Heat treatment device

Abstract

The invention provides a heat treatment device which can remove foreign matters and can restrain long manufacturing time. A heat treatment apparatus according to an embodiment includes: a treatment unit that performs heat treatment on a workpiece; a collecting part for temporarily accommodating the workpiece subjected to the heat treatment; a first conveying part which is arranged between the processing part and the gathering part and is used for transferring the workpieces; and a dust collecting and cooling unit which is provided in a region between the processing unit and the collecting unit, and which removes foreign matter adhering to the workpiece after the heat processing, and cools the workpiece.

Description

Technical Field

[0001] An embodiment of the present invention relates to a heat treatment apparatus. Background Art

[0002] There is a heat treatment apparatus that heats a workpiece to form a film or the like on the surface of the workpiece or to treat the surface of the workpiece.

[0003] Here, foreign matter such as particles may be attached to the surface of the workpiece after the heat treatment. If foreign matter is attached to the surface of the workpiece, the quality of the film formed on the workpiece or the treated portion may be degraded.

[0004] Generally, foreign matter attached to the workpiece is removed using a liquid cleaning device or the like. However, if a liquid cleaning device or the like is used to remove foreign matter, a handover between the heating treatment device and the liquid cleaning device is required, so the manufacturing time becomes longer. In addition, since a heating treatment device and a liquid cleaning device are required, there is also a problem that the installation space of the equipment becomes larger or the cost of the equipment increases.

[0005] Therefore, it is desired to develop a heat treatment apparatus that can remove foreign matter and suppress an increase in manufacturing time.

[0006] [Prior art literature]

[0007] [Patent Document]

[0008] [Patent Document 1] Japanese Patent Application Publication No. 2019-184229 Summary of the invention

[0009] [Problems to be solved by the invention]

[0010] The problem to be solved by the present invention is to provide a heat treatment device that can remove foreign matter and suppress an increase in manufacturing time.

[0011] [Technical means to solve the problem]

[0012] The heating treatment device of the embodiment includes: a processing part, which performs heat treatment on the workpiece; a collection part, which temporarily stores the workpiece after the heat treatment; a first conveying part, which is arranged between the processing part and the collection part and performs transfer of the workpiece; and a dust collection and cooling part, which is arranged in the area between the processing part and the collection part and performs removal of foreign matter attached to the workpiece after the heat treatment and cooling of the workpiece.

[0013] [Effects of the Invention]

[0014] According to the embodiment of the present invention, a heat treatment apparatus is provided which can remove foreign matter and can suppress an increase in manufacturing time. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic plan view for illustrating the heat treatment apparatus according to the present embodiment.

[0016] Figure 2 yes Figure 1 A schematic side view of the heat treatment apparatus shown.

[0017] Figure 3 Observed from the AA line Figure 1 Schematic diagram of the processing unit in .

[0018] Figure 4 yes Figure 3 A schematic cross-sectional view of the processing portion taken along line BB in FIG.

[0019] Figure 5 Observed from the CC line Figure 2 Schematic diagram of the dust collection and cooling section.

[0020] Figure 6 It is a schematic cross-sectional view for illustrating the dust collecting and cooling section.

[0021] Figure 7 This is a schematic diagram for illustrating a case where the dust collecting and cooling unit is provided in the frame of the collecting unit.

[0022] Figure 8 This is a schematic diagram for illustrating a case where the dust collecting and cooling unit is provided on the opening and closing door of the collecting unit (frame).

[0023] Fig. 9 This is a schematic diagram for illustrating a case where the dust collecting and cooling unit is provided in an opening and closing door of a processing unit (chamber).

[0024] Fig.10 This is a schematic cross-sectional view for illustrating a dust collecting and cooling unit according to another embodiment.

[0025] [Explanation of Symbols]

[0026] 1: Heating treatment device

[0027] 2: Processing Department

[0028] 3: Agglomeration Department

[0029] 4: First transport department

[0030] 4a, 6a: Horizontal multi-joint robot

[0031] 4b, 6b: Mobile part

[0032] 5: Move-in and move-out department

[0033] 5a: Base

[0034] 5b: Shelves

[0035] 6: Second transport department

[0036] 7, 7a: Dust collection and cooling unit

[0037] 8: Controller

[0038] 21: Chamber

[0039] 21a, 31a: Open and close doors

[0040] 21b: Cover

[0041] 21c: Exhaust port

[0042] 22, 33: Exhaust

[0043] 22a, 22b: Exhaust pump

[0044] 22c: Control Department

[0045] 23: Heating unit

[0046] 23a: First heating unit

[0047] 23b: Second heating unit

[0048] 23c: Heater

[0049] 23d: Support part

[0050] 23e: Maintaining

[0051] 24: Cassette bracket

[0052] 24a: Framework

[0053] 24b, 31b: Receiving components

[0054] 24c: Reflector

[0055] 25: Box

[0056] 25g: Cassette support

[0057] 31: Frame

[0058] 31c, 31d: Area

[0059] 31e: Space

[0060] 32, 73b: Filter

[0061] 71: hood

[0062] 71a: Opening

[0063] 71b, 71c: Noodles

[0064] 72: Gas supply unit

[0065] 72a: Nozzle

[0066] 72b: Gas control unit

[0067] 72c: Gas source

[0068] 73: Suction unit

[0069] 73a: Suction nozzle

[0070] 73c: Suction device

[0071] 74: Ultrasonic oscillator

[0072] 75: Electrostatic adsorber

[0073] 76: Magnetic absorber

[0074] 100: Artifacts

[0075] 101: Foreign matter

[0076] G: Air flow

[0077] L: Clearance DETAILED DESCRIPTION

[0078] Hereinafter, the embodiments will be described with reference to the accompanying drawings. In addition, in each of the drawings, the same components are denoted by the same reference numerals and detailed descriptions thereof are appropriately omitted.

[0079] Hereinafter, as an example, a heat treatment device for heating a workpiece in a gas atmosphere decompressed to a pressure lower than the atmospheric pressure to form an organic film on the surface of the workpiece is described. However, the present invention is not limited thereto. For example, the present invention can also be applied to a heat treatment device for heating a workpiece to form an inorganic film on the surface of the workpiece or for treating the surface of the workpiece.

[0080] In addition, the workpiece before the heat treatment may include, for example, a substrate and a solution applied on the surface of the substrate, or may be only the substrate. Hereinafter, as an example, a case where the workpiece before the heat treatment includes a substrate and a solution applied on the surface of the substrate will be described.

[0081] The workpiece 100 before being subjected to heat treatment by the heat treatment device 1 of the present embodiment has a substrate and a solution applied to the surface of the substrate. The substrate is, for example, a glass substrate or a semiconductor wafer. However, the substrate is not limited to the illustrated substrate. The solution, for example, includes an organic material and a solvent. As long as the organic material can be dissolved by a solvent, there is no particular limitation. The solution, for example, can be a varnish containing polyamic acid. However, the solution is not limited to the illustrated solution. In addition, the solution can also be a solution in which the liquid is temporarily calcined and becomes a semi-hardened state (non-flowing state).

[0082] Figure 1 It is a schematic plan view for illustrating the heat treatment apparatus 1 according to the present embodiment.

[0083] Figure 2 yes Figure 1 A schematic side view of the heat treatment device 1 is shown.

[0084] like Figure 1 and Figure 2 As shown, the heat treatment apparatus 1 includes, for example, a treatment unit 2 , an accumulation unit 3 , a first conveying unit 4 , a loading and unloading unit 5 , a second conveying unit 6 , a dust collecting and cooling unit 7 , and a controller 8 .

[0085] The controller 8 includes, for example, a computing unit such as a central processing unit (CPU) and a storage unit such as a memory. The controller 8 is, for example, a computer. The controller 8 controls the operation of each element provided in the heat treatment apparatus 1 based on, for example, a control program stored in the storage unit.

[0086] The processing unit 2 performs a heat treatment on the workpiece 100. The processing unit 2 forms an organic film on the surface of the workpiece 100 by, for example, heating the workpiece 100. Figure 1 Although the case where four processing units 2 are provided is illustrated in the figure, the number of processing units 2 can be changed as appropriate. It is sufficient that at least one processing unit 2 is provided.

[0087] Figure 3 Observed from the AA line Figure 1 This is a schematic diagram of the processing unit 2 in FIG.

[0088] In addition, to avoid complexity, Figure 3 The opening and closing door 21a (corresponding to an example of the second opening and closing door) is omitted in the figure. In addition, only one cassette 25 is shown.

[0089] Figure 4 yes Figure 3 Schematic cross-sectional view of the processing part 2 in the BB line direction.

[0090] like Figure 3 and Figure 4As shown, the processing unit 2 includes, for example, a chamber 21 , an exhaust unit 22 , a heating unit 23 , a cassette support 24 and a cassette 25 .

[0091] The chamber 21 for heat treatment of the workpiece 100 is box-shaped. The chamber 21 has an airtight structure capable of maintaining a gas environment decompressed to a pressure lower than the atmospheric pressure. The appearance shape of the chamber 21 is not particularly limited. The appearance shape of the chamber 21 can be set to a rectangular parallelepiped or a cylinder, for example. The chamber 21 is formed of a metal such as stainless steel.

[0092] The end of the chamber 21 facing the first conveying unit 4 is open. The opening of the chamber 21 is opened / closed by an opening and closing door 21a. For example, the opening and closing door 21a can be set at the opening of the chamber 21 and can be raised and lowered. In addition, the opening and closing door 21a can also be set at the opening of the chamber 21 and can be moved to the side of the chamber 21. When the opening and closing door 21a is opened, the workpiece 100 can be moved into or out of the inside of the cassette 25 via the opening of the chamber 21. When the opening and closing door 21a is closed, the opening of the chamber 21 is locked in an airtight manner by a sealing material such as an O-ring. The opening of the chamber 21 on the side opposite to the opening and closing door 21a is locked by a cover 21b. In addition, a cooling device such as a water jacket can also be provided on the outer wall of the chamber 21.

[0093] The exhaust unit 22 exhausts the interior of the chamber 21. Figure 3 As shown, the exhaust unit 22 includes, for example, an exhaust pump 22a and an exhaust pump 22b.

[0094] The exhaust pump 22a may be an exhaust pump that performs rough exhaust from atmospheric pressure to a predetermined pressure. The exhaust pump 22a may be, for example, a dry vacuum pump.

[0095] The exhaust pump 22b performs exhaust to a lower predetermined pressure after the exhaust pump 22a performs rough exhaust. The exhaust pump 22b has an exhaust capability capable of exhausting to a molecular flow region of high vacuum, for example. For example, the exhaust pump 22b can be a turbomolecular pump (TMP) or the like.

[0096] The exhaust pump 22 a and the exhaust pump 22 b are connected to an exhaust port 21 c provided on the bottom surface of the chamber 21 via a pressure control unit 22 c such as an automatic pressure controller (APC).

[0097] The heating unit 23 includes, for example, a first heating unit 23 a and a second heating unit 23 b . The first heating unit 23 a and the second heating unit 23 b are provided inside the chamber 21 .

[0098] The first heating unit 23 a is disposed above the cassette 25 .

[0099] The second heating portion 23b is provided below the cassette 25. The second heating portion 23b faces the first heating portion 23a.

[0100] As described later, the workpiece 100 is supported inside the cassette 25. Therefore, the first heating unit 23a heats the surface (upper surface) of the workpiece 100 supported inside the cassette 25. The second heating unit 23b heats the back surface (lower surface) of the workpiece 100 supported inside the cassette 25.

[0101] For example, a plurality of cassettes 25 may be arranged in a vertical direction inside the chamber 21. In this case, the second heating unit 23b provided below the upper cassette 25 may be provided as the first heating unit 23a provided above the lower cassette 25. That is, the first heating unit 23a or the second heating unit 23b provided between the cassettes 25 and the cassettes 25 may be used for both.

[0102] The first heating unit 23a and the second heating unit 23b include, for example, a heater 23c, a support portion 23d, and a holding portion 23e.

[0103] At least one heater 23c is provided. For example, one supporting portion 23d is provided for one heater 23c or one supporting portion 23d is provided for a plurality of heaters 23c. For example, one holding portion 23e is provided for one heater 23c or one supporting portion 23e is provided for a plurality of heaters 23c.

[0104] Figure 3 and Figure 4 The first heating section 23a and the second heating section 23b illustrated in the figure each have a plurality of heaters 23c. The plurality of heaters 23c are arranged, for example, in a direction intersecting the central axis of the heater 23c. In this case, the plurality of heaters 23c may be arranged at equal intervals, or the intervals may be changed according to the deviation of the temperature within the surface of the workpiece 100. In addition, the specifications, quantity, intervals, etc. of the heaters 23c arranged in the second heating section 23b may be the same as or different from the specifications, quantity, intervals, etc. of the heaters 23c arranged in the first heating section 23a. The specifications, quantity, intervals, etc. of the heaters 23c may be appropriately changed according to the composition of the solution to be heated (the heating temperature of the solution), the size of the workpiece 100, etc. The specifications, quantity, intervals, etc. of the heaters 23c may be appropriately determined by performing simulations or experiments, etc.

[0105] The heater 23c may be a rod-shaped heater extending in one direction. The heater 23c is not particularly limited as long as it is a rod-shaped heater. The heater 23c may be, for example, a sheathed heater, a ceramic heater, a cartridge heater, etc. The heater 23c may also be, for example, a heater having a quartz cover.

[0106] The cassette holder 24 is provided inside the chamber 21. The cassette holder 24 holds the heater 23c and the cassette 25 at predetermined positions inside the chamber 21.

[0107] The cassette holder 24 has a frame 24 a , a receiving member 24 b , and a reflective plate 24 c .

[0108] The frame 24a is, for example, a skeleton structure formed by using elongated members. The appearance shape of the frame 24a is not particularly limited. The appearance shape of the frame 24a can be, for example, a rectangular parallelepiped or a cylinder.

[0109] At least one pair of receiving members 24b is provided inside the frame 24a. The pair of receiving members 24b is provided, for example, on inner walls of the frame 24a facing each other. The pair of receiving members 24b supports the cassette support portion 25g of the cassette 25 inside the chamber 21. For example, in the vertical direction, the pair of receiving members 24b is provided between the first heating portion 23a and the second heating portion 23b. One cassette 25 is placed on the pair of receiving members 24b. Therefore, a pair of receiving members 24b is provided for each cassette 25.

[0110] The reflecting plate 24c reflects the heat incident from the heater 23c side to the cassette 25 side. If the reflecting plate 24c is provided, it is possible to improve the heat storage property in the internal space (processing space) of the cassette 25. The reflecting plate 24c is plate-shaped and is provided on the outer surface of the frame 24a.

[0111] The cassette 25 is detachably provided on a pair of receiving members 24b of a cassette holder 24 provided inside the chamber 21. In this case, the cassette 25 is detachably provided between the first heating unit 23a and the second heating unit 23b.

[0112] In addition, the cassette 25 may be omitted. When the cassette 25 is omitted, a workpiece support portion (not shown) is provided inside the chamber 21 .

[0113] The cassette 25 is box-shaped and has a processing space inside for supporting the workpiece 100 .

[0114] The cassette 25, for example, comprises: a cassette frame, not shown in the figure, which has a rectangular appearance; a heat spreader, which is arranged to block the other five outer surfaces of the cassette frame except the outer surface facing the opening and closing door 21a; a plurality of workpiece support portions, which support the workpiece 100 in the cassette frame; and a cassette support portion 25g.

[0115] The cassette support portion 25g is provided on each of a pair of mutually facing side surfaces of the cassette 25. The cassette support portion 25g is supported by the receiving member 24b of the cassette holder 24. That is, the cassette 25 is detachably provided inside the chamber 21 (cassette holder 24) through the cassette support portion 25g and the receiving member 24b. If the cassette 25 is detachably provided inside the chamber 21, the maintenance of the cassette 25 can be facilitated.

[0116] The workpiece 100 is carried in or out of the cassette 25 through an opening provided on the outer surface of the cassette frame where no heat spreader is provided.

[0117] The heat spreader can be made of metal such as aluminum, copper, or stainless steel.

[0118] The collection unit 3 temporarily stores the workpiece 100 before and after the heat treatment. In addition, the collection unit 3 may also have a function of cooling the workpiece 100 after the heat treatment. The collection unit 3 is provided at a position away from the processing unit 2, for example.

[0119] Figure 5 Observed from the CC line Figure 2 Schematic diagram of the collection section 3 and the dust collection and cooling section 7.

[0120] like Figure 1 , Figure 2 and Figure 5 As shown, the collecting unit 3 includes, for example, a frame 31 , a filter 32 , and an exhaust unit 33 .

[0121] The frame 31 is box-shaped and temporarily stores the workpiece 100 before and after the heat treatment. The frame 31 has an airtight structure to prevent particles from invading. The appearance shape of the frame 31 is not particularly limited. The appearance shape of the frame 31 can be, for example, a rectangular parallelepiped or a cylinder. The frame 31 is formed of, for example, a metal such as stainless steel.

[0122] The end of the frame 31 facing the first conveying part 4 and the end of the frame 31 facing the second conveying part 6 are open. An opening and closing door 31a (equivalent to an example of the first opening and closing door) is provided at the opening of the frame 31. The opening of the frame 31 is opened / closed by the opening and closing door 31a. For example, the opening and closing door 31a can be set to be able to be raised and lowered. In addition, the opening and closing door 31a can also be set to be able to move to the side of the frame 31. When the opening and closing door 31a is opened, the workpiece 100 can be carried in or out through the opening of the frame 31. When the opening and closing door 31a is closed, the opening of the frame 31 is locked.

[0123] A pair of receiving members 31b are provided inside the frame 31 to support the periphery of the workpiece 100. The pair of receiving members 31b are provided, for example, on the inner wall of the end of the frame 31 that intersects the end where the opening and closing door 31a is provided. A pair of receiving members 31b is provided for each workpiece 100 stored inside the frame 31. For example, a plurality of pairs of the pair of receiving members 31b are arranged in a vertical direction at a predetermined interval.

[0124] Furthermore, a rod-shaped receiving member like the workpiece support provided in the magazine 25 may be provided instead of the receiving member 31 b.

[0125] In the frame 31, as Figure 2 and Figure 5 As shown, the interior of the frame 31 is divided into a region 31c and a region 31d in the vertical direction. For example, a plurality of pairs of receiving members 31b are provided in each of the region 31c and the region 31d.

[0126] For example, the area 31c temporarily stores the workpiece 100 before the heat treatment. The area 31c is provided, for example, to improve the efficiency of the workpiece 100 loading operation in the processing unit 2.

[0127] For example, the area 31d temporarily stores the workpiece 100 after the heat treatment. Here, the temperature of the workpiece 100 after the heat treatment is high, so it is necessary to cool to a predetermined temperature. Therefore, the area 31d is mainly provided to wait until the temperature of the workpiece 100 reaches a predetermined value. For example, in the area 31d, the workpiece 100 is allowed to wait until the temperature of the workpiece 100 removed from the processing unit 2 changes from about 100°C to 70°C to about 40°C to 70°C.

[0128] Generally speaking, the waiting time in the area 31d is longer than the waiting time in the area 31c. Therefore, the number of workpieces 100 stored in the area 31d is greater than the number of workpieces 100 stored in the area 31c. In this case, the number of workpieces 100 stored in the area 31d can be set to be, for example, the same as the number of workpieces 100 processed once in one processing unit 2. The number of workpieces 100 stored in the area 31c and the number of workpieces 100 stored in the area 31d can be appropriately determined by performing experiments or simulations.

[0129] In addition, the workpieces 100 are preferably taken out from the area 31c and the area 31d in sequence starting from the workpieces 100 stored at the bottom. The workpieces 100 are preferably stored in the area 31c and the area 31d in sequence starting from the top. In this way, when taking out the workpieces 100 and storing the workpieces 100, it is possible to suppress foreign matter such as particles from adhering to other workpieces 100 located inside the accumulation part 3.

[0130] The filter 32 and the exhaust portion 33 are provided to cool the workpiece 100 accommodated in the region 31 d .

[0131] The filter 32 is provided, for example, on one of the side walls of the housing 31. The filter 32 is provided, for example, at a position facing the region 31d. The filter 32 is, for example, a high efficiency particulate air filter (High Efficiency Particulate Air Filter, HEPA filter).

[0132] The exhaust part 33 is provided on the other side wall part of the side wall part of the frame body 31. The exhaust part 33 is provided at the position facing the area 31d, for example. The exhaust part 33 is, for example, an air supply device such as a blower.

[0133] If the filter 32 and the exhaust portion 33 are provided, it is possible to form the air flow G inside the region 31d. Therefore, it is possible to shorten the cooling time of the workpiece 100 accommodated inside the region 31d.

[0134] That is, the collecting unit 3 includes the exhaust unit 33 for introducing the external air into the region 31d.

[0135] like Figure 1 and Figure 2As shown, the first conveying unit 4 is arranged between the processing unit 2 and the gathering unit 3. The first conveying unit 4 delivers the workpiece 100 between the processing unit 2 and the gathering unit 3. The first conveying unit 4, for example, has a horizontal multi-joint robot 4a and a moving unit 4b. The horizontal multi-joint robot 4a, for example, is arranged on the moving unit 4b. The horizontal multi-joint robot 4a, for example, has a hand for holding the workpiece 100. In addition, the horizontal multi-joint robot 4a can rotate the hand or move the hand in a horizontal direction. The moving unit 4b moves in a straight line on a track, for example. The moving unit 4b enables the horizontal multi-joint robot 4a to move in a horizontal direction between the processing unit 2 and the gathering unit 3. In addition, the moving unit 4b can also enable the horizontal multi-joint robot 4a to move in a vertical direction.

[0136] For example, the moving unit 4b moves the horizontal multi-joint robot 4a horizontally to a position facing the processing unit 2. In addition, the moving unit 4b moves the horizontal multi-joint robot 4a vertically to a desired position of the cassette 25. The horizontal multi-joint robot 4a moves its hand to carry the workpiece 100 before the heat treatment into the cassette 25 or to carry the workpiece 100 after the heat treatment out of the cassette 25.

[0137] For example, the moving part 4b moves the horizontal multi-joint robot 4a horizontally to a position facing the collecting part 3. In addition, the moving part 4b moves the horizontal multi-joint robot 4a vertically to a desired position of the receiving member 31b. The horizontal multi-joint robot 4a moves the hand to move the workpiece 100 before the heat treatment out of the area 31c inside the frame 31 or move the workpiece 100 after the heat treatment into the area 31d inside the frame 31.

[0138] like Figure 1 and Figure 2 As shown in FIG. 1 , the loading / unloading unit 5 is provided at a position away from the accumulating unit 3. The loading / unloading unit 5 is provided on the side opposite to the processing unit 2 side with respect to the accumulating unit 3.

[0139] The loading and unloading section 5 includes, for example, a base 5 a and a plurality of carriers 5 b .

[0140] A plurality of shelves 5b are arranged on the base 5a. A plurality of grooves for storing the workpieces 100 are provided inside the shelves 5b along the vertical direction. In this case, the shelves 5b for storing the workpieces 100 before the heat treatment can be separated from the shelves 5b for storing the workpieces 100 after the heat treatment. The shelves 5b storing the workpieces 100 before the heat treatment are moved from the previous step to the heat treatment device 1 (the moving-in and moving-out section 5) by a conveying device not shown in the figure. The shelves 5b storing the workpieces 100 after the heat treatment are moved from the heat treatment device 1 (the moving-in and moving-out section 5) to the next step by a conveying device not shown in the figure.

[0141] like Figure 1 and Figure 2 As shown, the second conveying unit 6 is provided between the gathering unit 3 and the loading and unloading unit 5. The second conveying unit 6 delivers the workpiece 100 between the gathering unit 3 and the loading and unloading unit 5. The second conveying unit 6, for example, comprises a horizontal multi-joint robot 6a and a moving unit 6b. For example, the horizontal multi-joint robot 6a can be set to be the same as the horizontal multi-joint robot 4a. The moving unit 6b, for example, can be set to be the same as the moving unit 4b.

[0142] For example, the moving unit 6b moves the horizontal multi-joint robot 6a horizontally to a position facing the desired shelf 5b of the loading and unloading unit 5. In addition, the moving unit 6b moves the horizontal multi-joint robot 6a vertically to the position of the desired slot of the shelf 5b. The horizontal multi-joint robot 6a moves its hand to carry the workpiece 100 after the heat treatment into the shelf 5b or to carry the workpiece 100 before the heat treatment out of the shelf 5b.

[0143] For example, the moving part 6b moves the horizontal multi-joint robot 6a horizontally to a position facing the collecting part 3. In addition, the moving part 6b moves the horizontal multi-joint robot 6a vertically to a desired position of the receiving member 31b. The horizontal multi-joint robot 6a moves its hand to move the workpiece 100 before the heat treatment into the area 31c inside the frame 31 or to move the workpiece 100 after the heat treatment out of the area 31d inside the frame 31.

[0144] Here, when heat treatment is performed in the processing unit 2, foreign matter such as particles located inside the chamber 21 sometimes adheres to the surface of the workpiece 100. In this case, for example, if foreign matter adheres to the surface of the workpiece 100 on which an organic film is formed, there is a risk that the quality of the organic film will be reduced. Therefore, generally speaking, in the later step, the surface of the workpiece 100 is cleaned using a liquid cleaning device or the like. However, if this is the case, the manufacturing process becomes complicated, thereby generating a new problem of a longer manufacturing time. In addition, since a liquid cleaning device or the like is required, it will also lead to an increase in the installation space of the equipment or an increase in the cost of the equipment.

[0145] Therefore, the heat treatment device 1 is provided with a dust collecting and cooling unit 7. The dust collecting and cooling unit 7 removes foreign matter such as particles attached to the workpiece 100 after the heat treatment and cools the workpiece 100 after the heat treatment. If the dust collecting and cooling unit 7 is provided, foreign matter attached to the workpiece 100 can be removed, so the quality of the organic film and the like formed on the workpiece 100 can be improved. In addition, if the dust collecting and cooling unit 7 is provided, the workpiece 100 can be cooled by supplying a gas described later, so the standby time for the cooling in the region 31d of the accumulation unit 3 can be shortened. Therefore, the manufacturing time can be prevented from being prolonged.

[0146] Figure 6 It is a schematic cross-sectional view for illustrating the dust collecting and cooling unit 7 .

[0147] like Figure 6 As shown, the dust collecting and cooling unit 7 includes, for example, a hood 71 , a gas supply unit 72 , and a suction unit 73 .

[0148] For example, the cover body 71 is box-shaped with a length that can cover the entire area in the width direction of the workpiece 100, and has an opening 71a on one side (the side facing the workpiece 100). In addition, the width direction of the workpiece 100 refers to the direction that is orthogonal to the moving direction of the workpiece 100 when the workpiece 100 is moved in or out relative to the processing unit 2 or the collection unit 3. When the workpiece 100 is processed by the dust collection and cooling unit 7, a predetermined gap L is set between the opening 71a of the cover body 71 and the workpiece 100. The gap L can be appropriately changed according to the flow rate or flow velocity of the gas supplied by the gas supply unit 72 and the suction amount or suction pressure based on the suction unit 73. The gap L can be appropriately determined, for example, by conducting experiments or simulations.

[0149] Among the four surfaces extending from the sides of the surface 71 c of the cover 71 facing the opening 71 a toward the side having the opening 71 a , one surface 71 b intersecting the width direction of the workpiece 100 is inclined relative to the surface of the workpiece 100 .

[0150] The gas supply unit 72 includes, for example, a nozzle 72 a , a gas control unit 72 b , and a gas source 72 c .

[0151] The nozzle 72a is provided on the surface 71b of the cover body 71. The nozzle 72a supplies gas toward the surface of the workpiece 100. The surface 71b of the cover body 71 is inclined relative to the surface of the workpiece 100. Therefore, if the nozzle 72a is provided in a direction orthogonal to the surface 71b of the cover body 71, gas can be supplied toward the surface of the workpiece 100 from a direction inclined relative to the surface of the workpiece 100. In this way, an airflow that touches the side of the foreign matter 101 attached to the workpiece 100 can be formed on the surface of the workpiece 100. Therefore, it is easy to separate the foreign matter 101 from the surface of the workpiece 100, so that the removal rate can be improved. In addition, the nozzle 72a is a slit-shaped nozzle having a length substantially the same as that of the cover body 71, and gas can be blown over the entire area in the width direction of the workpiece 100. However, as long as gas can be blown over the entire area in the width direction of the workpiece 100, it does not need to be slit-shaped, and for example, a plurality of cylindrical nozzles can be arranged to form it. In this case, the adjacent nozzles of each nozzle may be in contact with each other or may be spaced apart from each other to a certain extent.

[0152] The gas control unit 72b is provided between the nozzle 72a and the gas source 72c. The gas control unit 72b controls at least one of the flow rate, flow velocity, and pressure of the gas supplied to the nozzle 72a. In addition, the gas control unit 72b may also control the start and stop of the supply of the gas. The gas control unit 72b may be, for example, a flow rate regulating valve.

[0153] The gas source 72c may be a gas cylinder containing a predetermined gas or a factory pipe for supplying a predetermined gas. The gas is not particularly limited as long as it is a gas that does not easily react with the workpiece 100 after the heat treatment. The gas may be, for example, an inert gas such as nitrogen or clean dry air.

[0154] The suction unit 73 includes, for example, a suction nozzle 73a, a filter 73b, and a suction device 73c.

[0155] The suction nozzle 73a is, for example, provided on the surface 71c of the cover body 71 facing the opening 71a. In this way, the foreign matter 101 separated from the surface of the workpiece 100 and floating inside the cover body 71 can be efficiently captured. The suction nozzle 73a is in the shape of a slit having substantially the same length as the cover body 71, similarly to the nozzle 72a. In this case, it is not limited to the slit shape, and a plurality of cylindrical nozzles or the like may be arranged to form a structure.

[0156] The filter 73b is provided between the suction nozzle 73a and the suction device 73c. ​​The filter 73b captures the foreign matter 101 sucked by the suction nozzle 73a.

[0157] The suction device 73c is not particularly limited as long as it can suck the gas inside the cover body 71. For example, a blower or the like can be used as the suction device 73c.

[0158] like Figure 1 As shown, the dust collecting and cooling unit 7 can be provided in the area between the processing unit 2 and the collecting unit 3. For example, the dust collecting and cooling unit 7 can be provided in the collecting unit 3. In addition, the dust collecting and cooling unit 7 can be provided in a position in front of the collecting unit 3 for the workpiece 100 stored in the collecting unit 3 to pass through. In addition, the dust collecting and cooling unit 7 can be provided in a position in front of each processing unit 2 for the workpiece 100 taken out of the processing unit 2 to pass through, or in an opening and closing door 21a. The following specifically describes each example.

[0159] Figure 7 This is a schematic diagram for illustrating a case where the dust collecting and cooling unit 7 is provided on the frame 31 of the collecting unit 3 .

[0160] like Figure 5 and Figure 7As shown, the dust collecting and cooling section 7 is arranged at the end of the frame 31 where the opening and closing door 31a is arranged. A space 31e is arranged below the area 31d of the frame 31 for accommodating the workpiece 100 after the heat treatment. That is, a space 31e is arranged inside the gathering section 3, and the workpiece 100 held by the first conveying section 4 and after the heat treatment can invade the space 31e. The dust collecting and cooling section 7 is, for example, arranged along the upper end of the opening which is higher than the space 31e, more specifically connected to the space 31e. In this case, the dust collecting and cooling section 7 can be arranged on the outside of the gathering section 3 (frame 31), and can also be arranged on the inside of the gathering section 3 (frame 31).

[0161] The horizontal multi-joint robot 4a of the first conveying unit 4 inserts the workpiece 100 held by the hand into the interior of the space 31e. At this time, the movement of the first conveying unit 4 is controlled in such a way that a gap L is formed between the workpiece 100 and the cover body 71 (opening 71a) of the dust collecting and cooling unit 7. In this way, since the workpiece 100 passes under the dust collecting and cooling unit 7, the foreign matter 101 can be removed and the workpiece 100 can be cooled. In addition, the horizontal multi-joint robot 4a of the first conveying unit 4 takes out the workpiece 100 held by the hand from the interior of the space 31e. At this time, it is also controlled in such a way that a gap L is formed between the workpiece 100 and the cover body 71, as in the case of insertion (intrusion). Similarly, since the workpiece 100 passes under the dust collecting and cooling unit 7, the foreign matter 101 can be removed and the workpiece 100 can be cooled.

[0162] For example, the dust collecting and cooling unit 7 removes foreign matter and cools the workpiece 100 when the first conveying unit 4 causes the workpiece 100 to enter the space 31 e or to exit the space 31 e .

[0163] In this case, as long as the foreign matter 101 can be removed and the workpiece 100 can be cooled when the workpiece 100 enters and exits, the foreign matter 101 can be removed and the workpiece 100 can be cooled more effectively.

[0164] Alternatively, the gap L may be adjusted by vertically moving the horizontal multi-joint robot 4a by the moving portion 4b of the first conveying portion 4. In this manner, the foreign matter 101 can be removed efficiently.

[0165] Figure 8 This is a schematic diagram for illustrating a case where the dust collecting and cooling unit 7 is provided on the opening and closing door 31a of the collecting unit 3 (frame 31).

[0166] The opening and closing door 31a of the frame 31 sometimes moves in the up and down direction. In this case, for example, Figure 8As shown, the dust collecting and cooling unit 7 may be disposed on the outer surface of the lower end of the opening and closing door 31 a of the frame body 31 .

[0167] The horizontal multi-joint robot 4a of the first conveying unit 4 inserts the workpiece 100 after the heating treatment into the area 31d inside the frame. At this time, the lifting position of the opening and closing door 31a is controlled to position the lower end of the opening and closing door 31a, that is, the dust collecting and cooling unit 7, in the area 31d so as to be aligned with the height of the position where the workpiece 100 is inserted. As a result, since the workpiece 100 passes under the dust collecting and cooling unit 7, the foreign matter 101 can be removed and the workpiece 100 can be cooled.

[0168] In addition, the gap L may be adjusted by opening and closing the door 31 a or by the moving portion 4 b of the first conveying portion 4 .

[0169] In this case, since it is not necessary to provide the space 31e, it is possible to suppress the height of the accumulating unit 3 (frame 31) from being increased.

[0170] Fig. 9 This is a schematic diagram for illustrating a case where the dust collecting and cooling unit 7 is provided in the opening and closing door 21a of the processing unit 2 (chamber 21).

[0171] The opening and closing door 21a of the chamber 21 may move in the vertical direction (open upward). Fig. 9 As shown, the dust collecting and cooling unit 7 may be disposed on the outer surface of the lower end of the opening and closing door 21 a of the chamber 21 .

[0172] The horizontal multi-joint robot 4a of the first conveying unit 4 carries out the workpiece 100 after the heat treatment from the inside of the chamber 21 (cassette 25). At this time, the lifting and lowering action of the opening and closing door 21a is controlled, and the dust collecting and cooling unit 7 is stopped at a height position where a gap L is formed between the workpiece 100 carried out this time and the cover body 71 (opening 71a). In this state, since the workpiece 100 passes under the dust collecting and cooling unit 7, the foreign matter 101 can be removed and the workpiece 100 can be cooled.

[0173] The gap L may be adjusted by the moving part 4b of the first conveying part 4 after the dust collecting and cooling part 7 is stopped by the opening and closing door 21a so as to match the height position of the workpiece 100 carried out this time.

[0174] In addition, if Figure 1As shown, the dust collecting and cooling unit 7 may also be provided on the conveying path of the first conveying unit 4 when conveying the workpiece 100 from the processing unit 2 to the collecting unit 3. In this case, the dust collecting and cooling unit 7 may be provided above the workpiece 100 held by the hand of the horizontal multi-joint robot 4a. In this case, when the workpiece 100 held by the hand of the horizontal multi-joint robot 4a and subjected to the heating treatment passes under the dust collecting and cooling unit 7, the foreign matter 101 can be removed and the workpiece 100 can be cooled.

[0175] In addition, at this time, the gap L can be adjusted by the moving part 4 b of the first conveying part 4 .

[0176] In addition, the dust collecting and cooling unit 7 may be installed at any one of the installation locations described above, or may be installed at some or all of the installation locations.

[0177] In addition, instead of setting the dust collecting and cooling section 7 on the opening and closing doors 21a and 31a, a lifting mechanism of a door-shaped frame structure for lifting and moving the dust collecting and cooling section 7 may be set adjacent to the opening and closing doors 21a and 31a, so that the dust collecting and cooling section 7 can be positioned in a manner consistent with the removal or insertion position of the workpiece 100.

[0178] Fig.10 This is a schematic cross-sectional view for illustrating a dust collecting and cooling unit 7a according to another embodiment.

[0179] like Fig.10 As shown, the dust collecting and cooling unit 7a has a cover 71, a gas supply unit 72 and a suction unit 73, similarly to the dust collecting and cooling unit 7. The dust collecting and cooling unit 7a also has at least one of an ultrasonic oscillator 74, an electrostatic attractor 75 and a magnetic attractor 76.

[0180] The ultrasonic oscillator 74 applies ultrasonic vibration to the gas supplied from the nozzle 72a. When the gas to which the ultrasonic vibration is applied hits the foreign matter 101 attached to the workpiece 100, the foreign matter 101 can be easily separated from the workpiece 100.

[0181] The electrostatic attractor 75 can generate static electricity. The foreign matter 101 attached to the workpiece 100 may be charged. If the electrostatic attractor 75 generates static electricity having a polarity opposite to the charged polarity of the foreign matter 101, the foreign matter 101 can be easily separated from the workpiece 100.

[0182] The magnetic attractor 76 can generate magnetic lines of force. The magnetic attractor 76 can be, for example, an electromagnet. The foreign matter 101 attached to the workpiece 100 may contain a magnetic body such as metal. If the magnetic attractor 76 generates magnetic lines of force, it is easy to separate the foreign matter 101 from the workpiece 100.

[0183] Although the embodiments have been described above by way of example, the present invention is not limited to these descriptions.

[0184] Embodiments obtained by appropriately adding design changes to the above-described embodiments by those skilled in the art are also included in the scope of the present invention as long as they have the characteristics of the present invention.

[0185] For example, the shape, size, arrangement, etc. of each member included in the heat treatment apparatus 1 are not limited to the examples, and can be changed as appropriate.

[0186] In addition, the elements included in the above-described embodiments can be combined as much as possible, and embodiments obtained by combining these elements are also included in the scope of the present invention as long as they include the characteristics of the present invention.

Claims

1. A heating treatment device, comprising: The processing part performs heating treatment on the workpiece; An accumulation section temporarily accumulating the workpiece after the heating treatment; A first conveying unit is provided between the processing unit and the collecting unit and performs delivery of the workpiece; as well as The dust collecting and cooling section is provided in a region between the processing section and the collecting section and performs removal of foreign matter attached to the workpiece after the heat treatment and cooling of the workpiece.

2. The heating treatment device according to claim 1, wherein: A space is provided inside the collecting section, into which the workpiece held by the first conveying section and subjected to the heating treatment can enter. The dust collecting and cooling unit is provided above the space.

3. The heating treatment device according to claim 2, wherein: The accumulation section includes an area for temporarily storing the workpiece after the heat treatment. The space is located below the region.

4. The heat treatment device according to claim 2 or 3, wherein: The dust collecting and cooling unit removes the foreign matter and cools the workpiece in at least one of the cases where the first conveying unit causes the workpiece after the heat treatment to enter the space and causes the workpiece after the heat treatment to exit the space.

5. The heating treatment device according to claim 3, wherein: The collecting section includes an exhaust section for introducing external air into the region.

6. The heat treatment device according to claim 1, wherein: The gathering part has: a frame for temporarily storing the workpiece after the heating treatment; and The first opening and closing door is arranged at the opening of the frame body and can be raised and lowered. The dust collecting and cooling unit is disposed on an outer surface of the first opening and closing door.

7. The heat treatment device according to claim 1, wherein: The processing unit comprises: a chamber for performing a heating process on the workpiece; and The second opening and closing door is arranged at the opening of the chamber and can be raised and lowered. The dust collecting and cooling unit is arranged on the outer surface of the lower end of the second opening and closing door.

8. The heat treatment device according to claim 1, wherein: The dust collecting and cooling unit is disposed in the middle of a path along which the workpiece is transported from the processing unit to the accumulating unit by the first transport unit.

9. The heating treatment device according to claim 8, wherein: The dust collecting and cooling unit is disposed at least one of a position in front of the processing unit and a position in front of the accumulating unit. 10 . The heat treatment apparatus according to claim 9 , further comprising a lifting unit for lifting and lowering the dust collecting and cooling unit.

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