High-power ultrafast laser shaping method and device, medium and product

Abstract

The invention discloses a high-power ultrafast laser shaping method and device, a medium and a product, and relates to the technical field of laser, and the method comprises the steps: obtaining the two-dimensional energy value distribution data of a light spot; target homogenization light spot data, laser beam data and a transmission area width ratio are set, and DOE phase data are obtained; a homogenized light spot energy distribution curve graph is obtained according to the two-dimensional energy value distribution data of the light spots and the DOE phase data; obtaining a homogenization degree index based on the homogenization light spot energy distribution curve graph; determining whether the homogenization degree index meets a target homogenization requirement or not; if the homogenization degree index does not meet the target homogenization requirement, resetting the width ratio of the transmission area, and returning to execute the step of obtaining the DOE phase data until the homogenization degree index meets the target homogenization requirement; and obtaining a homogenized light spot result according to the DOE phase data and the two-dimensional energy value distribution data of the light spot. According to the invention, the uniformity of the quality of homogenized light spots when different high-power picosecond lasers use the same design to homogenize and shape DOE can be ensured.

Description

Technical Field

[0001] The present application relates to the field of laser technology, and in particular to a high-power ultrafast laser shaping method, equipment, medium and product. Background Art

[0002] As laser processing technology is increasingly used in the photovoltaic, lithium battery, and semiconductor industries, market competition has intensified, quality and cost control have become more stringent, and the requirements for processing quality and efficiency have become higher and higher. In order to improve processing efficiency and quality, the demand for shaping the Gaussian light emitted by the laser into a circular, square or rectangular flat-top spot with uniform energy distribution is becoming more and more common. However, as the power of the high-power picosecond laser increases, the energy distribution of the output spot deviates from the fundamental mode distribution, and beam shaping requires that the laser output spot should meet the fundamental mode Gaussian distribution as much as possible, so that the homogenization effect will be better. In addition, there are differences between each high-power picosecond laser, which has a great impact on industrial batch applications. Therefore, there is an urgent need for a beam shaping method to ensure the consistency of the homogenized spot quality when different high-power picosecond lasers use the same design homogenized shaping diffractive optical element (DOE). Summary of the invention

[0003] The purpose of this application is to provide a high-power ultrafast laser shaping method, equipment, medium and product, which can ensure the consistency of the homogenized spot quality when different high-power picosecond lasers use the same design of homogenized shaping DOE, and at the same time improve the homogenization degree and homogenization quality of the homogenized spot.

[0004] To achieve the above objectives, this application provides the following solutions:

[0005] In a first aspect, the present application provides a high-power ultrafast laser shaping method, comprising:

[0006] Acquire two-dimensional energy value distribution data of the light spot; the two-dimensional energy value distribution data of the light spot includes: wavelength, light spot diameter and intensity distribution value;

[0007] Setting target homogenized spot data, laser beam data and transmission zone width ratio; the target homogenized spot data includes: the length and width of the target homogenized spot; the laser beam data includes: the initial wavelength and the initial spot diameter;

[0008] Obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission zone width ratio;

[0009] Obtaining a uniform spot energy distribution curve diagram according to the two-dimensional energy value distribution data of the spot and the DOE phase data;

[0010] Obtaining a homogenization degree index based on the homogenized light spot energy distribution curve diagram;

[0011] Determine whether the homogenization degree index meets the target homogenization requirement; if not, reset the transmission area width ratio, and return to the step of obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission area width ratio until the homogenization degree index meets the target homogenization requirement;

[0012] A homogenized light spot result is obtained according to the DOE phase data and the two-dimensional energy value distribution data of the light spot.

[0013] Optionally, before acquiring the two-dimensional energy value distribution data of the light spot, a beam quality analyzer is used to collect the two-dimensional energy value distribution data of the light spot emitted by the picosecond laser.

[0014] Optionally, obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission zone width ratio includes:

[0015] The target light field distribution inverse algorithm is adopted to obtain the DOE phase data based on the laser beam data, the target homogenized light spot data and the transmission area width ratio.

[0016] Optionally, the target light field distribution inverse algorithm is implemented based on a GS inverse algorithm program of MATLAB.

[0017] Optionally, a GS forward algorithm program of MATLAB is used to obtain a homogenized spot energy distribution curve according to the two-dimensional energy value distribution data of the spot and the DOE phase data.

[0018] Optionally, obtaining a homogenization degree index based on the homogenized light spot energy distribution curve diagram includes:

[0019] Based on the uniform light spot energy distribution curve, a maximum value of uniform light spot energy and a minimum value of uniform light spot energy are obtained;

[0020] A homogenization degree index is obtained based on the maximum value of the homogenized light spot energy and the minimum value of the homogenized light spot energy.

[0021] Optionally, the homogenization degree index is expressed as:

[0022] Among them, I max Indicates the maximum value of the homogenized spot energy, I min Indicates the minimum value of the homogenized spot energy.

[0023] In a second aspect, the present application provides a computer device, comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of any one of the high-power ultrafast laser shaping methods described above.

[0024] In a third aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of any one of the high-power ultrafast laser shaping methods described above.

[0025] In a fourth aspect, the present application provides a computer program product, comprising a computer program, which, when executed by a processor, implements the steps of any one of the high-power ultrafast laser shaping methods described above.

[0026] According to the specific embodiments provided in this application, this application has the following technical effects:

[0027] The present application provides a high-power ultrafast laser shaping method, equipment, medium and product. By determining whether the homogenization degree index meets the target homogenization requirement, it is determined whether to adjust the transmission zone width ratio. By continuously adjusting the transmission zone width ratio, DOE phase data that can make the homogenization degree index meet the target homogenization requirement is obtained, so as to ensure the consistency of the homogenization spot quality of different high-power picosecond lasers when using the phase data of the same homogenization shaping DOE design, and at the same time, the homogenization degree and homogenization quality of the homogenized spot can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 This is a flow chart of a high-power ultrafast laser shaping method in one embodiment of the present application;

[0030] Figure 2 This is a distribution diagram of the energy value of the light spot in one embodiment of the present application;

[0031] Figure 3 This is a DOE phase diagram in one embodiment of the present application;

[0032] Figure 4 This is the DOE homogenization effect diagram before implementing the laser shaping method;

[0033] Figure 5 This is a diagram of the DOE homogenization effect in one embodiment of the present application;

[0034] Figure 6 A schematic diagram of the structure of a computer device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0036] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0037] In an exemplary embodiment, a high-power ultrafast laser shaping method is provided, which is executed by a computer device, and can be executed by a computer device such as a terminal or a server alone, or by a terminal and a server together. In all the embodiments given in this application, the method is described by applying it to a high-power picosecond laser as an example. Figure 1 As shown, the method includes:

[0038] Step 1, obtain the two-dimensional energy value distribution data of the light spot. The two-dimensional energy value distribution of the light spot is as follows: Figure 2 As shown. The two-dimensional energy value distribution data of the light spot includes: wavelength, light spot diameter and intensity distribution value. Before obtaining the two-dimensional energy value distribution data of the light spot, a beam quality analyzer can be used to collect high-power ultrafast laser light emitted by a high-power picosecond laser, that is, to collect the two-dimensional energy value distribution data of the light spot emitted by the high-power picosecond laser.

[0039] Step 2, setting the target homogenized spot data, laser beam data and transmission zone width ratio. The target homogenized spot data includes: the length and width of the target homogenized spot; the laser beam data includes: the initial wavelength and the initial spot diameter.

[0040] For example, the transmission region is defined as the width where the spot energy decreases from 90% to 13.5%, which is equivalent to the ratio of the diffraction-limited spot size.

[0041] Step 3, obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission zone width ratio.

[0042] For example, the target light field distribution inverse algorithm can be used to obtain DOE phase data based on the set laser beam data, target homogenized spot data and transmission zone width ratio. Specifically, the target light field distribution inverse algorithm can be implemented based on the GS inverse algorithm program of MATLAB. In the GS inverse algorithm program, the transmission zone width ratio has a certain tolerance adjustment effect on different incident beam energies. The transmission zone width ratio can be adjusted to ensure that when the incident light deviates from the fundamental mode Gaussian distribution, the homogenization effect is about 70%.

[0043] Step 4: Obtain a uniform spot energy distribution curve diagram according to the acquired two-dimensional energy value distribution data of the spot and the DOE phase data.

[0044] For example, by using the GS forward algorithm program of MATLAB, a uniform spot energy distribution curve can be obtained according to the acquired two-dimensional energy value distribution data of the spot and the DOE phase data.

[0045] Step 5, based on the energy distribution curve of the homogenized light spot, obtain a homogenization degree index, and determine whether the homogenization degree index meets the target homogenization requirement. If not, reset the transmission area width ratio, and return to step 3 until the homogenization degree index meets the target homogenization requirement.

[0046] Based on this step, the DOE phase data that meets the target homogenization requirements can be obtained. Among them, the DOE phase data that meets the target homogenization requirements is as follows: Figure 3 shown.

[0047] For example, based on the uniform spot energy distribution curve, the maximum value and the minimum value of the uniform spot energy are obtained, and based on the maximum value and the minimum value of the uniform spot energy, the uniformity index is obtained. The uniformity index can be expressed as: I max Indicates the maximum value of the homogenized spot energy, I min Indicates the minimum value of the homogenized spot energy.

[0048] Step 6: Obtain a homogenized light spot result according to the DOE phase data and the two-dimensional energy value distribution data of the light spot.

[0049] In an exemplary embodiment, the DOE homogenization effect is obtained by using a conventional laser shaping method and a high-power ultrafast laser shaping method described in the present application, such as Figure 4 and Figure 5 shown. Figure 4 The laser emitted by a high-power picosecond laser is homogenized in a conventional phase DOE. Figure 5 This is the DOE homogenization effect of the laser emitted by a high-power picosecond laser after laser shaping. Figure 4 and Figure 5It can be found that the homogenization effect is significantly improved by using the laser shaping method of the present application, from a homogenization degree of less than 50% to 70%.

[0050] In an exemplary embodiment, a computer device is provided. The computer device may be a server or a terminal. The internal structure diagram thereof may be as follows: Figure 6 As shown. The computer device includes a processor, a memory, an input / output interface (Input / Output, referred to as I / O) and a communication interface. Among them, the processor, the memory and the input / output interface are connected through a system bus, and the communication interface is connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used to store relevant data in the laser shaping method. The input / output interface of the computer device is used to exchange information between the processor and an external device. The communication interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a high-power ultrafast laser shaping method is implemented.

[0051] Those skilled in the art will understand that Figure 6 The structure shown in the figure is only a block diagram of a part of the structure related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components. In an exemplary embodiment, a computer device is provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above-mentioned method embodiments when executing the computer program.

[0052] In an exemplary embodiment, a computer-readable storage medium is provided, storing a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0053] In an exemplary embodiment, a computer program product is provided, including a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0054] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM may be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0055] The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. The non-relational database may include a distributed database based on blockchain, etc., but is not limited thereto. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, etc., but is not limited thereto.

[0056] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] This article uses specific examples to illustrate the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and core ideas of this application. At the same time, for those skilled in the art, according to the ideas of this application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this application.

Claims

1. A high-power ultrafast laser shaping method, characterized in that: The high-power ultrafast laser shaping method comprises: Acquire two-dimensional energy value distribution data of the light spot; the two-dimensional energy value distribution data of the light spot includes: wavelength, light spot diameter and intensity distribution value; Setting target homogenized spot data, laser beam data and transmission zone width ratio; the target homogenized spot data includes: the length and width of the target homogenized spot; the laser beam data includes: the initial wavelength and the initial spot diameter; Obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission zone width ratio; Obtaining a uniform spot energy distribution curve diagram according to the two-dimensional energy value distribution data of the spot and the DOE phase data; Obtaining a homogenization degree index based on the homogenized light spot energy distribution curve diagram; Determine whether the homogenization degree index meets the target homogenization requirement; if not, reset the transmission area width ratio, and return to the step of obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission area width ratio until the homogenization degree index meets the target homogenization requirement; A homogenized light spot result is obtained according to the DOE phase data and the two-dimensional energy value distribution data of the light spot.

2. The high-power ultrafast laser shaping method according to claim 1, characterized in that: Before acquiring the two-dimensional energy value distribution data of the light spot, a beam quality analyzer is used to collect the two-dimensional energy value distribution data of the light spot emitted by the high-power picosecond laser.

3. The high-power ultrafast laser shaping method according to claim 1, characterized in that: Obtaining DOE phase data based on the laser beam data, the target homogenized spot data and the transmission zone width ratio includes: The target light field distribution inverse algorithm is adopted to obtain the DOE phase data based on the laser beam data, the target homogenized light spot data and the transmission area width ratio.

4. The high-power ultrafast laser shaping method according to claim 3, characterized in that: The target light field distribution inverse algorithm is implemented based on the GS inverse algorithm program of MATLAB.

5. The high-power ultrafast laser shaping method according to claim 1, characterized in that: The GS forward algorithm program of MATLAB is used to obtain a uniform spot energy distribution curve according to the two-dimensional energy value distribution data of the spot and the DOE phase data.

6. The high-power ultrafast laser shaping method according to claim 1, characterized in that: The homogenization degree index is obtained based on the homogenized light spot energy distribution curve diagram, including: Based on the uniform light spot energy distribution curve, a maximum value of uniform light spot energy and a minimum value of uniform light spot energy are obtained; A homogenization degree index is obtained based on the maximum value of the homogenized light spot energy and the minimum value of the homogenized light spot energy.

7. The high-power ultrafast laser shaping method according to claim 6, characterized in that: The homogenization degree index is expressed as: Among them, I max Indicates the maximum value of the homogenized spot energy, I min Indicates the minimum value of the homogenized spot energy.

8. A computer device comprising: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the high-power ultrafast laser shaping method according to any one of claims 1 to 7.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the high-power ultrafast laser shaping method according to any one of claims 1 to 7 is implemented.

10. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the high-power ultrafast laser shaping method according to any one of claims 1 to 7 is implemented.

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