Probe cooling and heating table and probe adjusting method thereof

Abstract

The invention discloses a probe cooling and heating table and a probe adjusting method thereof. The probe cooling and heating table comprises a base, an end cover and a probe. A sample table is arranged in the middle of the test cavity of the base; the probe is mounted on a probe table of the test cavity, and one end of the probe points to the sample table; the end cover is detachably connected to the upper end of the base through a sealing strip; the positioning assembly is connected between the probe and the probe station; the positioning assembly comprises a counterweight ball, an outer positioning spherical shell and an inner positioning spherical shell; the exterior of the outer positioning spherical shell is fixed on the probe table, and a first resistance column is arranged on the inner surface of the outer positioning spherical shell; the inner positioning spherical shell is rotationally connected into the outer positioning spherical shell through the longitudinal rotating shaft. A transmission structure between an existing external manipulator and a base is omitted, torque is transmitted through the base by means of magnetic force between the transverse permanent magnet and the longitudinal permanent magnet and the external electromagnetic controller, and the problem that air tightness is reduced due to the fact that a transmission gap is increased along with the increase of using time or using times is solved.

Description

Technical Field

[0001] The invention belongs to the field of cooling and heating stages, and in particular relates to a probe cooling and heating stage and a probe adjustment method thereof. Background Art

[0002] The probe hot and cold station is a product designed for variable temperature electrical testing in the process of material research. It can characterize the characteristics of the electrical properties of materials changing with temperature during the heating and cooling stages of materials. The fields where the probe hot and cold station is applicable mainly include the semiconductor industry (used to test the electrical properties of semiconductor chips, devices, etc. at different temperatures), the field of material science research (such as the superconducting transition temperature of metal materials, the dielectric properties of ceramic materials, etc.), the optoelectronic field (such as studying the photoelectric conversion efficiency of solar cells at different temperatures, the changes in the luminous properties of light-emitting diodes with temperature, etc.). In addition, the probe hot and cold station extends to biomedicine, such as studying the structural changes of viruses at low temperatures and the electrical response of biochips at different temperatures. For example, in cell electrophysiology research, the changes in the electrical properties of cells at different temperatures are studied by precisely controlling the temperature. It can also simulate the temperature environment of unconventional cells such as diseased cells and cancer cells under physiological and pathological conditions, observe the morphological, structural and functional changes of cells, or the response under low temperature preservation or high temperature stress, and the effect of temperature on the metabolism, proliferation, differentiation and apoptosis of unconventional cells.

[0003] The existing probe hot and cold stage structure mainly includes a stainless steel body (detachable base and end cover), a sample stage, a probe system, a temperature control system, a manipulator, etc. The sample stage is located in the middle of the base, and has good flatness and thermal uniformity to ensure that the temperature of the sample placed on the sample stage is evenly distributed during the test. The temperature control system includes a temperature sensor and a temperature controller. The temperature sensor is fixed in the base. The temperature controller is an external device and is electrically connected to the terminal of the base through a wire. The temperature sensor monitors the temperature of the sample stage in real time and feeds back the temperature signal to the temperature controller. It usually adopts standard PID temperature control + self-tuning and other control methods, and the temperature resolution can reach 0.1°C. The probe system is associated with the manipulator. The probe system includes a probe, a probe arm and a probe seat. The probe is generally made of materials such as tungsten needles and has high hardness and conductivity. The probe arm is installed on the base through the probe seat and is adjacent to the sample stage. The probe arm is connected to the external manipulator, and the manipulator is used to achieve precise movement of the probe in the specified direction. Most of the external manipulators use slide rail assemblies, screw assemblies, etc. to achieve transmission connections, but in order to take sealing into consideration, some auxiliary components are also required, such as using bellows to maintain the sealing of the test chamber.

[0004] At present, the common problems of probe hot and cold stations include temperature uniformity, test space limitations, and airtight failure, among which airtight failure is closely related to the external manipulator. The circuit part of the base is completely sealed with sealant, while the vacuum control pipe joint and atmosphere control pipe joint of the base are sealed with sealing rings. Since the circuit part and the pipe joint part are fixed, there is no gap at the connection, and the possibility of leakage is extremely small. The external manipulator needs to maintain a transmission relationship with the probe arm. The external manipulator cannot be fixedly connected to the base. As the use time or frequency of use increases, the active gap between the manipulator and the base increases, which is one of the main reasons for the airtight failure of the probe hot and cold station. Since the biomedical field has extremely high requirements for the isolation (airtightness) of the probe hot and cold station, such as the study of the activity of infectious viruses in hot and cold environments, the study of the metabolism and proliferation of diseased cells, etc., if the probe hot and cold station fails to be airtight, the leakage of samples poses a threat to researchers in the laboratory. Therefore, a probe control structure and probe adjustment method with higher safety and better airtightness that can replace the existing manipulator are now needed. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a probe hot and cold table, comprising a base, an end cover and a probe; a sample table is provided in the middle of a test cavity of the base, the probe is mounted on the probe table of the test cavity and one end of the probe points to the sample table; the end cover is detachably connected to the upper end of the base by a sealing strip, thereby sealing the test cavity; it also includes a positioning assembly connected between the probe and the probe table, the positioning assembly comprising a counterweight ball, an outer positioning spherical shell and an inner positioning spherical shell; the outer portion of the outer positioning spherical shell is fixed to the probe table, and a first resistance column is provided on the inner surface of the outer positioning spherical shell; the inner positioning spherical shell is rotatably connected to the inner portion of the outer positioning spherical shell by a longitudinal rotating shaft, and a row of first damping pins equidistantly distributed along the circumference of the inner positioning spherical shell and with increasing lengths successively are provided on the outer surface of the inner positioning spherical shell; the first resistance column and all the first damping pins are parallel to the horizontal plane; the counterweight ball is rotatably connected to the inner portion of the inner positioning spherical shell by a transverse rotating shaft , and the inner surface of the counterweight ball is provided with a row of second damping needles which are evenly spaced and increase in length along the circumference of the counterweight ball; a second resistance column is provided on the outside of the inner positioning spherical shell, and the second resistance column and all the second damping needles are parallel to the vertical plane; it also includes a transverse permanent magnet and a longitudinal permanent magnet, and the other end of the probe passes through the upper part of the counterweight ball and is hingedly connected to the transverse permanent magnet and the longitudinal permanent magnet respectively; it also includes an external electromagnetic controller located outside the base, and the external electromagnetic controller is respectively opposite to the two ends of the transverse permanent magnet and the two ends of the longitudinal permanent magnet, and one end of the transverse permanent magnet is magnetically attracted by the external electromagnetic controller, so that the probe swings in the horizontal plane and the first damping needle rubs with the first resistance column to control the swing angle of the probe in the plane; or one end of the longitudinal permanent magnet is magnetically attracted by the external electromagnetic controller, so that the probe swings in the vertical plane and the second damping needle rubs with the second resistance column to control the swing angle of the probe in the vertical plane.

[0006] The beneficial effects of a probe hot and cold stage in the present invention are: 1. The transmission structure between the existing external manipulator and the base is cancelled, and the magnetic force between the transverse permanent magnet and the longitudinal permanent magnet and the external electromagnetic controller is used to transmit the torque through the base, that is, the magnetic force is used to drive the probe to swing through the air. There is no direct connection structure between the base and the external electromagnetic controller, which completely solves the problem of reduced air tightness due to the increase of transmission gap as the use time or the number of times of use increases.

[0007] 2. The counterweight ball and the inner positioning ball shell of the positioning component realize precise longitudinal positioning of the probe through the second resistance column and all the second damping pins. The outer positioning ball shell and the inner positioning ball shell of the positioning component realize precise lateral positioning of the probe through the first resistance column and all the first damping pins. The angle between each two adjacent first damping pins and the angle between each two adjacent second damping pins can be set according to actual conditions. For example, if the angle between each two adjacent first damping pins is 1°, the unit swing angle of the probe in the horizontal plane is 1° accordingly. If the angle between each two adjacent second damping pins is 1°, the unit swing angle of the probe in the vertical plane is 1° accordingly.

[0008] 3. The external electromagnetic controller uses electronic control to adjust the angle, and can cooperate with the online control system to achieve remote adjustment. Researchers can be outside the laboratory. Compared with manual adjustment in the laboratory, it can completely avoid safety hazards caused by leakage.

[0009] The preferred solution of the present invention is that: the first resistance column and the second resistance column are both provided with a U-shaped groove, and a wear-resistant layer is provided in the U-shaped groove, and the first damping needle or the second damping needle of different length passes through the corresponding U-shaped groove and rubs against the wear-resistant layer, thereby controlling the swing angle of the probe. The friction resistance between the unit length of each first damping needle and each second damping needle and the wear-resistant layer is the same, and the wear-resistant layer specifies the number of frictions. After the number of frictions is reached, the wear-resistant layer can be replaced, and the numerical change of the friction resistance per unit length is within the allowable error range.

[0010] The preferred solution of the present invention is that resistance pads are provided between the counterweight ball and the inner positioning spherical shell and between the outer positioning spherical shell and the inner positioning spherical shell, and the rotation torque of the probe on the positioning assembly is balanced by the friction resistance of the resistance pads. In order to prevent the probe from swinging when it is not controlled by the external electromagnetic controller, the resistance of the two resistance pads just balances the rotation torque of the probe in the longitudinal and lateral directions, thereby reducing the output torque of the external electromagnetic controller, that is, reducing the load of the external electromagnetic controller.

[0011] The preferred solution in the present invention is that: the specific control method of the probe in the vertical direction is to provide magnetic poles at both ends of the longitudinal permanent magnet, the middle part of the longitudinal permanent magnet is slidably connected to the end of the probe through the first telescopic rod, and the middle part of the longitudinal permanent magnet is hingedly connected to the first telescopic rod. The external electromagnetic controller includes an upper longitudinal electromagnet and a longitudinal rocker arm motor located above the end cover, the magnetic pole of the upper longitudinal electromagnet is opposite to the magnetic pole of the upper end of the longitudinal permanent magnet, and the upper longitudinal electromagnet is fixedly connected to the rocker arm of the longitudinal rocker arm motor, and the upper longitudinal electromagnet is driven by the longitudinal rocker arm motor to swing synchronously with the probe in the vertical plane, thereby keeping the magnetic pole of the upper longitudinal electromagnet always opposite to the magnetic pole of the upper end of the longitudinal permanent magnet; it includes a lower longitudinal electromagnet and another longitudinal rocker arm motor located below the base, the magnetic pole of the lower longitudinal electromagnet is opposite to the magnetic pole of the lower end of the longitudinal permanent magnet, and the lower longitudinal electromagnet is fixedly connected to the rocker arm of the corresponding longitudinal rocker arm motor, and the lower longitudinal electromagnet is driven by the corresponding longitudinal rocker arm motor to swing synchronously with the probe in the vertical plane, thereby keeping the magnetic pole of the lower longitudinal electromagnet always opposite to the magnetic pole of the lower end of the longitudinal permanent magnet.

[0012] Similarly, the specific control method of the probe in the horizontal direction is that magnetic poles are respectively provided at both ends of the transverse permanent magnet, the middle part of the transverse permanent magnet is slidably connected to the end of the first telescopic rod through the second telescopic rod, and the middle part of the transverse permanent magnet is hingedly connected to the second telescopic rod. The external electromagnetic controller includes a left electromagnet and a left rocker motor located on the left side of the base, the magnetic pole of the left electromagnet is directly opposite to the magnetic pole of the left end of the transverse permanent magnet, and the left electromagnet is fixedly connected to the rocker of the left rocker motor, and the left electromagnet is driven by the left rocker motor to swing synchronously with the probe in the horizontal plane, thereby keeping the magnetic pole of the left electromagnet always facing the magnetic pole of the left end of the transverse permanent magnet; including a right electromagnet and a right rocker motor located on the right side of the base, the magnetic pole of the right electromagnet is directly opposite to the magnetic pole of the right end of the transverse permanent magnet, and the right electromagnet is fixedly connected to the rocker of the right rocker motor, and the right electromagnet is driven by the right rocker motor to swing synchronously with the probe in the horizontal plane, thereby keeping the magnetic pole of the right electromagnet always facing the magnetic pole of the right end of the transverse permanent magnet.

[0013] The preferred solution of the present invention is that the outer surface of the counterweight ball and the inner surface of the inner positioning ball shell are both provided with a notch for the first damping needle to swing, and the outer surface of the inner positioning ball shell and the inner surface of the outer positioning ball shell are both provided with a notch for the second damping needle to swing. The first damping needle will not collide with the swing of the inner positioning ball shell and the second damping needle will not collide with the swing of the counterweight ball, all the first damping needles will only rub against the first resistance column, and all the second damping needles will only rub against the second resistance column.

[0014] The preferred solution in the present invention is that any first damping needle is L longer or shorter than another adjacent first damping needle, and any second damping needle is L longer or shorter than another adjacent second damping needle. The lengths of all first damping needles increase in sequence, and the increased lengths are equal. From the shortest first damping needle to the longest first damping needle, the friction resistance of the first resistance column also increases by the same amount, which is convenient for the external electromagnetic controller to adjust the corresponding electromagnetic force. For example, the force required for the shortest first damping needle to pass through the first resistance column is f, and the force required for the adjacent first damping needle to pass through the first resistance column is 2f. By analogy, the force required for the Nth first damping needle to pass through the first resistance column is Nf. The output magnetic force of the external electromagnetic controller can be adjusted. The output magnetic force is F after passing through the base. If 2f>F>f, the second shortest first damping needle cannot pass through the first resistance column, that is, the second shortest first damping needle will be stuck in the first resistance column to achieve the positioning control of the probe in the horizontal direction. The positioning control of the probe in the vertical direction is through the second damping needle and the second resistance column, and the control direction is the same as the positioning control method in the horizontal direction.

[0015] The present invention also provides a probe adjustment method for a probe cooling and heating stage. Based on the above-mentioned probe cooling and heating stage, the external electromagnetic controller includes a controller body, and the controller body is electrically connected to two longitudinal rocker arm motors, a left rocker arm motor, a right rocker arm motor, an upper longitudinal electromagnet, a lower longitudinal electromagnet, a left electromagnet and a right electromagnet respectively.

[0016] The steps are as follows: S1, placing the sample on the sample table, and pressing the end cover onto the base by bolts to seal the test cavity; S2, adjust the probe to the leftmost end and the highest point, the leftmost end corresponds to the shortest first damping needle, the highest point corresponds to the shortest second damping needle, the controller body drives the two longitudinal rocker motors to make the longitudinal upper electromagnet and the longitudinal lower electromagnet face the upper end and the lower end of the longitudinal permanent magnet respectively, and drives the left rocker motor and the right rocker motor to make the left electromagnet and the right electromagnet face the left end and the right end of the transverse permanent magnet respectively; S3, according to the test requirements, swing the front end of the probe to position A, and position A corresponds to the Ath first damping needle and the Ath second damping needle; S301, the controller body energizes the left electromagnet, and the magnetic force generated by the left electromagnet is smaller than the friction force between the Ath first damping needle and the first resistance column, and larger than the friction force between the A-1th first damping needle and the first resistance column; the left electromagnet attracts the left end of the transverse permanent magnet through magnetic force, and the probe swings toward the right end until the Ath first damping needle is stuck at the first resistance column because the friction resistance is larger than the magnetic force, and the left electromagnet is de-energized; S302, the controller body energizes the upper longitudinal electromagnet, and the magnetic force of the upper longitudinal electromagnet is smaller than the friction force between the Ath second damping needle and the second resistance column, and larger than the friction force between the A-1th second damping needle and the second resistance column; the upper longitudinal electromagnet attracts the upper end of the longitudinal permanent magnet through magnetic force, and the probe swings toward the lower end until the Ath second damping needle is stuck at the second resistance column because the friction resistance is greater than the magnetic force, and the upper longitudinal electromagnet is de-energized, so that the front end of the probe swings to the A position. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the structure of the probe hot and cold stage in the present invention; Figure 2 for Figure 1 A top view of the controller body and end cover hidden in the middle; Figure 3 for Figure 2 Stereoscopic image of Figure 4 for Figure 2 Sectional view along AA direction; Figure 5 for Figure 4 A partial enlarged view of Figure 6 for Figure 5 The enlarged view of point B in the middle; Figure 7 for Figure 5 Enlarged view of point C in the middle.

[0019] Figure numerals: base 1, end cover 2, probe 3, sample table 4, probe table 5, terminal post 6, pipe joint 7, sealing strip 8, counterweight ball 9, outer positioning spherical shell 10, inner positioning spherical shell 11, first resistance column 12, longitudinal rotating shaft 13, first damping needle 14, wear-resistant layer 15, transverse rotating shaft 16, second damping needle 17, second resistance column 18, notch 19, transverse permanent magnet 20, longitudinal permanent magnet 21, first telescopic rod 22, second telescopic rod 23, longitudinal upper electromagnet 24, longitudinal rocker arm motor 25, rocker arm 26, longitudinal lower electromagnet 27, left electromagnet 28, left rocker arm motor 29, right electromagnet 30, right rocker arm motor 31, resistance pad 32, controller body 33. DETAILED DESCRIPTION

[0020] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the present invention after long-term research and extensive practice. The following will further explain the technical solution, its implementation process and principle, etc. in conjunction with the drawings in the embodiments of this application and specific implementation cases.

[0021] It should be noted that the embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention. The described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, the present invention covers any substitution, modification, equivalent method and scheme made on the spirit, principle and scope of the present invention defined by the claims. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] In the description of this application, unless otherwise clearly specified and limited, the technical or scientific terms used should have the usual meanings understood by persons with general skills in the field to which this application belongs. Terms such as "install", "connect", and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection, or an integrated connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0023] Embodiment 1; like Figure 1 , Figure 2 and Figure 3 As shown, Embodiment 1 provides a probe hot and cold stage, including a base 1, an end cover 2 and a probe 3. A sample stage 4 is provided in the middle of the test cavity of the base 1, and the probe 3 is mounted on the probe stage 5 of the test cavity with one end of the probe 3 pointing to the sample stage 4; the end cover 2 is detachably connected to the upper end of the base 1 through a sealing strip 8, thereby sealing the test cavity. In addition, a wiring post 6 electrically connected to the heating element of the probe stage 5, and a pipe joint 7 connected to an external refrigeration pipeline are also provided on the side of the base 1.

[0024] like Figure 4 , Figure 5 and Figure 6As shown, in order to achieve accurate horizontal positioning of the probe 3, the present embodiment also includes a positioning assembly connected between the probe 3 and the probe station 5, and the positioning assembly includes a weighted ball 9, an outer positioning spherical shell 10 and an inner positioning spherical shell 11. The outer portion of the outer positioning spherical shell 10 is fixed on the probe station 5, and the inner surface of the outer positioning spherical shell 10 is provided with a first resistance column 12; the inner positioning spherical shell 11 is rotatably connected to the inner portion of the outer positioning spherical shell 10 through a longitudinal rotating shaft 13, and the outer surface of the inner positioning spherical shell 11 is provided with a row of first damping needles 14 that are evenly spaced and increase in length along the circumference of the inner positioning spherical shell 11, and each increase in length is a unit length L, that is, any first damping needle 14 is longer or shorter than another adjacent first damping needle 14 by L, the first resistance column 12 and all the first damping needles 14 are parallel to the horizontal plane, and the longitudinal rotating shaft 13 forms a 90° angle with the first resistance column 12. The first resistance column 12 is provided with a U-shaped groove, and a wear-resistant layer 15 is provided in the U-shaped groove. The first damping needles 14 of different lengths pass through the corresponding U-shaped groove and rub against the wear-resistant layer 15, thereby controlling the swing angle of the probe 3. The friction resistance between the unit length L of each first damping needle 14 and the wear-resistant layer 15 is the same. The wear-resistant layer 15 stipulates the number of frictions. After the number of frictions is reached, the wear-resistant layer 15 can be replaced. The numerical change of the friction resistance per unit length is within the allowable error range. That is, the lengths of all first damping needles 14 increase successively, and the increased lengths are equal. From the shortest first damping needle 14 to the longest first damping needle 14, the friction resistance of the first resistance column 12 also increases by the same amount. For example, the force required for the shortest first damping needle 14 to pass through the first resistance column 12 is f, and the force required for the adjacent first damping needle 14 to pass through the first resistance column 12 is 2f. By analogy, the force required for the Nth first damping needle 14 to pass through the first resistance column 12 is Nf.

[0025] like Figures 4 to 7As shown, in order to achieve precise vertical positioning of the probe 3, the weighted ball 9 in this embodiment is rotatably connected to the inside of the inner positioning ball shell 11 through the transverse rotating shaft 16, and the inner surface of the weighted ball 9 is provided with a row of second damping needles 17 that are evenly spaced and increase in length along the circumference of the weighted ball 9; the outside of the inner positioning ball shell 11 is provided with a second resistance column 18, and the second resistance column 18 and all the second damping needles 17 are parallel to the vertical plane. The second resistance column 18 has the same structure as the first resistance column 12, and both have a wear-resistant layer. All the second damping needles 17 have the same length as all the first damping needles 14, and the unit increase length is also L. The number of the second damping needles 17 and the first damping needles 14 is the same, and the angle between two adjacent second damping needles 17 or the angle between two adjacent first damping needles 14 is also the same. It can also be that the angle between each two adjacent first damping needles 14 and the angle between each two adjacent second damping needles 17 can be set according to actual conditions. For example, if the angle between each two adjacent first damping needles 14 is 1°, the unit swing angle of the probe 3 in the horizontal plane is 1° accordingly, and if the angle between each two adjacent second damping needles 17 is 1°, the unit swing angle of the probe 3 in the vertical plane is 1° accordingly. It can also be set to 0.5°. The smaller the angle, the smaller the unit deflection angle of the probe 3 and the higher the control accuracy. The specific angle is not limited in this embodiment. In addition, the outer surface of the weighted ball 9 and the inner surface of the inner positioning ball shell 11 are both provided with a notch 19 for the first damping needle 14 to swing, and the outer surface of the inner positioning ball shell 11 and the inner surface of the outer positioning ball shell 10 are both provided with a notch 19 for the second damping needle 17 to swing. The first damping needle 14 swings with the inner positioning ball shell 11 and the second damping needle 17 swings with the weighted ball 9 without collision, all the first damping needles 14 only rub against the first resistance column 12, and all the second damping needles 17 only rub against the second resistance column 18.

[0026] In order to realize the remote control of the swing angle of the probe 3, this embodiment is realized by an external electromagnetic controller, a transverse permanent magnet 20 and a longitudinal permanent magnet 21, and the specific connection structure is as follows: like Figures 4 to 7As shown, the other end of the probe 3 passes through the upper part of the counterweight ball 9 and is respectively hingedly connected to the transverse permanent magnet 20 and the longitudinal permanent magnet 21, and magnetic poles are respectively provided at both ends of the longitudinal permanent magnet 21, and the middle part of the longitudinal permanent magnet 21 is slidably connected to the end of the probe 3 through the first telescopic rod 22, and the middle part of the longitudinal permanent magnet 21 is hingedly connected to the first telescopic rod 22. Similarly, magnetic poles are respectively provided at both ends of the transverse permanent magnet 20, and the middle part of the transverse permanent magnet 20 is slidably connected to the end of the first telescopic rod 22 through the second telescopic rod 23, and the middle part of the transverse permanent magnet 20 is hingedly connected to the second telescopic rod 23. The first telescopic rod 22 and the second telescopic rod 23 are for automatically adapting to the axial displacement of the probe 3 during the swinging process. The external electromagnetic controller is located outside the base 1, and the external electromagnetic controller is respectively opposite to the two ends of the transverse permanent magnet 20 and the two ends of the longitudinal permanent magnet 21. The external electromagnetic controller magnetically attracts one end of the transverse permanent magnet 20, thereby making the probe 3 swing in the horizontal plane, and the first damping needle 14 and the first resistance column 12 rub to control the swing angle of the probe 3 in the plane; or the external electromagnetic controller magnetically attracts one end of the longitudinal permanent magnet 21, thereby making the probe 3 swing in the vertical plane, and the second damping needle 17 and the second resistance column 18 rub to control the swing angle of the probe 3 in the vertical plane. The magnetic properties of the transverse permanent magnet 20 and the magnetic pole of the external electromagnetic controller facing it are opposite, and opposite poles attract. Similarly, the same is true for the longitudinal permanent magnet 21.

[0027] like Figure 2 and Figure 3As shown, the specific structure of the external electromagnetic controller includes a longitudinal upper electromagnet 24 and a longitudinal rocker arm motor 25 located above the end cover 2, the magnetic poles of the longitudinal upper electromagnet 24 are directly opposite to the magnetic poles at the upper end of the longitudinal permanent magnet 21, and the longitudinal upper electromagnet 24 is fixedly connected to the rocker arm 26 of the longitudinal rocker arm motor 25, and the longitudinal upper electromagnet 24 is driven by the longitudinal rocker arm motor 25 to swing synchronously with the probe 3 in the vertical plane, thereby keeping the magnetic poles of the longitudinal upper electromagnet 24 always directly opposite to the magnetic poles at the upper end of the longitudinal permanent magnet 21. The external electromagnetic controller also includes a longitudinal lower electromagnet 27 and another longitudinal rocker motor 25 located below the base 1, wherein the magnetic pole of the longitudinal lower electromagnet 27 is directly opposite to the magnetic pole of the lower end of the longitudinal permanent magnet 21, and the longitudinal lower electromagnet 27 is fixedly connected to the rocker arm 26 of the corresponding longitudinal rocker motor 25, and the longitudinal lower electromagnet 27 is driven by the corresponding longitudinal rocker motor 25 to swing synchronously with the probe 3 in the vertical plane, thereby keeping the magnetic pole of the longitudinal lower electromagnet 27 and the magnetic pole of the lower end of the longitudinal permanent magnet 21 always facing each other. The external electromagnetic controller also includes a left electromagnet 28 and a left rocker motor 29 located on the left side of the base 1, wherein the magnetic pole of the left electromagnet 28 is directly opposite to the magnetic pole of the left end of the transverse permanent magnet 20, and the left electromagnet 28 is fixedly connected to the rocker arm 26 of the left rocker motor 29, and the left electromagnet 28 is driven by the left rocker motor 29 to swing synchronously with the probe 3 in the horizontal plane, thereby keeping the magnetic pole of the left electromagnet 28 and the magnetic pole of the left end of the transverse permanent magnet 20 always facing each other. The external electromagnetic controller also includes a right electromagnet 30 and a right rocker motor 31 located on the right side of the base 1. The magnetic pole of the right electromagnet 30 is directly opposite to the magnetic pole of the right end of the transverse permanent magnet 20, and the right electromagnet 30 is fixedly connected to the rocker arm 26 of the right rocker motor 31. The right rocker motor 31 drives the right electromagnet 30 to swing synchronously with the probe 3 in the horizontal plane, thereby keeping the magnetic pole of the right electromagnet 30 always directly opposite to the magnetic pole of the right end of the transverse permanent magnet 20.

[0028] like Figure 5 As shown, the inner positioning spherical shell 11 in this embodiment rotates in the outer positioning spherical shell 10 through the longitudinal rotating shaft 13, and the inner positioning spherical shell 11 rotates in the outer positioning spherical shell 10 through two symmetrical transverse rotating shafts 16. In order to prevent the probe 3 from rotating due to the gravity of the transverse permanent magnet 20 and the longitudinal permanent magnet 21, this embodiment is provided with a resistance pad 32 between the counterweight ball 9 and the inner positioning spherical shell 11 and between the outer positioning spherical shell 10 and the inner positioning spherical shell 11, and the friction resistance of the resistance pad 32 is used to balance the rotation torque of the probe 3 on the positioning assembly. In order to prevent the probe 3 from swinging when it is not controlled by the external electromagnetic controller, the resistance of the two resistance pads 32 just balances the rotation torque of the probe 3 in the longitudinal and transverse directions, thereby reducing the output torque of the external electromagnetic controller, that is, reducing the load of the external electromagnetic controller.

[0029] This embodiment eliminates the transmission structure between the existing external manipulator and the base 1, and utilizes the magnetic force between the transverse permanent magnet 20 and the longitudinal permanent magnet 21 and the external electromagnetic controller to transmit torque through the base 1, that is, utilizes the magnetic force to drive the probe 3 to swing through the air. There is no direct connection structure between the base 1 and the external electromagnetic controller, which completely solves the problem of reduced air tightness due to the increase of transmission gap as the use time increases or the number of uses increases.

[0030] In addition, in order to meet the experimental requirements, the probes 3 in this embodiment can be set to two, three, etc., and each probe 3 corresponds to a positioning component, an external electromagnetic controller, a transverse permanent magnet 20, and a longitudinal permanent magnet 21. The specific number of probes 3 depends on the actual situation and is not limited in this embodiment.

[0031] Embodiment 2: Embodiment 2 provides a probe adjustment method for a probe hot and cold stage, based on a probe hot and cold stage of embodiment 1, the external electromagnetic controller includes a controller body 33, and the controller body 33 is electrically connected to two longitudinal rocker motors 25, a left rocker motor 29, a right rocker motor 31, a longitudinal upper electromagnet 24, a longitudinal lower electromagnet 27, a left electromagnet 28, and a right electromagnet 30. The two longitudinal rocker motors 25, the left rocker motor 29, the right rocker motor 31, the longitudinal upper electromagnet 24, the longitudinal lower electromagnet 27, the left electromagnet 28, and the right electromagnet 30 are all installed on the outside of the base 1 through an external fixing frame, and the specific structure of the external fixing frame is not claimed for protection in this embodiment and is not drawn in the figure.

[0032] Adjustment method: First, adjust the probe 3 to the leftmost end and the highest point. The leftmost end corresponds to the shortest first damping needle 14, and the highest point corresponds to the shortest second damping needle 17. The controller body 33 drives the two longitudinal rocker arm motors 25 to make the upper longitudinal electromagnet 24 and the lower longitudinal electromagnet 27 face the upper end and the lower end of the longitudinal permanent magnet 21 respectively, and drives the left rocker arm motor 29 and the right rocker arm motor 31 to make the left electromagnet 28 and the right electromagnet 30 face the left end and the right end of the transverse permanent magnet 20 respectively.

[0033] Then, according to the test requirements, the front end of the probe 3 is swung to position A, and position A corresponds to the Ath first damping needle 14 and the Ath second damping needle 17 .

[0034] Finally, the controller body 33 energizes the left electromagnet 28, and the magnetic force generated by the left electromagnet 28 is smaller than the friction force between the Ath first damping pin 14 and the first resistance column 12, and larger than the friction force between the A-1th first damping pin 14 and the first resistance column 12. The left electromagnet 28 attracts the left end of the transverse permanent magnet 20 through magnetic force, and the probe 3 swings toward the right end until the Ath first damping pin 14 is stuck at the first resistance column 12 because the friction resistance is larger than the magnetic force, and the left electromagnet 28 is de-energized. The controller body 33 energizes the electromagnet 24 on the upper longitudinal side, and the magnetic force of the electromagnet 24 on the upper longitudinal side is less than the friction force between the A-th second damping pin 17 and the second resistance column 18, and greater than the friction force between the A-1-th second damping pin 17 and the second resistance column 18; the electromagnet 24 on the upper longitudinal side attracts the upper end of the longitudinal permanent magnet 21 by magnetic force, and the probe 3 swings toward the lower end until the A-th second damping pin 17 is stuck at the second resistance column 18 due to the friction resistance being greater than the magnetic force, and the electromagnet 24 on the upper longitudinal side is powered off, so that the front end of the probe 3 swings to the A position. In order to facilitate the adjustment of the controller body 33, the output magnetic force of the external electromagnetic controller is set to an adjustable step value in this embodiment, for example, the first unit step magnetic force value is F, the second step magnetic force value is 2F, the third step magnetic force value is 3F, and so on. However, the magnetic force value F here is the magnetic force value after being blocked and attenuated by the base 1. Although the base 1 and the end cover 2 are made of stainless steel, when the magnetic field encounters materials such as stainless steel, the magnetic field will induce a magnetic moment inside the material. For magnetic stainless steel, the magnetic field can penetrate well, because the magnetic domains inside the material can interact with the external magnetic field, allowing the magnetic lines to pass smoothly. For weakly magnetic or non-magnetic austenitic stainless steel, although the magnetic force can penetrate, it will attenuate to a certain extent due to its shielding effect on the magnetic field. Therefore, the F value here is the magnitude of the magnetic force after passing through the base 1, and the magnetic force outside the base 1 may be greater than F, depending on the materials of the base 1 and the end cover 2.

[0035] Compared with the existing manual adjustment method in the laboratory, the probe 3 adjustment method provided in this embodiment uses an external electromagnetic controller to adjust the angle by electric control, and can cooperate with the online control system to achieve remote adjustment, which can completely avoid the safety hazards caused by leakage.

[0036] It should be understood that the above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it accordingly. It cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, some simple deductions or substitutions can be made without departing from the concept of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A probe hot and cold stage, comprising a base, an end cover and a probe; a sample stage is provided in the middle of a test cavity of the base, the probe is mounted on the probe stage of the test cavity and one end of the probe points to the sample stage; the end cover is detachably connected to the upper end of the base through a sealing strip, thereby sealing the test cavity; Features: Also included is a positioning assembly connected between the probe and the probe station, the positioning assembly comprising a weighted ball, an outer positioning spherical shell and an inner positioning spherical shell; The outside of the outer positioning spherical shell is fixed on the probe platform, and the inner surface of the outer positioning spherical shell is provided with a first resistance column; the inner positioning spherical shell is rotatably connected to the inside of the outer positioning spherical shell through a longitudinal rotating shaft, and the outer surface of the inner positioning spherical shell is provided with a row of first damping needles that are evenly spaced and increase in length along the circumference of the inner positioning spherical shell; the first resistance column and all the first damping needles are parallel to the horizontal plane; The weighted ball is rotatably connected to the inside of the inner positioning ball shell through a transverse rotating shaft, and the inner surface of the weighted ball is provided with a row of second damping needles which are evenly spaced and increase in length along the circumference of the weighted ball; the outside of the inner positioning ball shell is provided with a second resistance column, and the second resistance column and all the second damping needles are parallel to the vertical plane; It also includes a transverse permanent magnet and a longitudinal permanent magnet, and the other end of the probe penetrates the upper part of the counterweight ball and is hingedly connected to the transverse permanent magnet and the longitudinal permanent magnet respectively; It also includes an external electromagnetic controller located outside the base, which is respectively opposite to the two ends of the transverse permanent magnet and the two ends of the longitudinal permanent magnet. The external electromagnetic controller magnetically attracts one end of the transverse permanent magnet, so that the probe swings in the horizontal plane and the first damping needle and the first resistance column rub against each other to control the swing angle of the probe in the plane; or the external electromagnetic controller magnetically attracts one end of the longitudinal permanent magnet, so that the probe swings in the vertical plane and the second damping needle and the second resistance column rub against each other to control the swing angle of the probe in the vertical plane.

2. A probe hot and cold stage according to claim 1, characterized in that: The first resistance column and the second resistance column are both provided with a U-shaped groove, and a wear-resistant layer is provided in the U-shaped groove. The first damping needle or the second damping needle of different lengths passes through the corresponding U-shaped groove and rubs against the wear-resistant layer, thereby controlling the swing angle of the probe.

3. The probe hot and cold stage according to claim 1, characterized in that: Resistance pads are arranged between the weighted ball and the inner positioning spherical shell, and between the outer positioning spherical shell and the inner positioning spherical shell, and the rotation torque of the probe on the positioning assembly is balanced by the friction resistance of the resistance pads.

4. The probe hot and cold stage according to claim 1, characterized in that: The two ends of the longitudinal permanent magnet are respectively provided with magnetic poles, the middle part of the longitudinal permanent magnet is slidably connected to the end of the probe through the first telescopic rod, and the middle part of the longitudinal permanent magnet is hingedly connected to the first telescopic rod.

5. A probe hot and cold stage according to claim 4, characterized in that: The external electromagnetic controller includes an upper longitudinal electromagnet and a longitudinal rocker motor located above the end cover, the magnetic poles of the upper longitudinal electromagnet are directly opposite to the magnetic poles of the upper end of the longitudinal permanent magnet, and the upper longitudinal electromagnet is fixedly connected to the rocker arm of the longitudinal rocker motor, and the upper longitudinal electromagnet is driven by the longitudinal rocker motor to swing synchronously with the probe in the vertical plane, thereby keeping the magnetic poles of the upper longitudinal electromagnet always directly opposite to the magnetic poles of the upper end of the longitudinal permanent magnet; It includes a longitudinal electromagnet located below the base and another longitudinal rocker arm motor. The magnetic poles of the longitudinal electromagnet are directly opposite to the magnetic poles of the lower end of the longitudinal permanent magnet, and the longitudinal electromagnet is fixedly connected to the rocker arm of the corresponding longitudinal rocker arm motor. The longitudinal electromagnet is driven by the corresponding longitudinal rocker arm motor to swing synchronously with the probe in the vertical plane, thereby keeping the magnetic poles of the longitudinal electromagnet always directly opposite to the magnetic poles of the lower end of the longitudinal permanent magnet.

6. A probe hot and cold stage according to claim 5, characterized in that: The two ends of the transverse permanent magnet are respectively provided with magnetic poles, the middle part of the transverse permanent magnet is slidably connected to the end of the first telescopic rod through the second telescopic rod, and the middle part of the transverse permanent magnet is hingedly connected to the second telescopic rod.

7. A probe hot and cold stage according to claim 6, characterized in that: The external electromagnetic controller includes a left electromagnet and a left rocker motor located on the left side of the base, the magnetic pole of the left electromagnet is directly opposite to the magnetic pole of the left end of the transverse permanent magnet, and the left electromagnet is fixedly connected to the rocker arm of the left rocker motor, and the left electromagnet is driven by the left rocker motor to swing synchronously with the probe in the horizontal plane, thereby keeping the magnetic pole of the left electromagnet always directly opposite to the magnetic pole of the left end of the transverse permanent magnet; It includes a right electromagnet and a right rocker motor located on the right side of the base, the magnetic pole of the right electromagnet is directly opposite to the magnetic pole of the right end of the transverse permanent magnet, and the right electromagnet is fixedly connected to the rocker arm of the right rocker motor, and the right rocker motor drives the right electromagnet to swing synchronously with the probe in the horizontal plane, thereby keeping the magnetic pole of the right electromagnet always directly opposite to the magnetic pole of the right end of the transverse permanent magnet.

8. The probe hot and cold stage according to claim 1, characterized in that: The outer surface of the weighted ball and the inner surface of the inner positioning spherical shell are both provided with a notch for the first damping needle to swing, and the outer surface of the inner positioning spherical shell and the inner surface of the outer positioning spherical shell are both provided with a notch for the second damping needle to swing.

9. The probe hot and cold stage according to claim 7, characterized in that: Any first damping needle is longer or shorter than another adjacent first damping needle by L, and any second damping needle is longer or shorter than another adjacent second damping needle by L.

10. A probe adjustment method for a probe hot and cold stage, characterized in that: Based on the probe hot and cold stage described in claim 9, the external electromagnetic controller includes a controller body, and the controller body is electrically connected to two longitudinal rocker motors, a left rocker motor, a right rocker motor, a longitudinal upper electromagnet, a longitudinal lower electromagnet, a left electromagnet and a right electromagnet respectively; Here are the steps: S1. Place the sample on the sample table and tighten the end cover onto the base with bolts to seal the test chamber. S2, adjust the probe to the leftmost end and the highest point, the leftmost end corresponds to the shortest first damping needle, the highest point corresponds to the shortest second damping needle, the controller body drives the two longitudinal rocker motors to make the longitudinal upper electromagnet and the longitudinal lower electromagnet face the upper end and the lower end of the longitudinal permanent magnet respectively, and drives the left rocker motor and the right rocker motor to make the left electromagnet and the right electromagnet face the left end and the right end of the transverse permanent magnet respectively; S3, according to the test requirements, swing the front end of the probe to position A, and position A corresponds to the Ath first damping needle and the Ath second damping needle; S301, the controller body energizes the left electromagnet, and the magnetic force generated by the left electromagnet is smaller than the friction force between the Ath first damping needle and the first resistance column, and larger than the friction force between the A-1th first damping needle and the first resistance column; the left electromagnet attracts the left end of the transverse permanent magnet through magnetic force, and the probe swings toward the right end until the Ath first damping needle is stuck at the first resistance column because the friction resistance is larger than the magnetic force, and the left electromagnet is de-energized; S302, the controller body energizes the upper longitudinal electromagnet, and the magnetic force of the upper longitudinal electromagnet is smaller than the friction force between the Ath second damping needle and the second resistance column, and larger than the friction force between the A-1th second damping needle and the second resistance column; the upper longitudinal electromagnet attracts the upper end of the longitudinal permanent magnet through magnetic force, and the probe swings toward the lower end until the Ath second damping needle is stuck at the second resistance column because the friction resistance is greater than the magnetic force, and the upper longitudinal electromagnet is de-energized, so that the front end of the probe swings to the A position.

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