Spiral resonator used in vacuum cavity

Abstract

The invention provides a spiral resonator used in a vacuum cavity, which specifically comprises a mounting base, a shell, a power mechanism, a mutual inductance adjusting mechanism, a main coil and a coupling coil, and is characterized in that the mounting base is mounted in the vacuum cavity of an ion trap system, and the shell is fixed on the mounting base and is used for fixing the spiral resonator; the mutual inductance adjusting mechanism, the main coil and the coupling coil are all arranged in the shell; the power mechanism is arranged outside the vacuum cavity, and the power output end of the power mechanism penetrates into the vacuum cavity and is used for driving the mutual inductance adjusting mechanism to adjust the relative distance between the main coil and the coupling coil, so that the output impedance of the spiral resonator is changed. And the distance between the main coil and the coupling coil is directly adjusted in the vacuum cavity, so that radio frequency loss and Q factor reduction are avoided.

Description

Technical Field

[0001] The invention belongs to the technical field of resonators for ion traps, and in particular relates to a spiral resonator used in a vacuum cavity. Background Art

[0002] In recent years, my country's quantum computing field has developed rapidly, and innovative achievements have been reported frequently. Quantum computers can realize the manipulation of quantum bits (qubits) through ion traps, and obtain computing efficiency far exceeding that of traditional computers. The ion trap vacuum chamber is an important part of the ion trap laboratory. It is an experimental environment with high vacuum, low temperature and strong control ability. It can be used for laser cooling of ions and atoms, quantum computing, nuclear physics experiments and many other research. The design and production of ion trap vacuum chambers has become one of the hot spots in ion trap technology research.

[0003] The ion trap vacuum chamber is generally composed of a vacuum system and an ion trap. The vacuum system includes a vacuum pump, a pneumatic valve, a spiral resonator, etc. In the ion trap, the trapped ions are mainly achieved through two pairs of electrodes, namely, direct current electrodes (i.e., DC electrodes) and radio frequency electrodes (i.e., RF electrodes). The RF signal (i.e., radio frequency signal) is amplified by the signal source through the radio frequency amplifier and coupled into the spiral resonator in the vacuum chamber, and then applied to the radio frequency electrode of the ion trap. The spiral resonator is mainly composed of a main coil and a coupling coil. Its main function is voltage gain and filtering, and it is used to impedance match the RF source end with the circuit composed of the trap capacitor.

[0004] However, in the prior art, the distance between the main coil and the coupling coil in the spiral resonator of the vacuum cavity is usually fixed, so the mutual inductance between them is also fixed. But in actual situations, the impedance matching between the main coil and the coupling coil requires adjusting the mutual inductance between the main coil and the coupling coil. The usually adopted method is to perform impedance matching through an external adjustable capacitor group, but this method will cause RF loss and a decrease in Q factor, thereby reducing the filtering effect of the spiral resonator, and ultimately affecting the ion trapping effect. Therefore, it is urgent to design a spiral resonator for use in a low-temperature trap to avoid RF loss and a decrease in Q factor. Summary of the invention

[0005] In view of the above problems, the present invention provides a spiral resonator for use in a vacuum cavity, the spiral resonator comprising: a mounting base, a housing, a power mechanism, a mutual inductance adjustment mechanism, a main coil and a coupling coil, wherein:

[0006] The mounting base is mounted in the vacuum chamber of the ion trap system, and the housing is fixed on the mounting base to fix the helical resonator;

[0007] The mutual inductance adjustment mechanism, the main coil and the coupling coil are all arranged inside the housing;

[0008] The power mechanism is arranged outside the vacuum chamber, and the power output end of the power mechanism penetrates into the vacuum chamber to drive the mutual inductance adjustment mechanism to adjust the relative distance between the main coil and the coupling coil, so as to change the output impedance of the spiral resonator.

[0009] Furthermore, the power mechanism is installed on the outer side or bottom of the vacuum chamber.

[0010] Furthermore, the mutual inductance adjustment mechanism includes a moving component and a coupling platform arranged on the moving component, wherein the coupling coil is arranged on the coupling platform.

[0011] Furthermore, the mutual inductance adjustment mechanism includes a connecting component for connecting the power output end of the power mechanism and the moving component.

[0012] Furthermore, a limit seat is provided on the upper surface of the mounting base, a bottom rail groove is provided at the bottom of the limit seat, and bottom rails are respectively installed on two opposite side walls of the bottom rail groove.

[0013] Furthermore, when the power mechanism is installed on the outer wall of the vacuum chamber, the upper surface of the limit seat is provided with a ring platform with an opening, and the bottom rail groove is communicated with the opening of the ring platform.

[0014] Furthermore, the moving assembly includes a first slider and a connecting plate, wherein:

[0015] The first slider is arranged between the two bottom rails and can slide between the bottom rails. The coupling platform is slidably or fixedly connected to the first slider. The connecting plate is connected to one end of the first slider. The other end of the connecting plate passes through the opening and is connected to the connecting component.

[0016] Furthermore, when the coupling platform is fixedly connected to the first slider, the moving assembly also includes a fine-tuning mechanism, which is used to enable the coupling platform to move in a second direction when the first slider drives the coupling platform to move in the first direction, so as to change the output impedance of the spiral resonator, wherein the first direction and the second direction are different directions.

[0017] Further, when the coupling platform is slidably connected to the first slider, the moving assembly includes a tilting block, and the coupling platform is slidably connected to the first slider through the tilting block, wherein:

[0018] When the first slider moves, the coupling platform moves, and the moving direction is perpendicular to the moving direction of the first slider.

[0019] Furthermore, the tilting block is mounted on the first sliding block, and a first sliding groove is provided on the tilting block, and an inclined groove is provided on the bottom of the coupling platform;

[0020] The connecting surface of the inclined groove is parallel to the groove bottom surface of the first slide groove, the angle between the groove bottom surface of the first slide groove and the surface of the first slider is greater than 0, the connecting surface is connected to the second slider, and the second slider is installed in the first slide groove;

[0021] A skirt is arranged around the outer periphery of the bottom of the coupling platform, and a movable first guide rod is arranged on the skirt. The first guide rod is also fixedly connected to the bottom rail.

[0022] Furthermore, when the power mechanism is installed at the bottom of the vacuum chamber, the bottom of the coupling platform is arranged between the two bottom rails and connected to the output end of the power mechanism, and a movable guide column is arranged around the outer periphery of the bottom of the coupling platform, and the guide column is also fixedly connected to the bottom rail.

[0023] Furthermore, the power mechanism comprises: a vacuum bellows, a guide assembly and a power output assembly, wherein the vacuum bellows and the power output assembly are both mounted on the guide assembly, wherein:

[0024] The power output end of the power output assembly penetrates into the vacuum bellows and is sealed by the vacuum bellows, and also penetrates into the vacuum cavity to be transmission-connected with the mutual inductance adjustment mechanism, and the guide assembly is installed on the vacuum cavity.

[0025] Furthermore, the connecting assembly includes a connecting rod, a sleeve and a connecting block, the connecting rod is connected to the first slider, the connecting rod is provided with the sleeve, the sleeve is sleeved on the connecting rod, the top of the sleeve is provided with the connecting block, the connecting block is provided with a threaded hole, and the threaded hole is connected to the power output end of the power mechanism.

[0026] Furthermore, the fine adjustment structure is arranged between the coupling platform and the first slider, and includes a boss, a third guide rod and a third slider, wherein:

[0027] The upper surfaces of the two bottom rails are provided with the above-mentioned bosses, and the upper surfaces of the bosses are provided with first sliding grooves;

[0028] The third sliders are provided on the lower side walls on both sides of the coupling platform, the two third sliders are respectively installed in the two first slide grooves, and the first sliders are provided with the multiple third guide rods, and the coupling platform is provided with multiple guide rod holes adapted to the third guide rods, and the multiple third guide rods are inserted into the multiple guide rod holes.

[0029] Furthermore, the fine adjustment structure includes a first rack, a second rack and a coaxial double gear, wherein:

[0030] The first rack is arranged on the bottom rail, the second rack is arranged on the coupling platform, a plurality of fourth guide rods are arranged on the first slider, a plurality of guide rod holes adapted to the fourth guide rods are arranged on the coupling platform, the plurality of fourth guide rods are inserted into the plurality of guide rod holes, a coaxial double gear is arranged on one of the fourth guide rods, the coaxial double gear is meshed with the first rack, and can also mesh with the second rack when the first slider moves to a specified position.

[0031] Furthermore, the guide assembly includes a fixing member, a second guide rod and a guide plate, wherein the fixing member and the fixing plate are fixedly connected via a plurality of the second guide rods, one end of the vacuum bellows is fixed to the fixing member, and one end of the vacuum bellows is disposed on the second guide rod and can slide on the second guide rod.

[0032] Furthermore, the power output assembly includes a first push plate, a threaded rod, a nut, a second push plate, a fixing plate and a telescopic rod, wherein:

[0033] A flange connected to the second push plate is connected to the other end of the vacuum bellows, and the first push plate is connected to the flange. The guide plate is sleeved on multiple second guide rods and fixedly connected to the flanges. One end of the threaded rod passes through the fixed plate and is fixedly connected to the first push plate. The other end of the threaded rod is sleeved with the nut, which can be limited by the fixed plate. The telescopic rod and the second push plate are located inside the vacuum bellows, and one end of the telescopic rod is connected to the second push plate, and the other end of the telescopic rod serves as the power output end of the power mechanism.

[0034] The present invention provides a spiral resonator for use in a vacuum chamber. By cooperating with a power mechanism and a mutual inductance adjustment structure, the distance between a main coil and a coupling coil can be directly adjusted in the vacuum chamber to avoid radio frequency loss and a decrease in the Q factor. Furthermore, through a fine adjustment mechanism, the coupling stage can be moved up and down while being moved laterally, thereby changing the output impedance of the spiral resonator.

[0035] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures pointed out in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0037] Figure 1A schematic structural diagram of a vacuum chamber according to an embodiment of the present invention is shown;

[0038] Figure 2 A schematic diagram of the structure of a spiral resonator according to an embodiment of the present invention is shown;

[0039] Figure 3 A schematic diagram of the structure of a spiral resonator according to an embodiment of the present invention is shown;

[0040] Figure 4 A schematic diagram showing the structure of a moving component in one direction according to an embodiment of the present invention is shown;

[0041] Figure 5 A schematic diagram showing the structure of a moving component in another direction according to an embodiment of the present invention is shown;

[0042] Figure 6 It shows a schematic diagram of the overall structure of a power mechanism according to an embodiment of the present invention;

[0043] Figure 7 A partial structural schematic diagram of a power mechanism according to an embodiment of the present invention is shown;

[0044] Figure 8 It shows a structural schematic diagram of Example 1 according to an embodiment of the present invention;

[0045] Fig. 9 The embodiment of the present invention is shown Figure 8 The structural diagram on the left side;

[0046] Fig.10 It shows a structural schematic diagram of Example 2 according to an embodiment of the present invention;

[0047] Fig.11 The embodiment of the present invention is shown Fig.10 The structural diagram at B in the middle;

[0048] Fig.12 It shows a structural schematic diagram of a moving component in one direction when the coupling platform is slidably connected with the first sliding block according to an embodiment of the present invention;

[0049] Fig.13 The embodiment of the present invention is shown Fig.12 The schematic diagram of the structure of the mobile component on the back;

[0050] Fig.14 A schematic structural diagram showing a power mechanism according to an embodiment of the present invention when it is installed on the bottom of a vacuum chamber;

[0051] Fig.15 A schematic structural diagram of a guide column when a power mechanism according to an embodiment of the present invention is installed on the bottom of a vacuum chamber is shown. DETAILED DESCRIPTION

[0052] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] like Figure 1 As shown, the present invention provides a spiral resonator for use in a vacuum chamber, the spiral resonator comprising: a mounting base 2, a housing 3, an upper cover 4, a power mechanism 5, a mutual inductance adjustment mechanism 6, a main coil 7 and a coupling coil 8. A detailed description is given below.

[0054] like Figure 2 As shown, the upper cover 4 and the mounting base 2 are respectively installed at the upper and lower ends of the outer shell 3, wherein the mounting base 2 is installed in the vacuum chamber 1 of the ion trap system for fixing the spiral resonator, and the upper cover 4 is used to install the ion trap chip of the ion trap system.

[0055] In some embodiments of the present invention, the mutual inductance adjustment mechanism 6, the main coil 7 and the coupling coil 8 are all arranged inside the outer shell 3; the power mechanism 5 is arranged outside the vacuum chamber 1, and is used to drive the mutual inductance adjustment mechanism to adjust the relative distance between the main coil 7 and the coupling coil 8, so that the output impedance of the spiral resonator changes.

[0056] In addition, in some embodiments of the present invention, the power mechanism is installed on the outer side or bottom of the vacuum chamber, wherein, regardless of whether the power mechanism is installed on the outer side or bottom of the vacuum chamber, the mutual inductance adjustment mechanism 6 includes a moving component 62 and a coupling platform 61 disposed on the moving component 62, wherein the coupling coil 8 is disposed on the coupling platform 61, wherein the coupling coil 8 is disposed on the coupling platform 61, and the coupling coil 8 is spirally wound on the coupling platform 61, and the coupling coil 8 is mutually coupled with the main coil 7 disposed inside the housing 3. The mutual inductance adjustment mechanism 6 includes a connecting component 9, which is used to connect the power output end of the power mechanism 5 and the moving component. A limit seat 21 is disposed on the upper surface of the mounting base 2, and a bottom rail groove 22 is provided at the bottom of the limit seat 21, and bottom rails 621 are respectively installed on two opposite side walls of the bottom rail groove 22.

[0057] The following describes the power mechanism installed on the outer side or bottom of the vacuum chamber in the present invention. When the power mechanism is installed on the outer wall of the vacuum chamber, in some embodiments of the present invention, such as Figure 3As shown, the upper surface of the mounting base 2 is provided with a limit seat 21, the upper surface of the limit seat 21 is provided with a ring platform 23 with an opening 24, and the bottom of the limit seat 21 is provided with a bottom rail groove 22, and the bottom rail groove 22 is communicated with the opening 24 of the ring platform 23. The following is a detailed description of how to control the movement.

[0058] In some embodiments of the present invention, Figure 4 and Figure 5 As shown, the moving component 62 includes a first slider 622 and a connecting plate 623, wherein the first slider 622 is arranged between two bottom rails 621 and can slide between the bottom rails 621; the connecting plate 623 is connected to one end of the first slider 622, and the other end of the connecting plate 623 passes through the opening 24 and is connected to the connecting component 9, and the coupling platform 61 is slidably or fixedly connected to the first slider 622.

[0059] In some embodiments of the present invention, the coupling platform 61 is slidably or fixedly connected to the first slider 622, and the moving assembly 62 also includes a ball stop plate 624 and a ball 625, wherein the two side edges of the first slider 622 are provided with the ball stop plate 624, one end of the ball stop plate 624 is connected to the other end of the first slider 622, and the ball 625 is installed on the ball stop plate 624 and slides between the side wall of the corresponding bottom rail groove 22.

[0060] In some embodiments of the present invention, when the coupling platform 61 is fixedly connected to the first slider 622, the coupling platform 61 can be controlled to move simply by controlling the movement of the first slider 622, thereby adjusting the relative lateral distance between the main coil 7 and the coupling coil 8 to change the output impedance of the spiral resonator.

[0061] In addition, in the present invention, the distance between the coupling coil 8 and the main coil 7 is adjusted by moving the coupling platform 61, and finally the mutual inductance between the two is adjusted. However, this adjustment may face the situation of insufficient mutual inductance when the load of the spiral resonator is large, so a more precise adjustment method is required, that is, by controlling the coupling platform 61 to move up and down when it is directly below the main coil 7, the distance between the coupling coil 8 and the main coil 7 can be finally adjusted, and finally the mutual inductance between the coupling coil 8 and the main coil 7 can be more accurately adjusted. The method of controlling the distance between the coupling coil 8 and the main coil 7 is described in detail below.

[0062] In some embodiments of the present invention, the moving assembly 62 further includes a fine adjustment mechanism, through which the distance between the coupling coil 8 and the main coil 7 can be more accurately adjusted. The fine adjustment mechanism is described in more detail below.

[0063] In some embodiments of the present invention, the fine adjustment mechanism is used to enable the coupling stage 61 to move up and down when it moves horizontally, so that the output impedance of the spiral resonator changes. Since the spiral resonator of the present invention can be used in a vacuum chamber, the method of controlling the downward movement of the coupling stage 61 cannot be completed by gravity, so the fine adjustment mechanism 10 for controlling the upward and downward adjustment of the coupling stage 61 cannot be realized by a spring. Based on this, the present invention provides the following two methods, and the present invention is not limited to these two methods, so that the coupling stage 61 can move up and down when it moves horizontally.

[0064] Method 1: Fine-tuning the structure can refer to Figure 8 As shown, it is arranged between the coupling platform 61 and the first slider 622, that is, it includes a boss 101, a third guide rod 102 and a third slider 103, wherein the upper surfaces of the two bottom rails 621 are provided with the boss 101, and the upper surface of the boss 101 is an arc-shaped with both sides convex to the middle, and the upper surface of the boss 101 is provided with a first slide groove, wherein the groove depth of the first slide groove is uniformly set, that is, the first slide groove is also an arc-shaped with both sides convex to the middle.

[0065] like Fig. 9 As shown, the third sliders 103 are provided on the lower side walls on both sides of the coupling platform 61, and the two third sliders 103 are respectively installed in the two first slide grooves, and the first slider 622 is provided with the plurality of third guide rods 102, and the coupling platform 61 is provided with a plurality of guide rod holes adapted to the third guide rods 102, so that the plurality of third guide rods 102 can be inserted into the plurality of guide rod holes. Therefore, when the third slider 103 moves, under the action of the first slide groove and the third slider 103, when the coupling platform 61 moves to directly below the main coil 7, the coupling platform 61 can be lifted up, that is, can move upward, thereby adjusting the mutual inductance between the main coil 7 and the coupling coil 8.

[0066] Method 2: In some other embodiments, the following method may also be used: Fig.10 and Fig.11 As shown, the fine adjustment structure includes a first rack 621-1, a second rack 621-2 and a coaxial double gear 621-3, wherein the first rack 621-1 is arranged on the bottom rail 621, the second rack 621-2 is arranged on the coupling platform 61, a plurality of fourth guide rods 104 are arranged on the first slider 622, a plurality of guide rod holes adapted to the fourth guide rods 104 are arranged on the coupling platform 61, and the plurality of fourth guide rods 104 are inserted into the plurality of guide rod holes, a coaxial double gear 621-3 is arranged on one of the fourth guide rods 104, the coaxial double gear 621-3 is meshed with the first rack 621-1, and can also mesh with the second rack 621-2 when the first slider 622 moves to a specified position, so that the coupling platform 61 can be lifted up when the coupling platform 61 moves to directly below the main coil 7.

[0067] In addition, since the temperature in the cryogenic chamber 1 is as low as below 4K, elastic components cannot be used in the fine adjustment mechanism 10, so the above two examples can also be used in a cryogenic trap, that is, the ion trap is placed in an ultra-low temperature environment to form a cryogenic trap.

[0068] In some embodiments of the present invention, Fig.12 As shown, when the coupling platform 61 is slidably connected to the first slider 622, the moving assembly 62 further includes a tilting block 624, and the coupling platform 61 is slidably connected to the first slider 622 through the tilting block 624, wherein when the first slider 622 moves, the coupling platform 61 moves, and the direction of movement is perpendicular to the direction of movement of the first slider 622.

[0069] like Fig.13 As shown, the tilting block 624 is installed on the first slider 622 and can be integrally formed, and a first slide groove 624-1 is provided on the tilting block 624, and a bevel groove 611 is provided at the bottom of the coupling platform 61; the connecting surface 612 of the bevel groove 611 is parallel to the groove bottom surface of the first slide groove 624-1, and the angle between the groove bottom surface of the first slide groove 624-1 and the surface of the first slider 622 is greater than 0, and the second slider 614 is connected to the connecting surface 612, and the second slider 614 is installed in the first slide groove 624-1; A skirt is provided around the outer periphery of the bottom of the coupling platform 61, and a movable first guide rod 613 is provided on the skirt. The first guide rod 613 is also fixedly connected to the bottom rail 621. Therefore, when the coupling platform 61 maintains its original position directly below the main coil 7, when the first slider 622 is controlled to move, the coupling platform 61 only moves longitudinally, exemplarily, up and down, that is, the coupling coil 8 on the coupling platform 61 can penetrate the main coil 7, so that the relative longitudinal distance between the main coil 7 and the coupling coil 8 can be adjusted to change the output impedance of the spiral resonator.

[0070] In some embodiments of the invention, in the above situation, the power transmission between the first slider 622 and the power mechanism 5 can be formed by the connecting component 9, that is, Figure 4 As shown, the connecting assembly 9 includes a connecting rod 91, a sleeve 92 and a connecting block 93. The connecting rod 91 is connected to the first slider 622. The connecting rod 91 is provided with the sleeve 92, and the sleeve 92 is sleeved on the connecting rod 91. The connecting block 93 is provided on the top of the sleeve 92. The connecting block 93 is provided with a threaded hole 94, and the threaded hole 94 is connected to the power output end of the power mechanism 5.

[0071] In some embodiments of the present invention, for the housing 3, as Figure 2As shown, a strip-shaped opening 31 is provided on it, and the connecting plate 623 in the connecting assembly 9 can pass through the strip-shaped opening, and the strip-shaped opening is communicated with the opening 24 of the ring stage 23; one end of the bottom of the main coil 7 is connected to the shell 3 for grounding, and the other end passes through the upper cover 4 and is connected to the ion trap chip in the trap, serving as the RF signal input end of the ion trap chip.

[0072] In some embodiments of the invention, when the power mechanism is mounted on the bottom of the vacuum chamber, such as Fig.14 and 15 As shown, the bottom of the coupling platform 61 is arranged between the two bottom rails 621 and connected to the output end of the power mechanism, and a movable guide column 615 is arranged around the bottom of the coupling platform 61 (a skirt may also be arranged around the bottom), and the guide column 615 is also fixedly connected to the bottom rail 621. The function of the guide column 615 is the same as that of the guide rod. After the power output end of the power mechanism 5 passes through the bottom of the vacuum chamber into the vacuum chamber 1, and then passes through the bottom rail groove 22, it can be connected to the bottom of the coupling platform 61 through the connecting assembly 9 ( Fig.14 and Fig.15 ), so that the coupling platform 61 can be directly controlled to move up and down, thereby driving the coupling coil 8 on the coupling platform 61 to penetrate the main coil 7, and adjusting the relative longitudinal distance between the main coil 7 and the coupling coil 8 to change the output impedance of the spiral resonator. In this embodiment, the connecting component 9 can be a commonly used connecting piece such as a connecting piece and a connecting block, and the bottom of the coupling platform 61 is in contact with the upper surface of the bottom rail 621, which can be achieved by setting a skirt ( Fig.14 and Fig.15 (not shown) to limit the position and prevent the coupling platform 61 from moving downward excessively.

[0073] The power mechanism of the present invention is described in detail below.

[0074] In some embodiments of the present invention, Figure 6 and Figure 7 As shown, the power mechanism includes: a vacuum bellows 50, a guide assembly and a power output assembly, wherein the vacuum bellows 50 and the power output assembly are both installed on the guide assembly, wherein the power output end of the power output assembly penetrates into the vacuum bellows 50 and is sealed by the vacuum bellows 50, and also penetrates into the vacuum chamber to be transmission-connected with the mutual inductance adjustment mechanism 6, and the guide assembly is installed on the outer wall of the vacuum chamber.

[0075] The guide assembly includes a fixing member 51, a second guide rod 52 and a guide plate 53, wherein the fixing member 51 and the fixing plate 58 are fixedly connected via a plurality of the second guide rods 52, one end of the vacuum bellows 50 is fixed to the fixing member 51, one end of the vacuum bellows 50 is disposed on the second guide rod 52 and can slide on the second guide rod 52, and the fixing member 51 is installed on the outer side or bottom of the vacuum chamber.

[0076] The power output assembly includes a first push plate 54, a threaded rod 55, a nut 56, a second push plate 57, a fixed plate 58 and a telescopic rod 59, wherein a flange 571 connected to the second push plate 57 is connected to the other end of the vacuum bellows 50, the first push plate 54 is connected to the flange 571, and the guide plate 53 is sleeved on a plurality of second guide rods 52 and fixedly connected to the flange 571, so that under the push of the first push plate 54, the flange 571 can move stably, and can also reduce the stability of the telescopic movement of the vacuum bellows 50 during the movement.

[0077] In addition, one end of the threaded rod 55 passes through the fixed plate 58 and is fixedly connected to the first push plate 54, and the other end of the threaded rod 55 is sleeved with the nut 56, which can be limited by the fixed plate 58, that is, to prevent the nut from being displaced during rotation. The telescopic rod 59 and the second push plate 57 are located inside the vacuum bellows 50, one end of the telescopic rod 59 is connected to the second push plate 57, and the other end of the telescopic rod 59 serves as the power output end of the power mechanism 5, so that when the nut 56 is rotated, the threaded rod 55 can be displaced, thereby pushing the first push plate 54 to move, and at the same time, the flange 571 moves to drive the second push plate 57 to move, and finally drives the telescopic rod 59 to move. Since the telescopic rod 59 and the second push plate 57 are located inside the vacuum bellows 50, the movement of the telescopic rod 59 is in a vacuum seal at this time.

[0078] The other end of the telescopic rod 59 is provided with an external thread 581, which engages with the threaded hole 94 provided on the above-mentioned connecting block 93, so that when the control nut 56 is rotated, the above-mentioned connecting block 93 can be driven to move, and finally the coupling platform 61 on the above-mentioned first slider 622 can be controlled to move.

[0079] The present invention realizes transmission by vacuum transmission through the arrangement of the vacuum bellows 51, which has high cost performance, is smaller in size than an electric translation stage, and can also reduce costs. In addition, in some other embodiments, the rotation of the nut 56 can be controlled by a small electric device such as a servo motor to realize the final movement of the electric adjustment coupling stage 61, thereby achieving more precise control of the movement of the telescopic rod 59.

[0080] The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A spiral resonator for use in a vacuum cavity, characterized in that: The helical resonator comprises: a mounting base (2), a housing (3), a power mechanism (5), a mutual inductance adjustment mechanism (6), a main coil (7) and a coupling coil (8), wherein: The mounting base (2) is mounted in a vacuum chamber (1) of an ion trap system, and the housing (3) is fixed on the mounting base (2) and is used to fix the helical resonator; The mutual inductance adjustment mechanism (6), the main coil (7) and the coupling coil (8) are all arranged inside the housing (3); The power mechanism (5) is arranged outside the vacuum chamber (1), and the power output end of the power mechanism (5) penetrates into the interior of the vacuum chamber (1) to drive the mutual inductance adjustment mechanism to adjust the relative distance between the main coil (7) and the coupling coil (8), thereby changing the output impedance of the helical resonator.

2. A spiral resonator for use in a vacuum cavity according to claim 1, characterized in that: The power mechanism is installed on the outer side or bottom of the vacuum chamber.

3. A spiral resonator for use in a vacuum cavity according to claim 2, characterized in that: The mutual inductance adjustment mechanism (6) comprises a moving component (62) and a coupling platform (61) arranged on the moving component (62), wherein the coupling coil (8) is arranged on the coupling platform (61).

4. The spiral resonator for use in a vacuum cavity according to claim 3, characterized in that: The mutual inductance adjustment mechanism (6) comprises a connecting component (9) for connecting the power output end of the power mechanism (5) and the moving component.

5. The spiral resonator for use in a vacuum cavity according to claim 4, characterized in that: A limiting seat (21) is provided on the upper surface of the mounting base (2), a bottom rail groove (22) is provided at the bottom of the limiting seat (21), and bottom rails (621) are respectively installed on two opposite side walls of the bottom rail groove (22).

6. The spiral resonator for use in a vacuum cavity according to claim 5, characterized in that: When the power mechanism is installed on the outer wall of the vacuum chamber, the upper surface of the limit seat (21) is provided with a ring platform (23) having an opening (24), and the bottom rail groove (22) is in communication with the opening (24) of the ring platform (23).

7. The spiral resonator for use in a vacuum cavity according to claim 6, characterized in that: The moving assembly (62) comprises a first slider (622) and a connecting plate (623), wherein: The first slider (622) is arranged between the two bottom rails (621) and can slide between the bottom rails (621); the coupling platform (61) is slidably or fixedly connected to the first slider (622); the connecting plate (623) is connected to one end of the first slider (622); and the other end of the connecting plate (623) passes through the opening (24) and is connected to the connecting component (9).

8. The spiral resonator for use in a vacuum cavity according to claim 7, characterized in that: When the coupling platform (61) is fixedly connected to the first slider (622), the moving component (62) further comprises a fine adjustment mechanism, wherein the fine adjustment mechanism is used to enable the coupling platform (61) to move in a second direction when the first slider (622) drives the coupling platform (61) to move in a first direction, thereby changing the output impedance of the helical resonator, wherein the first direction and the second direction are different directions.

9. The spiral resonator for use in a vacuum cavity according to claim 7, characterized in that: When the coupling platform (61) is slidably connected to the first slider (622), the moving assembly (62) comprises a tilting block (624), and the coupling platform (61) is slidably connected to the first slider (622) via the tilting block (624), wherein: When the first slider (622) moves, the coupling platform (61) moves, and the moving direction is perpendicular to the moving direction of the first slider (622).

10. The spiral resonator for use in a vacuum cavity according to claim 9, characterized in that: The tilting block (624) is installed on the first sliding block (622), and a first sliding groove (624-1) is provided on the tilting block (624), and a bevel groove (611) is provided on the bottom of the coupling platform (61); The connecting surface (612) of the inclined groove (611) and the groove bottom surface of the first slide groove (624-1) are parallel to each other, and the angle between the groove bottom surface of the first slide groove (624-1) and the surface of the first slider (622) is greater than 0. The connecting surface (612) is connected to the second slider (614), and the second slider (614) is installed in the first slide groove (624-1); A skirt is provided on the outer periphery of the bottom of the coupling platform (61), and a movable first guide rod (613) is provided on the skirt. The first guide rod (613) is also fixedly connected to the bottom rail (621).

11. The spiral resonator for use in a vacuum cavity according to claim 5, characterized in that: When the power mechanism is installed at the bottom of the vacuum chamber, the bottom of the coupling platform (61) is arranged between the two bottom rails (621) and connected to the output end of the power mechanism, and a movable guide column (615) is arranged around the outer periphery of the bottom of the coupling platform (61), and the guide column (615) is also fixedly connected to the bottom rail (621).

12. A spiral resonator for use in a vacuum cavity according to any one of claims 2 to 11, characterized in that: The power mechanism includes: a vacuum bellows, a guide assembly and a power output assembly, wherein the vacuum bellows and the power output assembly are both installed on the guide assembly, wherein: The power output end of the power output assembly penetrates into the vacuum bellows and is sealed by the vacuum bellows, and also penetrates into the vacuum chamber to be transmission-connected with the mutual inductance adjustment mechanism (6), and the guide assembly is installed on the vacuum chamber.

13. A spiral resonator for use in a vacuum cavity according to any one of claims 7 to 10, characterized in that: The connecting assembly (9) comprises a connecting rod (91), a sleeve (92) and a connecting block (93); the connecting rod (91) is connected to the first slider (622); the connecting rod (91) is provided with the sleeve (92); the sleeve (92) is sleeved on the connecting rod (91); the connecting block (93) is provided on the top of the sleeve (92); a threaded hole (94) is provided on the connecting block (93); the threaded hole (94) is connected to the power output end of the power mechanism (5).

14. The spiral resonator for use in a vacuum cavity according to claim 8, characterized in that: The fine adjustment structure is arranged between the coupling platform (61) and the first slider (622), and comprises a boss (101), a third guide rod (102) and a third slider (103), wherein: The upper surfaces of the two bottom rails (621) are both provided with the boss (101), and the upper surface of the boss (101) is provided with a first slide groove; The third sliding blocks (103) are provided on the lower side walls on both sides of the coupling platform (61), the two third sliding blocks (103) are respectively installed in the two first sliding grooves, and the first sliding block (622) is provided with the plurality of third guide rods (102), the coupling platform (61) is provided with a plurality of guide rod holes adapted to the third guide rods (102), and the plurality of third guide rods (102) are inserted into the plurality of guide rod holes.

15. The spiral resonator for use in a vacuum cavity according to claim 8, characterized in that: The fine adjustment structure comprises a first rack (621-1), a second rack (621-2) and a coaxial double gear (621-3), wherein: The first rack (621-1) is arranged on the bottom rail (621), the second rack (621-2) is arranged on the coupling platform (61), a plurality of fourth guide rods (104) are arranged on the first slider (622), a plurality of guide rod holes adapted to the fourth guide rods (104) are arranged on the coupling platform (61), the plurality of fourth guide rods (104) are inserted into the plurality of guide rod holes, a coaxial double gear (621-3) is arranged on one of the fourth guide rods (104), the coaxial double gear (621-3) is meshed with the first rack (621-1), and can also mesh with the second rack (621-2) when the first slider (622) moves to a specified position.

16. The spiral resonator for use in a vacuum cavity according to claim 12, characterized in that: The guide assembly comprises a fixing member (51), a second guide rod (52) and a guide plate (53), wherein the fixing member (51) and the fixing plate (58) are fixedly connected via a plurality of the second guide rods (52), one end of the vacuum bellows (50) is fixed to the fixing member (51), and one end of the vacuum bellows (50) is arranged on the second guide rod (52) and can slide on the second guide rod (52).

17. The spiral resonator for use in a vacuum cavity according to claim 8, characterized in that: The power output assembly comprises a first push plate (54), a threaded rod (55), a nut (56), a second push plate (57), a fixing plate (58) and a telescopic rod (59), wherein: A flange (571) connected to the second push plate (57) is connected to the other end of the vacuum bellows (50), the first push plate (54) is connected to the flange (571), the guide plate (53) is sleeved on the plurality of second guide rods (52) and fixedly connected to the flange (571), one end of the threaded rod (55) passes through the fixed plate (58) and is fixedly connected to the first push plate (54), the other end of the threaded rod (55) is sleeved with the nut (56), the nut (56) can be limited by the fixed plate (58), the telescopic rod (59) and the second push plate (57) are located inside the vacuum bellows (50), one end of the telescopic rod (59) is connected to the second push plate (57), and the other end of the telescopic rod (59) serves as the power output end of the power mechanism (5).

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