Roll-to-roll plasma equipment

Abstract

The reel-to-reel plasma equipment comprises a frame body with a hollow inner cavity and openings in the front side and the rear side, the front end and the rear end of the frame body are rotationally connected with a feeding roller used for feeding and a discharging roller used for discharging correspondingly, and the inner cavity of the frame body is further rotationally connected with a plurality of material guide rollers located between the feeding roller and the discharging roller; the roll-to-roll plasma equipment comprises a rack body, a plurality of material guide rollers are arranged on the rack body, a plurality of plasma generation assemblies in one-to-one correspondence with the material guide rollers are arranged on the rack body, and the plurality of material guide rollers and the plasma generation assemblies are alternately arranged. The coiled material does not need to repeatedly enter the frame body to clean the two faces, the possibility that the quality is influenced by the stretched coiled material is reduced, meanwhile, power is provided through the stabilizing assembly, the coiled material can be stably adsorbed to the material guide roller, the coiled material conveying stability is improved, and the possibility that the coiled material slides to cause wrinkles is reduced.

Description

Technical Field

[0001] The invention relates to the field of plasma cleaning, and in particular to a roll-to-roll plasma device. Background Art

[0002] Plasma, also known as plasma state. Matter in the plasma state has properties similar to those of the gaseous state, such as good fluidity and diffusivity. However, since the basic constituent particles of plasma are ions and electrons, it also has many properties that are different from the gaseous state, such as good electrical conductivity and thermal conductivity. In particular, according to scientific calculations, the specific heat capacity of plasma is proportional to the temperature, and the specific heat capacity of plasma at high temperatures is often hundreds of times that of gas. Therefore, the application of plasma is very extensive, from our daily life to industry, agriculture, environmental protection, military, aerospace, energy, celestial bodies, etc., it has very important application value.

[0003] In order to obtain good material surface adhesion before surface treatment of workpieces, it is a common treatment method to use plasma for surface cleaning. Plasma is an ionized gaseous substance composed of positive and negative ions generated by the ionization of atomic groups after some electrons are deprived. It is mainly sprayed onto the surface of the workpiece by the nozzle of the plasma treatment device to achieve the treatment purpose. With the development of plasma cleaning technology, the materials that can be plasma cleaned are becoming more and more diverse, which can not only meet the cleaning of independent objects such as particles and dolls, but also can continuously clean the entire roll of film.

[0004] The membrane material is cleaned by setting up a rewinding and unwinding mechanism in the plasma vacuum cleaning machine, so that the unrolled membrane material can be reeled after being treated with plasma. The cleaning process is efficient and easy to operate. However, during the plasma cleaning process, a large amount of energy is released when the high-frequency electromagnetic field converts gases (such as oxygen, argon, nitrogen, etc.) into plasma. This energy will cause the temperature in the cleaning room to rise, and then the temperature of the coil to be cleaned will rise. High temperature will cause the coil to soften, deform, and even cause high temperature burns. The problem of subsequent unusability is not conducive to mass production. Summary of the invention

[0005] In order to overcome the shortcomings of the prior art, the present invention proposes a roll-to-roll plasma equipment, including a frame with a hollow inner cavity and openings on both sides of the front and rear, the front and rear ends of the frame are respectively rotatably connected with a feed roller for feeding and a discharge roller for discharging, the inner cavity of the frame is also rotatably connected with a plurality of guide rollers located between the feed roller and the discharge roller, the frame is provided with a plurality of plasma generating assemblies corresponding to the guide rollers one by one, the plurality of guide rollers and the plasma generating assemblies are alternately arranged, a part of the plasma generating assemblies are located above adjacent guide rollers, and another part of the plasma generating assemblies are located below adjacent guide rollers, and the guide rollers are also provided with a stabilizing assembly for facilitating the stable transportation of the coiled materials.

[0006] To achieve the above-mentioned purpose, the frame supports the feed roller, the discharge roller, the guide roller and the plasma generating assembly. The coil to be cleaned passes through the feed roller and, in turn, passes through a number of alternately arranged guide rollers and moves out of the frame through the discharge roller. When the coil passes through a number of guide rollers, a number of plasma generating assemblies corresponding to each of the rollers are used to perform plasma cleaning on the upper and lower surfaces of the coil. The coil does not need to repeatedly enter the frame for cleaning on both sides, thereby reducing the possibility of stretching the coil and affecting its quality. At the same time, power is provided by the stabilizing assembly so that the coil can be stably adsorbed on the guide roller, thereby improving the stability of coil transportation and reducing the possibility of wrinkles due to coil slippage.

[0007] Furthermore, the material guide roller is a tubular structure with a hollow inner cavity and closed at both ends. The stabilizing component includes a plurality of suction holes evenly arranged on the material guide roller. The material guide roller is connected with the outside and the inner cavity of the material guide roller through the suction holes. A mounting tube with a hollow inner cavity is coaxially arranged at one end of the material guide roller. One end of the mounting tube passes through the frame and is fixed to the frame, and the other end penetrates into the material guide roller and is rotatably connected to the material guide roller. The inner cavity of the mounting tube is connected with the inner cavity of the material guide roller, and the mounting tube is connected with the air inlet pipe of the vacuum pump through a connecting pipe.

[0008] Through the above technical solution, the vacuum pump provides power to make the inner cavity of the guide roller in a negative pressure state, so as to stably adsorb the coiled material that bypasses the guide roller and reduce the possibility of the coiled material slipping and wrinkling. At the same time, the air flow in the guide roller circulates quickly, and the air flow will take away part of the heat, thereby promoting the heat dissipation process and further reducing the possibility of deformation of the coiled material due to high temperature.

[0009] Furthermore, a contact mesh covering a plurality of air suction holes and wrapped around the guide roller is fixed on the circumferential outer wall of the guide roller, and the aperture of the contact mesh is much smaller than the aperture of the air suction holes.

[0010] Through the above technical solution, a plurality of suction holes are covered by the contact mesh, thereby reducing the possibility of the suction holes on the guide roller damaging the coil.

[0011] Furthermore, a cooling component is provided in the middle of the inner cavity of the guide roller.

[0012] Through the above technical solution, by providing a cooling component, the temperature of the coiled material after plasma cleaning can be further reduced, thereby reducing the possibility of deformation or damage of the material at high temperature.

[0013] Furthermore, the cooling component includes a cooling pipe arranged in the middle position of the inner cavity of the material guide roller, a cross-shaped bracket is fixed to one end of the material guide roller groove wall close to the mounting tube, one end of the cooling pipe is fixed to the cross-shaped bracket, and the other end passes through the material guide roller and is rotatably connected to the material guide roller, the end of the cooling pipe passing through the material guide roller is fixed to the frame, the cooling pipe passes through the frame, and the end of the cooling pipe passing through the frame is provided with a cooling component for further cooling the material guide roller.

[0014] Through the above technical solution, the cooling tube located in the material guide roller is supported by a cross-shaped bracket and a frame, and power is provided by a cooling component. The temperature of the material is effectively controlled by the cooling tube to ensure that it is processed within an appropriate temperature range, thereby improving product quality and production efficiency.

[0015] Furthermore, the cooling component includes an exhaust pipe arranged on the side of the frame and fixed to the frame, the inner cavity of the exhaust pipe is integrated with an intake pipe, a throat pipe and a diffuser in sequence from bottom to top, the inner diameters of the intake pipe and the diffuser are gradually reduced toward the throat, a suction pipe is integrated on the throat, an end of the suction pipe away from the throat is fixed to an end of the cooling pipe passing through the frame, the intake pipe, throat pipe, diffuser, suction pipe and cooling pipe inner cavities are connected to each other, an end of the intake pipe away from the throat is connected to the air outlet of the air pump through a pipeline, and an end of the diffuser pipe away from the throat is connected to a processing box for collecting exhaust gas through a pipeline.

[0016] Through the above technical solution, the air inlet of the air pump is connected to the steam source, and the air pump provides power to allow high-pressure steam to enter the air inlet pipe. When the high-pressure steam passes through the throat, the air in the cooling pipe will be taken away by the low-pressure suction of the throat and discharged through the diffusion pipe. At this time, the pressure in the cooling pipe is reduced, the interaction between the gas molecules in the cooling pipe is weakened, and the mean free path between the molecules is increased, resulting in a decrease in the number of times the molecules collide with a unit area per unit time, and a decrease in the average kinetic energy of the molecules, that is, the gas temperature is reduced, further achieving a cooling effect.

[0017] Furthermore, the plasma generating assembly includes a plurality of conductive plates fixed to the frame, a plurality of plasma electrodes close to the guide rollers are fixed on the side of the conductive plates facing the adjacent guide rollers, and the plurality of plasma electrodes are arranged in an array along the center direction of the guide rollers.

[0018] Through the above technical solution, the output voltage is transmitted to the plasma electrode through the high-voltage cable and the conductive plate. The process gas forms plasma gas after passing through the plasma electrode. The plasma gas is evenly sprayed toward the coil on the guide roller, thereby improving the high uniformity of the plasma treatment.

[0019] Furthermore, an air inlet frame and an exhaust frame located between two adjacent material guide rollers are fixed on the upper and lower sides of the frame, respectively; one end of the air inlet frame and the exhaust frame is fixed to the frame, and the other end passes through the frame and is fixed to the frame; the parts of the air inlet frame and the exhaust frame passing through the frame are respectively integrated with an air supply pipe and an air extraction pipe; the air inlet frame and the exhaust frame are provided with a flow groove for the flow of process gas toward the side of the material guide roller.

[0020] Through the above technical solution, the process gas enters the gas inlet rack through the gas pipe, and then moves out of the gas pipe toward the plasma electrode through the flow groove. After cleaning, the process gas enters the exhaust rack through the flow groove and is discharged through the exhaust pipe.

[0021] Furthermore, the frame body is composed of an upper frame and a lower frame that cooperate with each other, a plurality of material guide rollers, an air delivery pipe and an air extraction pipe are respectively arranged on the upper frame and the lower frame, and the upper frame and the lower frame are connected by a distance adjustment component.

[0022] Through the above technical solution, a distance adjustment component is provided to provide power so as to drive the upper frame to move in the vertical direction. The upper frame moves to adjust the gap between two adjacent material guide rollers, thereby making the device suitable for coil materials with a thickness of microns to mm.

[0023] Furthermore, the distance adjustment assembly includes a cylinder fixed on the lower frame, an ear plate is fixed to the extended end of the cylinder, the ear plate is fixed to the upper frame, two ear seats are fixed on the lower frame, axial guide rods are fixed on the two ear seats, and a moving block is fixed on the upper frame, which is sleeved outside the guide rod and slidably connected to the guide rod.

[0024] Through the above technical solution, the cylinder provides power to drive the ear plate fixed to the extended end of the cylinder to move in the vertical direction. The movement of the ear plate will drive the upper frame fixed to the ear plate to move. The movement of the upper frame makes the device suitable for coil materials of different thicknesses.

[0025] In summary, the roll-to-roll plasma equipment has the following beneficial effects: The roll-to-roll plasma equipment has a frame supporting a feed roller, a discharge roller, a guide roller and a plasma generating assembly. The roll to be cleaned passes through the feed roller and sequentially passes through a plurality of alternately arranged guide rollers and moves out of the frame through the discharge roller. When the roll passes through the plurality of guide rollers, the upper and lower surfaces of the roll are plasma cleaned by a plurality of plasma generating assemblies corresponding to the plurality of guide rollers. The roll does not need to repeatedly enter the frame for cleaning of both surfaces, thereby reducing the possibility of the quality of the roll being affected by elongation. At the same time, the stabilizing assembly provides power so that the roll can be stably adsorbed on the guide roller, thereby improving the stability of the roll transportation and reducing the possibility of wrinkles due to the slippage of the roll.

[0026] The roll-to-roll plasma equipment is powered by a vacuum pump, which makes the inner cavity of the guide roller in a negative pressure state, so as to stably adsorb the roll of material that passes by the guide roller and reduce the possibility of the roll slipping and wrinkling. At the same time, the air flow in the guide roller circulates quickly, and the air flow will take away some heat, thereby promoting the heat dissipation process and further reducing the possibility of deformation of the roll due to high temperature.

[0027] In this roll-to-roll plasma equipment, the air inlet of the pump is connected to the steam source, and the air pump provides power to allow high-pressure steam to enter the air inlet pipe. When the high-pressure steam passes through the throat, the air in the cooling pipe will be taken away by the low-pressure suction of the throat and discharged through the diffusion pipe. At this time, the pressure in the cooling pipe is reduced, the interaction between the gas molecules in the cooling pipe is weakened, and the mean free path between the molecules is increased, resulting in a decrease in the number of times the molecules collide with a unit area per unit time, and a decrease in the average kinetic energy of the molecules, that is, the gas temperature is reduced, further achieving a cooling effect.

[0028] The roll-to-roll plasma equipment is provided with a distance adjustment component to provide power so as to drive the upper frame to move in the vertical direction. The upper frame moves to adjust the gap between two adjacent guide rollers, thereby making the device suitable for roll materials with a thickness of microns to mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present invention will be further described and explained below in conjunction with the accompanying drawings.

[0030] Figure 1 It is a schematic diagram of the overall structure of the preferred embodiment of the present invention; Figure 2 It is a schematic diagram of the overall rear view structure of the present invention; Figure 3 It is a schematic diagram of the structure of the plasma electrode of the present invention; Figure 4 The present invention Figure 2 The enlarged structural diagram at A in the middle; Figure 5 It is a partial cross-sectional structural schematic diagram of the guide roller of the present invention; Figure 6 It is a schematic diagram of the structure of the cross-shaped bracket of the present invention; Figure 7 It is a schematic diagram of the structure of the suction pipe of the present invention.

[0031] Figure numerals: 1, frame; 101, upper frame; 102, lower frame; 2, feed roller; 3, discharge roller; 4, guide roller; 5, plasma generating assembly; 501, conductive plate; 502, plasma electrode; 503, air intake frame; 504, exhaust frame; 505, air pipe; 506, exhaust pipe; 507, flow trough; 6, stabilizing assembly; 601, air suction hole; 602, mounting pipe; 603, contact mesh; 7, cooling assembly; 701, cooling pipe; 702, cross bracket; 703, air intake pipe; 704, throat; 705, diffusion pipe; 706, suction pipe; 8, distance adjusting assembly; 801, cylinder; 802, ear plate; 803, ear seat; 804, guide rod; 805, moving block. DETAILED DESCRIPTION

[0032] The technical solution of the present invention will be more clearly and completely explained below through description of preferred embodiments of the present invention in combination with the accompanying drawings.

[0033] like Figure 1-7 As shown, a roll-to-roll plasma device according to a preferred embodiment of the present invention comprises a frame 1 with a hollow inner cavity and openings on both front and rear sides, the front and rear ends of the frame 1 are rotatably connected with a feed roller 2 for feeding and a discharge roller 3 for discharging, the inner cavity of the frame 1 is also rotatably connected with four guide rollers 4 located between the feed rollers 2 and the discharge rollers 3, and the frame 1 is also provided with four plasma generating assemblies 5 corresponding to the guide rollers 4 one by one, the four guide rollers 4 and the plasma generating assemblies 5 are alternately arranged, wherein two plasma generating assemblies 5 are located above adjacent guide rollers 4, and the other two plasma generating assemblies 5 are located below adjacent guide rollers 4.

[0034] like Figure 1 and Figure 2 and Figure 3 The frame 1 supports a feed roller 2, a discharge roller 3, a guide roller 4 and a plasma generating assembly 5. The coil to be cleaned passes through the feed roller 2, and in turn passes through a number of alternately arranged guide rollers 4, and is moved out of the frame 1 through the discharge roller 3. The coil moved out of the frame 1 is connected to a winder, which provides power to drive the coil to move. The winder is a prior art, so it will not be described in detail here.

[0035] like Figure 1 and Figure 2 and Figure 3 When the coil passes through the four guide rollers 4, a number of plasma generating components 5 corresponding to each of the four guide rollers are used to perform plasma cleaning on the upper and lower surfaces of the coil. The coil does not need to repeatedly enter the frame 1 to be cleaned on both sides, thereby reducing the possibility of stretching the coil to affect the quality.

[0036] like Figure 1 and Figure 2 and Figure 3The plasma generating assembly 5 includes a plurality of conductive plates 501 fixed to the frame 1, the conductive plates 501 are arranged axially, a high-energy feed inlet connected to the conductive plates 501 is provided on the frame 1, a plurality of plasma electrodes 502 close to the guide roller 4 are fixed on the side of the conductive plates 501 facing the adjacent guide roller 4, and the plurality of plasma electrodes 502 are arranged in an array along the center direction of the guide roller 4, an air intake frame 503 and an exhaust frame 504 located between two adjacent guide rollers are fixed on the upper and lower sides of the frame 1, one end of the air intake frame 503 and the exhaust frame 504 are fixed to the frame 1, and the other end passes through the frame 1 and is fixed to the frame 1, and the parts of the air intake frame 503 and the exhaust frame 504 passing through the frame 1 are respectively integrated with a gas supply pipe 505 and an exhaust pipe 506, and the air intake frame 503 and the exhaust frame 504 are provided with a flow groove 507 for the flow of process gas toward the side of the guide roller 4.

[0037] like Figure 1 and Figure 2 and Figure 3 The process gas enters the air inlet rack 503 through the air delivery pipe 505, and the process gas entering the air inlet rack 503 is ejected toward the plasma electrodes 502 on both sides through the flow groove 507. The output voltage is transmitted to the plasma electrode 502 through the high-voltage cable and the conductive plate 501. The process gas forms plasma gas after passing through the plasma electrode 502. The plasma gas is uniformly ejected toward the coil on the guide roller 4, and the coil on the guide roller 4 is cleaned, thereby improving the high uniformity of the plasma treatment. This is the prior art, so it will not be described in detail here.

[0038] like Figure 1 and Figure 2 and Figure 3 The high-frequency electromagnetic field converts the process gas into plasma. In this process, a large amount of energy is released, resulting in an increase in the temperature of the coil on the guide roller 4. In order to reduce the possibility of deformation of the coil due to high temperature during plasma cleaning, a stabilizing component 6 is provided on the guide roller 4 to facilitate stable transportation of the coil. The stabilizing component 6 provides power so that the coil can be stably adsorbed on the guide roller 4, thereby improving the stability of coil transportation and reducing the possibility of wrinkles due to coil slippage.

[0039] like Figure 5The material guide roller 4 is a tubular structure with a hollow inner cavity and closed at both ends. The diameter of the mounting tube 602 is smaller than the diameter of the material guide roller 4. The stabilizing component 6 includes a plurality of suction holes 601 evenly arranged on the material guide roller 4. The material guide roller 4 is connected to the outside and the inner cavity of the material guide roller 4 through the suction holes 601. A mounting tube 602 with a hollow inner cavity is coaxially arranged at one end of the material guide roller 4. One end of the mounting tube 602 passes through the frame 1 and is fixed to the frame 1, and the other end penetrates into the material guide roller 4 and is rotatably connected to the material guide roller 4. The connection between the mounting tube 602 and the material guide roller 4 is sealed, and the inner cavity of the mounting tube 602 is connected to the inner cavity of the material guide roller 4. The mounting tube 602 is connected to the air inlet pipe 703 of the vacuum pump through a connecting tube.

[0040] like Figure 5 The vacuum pump provides power to make the inner cavity of the guide roller 4 in a negative pressure state, so as to stably adsorb the coiled material that bypasses the guide roller 4 and reduce the possibility of the coiled material slipping and wrinkling. The gas in the frame 1 enters the inner cavity of the guide roller 4 through the suction hole 601 and is discharged from the guide roller 4 through the mounting tube 602. The air flow in the guide roller 4 circulates rapidly, and the air flow will take away part of the heat, thereby promoting the heat dissipation process and further reducing the possibility of deformation of the coiled material due to high temperature.

[0041] like Figure 5 In order to reduce the possibility of the suction holes 601 damaging the coiled material, a contact mesh 603 covering a number of suction holes 601 and wrapped around the guide roller 4 is fixed on the circumferential outer wall of the guide roller 4, and the aperture of the contact mesh 603 is much smaller than the aperture of the suction holes 601.

[0042] like Figure 5 and Figure 6 In order to further reduce the temperature of the coil on the guide roller 4, a cooling component 7 is also provided in the middle position of the inner cavity of the guide roller 4.

[0043] like Figure 5 and Figure 6 The cooling component 7 includes a cooling tube 701 arranged in the middle position of the inner cavity of the material guide roller 4. The center line of the cooling tube 701 coincides with the center line of the material guide roller 4. A cross-shaped bracket 702 is fixed to one end of the inner cavity groove wall of the material guide roller 4 close to the mounting tube 602. One end of the cooling tube 701 is fixed to the cross-shaped bracket 702, and the other end passes through the material guide roller 4 and is rotatably connected to the material guide roller 4. The connection between the cooling tube 701 and the material guide roller 4 is sealed. The cross-shaped bracket 702 supports the cooling tube 801 without affecting the air extraction. A cooling component is provided at one end of the cooling tube 701 passing through the frame 1 for further cooling the material guide tube. The power is provided by the cooling component, and the temperature of the material is effectively controlled by the cooling tube 701 to ensure that it is processed within an appropriate temperature range, thereby improving the quality of the product and the production efficiency.

[0044] like Figure 7The cooling component includes an exhaust pipe arranged on the side of the frame 1 and fixed to the frame 1. The inner cavity of the exhaust pipe is integrated with an air inlet pipe 703, a throat pipe 704 and a diffuser 705 from bottom to top. The inner diameters of the air inlet pipe 703 and the diffuser 705 are gradually reduced toward the throat pipe 704. A suction pipe 706 is integrated on the throat pipe 704. The end of the suction pipe 706 away from the throat pipe 704 is fixed to the end of the cooling pipe 701 passing through the frame 1. The inner cavities of the air inlet pipe 703, the throat pipe 704, the diffuser 705, the suction pipe 706 and the cooling pipe 701 are connected to each other. The end of the air inlet pipe 703 away from the throat pipe 704 is connected to the air outlet of the air pump through a pipeline, and the end of the diffuser 705 away from the throat pipe 704 is connected to the processing box for collecting exhaust gas through a pipeline.

[0045] like Figure 5 and Figure 6 and Figure 7 , the cooling tube 701 is filled with water, the air inlet of the air pump is connected to the steam source, and the air pump provides power to allow high-pressure steam to enter the air inlet pipe 703. When the high-pressure steam passes through the throat 704, the air in the cooling tube 701 will be taken away by the low-pressure suction of the throat 704 and discharged through the diffusion tube 705. At this time, negative pressure is formed in the cooling tube 701, and a large amount of water vapor will be generated, dissipating a large amount of heat. The dissipated heat will be discharged with the steam. At this time, the water temperature inside the cooling tube 701 gradually decreases, and the cooling tube 701 absorbs the surrounding heat The cooling tube 701 has a uniform cooling effect, which solves the problem that the roller surface temperature at the water inlet end of the traditional cooling roller is often lower than the roller surface temperature at the water outlet end, resulting in different cooling degrees at both ends of the product, inconsistent shrinkage rates, wrinkles and uneven flatness of the film after rolling, and unilateral warping of the hard sheet.

[0046] like Figure 1 and Figure 2 and Figure 3 and Figure 4 The frame 1 is composed of an upper frame 101 and a lower frame 102 that cooperate with each other. The upper frame 101 and the lower frame 102 have a serrated side facing each other. A plurality of guide rollers 4, an air delivery pipe 505 and an air exhaust pipe 506 are respectively arranged on the upper frame 101 and the lower frame 102. The upper frame 101 and the lower frame 102 are connected by a distance adjustment component 8. The distance adjustment component 8 is provided to provide power so as to drive the upper frame 101 to move in the vertical direction. The upper frame 101 moves so as to adjust the gap between two adjacent guide rollers 4, thereby making the device suitable for coil materials with a thickness of 3 microns to 1 mm.

[0047] like Figure 1 and Figure 2 and Figure 3 and Figure 4 The distance adjustment component 8 includes a cylinder 801 fixed on the lower frame 102, and an ear plate 802 is fixed on the extended end of the cylinder 801. The ear plate 802 is fixed to the upper frame 101, and two ear seats 803 are fixed on the lower frame 102. Axial guide rods 804 are fixed on the two ear seats 803, and a moving block 805 is fixed on the upper frame 101, which is sleeved outside the guide rod 804 and slidably connected to the guide rod 804. The cylinder 801 provides power to drive the ear plate 802 fixed to the extended end of the cylinder 801 to move in the vertical direction. The movement of the ear plate 802 will drive the upper frame 101 fixed to the ear plate 802 to move. The upper frame 101 moves so that the device is suitable for coil materials of different thicknesses, and at the same time, it also reduces the possibility of wrinkles when thicker coils enter the device due to the inability to adjust the thickness of the device.

[0048] When in use, the power is turned on, the switch is turned on, and according to the thickness of the web to be cleaned, the cylinder is turned on, and the cylinder 801 provides power to drive the ear plate 802 fixed to the extended end of the cylinder 801 to move in the vertical direction. The movement of the ear plate 802 will drive the upper frame 101 fixed to the ear plate 802 to move, and the cooperation of the moving block 805 and the guide rod 804 plays a guiding and limiting role in the movement of the upper frame 101 until the upper frame moves to between every two adjacent guide rollers 4 to accommodate the web of corresponding thickness; One end of the web to be cleaned passes through the feed roller 2, and passes through a plurality of alternately arranged guide rollers 4 in sequence, and moves out of the frame 1 through the discharge roller 3. The end of the web that moves out of the frame 1 is fixed to the winder, and the winder provides power to drive the web to move. The movement of the web drives the rotation of the feed roller 2, the discharge roller 3 and the guide roller 4. The process gas flows along the flow path and enters the air inlet frame 503 through the air delivery pipe 505. The process gas entering the air inlet frame 503 is ejected toward the plasma electrodes 502 on both sides through the flow groove 507. The output voltage is transmitted to the plasma electrode 502 through the high-voltage cable and the conductive plate 501. The process gas forms plasma gas after passing through the plasma electrode 502. The plasma gas is uniformly ejected toward the coil on the guide roller 4, and the coil on the guide roller 4 is subjected to plasma treatment. In this process, a large amount of energy is released, causing the temperature of the coil on the guide roller 4 to rise. The vacuum pump is turned on and powered by the vacuum pump, so that the inner cavity of the guide roller 4 is in a negative pressure state, so as to stably adsorb the coil that passes by the guide roller 4, reducing the possibility of the coil slipping and wrinkling. At the same time, the air flow in the guide roller 4 circulates quickly, and the air flow will take away part of the heat, thereby promoting the heat dissipation process and further reducing the possibility of deformation of the coil due to high temperature. Turn on the air pump and use the power provided by the air pump to allow high-pressure steam to enter the air inlet pipe 703. When the high-pressure steam passes through the throat pipe 704, the air in the cooling pipe 701 will be taken away by the low-pressure suction of the throat pipe 704 and discharged through the diffusion pipe 705. At this time, negative pressure is formed in the cooling pipe 701, and a large amount of water vapor will be generated, dissipating a large amount of heat, which will be discharged along with the steam. At this time, the water temperature inside the cooling pipe 701 gradually decreases, and the cooling pipe 701 absorbs the surrounding heat to lower its own temperature, thereby lowering the ambient temperature and further achieving the cooling effect, effectively reducing the different cooling degrees at both ends of the product, resulting in inconsistent shrinkage rates, and the film is prone to wrinkling and unevenness after being rolled, and the hard film may produce unilateral warping. The above specific implementations are only descriptions of the preferred implementations of the present invention, and do not limit the protection scope of the present invention. Without departing from the design concept and spirit of the present invention, various modifications, substitutions and improvements made by ordinary technicians in this field to the technical solution of the present invention based on the text description and drawings provided by the present invention should all fall within the protection scope of the present invention. The protection scope of the present invention is determined by the claims.

Claims

1. A roll-to-roll plasma device, characterized in that: The invention comprises a frame (1) with a hollow inner cavity and openings on both the front and rear sides. The front and rear ends of the frame (1) are rotatably connected to a feed roller (2) for feeding and a discharge roller (3) for discharging. The inner cavity of the frame (1) is also rotatably connected to a plurality of guide rollers (4) located between the feed rollers (2) and the discharge rollers (3). The frame (1) is provided with a plurality of plasma generating assemblies (5) corresponding to the guide rollers (4) one by one. The plurality of guide rollers (4) and the plasma generating assemblies (5) are arranged alternately. A portion of the plasma generating assemblies (5) is located above adjacent guide rollers (4), and another portion of the plasma generating assemblies (5) is located below adjacent guide rollers (4). The guide rollers (4) are also provided with a stabilizing assembly (6) for facilitating stable transportation of coiled materials.

2. The roll-to-roll plasma equipment according to claim 1, characterized in that: The material guide roller (4) is a tubular structure with a hollow inner cavity and closed at both ends. The stabilizing component (6) comprises a plurality of suction holes (601) uniformly arranged on the material guide roller (4). The material guide roller (4) is connected to the outside and the inner cavity of the material guide roller (4) through the suction holes (601). A mounting tube (602) with a hollow inner cavity is coaxially arranged at one end of the material guide roller (4). One end of the mounting tube (602) passes through the frame (1) and is fixed to the frame (1), and the other end penetrates into the material guide roller (4) and is rotatably connected to the material guide roller (4). The inner cavity of the mounting tube (602) is connected to the inner cavity of the material guide roller (4). The mounting tube (602) is connected to an air inlet pipe (703) of a vacuum pump through a connecting tube.

3. The roll-to-roll plasma equipment according to claim 2, characterized in that: A contact mesh (603) covering a plurality of air suction holes (601) and wrapped around the outside of the material guide roller (4) is also fixed on the circumferential outer wall of the material guide roller (4); the aperture of the contact mesh (603) is much smaller than the aperture of the air suction holes (601).

4. The roll-to-roll plasma equipment according to claim 2, characterized in that: A cooling component (7) is also provided in the middle of the inner cavity of the material guide roller (4).

5. The roll-to-roll plasma equipment according to claim 4, characterized in that: The cooling component (7) comprises a cooling pipe (701) arranged in the middle position of the inner cavity of the material guide roller (4); a cross-shaped bracket (702) is fixed to one end of the groove wall of the material guide roller (4) close to the mounting tube (602); one end of the cooling pipe (701) is fixed to the cross-shaped bracket (702); the other end passes through the material guide roller (4) and is rotatably connected to the material guide roller (4); the end of the cooling pipe (701) passing through the material guide roller (4) is fixed to the frame (1); the cooling pipe (701) passes through the frame (1); and the end of the cooling pipe (701) passing through the frame (1) is provided with a cooling component for further cooling the material guide roller (4).

6. The roll-to-roll plasma equipment according to claim 5, characterized in that: The cooling assembly comprises an exhaust pipe arranged on the side of the frame (1) and fixed to the frame (1), and the inner cavity of the exhaust pipe is integrated with an air intake pipe (703), a throat pipe (704) and a diffuser pipe (705) in sequence from bottom to top, the inner diameters of the air intake pipe (703) and the diffuser pipe (705) are gradually reduced towards the throat pipe (704), and a suction pipe (706) is integrated on the throat pipe (704), and the suction pipe (706) is away from the throat pipe (704). One end of the air inlet pipe (703) is fixed to one end of the cooling pipe (701) passing through the frame (1); the inner cavities of the air inlet pipe (703), the throat pipe (704), the diffusion pipe (705), the suction pipe (706) and the cooling pipe (701) are interconnected; one end of the air inlet pipe (703) away from the throat pipe (704) is connected to the air outlet of the air pump via a pipeline; and one end of the diffusion pipe (705) away from the throat pipe (704) is connected to a processing box for collecting exhaust gas via a pipeline.

7. The roll-to-roll plasma equipment according to claim 1, characterized in that: The plasma generating assembly (5) comprises a plurality of conductive plates (501) fixed to the frame (1); a plurality of plasma electrodes (502) close to the material guide roller (4) are fixed on one side of the plurality of conductive plates (501) facing the adjacent material guide roller (4); and the plurality of plasma electrodes (502) are arranged in an array along the center direction of the material guide roller (4).

8. The roll-to-roll plasma equipment according to claim 7, characterized in that: An air intake frame (503) and an exhaust frame (504) located between two adjacent material guide rollers are fixed to the upper and lower sides of the frame (1), respectively; one end of the air intake frame (503) and the exhaust frame (504) are fixed to the frame (1), and the other end passes through the frame (1) and is fixed to the frame (1); the parts of the air intake frame (503) and the exhaust frame (504) passing through the frame (1) are respectively integrated with an air supply pipe (505) and an exhaust pipe (506); and the air intake frame (503) and the exhaust frame (504) are provided with a flow groove (507) for the flow of process gas on the side facing the material guide roller (4).

9. The roll-to-roll plasma equipment according to claim 8, characterized in that: The frame (1) is composed of an upper frame (101) and a lower frame (102) that cooperate with each other, a plurality of material guide rollers (4), an air delivery pipe (505) and an air extraction pipe (506) are respectively arranged on the upper frame (101) and the lower frame (102), and the upper frame (101) and the lower frame (102) are connected via a distance adjustment component (8).

10. The roll-to-roll plasma equipment according to claim 9, characterized in that: The pitch adjustment assembly (8) comprises a cylinder (801) fixed on a lower frame (102); an ear plate (802) is fixed to an extended end of the cylinder (801); the ear plate (802) is fixed to an upper frame (101); two ear seats (803) are fixed to the lower frame (102); axial guide rods (804) are fixed to the two ear seats (803); and a moving block (805) is fixed to the upper frame (101) and is sleeved outside the guide rod (804) and is slidably connected to the guide rod (804).

Images