Auxiliary device for assembling vertical furnace body

Abstract

The invention relates to an auxiliary device for assembling a vertical furnace body, which relates to the technical field of vertical assembling of furnace bodies in semiconductor process equipment and comprises a base component and an adjusting support component. The base assembly has a preset operation size and supporting force and is provided with a through hole with the preset operation size, and corresponding bearing and connecting operation can be carried out. The adjusting supporting assemblies are arranged on the surface of the working face of the base assembly, have the preset working size, are distributed on the surface of the working face of the base in a display mode and can conduct movable adjusting operation within the preset range. The adjusting supporting assembly can be inserted from the bottom heat preservation material of the vertical furnace body, the fixing buckle of the heating wire in the hearth is jacked up, and the phenomenon that the heating wire sinks in the operation process can be effectively avoided. And meanwhile, the arranged adjusting and supporting assembly can flexibly adjust the operation size, can be suitable for vertical furnace bodies of different sizes, and is wide in application range and convenient and fast to operate.

Description

Technical Field

[0001] The invention relates to the technical field of vertical assembly of a furnace body in semiconductor process equipment, and in particular to a vertical furnace body assembly auxiliary device. Background Art

[0002] The vertical furnace is an industrial furnace equipment, which is mainly used in the production process of metallurgy, ceramics, glass, chemical industry and other industries. In practical applications, the vertical furnace can be customized according to different process requirements. For example, the furnace structure design, temperature control, atmosphere control, etc. can be carried out according to the material characteristics and heating requirements. In addition, the vertical furnace can also form a production line with other equipment to realize automated production. In short, the vertical furnace is an important industrial furnace equipment with the characteristics of compact structure, uniform heating, energy saving and environmental protection, and is widely used in metallurgy, ceramics, glass, chemical industry and other industries.

[0003] The traditional vertical furnace body is composed of multiple groups of heating wires and fixed buckles, which is large in size and heavy in weight. In addition, due to the vertical operation, the heating wires are prone to sinking during heating. Summary of the invention

[0004] Purpose of the invention: to provide a vertical furnace assembly auxiliary device to solve the above-mentioned problems existing in the prior art.

[0005] Technical solution: A vertical furnace assembly auxiliary device includes two components: a base assembly and an adjustment support assembly.

[0006] Wherein, the base assembly has a predetermined operating size and supporting force, and is provided with a through hole of a predetermined operating size, which can perform corresponding bearing and connection operations;

[0007] The adjustment support assembly is placed on the working surface of the base assembly, has a predetermined working size, is in multiple pieces, and is distributed in a display manner on the working surface of the base, and can perform movable adjustment operations within a predetermined range.

[0008] In a further embodiment, the base assembly includes two components, a base and a rotating bearing tray. The base has a predetermined operating size and supporting force, and is provided with a through hole of a predetermined operating size, so that corresponding bearing and connection operations can be performed. The rotating bearing tray is rotatably connected to the base, has a predetermined operating size, is provided with a through hole of a predetermined operating size, and has a plurality of positioning grooves uniformly opened on the operating surface, so that rotation adjustment and load limiting operations within a predetermined range can be performed.

[0009] In a further embodiment, the adjustment support assembly includes two components: an adjustment unit and a positioning unit. The adjustment unit is placed in the positioning groove of the rotating bearing tray, has a predetermined operating length and bearing space, and can perform corresponding limiting and bearing operations. The positioning unit is placed on the operating surface of the adjustment unit, has a predetermined operating size and bearing force, and can perform a predetermined range of movable adjustment operations along the operating surface of the adjustment unit.

[0010] In a further embodiment, the adjustment unit includes three components: an adjustment plate, an adjustment screw and a screw motor. The adjustment plate is placed in the positioning groove of the rotating bearing tray, has a predetermined operating length and bearing space, and can perform corresponding bearing and connection operations. The adjustment screw is connected to the adjustment plate through a ball bearing, has a predetermined operating length and supporting force, and can perform corresponding connection and limit operations. The screw motor rod is connected to the adjustment screw, can drive the adjustment screw to perform a predetermined range of rotation adjustment operations, and can provide a predetermined driving power.

[0011] In a further embodiment, the positioning unit includes four components: an adjustment block, a linkage block, an auxiliary rail, and a cushioning top block. The adjustment block is sleeved on the working surface of the adjusting screw, has a predetermined working size, and is connected to the screw motor thread, and can perform a predetermined range of movable adjustment operations along the working surface of the adjusting screw. The linkage block is connected to the adjustment block, has a predetermined working size and supporting force, and can be adjusted to a corresponding working position following the movable adjustment of the adjustment block. The auxiliary rail is placed on the working surface of the adjustment plate, and a predetermined working distance is left between the auxiliary rail and the adjusting screw. The linkage block is movably arranged on the working surface of the auxiliary rail, and can be adjusted to a predetermined range of activities along the working surface of the auxiliary rail. The cushioning top block is placed on the working surface of the linkage block, has a predetermined working size and supporting force, and can be adjusted to a corresponding working position following the movable adjustment of the linkage block.

[0012] In a further embodiment, the base is provided with a through hole of a predetermined working size and a corresponding movable locking rod; the rotating bearing tray is inserted into the through hole of the base, and the working surface is evenly provided with recessed locking grooves, and the overall working size of the locking grooves is adapted to the working size of the movable locking rod.

[0013] In a further embodiment, the cushion material top block is a ceramic block, and there are multiple of them, with a predetermined working size and supporting force. The working surface of the linkage block is provided with a slot of a predetermined working size, and the cushion material top block is clamped in the slot of the linkage block.

[0014] In a further embodiment, the movable locking rod passes through the through hole provided in the base and is slidably disposed in the through hole provided in the base, and can perform a sliding adjustment operation within a predetermined range along the inner wall surface of the through hole provided in the base.

[0015] Beneficial effects: The present invention relates to a vertical furnace body assembly auxiliary device, and relates to the technical field of vertical assembly of furnace bodies in semiconductor process equipment, and includes two components: a base assembly and an adjustment support assembly. The base assembly has a predetermined operating size and supporting force, and can perform corresponding load-bearing and connection operations. The adjustment support assembly is placed on the working surface of the base assembly, has a predetermined operating size, and is in multiple pieces, and is distributed in a display manner on the working surface of the base, and can perform movable adjustment operations within a predetermined range. The present invention can effectively avoid the occurrence of the heating wire sinking during operation by inserting the adjustable support assembly through the bottom insulation material of the vertical furnace body, and lifting the fixed buckle of the heating wire in the furnace. At the same time, the adjustable support assembly can flexibly adjust the operating size, and can be applicable to vertical furnace bodies of different sizes, with a wide range of uses and convenient operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the present invention as a whole.

[0017] Figure 2 It is a schematic diagram of the adjustable support assembly of the present invention.

[0018] Figure 3 It is a schematic diagram of some components of the adjustable support assembly described in the present invention.

[0019] Figure 4 It is a schematic diagram of the exploded view of the base assembly of the present invention.

[0020] Figure 5 It is a schematic diagram of the explosion of some components of the base assembly described in the present invention.

[0021] The reference numerals in the figure are: base 1, movable locking rod 101, rotating bearing tray 2, adjustment support assembly 3, adjustment plate 301, adjustment screw 302, screw motor 303, adjustment block 304, linkage block 305, auxiliary rail 306, padding top block 307. DETAILED DESCRIPTION

[0022] In the following description, a large number of specific details are provided to provide a more thorough understanding of the present invention. However, it is apparent to those skilled in the art that the present invention can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present invention, some technical features well known in the art are not described.

[0023] The applicant believes that the traditional vertical furnace body is composed of multiple groups of heating wires and fixed buckles, which is large in size and heavy in weight. In addition, due to the vertical operation, the heating wires are prone to sinking during heating.

[0024] To this end, the applicant has designed a vertical furnace assembly auxiliary device, through which the adjustable support assembly 3 can be inserted through the bottom insulation material of the vertical furnace, and the fixing buckle of the heating wire in the furnace is lifted up, which can effectively prevent the heating wire from sinking during operation. At the same time, the adjustable support assembly 3 can flexibly adjust the operation size, which can be applied to vertical furnaces of different sizes, has a wide range of uses, and is easy to operate.

[0025] The vertical furnace assembly auxiliary device of the present invention mainly includes two components: a base assembly and an adjustment support assembly 3. Among them, the base assembly has a predetermined operating size and supporting force, and is provided with a through hole of a predetermined operating size, which can perform corresponding bearing and connection operations. The adjustment support assembly 3 is placed on the working surface of the base assembly, has a predetermined operating size, and is multiple, and is distributed in a display manner on the working surface of the base, and can perform a predetermined range of movable adjustment operations. In a further preferred embodiment, the adjustment support assembly 3 has a predetermined inclination angle, and the multiple adjustment support assemblies 3 are all inclined toward the center point of the base assembly and are distributed in an array. A predetermined operating distance is left between the multiple adjustment support assemblies 3. In the later operation process, the corresponding top column support operation can be achieved by mobilizing the multiple adjustment support assemblies 3. At the same time, since the adjustment support assembly 3 can be flexibly mobilized, it can be mobilized according to the needs of different furnace sizes to provide auxiliary support for furnace heating wires of different sizes to avoid the occurrence of heating wire sinking during its operation.

[0026] The base assembly includes two components: a base 1 and a rotating support tray 2. The base 1 has a predetermined operating size and supporting force, and a through hole of a predetermined operating size is provided at the center of the operating position, so that corresponding load-bearing and connection operations can be performed. The rotating support tray 2 is rotatably connected to the base 1 and has a predetermined operating size. A through hole that matches the through hole provided in the base 1 is provided at the center of the operating position, and a plurality of positioning grooves are evenly provided on the surface of the operating surface, so that rotation adjustment and load-bearing limit operations within a predetermined range can be performed. In the later operation process, the rotation adjustment of the rotating support tray 2 can be used to drive the multiple adjustment support assemblies 3 to adjust the corresponding operating angles synchronously, so that the multiple adjustment support assemblies 3 can be aligned with the fixed buckle position of the furnace, and the fixed buckle can be lifted up against the column, and then the heating wire fixed by the other fixed buckle can be lifted up to avoid the sinking of the heating wire during the operation.

[0027] The adjustment support assembly 3 includes two components: an adjustment unit and a positioning unit. The adjustment unit is placed in the positioning groove provided in the rotating support tray 2, has a predetermined operating length and bearing space, and can perform corresponding limiting and bearing operations. The positioning unit is placed on the working surface of the adjustment unit, has a predetermined operating size and supporting force, and can perform movable adjustment operations within a predetermined range along the working surface of the adjustment unit. In the later operation process, the operating position of the positioning unit on the working surface of the adjustment unit can be adjusted according to the operating size requirements of different furnaces, thereby meeting the auxiliary support requirements of furnace heating wires of different sizes.

[0028] The adjustment unit includes three components: an adjustment plate 301, an adjustment screw 302 and a screw motor 303. The adjustment plate 301 is placed in the positioning groove of the rotating support tray 2, has a predetermined operating length and bearing space, and can perform corresponding bearing and connection operations. The adjustment screw 302 is connected to the adjustment plate 301 through a ball bearing, has a predetermined operating length and supporting force, and can perform corresponding connection and limiting operations. The screw motor 303 is connected to the adjustment screw 302, can drive the adjustment screw 302 to perform a rotation adjustment operation within a predetermined range, and can provide a predetermined driving power. In a further preferred embodiment, the adjustment plate 301 is concave, the adjustment screw 302 is placed in the recessed chamber of the adjustment plate 301, and the left and right ends of the adjustment screw 302 in the operating direction are connected to the adjustment plate 301 through ball bearings. The end of the adjusting screw rod 302 close to the screw motor 303 passes through the wall of the adjusting plate 301 and is connected to the machine rod of the screw motor 303. In the later operation process, the adjusting screw rod 302 can be driven by the screw motor 303 to perform reciprocating rotation adjustment in clockwise and counterclockwise directions.

[0029] The positioning unit includes four components: an adjustment block 304, a linkage block 305, an auxiliary rail 306, and a cushioning top block 307. The adjustment block 304 is sleeved on the working surface of the adjusting screw 302, has a predetermined working size, and is threadedly connected to the screw motor 303, and can perform a predetermined range of movable adjustment along the working surface of the adjusting screw 302. The linkage block 305 is connected to the adjustment block 304, has a predetermined working size and supporting force, and can adjust the corresponding working position following the movable adjustment of the adjustment block 304. The auxiliary rail 306 is placed on the working surface of the adjusting plate 301, and a predetermined working distance is left between it and the adjusting screw 302. The linkage block 305 is slidably arranged on the working surface of the auxiliary rail 306, and can perform a predetermined range of sliding adjustment along the working surface of the auxiliary rail 306. The padding top block 307 is placed on the working surface of the linkage block 305, has a predetermined working size and supporting force, and can be adjusted to the corresponding working position following the movable adjustment of the linkage block 305. In the later operation process, the adjustment block 304 can be adjusted forward and backward along the working surface of the adjustment screw 302 by rotating the adjustment screw 302 clockwise and counterclockwise. At the same time, the linkage block 305 can follow the adjustment block 304 to adjust the corresponding working position, so that the linkage block 305 can slide and adjust the corresponding working position along the working surface of the auxiliary rail 306, and then the padding top block 307 can follow the sliding adjustment of the linkage block 305 to adjust the corresponding working position, so that the padding top block 307 can be aligned with the position of the fixed buckle in the furnace to perform auxiliary support operation, and accurately fix the buckle top column to play the role of auxiliary support, so as to achieve the purpose of avoiding the sinking of the heating wire in the furnace during the operation.

[0030] The base is provided with a through hole of a predetermined working size and a corresponding movable locking rod 101; the rotating bearing tray 2 is inserted into the through hole of the base, and the working surface is evenly provided with recessed locking grooves, and the overall working size of the locking grooves is adapted to the working size of the movable locking rod 101. In a further preferred embodiment, the rotating bearing tray is slidably connected to the base, that is, the outer wall surface of the rotating bearing tray 2 in the working direction is slidably connected to the inner wall surface of the through hole provided in the base, so that the rotating bearing tray 2 can be flexibly slidably adjusted in the through hole provided in the base, and then the working directions of the multiple adjusting support assemblies 3 placed on the working surface of the rotating bearing tray 2 can be adjusted, and finally the purpose of overall adjustment with the working position of the padding top block 307 is achieved, so that the padding top block 307 can be aligned with the fixed buckle in the furnace to perform precise auxiliary support operations.

[0031] In a further preferred embodiment, the rotating bearing tray 2 is divided into two working parts, an upper tray and a lower tray. The overall working size of the lower tray is compatible with the working size of the through hole provided in the base, and is slidably arranged in the through hole provided in the base, and recessed locking grooves are evenly arranged on the working surface. The upper tray is connected to the lower tray in a locking manner, and a plurality of locking grooves are evenly arranged on the working surface, and the adjustment support assembly 3 is placed in the locking groove provided in the upper tray. In the actual operation process, the working size of the upper tray can be flexibly changed according to the actual operation requirements, thereby further expanding the scope of application of the assembly auxiliary device provided by the present invention.

[0032] The cushioning top block 307 is a ceramic block, and there are multiple of them, with a predetermined operating size and supporting force. The number of operations of the cushioning top block 307 is the same as the number of operations of the linkage block 305, the number of operations of the linkage block 305 is the same as the number of operations of the adjustment block 304, and the number of operations of the adjustment block 304 is the same as the number of the positioning grooves set in the rotating bearing tray 2. That is, the adjustment support assembly 3 is provided in the positioning grooves set in the rotating bearing tray 2. Each of the adjustment plates 301, the adjustment screw rod 302 and the screw motor 303 in the adjustment support assembly 3 is a group, and is equipped with at least one adjustment block 304, the linkage block 305 and the cushioning top block 307. The working surface of the linkage block 305 is provided with a slot of a predetermined operating size, and the cushioning top block 307 is clamped in the slot provided in the linkage block 305. During the actual operation process, the operating length of the padding top block 307 can be flexibly adjusted according to the thickness of the insulation material at the bottom of the furnace to be auxiliary supported, so that the padding top block 307 can be inserted into the insulation material and pass through the insulation material to lift up the fixing buckle and play a corresponding auxiliary supporting role.

[0033] The movable locking rod 101 passes through the through hole provided in the base, and is slidably disposed in the through hole provided in the base, and can be slidably adjusted within a predetermined range along the inner wall surface of the through hole provided in the base. In the later operation process, the operation state of the rotating tray 2 can be changed by sliding the movable locking rod 101. That is, when the movable locking rod 101 is slid in a direction away from the rotating tray 2, the rotating tray 2 can be slid accordingly, and the adjustment support assembly 3 can be adjusted to the corresponding operation angle. When the rotating tray 2 is adjusted to the corresponding operation position, the movable locking rod 101 is slid in a direction close to the rotating tray 2, and is inserted into the card slot provided in the rotating tray 2, so that the rotating tray 2 is locked and cannot be adjusted accordingly, thereby fixing the operation position of the cushioning top block 307.

[0034] The overall workflow of the present invention is as follows:

[0035] First, start the screw motor 303 to drive the adjusting screw 302 to perform corresponding rotation adjustment. When the adjusting screw 302 rotates clockwise, the adjusting block 304 will be moved and adjusted to a position close to the center direction of the rotating tray 2, and then the linkage block 305 can be driven to slide and adjust as a whole to a position close to the center direction of the rotating tray 2, and then the padding top block 307 can be moved and adjusted to a position close to the center direction of the rotating tray 2. When multiple adjusting screws 302 rotate clockwise synchronously, the operating distance between multiple padding top blocks 307 will become closer, which is suitable for small-sized furnace heating wire auxiliary support operations. When multiple adjusting screws 302 rotate counterclockwise synchronously, the operating distance between multiple padding top blocks 307 will become farther, which is suitable for large-sized furnace heating wire auxiliary support operations. When the padding top block 307 is adjusted to a corresponding suitable working position, the base can be pushed toward the direction close to the furnace, so that multiple padding top blocks 307 are inserted into the insulation material at the bottom of the furnace, and penetrate through the provided insulation material, and push up the fixed buckle between the heating wires in the pillar furnace, and push up the fixed buckle to avoid the occurrence of the heating wire sinking during the later operation. At the same time, since the bottom insulation material has a certain thickness, the initial adjustment of the padding top block 307 by the adjusting screw rod 302 may have a certain error. After the padding top block 307 is inserted into the bottom insulation material, the working position of the padding top block 307 can be further adjusted by rotating the rotating tray 2 1 to make the padding top block 307 accurately push the fixed buckle in the pillar furnace. When the movable locking rod 101 is slid in the direction away from the rotating tray 2 1, the rotating tray 2 1 can be adjusted accordingly, so that the adjusting support assembly 3 can be adjusted to the corresponding working angle. When the rotating tray 2 is adjusted to the corresponding working position, the movable locking rod 101 slides in the direction close to the rotating tray 2 and is inserted into the slot provided in the rotating tray 2, so that the rotating tray 2 is locked and cannot be adjusted accordingly, thereby fixing the working position of the cushioning top block 307. By adjusting the overall rotation of the rotating tray 2, the multiple cushioning top blocks 307 can be driven to move to the synchronous working position as a whole, which is time-saving, fast, and convenient to operate, and can also meet certain fine-tuning requirements.

[0036] In the actual operation process, since the base 1 and the rotating support tray 2 are both provided with corresponding operation through holes, there is no restriction when filling the heating furnace with materials.

[0037] All components in the present application are made of high temperature resistant materials, and metal components can be made of titanium alloy, ferrochrome alloy or 310S, RA330, HR3C and the like among stainless steels.

[0038] As described above, although the present invention has been shown and described with reference to specific preferred embodiments, it should not be construed as limiting the present invention itself. Various changes may be made to it in form and detail without departing from the spirit and scope of the present invention as defined in the appended claims.

Claims

1. A vertical furnace assembly auxiliary device, characterized in that include: The base assembly has a predetermined operating size and supporting force, and is provided with a through hole of a predetermined operating size, which can perform corresponding bearing and connection operations; The adjustable support assembly is placed on the working surface of the base assembly, has a predetermined working size, is in multiple numbers, and is distributed in a display manner on the working surface of the base, and can perform movable adjustment operations within a predetermined range.

2. A vertical furnace assembly auxiliary device according to claim 1, characterized in that: The base assembly comprises: The base has a predetermined working size and supporting force, and is provided with through holes of predetermined working size, which can carry out corresponding bearing and connection operations; The rotating bearing tray is rotatably connected to the base, has a predetermined working size, is provided with a through hole of the predetermined working size, and has a plurality of positioning grooves evenly opened on the working surface, so that rotation adjustment and load-bearing limiting operations within a predetermined range can be performed.

3. A vertical furnace assembly auxiliary device according to claim 2, characterized in that: The adjustable support assembly comprises: The adjusting unit is placed in the positioning groove of the rotating bearing tray, has a predetermined operating length and carrying space, and can perform corresponding limiting and carrying operations; The positioning unit is placed on the working surface of the adjusting unit, has a predetermined working size and a supporting force, and can perform movable adjustment operations within a predetermined range along the working surface of the adjusting unit.

4. The vertical furnace assembly auxiliary device according to claim 3, characterized in that: The adjustment unit comprises: The adjusting plate is placed in the positioning groove of the rotating bearing tray, has a predetermined operating length and carrying space, and can perform corresponding carrying and connection operations; The adjusting screw rod is connected to the adjusting plate through a ball bearing, has a predetermined operating length and supporting force, and can perform corresponding connection and limit operations; The screw motor, whose machine rod is connected to the adjusting screw, can drive the adjusting screw to perform rotation adjustment operations within a predetermined range and can provide predetermined driving power.

5. The vertical furnace assembly auxiliary device according to claim 4, characterized in that: The positioning unit comprises: An adjusting block, which is sleeved on the working surface of the adjusting screw rod, has a predetermined working size, is threadably connected to the screw motor, and can perform movable adjustment operations within a predetermined range along the working surface of the adjusting screw rod; A linkage block, connected to the adjustment block, has a predetermined operating size and supporting force, and can be adjusted to a corresponding operating position following the movable adjustment of the adjustment block; The auxiliary rail is placed on the working surface of the adjustment plate and has a predetermined working distance with the adjustment screw rod. The linkage block is movably arranged on the working surface of the auxiliary rail and can be adjusted within a predetermined range along the working surface of the auxiliary rail. The cushion material top block is placed on the working surface of the linkage block, has a predetermined working size and supporting force, and can be adjusted to a corresponding working position following the activity adjustment of the linkage block.

6. The vertical furnace assembly auxiliary device according to claim 2, characterized in that: The base is provided with a through hole of a predetermined operating size and a corresponding movable locking rod; the rotating bearing tray is inserted into the through hole of the base, and the surface of the operating surface is evenly provided with recessed locking grooves, and the overall operating size of the locking grooves is adapted to the operating size of the movable locking rod.

7. The vertical furnace assembly auxiliary device according to claim 1, characterized in that: The cushion material top block is a ceramic block, and there are multiple of them, with a predetermined working size and supporting force; The working surface of the linkage block is provided with a slot with a predetermined working size, and the cushion material top block is clamped in the slot provided in the linkage block.

8. The vertical furnace assembly auxiliary device according to claim 6, characterized in that: The movable locking rod passes through the through hole provided in the base and is slidably arranged in the through hole provided in the base, and can perform a sliding adjustment operation within a predetermined range along the inner wall surface of the through hole provided in the base.

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