Corrosion-resistant and high-temperature-resistant vacuum wafer robot

Abstract

The invention discloses a corrosion-resistant and high-temperature-resistant vacuum wafer robot which comprises a base and an arm located on the base. The arm comprises a big arm, the big arm comprises a first big arm and a second big arm which are connected with each other, two sides of the big arm are respectively provided with a finger, and the fingers are respectively connected with the big arm through a first small arm and a second small arm; a vacuum motor and a servo motor are arranged in the base, the vacuum motor comprises a vacuum spacer bush, a rotor and a stator, the stator is subjected to vacuum isolation through the vacuum spacer bush, and the rotor is connected with the large arm through a rotating shaft; according to the invention, the arm is of a connecting rod structure, components such as a belt wheel and a belt are reduced, and single-side double guide rails are designed into double-side guide rails through structural optimization, so that the problems of high temperature, high vacuum and corrosion are solved, the stress problem of the double-side guide rails is also solved, and a large load is achieved.

Description

Technical Field

[0001] The present invention relates to a robot for transporting substrates such as wafers and glass in a vacuum, and in particular to a robot arm thereof, and in particular to a corrosion-resistant, high-temperature-resistant, high-load vacuum wafer robot. Background Art

[0002] In existing wafer fabs, processes such as etching and CVD need to be performed in a vacuum environment.

[0003] The arm of a conventional wafer handling robot is equipped with a motor, a reducer, and a synchronous belt transmission mechanism. This robot is used in an atmospheric environment. In order not to destroy the vacuum environment in a vacuum container, a vacuum robot needs to isolate the atmospheric pressure environment from the vacuum environment and operate. In addition, a vacuum robot cannot use components that are not suitable for use in a vacuum environment because moisture, gas, etc. are released into the vacuum environment due to evaporation. Therefore, the structure of a conventional wafer handling robot cannot be used directly in a vacuum container. This is because the general motors, reducers, etc. installed inside the arm use various materials that are not suitable for a vacuum environment.

[0004] To solve the above problems, the traditional magnetic fluid vacuum robot arm uses magnetic fluid rotary seal to seal the dust particles generated by the belt and other moving parts in the arm. However, in vacuum environments such as etching and CVD, which are usually accompanied by high temperature and corrosive gases, the substrates carried by the vacuum robot have to be carried at high temperatures. In this case, the vacuum container of the vacuum robot also becomes hot due to the heat from the substrate and the heat from the processing chamber. The substrate itself sometimes becomes a high temperature of more than 100 degrees. Therefore, for vacuum robots, especially the arms entering the vacuum chamber, heat measures are also needed. The magnetic fluid of the traditional magnetic fluid version of the robot encounters high temperatures, which will cause the magnetic fluid seal to fail and the synchronous belt to deform due to heat.

[0005] Due to structural limitations, the cables coming out of the motor of traditional magnetofluid sealed robots may get tangled and cannot rotate 360 ​​degrees freely, which greatly increases the time it takes to schedule traditional wafers.

[0006] The lifting axis guide rails of traditional direct-drive vacuum motors are single-sided double guide rails. This structural guide rail cannot withstand large lateral loads, which produces an eccentric load moment that causes equipment deformation and seriously reduces the service life of the guide rails. Summary of the invention

[0007] In view of the deficiencies in the prior art, the present invention provides a corrosion-resistant and high-temperature-resistant vacuum wafer robot. The present invention makes the arm itself a connecting rod structure, reduces components such as pulleys and belts, and optimizes the structure of the single-sided double guide rail to be designed as a double-sided guide rail. Therefore, the problems of high temperature, high vacuum and corrosion are solved, and the problem of the force on the double-sided guide rail is also solved to achieve a large load.

[0008] To achieve the above object, the present invention provides the following technical solutions: A corrosion-resistant and high-temperature-resistant vacuum wafer robot comprises a base and an arm located on the base; the arm comprises a large arm, the large arm comprises a first large arm and a second large arm connected to each other, a finger is respectively arranged on both sides of the large arm, and the finger is respectively connected to the large arm through a first small arm and a second small arm; a vacuum motor and a servo motor are arranged in the base, the vacuum motor comprises a vacuum sleeve, a rotor, and a stator, the vacuum sleeve isolates the stator from vacuum, and the rotor is connected to the large arm through a rotating shaft; the servo motor is connected to the arm through a coupling and a ball screw.

[0009] As a further solution of the present invention, one end of the first forearm and the second forearm are connected by a steel belt and are respectively located on both sides of the finger, and the other end is respectively connected to one end of the first upper arm and the second upper arm.

[0010] As a further solution of the present invention, the vacuum motor includes an upper motor and a lower motor; the rotor includes a lower motor rotor and an upper motor rotor, the stator includes a lower motor stator and an upper motor stator, and the rotating shaft includes an upper motor rotating shaft and a lower motor rotating shaft.

[0011] As a further solution of the present invention, the upper motor also includes an upper motor encoder, an upper motor bearing, and an upper motor housing; the lower motor also includes a lower motor housing, a lower motor bearing, and a lower motor encoder; the upper motor bearing is respectively connected to the upper motor rotor and the upper motor rotating shaft; the lower motor bearing is respectively connected to the lower motor rotating shaft and the lower motor rotor; the upper motor encoder and the lower motor encoder are respectively used to provide feedback information on the rotation speed and position of the upper motor rotor and the lower motor rotor.

[0012] As a further solution of the present invention, the vacuum motor also includes a bottom cover, a vacuum connector, and a vacuum bellows; a sealing ring is provided between the bottom cover and the lower motor housing to isolate the vacuum; the vacuum sleeve is connected to the upper motor housing and the lower motor housing, and sealing rings are provided at both ends for vacuum sealing.

[0013] As a further solution of the present invention, the upper motor stator and the lower motor stator are located outside the vacuum sleeve, and inside the corresponding upper motor housing and the lower motor housing; the lower motor rotor and the upper motor rotor are located inside the vacuum sleeve.

[0014] As a further solution of the present invention, the base also includes a linear guide rail, a guide rail upright plate and a mounting flange; the vacuum motor is connected to the guide rail upright plate via the linear guide rail, and the guide rail upright plate is connected to the mounting flange.

[0015] As a further solution of the present invention, the boom includes a boom steel belt, and a large boom pulley and a small boom pulley connected to the boom steel belt; the first forearm and the second forearm include a forearm steel belt, and a large forearm pulley and a small forearm pulley connected to the forearm steel belt.

[0016] The present invention has the following beneficial effects: The present invention reduces components such as pulleys and belts by making the arm into a connecting rod structure, and designs the single-sided double guide rail into a double-sided guide rail through structural optimization, which can solve the problems of high temperature, high vacuum and corrosion, and also solves the problem of force on the double-sided guide rail to achieve a large load.

[0017] The present invention is suitable for vacuum robots in vacuum environments, and can reduce the moisture and gas generated in vacuum environments; reduce the roll and vibration when the arm is extended; can carry high-load objects in a vacuum; can ensure a sufficient arm extension range while reducing the height of the arm; and can resist corrosive gases and high temperatures. At the same time, through structural design optimization, the traditional single-sided double rails are optimized and designed into double-sided rails, so as to achieve a large load.

[0018] Based on the structural design of the present invention, it is also compatible with the traditional Scara structure arm, and the traditional Scara structure belt is designed to be a steel belt drive, because the steel belt connection has no gap and can withstand large loads and high temperatures. Because the structural design fixes the stator with cables to the motor housing, and the rotor without cables rotates, without the constraints of cables, the structure can rotate 360 ​​degrees.

[0019] In order to more clearly illustrate the structural features and effects of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the corrosion-resistant and high-temperature-resistant vacuum wafer robot of the present invention.

[0021] Figure 2 It is a structural diagram of the arm of the corrosion-resistant and high-temperature-resistant vacuum wafer robot of the present invention.

[0022] Figure 3 It is a schematic cross-sectional view of the base mentioned in the present invention.

[0023] Figure 4 It is an overall cross-sectional view of the corrosion-resistant and high-temperature-resistant vacuum wafer robot of the present invention.

[0024] Figure 5 It is an exploded view of the arm of the corrosion-resistant and high-temperature-resistant vacuum wafer robot of the present invention.

[0025] Figure 6 It is a schematic diagram of the motor in the base of the present invention.

[0026] Figure 7 It is a top view of the arm structure of the present invention.

[0027] Figure 8 , Fig. 9 This is an application example of the Scara arm mentioned in the present invention.

[0028] Fig.10 , Fig.11 It is a partial exploded schematic diagram of the present invention. DETAILED DESCRIPTION

[0029] The present invention will be further explained below in conjunction with the accompanying drawings and related knowledge, and described clearly and completely. Obviously, the described application is only a part of the embodiments of the present invention, rather than all the embodiments.

[0030] The traditional magnetic fluid vacuum robot arm uses magnetic fluid rotary seal to seal the dust particles generated by the belt and other moving parts in the arm and prevent them from overflowing. In vacuum environments such as etching and CVD, there are usually high temperatures and corrosive gases. Due to the above problems, the substrates carried by the vacuum robot have to be carried at high temperatures. In this case, the vacuum container of the vacuum robot also becomes hot due to the heat from the substrate and the heat from the processing chamber. The substrate itself sometimes becomes hotter than 100 degrees. Therefore, for vacuum robots, especially the arms entering the vacuum chamber, heat measures are also required. The magnetic fluid of the traditional magnetic fluid robot encounters high temperatures, which will cause the magnetic fluid seal to fail and the synchronous belt to deform due to heat. In addition, due to the limitations of its own structural problems, the cables coming out of the motor of the traditional magnetic fluid sealed robot will have entanglement problems and cannot rotate 360 ​​degrees freely, so the robot will greatly increase the time for scheduling traditional wafers. In addition, the lifting axis guide rail of the traditional direct-drive vacuum motor is a single-sided double guide rail. This structural guide rail cannot withstand large lateral load forces, and the eccentric load torque will cause the equipment to deform, and the service life of the guide rail will be seriously reduced.

[0031] In order to solve the above technical problems, a corrosion-resistant and high-temperature-resistant vacuum wafer robot is proposed; Figure 1-Figure 7As shown, the corrosion-resistant and high-temperature-resistant vacuum wafer robot includes a base 100 and an arm 200 located on the base; the arm 200 includes a large arm and a small arm, the large arm includes a first large arm 2 and a second large arm 3 connected to each other, and the small arm includes a first small arm 4 and a second small arm 5. A finger 6 is respectively arranged on both sides of the large arm, and the finger is connected to the large arm through the first small arm 4 and the second small arm 5, respectively. Figure 2 The fingers, the first small arm 4 and the second small arm 5 on both sides are designed symmetrically with the big arm; the base 100 is provided with a vacuum motor 7 and a servo motor 8, the vacuum motor 7 includes a vacuum sleeve 9, a rotor and a stator, the vacuum sleeve 9 isolates the stator in vacuum, and the rotor is connected to the big arm through a rotating shaft; the servo motor 8 is connected to the arm through a coupling 10 and a ball screw 11. The wafer robot of the present invention works in a vacuum environment and is an automation equipment specially used for semiconductor industry manufacturing. Its main function is to realize the transmission of wafers in a vacuum chamber; the process conditions of the wafer are often in an environment of corrosive gas, high temperature, plasma, etc., which requires the robot to have corrosion resistance, high temperature resistance and other properties to avoid corrosion and damage.

[0032] Reference Figure 2 As shown, one end of the first forearm 4 and the second forearm 5 are connected by a steel belt 12 and are respectively located on both sides of the fingers, and the other ends are respectively connected to one end of the first large arm 2 and the second large arm 3; specifically, the first forearm 4 is connected to the first large arm 2, and the second forearm 5 is connected to the second large arm 3. The first forearm 4 and the second forearm 5 are connected and fixed by a steel belt. It is further preferred that a steel belt 12 is respectively provided at the corresponding end of the first forearm 4 and the second forearm 5, so as to form a coupled operation at the first forearm 4 and the second forearm 5. Because the device does not have non-metallic transmission parts, it can withstand high temperature and corrosion. The result adopts spatial connection transmission, which has a higher load than the traditional structure. The present invention realizes the transmission and connection between different components through clever mechanism design, so that the equipment can work in a complex space environment, improving space utilization and transmission efficiency; refer to Figure 2 As shown, the finger 6 is provided with a finger mounting plate 43 , and is connected to the first forearm 4 and the second forearm 5 via an arm connecting plate 44 .

[0033] Reference Figure 3As shown, the vacuum motor 7 includes an upper motor and a lower motor, that is, the dual direct-drive motor mentioned in the present invention; the rotor includes a lower motor rotor 15 and an upper motor rotor, the stator includes a lower motor stator 17 and an upper motor stator 18, and the rotating shaft includes an upper motor rotating shaft 19 and a lower motor rotating shaft 20; further preferably, the upper motor also includes an upper motor encoder 21, an upper motor bearing 22, and an upper motor housing 23; the lower motor 17 also includes a lower motor housing 24, a lower motor bearing 25 and a lower motor encoder 26; the upper motor bearing 22 is respectively connected to the upper motor rotor 16 and the upper motor rotating shaft 19; the lower motor bearing 25 is respectively connected to the lower motor rotating shaft 20 and the lower motor rotor 15; wherein the upper motor encoder 21 and the lower motor encoder 25 are respectively used to provide feedback information on the rotation speed and position of the upper motor rotor and the lower motor rotor; further preferably, the vacuum motor also includes a bottom cover 27, a vacuum connector 28, and a vacuum bellows 29, refer to Figure 3 As shown, the vacuum bellows 29 is located above the upper motor encoder 21; a sealing ring is provided between the bottom cover 27 and the lower motor housing 24 to isolate the vacuum; the vacuum sleeve 9 is connected to the upper motor housing and the lower motor housing, and sealing rings are provided at both ends for vacuum sealing. Further preferably, the upper motor stator 18 and the lower motor stator 17 are located outside the vacuum sleeve 9, and inside the corresponding upper motor housing 23 and the lower motor housing 24; the lower motor rotor 15 and the upper motor rotor 16 are located inside the vacuum sleeve 9, and a sealing ring is provided between the bottom cover 27 and the lower motor housing 24 to isolate the vacuum for fixing The vacuum sleeve 9 is connected to the upper motor casing and the lower motor casing, and sealing rings are provided at both ends for vacuum sealing. The dual motor stators are outside the vacuum sleeve and inside the motor casing, and the rotor part is inside the vacuum sleeve. The rotating shaft and the motor rotor are fixed, so that the vacuum sleeve isolates the motor stator from the vacuum to achieve vacuum sealing. The rotating shaft is respectively connected to the first arm and the second arm for transmission, so that there are no cables or other components in the vacuum sleeve 9. They are all metal components, which can withstand high temperature and corrosion. Compared with traditional servo motors, the motor has higher torque and can drive large loads.

[0034] In the present invention, the second upper arm 3 is connected to the upper motor rotating shaft 19, the first upper arm 2 is connected to the lower motor shaft 20, the first forearm 4 is installed on the first upper arm 2, the second forearm 5 is installed on the second upper arm 3, and the finger 6 is connected to the first forearm 4 and the second forearm 5. The rotation of the upper motor and the lower motor respectively drives the first upper arm 2 and the second upper arm 3 to operate, thereby driving the first forearm 4 and the second forearm 5 to move. Because the finger 6 is connected to the first forearm 4 and the second forearm 5, it drives the finger 6 to move.

[0035] Reference Figure 4As shown, the base also includes a linear guide 30, a guide plate 31 and a mounting flange 32; the vacuum motor is connected to the guide plate 31 through the linear guide 30, and the guide plate 31 is connected to the mounting flange 32. Specifically, the finger is connected to the arm, the arm is connected to the vacuum motor, the vacuum motor is connected to the guide plate through the linear guide, and the guide plate is connected to the robot mounting flange, wherein the servo motor is connected to the ball screw through the coupling, and the ball screw is fixed to the vacuum motor, so as to realize the overall lifting. And the linear guides are distributed on both sides of the vacuum motor, which can withstand a large radial eccentric load.

[0036] Reference Figure 5 As shown, the boom includes a boom steel belt 33, and a boom large pulley 34 and a boom small pulley 35 connected to the boom steel belt; the first forearm and the second forearm include a forearm steel belt 36, and a forearm large pulley 37 and a forearm small pulley 38 connected to the forearm steel belt. Further, the boom also includes a boom shell 39, a boom cover 40, and the first forearm and the second forearm also include a forearm shell 41 and a forearm cover 42; it should be noted that the boom mentioned above includes a first boom and a second boom; specifically, the boom large pulley and the boom small pulley are fixed on the boom shell, the boom steel belt is connected to the boom large and small pulleys, the boom cover is fixed to the boom shell, the forearm steel belt is connected to the forearm small pulley and the forearm large pulley, and are fixed to the forearm shell at the same time.

[0037] In the present invention, the upper arm housing 39 is connected to the upper motor rotating shaft, the upper arm large pulley 34 is connected to the lower motor rotating shaft, and the dual motors rotate relative to each other, thereby driving the upper arm large housing 39 and the upper arm large pulley 34 to move relative to each other, thereby driving the upper arm small pulley 35 to rotate through the upper arm steel belt 33, the forearm housing 41 is connected to the upper arm small pulley 35 for transmission, and the forearm small pulley 38 is connected through the forearm steel belt 36, so that the power of the upper and lower motors is transmitted to the end fingers for movement.

[0038] The corrosion-resistant and high-temperature-resistant vacuum wafer robot of the present invention; Arm structure: The arm is composed of an arm and a forearm, the arm includes a first arm and a second arm, and the forearm includes a first forearm and a second forearm. The fingers on both sides of the arm are connected to the arm through the first forearm and the second forearm, and are symmetrically designed. This symmetrical structure helps to improve the stability and balance of the robot movement. Transmission connection: One end of the first forearm and the second forearm is connected by a steel belt and is located on both sides of the finger, and the other end is respectively connected to the first arm and the second arm to form a coupled operation, realizing the absence of non-metallic transmission parts, and having the characteristics of high temperature resistance and corrosion resistance. At the same time, space connection transmission is adopted to improve the load capacity and space utilization. Motor setting: A vacuum motor and a servo motor are arranged in the base. The vacuum motor adopts a dual direct-drive motor structure, including an upper motor and a lower motor. The stator and the rotor are isolated by a vacuum spacer, so that the rotor is in a vacuum environment and the stator is in an atmospheric environment. Magnetic transmission is used to achieve vacuum sealing, and the motor has a large torque and can drive a large load.

[0039] Further; Finger part: The finger is provided with a finger mounting plate and an arm connecting plate, which is connected to the first forearm and the second forearm through the arm connecting plate, ensuring the stability of the connection between the finger and the arm, and ensuring the accuracy and reliability when grabbing and carrying wafers. Transmission parts of the upper arm and the lower arm: The upper arm includes an upper arm steel belt, an upper arm large pulley, an upper arm small pulley, an upper arm shell and an upper arm cover plate, etc.; the lower arm includes an arm steel belt, an arm large pulley, an arm small pulley, an arm shell and an arm cover plate, etc. Through the mutual cooperation of these parts, the power of the upper and lower motors is transmitted to the end fingers, so that the fingers can move accurately. Base part: The base includes a linear guide, a guide plate and a mounting flange. The vacuum motor is connected to the guide plate through a linear guide, the guide plate is connected to the mounting flange, and the servo motor is connected to the arm through a coupling and a ball screw to achieve overall lifting. The linear guides are distributed on both sides of the vacuum motor, which can withstand a large radial offset force, ensuring the stability and accuracy of the robot during movement.

[0040] What needs to be explained in the present invention is: in order to achieve high load, the present invention adopts a self-developed direct-drive motor, which can enable the arm to obtain a larger transmission torque, and the arm part adopts a spatial connecting rod transmission, which can make the arm more rigid and run more smoothly; and in order to achieve high temperature resistance and corrosion resistance, various parts exposed to the vacuum environment are made of metal parts, which can withstand a high temperature of 100°C and can operate normally, and the arm is specially plated to be corrosion-resistant.

[0041] In the present invention, the vacuum is isolated, and a self-developed direct-drive motor is specially used. A vacuum spacer is added between the moving stator of the motor, and the stator with the cable is placed in the atmospheric environment, and the metal rotor is placed in the vacuum environment. The transmission is performed by magnetic force. Because the stator with the coil is placed in the atmospheric environment, heat exchange can be performed through the atmospheric flow, so that the motor can work at a constant temperature, and the equipment also has the ability to withstand high vacuum. The two linear guides are arranged on both sides of the lifting vacuum motor, and the force is evenly applied, which can withstand large radial loads.

[0042] Reference Figure 8 and Fig. 9 The design of the present invention is also compatible with the steel belt version of Scara arm, and is flexible to use.

[0043] Reference Fig.10 , Fig.11The figure shows a partial exploded schematic diagram of the present invention, in which a bearing seat 45 is arranged on the ball screw. The present invention adopts a self-developed direct-drive motor, which can enable the arm to obtain a larger transmission torque. The arm part adopts a spatial connecting rod transmission, which can enable the arm to have stronger rigidity and run more smoothly. In order to achieve high temperature resistance and corrosion resistance, various parts exposed to the vacuum environment are made of metal parts, which can withstand a high temperature of 100°C and can operate normally. The arm is subjected to a special coating treatment to be corrosion-resistant. The upper motor stator and the lower motor stator are located on the outside of the vacuum sleeve, and on the inside of the corresponding upper motor housing 23 and the lower motor housing; the lower motor rotor and the upper motor rotor are located on the inside of the vacuum sleeve, and a sealing ring is provided between the bottom cover and the lower motor housing to isolate the vacuum for fixing. The vacuum sleeve is connected to the upper motor housing and the lower motor housing, and sealing rings are provided at both ends for vacuum sealing. The dual motor stators are on the periphery of the vacuum sleeve and inside the motor housing, and the rotor part is inside the vacuum sleeve. The rotating shaft and the motor rotor are fixed, so that the vacuum sleeve can move the motor stator. The first arm and the second arm are connected to the vacuum sleeve to achieve vacuum isolation and vacuum sealing. The rotating shafts are connected to the first arm and the second arm for transmission, so that there are no cables or other components in the vacuum sleeve. They are all metal parts, which can withstand high temperature and corrosion. The motor has higher torque than the traditional servo motor and can drive large loads. In other words, all parts exposed to the vacuum environment are made of metal parts, which can withstand high temperature of 100°C and operate normally, meeting the transmission requirements of wafers under high temperature process conditions. The arm is specially plated to resist the erosion of corrosive gases in the wafer process, extending the service life of the robot and reducing the failure and maintenance costs caused by corrosion. At the same time, the self-developed direct-drive motor is used to enable the arm to obtain greater transmission torque, which can carry and transmit wafers of larger size and weight, improving production efficiency. The arm part adopts spatial connecting rod transmission, which makes the arm more rigid and runs more smoothly, ensuring the accuracy and safety of the wafer during transmission, reducing the risk of wafer breakage and scratches, and the robot design is compatible with the steel belt version of Scara arm, with good flexibility, which can be adjusted and expanded according to different production needs.

[0044] The technical principle of the present invention is described above in combination with the specific embodiments, which are only preferred implementations of the present invention. The protection scope of the present invention is not limited to the above embodiments, and all technical solutions under the idea of ​​the present invention belong to the protection scope of the present invention. Those skilled in the art can think of other specific implementations of the present invention without creative work, and these methods will fall within the protection scope of the present invention.

Claims

1. A corrosion-resistant and high-temperature-resistant vacuum wafer robot, characterized in that: It includes a base and an arm located on the base; the arm includes a large arm, the large arm includes a first large arm and a second large arm connected to each other, a finger is respectively arranged on both sides of the large arm, and the finger is respectively connected to the large arm through a first small arm and a second small arm; a vacuum motor and a servo motor are arranged in the base, the vacuum motor includes a vacuum sleeve, a rotor, and a stator, the vacuum sleeve isolates the stator from vacuum, and the rotor is connected to the large arm through a rotating shaft; the servo motor is connected to the arm through a coupling and a ball screw.

2. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 1, characterized in that: One end of the first forearm and the second forearm are connected by a steel belt and are respectively located on both sides of the finger, and the other end is respectively connected to one end of the first large arm and the second large arm.

3. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 1, characterized in that: The vacuum motor includes an upper motor and a lower motor; the rotor includes a lower motor rotor and an upper motor rotor, the stator includes a lower motor stator and an upper motor stator, and the rotating shaft includes an upper motor rotating shaft and a lower motor rotating shaft.

4. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 3, characterized in that: The upper motor also includes an upper motor encoder, an upper motor bearing, and an upper motor housing; the lower motor also includes a lower motor housing, a lower motor bearing, and a lower motor encoder; the upper motor bearing is respectively connected to the upper motor rotor and the upper motor rotating shaft; the lower motor bearing is respectively connected to the lower motor rotating shaft and the lower motor rotor; the upper motor encoder and the lower motor encoder are respectively used to provide feedback information on the rotation speed and position of the upper motor rotor and the lower motor rotor.

5. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 4, characterized in that: The vacuum motor also includes a bottom cover, a vacuum connector, and a vacuum bellows; a sealing ring is provided between the bottom cover and the lower motor housing to isolate the vacuum; the vacuum spacer is connected to the upper motor housing and the lower motor housing, and sealing rings are provided at both ends for vacuum sealing.

6. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 4, characterized in that: The upper motor stator and the lower motor stator are located outside the vacuum sleeve and inside the corresponding upper motor housing and lower motor housing; the lower motor rotor and the upper motor rotor are located inside the vacuum sleeve.

7. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 5, characterized in that: The base also includes a linear guide rail, a guide rail upright plate and a mounting flange; the vacuum motor is connected to the guide rail upright plate via the linear guide rail, and the guide rail upright plate is connected to the mounting flange.

8. The corrosion-resistant and high-temperature-resistant vacuum wafer robot according to claim 6, characterized in that: The upper arm comprises an upper arm steel belt, and an upper arm large pulley and an upper arm small pulley connected to the upper arm steel belt; the first forearm and the second forearm comprise an forearm steel belt, and an forearm large pulley and an forearm small pulley connected to the forearm steel belt.

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