Narrow distribution copolymer as well as preparation method and application thereof

Abstract

The invention relates to a narrow-distribution copolymer as well as a preparation method and application thereof. The narrow-distribution copolymer has a structure as shown in a formula (I): # imgabs0 #, in the formula (I), M is an integer greater than 1, N is an integer greater than 1, and the molecular weight distribution of the narrow-distribution copolymer is 1.0-1.20. The preparation method comprises the following step: under the action of a catalyst, carrying out grafting reaction on poly (4-hydroxystyrene) and a monomer in an organic solvent to obtain the narrow-distribution copolymer. The narrow-distribution copolymer disclosed by the invention has the advantages of high dissolution contrast ratio and relatively high activation energy (High Ea, commonly known as high-temperature glue) of narrow-distribution resin; according to the preparation method, grafting modification experiment conditions are easy to realize, reaction conditions are mild, the production period is short, and industrial production is facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of polymer synthetic materials, and in particular to a narrow distribution copolymer and a preparation method and application thereof. Background Art

[0002] Currently, narrow distribution poly (4-hydroxystyrene) resin (PHS resin) has a smaller molecular weight distribution index (1.0 < PDI < 1.2), which means that its molecular weight is more consistent. This consistency of molecular weight distribution is conducive to improving the dissolution contrast of photoresist during the development process, thereby improving the resolution of photoresist.

[0003] Narrow distribution poly 4-hydroxystyrene resin is mostly used in the production of high-resolution KrF photoresists. This resin can provide more consistent performance and higher accuracy, making it the preferred material in specific photoresist applications. However, 4-hydroxystyrene resin has a low activation energy (Low Ea, commonly known as low-temperature glue) when used as the main resin of photoresist. In addition, low-temperature glue has the disadvantages of short shelf life, more sublimates during exposure, and weak etching resistance.

[0004] Therefore, under the premise of ensuring high solubility contrast of poly (4-hydroxystyrene) resin, finding a narrow distribution polymer that can improve the activation energy when using 4-hydroxystyrene resin as the main resin of photoresist becomes an urgent problem to be solved. Summary of the invention

[0005] In order to solve at least one of the above technical problems, the present invention provides a narrow distribution copolymer and a preparation method and application thereof.

[0006] As one aspect, the present invention provides a narrow distribution copolymer having a structure shown in formula (I):

[0007]

[0008] In formula (I), M is an integer greater than 1, and N is an integer greater than 1; the molecular weight distribution of the narrow distribution copolymer is 1.0 to 1.20.

[0009] In some embodiments of the present invention, the molecular weight of the narrow distribution copolymer is in the range of 2,000 to 25,000.

[0010] In some embodiments of the present invention, in the narrow distribution copolymer, 50%≤M / (M+N)≤90%, 10%≤N / (M+N)≤50%.

[0011] As another aspect, the present invention provides a method for preparing the above-mentioned narrow distribution copolymer, the preparation method comprising: under the action of a catalyst, poly-4-hydroxystyrene and a monomer are subjected to a grafting reaction in an organic solvent to obtain a narrow distribution copolymer; wherein the monomer comprises at least one of tert-butyl chloromethyl ether, tert-butyl trichloroacetimidate, tert-butyl potassium trifluoroborate, tert-butyl ammonium chloride, tert-butyl chloromethyl succinate, and tert-butyl trichlorosilane; and the molecular weight distribution of the poly-4-hydroxystyrene is 1.0 to 1.20.

[0012] In some embodiments of the present invention, the molar amount of the monomer is 10% to 50% of the molar amount of the 4-hydroxystyrene unit in the poly-4-hydroxystyrene; and / or the molecular weight of the poly-4-hydroxystyrene is in the range of 2,000 to 50,000.

[0013] In some embodiments of the present invention, the catalyst includes at least one of bis(trifluoromethylsulfonyl)imide, 1-methyl-1-propylpiperidinium bis(trifluoromethylsulfonyl)imide salt, N-methylbis(trifluoromethylsulfonyl)imide, pyridine, and 2,6-lutidine.

[0014] In some embodiments of the present invention, the molar amount of the catalyst is 0.1% to 10% of the molar amount of the monomer.

[0015] In some embodiments of the present invention, the organic solvent includes at least one of dimethyl sulfoxide, cyclohexanone, nitrobenzene, dioxane, N-methylpyrrolidone, and N,N-dimethylformamide.

[0016] In some embodiments of the present invention, the reaction temperature is 10° C. to 50° C.; and / or the reaction time is 1 h to 24 h; and / or the reaction stirring speed is 150 rpm to 300 rpm.

[0017] As yet another aspect, the present invention provides a use of the above narrow distribution copolymer or the narrow distribution copolymer obtained by the above preparation method in the preparation of photoresists, adsorbents, and chemical additives.

[0018] The technical solution provided by the embodiment of the present invention has the following advantages:

[0019] The preparation method of the narrow distribution copolymer of the embodiment of the present invention is to prepare the narrow distribution copolymer by a graft modification method. Specifically, the narrow distribution poly 4-hydroxystyrene resin is modified by a grafting process to obtain a narrow distribution resin composed of two structural units, 4-hydroxystyrene and 4-tert-butoxystyrene. By modifying some hydroxyl groups in the poly 4-hydroxystyrene resin into tert-butyl groups, a narrow distribution copolymer with a higher activation energy (High Ea, commonly known as high temperature glue) is obtained. The copolymer has the advantages of high solubility contrast of narrow distribution resin, and has the advantages of long shelf life, high development contrast, less sublimation during exposure, and good anti-etching performance of high temperature glue resin.

[0020] In addition, the grafting modification method of the embodiment of the present invention can quantitatively and accurately modify the hydroxyl group to the tert-butoxy group; at the same time, the grafting modification experimental conditions are easy to implement, the reaction conditions are mild, the production cycle is short, and it is conducive to industrial production. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 C is the narrow distribution copolymer prepared in Example 1 of the present invention 13 NMR spectra;

[0024] Figure 2 The GPC spectrum of the narrow distribution copolymer prepared in Example 1 of the present invention;

[0025] Figure 3 C is the narrow distribution copolymer prepared in Example 2 of the present invention 13 NMR spectra;

[0026] Figure 4 C is the narrow distribution copolymer prepared in Example 3 of the present invention 13 NMR spectra;

[0027] Figure 5 C is the narrow distribution copolymer prepared in Example 4 of the present invention 13 NMR spectra;

[0028] Figure 6 C is the narrow distribution copolymer prepared in Example 5 of the present invention 13 NMR spectra;

[0029] Figure 7 C is the narrow distribution copolymer prepared in Example 6 of the present invention 13 NMR spectra;

[0030] Figure 8 C of the polymer prepared in Comparative Example 1 of the present invention 13 NMR spectra;

[0031] Fig. 9 C of the polymer prepared in Comparative Example 2 of the present invention 13 NMR spectrum. DETAILED DESCRIPTION

[0032] In order to more clearly understand the above-mentioned objectives, features and advantages of the present invention, the scheme of the present invention will be further described below. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0033] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein; it is obvious that the embodiments in the specification are only part of the embodiments of the present invention, rather than all of the embodiments.

[0034] According to an embodiment of the present invention, a narrow distribution copolymer is provided, wherein the narrow distribution copolymer has a structure shown in formula (I):

[0035]

[0036] In formula (I), M is an integer greater than 1, and N is an integer greater than 1; the molecular weight distribution of the narrow distribution copolymer is 1.0 to 1.20.

[0037] According to an embodiment of the present invention, a method for preparing the above-mentioned narrow distribution copolymer is provided, and the preparation method comprises: under the action of a catalyst, poly-4-hydroxystyrene and a monomer are subjected to a grafting reaction in an organic solvent to obtain a narrow distribution copolymer; wherein the monomer comprises at least one of tert-butyl chloromethyl ether, tert-butyl trichloroacetimidate, tert-butyl potassium trifluoroborate, tert-butyl ammonium chloride, tert-butyl chloromethyl succinate, and tert-butyl trichlorosilane; and the molecular weight distribution of the poly-4-hydroxystyrene is 1.0 to 1.20.

[0038] In some embodiments of the present invention, a method for preparing a narrow distribution copolymer comprises the following steps: (1) dissolving narrow distribution poly 4-hydroxystyrene in an organic solvent to obtain a poly 4-hydroxystyrene resin solution; (2) adding a monomer and a catalyst to the poly 4-hydroxystyrene resin solution of step (1) to carry out a grafting reaction to obtain a reaction solution; (3) precipitating, filtering, and vacuum drying the reaction solution obtained in step (2) to obtain a narrow distribution copolymer.

[0039] In some embodiments of the present invention, in step (1), poly (4-hydroxystyrene) is an anionic polymerization product; the GPC molecular weight distribution of poly (4-hydroxystyrene) is 1.0 to 1.20, for example, it can be 1.03, 1.08, 1.11, 1.12, 1.16, 1.18, etc.; the molecular weight range of poly (4-hydroxystyrene) is 2000 to 50000, for example, it can be 4600, 8200, 12000, 18000, 24000, 32000, 46000, 48000, 49000, etc.; the structure of poly (4-hydroxystyrene) is shown in formula (II):

[0040]

[0041] In some embodiments of the present invention, in step (1), the solid content of poly (4-hydroxystyrene) in the poly (4-hydroxystyrene) resin solution is 5% to 50%, for example, 6%, 13%, 19%, 23%, 37%, 42%, 48%, etc.

[0042] In some embodiments of the present invention, in step (1), the organic solvent includes at least one of dimethyl sulfoxide, cyclohexanone, nitrobenzene, dioxane, N-methylpyrrolidone, and N,N-dimethylformamide.

[0043] In some embodiments of the present invention, in step (2), the molar amount of the monomer is 10% to 50% of the molar amount of the 4-hydroxystyrene unit in the poly-4-hydroxystyrene, for example, it can be 13%, 19%, 24%, 29%, 36%, 42%, 46%, 49%, etc.

[0044] In some embodiments of the present invention, in step (2), the monomer includes at least one of tert-butyl chloromethyl ether, tert-butyl trichloroacetimidate, tert-butyl potassium trifluoroborate, tert-butyl ammonium chloride, tert-butyl chloromethyl succinate, and tert-butyl trichlorosilane.

[0045] In some embodiments of the present invention, in step (2), the catalyst includes at least one of bis(trifluoromethylsulfonyl)imide, 1-methyl-1-propylpiperidinium bis(trifluoromethylsulfonyl)imide salt, N-methylbis(trifluoromethylsulfonyl)imide, pyridine, and 2,6-lutidine.

[0046] In some embodiments of the present invention, in step (2), the molar amount of the catalyst is 0.1% to 10% of the molar amount of the monomer, for example, it can be 0.9%, 1.1%, 2.8%, 3.6%, 4.9%, 5.7%, 6.8%, 7.9%, 8.2%, 8.9%, 9.6%, etc.

[0047] In some embodiments of the present invention, in step (2), the reaction temperature of the grafting reaction is 10°C to 50°C, for example, the temperature can be 12°C, 19°C, 23°C, 29°C, 36°C, 39°C, 43°C, 49°C, etc.; the reaction time is 1h to 24h, for example, the time can be 2.8h, 4.3h, 5.7h, 7.4h, 8.3h, 11.8h, 13.7h, 16.2h, 21.4h, 23.6h, etc.; the stirring speed is 150rpm to 300rpm, for example, it can be 168rpm, 183rpm, 201rpm, 236rpm, 253rpm, 263rpm, 274rpm, 284rpm, 293rpm, etc.

[0048] In some embodiments of the present invention, in step (3), the narrow distribution copolymer is a narrow distribution resin composed of two structural units: 4-hydroxystyrene and 4-tert-butoxystyrene.

[0049] In some embodiments of the present invention, in step (3), the GPC molecular weight distribution of the narrow distribution copolymer is 1.0 to 1.20, for example, it can be 1.02, 1.07, 1.09, 1.12, 1.13, 1.16, 1.19, etc.

[0050] In order to further illustrate the effect of the present invention, specific embodiments are used for description below.

[0051] Example 1

[0052] (1) Pretreatment: A 500 mL four-necked reaction flask was pre-dried and continuously introduced with dry N 2 , start stirring.

[0053] (2) 120 g of poly (4-hydroxystyrene) powder (wherein the weight average molecular weight of poly (4-hydroxystyrene) is 17917, the number average molecular weight is 16785, and the molecular weight distribution is 1.07) is dissolved in 360 g of N,N-dimethylformamide to prepare a poly (4-hydroxystyrene) resin solution having a solid content of 25%.

[0054] (3) Add the poly 4-hydroxystyrene resin liquid obtained in step (2) to the reaction bottle pretreated in step (1), add 56.8 g of tert-butyl trichloroacetimidate (theoretical grafting rate of tert-butyl group is 26%), 7.56 g of catalyst bistrifluoromethylsulfonyl imide, and 1.53 g of catalyst 2,6-dimethylaminopyridine; stir well, maintain the reaction temperature at 25° C., maintain the stirring speed at 250 rpm, and the reaction time is 6 hours. After completion, a reaction solution is obtained.

[0055] (4) The reaction solution obtained in step (3) is precipitated with water, filtered, and vacuum dried to obtain a solid powder of a narrow distribution copolymer after quantitative graft modification.

[0056] (5) The solid powder obtained in step (4) is subjected to a carbon nuclear magnetic spectrum test. The test result is as follows: Figure 1 As shown, the actual grafting rate of the prepared narrow distribution copolymer is 27%.

[0057] (6) The solid powder obtained in step (4) was subjected to GPC test. The test results were as follows: Figure 2 shown.

[0058] Example 2

[0059] (1) Pretreatment: Pre-dry a 5L four-necked reaction flask and continuously pass dry N 2 , start stirring.

[0060] (2) 1.2 kg of poly (4-hydroxystyrene) powder (wherein the weight average molecular weight of poly (4-hydroxystyrene) is 17917, the number average molecular weight is 16785, and the molecular weight distribution is 1.07) is dissolved in 3.6 kg of N,N-dimethylformamide to prepare a poly (4-hydroxystyrene) resin liquid having a solid content of 25%.

[0061] (3) Add the poly 4-hydroxystyrene resin liquid obtained in step (2) to the reaction bottle pretreated in step (1), add 568g of tert-butyl trichloroacetimidate (theoretical grafting rate of tert-butyl is 26%), 75.6g of catalyst bistrifluoromethylsulfonyl imide, and 15.3g of catalyst 2,6-dimethylaminopyridine; stir well, maintain the reaction temperature at 25°C, maintain the stirring speed at 250rpm, and the reaction time is 6h. After completion, a reaction solution is obtained.

[0062] (4) The reaction solution obtained in step (3) is precipitated with water, filtered, and vacuum dried to obtain a solid powder of a narrow distribution copolymer after quantitative graft modification.

[0063] (5) The solid powder obtained in step (4) is subjected to a carbon nuclear magnetic spectrum test. The test result is as follows: Figure 3As shown, the actual grafting rate of the prepared narrow distribution copolymer is 25.8%.

[0064] Example 3

[0065] (1) Pretreatment: Pre-dry a 50L borosilicate glass reactor and continuously introduce dry N 2 , start stirring.

[0066] (2) 12 kg of poly (4-hydroxystyrene) powder (wherein the weight average molecular weight of poly (4-hydroxystyrene) is 17917, the number average molecular weight is 16785, and the molecular weight distribution is 1.07) is dissolved in 36 kg of N,N-dimethylformamide to prepare a poly (4-hydroxystyrene) resin liquid having a solid content of 25%.

[0067] (3) Add the poly 4-hydroxystyrene resin liquid obtained in step (2) to the reaction bottle pretreated in step (1), add 5.68 kg of tert-butyl trichloroacetimidate (theoretical grafting rate of tert-butyl is 26%), 7.56 kg of catalyst bistrifluoromethylsulfonyl imide, and 1.53 kg of catalyst 2,6-dimethylaminopyridine; stir well, maintain the reaction temperature at 25°C, maintain the stirring speed at 250 rpm, and the reaction time is 6 hours. After completion, a reaction solution is obtained.

[0068] (4) The reaction solution obtained in step (3) is precipitated with water, filtered, and vacuum dried to obtain a solid powder of a narrow distribution copolymer after quantitative graft modification.

[0069] (5) The solid powder obtained in step (4) is subjected to a carbon nuclear magnetic spectrum test. The test result is as follows: Figure 4 As shown, the actual grafting rate of the prepared narrow distribution copolymer is 25.9%.

[0070] Example 4

[0071] Except for the step (3) of "adding 135.5 g of tert-butyl trichloroacetimidate (the theoretical grafting rate of tert-butyl group is 61%)", the remaining experimental steps are the same as those in Example 1.

[0072] The test results of the nuclear magnetic carbon spectrum test are as follows Figure 5 As shown, the actual grafting rate of the prepared narrow distribution copolymer is 61.7%.

[0073] Example 5

[0074] Except for the step (3) of "maintaining the reaction temperature at 50° C. and the reaction time at 1 h", the remaining experimental steps are the same as those in Example 1.

[0075] The test results of the nuclear magnetic carbon spectrum test are as follows Figure 6The actual grafting rate of the prepared narrow distribution copolymer is 15.2%.

[0076] Example 6

[0077] Except for the step (3) of "maintaining the reaction temperature at 10° C. and the reaction time for 24 h", the remaining experimental steps are the same as those in Example 1.

[0078] The test results of the nuclear magnetic carbon spectrum test are as follows Figure 7 The actual grafting rate of the prepared narrow distribution copolymer is 12%.

[0079] Comparative Example 1

[0080] (1) Pretreatment: A 500 mL four-necked reaction flask was pre-dried and continuously introduced with dry N 2 , start stirring.

[0081] (2) Use a peristaltic pump to add 200 g of dry tetrahydrofuran solvent to the reaction bottle pretreated in step (1), then use a liquid nitrogen / ethanol bath to cool the reaction bottle. When the temperature drops to -40°C, use a syringe to take 0.9 mL of a hexane solution of n-butyl lithium (concentration of 1.3 M) and add it to the reaction bottle. Continue to cool to -78°C, and use a peristaltic pump to start dripping a mixture of two monomers, 4-hydroxystyrene (33.89 g) and 4-tert-butoxystyrene (16.11 g). By controlling the dripping speed, maintain the temperature stable at -70°C to -80°C; after the dripping is completed, continue the reaction for 1 hour, and then add methanol from which oxygen has been removed to terminate the reaction. Then, use methanol precipitation to obtain a solid sample of poly-tert-butoxystyrene.

[0082] (3) The reaction solution obtained in step (2) is precipitated with water, filtered, and dried to obtain a solid powder after quantitative grafting modification.

[0083] (4) The solid powder obtained in step (3) is subjected to a carbon nuclear magnetic spectrum test. The test result is as follows: Figure 8 As shown. Figure 8 From the data, it can be seen that there are no hydroxyl groups in the generated product.

[0084] Comparative Example 2

[0085] Except for "maintaining the reaction temperature at 60° C." in step (3), the remaining experimental steps are the same as those in Example 1.

[0086] The test results of the nuclear magnetic carbon spectrum test are as follows Fig. 9 As shown, the actual grafting rate of the prepared narrow distribution copolymer is 7.5%.

[0087] Data Analysis:

[0088] (1) Based on Figure 1 , Figure 3 to Figure 7 C 13 The chemical shift data in the NMR spectra indicate that Examples 1 to 6 successfully synthesized narrow distribution copolymers consisting of two structural units, 4-hydroxystyrene and 4-tert-butoxystyrene.

[0089] (2) Based on Figure 2 From the GPC spectrum of the narrow distribution copolymer in, it can be obtained that the number average molecular weight of the polymer is 18697, the weight average molecular weight is 20539, and the PDI is 1.09.

[0090] (3) Based on Figure 8 From the data in, we can draw the following conclusion: 4-hydroxystyrene is easily inactivated under alkaline conditions, and the entire process of anionic polymerization is carried out in a strong alkaline environment, so 4-hydroxystyrene does not ultimately participate in the polymerization process.

[0091] (4) Based on Fig. 9 The data in the experiment can lead to the following conclusion: pure narrow distribution copolymer containing two structures of 4-hydroxystyrene and 4-tert-butoxystyrene cannot be prepared under the condition that the reaction temperature is higher than 50°C; the reason is that when the temperature is higher than 50°C, the reaction process is accompanied by the occurrence of side reactions and some by-products are produced, so no pure binary copolymer product can be obtained.

[0092] In summary, the narrow distribution copolymer of the embodiment of the present invention is a binary resin containing two structures of 4-hydroxystyrene and 4-tert-butoxystyrene; it has high solubility contrast, long shelf life and good etching resistance.

[0093] The preparation method of the narrow distribution copolymer of the embodiment of the present invention is a method for grafting and modifying poly-4-hydroxystyrene. The preparation method of poly-4-hydroxystyrene of the embodiment of the present invention can accurately and quantitatively graft tert-butoxy groups onto poly-4-hydroxystyrene to modify it, and the grafting accuracy is ±1% of the target value.

[0094] In addition, the method for preparing the narrow distribution copolymer according to the embodiment of the present invention is not only applicable to the preparation of small batch samples in the laboratory, but can also be extended to the production of mass production-level products, and has industrial operability.

[0095] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0096] The above description is only a specific embodiment of the present invention, so that those skilled in the art can understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments described herein, but should conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A narrow distribution copolymer, characterized in that: The narrow distribution copolymer has a structure shown in formula (I): In formula (I), M is an integer greater than 1, and N is an integer greater than 1; The molecular weight distribution of the narrow distribution copolymer is 1.0-1.

20.

2. The narrow distribution copolymer according to claim 1, characterized in that The molecular weight of the narrow distribution copolymer is in the range of 2,000 to 25,000.

3. The narrow distribution copolymer according to claim 1 or 2, characterized in that In the narrow distribution copolymer, 50%≤M / (M+N)≤90%, and 10%≤N / (M+N)≤50%.

4. A method for preparing a narrow distribution copolymer according to any one of claims 1 to 3, characterized in that: The preparation method comprises: Under the action of a catalyst, poly-4-hydroxystyrene and monomers undergo a grafting reaction in an organic solvent to obtain a narrow distribution copolymer; Wherein, the monomer includes at least one of tert-butyl chloromethyl ether, tert-butyl trichloroacetimidate, tert-butyl potassium trifluoroborate, tert-butyl ammonium chloride, tert-butyl chloromethyl succinate, and tert-butyl trichlorosilane; The molecular weight distribution of the poly 4-hydroxystyrene is 1.0-1.

20.

5. The preparation method according to claim 4, characterized in that: The molar amount of the monomer is 10% to 50% of the molar amount of the 4-hydroxystyrene unit in the poly-4-hydroxystyrene; And / or, the molecular weight of the poly 4-hydroxystyrene is in the range of 2000 to 50000.

6. The preparation method according to claim 4 or 5, characterized in that: The catalyst includes at least one of bis(trifluoromethylsulfonyl)imide, 1-methyl-1-propylpiperidinium bis(trifluoromethylsulfonyl)imide salt, N-methylbis(trifluoromethylsulfonyl)imide, pyridine, and 2,6-lutidine.

7. The preparation method according to any one of claims 4 to 6, characterized in that: The molar amount of the catalyst is 0.1% to 10% of the molar amount of the monomer.

8. The preparation method according to any one of claims 4 to 7, characterized in that: The organic solvent includes at least one of dimethyl sulfoxide, cyclohexanone, nitrobenzene, dioxane, N-methylpyrrolidone and N,N-dimethylformamide.

9. The preparation method according to any one of claims 4 to 8, characterized in that: The reaction temperature is 10°C to 50°C; And / or, the reaction time is 1h to 24h; And / or, the stirring speed of the reaction is 150 rpm to 300 rpm.

10. Use of the narrow distribution copolymer according to any one of claims 1 to 3 or the narrow distribution copolymer obtained by the preparation method according to any one of claims 4 to 9 in the preparation of photoresists, adsorbents and chemical additives.

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