Simple assembly mechanism for single crystal furnace

Abstract

The application provides a simple assembly mechanism for a single crystal furnace, and belongs to the technical field of semiconductor manufacturing equipment, and comprises a lifting mechanism, a rotating mechanism and a clamping mechanism. The lifting mechanism comprises a mounting column, a stepping motor is fixedly installed at the top end of the mounting column, a driving spur gear is drivingly connected to the output end of the stepping motor through a shaft coupling, a driven spur gear is meshingly connected to the front side of the driving spur gear, a threaded rod is fixedly connected to the bottom end of the driven spur gear, a lifting block is threadedly connected to the surface of the threaded rod, and a lifting frame is fixedly connected to the front end of the lifting block. The application solves the problems of complex operation, low efficiency and insufficient safety of traditional single crystal furnaces during installation, maintenance and repair, and realizes efficient, safe and stable operation through height adjustment, direction adjustment, shock absorption and automatic limiting clamping.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a simple assembly mechanism for a single crystal furnace. BACKGROUND

[0002] A single crystal furnace is a key equipment for producing semiconductor materials, mainly used for melting polycrystalline silicon material and generating high-purity, dislocation-free single crystal material by controlling parameters such as temperature and stretching speed. These single crystal materials have wide application in the semiconductor and photovoltaic industries, directly affecting the performance and quality of products such as chips and solar cells. The operation of the single crystal furnace is usually carried out in an inert gas environment, and is equipped with a complex heating and temperature control system to ensure the stability and consistency of the crystal growth process.

[0003] However, the traditional single crystal furnace is mostly fixed on a fixed frame, and when it needs to be periodically overhauled or maintained, it is extremely inconvenient to carry and operate due to its large size and heavy weight. Workers usually need to disassemble the equipment before carrying it, which not only wastes time and effort, but also increases the safety risk. SUMMARY

[0004] The purpose of this section is to summarize some aspects of the embodiments of the present application and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract and title of the specification to avoid obscuring the purpose of this section, abstract and title, and such simplifications or omissions cannot be used to limit the scope of the present application.

[0005] In view of the above and / or existing problems in the prior art, the present application is proposed.

[0006] Therefore, the technical problem to be solved by the present application is to provide a simple assembly mechanism for a single crystal furnace that can realize vertical lifting and rotation of the single crystal furnace, reduce the complexity of disassembly and carrying, improve the convenience of overhaul and maintenance, and ensure the safety of operation and the stability of the equipment.

[0007] To solve the above technical problems, the present application provides the following technical scheme: a simple assembly mechanism for a single crystal furnace, comprising a lifting mechanism, a rotating mechanism and a clamping mechanism, wherein:

[0008] The lifting mechanism comprises a mounting column, a stepper motor is fixedly installed at the top end of the mounting column, a driving spur gear is drivingly connected to the output end of the stepper motor through a shaft coupling, a driven spur gear is meshingly connected to the front side of the driving spur gear, a threaded rod is fixedly connected to the bottom end of the driven spur gear, a lifting block is threadedly connected to the surface of the threaded rod, and a lifting frame is fixedly connected to the front end of the lifting block;

[0009] The rotating mechanism comprises a buffer assembly fixedly installed outside the lifting frame, four groups of the buffer assemblies are provided, top ends of the four groups of buffer assemblies are fixedly connected with a placing disc, a protection cylinder is fixedly connected with the center of the bottom end of the placing disc, four connecting rods are circumferentially arranged around the outside of the bottom end of the placing disc and the outside of the protection cylinder, bottom ends of the four connecting rods are fixedly connected with a mounting plate, a servo motor is fixedly installed on the rear side of the mounting plate, an output end of the servo motor is drivingly connected with a driving bevel gear through a shaft coupling, the front side of the driving bevel gear is meshingly connected with a driven bevel gear, a rotating shaft is fixedly connected with the top end of the driven bevel gear, the rotating shaft penetrates through the mounting plate and the protection cylinder and extends to the top end of the placing disc, and

[0010] The clamping mechanism comprises a fixed disc fixedly installed at the top end of the lifting frame and sleeved on the outside of the protection cylinder, a sleeve is rotatably connected with the top end of the fixed disc, two fan-shaped plates are symmetrically installed on the left and right sides of the top end of the sleeve, two baffle plates are drivingly connected with the top ends of the two fan-shaped plates through transmission rods, and the two baffle plates are slidingly connected on the front and rear sides of the top end of the placing disc.

[0011] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the lifting blocks are provided in two, and the left and right sides of the two lifting blocks are rotatably connected with rollers, the inner side walls of the left and right ends of the mounting column are provided with sliding grooves, and the two groups of rollers are slidingly connected in the two sliding grooves, respectively.

[0012] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the lifting frame comprises support plates fixedly installed on the left and right sides of the front ends of the two lifting blocks, the front ends of the two support plates are fixedly connected through a connecting plate, and the protection cylinder and the four connecting rods are arranged between the two support plates.

[0013] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the four groups of buffer assemblies each comprise a fixed block fixedly installed on the left and right ends of the outside of the two support plates, the top ends of the four fixed blocks are telescopically connected with limiting rods, the outer surfaces of the four limiting rods are sleeved with buffer springs, the bottom ends of the four buffer springs are fixedly connected with the upper surfaces of the four fixed blocks, and the bottom end of the placing disc is fixedly connected with the top ends of the four limiting rods and buffer springs.

[0014] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the rotating shaft is rotatably connected with the center inside the protection cylinder and the placing disc through a bearing.

[0015] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the outer wall of the protection cylinder is symmetrically provided with a push rod at the front and back ends, and the sleeve is symmetrically provided with a first arc slot at the front and back ends, and the outer ends of the two push rods are respectively connected to the top ends of the two first arc slots.

[0016] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the inner part of the two fan-shaped plates is symmetrically provided with a second arc slot, the front and back ends of the placing disc are symmetrically provided with a straight slot, the end parts of the two straight slots are on the same axis as the end parts of the two second arc slots, the bottom ends of the two transmission rods are respectively connected to the two second arc slots, and the top ends of the two transmission rods are respectively connected to the top end of the placing disc and the bottom end of the two baffle plates.

[0017] As a preferred scheme of the simple assembly mechanism for a single crystal furnace, the opposite surfaces of the two baffle plates are respectively provided with a ball, and the ball is partially connected to the inner part of the baffle plate and partially connected to the outer part of the baffle plate.

[0018] The beneficial effects of the present application are as follows:

[0019] 1. The up and down movement of the threaded rod is realized by the driving of the stepper motor, thereby driving the lifting frame and the single crystal furnace to vertically lift. Meanwhile, the cooperation of the servo motor, the driving bevel gear and the driven bevel gear of the rotating mechanism drives the rotating shaft to drive the single crystal furnace to stably rotate in the horizontal direction. The coordinated function of lifting and rotating significantly improves the operation convenience and flexibility of the single crystal furnace in the process of maintenance and maintenance.

[0020] 2. The four sets of buffer assemblies are arranged to effectively absorb the impact force generated by the downward pressure of the single crystal furnace, thereby achieving the effect of buffering and shock absorption, and protecting the placing disc and the associated mechanical structure from damage or structural instability caused by sudden stress. The design of the buffer assembly improves the operation reliability and service life of the whole device.

[0021] 3. During the downward movement of the placing disc, the protection cylinder and the push rod move vertically downward, the sleeve and the fan-shaped plate are driven to rotate by the push rod, and the two baffle plates are further driven to move horizontally towards the center by the transmission rod, thereby realizing the automatic clamping of the single crystal furnace. During the clamping process, the inner side of the baffle plate is provided with a ball, which can stably clamp the single crystal furnace and allow it to rotate freely, ensuring that the lifting and rotating functions do not interfere with each other. This design effectively prevents the single crystal furnace from falling or shaking during movement, ensuring the operation safety and the overall stability of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0022] To more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort. Among them:

[0023] Figure 1 It is a three-dimensional front view of the overall structure of the present invention;

[0024] Figure 2 It is a three-dimensional side sectional view of the connection between the lifting block and the threaded rod of the present invention;

[0025] Figure 3 This is an enlarged perspective view of the connection between the rotating mechanism and the lifting frame of the present invention;

[0026] Figure 4 This is a first perspective view of the connection between the rotating mechanism, the clamping mechanism and the lifting frame of the present invention;

[0027] Figure 5 A second perspective view of the connection between the rotating mechanism, the clamping mechanism and the lifting frame of the present invention;

[0028] Figure 6 A bottom view of the connection between the clamping mechanism and the placement tray of the present invention;

[0029] Figure 7 For the present invention Figure 6 A schematic diagram of the structure at center A;

[0030] Figure 8 It is a side sectional view of the connection between the rotating mechanism, the clamping mechanism and the lifting frame of the present invention;

[0031] Figure 9 For the present invention Figure 9 A magnified schematic diagram of the structure at B in the middle;

[0032] Figure 10 A top sectional view of the protective tube of the present invention;

[0033] Figure 11 It is a bottom sectional view of the protective tube of the present invention.

[0034] The figure labels: 100, lifting mechanism; 101, mounting column; 101a, sliding groove; 102, stepping motor; 103, driving spur gear; 104, driven spur gear; 105, threaded rod; 106, lifting block; 107, lifting frame; 107a, support plate; 107b, connecting plate; 108, roller; 200, rotating mechanism; 201, buffer assembly; 201a, fixed block; 201b, limiting rod; 201c, buffer spring; 202, placing disc; 202a, straight slot; 203, protective cylinder; 204, connecting rod; 205, mounting plate; 206, servo motor; 207, driving bevel gear; 208, driven bevel gear; 209, rotating shaft; 210, bearing; 211, pushing rod; 300, clamping mechanism; 301, fixed disc; 302, sleeve; 302a, first arc slot; 303, sector plate; 303a, second arc slot; 304, transmission rod; 305, baffle; 306, ball. DETAILED DESCRIPTION

[0035] In order to make the above objectives, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0036] In the following description, a large number of specific details are set forth in order to facilitate a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0037] Secondly, the "one embodiment" or "embodiment" referred to herein means that the specific features, structures or characteristics can be included in at least one implementation of the present application. "In one embodiment" appearing in different places in the specification does not mean the same embodiment, nor is it an embodiment that is independent of or mutually exclusive with other embodiments.

[0038] Embodiment 1

[0039] Reference Figures 1-3 For the first embodiment of the present application, the embodiment provides a simple assembly mechanism for a single crystal furnace, comprising a lifting mechanism 100 and a rotating mechanism 200, wherein the lifting mechanism 100 is used to adjust the height of the single crystal furnace, and through the vertical lifting function, the operation requirements under different working conditions are met, the installation, maintenance and maintenance of the single crystal furnace are facilitated, and the stability and safety of the lifting process are ensured; the rotating mechanism 200 is used to adjust the direction of the single crystal furnace, and through the rotating function, multi-angle operation and precise positioning are realized, the operation flexibility and convenience of the single crystal furnace are improved, and through the structural design, the stability of the rotating process is effectively enhanced, and the shaking or deviation of the equipment during operation is avoided.

[0040] Specifically, the lifting mechanism 100 includes a mounting column 101 as a fixed support component of the entire lifting mechanism 100, providing a stable foundation for the installation of the remaining structure, the top end of the mounting column 101 is fixedly installed with a stepping motor 102, which serves as a power source, and its output end is connected with a driving spur gear 103 through a shaft coupling, the shaft coupling functions to realize stable transmission of power and to absorb the axial deviation that may be caused by installation errors, the front side of the driving spur gear 103 is meshingly connected with a driven spur gear 104, which realizes the stability and accuracy of power output through gear transmission, the bottom end of the driven spur gear 104 is fixedly connected with a threaded rod 105, which is threadedly connected with the surface of a lifting block 106, realizing the conversion of rotary motion into linear motion, thereby driving the lifting block 106 to move up and down along the mounting column 101, the front end of the lifting block 106 is fixedly connected with a lifting frame 107, which functions to drive a rotating mechanism 200 and a single crystal furnace to move up and down with the lifting block 106, thereby realizing height adjustment, the rotating mechanism 200 is fixedly installed at the front end of the lifting frame 107, serving as a bearing and connecting component of the single crystal furnace, providing support and power transmission for the rotation of the single crystal furnace, enabling the single crystal furnace to realize accurate adjustment of direction while being adjusted in height, further improving the flexibility and convenience of operation.

[0041] Further, the rotating mechanism 200 includes a buffer assembly 201 fixedly installed outside the lifting frame 107, which functions to provide support for the rotating mechanism 200 and to absorb vibration and gravity impact during the operation of the single crystal furnace, ensuring the stability of a placement disc 202, the buffer assembly 201 is provided with four groups, the top end of each group is fixedly connected with the placement disc 202, which serves as a support platform of the single crystal furnace, the center of the bottom end of the placement disc 202 is fixedly connected with a protective cylinder 203, which is used to protect a rotating shaft 209 and to provide structural support and guiding function for the rotation of the rotating shaft 209, at the bottom end of the placement disc 202, four connecting rods 204 are distributed in a circular array around the outer side of the protective cylinder 203, the connecting rods 204 connect the placement disc 202 with a mounting plate 205, ensuring the stability of the placement disc 202 and the support effect of the mounting plate, the rear side of the mounting plate 205 is fixedly installed with a servo motor 206, which serves as a power source of the rotating mechanism 200, and its output end is connected with a driving bevel gear 207 through a shaft coupling, the shaft coupling stably transmits the power of the servo motor to the driving bevel gear, while buffering the deviation that may be caused during rotation, the front side of the driving bevel gear 207 is meshingly connected with a driven bevel gear 208, the top end of the driven bevel gear 208 is fixedly connected with the rotating shaft 209, the top end of the rotating shaft 209 penetrates through the mounting plate 205 and the protective cylinder 203 and extends to the top end of the placement disc 202, and is rotatably connected with the placement disc 202, the rotating shaft 209 is only used to drive the single crystal furnace to rotate, while the placement disc 202 remains stationary, as Figure 3As shown, one side of the rotating shaft 209 is provided with a square notch, and the bottom of the single crystal furnace is provided with a plug-in structure corresponding to the rotating shaft 209. The stable connection of the single crystal furnace and the rotating shaft 209 is realized through plug-in, so as to ensure that the single crystal furnace remains firm during rotation and meets the stability and reliability of operation.

[0042] Further, the lifting block 106 is provided with two, which are arranged on the left and right sides of the mounting column 101, and is the core moving part of the lifting mechanism 100. The lifting block 106 realizes lifting movement through threaded connection with the threaded rod 105. The left and right sides of the two lifting blocks 106 are rotatably connected with the rollers 108. The rollers 108 are slidingly connected in the sliding grooves 101a formed in the inner side walls of the left and right ends of the mounting column 101. The sliding grooves 101a provide the rollers 108 with guiding and limiting functions, so as to ensure that the lifting block 106 remains stable and does not deviate during vertical movement. Through the cooperation of the rollers 108 and the sliding grooves 101a, the stability and accuracy of the lifting movement are improved, and the operation accuracy of the rotating mechanism 200 and the single crystal furnace is avoided due to lateral shaking.

[0043] It should be noted that the lifting frame 107 includes the support plates 107a fixedly installed on the left and right sides of the front ends of the two lifting blocks 106. The support plates 107a are the main bearing structure of the lifting frame 107, and are responsible for supporting and fixing the rotating mechanism 200 and the single crystal furnace. The front ends of the two support plates 107a are fixedly connected through the connecting plate 107b, which ensures the rigidity and stability of the overall structure of the lifting frame 107. The support plates 107a are provided in a hollow state at the center of the lifting frame 107, thereby providing space for the downward movement of some components (such as the protective cylinder 203 and the connecting rod 204) in the rotating mechanism 200, avoiding the blocking of the overall structure of the lifting frame 107 during movement. The protective cylinder 203 and the four connecting rods 204 are fixed between the support plates 107a and are linked with the mounting plate 205 and the placement disc 202 to form a complete rotating support system. The linkage design of the support plates 107a and the lifting blocks 106 enables the entire lifting frame 107 to move up and down synchronously with the lifting blocks 106, thereby realizing flexible adjustment of the height of the single crystal furnace while maintaining the normal operation of the rotating mechanism 200. Such design not only improves the functionality of the overall device, but also ensures the coordinated operation and efficiency improvement between modules.

[0044] Further, the four buffer assemblies 201 respectively include fixed blocks 201a fixedly installed at the left and right ends outside the two support plates 107a, the fixed blocks 201a serving as base support components of the buffer assemblies 201, responsible for firmly fixing the structures of the buffer assemblies 201 outside the support plates of the lifting frame 107, and providing a stable installation base for the entire buffer system. The top ends of the four fixed blocks 201a are telescopically connected with limiting rods 201b, the limiting rods 201b, through the telescopic structure thereof, jointly acting with the buffer springs 201c, play a role of guiding and limiting the movement range of the buffer assemblies 201, ensuring the up-and-down movement of the placement disc 202 to be stable and orderly, the outer surfaces of the four limiting rods 201b are all sleeved with the buffer springs 201c, the main function of the buffer springs 201c is to absorb the gravity impact force of the single crystal furnace during the placement process, providing effective shock absorption and buffering effect for the placement disc 202, protecting the placement disc 202 and other components of the rotating mechanism 200 from being damaged by excessive impact force, the bottom ends of the four buffer springs 201c are respectively fixedly connected with the upper surfaces of the four fixed blocks 201a, forming a stable support base, and at the same time ensuring that the compression and recovery actions of the buffer springs 201c can be accurately transmitted to the limiting rods 201b and the placement disc 202. The bottom end of the placement disc 202 is fixedly connected with the top ends of the four limiting rods 201b and the buffer springs 201c, serving as a direct bearing platform of the single crystal furnace in the rotating mechanism 200, the placement disc 202 effectively reduces the vibration and impact caused by the gravity of the single crystal furnace through the linkage of the buffer assemblies 201, improving the overall operation stability of the device, in addition, the buffer assemblies 201, through the cooperation of the fixed blocks 201a, the limiting rods 201b and the buffer springs 201c, ensure that the placement disc 202 can float up and down to adapt to the gravity change of the single crystal furnace, and at the same time provide reliable support for the rotating operation, ensuring the safety and stability of the single crystal furnace during operation.

[0045] Preferably, the rotating shaft 209 is rotatably connected at the center inside the protective cylinder 203 and the placement disc 202 through a bearing 210, the bearing 210 serves to provide low-friction rotating support for the rotating shaft 209, ensuring that the rotating shaft 209 operates stably and efficiently during rotation. Through the arrangement of the bearing 210, the direct friction between the rotating shaft 209 and the protective cylinder 203 and the placement disc 202 can be effectively reduced, the wear caused by long-time rotation is reduced, and the service life of the rotating shaft and related components is prolonged.

[0046] The embodiment realizes the height adjustment, direction adjustment and damping function of the single crystal furnace through the cooperation of the lifting mechanism 100, the rotating mechanism 200 and the buffer assembly 201. The lifting function is driven by the stepping motor 102 to rotate the driving spur gear 103, and the power is transmitted to the threaded rod 105 through the meshing driven spur gear 104, and the rotation of the threaded rod 105 is converted into the linear motion of the lifting block 106 through the thread pair cooperation with the lifting block 106. The lifting block 106 moves up and down along the mounting column 101, the rollers 108 on its two sides are embedded in the sliding groove 101a to provide guidance, ensure smooth movement and no deviation, and at the same time drive the lifting frame 107 fixed on the front end of the lifting block 106 and the single crystal furnace to synchronize lifting. The rotating function is powered by the servo motor 206, which transmits the rotation to the driving bevel gear 207 through the shaft coupling, and drives the driven bevel gear 208 to rotate through the meshing, and further drives the rotating shaft 209 fixed on the top to rotate. The rotating shaft 209 directly drives the single crystal furnace to realize direction adjustment through the plug-in structure, while the placing disc 202 remains stationary to ensure that other components are not disturbed during rotation. The damping function is realized by the buffer assembly 201, the gravity of the single crystal furnace makes the placing disc 202 and the buffer assembly 201 move downward, and the extension and retraction of the limiting rod 201b absorbs the impact force by the buffer spring 201c, protecting the placing disc 202 and the rotating mechanism 200 from excessive impact, and improving the stability and safety of the overall operation. Through the above design, the components are precisely linked to realize the high flexibility, stability and reliability of the single crystal furnace operation.

[0047] Embodiment 2

[0048] With reference to Figures 4-11 The second embodiment of the present application adds a clamping mechanism 300 on the basis of the first embodiment to realize automatic clamping and stabilization of the single crystal furnace.

[0049] Specifically, the clamping mechanism 300 comprises a fixed disc 301 fixedly installed at the top end of the lifting frame 107, the fixed disc 301 is sleeved outside the protective cylinder 203 and serves as a limiting support, providing a stable basis and guidance for the movement of the sleeve 302 and the sector plate 303, the top end of the fixed disc 301 is rotationally connected with the sleeve 302, the sleeve 302 can realize the rotation function at the top end of the fixed disc 301, and the rotation of the sleeve 302 is driven by the overall linkage of the clamping mechanism 300, so as to drive the two symmetrical sector plates 303 installed at the top end of the sleeve 302 to rotate synchronously, the rotation of the sector plate 303 is the key to the action of the clamping mechanism 300, the top end of the two sector plates 303 is respectively transmissionally connected with the two baffle plates 305 through the transmission rod 304, the rotational movement of the sector plate 303 is converted into horizontal linear movement through the transmission rod 304, the transmission rod 304 is relatively horizontally moved, and the horizontal movement of the transmission rod 304 further drives the two baffle plates 305 to slide on the front and back sides of the top end of the placing disc 202, the baffle plates 305 gradually approach in the sliding process, and the single crystal furnace placed on the placing disc 202 is clamped and limited through the relative sliding.

[0050] More specifically, the front and back ends of the outer wall of the protective cylinder 203 are symmetrically provided with the toggle levers 211, and the front and back sides of the sleeve 302 are symmetrically provided with the first arc grooves 302a matched with the two toggle levers 211, and the outer ends of the two toggle levers 211 are respectively slidably connected to the top ends of the two first arc grooves 302a. When the single crystal furnace is placed on the placing disc 202, the placing disc 202 is compressed downward by the buffer spring 201c due to the gravity of the single crystal furnace, and the placing disc 202 moves downward, driving the protective cylinder 203 to move vertically downward. The downward movement of the protective cylinder 203 further drives the toggle levers 211 to move vertically downward, and the outer ends of the two toggle levers 211 are slidably connected to the first arc grooves 302a. Since the groove wall of the first arc groove 302a is arc-shaped, when the toggle lever 211 moves vertically downward, the outer end thereof is horizontally offset under the guidance of the first arc groove 302a, forming a certain rotational torque, so as to drive the sleeve 302 to rotate around the connecting point.

[0051] Further, the inner part of the two fan-shaped plates 303 is provided with second arc grooves 303a, the front and back ends of the placement disc 202 are symmetrically provided with straight grooves 202a, and the ends of the two straight grooves 202a and the ends of the two second arc grooves 303a are on the same axis, the bottom ends of the two transmission rods 304 are respectively slidingly connected in the two second arc grooves 303a, the top ends of the two transmission rods 304 extend through the straight grooves 202a and extend to the top end of the placement disc 202, and the bottom ends of the two baffle plates 305 are fixedly connected. When the sleeve 302 rotates, the two fan-shaped plates 303 are driven to rotate synchronously, the second arc grooves 303a in the inner part of the fan-shaped plate 303 move by guiding the slidingly connected transmission rod 304, and the rotating motion of the fan-shaped plate is converted into the movement of the transmission rod 304. Due to the arc design of the second arc groove 303a, the bottom end of the transmission rod 304 approaches the center of the fan-shaped plate 303, however, due to the fact that the top end of the transmission rod 304 is limited in the straight groove 202a, the movement track of the transmission rod 304 is limited to straight line movement rather than arc movement, therefore, the transmission rod 304 completes straight line movement under the guidance of the straight groove 202a, thereby driving the two baffle plates 305 to approach each other, and the single crystal furnace is clamped and fixed.

[0052] In this process, the fan-shaped plate 303 serves as a motion transmission component of the sleeve 302, provides a movement path for the transmission rod 304 through the second arc groove 303a, converts the rotating motion into straight line motion, the straight groove 202a limits the movement track of the transmission rod 304, and ensures the stability and accuracy of the movement direction, and the transmission rod 304 serves as a key transmission component and finally drives the baffle plate 305 to complete the clamping action. This design effectively utilizes the linkage characteristics of the arc groove and the straight groove 202a, realizes efficient conversion from rotating motion to straight line motion, guarantees the stability and reliability of the clamping process, and improves the accuracy and practicality of the device operation.

[0053] Preferably, the opposite surfaces of the two baffle plates 305 are provided with rolling balls 306, part of the rolling balls 306 are rollingly connected in the inner part of the baffle plate 305, and part of the rolling balls 306 are provided outside the baffle plate 305. The rolling balls 306 provide a flexible contact surface for clamping the single crystal furnace, avoid damage to the surface of the single crystal furnace due to excessive friction during clamping, reduce the contact resistance between the baffle plate 305 and the single crystal furnace, and enable the single crystal furnace to maintain smooth movement during rotation without being affected by the clamping force. The rolling design of the rolling balls 306 also ensures the stability of the clamping action, and even under high clamping pressure, the flexibility of the rolling balls 306 can alleviate the concentration of local stress, thereby improving the reliability and service life of the device.

[0054] The clamping function of the embodiment is achieved by gravity driving and mechanical linkage. When the single crystal furnace is placed on the placing disc 202, the placing disc 202 compresses the buffer spring 201c and drives the protective cylinder 203 to move downward due to the gravity, further driving the toggle lever 211 to move vertically downward. The outer end of the toggle lever 211 is slidingly connected in the first arc slot 302a of the sleeve 302, and under the guidance of the arc slot, the downward movement of the toggle lever 211 is converted into the rotation of the sleeve 302. The rotation of the sleeve 302 simultaneously drives the two sector plates 303 to rotate synchronously. The second arc slot 303a in the sector plate 303 guides the slidingly connected transmission rod 304 to move inward, and the top end of the transmission rod 304 is limited by the straight slot 202a, so that the movement trajectory is limited to straight line movement, thereby driving the two baffle plates 305 to move close to each other, completing the clamping and fixing of the single crystal furnace. In addition, the rolling balls 306 arranged inside the baffle plate 305 provide a flexible contact surface during clamping, which not only protects the surface of the single crystal furnace from damage, but also ensures that the single crystal furnace can maintain smooth movement when rotating, finally realizing the safe and reliable limiting and clamping function.

[0055] Importantly, it should be noted that the constructions and arrangements of the present application shown in the various exemplary embodiments are merely illustrative. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters (e.g., temperatures, pressures, etc.), mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the novel teachings and advantages of the subject matter described in this application. For example, elements shown as integrally formed can be constructed of multiple parts or elements, the position of elements can be reversed or otherwise varied, and the nature or number of discrete elements or positions can be altered or varied. Accordingly, all such modifications are intended to be included within the scope of the application. The order or sequence of any process or method steps can be changed or re-sequenced without departing from the generality of the application. In the claims, any "means plus function" clause is intended to cover the structures described herein as performing the recited functionality, and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes, and omissions can be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the application. Accordingly, the present application is not limited to particular embodiments, but extends to various modifications that nevertheless fall within the scope of the appended claims.

[0056] Furthermore, in an effort to provide a concise description of exemplary embodiments, all features of an actual implementation can not be described (i.e., those unrelated to the best mode of practicing the application currently being considered, or those unrelated to enabling the application).

[0057] It is to be understood that the development of the particular implementations described herein was motivated by the desire to solve real-world problems, and as such the claimed implementations can be susceptible to further implementation known to those of ordinary skill in the art. It is the intent of the claims that covers all such variations and modifications, many of which can be specific to a given integrated circuit chip design. The disclosure herein of any particular implementation described herein is purely illustrative, and does not limit the scope of the claims that cover all implementations consistent with the claims.

[0058] It should be noted that the above examples are only used to illustrate the technical solutions of the present application but not limit the present application. Although the present application is described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced equivalently without departing from the spirit and scope of the technical solutions of the present application, and all of them should be covered in the scope of the claims of the present application.

Claims

1. A simple assembly mechanism for a single crystal furnace, characterized by: The utility model relates to a kind of automatic feeding device for automatic feeding of multiple products, including, Lifting mechanism, including mounting column, the top end of the mounting column is fixedly installed with step motor, the output end of the step motor is connected with driving spur gear by shaft coupling, the front side of the driving spur gear is engaged with driven spur gear, the bottom end of the driven spur gear is fixedly connected with threaded rod, the surface of the threaded rod is connected with lifting block, the front end of the lifting block is fixedly connected with lifting frame; Rotary mechanism, including fixedly installed in the outer side of the lifting frame buffer assembly, the buffer assembly is provided with four groups, four groups The top end of the buffer assembly is fixedly connected with placing disc, the bottom end of the placing disc is fixedly connected with protective cylinder in the center, the bottom end of the placing disc, and four connection rods are distributed in the circumferential array around the outer side of the protective cylinder, the bottom end of four The installation plate is fixedly installed with servo motor on the rear side of the installation plate, the output end of the servo motor is connected with driving bevel gear by shaft coupling, the front side of the driving bevel gear is engaged with driven bevel gear, the top end of the driven bevel gear is fixedly connected with rotating shaft, the rotating shaft is fixedly connected with the rotating shaft The top end of the installation plate and protective cylinder and extends to the top end of the placing disc;And, Clamping mechanism, including fixedly installed in the top end of the lifting frame fixing disc, and the fixing disc is sleeved on the outer side of the protective cylinder, the top end of the fixing disc is rotatably connected with sleeve, the top end of the sleeve is symmetrically installed with sector plate on the left and right sides, the top end of two The sector plate is connected with baffle through transmission rod, and two The baffle is slidably connected on the front and rear sides of the top end of the placing disc; The front and rear ends of the outer wall of the protective cylinder are symmetrically installed with the knob, and the front and rear sides of the sleeve are symmetrically provided with the first arc slot matched with two The knob is slidably connected at the top end of two The first arc slot; Two The sector plate is provided with second arc slot in the same direction, the front and rear ends of the placing disc are symmetrically provided with straight slot, and the end of two The straight slot is on the same axis with the end of two The second arc slot, the bottom end of two The transmission rod is slidably connected in two The second arc slot, and the top end of two The transmission rod extends to the top end of the placing disc and the bottom end of two The baffle is fixedly connected.

2. The simple assembling mechanism for a single crystal furnace according to claim 1, wherein: Two The lifting block is provided, and the left and right sides of two The lifting block is rotatably connected with the roller, the inner wall of the left and right ends of the mounting column is provided with sliding slot, and two The roller is slidably connected in two The sliding slot.

3. The simple assembling mechanism for a single crystal furnace according to claim 2, wherein: The lifting frame includes support plate fixedly installed on the left and right sides of the front end of two The lifting block, the front end of two The support plate is fixedly connected through connecting plate, the protective cylinder and four The connection rod is arranged between two The support plate.

4. The simple assembling mechanism for a single crystal furnace according to claim 3, wherein: Four groups of the buffer assembly respectively include fixed blocks fixedly installed at left and right ends outside the two support plates, top ends of the four fixed blocks are telescopically connected with limiting rods, outer surfaces of the four limiting rods are all sleeved with buffer springs, bottom ends of the four buffer springs are fixedly connected with upper surfaces of the four fixed blocks, and the bottom end of the placing disc is fixedly connected with top ends of the four limiting rods and buffer springs.

5. The simple assembling mechanism for a single crystal furnace according to claim 4, wherein: The rotating shaft is rotatably connected at the center inside the protective cylinder and the placing disc through a bearing.

6. The simple assembling mechanism for a single crystal furnace according to claim 5, wherein: Opposite surfaces of the two baffles are all provided with balls, and the balls are partially rotatably connected inside the baffles and partially arranged outside the baffles.

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