Integrated circuit sound scanning detection device and integrated circuit carrier thereof

Abstract

The invention relates to an integrated circuit sound scanning detection device and an integrated circuit carrier thereof, and belongs to the technical field of integrated circuit detection. The integrated circuit carrier comprises a fixed frame and a movable frame, the movable frame is located in the fixed frame and is in sliding fit with the fixed frame, and one end of the movable frame is connected with a vibration mechanism for driving the movable frame to do reciprocating linear motion. A positioning mechanism for positioning the integrated circuit is arranged on the movable frame and comprises a supporting surface for supporting the integrated circuit; the movable frame is provided with a plurality of water spraying channels, and the water outlet direction of the water spraying channels is parallel to the supporting face and perpendicular to the linear motion direction of the movable frame. The integrated circuit sound scanning detection device comprises the integrated circuit carrier. According to the method, bubbles on the surface of the integrated circuit can be removed, gas in tiny holes in the integrated circuit can be removed, the situation that new bubbles are generated due to the fact that the gas in the integrated circuit is exhausted in the scanning process is avoided, and therefore the detection precision is guaranteed.

Description

Technical Field

[0001] The present invention belongs to the technical field of integrated circuit detection, and particularly relates to an integrated circuit acoustic scan detection device and an integrated circuit carrier therefor. Background Art

[0002] Ultrasonic scanning detection is a commonly used detection method for integrated circuits, which has the advantages of high efficiency, being able to accurately detect internal defects of circuit boards, and low cost. Currently, the process of acoustic scan detection is generally as follows: The integrated circuit to be detected is placed in a carrier, and the carrier is connected to the integrated circuit and immersed in deionized water. Then, an ultrasonic scanning head immersed in the deionized water is used to scan the integrated circuit to obtain a scanned image, and internal defects of the circuit board can be judged from the scanned image. A common problem in acoustic scan detection is that after the integrated circuit enters the deionized water, bubbles will be generated on the surface, and the bubbles will interfere with the propagation of ultrasonic waves, affecting the accuracy of detection. Therefore, the bubbles must be removed before detection.

[0003] The invention application with the application number CN202210507446.8 discloses a plastic-encapsulated integrated circuit batch ultrasonic scanning inspection device and method, which uses an air pump to blow air into the accommodation cavity containing the plastic-encapsulated integrated circuit through an air inlet pipe, so that the flowing water around the plastic-encapsulated integrated circuit takes away the bubbles attached to the surface. Since one of the reasons for the generation of bubbles on the surface of the integrated circuit is that the deionized water contains gas, if air is blown into the deionized water, the gas content in the deionized water will increase, and more bubbles will be generated on the surface of the integrated circuit during subsequent detection.

[0004] The invention patent with the application number CN202410147728.0 discloses an integrated circuit carrier and an integrated circuit acoustic scan detection device, which open a plurality of water pumping holes on the bearing surface of the carrier board, so that each bubble on the surface of the integrated circuit located on the bearing surface of the carrier board can be pumped out through the water pumping holes along with the water flow, thereby removing the bubbles at various positions on the integrated circuit. One of the reasons for the generation of bubbles on the surface of the integrated circuit is that when the integrated circuit is stored in the air, gas molecules (especially in hydrophobic regions) will be adsorbed on the surface, and at the same time, microscopic concave and convex structures such as pads, traces or holes will intercept air. After the integrated circuit is immersed in deionized water, the adsorbed or intercepted air becomes bubbles. However, the air in microscopic concave and convex structures such as pads, traces or holes usually gradually discharges and cannot be quickly and completely discharged. Although the above detection device can take away the bubbles on the surface of the integrated circuit through water flow, it cannot promote the rapid discharge of the air intercepted in microscopic concave and convex structures such as pads, traces or holes. During subsequent detection, if these bubbles are discharged, new bubbles will be formed again, affecting the detection accuracy. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide an integrated circuit acoustic scanning detection device and an integrated circuit carrier thereof, which can prompt the air trapped in microscopic concave and convex structures such as pads, traces or holes to be quickly discharged and removed in a timely manner, and improve the accuracy of acoustic scanning detection.

[0006] To solve the above problems, the technical solution adopted by the present invention is: an integrated circuit carrier, including a fixed frame and a movable frame, the movable frame is located inside the fixed frame and is slidably matched with the fixed frame, and one end of the movable frame is connected with a vibration mechanism for driving the movable frame to reciprocate linearly; A positioning mechanism for positioning the integrated circuit is arranged on the movable frame, and the positioning mechanism includes a supporting surface for supporting the integrated circuit; A plurality of water spraying channels are arranged on the movable frame, and the water outlet direction of the water spraying channels is parallel to the supporting surface and perpendicular to the linear movement direction of the movable frame.

[0007] Further, the movable frame includes a left frame beam, a front frame beam, a right frame beam and a rear frame beam connected in sequence, the front frame beam and the rear frame beam are both slidably matched with the fixed frame, and the vibration mechanism is connected to the left frame beam or the right frame beam; The positioning mechanism includes supporting grooves arranged on the upper surfaces of the left frame beam, the front frame beam, the right frame beam and the rear frame beam, and the supporting surface is the bottom of the supporting groove; Bosses are arranged on the upper surfaces of the front frame beam and the rear frame beam, and the water spraying channels are arranged on the bosses; Pressing mechanisms for pressing the edges of the integrated circuit are arranged at both ends of the inner side surface of the boss.

[0008] Further, the pressing mechanism includes a pressing rod, horizontal sliding grooves are arranged on the inner side surface of the boss, both ends of the pressing rod are located in the sliding grooves and are slidably matched with the sliding grooves; a V-shaped groove is arranged on the top wall of the pressing rod, a positioning groove is arranged on the top wall of the sliding groove, a V-shaped clamping block slidably matched with the positioning groove is arranged in the positioning groove, and a first spring is arranged between the upper end of the V-shaped clamping block and the bottom of the positioning groove.

[0009] Further, the vibration mechanism includes a piston blind hole arranged inside the fixed frame, a connecting column slidably matched with the piston blind hole is arranged in the piston blind hole, one end of the connecting column extends out of the piston blind hole and is fixedly connected with the movable frame, and a second spring is arranged between the other end of the connecting column and the bottom of the piston blind hole; a water inlet channel is connected to the bottom of the piston blind hole, a water outlet channel is arranged on the side wall of the piston blind hole, and the water outlet channel is connected with a valve.

[0010] An integrated circuit acoustic scanning detection device, including a water tank and an ultrasonic scanning probe, the above-mentioned integrated circuit carrier is arranged inside the water tank, and the water spraying channel is connected with a water spraying power mechanism.

[0011] Further, the pool is circular, and a feeding station, a degassing station, a scanning station, and a discharging station are sequentially arranged along the circumferential direction of the pool. The ultrasonic scanning probe is arranged at the scanning station; a circular track is arranged around the pool, and a plurality of moving seats are arranged on the track. An elevating block is arranged on each moving seat. The elevating block is connected with an elevating mechanism, and a horizontal cantilever is arranged on the elevating block. The cantilever extends above the pool, and a vertical connecting rod is arranged at the end of the cantilever. The lower end of the connecting rod extends into the pool, and the fixed frame is connected with the connecting rod.

[0012] Further, a rotating shaft is arranged on the fixed frame, the rotating shaft is rotatably installed at the lower end of the connecting rod, and a rotation driving mechanism is arranged on the cantilever. The rotation driving mechanism is connected with the rotating shaft through a belt.

[0013] Further, a plurality of water spraying channels are all connected with a water conveying main pipe. A water inlet pipe is arranged on the water conveying main pipe, and the axial direction of the water inlet pipe is consistent with the radial direction of the rotating shaft; The water spraying power mechanism includes a water pump fixedly arranged in the pool. The water pump is connected with a vertical water delivery pipe, and a lifting docking head for docking with the water inlet pipe is arranged at the upper end of the water delivery pipe.

[0014] Further, a water inlet notch is arranged at the end of the water inlet pipe; The lifting docking head includes a lifting pipe arranged in the upper port of the water delivery pipe and slidably matched with the water delivery pipe. The inner hole of the lifting pipe is sequentially a communication hole, a tapered hole, and a guiding hole from bottom to top. The diameter of the tapered hole decreases from bottom to top. A support frame is arranged in the communication hole, a spherical plug is arranged in the tapered hole, and a third spring is arranged between the spherical plug and the support frame; the diameter of the guiding hole is adapted to the outer diameter of the end of the water inlet pipe.

[0015] The beneficial effects of the present invention are as follows: The present invention can fix the integrated circuit on the movable frame through the positioning mechanism. When removing air bubbles, the vibration mechanism can be used to drive the movable frame to perform small-amplitude reciprocating linear vibration. The movable frame drives the integrated circuit to perform reciprocating linear vibration. Under the action of vibration, the air trapped in the micro-concave and convex structures such as solder pads, traces, or holes can be quickly discharged. At the same time, water is sprayed on one side of the integrated circuit to be scanned through the water spraying channel, and the water spraying direction is parallel to the integrated circuit to take away the air bubbles on the surface of the integrated circuit.

[0016] It can be seen that the present invention can not only remove the air bubbles on the surface of the integrated circuit, but also remove the gas in the micro-holes inside the integrated circuit, avoiding the generation of new air bubbles due to the discharge of the gas inside the integrated circuit during the scanning process, thereby ensuring the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a top view schematic diagram of the integrated circuit carrier of the present invention; Figure 2 is Figure 1 The sectional view schematic diagram of A-A in Figure 3 is Figure 1 The sectional view schematic diagram of B-B in Figure 4 is Figure 1 The sectional view schematic diagram of C-C in Figure 5 is the front view schematic diagram of an implementation manner of the integrated circuit acoustic scanning detection device of the present invention; Figure 6 is the top view schematic diagram of another implementation manner of the integrated circuit acoustic scanning detection device of the present invention; Figure 7 is Figure 6 The sectional view schematic diagram of D-D in Figure 8 is Figure 6 The enlarged schematic diagram of part F in Figure 9 is the schematic diagram when the vehicle rotates to the vertical state at the degassing station; Figure 10 is Figure 9 The enlarged schematic diagram of part E in Reference numerals: 1 - fixed frame; 2 - movable frame; 21 - left frame beam; 22 - right frame beam; 23 - front frame beam; 24 - rear frame beam; 25 - boss; 26 - pressure rod; 27 - chute; 28 - V-shaped groove; 29 - V-shaped clamping block; 210 - first spring; 3 - support surface; 4 - water spraying channel; 5 - support groove; 6 - piston blind hole; 7 - connecting column; 8 - second spring; 9 - water inlet channel; 10 - water outlet channel; 11 - valve; 100 - water tank; 101 - ultrasonic scanning probe; 102 - track; 103 - moving seat; 104 - lifting block; 105 - lifting mechanism; 106 - cantilever; 107 - connecting rod; 108 - rotating shaft; 109 - rotating drive mechanism; 110 - water delivery main pipe; 111 - water inlet pipe; 112 - water pump; 113 - water delivery pipe; 114 - lifting pipe; 115 - water inlet notch; 116 - support frame; 117 - spherical plug; 118 - third spring. Detailed implementation manners

[0018] The present invention will be further described below with reference to the drawings and embodiments.

[0019] The integrated circuit carrier of the present invention, as Figures 1 to 4As shown in the figure, it includes a fixed frame 1 and a movable frame 2. The movable frame 2 is used to position the integrated circuit. The integrated circuit is usually rectangular, so both the fixed frame 1 and the movable frame 2 are rectangular frames. In order to keep the integrated circuit fixed, a positioning mechanism for positioning the integrated circuit is provided on the movable frame 2. The positioning mechanism includes a support surface 3 for supporting the integrated circuit. The support surface 3 can be attached to the side surface of the integrated circuit to support the integrated circuit.

[0020] The movable frame 2 is located inside the fixed frame 1 and is in sliding fit with the fixed frame 1. One end of the movable frame 2 is connected with a vibration mechanism for driving the movable frame 2 to perform reciprocating linear motion. The vibration mechanism can drive the movable frame 2 to perform small-amplitude reciprocating linear movement, so that the movable frame 2 vibrates linearly. When the integrated circuit is fixed to the movable frame 2, the vibration mechanism can drive the movable frame 2 and the integrated circuit as a whole to vibrate linearly.

[0021] A plurality of water spray channels 4 are provided on the movable frame 2. The water outlet direction of the water spray channels 4 is parallel to the support surface 3 and perpendicular to the linear motion direction of the movable frame 2. The water spray channels 4 are used to spray water flow, and the flowing water is used to take away the bubbles on the surface of the integrated circuit.

[0022] When the present invention is in use, the integrated circuit is placed on the support surface 3, and the positioning mechanism is used to position the integrated circuit, so that the integrated circuit and the movable frame 2 become an integral body. Then the integrated circuit together with the carrier is integrally placed into deionized water, and bubbles are generated on the surface of the integrated circuit. Then, the vibration mechanism can be used to drive the movable frame 2 and the integrated circuit to perform reciprocating linear vibration motion. During the vibration of the integrated circuit, the bubbles on the surface will enter the water, and under the action of vibration, the air trapped in the microscopic concave-convex structures such as pads, traces or holes can be quickly discharged, avoiding the generation of new bubbles due to the discharge of the gas inside the integrated circuit during the subsequent scanning process, thereby ensuring the detection accuracy. While vibrating, the water spray channels 4 can be used to spray water on the surface of the integrated circuit to be scanned. The water spray direction is parallel to the surface of the integrated circuit to be scanned and perpendicular to the linear motion direction of the integrated circuit. Assuming that the linear motion direction of the integrated circuit is consistent with its length direction, the movement direction of the water relative to the integrated circuit during its vibration is also consistent with its length direction, while the water sprayed out by the water spray channels 4 is consistent with the width direction of the integrated circuit. The movement directions of the two water flows are perpendicular to each other, and the water flows collide, flowing irregularly locally. The water flow is more likely to enter the tiny holes on the integrated circuit, and at the same time, it causes a slight impact on the integrated circuit, improving the vibration exhaust effect of the integrated circuit. The water spray channels 4 spray water from one side edge of the integrated circuit, so that the water flow as a whole flows from one side edge of the integrated circuit to the other side edge, ensuring that the bubbles can be taken away, but forming irregular turbulent flow locally, prompting the gas inside the integrated circuit to be discharged.

[0023] The present invention can not only remove the bubbles on the surface of the integrated circuit, but also remove the gas in the tiny holes inside the integrated circuit, avoiding the generation of new bubbles due to the discharge of the gas inside the integrated circuit during the scanning process, thereby ensuring the detection accuracy.

[0024] The movable frame 2 of the present invention includes a left frame beam 21, a front frame beam 23, a right frame beam 22 and a rear frame beam 24 connected in sequence. The left frame beam 21, the front frame beam 23, the right frame beam 22 and the rear frame beam 24 enclose a rectangular cavity. Both the front frame beam 23 and the rear frame beam 24 are slidably matched with the fixed frame 1, so that the movable frame 2 can slide left and right. The vibration mechanism is connected to the left frame beam 21 or the right frame beam 22 and is used to drive the movable frame 2 to move linearly left and right. The above left, right, front and rear are Figure 1 referenced to the orientation shown. When the direction of the view changes, each orientation is adjusted adaptively.

[0025] The positioning mechanism includes support grooves 5 provided on the upper surfaces of the left frame beam 21, the front frame beam 23, the right frame beam 22 and the rear frame beam 24. The support surface 3 is the bottom of the support groove 5. The left frame beam 21, the front frame beam 23, the right frame beam 22 and the rear frame beam 24 enclose a cavity. The support grooves 5 are located around the cavity, and the bottom of the support groove 5 extends into the cavity. The four sides of the integrated circuit can be supported by the bottoms of the four support grooves 5 respectively. After the integrated circuit is placed in the support groove 5, the integrated circuit will be completely covered.

[0026] Protrusions 25 are provided on the upper surfaces of the front frame beam 23 and the rear frame beam 24. The water spraying channels 4 are provided on the protrusions 25. Multiple water spraying channels 4 can be provided. When the multiple water spraying channels 4 spray water simultaneously, the bubbles on the entire upper surface of the integrated circuit can be removed.

[0027] In order to improve the stability of the positioning of the integrated circuit, pressing mechanisms for pressing the edges of the integrated circuit are provided at both ends of the inner side surface of the protrusion 25. The inner side surface refers to the side surface of the protrusion 25 facing the cavity. After the integrated circuit is placed in the support groove 5, the pressing mechanism is used to press the integrated circuit to prevent the integrated circuit from vibrating and shaking or detaching from the support groove 5 during the scanning process. The pressing mechanism presses the edge parts at the ends of the integrated circuit and does not affect the ultrasonic scanning.

[0028] In the present invention, the pressing mechanism includes a pressing rod 26. A horizontal sliding groove 27 is provided on the inner side surface of the convex platform 25. Both ends of the pressing rod 26 are located in the sliding groove 27 and are in sliding fit with the sliding groove 27. A V-shaped groove 28 is provided on the top wall of the pressing rod 26. A positioning groove is provided on the top wall of the sliding groove 27. A V-shaped clamping block 29 that is in sliding fit with the positioning groove is provided in the positioning groove. A first spring 210 is provided between the upper end of the V-shaped clamping block 29 and the bottom of the positioning groove. When no integrated circuit is placed in the support groove 5, the pressing rod 26 is located outside the support groove 5. The depth of the support groove 5 is consistent with the thickness of the integrated circuit. After the integrated circuit is placed in the support groove 5, the pressing rod 26 can be slid above the support groove 5, and the lower surface of the pressing rod 26 can press the integrated circuit tightly. During the process of sliding the pressing rod 26, the pressing rod 26 squeezes the V-shaped clamping block 29, causing the V-shaped clamping block 29 to move upward, and the first spring 210 is compressed. When the V-shaped groove 28 of the pressing rod 26 moves below the V-shaped clamping block 29, the first spring 210 extends, pushing the V-shaped clamping block 29 to snap into the V-shaped groove 28 to limit the pressing rod 26.

[0029] The vibration mechanism can adopt the existing technology. Since the entire carrier is immersed in water, the commonly used vibration mechanism uses a motor as the power source, and it is difficult for the motor to operate normally underwater. As a preferred embodiment of the present invention, the vibration mechanism includes a piston blind hole 6 provided inside the fixed frame 1. The piston blind hole 6 is provided on the inner side surface of the convex platform 25. A connecting column 7 that is in sliding fit with the piston blind hole 6 is provided in the piston blind hole 6. One end of the connecting column 7 extends out of the piston blind hole 6 and is fixedly connected to the movable frame 2. A second spring 8 is provided between the other end of the connecting column 7 and the bottom of the piston blind hole 6. One end of the second spring 8 is fixedly connected to the connecting column 7, and the other end is fixedly connected to the bottom of the piston blind hole 6. The bottom of the piston blind hole 6 is connected to a water inlet channel 9. A water outlet channel 10 is provided on the side wall of the piston blind hole 6. The water outlet channel 10 is connected to a valve 11. The valve 11 can adopt a high-speed switching valve and can be opened and closed at a high frequency.

[0030] The operation process of the vibration mechanism of the present invention is as follows: By supplying water to the water inlet channel 9 at a uniform speed, the valve 11 is alternately opened and closed. When the valve 11 is closed, after the water enters the piston blind hole 6, it will push the connecting column 7 to slide towards the outside of the piston blind hole 6, and the second spring 8 is compressed to generate an elastic force, and the water pressure gradually increases. When the connecting column 7 slides, it can drive the movable frame 2 to move linearly. When the valve 11 is opened, the water in the piston blind hole 6 is quickly discharged, the second spring 8 gradually extends, the water pressure gradually decreases, the second spring 8 drives the connecting column 7 to move towards the bottom of the piston blind hole 6, and the connecting column 7 drives the movable frame 2 to move linearly in the reverse direction. Repeating the above process can make the connecting column 7 slide back and forth continuously, driving the movable frame 2 to vibrate linearly in a reciprocating manner.

[0031] The vibration mechanism of the present invention uses water power as the power source and can directly utilize the deionized water used during detection, which is convenient to implement.

[0032] The integrated circuit acoustic scanning detection device of the present invention, as Figure 5 shown, includes a water tank 100 and an ultrasonic scanning probe 101. There is deionized water with a certain depth in the water tank 100. An Figures 1 to 4 integrated circuit carrier as shown is arranged in the water tank 100. A water spraying channel 4 is connected to a water spraying power mechanism. The water spraying power mechanism is used to transport water to the water spraying channel 4.

[0033] Specifically, there are two implementation modes for the integrated circuit acoustic scanning detection device of the present invention. One of the implementation modes is as Figures 6 to 10 shown. The integrated circuit carrier can be naturally placed in the water tank 100, and the integrated circuit carrier is always in a horizontal state. During detection, after fixing the integrated circuit on the integrated circuit carrier, manually place the integrated circuit carrier together with the integrated circuit into the water tank 100 to ensure that the deionized water submerges the integrated circuit, and the integrated circuit is located below the ultrasonic scanning probe 101. The water spraying power mechanism can adopt a pump, which is fixedly installed inside or outside the water tank 100, and the pump can be connected to the water spraying channel 4 through a hose, and can transport the deionized water in the water tank 100 to the water spraying channel 4. When removing bubbles, the integrated circuit is in a horizontal state, the water spraying channel 4 is located above the integrated circuit, and the water spraying channel 4 sprays water horizontally.

[0034] The above implementation mode is a relatively conventional existing implementation mode, and the following deficiencies exist in this implementation mode: 1. Steps such as fixing the integrated circuit to the carrier, removing bubbles, ultrasonic scanning detection, and removing the detected integrated circuit from the carrier cannot be carried out simultaneously, resulting in low detection efficiency. It is only suitable for small-batch detection and is difficult to quickly perform large-batch detection; 2. The solder mask (green oil), silicone resin coating or some plastic components on the integrated circuit usually have hydrophobicity and are difficult to be quickly wetted. Gas is easily retained at the gaps to form bubbles. If the integrated circuit is immediately de-bubbled after being immersed in deionized water, it is difficult to ensure the bubble removal effect.

[0035] In order to improve the detection efficiency and perform the de-bubbling operation after the integrated circuit is fully wetted, the integrated circuit acoustic scanning detection device of the present invention can also adopt the following implementation mode: The water tank 100 is circular, and a loading station, a de-bubbling station, a scanning station, and an unloading station are sequentially arranged along the circumferential direction of the water tank 100. The ultrasonic scanning probe 101 is arranged at the scanning station. At the loading station, de-bubbling station, scanning station, and unloading station, the steps of fixing the integrated circuit to the carrier, removing bubbles, ultrasonic scanning detection, and removing the detected integrated circuit from the carrier are sequentially carried out, and the four stations can operate simultaneously, thereby improving the detection efficiency.

[0036] A circular track 102 is provided around the water tank 100. There can be two circular tracks 102, and the centers of the two circular tracks coincide. A plurality of moving seats 103 are provided on the track 102. The moving seats 103 are slidably engaged with the track 102, and a traveling mechanism for driving the movement of the moving seats 103 is provided on the moving seats 103. The traveling mechanism can be a motor. A gear is provided on the rotating shaft of the motor. A circular rack is provided between the two circular tracks. The rack meshes with the gear. When the motor drives the gear to rotate, the gear travels along the rack, thereby driving the entire moving seat 103 to slide along the track 102. There can be 4 moving seats 103, and each station has one moving seat 103.

[0037] A lifting block 104 is provided on each moving seat 103. The lifting block 104 is connected to a lifting mechanism 105. The lifting mechanism 105 can be a cylinder, a linear motor, etc., or a screw-nut mechanism driven by a motor, which can be implemented using existing technologies.

[0038] A horizontal cantilever 106 is provided on the lifting block 104. The cantilever 106 extends above the water tank 100, and a vertical connecting rod 107 is provided at the end of the cantilever 106. The lower end of the connecting rod 107 extends into the water tank 100, and the fixed frame 1 is connected to the connecting rod 107. When the lifting mechanism 105 drives the lifting block 104 to move up and down, the lifting block 104 drives the cantilever 106, the connecting rod 107, and the fixed frame 1 to move up and down synchronously. During the lifting, the carrier can be moved above the deionized water surface or the carrier can be immersed in the deionized water.

[0039] The specific use process of this integrated circuit acoustic scanning detection device is as follows: At the loading station, the lifting mechanism 105 drives the lifting block 104 to move to the high position. The carrier is above the deionized water surface. The integrated circuit can be fixed to the carrier manually, and then the lifting mechanism 105 drives the lifting block 104 to move down to the low position. The carrier and the integrated circuit are immersed in the deionized water. Then the moving seat 103 drives the carrier and the integrated circuit to move to the degassing station for degassing, and then the moving seat 103 moves to the scanning station. The ultrasonic scanning probe 101 scans the upper surface of the integrated circuit. Finally, the moving seat 103 drives the carrier and the integrated circuit to move to the unloading station. The lifting mechanism 105 drives the lifting block 104 to move to the high position. The detected integrated circuit can be removed manually.

[0040] By repeating the above process, the detection of multiple integrated circuits can be realized. Each station can perform corresponding operations simultaneously without interfering with each other, improving the detection efficiency.

[0041] When removing bubbles, the integrated circuit can be in a horizontal state, and the water spraying channel 4 sprays water horizontally. In order to prompt the bubbles on the surface of the integrated circuit to move upward and thus quickly detach from the integrated circuit, when removing bubbles in the present invention, the carrier and the integrated circuit can be rotated to a vertical position, and the water spraying channel 4 is located on the lower side of the carrier. The water spraying channel 4 can spray water upward, which is beneficial to taking away the bubbles on the surface of the integrated circuit more quickly.

[0042] Specifically, a rotating shaft 108 is provided on the fixed frame 1. The rotating shaft 108 is rotatably installed at the lower end of the connecting rod 107. A gantry bracket can be provided at the lower end of the connecting rod 107, and the rotating shaft 108 is rotatably installed on the gantry bracket. A rotation driving mechanism 109 is provided on the cantilever 106. The rotation driving mechanism 109 is connected to the rotating shaft 108 through a belt. The rotation driving mechanism 109 can adopt a servo motor, which can accurately control the rotation angle.

[0043] When the carrier and the integrated circuit move to the bubble removal station, the rotation driving mechanism 109 drives the rotating shaft 108 to rotate 90 degrees. The rotating shaft 108 drives the carrier and the integrated circuit to rotate from a horizontal state to a vertical state, and the water spraying channel 4 is located on the lower side of the carrier. Then, the vibration mechanism is used to drive the movable frame 2 and the integrated circuit to vibrate linearly continuously, and at the same time, the water spraying channel 4 sprays water upward to drive the bubbles on the surface of the integrated circuit to flow upward. After the bubble removal is completed, the rotation driving mechanism 109 drives the rotating shaft 108 to reverse 90 degrees, and the carrier and the integrated circuit return to the horizontal state again.

[0044] In this embodiment, the water spraying power mechanism can be fixed on the fixed frame 1. A water pipe is provided at the inlet of the water spraying power mechanism, and the water pipe extends into the deionized water. However, this will increase the weight of the fixed frame 1, require higher strength for the cantilever 106 and the connecting rod 107, and since multiple carriers are used simultaneously, each carrier needs to be equipped with a water spraying power mechanism, increasing the number of water spraying power mechanisms and resulting in high equipment costs.

[0045] In order to reduce the equipment cost and at the same time facilitate water supply to the water spraying channel 4, the multiple water spraying channels 4 in this embodiment are all connected to a water delivery main pipe 110. An inlet pipe 111 is provided on the water delivery main pipe 110. The axial direction of the water delivery main pipe 110 is the same as the axial direction of the rotating shaft 108, and the axial direction of the inlet pipe 111 is the same as the radial direction of the rotating shaft 108. When the carrier is in a horizontal state, the inlet pipe 111 is also in a horizontal state; when the carrier rotates to a vertical state, the inlet pipe 111 is in a vertical state, and the inlet pipe 111 is located below the water delivery main pipe 110.

[0046] The water spraying power mechanism includes a water pump 112. The water pump 112 is connected to a vertical water delivery pipe 113. At the upper end of the water delivery pipe 113, there is a lifting docking head for docking with the water inlet pipe 111. The water pump 112 can be fixedly arranged inside or outside the water tank 100. Its inlet is communicated with the inside of the water tank 100, and its outlet is connected to the water delivery pipe 113. The water delivery pipe 113 is located inside the water tank 100 and is below the degassing station.

[0047] When the vehicle and the integrated circuit move to the degassing station, the vehicle and the integrated circuit rotate to the vertical state. At this time, the water inlet pipe 111 is located above the water delivery pipe 113, and the water inlet pipe 111 and the water delivery pipe 113 are coaxial. The lifting docking head moves upward, and the water inlet pipe 111 can be connected to the water delivery pipe 113. The deionized water in the water tank 100 enters the water inlet pipe 111 under the drive of the water pump 112, then enters the water delivery pipe 113 through the lifting docking head, and is then conveyed to each water spraying channel 4 through the main water delivery pipe 110. After degassing is completed, the lifting docking head moves downward and disengages from the water inlet pipe 111, without affecting the water inlet pipe 111 to return to the horizontal position along with the vehicle.

[0048] In order to automatically drive the up and down movement of the lifting docking head by using the power of water flow, an inlet notch 115 is provided at the end of the water inlet pipe 111 of the present invention. The inlet notch 115 can be any shape such as a rectangular notch or a semi-circular notch.

[0049] The lifting docking head includes a lifting pipe 114 arranged inside the upper port of the water delivery pipe 113 and slidingly matched with the water delivery pipe 113. The inner hole of the lifting pipe 114 is successively a communication hole, a tapered hole, and a guiding hole from bottom to top. The communication hole is connected to the water pump 112. The diameter of the tapered hole decreases from bottom to top. The diameter of the upper end of the communication hole is the same as the diameter of the lower end of the tapered hole. The diameter of the upper end of the tapered hole is the same as the diameter of the guiding hole. The diameter of the guiding hole is adapted to the outer diameter of the water inlet pipe 111 to ensure that the water inlet pipe 111 can extend into the guiding hole. A support frame 116 is fixedly arranged in the communication hole. The support frame 116 can be a cross. A spherical plug 117 is arranged in the tapered hole. The spherical plug 117 can seal the inside of the tapered hole. A third spring 118 is arranged between the spherical plug 117 and the support frame 116. The third spring 118 is in a compressed state and has a certain elastic force, and the elastic force can press the spherical plug 117 tightly.

[0050] When the water inlet pipe 111 rotates to the vertical state, the water pump 112 is started, and deionized water enters the water delivery pipe 113 and the lifting pipe 114. At this time, since the conical hole of the lifting pipe 114 is blocked by the spherical plug 117, the water in the water delivery pipe 113 and the lifting pipe 114 cannot be discharged. Therefore, it will push the lifting pipe 114 to move upward, causing the water inlet pipe 111 to enter the lifting pipe 114. When the water inlet pipe 111 touches the spherical plug 117, the spherical plug 117 will stop moving upward. However, the water pressure in the lifting pipe 114 is greater than the friction force between the lifting pipe 114 and the water delivery pipe 113. Therefore, the lifting pipe 114 will continue to move upward, that is, the conical hole moves upward, causing the spherical plug 117 to separate from the conical hole wall. The third spring 118 is further compressed, and the elastic force increases, opening the conical hole. The water in the lifting pipe 114 can then enter the water inlet pipe 111 through the water inlet notch 115. By controlling the water delivery pressure of the water pump 112, the water pressure in the lifting pipe 114 is kept stable, and the water pressure received by the lifting pipe 114 and the increased elastic force after the compression of the third spring 118 are kept balanced, so that the height of the lifting pipe 114 can be kept stable, and the lifting pipe 114 can be stably connected to the water inlet pipe 111. After the bubble removal is completed, the water pump 112 stops delivering water to the water delivery pipe 113, the third spring 118 resets, and the spherical plug 117 closes the conical hole again. Then, the water pump 112 is used to pump out the non-separated water in the water delivery pipe 113. Under the action of the external water pressure, the lifting pipe 114 moves downward, causing the lifting pipe 114 to separate from the water inlet pipe 111. The water pump 112 can be a plunger pump, a gear pump, etc., which can pump water both forward and backward.

[0051] The lifting and docking joint of the present invention can achieve automatic lifting, without additional power equipment, reducing energy consumption and simplifying the structure.

[0052] The water inlet channel 9 of the vibration mechanism can also adopt the same water inlet structure as the water spraying channel 4, that is, the water inlet channel 9 is connected to the water inlet pipe. When the vehicle and the integrated circuit are in the horizontal state, the water inlet pipe is in the horizontal state. When the vehicle and the integrated circuit rotate to the vertical state, the water inlet pipe is in the vertical state. And a water supply mechanism similar to the lifting pipe 114 and the water delivery pipe 113 is arranged in the water tank 100 below the bubble removal station.

[0053] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An integrated circuit carrier, characterized in that: It includes a fixed frame (1) and a movable frame (2). The movable frame (2) is located inside the fixed frame (1) and is in sliding fit with the fixed frame (1). One end of the movable frame (2) is connected with a vibration mechanism for driving the movable frame (2) to perform reciprocating linear motion. A positioning mechanism for positioning the integrated circuit is arranged on the movable frame (2). The positioning mechanism includes a support surface (3) for supporting the integrated circuit. A plurality of water spray channels (4) are arranged on the movable frame (2). The water outlet direction of the water spray channels (4) is parallel to the support surface (3) and perpendicular to the linear motion direction of the movable frame (2).

2. The integrated circuit carrier according to claim 1, characterized in that: The movable frame (2) includes a left frame beam (21), a front frame beam (23), a right frame beam (22) and a rear frame beam (24) connected in sequence. The front frame beam (23) and the rear frame beam (24) are both in sliding fit with the fixed frame (1). The vibration mechanism is connected to the left frame beam (21) or the right frame beam (22). The positioning mechanism includes support grooves (5) arranged on the upper surfaces of the left frame beam (21), the front frame beam (23), the right frame beam (22) and the rear frame beam (24). The support surface (3) is the bottom of the support groove (5). Protrusions (25) are arranged on the upper surfaces of the front frame beam (23) and the rear frame beam (24). The water spray channels (4) are arranged on the protrusions (25). Pressing mechanisms for pressing the edges of the integrated circuit are arranged at both ends of the inner side surface of the protrusion (25).

3. The integrated circuit carrier according to claim 2, wherein: The pressing mechanism includes a pressing rod (26). Horizontal sliding grooves (27) are arranged on the inner side surface of the protrusion (25). Both ends of the pressing rod (26) are located in the sliding grooves (27) and are in sliding fit with the sliding grooves (27). A V-shaped groove (28) is arranged on the top wall of the pressing rod (26). A positioning groove is arranged on the top wall of the sliding groove (27). A V-shaped clamping block (29) in sliding fit with the positioning groove is arranged in the positioning groove. A first spring (210) is arranged between the upper end of the V-shaped clamping block (29) and the bottom of the positioning groove.

4. The integrated circuit carrier according to claim 1 or 2, characterized in that: The vibration mechanism includes a piston blind hole (6) arranged on the inner side of the fixed frame (1). A connecting column (7) in sliding fit with the piston blind hole (6) is arranged in the piston blind hole (6). One end of the connecting column (7) extends out of the piston blind hole (6) and is fixedly connected with the movable frame (2). A second spring (8) is arranged between the other end of the connecting column (7) and the bottom of the piston blind hole (6). The bottom of the piston blind hole (6) is connected with a water inlet channel (9). A water outlet channel (10) is arranged on the side wall of the piston blind hole (6). The water outlet channel (10) is connected with a valve (11).

5. Integrated circuit acoustic scanning detection device, comprising a water tank (100) and an ultrasonic scanning probe (101), characterized in that: The integrated circuit carrier described in claim 1 is arranged in the water tank (100). The water spray channels (4) are connected with a water spray power mechanism.

6. The integrated circuit acoustic scan detection device according to claim 5, characterized in that: The water tank (100) is circular, and a feeding station, a degassing station, a scanning station, and a discharging station are sequentially arranged along the circumferential direction of the water tank (100). The ultrasonic scanning probe (101) is arranged at the scanning station; a circular track (102) is arranged around the water tank (100), and a plurality of moving seats (103) are arranged on the track (102). An elevating block (104) is arranged on each moving seat (103). The elevating block (104) is connected to an elevating mechanism (105), and a horizontal cantilever (106) is arranged on the elevating block (104). The cantilever (106) extends above the water tank (100), and a vertical connecting rod (107) is arranged at the end of the cantilever (106). The lower end of the connecting rod (107) extends into the water tank (100), and the fixed frame (1) is connected to the connecting rod (107).

7. The integrated circuit acoustic scanning detection device according to claim 5 or 6, characterized in that: A rotating shaft (108) is arranged on the fixed frame (1). The rotating shaft (108) is rotatably installed at the lower end of the connecting rod (107). A rotation driving mechanism (109) is arranged on the cantilever (106). The rotation driving mechanism (109) is connected to the rotating shaft (108) through a belt.

8. The integrated circuit acoustic scanning detection device according to claim 7, characterized in that: A plurality of water spraying channels (4) are all connected to a water conveying main pipe (110). An inlet pipe (111) is arranged on the water conveying main pipe (110). The axial direction of the inlet pipe (111) is consistent with the radial direction of the rotating shaft (108). The water spraying power mechanism includes a water pump (112). The water pump (112) is connected to a vertical water delivery pipe (113). The upper end of the water delivery pipe (113) is provided with a lifting docking head for docking with the inlet pipe (111).

9. The integrated circuit acoustic scan detection device according to claim 8, wherein: An inlet notch (115) is arranged at the end of the inlet pipe (111). The lifting docking head includes a lifting pipe (114) arranged in the upper port of the water delivery pipe (113) and slidably matched with the water delivery pipe (113). The inner hole of the lifting pipe (114) is successively a communication hole, a tapered hole, and a guiding hole from bottom to top. The diameter of the tapered hole decreases from bottom to top. A support frame (116) is arranged in the communication hole, and a spherical plug (117) is arranged in the tapered hole. A third spring (118) is arranged between the spherical plug (117) and the support frame (116); the diameter of the guiding hole is adapted to the outer diameter of the end of the inlet pipe (111).

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