Anti-collision device, assembly method of anti-collision device and optical detection equipment

Abstract

The invention relates to the technical field of optical detection, in particular to an anti-collision device, an assembly method of the anti-collision device and optical detection equipment, the anti-collision device comprises a fixed part, a movable part and a trigger assembly, the fixed part is installed and fixed on a detection head, and the movable part is used for being connected with an objective lens; the movable part is connected to the fixed part in a reciprocating motion mode through the guide rail in the first direction, the trigger assembly comprises a first conductive part, a second conductive part and a control module, one of the first conductive part and the second conductive part is located on the fixed part, and the other one is located on the movable part. The first conductive part and the second conductive part can be conductively communicated when the moving part moves towards the fixed part, so that the control module can be triggered when the first conductive part and the second conductive part are conductively communicated, and the control module controls the detection head to stop moving. Or the control module controls the detection head to move towards the opposite direction so as to enable the objective lens to be away from the detected product, and the damage probability of the objective lens can be reduced.

Description

Technical Field

[0001] The present application relates to the field of optical detection technology, and in particular to an anti-collision device, an assembly method for the anti-collision device, and optical detection equipment. Background Art

[0002] Optical inspection equipment such as confocal microscopes and white light interferometers usually include a base, a motion platform and a detection head. The motion platform and the detection head are both installed on the base. The product to be tested is placed on the motion platform and can move in the horizontal plane with the motion platform. The detection head includes an objective lens. The detection head is equipped with a driving mechanism for adjusting the position of the detection head. The driving mechanism can drive the detection head to move back and forth in the vertical direction to approach or move away from the product to be tested to meet different inspection needs.

[0003] However, since the shapes, sizes or materials of the products being tested are different, the sizes of objective lenses of different models are also different. When the objective lens is adjusted in the up and down directions with the detection head, the product being tested is easy to hit the objective lens, causing damage to the objective lens. Summary of the invention

[0004] The present application provides an anti-collision device, an assembly method of the anti-collision device and an optical detection device to solve the technical problem that when the position of the objective lens is adjusted, the product under test is easy to hit the objective lens and cause damage to the objective lens.

[0005] According to the first aspect, an embodiment provides an anti-collision device, comprising:

[0006] A fixing part, installed and fixed on a detection head of an optical detection device;

[0007] A moving part, used to be connected to the objective lens, the moving part is connected to the fixed part, the moving part reciprocates relative to the fixed part in a first direction via a guide rail, and the first direction is the moving direction of the detection head;

[0008] A trigger component includes a first conductive member, a second conductive member and a control module, at least one of the first conductive member and the second conductive member is electrically connected to the control module, the control module is used to control the detection head to move back and forth in the first direction, one of the first conductive member and the second conductive member is located on the fixed member, and the other is located on the movable member, and the first conductive member and the second conductive member can be electrically connected when the movable member moves toward the fixed member.

[0009] In an optional embodiment, the guide rail includes a first track, a second track and a rolling member rollingly assembled between the first track and the second track, the first track is connected to the fixed member, the second track is connected to the movable member, the first track and the second track are arranged at intervals in a second direction, and the second direction is perpendicular to the first direction;

[0010] The fixing member or the moving member is connected with a tightening structure, and the tightening structure is located on a side of one of the first track and the second track facing away from the other, and the tightening structure abuts against the first track or the second track in the second direction.

[0011] In an optional embodiment, the tightening structure includes a jack screw, and the jack screw is extended and arranged in the second direction;

[0012] The fixing member has a fixing connection portion connected to the top screw, and in the second direction, the fixing connection portion is located on the side of the first track facing away from the second track; or, the moving member has a moving connection portion connected to the top screw, and the moving connection portion is located on the side of the second track facing away from the first track.

[0013] In an optional embodiment, the anti-collision device includes an extrusion member;

[0014] The extrusion member has a fitting surface that fits with the first track, and the extrusion member is located between the tightening structure and the first track in the second direction; or, the extrusion member has a fitting surface that fits with the second track, and the extrusion member is located between the tightening structure and the second track in the second direction.

[0015] In an optional embodiment, at least one of the fixed member and the movable member is detachably connected to the guide rail in a third direction, and the third direction is perpendicular to the first direction and the second direction;

[0016] The fixing member and / or the moving member detachably connected to the guide rail has a mounting surface that fits the guide rail, and the mounting surface is perpendicular to the third direction.

[0017] In an optional embodiment, the anti-collision device includes a pull rod assembly, the pull rod assembly includes an elastic member, the elastic member is connected between the fixed member and the movable member, and the elastic member can apply an elastic force to the movable member in the first direction away from the product under test.

[0018] In an optional embodiment, the elastic member has a first connecting end connected to the fixed member and a second connecting end connected to the movable member; the position of the first connecting end on the fixed member is adjustable, and / or the position of the second connecting end on the movable member is adjustable.

[0019] According to a second aspect, a method for assembling the anti-collision device as described in the above embodiment comprises:

[0020] Connecting the guide rail between the fixed member and the movable member;

[0021] The movable member is connected to the fixed member so as to be reciprocatably movable in the first direction by installing screws.

[0022] In an optional embodiment, the guide rail includes a first track, a rolling member, and a second track arranged in sequence in the second direction, the first track is connected to the fixed member by a first connecting screw, the second track is connected to the movable member by a second connecting screw, the first connecting screw and the second connecting screw both extend in a third direction, and the third direction, the second direction, and the first direction are perpendicular to each other; a tightening structure is connected to the fixed member or the movable member, and the tightening structure abuts against the first track or the second track in the second direction;

[0023] The step of connecting the guide rail between the fixed member and the movable member comprises:

[0024] Connect the first rail to the fixed member through the first connecting screw, connect the second rail to the movable member through the second connecting screw, and keep the first connecting screw and the second connecting screw in a connected but not locked state;

[0025] Connecting a tightening structure to the movable member or the fixed member so that the tightening structure is tightened on the first track or the second track in the second direction;

[0026] Tighten the first connecting screw and the second connecting screw.

[0027] According to the third aspect, an optical detection device is provided in an embodiment, comprising a base, a detection head, a driving mechanism and an anti-collision device as described in any one of the above items, wherein the detection head is mounted on the base via the driving mechanism, and the driving mechanism can drive the detection head to reciprocate in the first direction relative to the base, the anti-collision device is mounted on the detection head, and the driving mechanism is electrically connected to the control module.

[0028] According to the anti-collision device, the assembly method of the anti-collision device and the optical detection equipment of the above-mentioned embodiments, the anti-collision device includes a fixed part, a movable part and a trigger assembly, the fixed part is used to be installed and fixed on the detection head of the optical detection equipment, the movable part is used to be connected to the objective lens, the movable part is connected to the fixed part reciprocatingly in a first direction through a guide rail, the first direction is the moving direction of the detection head, the trigger assembly includes a first conductive part, a second conductive part and a control module, one of the first conductive part and the second conductive part is located on the fixed part, and the other is located on the movable part, the first conductive part and the second conductive part can be conductively connected during the movement of the movable part toward the fixed part; at least one of the first conductive part and the second conductive part is electrically connected to the control module, and the control module is used to control the detection head to reciprocate in the first direction, so that the fixed part, the movable part and the trigger assembly in the anti-collision device can provide a hardware platform, which can trigger the control module when the first conductive part and the second conductive part are conductively connected, and the control module controls the detection head to stop moving, or controls the detection head to move in the opposite direction by the control module to keep the objective lens away from the product to be tested, which can reduce the probability of damage to the objective lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A schematic diagram of the structure of an optical detection device according to an embodiment;

[0030] Figure 2 A schematic diagram of the structure of a specific position of an anti-collision device in an optical detection device according to an embodiment;

[0031] Figure 3 A simplified structural diagram of an anti-collision device according to an embodiment;

[0032] Figure 4 The figure is a schematic diagram of a structure in which a fixed part and a movable part are connected via a pull rod assembly in one embodiment.

[0033] In the figure: 1, base; 11, moving platform; 2, detection head; 3, anti-collision device; 4, fixing member; 41, fixed connection part; 42, fixed main body; 5, moving member; 51, moving connection part; 52, moving main body; 53, connecting member; 531, second long hole; 54, perforation; 55, third long hole; 6, guide rail; 61, first track; 62, second track; 7, trigger assembly; 71, first conductive member; 711, connecting block; 712, first long hole; 713, conductive contact; 72, second conductive member; 8, pull rod assembly; 81, elastic member; 811, first connecting end; 812, second connecting end; 82, first fixed block; 83, second fixed block; 9, tightening structure. DETAILED DESCRIPTION

[0034] The present application is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0035] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations, and the operation steps involved in each embodiment can also be replaced or adjusted in a sequence in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a certain embodiment and do not mean that the composition and / or sequence are necessary.

[0036] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0037] The embodiment of the present application discloses an anti-collision device 3, which is applied to optical detection equipment, such as a confocal microscope, or a white light interferometer, and can reduce the probability of damage to the objective lens during the objective lens height adjustment process.

[0038] The anti-collision device 3 of the present embodiment of the present application, please refer to Figures 2 to 4 , including a fixing part 4, a moving part 5 and a trigger assembly 7. The fixing part 4 is used to be installed and fixed on the detection head 2 of the optical detection equipment, and can reciprocate with the detection head 2 in the up and down directions. The moving part 5 is used to be connected with the objective lens (not shown in the figure). The moving part 5 is connected to the fixing part 4 through a mounting screw and a long hole for the mounting screw to pass through. The moving part 5 can reciprocate relative to the fixing part 4 in a first direction through a guide rail 6. The first direction is the direction of movement of the detection head 2, that is, the up and down direction.

[0039] In some embodiments, the objective lens can be connected to the lower side of the movable part 5, and the objective lens can reciprocate in the up and down directions with the movable part 5. In the process of the objective lens moving downward with the detection head 2, the objective lens will first contact the product to be tested on the motion platform 11. In other embodiments, the objective lens can also be set to be connected to the upper position of the movable part 5. In the process of the objective lens moving downward with the detection head 2, the movable part 5 will first contact the product to be tested on the motion platform 11 or directly contact the motion platform 11.

[0040] In the anti-collision device 3 of the embodiment of the present application, the trigger component 7 includes a first conductive member 71, a second conductive member 72 and a control module (not shown in the figure), one of the first conductive member 71 and the second conductive member 72 is located on the fixed member 4, and the other is located on the movable member 5, the first conductive member 71 and the second conductive member 72 can be electrically connected during the process of the movable member 5 moving toward the fixed member 4, at least one of the first conductive member 71 and the second conductive member 72 is electrically connected to the control module, and the control module is used to control the detection head 2 to move back and forth in the first direction.

[0041] In some embodiments, the first conductive member 71 may be mounted and fixed on the fixed member 4, and the second conductive member 72 may be mounted and fixed on the movable member 5, or the first conductive member 71 may be mounted and fixed on the movable member 5, and the second conductive member 72 may be mounted and fixed on the fixed member 4. When the movable member 5 and the objective lens are not in contact with the motion platform 11, the movable member 5 may be located at the lower end or lower side of the fixed member 4 under the action of its own gravity and the gravity of the objective lens.

[0042] For some examples, please refer to Figure 3 One of the first conductive member 71 and the second conductive member 72 may include a conductive plate, and the other may include a conductive contact 713. For example, the first conductive member 71 fixed to the fixing member 4 may include a conductive contact 713, and the second conductive member 72 may include a conductive plate, and the conductive plate may be located at the lower side of the conductive contact 713. Alternatively, the conductive contact 713 may be located at the lower side of the conductive plate. Two conductive contacts 713 may be provided, and when both conductive contacts 713 are conductively connected to the conductive plate, the two conductive contacts 713 are short-circuited.

[0043] In the process that the moving member 5 and the objective lens move downward with the detection head 2, when the objective lens or the moving member 5 contacts the product to be detected or the motion platform 11, as the detection head 2 moves downward, the moving member 5 and the second conductive member 72 will move upward relative to the fixed member 4 until the first conductive member 71 and the second conductive member 72 are in conductive contact. Since at least one of the first conductive member 71 and the second conductive member 72 is electrically connected to the control module, and the control module is used to control the reciprocating movement of the detection head 2 in the first direction, the control module will be triggered after the first conductive member 71 and the second conductive member 72 are in conductive contact, so that the control module controls the detection head 2 to stop moving in the first direction, or controls the detection head 2 to move upward to move away from the motion platform 11, so that when the objective lens is about to touch the product to be detected or the objective lens just contacts the product to be detected, the objective lens can be moved upward to reduce the probability of damage to the objective lens.

[0044] In order to avoid the two conductive contacts 713 in the first conductive member 71 from being short-circuited due to installation errors, in some embodiments, the two conductive contacts 713 in the first conductive member 71 can be set as elastic contacts, and the conductive contacts 713 are installed on the fixed member 4 so as to be reciprocatingly movable in the first direction through the elastic member 81, so that both conductive contacts 713 can be in conductive contact with the conductive plate of the second conductive member 72.

[0045] In the embodiment of the anti-collision device 3 of the present application, in the initial state where neither the moving member 5 nor the objective lens is in contact with the motion platform 11 or the product under test, the distance between the first conductive member 71 and the second conductive member 72 is smaller than the movable distance of the moving member 5 relative to the fixed member 4 in the first direction. In order to further reduce the probability of the objective lens being damaged, when the initial state is set, the distance between the first conductive member 71 and the second conductive member 72 is as small as possible, so that as long as either the moving member 5 or the objective lens is in contact with the motion platform 11 or the product under test, the first conductive member 71 is electrically connected to the second conductive member 72, thereby improving the sensitivity of the anti-collision device 3.

[0046] In order to facilitate assembly and to minimize the distance between the first conductive member 71 and the second conductive member 72 in the initial state, please refer to Figure 3The first conductive member 71 includes a connecting block 711, which is connected between the fixing member 4 and the conductive contact 713. One of the connecting block 711 and the fixing member 4 has a first long hole 712 extending in the first direction. The connecting block 711 is detachably connected to the fixing member 4 through a connecting bolt. For example, the first long hole 712 can be set on the connecting block 711, and the fixing member 4 is provided with a screw hole. The connecting bolt passes through the first long hole 712 and is locked with the fixing member 4 to achieve a fixed connection between the first conductive member 71 and the fixing member 4; or the first long hole 712 can be set on the fixing member 4, and the threaded hole is set on the connecting block 711. The connecting bolt passes through the first long hole 712 and is locked with the connecting block 711 to achieve a fixed connection between the first conductive member 71 and the fixing member 4. The specific position of the connecting bolt in the first long hole 712 can be adjusted to change the distance between the first conductive member 71 and the second conductive member 72 in the initial state, so that the distance between the first conductive member 71 and the second conductive member 72 is minimized.

[0047] Of course, in other embodiments, the initial distance between the first conductive member 71 and the second conductive member 72 can also be set to other larger distances, as long as the objective lens is not damaged when the first conductive member 71 and the second conductive member 72 are in conductive contact. Or in other embodiments, the installation position of the first conductive member 71 on the fixing member 4 can be fixed, and the distance between the first conductive member 71 and the second conductive member 72 in the initial state cannot be adjusted.

[0048] In some embodiments, in order to avoid the objective lens and the moving part 5 from being damaged as soon as the objective lens contacts the product to be tested due to the large gravity, please refer to Figure 4 The anti-collision device 3 includes a pull rod assembly 8, and the pull rod assembly 8 includes an elastic member 81. The elastic member 81 is connected between the fixed member 4 and the movable member 5. The elastic member 81 can exert an elastic force on the movable member 5 to make the movable member 5 move away from the product to be measured in a first direction, so as to reduce the pressure acting on the objective lens when the objective lens just contacts the product to be measured, thereby reducing the probability of damage to the objective lens.

[0049] For some embodiments, please continue to refer to Figure 4 The elastic member 81 can be a spring, one end of the spring is connected to the fixed member 4, and the other end is connected to the movable member 5. The pull rod assembly 8 can be set to also include a first fixed block 82 connected to the fixed member 4, and a second fixed block 83 connected to the movable member 5. The elastic member 81 has a first connecting end 811 connected to the first fixed block 82, and also has a second connecting end 812 connected to the second fixed block 83. The elastic expansion and contraction direction of the elastic member 81 can be inclined relative to the first direction to facilitate the setting of the pull rod assembly 8.

[0050] In some embodiments, in order to reduce the pressure acting on the objective lens when it just contacts the product to be measured as much as possible and to meet the requirement of adjustable pressure, the position of the first connecting end 811 of the elastic member 81 on the fixed member 4 is adjustable, or the position of the second connecting end 812 of the elastic member 81 on the movable member 5 can also be adjusted. In this way, the elastic stretching length of the elastic member 81 can be increased to increase the elastic force acting on the movable member 5, thereby reducing the pressure acting on the objective lens when it just contacts the product to be measured.

[0051] For some examples, please refer to Figure 4 , the movable member 5 is provided with a connecting member 53, the connecting member 53 has a second long hole 531, the second fixing block 83 may be a connecting bolt penetrating the second long hole 531, the second fixing block 83 is fixedly connected to the connecting member 53, and the specific position of the second connecting end 812 on the movable member 5 can be adjusted by changing the specific position of the second fixing block 83 in the second long hole 531. Or in other embodiments, the connecting member 53 with the second long hole 531 can also be provided on the fixing member 4, the first fixing block 82 may be a connecting bolt penetrating the second long hole 531, and the specific position of the first connecting end 811 on the fixing member 4 can be changed by changing the specific position of the first fixing block 82 in the second long hole 531.

[0052] Of course, in an embodiment where the objective lens will not be damaged even if the entire weight of the objective lens and the moving member 5 presses on the objective lens, in order to simplify the structure of the anti-collision device 3, the pull rod assembly 8 may not be provided in the anti-collision device 3.

[0053] In the embodiment of the anti-collision device 3 of the present application, the movable part 5 is connected to the fixed part 4 by means of a mounting screw and a long hole for the mounting screw to pass through. For the sake of convenience of explanation, the long hole is a third long hole 55. The third long hole 55 is arranged on the movable part 5 or the fixed part 4. The third long hole 55 extends in the first direction, and the extension direction of the mounting screw is perpendicular to the first direction. In the embodiment in which the third long hole 55 is arranged on the movable part 5, the mounting screw is locked with the fixed part 4 after passing through the third long hole 55. During the reciprocating movement of the movable part 5 relative to the fixed part 4 in the first direction, the mounting screw can move along the third long hole 55. The reciprocating stroke of the movable part 5 relative to the fixed part 4 in the first direction can be changed by changing the size of the third long hole 55 in the first direction.

[0054] In order to improve the guiding property of the reciprocating movement of the moving member 5 relative to the fixed member 4 in the first direction, a guide rail 6 is provided between the moving member 5 and the fixed member 4, and the guide rail 6 extends in the first direction. In some embodiments, in order to reduce the displacement of the moving member 5 in the plane perpendicular to the first direction and improve the accuracy and sensitivity of the anti-collision device 3, the guide rail 6 is provided to adopt a cross ball guide rail with high processing accuracy, and the guide rail 6 includes a first track 61, a second track 62, and a rolling assembly and a rolling member (not shown in the figure) between the first track 61 and the second track 62, the first track 61 is connected to the fixed member 4, the second track 62 is connected to the moving member 5, and the first track 61 and the second track 62 are arranged at intervals in the second direction, and the second direction is perpendicular to the first direction.

[0055] In order to reduce the displacement of the movable member 5 in the second direction, a tightening structure 9 is further provided in the anti-collision device 3. The tightening structure 9 tightens the guide rail 6 in the second direction. The arrangement direction of the tightening structure 9 and the guide rail 6 is perpendicular to the arrangement direction or connection direction of the guide rail 6 and the fixed member 4 and the movable member 5, which helps to reduce the gap between the first rail 61 and the second rail 62 in the second direction, and ensures that the movable member 5 only moves back and forth in the up and down directions relative to the fixed member 4.

[0056] Please refer to Figure 3 The tightening structure 9 is arranged on the side of the first rail 61 facing away from the second rail 62 in the second direction, or can also be arranged on the side of the second rail 62 facing away from the first rail 61. The tightening structure 9 is connected to the fixing member 4, or the tightening structure 9 can also be arranged to be connected to the moving member 5. The tightening structure 9 can be pressed against the first rail 61 or the second rail 62 in the second direction to minimize the gap between the first rail 61 and the second rail 62 and improve the guiding accuracy of the guide rail 6 in the first direction.

[0057] In some embodiments, since the first track 61 is connected to the fixed member 4 and the second track 62 is connected to the movable member 5, it can be arranged that the fixed member 4 has a fixed connection portion 41 located on the first track 61 and facing away from the second track 62, and the movable member 5 has a movable connection portion 51 located on the second track 62 and facing away from the first track 61 in the second direction. The tightening structure 9 can be connected to the movable connection portion 51 to tighten against the second track 62 on one side in the second direction, or can also be connected to the fixed connection portion 41 to tighten against the first track 61 on the other side in the second direction, which can reduce the gap between the first track 61 and the second track 62, thereby improving the guiding accuracy of the guide rail 6, and improving the anti-collision accuracy and sensitivity of the anti-collision device 3.

[0058] In some embodiments, the tightening structure 9 may include a pin connected to the fixed connection part 41 or the movable connection part 51. The pin may be extended in the second direction, or the extension direction of the pin may have an angle less than 90° with the second direction. The pin may be tightened on the corresponding first rail 61 or second rail 62 in the second direction by external force.

[0059] In some embodiments, in order to improve the reliability of the jacking structure 9, the jacking force between the jacking structure 9 and the guide rail 6 is adjustable to further reduce the gap between the first track 61 and the second track 62. The jacking structure 9 is provided to include a jacking screw, which is extended in the second direction and is threadedly connected to the fixing member 4 or the moving member 5. The jacking screw can be screwed to increase the degree of jacking of the jacking screw to the second track 61 or the second track 62 as much as possible.

[0060] For some examples, please refer to Figure 3 , the movable member 5 can be arranged with the fixed member 4 in the third direction, the first direction, the second direction and the third direction are perpendicular to each other, and the object lens is clamped and fixed to the middle position of the movable member 5 in the second direction. The guide rail 6 is provided with two, and the two guide rails 6 are arranged on both sides of the object lens in the second direction to improve the guiding accuracy of the movable member 5 moving relative to the fixed member 4 in the first direction. Among the two guide rails 6, the first track 61 is close to the object lens in the second direction, and the second track 62 is far away from the object lens. The two guide rails 6 are both configured with a movable connecting portion 51 and a fixed connecting portion 41, so that the fixed member 4, the movable member 5 and the two guide rails 6 form a symmetrical structure, the two movable connecting portions 51 are arranged at the two ends of the movable member 5 in the second direction, and the two movable connecting portions 51 are integrally formed, and the two fixed connecting portions 41 are located between the two guide rails 6 in the second direction, and the two fixed connecting portions 41 are integrally formed.

[0061] The clamping structure 9 can be connected only to the movable connecting part 51 corresponding to one of the guide rails 6. When the clamping structure 9 is clamped on the second track 62 of one of the guide rails 6, the movable part 5 can move toward the side where the clamping structure 9 is located relative to the fixed part 4 and the guide rail 6 in the second direction during the clamping process of the clamping structure 9. In this way, the gap between the second track 62 of the other guide rail 6 and the movable connecting part 51 corresponding thereto can be reduced. The second track 62 of the other guide rail 6 can move toward the first track 61 under the pressing action of the movable connecting part 51 corresponding thereto, thereby reducing the gap between the first track 61 and the second track 62 of the other guide rail 6. Therefore, the gap between the first track 61 and the second track 62 of the two guide rails 6 arranged in the second direction is reduced only under the clamping action of the clamping structure 9 on one side, thereby improving the guiding accuracy of the movable part 5 relative to the fixed part 4.

[0062] In other embodiments, the tightening structure 9 may be connected only to the fixed connection part 41 corresponding to one of the guide rails 6. In this way, during the process of the tightening structure 9 tightening the first track 61 in one of the guide rails 6, the movable member 5 can move relative to the fixed member 4 in the tightening direction, thereby reducing the distance between the second track 62 in the other guide rail 6 and the movable connection part 51 corresponding thereto. Under the squeezing action of the movable connection part 51, the gap between the second track 62 and the first track 61 in the other guide rail 6 can be reduced. In this way, the gap between the first track 61 and the second track 62 in the two guide rails 6 arranged in the second direction can be reduced only under the tightening action of the tightening structure 9 on one side, thereby improving the guiding accuracy of the movable member 5 relative to the fixed member 4.

[0063] In some embodiments, multiple tightening structures 9 may be connected to the fixed connection part 41 or the movable connection part 51, and the multiple tightening structures 9 may be arranged at intervals in the first direction to ensure that the gap between the first rail 61 and the second rail 62 is evenly arranged in the first direction.

[0064] In some embodiments in which one or more clamping structures 9 acting on the same guide rail 6 are arranged in the first direction, the anti-collision structure also includes an extrusion member (not shown in the figure), which has a fitting surface that fits with the first rail 61, and the fitting surface is perpendicular to the second direction. The extrusion member can be arranged between the clamping structure 9 and the first rail 61 in the second direction, and the clamping force acting on the first rail 61 in the first direction can be dispersed by the extrusion member, so that the gap between the first rail 61 and the second rail 62 is evenly arranged in the first direction.

[0065] Of course, the extrusion piece can also be arranged between the clamping structure 9 and the second rail 62. The extrusion piece has a fitting surface that fits with the second rail 62, and the fitting surface is perpendicular to the second direction. The clamping force acting on the second rail 62 in the first direction can be dispersed by the extrusion piece, so that the gap between the first rail 61 and the second rail 62 is evenly arranged in the first direction.

[0066] The first track 61 and the second track 62 both have an outer side surface perpendicular to the second direction, and the extrusion piece can be fitted with the outer side surface. The extrusion piece is a gasket with relatively high hardness so that the extrusion piece can evenly disperse the extrusion force transmitted to the first track 61 or the second track 62.

[0067] Of course, in a structure where the tightening structures 9 are arranged densely in the first direction, the extrusion piece may be omitted.

[0068] Only the above-mentioned tightening structure 9 can reduce the displacement of the movable part 5 relative to the fixed part 4 in the second direction. In some embodiments, in order to further improve the guiding accuracy of the movable part 5 moving in the first direction relative to the fixed part 4, thereby improving the anti-collision accuracy and sensitivity of the anti-collision device 3, in some embodiments, at least one of the fixed part 4 and the movable part 5 is detachably connected to the guide rail 6 in the third direction. In this way, while ensuring that there is a small gap between the first track 61 and the second track 62 in the guide rail 6 in the second direction, the assembly gap between the movable part 5, the guide rail 6 and the fixed part 4 in the third direction can be further reduced.

[0069] For some examples, please refer to Figure 3 The fixing member 4 has a fixing main body portion 42 connected to the fixing connecting portion 41, the fixing main body portion 42 and the guide rail 6 are arranged in the third direction, the fixing main body portion 42 has a first mounting surface that fits with the first track 61 in the guide rail 6, and the first mounting surface is perpendicular to the third direction. The fixing main body portion 42 is detachably connected to the first track 61 by a first connecting screw. After the first connecting screw passes through the through hole on the fixing main body portion 42 and is locked with the first track 61, the first mounting surface fits with the first track 61, which helps to reduce the gap between the fixing member 4 and the guide rail 6 in the third direction.

[0070] Correspondingly, the movable part 5 can also be provided with a movable main body part 52 connected to the movable connecting part 51, the movable main body part 52 and the guide rail 6 are arranged in the third direction, the movable main body part 52 has a second mounting surface that fits with the second track 62 in the guide rail 6, and the second mounting surface is perpendicular to the third direction, the movable main body part 52 is detachably connected to the second track 62 by a second connecting screw, and after the second connecting screw passes through the through hole 54 on the movable main body part 52 and is locked with the second track 62, the second mounting surface fits with the second track 62, which helps to reduce the gap between the movable part 5 and the guide rail 6 in the third direction.

[0071] Specifically, during the assembly process of the anti-collision device 3, while the movable part 5, the fixed part 4 and the guide rail 6 are connected, the first connecting screw and the second connecting screw can be loosened first to ensure that the fixed part 4, the movable part 5 and the guide rail 6 are not separated, so that the tightening structure 9 is tightened on one side of the guide rail 6 in the second direction to reduce the gap between the first track 61 and the second track 62 of the two guide rails 6. After the tightening structure 9 tightens the guide rail 6, the first connecting screw and the second connecting screw are locked to reduce the gap between the movable part 5, the guide rail 6 and the fixed part 4 in the third direction. This can meet the high-precision assembly of the anti-collision device 3 and help ensure the guiding movement accuracy of the movable part 5 relative to the fixed part 4 in the first direction, thereby improving the anti-collision accuracy and sensitivity of the anti-collision device 3.

[0072] The present application also provides an assembly method of the anti-collision device 3 in the above embodiment, and the assembly method includes at least the following steps:

[0073] Connect the guide rail 6 between the fixed part 4 and the movable part 5;

[0074] The moving member 5 is connected to the fixing member 4 by means of mounting screws so as to be reciprocatably movable in a first direction.

[0075] In some embodiments, in order to improve the guiding movement accuracy of the moving member 5 and the fixed member 4, the guide rail 6 is set to be a cross ball guide rail, and the guide rail 6 includes a first track 61, a rolling member, and a second track 62 arranged in sequence in the second direction. The first track 61 can be connected to the fixed member 4 through a first connecting screw, and the second track 62 in the guide rail 6 can be connected to the moving member 5 through a second connecting screw. The first connecting screw and the second connecting screw both extend in the third direction, so that the guide rail 6 is connected between the fixed member 4 and the moving member 5 in the third direction. In other embodiments, the first track 61 and the second track 62 can also be connected to the corresponding fixed member 4 and the moving member 5 by snap-fit ​​or interference fit.

[0076] In some embodiments, a third long hole 55 is provided on the movable member 5 or the fixed member 4, and the third long hole 55 is extended in the first direction, and the mounting screw is extended in the third direction. The screw portion of the mounting screw passes through the third long hole 55 and is locked with the movable member 5 or the fixed member 4. In this way, during the reciprocating movement of the movable member 5 relative to the fixed member 4 in the first direction, the mounting screw can move in the third long hole 55, and can be abutted against the mounting screw in the first direction through the hole wall of the third long hole 55 to limit the reciprocating movement of the movable member 5 relative to the fixed member 4 in the first direction. In this way, the connection between the movable member 5 and the fixed member 4 is realized, and the reciprocating guided movement of the movable member 5 relative to the fixed member 4 in the first direction is realized.

[0077] In some embodiments in which a tightening structure 9 is connected to the fixed member 4 or the movable member 5 of the anti-collision device 3, and the tightening structure 9 abuts against the first rail 61 or the second rail 62 in the second direction, in the method for assembling the anti-collision device 3, the step of connecting the guide rail 6 between the fixed member 4 and the movable member 5 includes:

[0078] Connect the first rail 61 to the fixed member 4 through the first connecting screw, connect the second rail 62 to the movable member 5 through the second connecting screw, and keep the first connecting screw and the second connecting screw in a connected but unlocked state;

[0079] Connect the pressing structure 9 to the moving member 5 or the fixing member 4, so that the pressing structure 9 is pressed against the first track 61 or the second track 62 in the second direction;

[0080] Tighten the first connecting screw and the second connecting screw.

[0081] In the embodiment in which the fixed member 4 has a fixed connection portion 41 and a fixed main body portion 42, and the movable member 5 has a movable connection portion 51 and a movable main body portion 52, since the fixed connection portion 41 and the movable connection portion 51 are arranged on both sides of the guide rail 6 in the second direction, and the movable main body portion 52 and the fixed main body portion 42 are arranged on both sides of the guide rail 6 in the third direction, in the process of connecting the guide rail 6 with the fixed member 4 and the movable member 5, the first rail 61 is connected to the fixed main body portion 42 by the first connecting screw, and the second rail 62 is connected to the movable main body portion 52 by the second connecting screw, and the first connecting screw and the second connecting screw are kept in a connected but unlocked state. In this state, the movable member 5 and the fixed member 4 are not completely fixed relative to each other, and the movable member 5 can move relative to the fixed member 4 in the first direction, the second direction or the third direction.

[0082] Furthermore, when the first connecting screw and the second connecting screw are in a connected but not locked state, a tightening structure 9 is connected to the fixed connecting portion 41 of the fixed member 4 or the movable connecting portion 51 of the movable member 5. In an embodiment in which the tightening structure 9 includes a jacking screw and the jacking screw extends in the second direction, the jacking screw is screwed so that the jacking screw is tightened on the first track 61 or the second track 62 in the second direction. In this way, the gap between the first track 61 and the second track 62 in the guide rail 6 can be reduced in the second direction. During the reciprocating movement of the movable member 5 relative to the fixed member 4 in the first direction, the relative movement of the first track 61 and the second track 62 in the second direction can be reduced, thereby improving the guiding movement accuracy of the movable member 5 relative to the fixed member 4.

[0083] Of course, in the embodiment where the tightening structure 9 includes a pin, when the first connecting screw and the second connecting screw are in a connected but not locked state, the pin is wedged or tightened so that the pin is tightened on the first rail 61 or the second rail 62 in the second direction.

[0084] After the tightening structure 9 is tightened on the first rail 61 or the second rail 62 in the second direction, the first connecting screw and the second connecting screw are locked so that the first mounting surface on the fixed main body 42 that is perpendicular to the third direction fits with the first rail 61, and the second mounting surface on the movable main body 52 that is perpendicular to the third direction fits with the second rail 62. In this way, the assembly gap between the movable part 5, the guide rail 6 and the fixed part 4 in the third direction can be reduced, and the relative movement of the movable part 5 and the fixed part 4 in the third direction can be reduced during the reciprocating movement of the movable part 5 relative to the fixed part 4 in the first direction, thereby further improving the guiding movement accuracy of the movable part 5 relative to the fixed part 4.

[0085] In some embodiments, before the guide rail 6 is connected between the fixed member 4 and the movable member 5, or after the movable member 5 is connected to the fixed member 4 so as to be reciprocatingly movable in the first direction by installing screws, the assembly method of the anti-collision device 3 further includes:

[0086] One of the first conductive member 71 and the second conductive member 72 is mounted on the fixed member 4 , and the other is mounted on the movable member 5 . The control module is mounted on the detection head 2 of the optical detection device or on the fixed member 4 .

[0087] As in one embodiment, the conductive contact 713 in the first conductive component 71 can be installed on the connecting block 711, and the connecting block 711 can be installed on the fixing component 4 through connecting bolts. The connecting bolts pass through the first long hole 712 on the connecting block 711 and are connected to the fixing component 4 to achieve the installation of the entire first conductive component 71 on the fixing component 4.

[0088] The conductive plate in the second conductive member 72 is mounted on the moving member 5 , and the second conductive member 72 and the first conductive member 71 are arranged correspondingly in a plane perpendicular to the first direction.

[0089] After the first conductive member 71 is connected to the fixed member 4 and the second conductive member 72 is connected to the movable member 5, the position of the connecting bolt in the first long hole 712 is adjusted to ensure that the distance between the first conductive member 71 and the second conductive member 72 is less than the moving stroke of the movable member 5 relative to the fixed member 4 in the first direction.

[0090] In an embodiment in which the anti-collision device 3 includes a pull rod assembly 8, after the movable member 5 is connected to the fixed member 4 so as to be reciprocatable in the first direction by installing screws, the assembly method of the anti-collision device 3 further includes:

[0091] The elastic member 81 is connected between the fixed member 4 and the movable member 5 , and the elastic force exerted by the elastic member 81 on the movable member 5 is kept away from the product to be tested in the first direction.

[0092] Specifically, the first fixed block 82 is fixed on the fixed member 4, the second fixed block 83 is fixed on the movable member 5, the first connecting end 811 of the elastic member 81 is connected to the first fixed block 82, and the second connecting end 812 is connected to the second fixed block 83, so that the elastic member 81 is installed between the fixed member 4 and the movable member 5.

[0093] In some embodiments where a connecting member 53 is provided on the moving member 5, during the process of connecting the second fixed block 83 with the moving member 5, the connecting member 53 is first installed on the moving member 5, and then the connecting bolt is passed through the second long hole 531 on the connecting member 53 to connect the connecting bolt to the connecting member 53; after the two connecting ends of the elastic member 81 are respectively connected to the corresponding fixed blocks, the position of the connecting bolt in the second long hole 531 is changed to ensure that the elastic force applied by the elastic member 81 to the moving member 5 is away from the product to be tested in the first direction, and finally the connecting bolt is locked, so that the pull rod assembly 8 is installed between the fixed member 4 and the moving member 5.

[0094] The present application also provides an optical detection device, which may be a confocal microscope, or a white light interferometer, or other devices that use optical principles to detect the product under test. Figure 1 The optical inspection device includes a base 1, a detection head 2, a driving mechanism (not shown in the figure) and an anti-collision device 3 in any of the above-mentioned embodiments. A moving platform 11 for placing a product to be tested is provided on the base 1. The detection head 2 is installed on the base 1 through a driving mechanism. The control module in the anti-collision device 3 is electrically connected to the driving mechanism. The control module can drive the detection head 2 to reciprocate in the first direction relative to the base 1, that is, in the up and down directions through the driving mechanism. When the control module controls the driving mechanism to drive the detection head 2 to move downward, when the first conductive member 71 and the second conductive member 72 in the anti-collision device 3 are conductively connected, the control module controls the driving mechanism to stop the detection head 2 from moving downward, or the control module controls the driving mechanism to drive the detection head 2 to move upward, so as to reduce the probability of the objective lens being damaged, or even prevent the product to be tested or the moving platform 11 on the base 1 from touching the objective lens.

[0095] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not used to limit the present invention. For those skilled in the art to which the present invention belongs, some simple deductions, modifications or substitutions can be made according to the idea of ​​the present invention.

Claims

1. An anti-collision device, characterized in that: include: A fixing part, installed and fixed on a detection head of an optical detection device; A moving part, used to be connected to the objective lens, the moving part is connected to the fixed part, the moving part reciprocates relative to the fixed part in a first direction via a guide rail, and the first direction is the moving direction of the detection head; A trigger component includes a first conductive member, a second conductive member and a control module, at least one of the first conductive member and the second conductive member is electrically connected to the control module, the control module is used to control the detection head to move back and forth in the first direction, one of the first conductive member and the second conductive member is located on the fixed member, and the other is located on the movable member, and the first conductive member and the second conductive member can be electrically connected when the movable member moves toward the fixed member.

2. The anti-collision device according to claim 1, characterized in that: The guide rail comprises a first track, a second track and a rolling member rollingly assembled between the first track and the second track, the first track is connected to the fixed member, the second track is connected to the movable member, the first track and the second track are arranged at intervals in a second direction, and the second direction is perpendicular to the first direction; The fixing member or the moving member is connected with a tightening structure, and the tightening structure is located on a side of one of the first track and the second track facing away from the other, and the tightening structure abuts against the first track or the second track in the second direction.

3. The anti-collision device according to claim 2, characterized in that: The tightening structure comprises a jack screw, and the jack screw is extended and arranged in the second direction; The fixing member has a fixing connection portion connected to the top screw, and in the second direction, the fixing connection portion is located on the side of the first track facing away from the second track; or, the moving member has a moving connection portion connected to the top screw, and the moving connection portion is located on the side of the second track facing away from the first track.

4. The anti-collision device according to claim 2, characterized in that: The anti-collision device includes an extrusion member; The extrusion member has a fitting surface that fits with the first track, and the extrusion member is located between the tightening structure and the first track in the second direction; or, the extrusion member has a fitting surface that fits with the second track, and the extrusion member is located between the tightening structure and the second track in the second direction.

5. The anti-collision device according to claim 2, characterized in that: At least one of the fixed member and the movable member is detachably connected to the guide rail in a third direction, and the third direction is perpendicular to the first direction and the second direction; The fixing member and / or the moving member detachably connected to the guide rail has a mounting surface that fits the guide rail, and the mounting surface is perpendicular to the third direction.

6. The anti-collision device according to any one of claims 1 to 5, characterized in that: The anti-collision device includes a pull rod assembly, the pull rod assembly includes an elastic member, the elastic member is connected between the fixed member and the movable member, and the elastic member can apply an elastic force to the movable member in the first direction away from the product to be tested.

7. The anti-collision device according to claim 6, characterized in that: The elastic member has a first connecting end connected to the fixed member and a second connecting end connected to the movable member; the position of the first connecting end on the fixed member is adjustable, and / or the position of the second connecting end on the movable member is adjustable.

8. An assembly method of the anti-collision device according to claim 1, characterized in that: include: Connecting the guide rail between the fixed member and the movable member; The movable member is connected to the fixed member so as to be reciprocatably movable in the first direction by installing screws.

9. The method for assembling the anti-collision device according to claim 8, characterized in that: The guide rail comprises a first track, a rolling member, and a second track arranged in sequence in the second direction, the first track is connected to the fixed member by a first connecting screw, the second track is connected to the movable member by a second connecting screw, the first connecting screw and the second connecting screw both extend in a third direction, and the third direction, the second direction, and the first direction are perpendicular to each other; a tightening structure is connected to the fixed member or the movable member, and the tightening structure abuts against the first track or the second track in the second direction; The step of connecting the guide rail between the fixed member and the movable member comprises: Connect the first rail to the fixed member through the first connecting screw, connect the second rail to the movable member through the second connecting screw, and keep the first connecting screw and the second connecting screw in a connected but not locked state; Connecting a tightening structure to the movable member or the fixed member so that the tightening structure is tightened on the first track or the second track in the second direction; Tighten the first connecting screw and the second connecting screw.

10. An optical detection device, characterized in that: It includes a base, a detection head, a driving mechanism and an anti-collision device as described in any one of claims 1 to 7, the detection head is installed on the base through the driving mechanism, the driving mechanism can drive the detection head to reciprocate in the first direction relative to the base, the anti-collision device is installed on the detection head, and the driving mechanism is electrically connected to the control module.

Images