10 is a permanent magnet, the magnetization direction of each sub-stator 10 (permanent magnet) is perpendicular to the triangular base of each sub-stator 10. If each sub-stator 10 is a coil winding, the magnetic field direction of each sub-stator 10 after power is applied is perpendicular to the triangular base of each sub-stator 10.
[0044] The sub-stators 10 are arranged in a linear array, the magnetization directions or magnetic field directions of adjacent sub-stators 10 are opposite, and the bottom surfaces of the same side of the sub-stators 10 are located in the same plane.
[0045] Take the sub-stator 10 as an example, which is a permanent magnet. The sub-stator 10 is an equilateral triangle permanent magnet, the shape of the triangular bottom surface of each sub-stator 10 is an equilateral triangle, and the side length of the sub-stator 10 (i.e., the permanent magnet sub-stator) is L. The sub-stator 10 (i.e., the permanent magnet sub-stator) is a vertically magnetized permanent magnet, that is, the magnetization direction of the sub-stator 10 is vertical to the triangular bottom surface of the sub-stator 10 and is upward or downward. Each sub-stator 10 is distributed in a linear array, and the magnetization directions of adjacent sub-stators 10 are opposite. The spacing between the centers of adjacent sub-stators 10 is L, and the spacing between adjacent sub-stators 10 can be 0-20% L.
[0046] In some other embodiments, the sub-stator 10 adopts an equilateral triangle permanent magnet, the side length of the sub-stator 10 is L1, L1 can be selected as 80% L-100% L, the magnetization direction of the sub-stator 10 is vertical to the bottom surface of the sub-stator 10 and upward or downward, and each sub-stator 10 is distributed in a linear array, and the magnetization directions of adjacent sub-stators 10 are opposite.
[0047] In some other embodiments, the sub-stator 10 may also be an isosceles right triangle permanent magnet or other triangular permanent magnet.
[0048] There is an air gap between the mover 200 and the stator 100 in the thickness direction of the planar motor (i.e., the Z-axis direction, which is perpendicular to the X-axis direction and the Y-axis direction). The size of the air gap can be 0.5mm-1.5mm. An air gap of this size can be realized by the process while ensuring that the suspension force is large enough.
[0049] As mentioned above, the distance between adjacent sub-stators 10 may be 0-20%L. Figure 2 This is a schematic diagram of the structure of a stator of a planar motor provided by another embodiment of the present application. Figure 2 , the spacing between the equilateral triangle permanent magnets serving as the sub-stator 10 is 0. Figure 3 The magnetic flux density distribution when the spacing between the equilateral triangle permanent magnets serving as the sub-stator 10 is 0 is shown. Figure 4The magnetic density cloud diagram is shown when the spacing between the equilateral triangle permanent magnets as the sub-stators 10 is 10% L. When there is a gap (the gap is greater than 0) between the equilateral triangle permanent magnets as the sub-stators 10, the magnetic density value will decrease, the leakage magnetic flux will decrease, and at the same time, the magnetic density of the air gap between the mover 200 and the stator 100 in the thickness direction of the planar motor (i.e., the Z-axis direction) will increase, and the spacing between adjacent sub-stators 10 can be determined according to actual needs.
[0050] refer to Figure 1 The mover 200 includes a first direction mover 1 and a second direction mover 2 .
[0051] The first direction mover 1 is connected to the second direction mover 2 to achieve synchronous movement. In some other embodiments, the first direction mover 1 and the second direction mover 2 are separated.
[0052] In the first direction, there is an air gap between the mover 1 and the stator 100 in the thickness direction of the planar motor (i.e., the Z-axis direction), and the size of the air gap can be 0.5mm-1.5mm. In the second direction, there is an air gap between the mover 2 and the stator 100 in the thickness direction of the planar motor (i.e., the Z-axis direction), and the size of the air gap can be 0.5mm-1.5mm.
[0053] Under the action of each sub-stator 10 of the stator 100, the first direction mover 1 can move relative to the stator 100 along the first direction a, and the second direction mover 2 can move relative to the stator 100 along the second direction b. The first direction a can be called the a-axis, and the second direction b can be called the b-axis. There is an angle between the first direction a and the second direction b that is greater than 0° and less than 90°. The first direction mover 1 moves relative to the stator 100 along the first direction a, and the second direction mover 2 moves relative to the stator 100 along the second direction b, so that the mover 100 can be moved to any position in the XY plane.
[0054] The mover 100 may be a permanent magnet or a coil winding, that is, the first direction mover 1 may be a permanent magnet or a coil winding, and the second direction mover 2 may be a permanent magnet or a coil winding.
[0055] For example, if each sub-stator 10 is a permanent magnet, the first direction mover 1 and the second direction mover 2 are coil windings; if each sub-stator 10 is a coil winding, the first direction mover 1 and the second direction mover 2 are permanent magnets. The mover 200 is a coil winding, which is relatively light and can improve the acceleration of the mover. The stator 100 is a permanent magnet, which can simplify the structure of the stator and is also easy to implement in terms of process.
[0056] The bottom surfaces of the first direction mover 1 and the second direction mover 2 are parallel to the triangular bottom surface of the sub-stator 10 , that is, the first direction mover 1 and the second direction mover 2 are parallel to the sub-stator 10 .
[0057] The bottom surface of the mover 200 can cover the bottom surface of an even number of sub-stators 10. Specifically, the bottom surface of the mover 1 in the first direction can cover the bottom surface of an even number of sub-stators 10, and the bottom surface of the mover 2 in the second direction can also cover the bottom surface of an even number of sub-stators 10. The magnetization direction or magnetic field direction of half of the even number of sub-stators 10 is opposite to the magnetization direction or magnetic field direction of the other half of the sub-stators 10.
[0058] The magnetization direction or magnetic field direction of the mover 200 is perpendicular to the bottom surface of the mover 200. Specifically, the magnetization direction or magnetic field direction of the first direction mover 1 is perpendicular to the bottom surface of the first direction mover 1, and the magnetization direction or magnetic field direction of the second direction mover 2 is perpendicular to the bottom surface of the second direction mover 2; if the first direction mover 1 and the second direction mover 2 are coil windings, the magnetic field direction of the first direction mover 1 after power is applied is perpendicular to the bottom surface of the first direction mover 1, and the magnetic field direction of the second direction mover 2 after power is applied is perpendicular to the bottom surface of the second direction mover 2; if the first direction mover 1 and the second direction mover 2 are permanent magnets, the magnetization direction of the first direction mover 1 is perpendicular to the bottom surface of the first direction mover 1, and the magnetization direction of the second direction mover 2 is perpendicular to the bottom surface of the second direction mover 2.
[0059] The first direction mover 1 comprises a first direction one mover 11 and a first direction two mover 12. The magnetic field directions or magnetization directions of the first direction one mover 11 and the first direction two mover 12 are opposite.
[0060] The second direction mover 2 includes a second direction one mover 21 and a second direction two mover 22. The magnetic field direction or magnetization direction of the second direction one mover 21 is opposite to the magnetic field direction or magnetization direction of the second direction two mover 21.
[0061] Taking the example that the mover 200 is a coil winding, the first direction mover 1 is used to generate electromagnetic force and acceleration along the a-axis direction, and the second direction mover 2 is used to generate electromagnetic force and acceleration along the b-axis direction.
[0062] Figure 5 This is a schematic diagram of the structure of the stator and the first direction mover of the planar motor provided by an embodiment of the present application. Figure 5 , the contour shape of the orthographic projection of the first direction one mover 11 and the first direction two mover 12 on the bottom surface of the stator 200 is a parallelogram, that is, the first direction one mover 11 and the first direction two mover 12 are parallelogram coil windings to match the equilateral triangle sub-stator 10. The width of the four sides of each parallelogram coil winding can be in the range of 0.1L-0.4L, and the side lengths of the parallelogram are Nx*L and Ny*L respectively, Nx can be 1 if it is an odd number, and Ny can be 2 if it is an even number, so that the magnetic field can be fully utilized, the magnetic field coupling can be reduced, and the control can be simplified.
[0063] Figure 5The triangles filled with dark colors represent the sub-stators 10 with the N pole facing upward in the thickness direction, and the triangles filled with light colors represent the sub-stators 10 with the S pole facing upward in the thickness direction.
[0064] The energizing direction of the first direction one mover 11 is opposite to the energizing direction of the first direction two mover 12 ; for example, the energizing direction of the first direction one mover 11 is counterclockwise, and the energizing direction of the first direction two mover 12 is clockwise.
[0065] The first direction one mover 11 and the first direction two mover 12 are symmetrical about the first direction a, and the two parallelogram coil windings (i.e., the first direction one mover 11 and the first direction two mover 12) are respectively at an angle of 60° and -60° with the first direction a, which can facilitate the control of the first direction one mover 11 and the first direction two mover 12 to move relative to the stator 200 along the first direction a. In some other embodiments, the first direction one mover 11 and the first direction two mover 12 are not symmetrical about the first direction a.
[0066] The number of sub-stators 10 (i.e., permanent magnet sub-stators) covered by the first-direction mover 1 (i.e., parallelogram coil winding) is an even number, and the number of sub-stators 10 (i.e., permanent magnet sub-stators) with magnetization directions vertically upward and vertically downward are half, respectively. The electromagnetic force generated in the thickness direction of the planar motor (i.e., Z-axis direction) is 0, thereby achieving decoupling of the first-direction mover 1 from the Z-axis direction.
[0067] Figure 6 This is the electromagnetic force curve generated by the first direction mover of the planar motor provided by an embodiment of the present application. Figure 6 Specifically, due to the opposite magnetization directions of the adjacent sub-stators 10, under the magnetic field of the two adjacent sub-stators, the first direction mover 1 will move relative to the stator 100 along the a-axis direction, keeping the magnitude and direction of the current unchanged, and the change curve of the electromagnetic force generated by the first direction mover 1 is a sinusoidal electromagnetic force curve. Since the a-axis direction coincides with the X-axis of the traditional XY coordinate system, the electromagnetic force Fa generated by the first direction mover 1 at this time is the electromagnetic force Fx, corresponding to the sinusoidal electromagnetic force curve in the electromagnetic force curve diagram; the electromagnetic force Fy generated by the first direction mover 11 and the first direction mover 12 located on the upper and lower sides of the a-axis direction of the first direction mover 1 is very small, and the opposite directions are offset (which can be achieved by adjusting the current direction of the first direction mover 11 and the first direction mover 12), so that the electromagnetic force Fy value generated by the first direction mover 1 is 0, thereby achieving decoupling in the a-axis direction.
[0068] Figure 7 This is a schematic diagram of the structure of the stator and the second direction mover of the planar motor provided by an embodiment of the present application. Figure 7, the contour shape of the orthographic projection of the second direction first mover 21 and the second direction second mover 22 on the bottom surface of the stator 200 is a parallelogram, that is, the second direction first mover 21 and the second direction second mover 22 are parallelogram coil windings to match the equilateral triangle sub-stator 10. The width of the four sides of each parallelogram coil winding can be in the range of 0.1L-0.4L, and the side lengths of the parallelogram are Nx*L and Ny*L respectively, Nx can be 1 if it is an odd number, and Ny can be 2 if it is an even number.
[0069] The power-on direction of the second direction one mover 21 is opposite to the power-on direction of the second direction two mover 22 ; for example, the power-on direction of the second direction one mover 21 is counterclockwise, and the power-on direction of the second direction two mover 22 is clockwise.
[0070] The second direction one mover 21 and the second direction two mover 22 are symmetrical about the second direction b, and the two parallelogram coil windings (i.e., the second direction one mover 21 and the second direction two mover 22) are respectively at an angle of 60° and -60° with the second direction b, which can facilitate the control of the second direction one mover 21 and the second direction two mover 22 to move relative to the stator 200 along the second direction b. In some other embodiments, the second direction one mover 21 and the second direction two mover 22 are not symmetrical about the second direction b.
[0071] The number of sub-stators 10 (i.e., permanent magnet sub-stators) that can be covered by the second direction mover 2 (i.e., the parallelogram coil winding) is an even number, and the number of sub-stators 10 (i.e., permanent magnet sub-stators) with a magnetization direction of vertically upward and a magnetization direction of vertically downward are half respectively. The electromagnetic force generated in the thickness direction of the planar motor (i.e., the Z-axis direction) is 0, thereby realizing decoupling of the second direction mover 2 from the Z-axis direction.
[0072] Specifically, since the magnetization directions of adjacent sub-stators 10 are opposite, under the action of the magnetic field of two adjacent sub-stators 10, the second direction mover 2 will move relative to the stator 100 along the b-axis direction, keeping the magnitude and direction of the current unchanged, and the change curve of the electromagnetic force generated by the second direction mover 2 is also a sinusoidal electromagnetic force curve. The electromagnetic force Fb generated by the second direction mover 2 corresponds to the sinusoidal electromagnetic force curve in the electromagnetic force curve diagram; in the direction perpendicular to the b-axis direction, the electromagnetic forces generated by the second direction mover 21 and the second direction mover 22 located on the upper and lower sides of the b-axis direction of the second direction mover 2 are very small, and the directions are opposite and offset (this can be achieved by adjusting the current direction of the second direction mover 21 and the second direction mover 22), so that the value of the electromagnetic force generated by the second direction mover 2 in the direction perpendicular to the b-axis is 0, thereby achieving decoupling of the b-axis and the direction perpendicular to the b-axis.
[0073] Since the sub-stator 10 adopts an equilateral triangle permanent magnet, the angle between the first direction a and the second direction b is 60°, so that when the first direction mover 1 moves relative to the stator 100 along the first direction a, it moves along one side of the equilateral triangle sub-stator 10, and when the second direction mover 2 moves relative to the stator 100 along the second direction b, it moves along the other side of the equilateral triangle sub-stator 10. By controlling the first direction mover 1 and the second direction mover 2, the mover 200 can be quickly moved to any planar position, which can further simplify the control.
[0074] Figure 8 This is a schematic diagram of the structure of a planar motor provided by another embodiment of the present application. Figure 8 The above-mentioned mover 200 may also include a third direction mover 3.
[0075] In the third direction, there is an air gap between the mover 3 and the stator 100 in the thickness direction of the planar motor (ie, the Z-axis direction), and the size of the air gap may be 0.5 mm-1.5 mm.
[0076] Under the action of each sub-stator 10 of the stator 100, the third direction mover 3 can move relative to the stator 100 along the third direction c. The third direction c can also be called the c-axis. The third direction c and the second direction b have an angle greater than 0° and less than 90°, so as to realize the movement of the mover 100 to any position in the XY plane.
[0077] To realize the overall movement of the mover, the third direction mover 3 is connected to the first direction mover 1; or, the third direction mover 3 is connected to the second direction mover 2; or, the third direction mover 3 is connected to the first direction mover 1 and the second direction mover 2.
[0078] The third direction mover 3 may be a permanent magnet or a coil winding. For example, if each sub-stator 10 is a permanent magnet, the third direction mover 3 is a coil winding; if each sub-stator 10 is a coil winding, the third direction mover 3 is a permanent magnet.
[0079] The bottom surface of the third direction mover 3 is parallel to the triangular bottom surface of the sub-stator 10 , that is, the third direction mover 3 is parallel to the sub-stator 10 .
[0080] The bottom surface of the third direction mover 3 can cover the bottom surfaces of an even number of sub-stators 10 , and the magnetization direction or magnetic field direction of half of the even number of sub-stators 10 is opposite to that of the other half of the sub-stators 10 .
[0081] The magnetization direction or magnetic field direction of the third directional mover 3 is perpendicular to the bottom surface of the third directional mover 3; if the third directional mover 3 is a coil winding, the magnetic field direction of the third directional mover 3 after power is applied to the third directional mover 3 is perpendicular to the bottom surface of the third directional mover 3; if the third directional mover 3 is a permanent magnet, the magnetization direction of the third directional mover 3 is perpendicular to the bottom surface of the third directional mover 3.
[0082] The third direction mover 3 includes a third direction first mover 31 and a third direction second mover 32 .
[0083] The magnetic field direction or magnetization direction of the third direction one mover 31 is opposite to the magnetic field direction or magnetization direction of the third direction two mover 32 .
[0084] Taking the third direction mover 3 as a coil winding as an example, the third direction mover 3 is used to generate electromagnetic force and acceleration along the c-axis direction.
[0085] Fig. 9 This is a schematic diagram of the structure of the stator and the third direction mover of the planar motor provided by an embodiment of the present application. Fig. 9 The third direction mover 31 and the third direction mover 32 of the third direction mover 3 are parallelogram coil windings to match the equilateral triangle sub-stator 10. The width of the four sides of each parallelogram coil winding can be in the range of 0.1L-0.4L, which can make full use of the magnetic field, reduce magnetic field coupling, and simplify control.
[0086] The power supply direction of the third direction one mover 31 is opposite to the power supply direction of the third direction two movers 32; for example, the power supply direction of the third direction one mover 31 is counterclockwise, and the power supply direction of the third direction two movers 32 is clockwise.
[0087] The third direction one mover 31 and the third direction two mover 32 are symmetrical about the third direction c, and the two parallelogram coil windings (i.e., the third direction one mover 31 and the third direction two mover 32) are respectively at an angle of 60° and -60° with the third direction c, which can facilitate the control of the third direction one mover 31 and the third direction two mover 32 to move relative to the stator 200 along the third direction c. In some other embodiments, the third direction one mover 31 and the third direction two mover 32 are not symmetrical about the third direction c.
[0088] The number of sub-stators 10 (i.e., permanent magnet sub-stators) covered by the third direction mover 3 (i.e., parallelogram coil winding) is an even number, and the number of sub-stators 10 (i.e., permanent magnet sub-stators) with magnetization directions vertically upward and vertically downward are half, respectively. The electromagnetic force generated in the thickness direction of the planar motor (i.e., Z-axis direction) is 0, thereby achieving decoupling of the third direction mover 3 from the Z-axis direction.
[0089] Specifically, since the magnetization directions of the adjacent sub-stators 10 are opposite, under the action of the magnetic fields of the two adjacent sub-stators, the third directional mover 3 will move relative to the stator 100 along the c-axis direction, keeping the magnitude and direction of the current unchanged, and the change curve of the electromagnetic force generated by the third directional mover 3 is also a sinusoidal electromagnetic force curve. The electromagnetic force Fc generated by the third directional mover 3 corresponds to the sinusoidal electromagnetic force curve in the electromagnetic force curve diagram; in the direction perpendicular to the c-axis direction, the electromagnetic forces generated by the third directional mover 31 and the third directional mover 32 located on the upper and lower sides of the c-axis direction of the third directional mover 3 are very small, and the directions are opposite and offset (this can be achieved by adjusting the current direction of the third directional mover 31 and the third directional mover 32), so that the value of the electromagnetic force generated by the third directional mover 3 in the direction perpendicular to the c-axis is 0, thereby realizing the decoupling of the c-axis and the direction perpendicular to the c-axis.
[0090] Since the number and area of the N poles and S poles of the sub-stator 10 covered by the first direction mover 1, the second direction mover 2 and the third direction mover 3 are equal, the equivalent electromagnetic force generated in the Z-axis direction is 0, thereby achieving decoupling of the Z-axis direction of the planar motor from the horizontal a-axis direction, b-axis direction and c-axis direction.
[0091] Since the sub-stator 10 adopts an equilateral triangle permanent magnet, the angle between the third direction c and the second direction b is 60°, and the angle between the third direction c and the first direction a is 120°. In this way, when the third direction mover 3 moves relative to the stator 100 along the third direction c, it moves along the third side of the equilateral triangle sub-stator 10, which can realize the rapid movement of the mover 200 to any plane position, and can further simplify the control.
[0092] refer to Figure 8 , the three coil windings of the first direction mover 1, the second direction mover 2 and the third direction mover 3 are close together in the same plane, for example, the first direction mover 1 is in the middle, the third direction mover 3 is in the upper left corner, the upper quadrilateral coil winding of the second direction mover 2 and the upper quadrilateral coil winding of the first direction mover 1 are aligned with their long sides, the lower coil winding of the second direction mover 2 is in the lower right corner of the first direction mover 1, and the upper quadrilateral of the second direction mover 2 and the lower quadrilateral of the first direction mover 1 are aligned with their long sides, so that the mover can be moved to the target position as quickly as possible and is convenient for fixing. Of course, the first direction mover 1, the second direction mover 2 and the third direction mover 3 can also adopt other position combinations.
[0093] When the first direction one mover 11, the first direction two movers 12, the second direction one mover 21, the second direction two movers 22, the third direction one mover 31 and the third direction two movers 32 are parallelogram coil windings, and the sub-stator 10 is an equilateral triangle permanent magnet, the inner angles of the aforementioned parallelograms are 60° and 120° respectively, and the angle between the two parallelograms is 120°; the middle space of the parallelogram coil winding can be supported by an insulating material as a bracket, the bracket is a parallelogram, and the wire is wound horizontally around the parallelogram bracket, and the shape of the coil winding is a parallelogram. The long side of the parallelogram coil winding is twice as long as the short side, and the short side is less than or equal to 120% of L, which can ensure that the short side is located in a small area with a consistent magnetic field direction between adjacent permanent magnets (i.e., sub-stators); wherein L is the equilateral triangle side length of the equilateral triangle permanent magnet sub-stator 10 in the absence of a gap.
[0094] The planar motor provided in the embodiment of the present application includes a first direction mover 1, a second direction mover 2 and a third direction mover 3. The first direction mover 1 and the second direction mover 2, the first direction mover 1 and the third direction mover 3, or the second direction mover 2 and the third direction mover 3 can be used to realize the movement of any point in the XY plane. If any one of the three movers is damaged, the other two can continue to work normally, which can improve the fault tolerance capability.
[0095] The position motion control of the planar motor provided in the embodiment of the present application is described. Fig.10 This is a schematic diagram of the position motion control of a planar motor provided by an embodiment of the present application. Fig.10 , there are four positions in the XY plane, namely P1, P2, P3 and P4, and P1 is the initial position. The mover 200 moves from position P1 to position P2: the second direction mover 2 can be moved 2L in the b-axis direction; the first direction mover 1 can be moved 2L in the a-axis direction, and then moved 2L in the c-axis direction to reach point P2; the first direction mover 1 and the second direction mover 2 can also be powered on simultaneously to quickly reach point P2. For the movement from position P1 to position P3: the first direction mover 1 can be moved L in the a-axis direction, and the third direction mover 3 can be moved L in the c-axis; the first direction mover 1 can be moved -L in the negative direction of the a-axis direction, and the second direction mover 2 can be moved 2L in the b-axis direction.
[0096] The planar motor provided in the embodiment of the present application can easily achieve decoupling in the Z-axis direction, can facilitate force decoupling, can be easy to control, can improve fault tolerance, can use equilateral triangle permanent magnets as stators, can facilitate installation, and can simplify the structure.
[0097] An embodiment of the present application further provides a magnetic levitation planar motor, which includes the planar motor provided by any of the above embodiments.
[0098] The magnetic levitation planar motor provided in the embodiment of the present application further includes a levitation coil winding (not shown in the figure).
[0099] The suspension coil winding is used to realize suspension in the thickness direction (ie, the Z-axis direction) of the magnetic suspension planar motor.
[0100] The suspension coil winding may be a triangle with a side length of 2L.
[0101] The suspension coil winding can be specifically combined with the first direction mover 1 , the second direction mover 2 and the third direction mover 3 to achieve suspension of the mover 200 .
[0102] In order to achieve suspension, the number of N poles of the sub-stator 10 (ie, the permanent magnet sub-stator) covered by the suspension coil winding is not equal to the number of S poles.
[0103] The energizing direction of the suspension winding coil is determined according to whether it needs to float up or down in the Z-axis direction: if the number of N poles of the sub-stator 10 (i.e., the permanent magnet sub-stator) covered by the suspension coil winding is large, the direction of the magnetic field generated by the energizing of the suspension winding coil is N-pole downward, then it floats up, and the direction of the magnetic field generated by the energizing of the suspension winding coil is S-pole downward, then it floats down; if the number of S poles of the sub-stator 10 (i.e., the permanent magnet sub-stator) covered by the suspension coil winding is large, the direction of the magnetic field generated by the energizing of the suspension winding coil is N-pole downward, then it floats down, and the direction of the magnetic field generated by the energizing of the suspension winding coil is S-pole downward, then it floats up.
[0104] The embodiment of the present application further provides a processing device, which includes the planar motor provided by any of the above embodiments. The processing device can specifically be a laser processing device or a machining device.
[0105] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims
1. A planar motor, characterized in that: include: A stator, comprising a plurality of sub-stators, each of which is in the shape of a triangular prism, wherein the magnetization direction or magnetic field direction of each sub-stator is perpendicular to the triangular bottom surface of the sub-stator, and the magnetization directions or magnetic field directions of adjacent sub-stators are opposite; A mover, comprising a first-direction mover and a second-direction mover, wherein the bottom surfaces of the first-direction mover and the second-direction mover are parallel to the triangular bottom surface of the sub-stator, the bottom surface of the first-direction mover can cover the bottom surfaces of an even number of the sub-stators, the bottom surface of the second-direction mover can cover the bottom surfaces of an even number of the sub-stators, the magnetization direction or magnetic field direction of half of the even number of the sub-stators is opposite to the magnetization direction or magnetic field direction of the other half of the sub-stators, and the magnetization direction or magnetic field direction of the mover is perpendicular to the bottom surface of the mover; The first direction mover comprises a first direction mover 1 and a first direction mover 2, and the magnetic field directions or magnetization directions of the first direction mover 1 and the first direction mover 2 are opposite; The second direction mover includes a second direction one mover and a second direction two mover, and the magnetic field directions or magnetization directions of the second direction one mover and the second direction two mover are opposite; An angle between the first direction and the second direction is greater than 0° and less than 90°.
2. The planar motor according to claim 1, characterized in that: The mover also includes: A third direction mover, comprising a third direction first mover and a third direction second mover; The magnetic field direction or magnetization direction of the third direction one mover is opposite to the magnetic field direction or magnetization direction of the third direction two mover; An angle between the third direction and the second direction is greater than 0° and less than 90°.
3. The planar motor according to claim 1, characterized in that: The first direction one mover and the first direction two mover are symmetrical about the first direction; the second direction one mover and the second direction two mover are symmetrical about the second direction.
4. The planar motor according to claim 1, characterized in that: The first direction mover is connected to the second direction mover.
5. The planar motor according to claim 2, characterized in that: The third direction mover is connected to the first direction mover and / or the second direction mover.
6. The planar motor according to claim 1, characterized in that: The contour shape of the orthographic projection of the first direction one mover, the first direction two mover, the second direction one mover and the second direction two movers on the bottom surface of the stator is a parallelogram.
7. The planar motor according to claim 1, characterized in that: The triangular base of each of the sub-stators is in the shape of an equilateral triangle, and the angle between the first direction and the second direction is 60°.
8. The planar motor according to any one of claims 1 to 7, characterized in that: The stator is a permanent magnet, and the mover is a coil winding; or, the stator is a coil winding, and the mover is a permanent magnet.
9. A magnetically suspended planar motor, characterized in that: The invention comprises a planar motor as claimed in any one of claims 1 to 8.
10. A processing equipment, characterized in that: The invention comprises a planar motor as claimed in any one of claims 1 to 8.