Separating device and separating equipment

Abstract

The invention provides a separation device and separation equipment, and the separation device comprises a spraying assembly which is used for spraying a liquid flow towards a preset material pile in a stock bin so as to blow away and separate a plurality of sheet-shaped materials in the preset material pile, so that each sheet-shaped material is independently suspended in liquid in the stock bin; an adsorption part of the adsorption assembly is located above the liquid in the stock bin so as to sequentially suck and adsorb the sheet-shaped materials which are independently suspended in the liquid in the stock bin from the liquid in the stock bin; at least part of the conveying assembly is movably arranged, and the conveying assembly is used for making contact with the flaky materials adsorbed by the adsorption assembly so as to convey the flaky materials adsorbed by the adsorption assembly; the spraying angle of at least part of liquid flow sprayed by the spraying assembly is adjustably arranged on the horizontal plane. By using the separation device provided by the invention, the stacked silicon wafers can be safely and reliably separated.

Description

Technical Field

[0001] The present invention relates to the field of silicon wafer technology, and in particular to a separation device and separation equipment. Background Art

[0002] With the development of new energy, the thickness of solar silicon wafers is getting thinner and thinner; currently, the thinnest solar silicon wafer in production is as low as 0.12mm.

[0003] When the silicon rod substrate is cut into ultra-thin silicon wafers by a wire cutting machine and stacked together layer by layer, it becomes more difficult to safely and reliably separate the stacked very thin silicon wafers for subsequent steps such as transportation, cleaning, drying, and screening. Summary of the invention

[0004] The main purpose of the present invention is to provide a separation device and a separation equipment to safely and reliably separate stacked silicon wafers.

[0005] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, there is provided a separation device, which is suitable for a preset material pile in a silo, a plurality of sheet materials are stacked in a vertical direction to form a preset material pile; the circumference of the sheet materials is in contact with the cavity wall of the silo or has a gap; the separation device comprises: a spray assembly, the spray assembly is used to spray a liquid flow toward the preset material pile in the silo, so as to blow and separate the plurality of sheet materials of the preset material pile, so as to make each sheet material individually suspended in the liquid in the silo; an adsorption assembly, the adsorption portion of the adsorption assembly is located above the liquid in the silo, so as to suck out and adsorb each sheet material individually suspended in the liquid in the silo from the liquid in the silo in turn; a conveying assembly, at least a part of the conveying assembly is movably arranged and used to contact the sheet material adsorbed by the adsorption assembly, so as to convey the sheet material adsorbed by the adsorption assembly; wherein the spray angle of at least a part of the liquid flow sprayed by the spray assembly is adjustable in the horizontal plane.

[0006] Furthermore, the injection assembly includes a first injection member and a second injection member, and the first injection member and the second injection member are both located on the same side of a preset material pile; the first injection member has a plurality of first injection holes, and at least part of the plurality of first injection holes are distributed in the vertical direction; the second injection member has a plurality of second injection holes, and at least part of the plurality of second injection holes are distributed in the vertical direction; the second injection member is rotatably arranged around a preset axis, and the preset axis is extended in the vertical direction.

[0007] Further, the first injection member includes a plurality of first injection hole groups, and the plurality of first injection hole groups are distributed in a horizontal direction; each first injection hole group includes a plurality of first injection holes, and the plurality of first injection holes in each first injection hole group are distributed in a vertical direction.

[0008] Further, the second injection member includes one or more second injection hole groups, and the multiple second injection hole groups are distributed in the horizontal direction; each second injection hole group includes multiple second injection holes, and the multiple second injection holes of each second injection hole group are distributed in the vertical direction.

[0009] Furthermore, the injection assembly includes two injection units, each injection unit includes at least one second injection member; and the two injection units are respectively located on both sides of the first injection member.

[0010] Furthermore, the adsorption assembly includes a suction cup, the suction cup includes an adsorption portion, and the bottom surface of the suction cup is the adsorption surface.

[0011] Furthermore, the conveying assembly includes a conveyor belt and two first transmission wheels, the conveyor belt is wound around the two first transmission wheels and tensioned; the two first transmission wheels divide the conveyor belt into an upper conveyor belt section and a lower conveyor belt section; the lower surface of the lower conveyor belt section is used to contact the sheet material adsorbed by the adsorption assembly.

[0012] Furthermore, the separation device also includes a sensing component, at least part of which is communicatively connected to at least part of the conveying component, so that when the sensing component contacts the sheet material adsorbed by the adsorption component, the conveying component is controlled to convey the sheet material adsorbed by the adsorption component.

[0013] Furthermore, the sensing component includes: a floating part, the floating part is used to contact the sheet material adsorbed by the adsorption component, and the floating part is arranged to float up and down, so that when the floating part contacts the sheet material adsorbed by the adsorption component, the sheet material generates an upward force on the floating part to make the floating part float upward; a sensing element, the sensing element is communicatively connected with at least part of the conveying component, and the sensing element is used to sense the upward floating floating part to control the conveying component to convey the sheet material adsorbed by the adsorption component.

[0014] Furthermore, the floating part is a roller structure, the axial direction of the floating part is perpendicular to the conveying direction of the conveying assembly, and the rolling circumference of the floating part is in contact with the sheet material adsorbed by the adsorption assembly.

[0015] Furthermore, the separation device also includes a fourth support member and a roller assembly; along the conveying direction of the conveying assembly, the conveying assembly has a first side and a second side that are relatively arranged; the direction from the first side to the second side of the conveying assembly is the same as the conveying direction of the conveying assembly; the fourth support member is located on the first side of the conveying assembly; the sensing member is arranged on the fourth support member, and the floating part is floatably arranged on the fourth support member up and down; the roller assembly includes one or more roller units; multiple roller units are distributed along the conveying direction of the conveying assembly; the roller unit includes multiple rollers, and the distribution direction of the multiple rollers of the roller unit is perpendicular to the conveying direction of the conveying assembly, and the axial direction of each roller is perpendicular to the conveying direction of the conveying assembly; each roller is floatably arranged on the fourth support member up and down, and the rolling circumference of each roller is used to contact the sheet material adsorbed by the adsorption assembly, so that when the adsorption assembly sucks the sheet material out of the liquid in the silo and adsorbs it, at least part of the rollers of the roller units are in contact with the sheet material adsorbed by the adsorption assembly.

[0016] Furthermore, the separation device also includes a conveying component, at least part of which is movably arranged, and the feed end of the conveying component is connected to or adjacent to the discharge end of the conveying component, so that the conveying component conveys the sheet material to the conveying component, and the conveying component conveys the sheet material thereon; the conveying direction of the conveying component is the same as or parallel to the conveying direction of the conveying component.

[0017] Furthermore, the conveying assembly includes a conveyor belt and two second transmission wheels, the conveyor belt is wound around the two second transmission wheels and is tensioned; the two second transmission wheels divide the conveyor belt into an upper conveyor belt section and a lower conveyor belt section, and the upper surface of the upper conveyor belt section is used to contact the sheet material.

[0018] According to another aspect of the present invention, a separation device is provided, which includes a silo and the above-mentioned separation device, the silo is movably arranged along a preset horizontal direction to approach or move away from the separation device; the silo is movably arranged along a vertical direction to gradually move upward in the vertical direction as the sheet material in the preset material pile in the silo gradually decreases.

[0019] Applying the technical solution of the present invention, the separation device includes a spray component, an adsorption component and a conveying component. The spray component is used to spray a liquid flow toward a preset material pile in a silo to blow away and separate multiple sheet materials in the preset material pile, that is, the spray liquid flow separates the multiple sheet materials in the preset material pile one by one, and then makes each sheet material separately suspended in the liquid in the silo. At this time, due to the limiting effect of the silo, all the separated sheet materials of the preset material pile are still distributed in the vertical direction, but they are changed from being arranged in sequence to being arranged in sequence.

[0020] The adsorption part of the adsorption component is located above the liquid in the silo, so as to suck out and adsorb each sheet material individually suspended in the liquid in the silo from the liquid in the silo in turn; since all the separated sheet materials of the preset material pile are spaced apart in the vertical direction, the adsorption component can only suck out and adsorb the sheet materials from the liquid in the silo one by one, that is, the adsorption component can only suck out and adsorb one sheet material at a time.

[0021] At least a portion of the conveying component is movably arranged and is used to contact the sheet-like material adsorbed by the adsorption component to convey the sheet-like material adsorbed by the adsorption component.

[0022] The spraying angle of at least part of the liquid flow sprayed by the spraying assembly is adjustable in the horizontal plane, so as to facilitate blowing and dispersing a plurality of sheet materials of a preset material pile.

[0023] By using the separation device of the present application, stacked silicon wafers can be separated safely and reliably. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0025] Figure 1 A schematic structural diagram showing a perspective of a separation device according to the present invention;

[0026] Figure 2 A schematic structural diagram showing another perspective of the separation device according to the present invention;

[0027] Figure 3 A schematic diagram showing the structure of the injection assembly of the separation device according to the present invention is shown;

[0028] Figure 4 shows a top view of a separation device according to the present invention;

[0029] Figure 5 A schematic diagram showing the structure of a conveying assembly and a transmission assembly of a separation device according to the present invention is shown;

[0030] Figure 6 A schematic diagram showing the structure of a conveying assembly of a separation device according to the present invention is shown;

[0031] Figure 7 A schematic diagram showing the structure of a silo of a separation device according to the present invention is shown;

[0032] Figure 8 A schematic structural diagram of a separation device according to the present invention from a first viewing angle is shown;

[0033] Fig. 9 A schematic structural diagram showing a second viewing angle of a separation device according to the present invention;

[0034] Fig.10 A schematic structural diagram showing a third viewing angle of a separation device according to the present invention;

[0035] Fig.11 A schematic structural diagram showing a fourth viewing angle of a separation device according to the present invention;

[0036] Fig.12 A schematic structural diagram showing a fifth viewing angle of a separation device according to the present invention;

[0037] Fig.13 A schematic structural diagram showing a sixth viewing angle of a separation device according to the present invention;

[0038] Fig.14 A working flow chart of the separation device according to the present invention is shown.

[0039] The above drawings include the following reference numerals:

[0040] 10. injection assembly; 11. first injection member; 111. first injection hole; 112. injection body; 12. second injection member; 121. second injection hole;

[0041] 20. Adsorption component; 21. Suction cup;

[0042] 30. Conveying assembly; 31. Conveying unit; 311. Conveying belt; 3111. Upper conveying belt section; 3112. Lower conveying belt section; 312. First transmission wheel; 313. Driving wheel; 32. First transmission shaft; 33. Second driving member; 34. First synchronous belt;

[0043] 40, mounting member; 41, first supporting member; 411, clearance hole; 42, second supporting member; 43, third supporting member; 44, fourth supporting member; 45, fifth supporting member;

[0044] 51. first driving member; 52. connecting shaft;

[0045] 60. Induction component; 61. Floating part; 62. Induction member; 63. Roller; 64. Mounting shaft;

[0046] 70. Transmission assembly; 701. Transmission unit; 71. Conveyor belt; 711. Upper conveyor belt section; 712. Lower conveyor belt section; 72. Second transmission wheel; 73. Second transmission shaft; 74. Third driving member; 75. Second synchronous belt; 76. Position limiting part;

[0047] 9. driving module; 90. silo; 901. open mouth; 902. railing; 91. X-axis module; 911. first sliding part; 912. first driving part; 92. Y-axis module; 921. second sliding part; 922. second driving part; 93. connecting plate;

[0048] 200. Preset material pile; 300. Liquid storage tank. DETAILED DESCRIPTION

[0049] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0050] It should be noted that the following detailed descriptions are illustrative and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

[0051] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0052] The present invention provides a separation device, please refer to Figures 1 to 13 The separation device is suitable for a preset material pile 200 in the silo 90, and multiple sheet materials are stacked in the vertical direction to form a preset material pile 200; the circumference of the sheet materials is in contact with the cavity wall of the silo 90 or has a gap, so that the cavity wall of the silo 90 plays a certain limiting role on the sheet materials.

[0053] It should be noted that when the circumference of the sheet material contacts the cavity wall of the silo 90 , the sheet material and the cavity wall of the silo 90 are in light contact, that is, the two can touch each other lightly to avoid damage to the sheet material by the cavity wall of the silo 90 .

[0054] It should be noted that when the preset material pile 200 is placed in the silo 90 , there is a certain amount of liquid in the silo 90 to prevent the sheet material at the bottom of the preset material pile 200 from directly contacting the bottom wall of the silo 90 .

[0055] In a specific implementation process, the silo 90 is used to be placed in the liquid storage tank 300 , and a preset opening is provided on the cavity wall of the silo 90 so that the liquid in the liquid storage tank 300 can enter the silo 90 through the preset opening.

[0056] Optionally, when the sheet materials of the preset material pile 200 in the silo 90 are transported, the empty silo 90 can be taken out from the liquid storage tank 300 to carry a new preset material pile 200 .

[0057] The separation device includes an injection assembly 10, an adsorption assembly 20 and a conveying assembly 30. The injection assembly 10 is used to spray a liquid flow toward a preset material pile 200 in a silo 90 to blow away and separate a plurality of sheet materials in the preset material pile 200, that is, the liquid flow is sprayed to separate a plurality of sheet materials in the preset material pile 200 one by one, and then each sheet material is suspended separately in the liquid in the silo 90. At this time, due to the limiting effect of the silo 90, all separated sheet materials of the preset material pile 200 are still distributed in the vertical direction, but are changed from being arranged in sequence to being arranged in sequence.

[0058] The adsorption portion of the adsorption component 20 is located above the liquid in the silo 90, so as to suck out and adsorb each sheet material individually suspended in the liquid in the silo 90 from the liquid in the silo 90 in turn; since all the separated sheet materials of the preset material pile 200 are spaced apart in the vertical direction, the adsorption component 20 can only suck out and adsorb the sheet materials from the liquid in the silo 90 one by one, that is, the adsorption component 20 can only suck out and adsorb one sheet material at a time.

[0059] At least a portion of the conveying assembly 30 is movably disposed and is used to contact the sheet material adsorbed by the adsorption assembly 20 to convey the sheet material adsorbed by the adsorption assembly 20 .

[0060] Since the sheet material is relatively thin, the uppermost sheet material floats toward the liquid surface in the silo 90 , and the adsorption portion of the adsorption assembly 20 sucks the uppermost sheet material out of the liquid and adsorbs it.

[0061] During the specific implementation process, the adsorption force of the adsorption component 20 cannot be too large, that is, the adsorption force must meet the following requirements: 1. The size of the adsorption force can only be used to adsorb one sheet material, but not two or more sheet materials; 2. When the adsorption component 20 adsorbs the sheet material, it cannot be adsorbed too tightly, and the conveying component 30 must ensure the conveying of the adsorbed sheet material; 3. Only when the conveying component 30 completes the conveying of the sheet material adsorbed by the adsorption component 20, the adsorption part will be fully exposed, and at this time the complete suction force of the adsorption part can adsorb the next sheet material; when the conveying component 30 is conveying the sheet material adsorbed by the adsorption component 20, and when part of the adsorption part is exposed, that is, when the adsorption part is not fully exposed, the suction force of the exposed part of the adsorption part is not able to adsorb and adsorb the next sheet material, which avoids the problem of the adsorption component 20 adsorbing two sheet materials at the same time and causing the two sheet materials to collide and be damaged.

[0062] Optionally, the sheet material is a silicon wafer; for example, the sheet material is a solar silicon wafer.

[0063] Optionally, the liquid in the silo 90 is water; the liquid flow sprayed by the spray assembly 10 is a water flow; and the liquid storage tank 300 is a water storage tank.

[0064] In the present application, the spraying angle of at least part of the liquid flow sprayed by the spraying assembly 10 is adjustable in the horizontal plane, so as to facilitate blowing and dispersing a plurality of sheet materials of the preset material pile 200 .

[0065] In the present application, the injection assembly 10 includes a first injection member 11 and a second injection member 12, and the first injection member 11 and the second injection member 12 are both located on the same side of the preset material pile 200, so that the first injection member 11 and the second injection member 12 spray the preset material pile 200 on the same side of the preset material pile 200.

[0066] Specifically, the first injection member 11 has a plurality of first injection holes 111, at least part of which are distributed in the vertical direction; the second injection member 12 has a plurality of second injection holes 121, at least part of which are distributed in the vertical direction; the second injection member 12 is rotatably arranged around a preset axis, and the preset axis is extended in the vertical direction, so that the injection angle of the liquid flow injected by the second injection hole 121 of the second injection member 12 can be adjusted in the horizontal plane.

[0067] Specifically, the first injection member 11 includes a plurality of first injection hole groups, which are distributed in the horizontal direction; each first injection hole group includes a plurality of first injection holes 111, which are distributed in the vertical direction.

[0068] Furthermore, the sheet material of the preset material pile 200 has a preset side, and the first injection member 11 and the second injection member 12 are both located on one side of the preset side of the sheet material of the preset material pile 200; the distribution direction of the multiple first injection hole groups is parallel to the extension direction of the preset side of the sheet material of the preset material pile 200 to ensure the blowing effect on the preset material pile 200.

[0069] Optionally, the first injection member 11 includes a plurality of injection bodies 112 , and the plurality of first injection hole groups are arranged in one-to-one correspondence with the plurality of injection bodies 112 , so that each first injection hole group is arranged on a corresponding injection body 112 .

[0070] Specifically, the first injection member 11 is a modular structure, and different numbers of injection bodies 112 can be provided according to silicon wafers of different sizes to ensure the blowing effect on the silicon wafers.

[0071] Specifically, the direction of the liquid flow ejected from the first injection hole 111 of the first injection member 11 is along the horizontal direction and vertically sprayed toward the preset material pile 200; the direction of the liquid flow ejected from the second injection hole 121 of the second injection member 12 is along the horizontal direction and sprayed toward the preset material pile 200 at an oblique angle.

[0072] Specifically, the second injection member 12 includes at least one second injection hole group; when the second injection member 12 includes multiple second injection hole groups, the multiple second injection hole groups are distributed in the horizontal direction; each second injection hole group includes multiple second injection holes 121, and the multiple second injection holes 121 of each second injection hole group are distributed in the vertical direction.

[0073] In the present application, the injection assembly 10 includes two injection units, each injection unit includes at least one second injection member 12; along the extension direction of the preset side of the sheet material of the preset material pile 200, the two injection units are respectively located on both sides of the first injection member 11; when the injection unit includes multiple second injection members 12, the spacing distribution direction of the multiple second injection members 12 of the injection unit is parallel to or at an acute angle to the extension direction of the preset side of the sheet material of the preset material pile 200.

[0074] Figure 3 The two second injection members 12 belong to two injection units respectively.

[0075] In the present application, the separation device further includes a first fixed support member 41 , and the first injection member 11 is fixedly disposed on the first support member 41 .

[0076] In the present application, the separation device further includes a first drive assembly; each second injection member 12 corresponds to a first drive assembly; the first drive assembly includes a first drive member 51, the output shaft of the first drive member 51 is connected to the corresponding second injection member 12 to drive the corresponding second injection member 12 to rotate around a preset axis; the central axis of the output shaft of the first drive member 51 coincides with or is parallel to the preset axis. The injection angle of the second injection hole 121 of the second injection member 12 is automatically controlled and adjusted by the first drive member 51, so as to fine-tune the injection angle of the second injection hole 121 and ensure the adjustment accuracy of the injection angle of the second injection hole 121, while improving work efficiency, avoiding uncertainties and slow work efficiency caused by manual adjustment, and minimizing the influence of manual factors.

[0077] Optionally, the first driving member 51 is a motor.

[0078] Specifically, the separation device also includes a fixed second support member 42, which is located above the first support member 41; the first drive assembly also includes a connecting shaft 52, and both ends of the connecting shaft 52 are respectively connected to the output shaft of the first drive member 51 and the corresponding second injection member 12, the central axis of the connecting shaft 52 coincides with the central axis of the output shaft of the first drive member 51, and the output shaft of the first drive member 51 is connected to the corresponding second injection member 12 through the connecting shaft 52; the connecting shaft 52 is rotatably arranged on the second support member 42 around its central axis, so that the second support member 42 supports the first drive assembly.

[0079] Furthermore, the connecting shaft 52 is rotatably inserted into the second supporting member 42 , and a bearing is provided between the connecting shaft 52 and a hole wall of a hole on the second supporting member 42 through which the connecting shaft 52 is inserted.

[0080] Furthermore, the first support member 41 is provided with a clearance hole 411 for the second injection member 12 to pass through, and the outer peripheral wall of the second injection member 12 is spaced apart from the hole wall of the clearance hole 411 ; each second injection member 12 corresponds to one clearance hole 411 .

[0081] Furthermore, each first driving assembly corresponds to a second supporting member 42 .

[0082] In the present application, the separation device also includes a first flow control component and a second flow control component. The first flow control component is connected to the first injection component 11 to control the injection flow rate of the first injection component 11; the second flow control component is connected to all the second injection components 12 to control the injection flow rates of all the second injection components 12.

[0083] The first flow control component and the second flow control component are used to intelligently control the injection liquid flow of the first injection component 11 and all the second injection components 12 respectively, so as to accurately regulate the blowing force of the preset material pile 200, while ensuring that the sheet materials of the preset material pile 200 are blown away, avoiding the risk of vibration, brittle cracking, breakage, etc. of the sheet materials caused by excessive blowing force.

[0084] Specifically, the first flow control component includes a first flow controller; the second flow control component includes a second flow controller.

[0085] In the present application, the adsorption component 20 includes a suction cup 21, and the suction cup 21 includes an adsorption portion; the bottom surface of the suction cup 21 is the adsorption surface, and the bottom surface of the suction cup 21 is used to adsorb the sheet material.

[0086] Optionally, the suction cup 21 is a water suction cup, which absorbs water and the sheet material at the same time.

[0087] Specifically, the suction cup 21 is located above the liquid in the silo 90 .

[0088] In a specific implementation, the above-mentioned "the suction part is completely exposed" means that the bottom surface of the suction cup 21 is completely exposed; when the bottom surface of the suction cup 21 is completely exposed, the suction force is complete and can absorb a sheet of material. The above-mentioned "partial exposure of the suction part" means that the bottom surface of the suction cup 21 is partially exposed, and the suction force of the exposed part of the bottom surface of the suction cup 21 is not enough to absorb a sheet of material.

[0089] Specifically, the separation device further includes a third support member 43 which is fixedly arranged, and the suction cup 21 is arranged on the third support member 43 .

[0090] In the present application, the conveying component 30 includes at least one conveying unit 31; the conveying unit 31 includes a conveyor belt 311 and two first transmission wheels 312, the conveyor belt 311 is wound around the two first transmission wheels 312 and tensioned; the two first transmission wheels 312 divide the conveyor belt 311 into an upper conveyor belt section 3111 and a lower conveyor belt section 3112; the lower surface of the lower conveyor belt section 3112 is used to contact the sheet material adsorbed by the adsorption component 20 to convey the sheet material adsorbed by the adsorption component 20.

[0091] It should be noted that, when the lower conveyor belt section 3112 contacts the sheet material adsorbed by the adsorption assembly 20 to convey the sheet material adsorbed by the adsorption assembly 20 , the sheet material is both adsorbed by the adsorption assembly 20 and moves relative to the adsorption assembly 20 .

[0092] When the conveying assembly 30 includes multiple conveying units 31, the extension directions of the lower conveying belt sections 3112 of the multiple conveying units 31 are parallel, the conveying belts 311 of the multiple conveying units 31 rotate synchronously, and the lower surfaces of the lower conveying belt sections 3112 of the multiple conveying units 31 are used to contact the sheet material adsorbed by the adsorption assembly 20, so as to jointly convey the sheet material adsorbed by the adsorption assembly 20.

[0093] Specifically, the first support member 41 and the first injection member 11 are located below the conveyor belt 311 .

[0094] Specifically, the conveying unit 31 further includes a driving wheel 313 , and the upper conveying belt segment 3111 is wound around the driving wheel 313 . The driving wheel 313 is located on the inner side of the upper conveying belt segment 3111 .

[0095] Specifically, the conveying unit 31 includes multiple conveyor belts 311, each of which is wound around two first transmission wheels 312 and tensioned; the two first transmission wheels 312 divide each conveyor belt 311 into an upper conveyor belt section 3111 and a lower conveyor belt section 3112; the lower surface of the lower conveyor belt section 3112 of each conveyor belt 311 is used to contact the sheet material adsorbed by the adsorption component 20; the upper conveyor belt section 3111 of each conveyor belt 311 is wound around the driving wheel 313.

[0096] Specifically, when the conveying assembly 30 includes a plurality of conveying units 31 , the adsorption portion is located between any two adjacent conveying units 31 . Further, the suction cup 21 is located between any two adjacent conveying units 31 .

[0097] Specifically, the third support member 43 is disposed in the space surrounded by the conveyor belt 311 .

[0098] Specifically, the conveying assembly 30 also includes a first transmission shaft 32; the driving wheel 313 of each conveying unit 31 is fixedly mounted on the first transmission shaft 32, and the central axis of each driving wheel 313 coincides with the central axis of the first transmission shaft 32; the first transmission shaft 32 is rotatably arranged around its central axis, so that the first transmission shaft 32 drives each driving wheel 313 to rotate synchronously, and thereby drives the conveyor belt 311 of each conveying unit 31 to rotate synchronously.

[0099] Specifically, the conveying assembly 30 further includes a second driving member 33 and a first synchronous belt 34, the first synchronous belt 34 is wound around the output shaft of the second driving member 33 and the first transmission shaft 32, the axial direction of the output shaft of the second driving member 33 is parallel to the axial direction of the first transmission shaft 32, so that the second driving member 33 drives the first transmission shaft 32 to rotate around the central axis of the first transmission shaft 32. Optionally, the second driving member 33 is a motor.

[0100] Specifically, each conveying unit 31 further includes a first fixed shaft fixedly disposed on the third support member 43 , each first transmission wheel 312 corresponds to a third support member 43 , and each first transmission wheel 312 is rotatably sleeved on the corresponding first fixed shaft around its central axis.

[0101] In the present application, the separation device also includes two mounting members 40 arranged opposite to each other, and the two mounting members 40 are fixedly arranged; the injection assembly 10, the adsorption assembly 20, and the conveying unit 31 are all located between the two mounting members 40; the first support member 41 must be located between the two mounting members 40, and the first support member 41 is fixedly connected to at least one mounting member 40; the second support member 42 must be located between the two mounting members 40, and each second support member 42 is fixedly connected to one of the mounting members 40; the third support member 43 must be located between the two mounting members 40, and the third support member 43 is fixedly connected to at least one mounting member 40.

[0102] Specifically, the first transmission shaft 32 is rotatably disposed on the two mounting members 40 , and the second driving member 33 is located on the outer side of one mounting member 40 away from the other mounting member 40 ; a bearing is disposed between the first transmission shaft 32 and the mounting member 40 .

[0103] Specifically, the main body of the second driving member 33 is fixedly connected to a mounting member 40 .

[0104] Specifically, the main body of the first driving member 51 is fixedly connected to a mounting member 40 .

[0105] In the present application, the separation device also includes a sensing component 60, at least a portion of which is communicatively connected to at least a portion of the conveying component 30, so that when the sensing component 60 contacts the sheet material adsorbed by the adsorption component 20, the conveying component 30 is controlled to convey the sheet material adsorbed by the adsorption component 20.

[0106] In the present application, the sensing component 60 includes a floating portion 61 and a sensing element 62; the floating portion 61 is used to contact the sheet material adsorbed by the adsorption component 20, and the floating portion 61 is arranged to float up and down; when the adsorption component 20 sucks the sheet material out of the liquid in the silo 90 and adsorbs it, the floating portion 61 will contact the sheet material adsorbed by the adsorption component 20, and at this time, the sheet material adsorbed by the adsorption component 20 will generate an upward force on the floating portion 61, so that the floating portion 61 floats upward; the sensing element 62 is at least partially communicated with the conveying component 30, and the sensing element 62 is used to sense the floating portion 61 floating upward; when the sheet material adsorbed by the adsorption component 20 generates an upward force on the floating portion 61 to make the floating portion 61 float a certain distance upward from the initial state, the floating portion 61 is within the sensing range of the sensing element 62, and the sensing element 62 senses the floating portion 61 to control the conveying component 30 to convey the sheet material adsorbed by the adsorption component 20.

[0107] Specifically, when the sheet material adsorbed by the adsorption assembly 20 is sent out by the conveying assembly 30 , the force acting on the floating portion 61 disappears, and the floating portion 61 returns to its initial state under the action of its own gravity.

[0108] Optionally, the sensing element 62 is a sensor.

[0109] Optionally, when the floating portion 61 floats upward for a certain distance from the initial state and is within the sensing range of the sensing element 62 , the floating portion 61 may or may not be in contact with the sensing element 62 .

[0110] Optionally, the floating portion 61 is a roller structure, the axial direction of the floating portion 61 is perpendicular to the conveying direction of the conveying component 30, and the rolling circumferential surface of the floating portion 61 is in contact with the sheet material adsorbed by the adsorption component 20, so that when the conveying component 30 conveys the sheet material adsorbed by the adsorption component 20, the floating portion 61 and the sheet material adsorbed by the adsorption component 20 can slide relative to each other, so as to facilitate the conveying component 30 to convey the sheet material adsorbed by the adsorption component 20.

[0111] Specifically, the sensing member 62 is communicatively connected with the second driving member 33 , so that when the sensing member 62 senses the floating portion 61 , the second driving member 33 is controlled to start, so that the conveying component 30 conveys the sheet material adsorbed by the adsorption component 20 .

[0112] In the present application, the separation device also includes a fixed fourth support member 44; along the conveying direction of the conveying component 30, the conveying component 30 has a first side and a second side that are relatively arranged; the direction from the first side to the second side of the conveying component 30 is the same as the conveying direction of the conveying component 30; the fourth support member 44 is located on the first side of the conveying component 30; the sensing member 62 is arranged on the fourth support member 44, and the floating part 61 is arranged on the fourth support member 44 so that it can float up and down.

[0113] Specifically, the fourth support member 44 is fixedly connected to the third support member 43 .

[0114] In the present application, the separation device further comprises a roller assembly, the roller assembly comprises at least one roller unit; when the roller assembly comprises a plurality of roller units, the plurality of roller units are distributed along the conveying direction of the conveying assembly 30; each roller unit comprises a plurality of rollers 63, the distribution direction of the plurality of rollers 63 of each roller unit is perpendicular to the conveying direction of the conveying assembly 30, and the axial direction of each roller 63 is perpendicular to the conveying direction of the conveying assembly 30; each roller 63 is arranged on the fourth support member 44 so as to float up and down, and the rolling circumference of each roller 63 is used to contact with the sheet adsorbed by the adsorption assembly 20 flaky material; when the adsorption component 20 sucks out and adsorbs the flaky material from the liquid in the silo 90, the rollers 63 of at least some of the roller units are in contact with the flaky material adsorbed by the adsorption component 20. At this time, all the rollers 63 of each roller unit in contact with the flaky material adsorbed by the adsorption component 20 are in contact with the flaky material; and then when the conveying component 30 conveys the flaky material adsorbed by the adsorption component 20, each roller 63 in contact with the flaky material and the flaky material can slide relative to each other, so as to facilitate the conveying component 30 to convey the flaky material adsorbed by the adsorption component 20.

[0115] Specifically, the roller assembly also includes a plurality of mounting shafts 64, which are spaced apart along the conveying direction of the conveying assembly 30, and the plurality of mounting shafts 64 are arranged one-to-one with the plurality of roller units; the axial directions of the plurality of mounting shafts 64 are parallel to each other, and the axial direction of each mounting shaft 64 is perpendicular to the conveying direction of the conveying assembly 30; the plurality of rollers 63 of each roller unit are rotatably mounted on the corresponding mounting shaft 64 around the central axis of the corresponding mounting shaft 64; each mounting shaft 64 is floatably mounted on the fourth support member 44, so that the plurality of rollers 63 on each mounting shaft 64 can be floatably mounted up and down.

[0116] Specifically, the roller assembly further includes an assembly shaft, the floating portion 61 is rotatably sleeved on the assembly shaft around the central axis of the assembly shaft, and the assembly shaft is floatably disposed on the fourth support member 44 up and down.

[0117] Optionally, one of the plurality of mounting shafts 64 is a mounting shaft.

[0118] For example, Figure 1 and Figure 2 The roller assembly includes two roller units and two mounting shafts 64, each roller unit includes two rollers 63, and the two rollers 63 of each roller unit are respectively located on opposite sides of the fourth support member 44; along the axial direction of the mounting shaft 64, the two rollers 63 mounted on the same mounting shaft 64 as the floating part 61 are respectively located on both sides of the floating part 61; along the conveying direction of the conveying component 30, the mounting shaft 64 mounted on the floating part 61 is located on the side of the other mounting shaft 64 away from the conveying component 30.

[0119] In the present application, the separation device also includes a conveying component 70, at least part of which is movably arranged, and the feed end of the conveying component 70 is connected to or adjacent to the discharge end of the conveying component 30, so that under the conveying action of the conveying component 30 and the conveying action of the conveying component 70, the sheet material on the conveying component 30 is conveyed to the conveying component 70; the conveying component 70 conveys the sheet material thereon; the conveying direction of the conveying component 70 is the same as or parallel to the conveying direction of the conveying component 30.

[0120] When the feed end of the conveying assembly 70 is disposed adjacent to the discharge end of the conveying assembly 30 , along the conveying direction of the conveying assembly 30 , the feed end of the conveying assembly 70 is located on one side of the discharge end of the conveying assembly 30 .

[0121] Specifically, the conveying assembly 70 includes at least one conveying unit 701; the conveying unit 701 includes a conveyor belt 71 and two second transmission wheels 72, the conveyor belt 71 is wound around the two second transmission wheels 72 and tensioned; the two second transmission wheels 72 divide the conveyor belt 71 into an upper conveyor belt segment 711 and a lower conveyor belt segment 712, and the upper surface of the upper conveyor belt segment 711 is used to contact with the sheet material to convey the sheet material.

[0122] When the conveying assembly 70 includes multiple conveying units 701, the extension directions of the upper conveying belt segments 711 of the multiple conveying units 701 are parallel, the conveyor belts 71 of the multiple conveying units 701 rotate synchronously, and the upper surfaces of the upper conveying belt segments 711 of the multiple conveying units 701 are used to contact with the sheet material so as to jointly convey the sheet material.

[0123] Specifically, the conveying unit 701 includes a plurality of conveyor belts 71, each of which is wound around two second transmission wheels 72 and tensioned; the two second transmission wheels 72 divide each conveyor belt 71 into an upper conveyor belt segment 711 and a lower conveyor belt segment 712, and the upper surface of the upper conveyor belt segment 711 of each conveyor belt 71 is used to contact the sheet material.

[0124] Specifically, the transmission assembly 70 also includes a second transmission shaft 73; the two second transmission wheels 72 of each transmission unit 701 are respectively the third transmission wheel and the fourth transmission wheel; the third transmission wheel of each transmission unit 701 is fixedly mounted on the second transmission shaft 73, and the central axis of the third transmission wheel of each transmission unit 701 coincides with the central axis of the second transmission shaft 73; the second transmission shaft 73 is rotatably arranged around its central axis, so that the second transmission shaft 73 drives the third transmission wheel of each transmission unit 701 to rotate synchronously, and then drives the conveyor belt 71 of each transmission unit 701 to rotate synchronously.

[0125] Specifically, the transmission assembly 70 further includes a third driving member 74 and a second synchronous belt 75, the second synchronous belt 75 is wound around the output shaft of the third driving member 74 and the second transmission shaft 73, the axial direction of the output shaft of the third driving member 74 is parallel to the axial direction of the second transmission shaft 73, so that the third driving member 74 drives the second transmission shaft 73 to rotate around the central axis of the second transmission shaft 73. Optionally, the third driving member 74 is a motor.

[0126] Specifically, the second transmission shaft 73 is rotatably disposed on the two mounting members 40 , and the third driving member 74 is located on the outer side of one mounting member 40 away from the other mounting member 40 ; a bearing is disposed between the second transmission shaft 73 and the mounting member 40 .

[0127] Specifically, the main body of the third driving member 74 is fixedly connected to a mounting member 40 .

[0128] Specifically, the separation device also includes a fixed fifth support member 45; each transmission unit 701 also includes a second fixed shaft, which is fixed on the fifth support member 45; the fourth transmission wheel of each transmission unit 701 is rotatably mounted on the second fixed shaft around its central axis.

[0129] Optionally, the fourth transmission wheels of the multiple transmission units 701 are coaxially arranged.

[0130] Specifically, the fifth support member 45 is fixedly connected to at least one of the two mounting members 40 .

[0131] Specifically, two limiting portions 76 are respectively provided on both sides of the conveying path of the conveying component 70 along a direction perpendicular to the conveying direction of the conveying component 70, and the sheet material conveyed by the conveying component 70 is located between the two limiting portions 76, so that under the limiting action of the two limiting portions 76, the sheet material on the conveying component 70 is prevented from deviating in a direction perpendicular to the conveying direction of the conveying component 70.

[0132] Specifically, the two limiting portions 76 are both fixedly disposed on the fifth supporting member 45 .

[0133] Specifically, the sheet material between the two limiting portions 76 is in contact with the limiting portions 76 or has a gap therebetween; when the sheet material is in contact with the limiting portions 76, there is a light contact therebetween.

[0134] Optionally, the limiting portion 76 is a plate-shaped structure.

[0135] The present invention also provides a separation device, such as Figures 1 to 13 As shown, it comprises a silo 90 and the above-mentioned separation device.

[0136] In the present application, the silo 90 is movably arranged along a preset horizontal direction to approach or move away from the separation device; the silo 90 carrying the preset material pile 200 is moved close to the separation device along the preset horizontal direction to move to a suitable separation position, so that the injection assembly 10 sprays a liquid flow toward the preset material pile 200 in the silo 90; when the sheet material of the preset material pile 200 in the silo 90 at the separation position is transported, the empty silo 90 is moved away from the separation device along the preset horizontal direction so that a new preset material pile 200 can be placed in the empty silo 90.

[0137] The silo 90 is movably arranged in the vertical direction; when the silo 90 is in the separation position, as the sheet material of the preset material pile 200 in the silo 90 gradually decreases, the material pile height of the sheet material in the silo 90 gradually decreases, so that the silo 90 in the separation position gradually moves upward in the vertical direction, so that the injection assembly 10 can spray liquid toward the material pile with a gradually decreasing height in the silo 90.

[0138] Specifically, the separation equipment also includes a first slide rail and a first sliding part 911, the first slide rail is extended along a preset horizontal direction, and the first sliding part 911 is slidably arranged along the first slide rail; the first sliding part 911 is connected to the material bin 90 so that the first sliding part 911 drives the material bin 90 to move along the preset horizontal direction; the separation equipment also includes a second slide rail and a second sliding part 921, the second slide rail is extended along a vertical direction, and the second sliding part 921 is slidably arranged along the second slide rail; the second sliding part 921 is connected to the first slide rail so that the second sliding part 921 drives the first slide rail, the first sliding part 911 and the material bin 90 to move together in the vertical direction.

[0139] Specifically, the separation device further includes a first driving part 912, which is connected to the first sliding part 911 to drive the first sliding part 911 to move in a preset horizontal direction. The separation device further includes a second driving part 922, which is connected to the second sliding part 921 to drive the second sliding part 921 to move in a vertical direction.

[0140] Optionally, the first driving unit 912 is a motor; the second driving unit 922 is a motor.

[0141] Specifically, the separation device includes a driving module 9, which includes an X-axis module 91 and a Y-axis module 92. The X-axis module 91 includes a first driving part 912, a first slide rail and a first sliding part 911; the Y-axis module 92 includes a second driving part 922, a second slide rail and a second sliding part 921.

[0142] Specifically, the first sliding portion 911 and the material bin 90 are connected via a connecting plate 93 .

[0143] Specifically, the driving module 9 is located outside the liquid reservoir 300 ; a portion of the connecting plate 93 is located inside the liquid reservoir 300 , and another portion is located outside the liquid reservoir 300 .

[0144] In the present application, optionally, along the horizontal circumference of the silo 90, one side of the silo 90 is hollow to form an open port 901 at the side, so that at least a portion of the adsorption component 20 is located above a preset material pile 200 in the silo 90 through the open port 901, and thereby the adsorption portion of the adsorption component 20 is located above the preset material pile 200 in the silo 90 through the open port 901.

[0145] Optionally, the fourth support member 44 and the roller assembly and the floating portion 61 thereon are all located above the preset material pile 200 in the silo 90 through the open opening 901 .

[0146] Optionally, the opening 901 forms a preset opening.

[0147] Optionally, along the horizontal circumference of the silo 90 , at least one of the remaining side surfaces of the silo 90 , except for the side surface of the open opening 901 , is formed with a preset opening.

[0148] Optionally, the silo 90 includes a plurality of railings 902 arranged at intervals along the horizontal circumference of the silo 90, and a preset opening is formed between two adjacent railings 902; the plurality of railings 902 are used to limit the sheet material; and an open opening 901 is formed between two of the plurality of railings 902.

[0149] Optionally, the silo 90 is a frame structure, that is, the silo 90 is a material frame.

[0150] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects:

[0151] In the separation device provided by the present invention, it is suitable for a preset material pile 200 in a silo 90, and multiple sheet materials are stacked in a vertical direction to form a preset material pile 200; the circumference of the sheet materials is in contact with the cavity wall of the silo 90 or has a gap, so that the cavity wall of the silo 90 plays a certain limiting role on the sheet materials.

[0152] The separation device includes an injection assembly 10, an adsorption assembly 20 and a conveying assembly 30. The injection assembly 10 is used to spray a liquid flow toward a preset material pile 200 in a silo 90 to blow away and separate a plurality of sheet materials in the preset material pile 200, that is, the liquid flow is sprayed to separate a plurality of sheet materials in the preset material pile 200 one by one, and then each sheet material is suspended separately in the liquid in the silo 90. At this time, due to the limiting effect of the silo 90, all separated sheet materials of the preset material pile 200 are still distributed in the vertical direction, but are changed from being arranged in sequence to being arranged in sequence.

[0153] The adsorption portion of the adsorption component 20 is located above the liquid in the silo 90, so as to suck out and adsorb each sheet material individually suspended in the liquid in the silo 90 from the liquid in the silo 90 in turn; since all the separated sheet materials of the preset material pile 200 are spaced apart in the vertical direction, the adsorption component 20 can only suck out and adsorb the sheet materials from the liquid in the silo 90 one by one, that is, the adsorption component 20 can only suck out and adsorb one sheet material at a time.

[0154] At least a portion of the conveying assembly 30 is movably disposed and is used to contact the sheet material adsorbed by the adsorption assembly 20 to convey the sheet material adsorbed by the adsorption assembly 20 .

[0155] The spraying angle of at least part of the liquid flow sprayed by the spraying assembly 10 is adjustable in the horizontal plane, so as to facilitate blowing and dispersing the plurality of sheet materials of the preset material pile 200 .

[0156] By using the separation device of the present application, stacked silicon wafers can be automatically separated safely and reliably.

[0157] In the specific implementation process, Fig.14 As shown, a two-dimensional motion module is used to realize automatic control of the loading of the preset material pile 200 in the silo 90, the first driving unit 912 controls the forward and backward movement of the silo 90, and the second driving unit 922 controls the rise and fall of the silo 90. During the loading and separation process, the silo 90 is always kept in the liquid storage tank 300, and the preset material pile 200 in the silo 90 is always kept covered by the liquid surface in the liquid storage tank 300.

[0158] When the silo 90 reaches the separation position, the first injection member 11 and all the second injection members 12 blow away the preset material pile 200 in the silo 90, blowing the thin sheet materials into pieces and suspending them separately in the liquid; the upward suction force is generated under the water absorption action of the water absorption disk above the silo 90, attracting the uppermost sheet material to move upward to adsorb the sheet material, and at the same time, the sheet material contacts the floating part 61, the roller 63 of the roller assembly, and the lower surface of the lower conveyor belt section 3112; when the floating part 61 is pushed upward by the sheet material and contacts the sensing member 62, the sensing member 62 instantly outputs a material signal to the second driving member 33, and the second driving member 33 rotates a certain amount of stroke to drive the conveyor belt 311 to move, so as to transport the sheet material to the conveyor belt 71, and the conveyor belt 71 transports the sheet material to the rear workflow node under the driving action of the third driving member 74, and so on. During this process, the second driving member 33 is actuated by the signal of the sensing member 62 , and the second driving member 33 rotates a certain amount each time; the third driving member 74 is always in the working state.

[0159] In order to better ensure that the sheet material can be stably and reliably separated in the silo 90 and move upward to the lower conveyor belt section 3112, the spray angle of the second spray member 12 is fine-tuned and controlled by the first driving member 51 to ensure that the spray angle is reasonable and effective. In addition, the first flow control component and the second flow control component are used to accurately control the spray liquid flow of the first spray member 11 and all the second spray members 12, respectively, to avoid the risk of the sheet material being shaken, brittle, or damaged due to excessive blowing force.

[0160] The first driving member 51, the first flow control component and the second flow control component can all be used online; when the specifications of the sheet material change, the terminal device sends the process parameters with one click, and the first driving member 51, the first flow control component and the second flow control component can automatically adjust their own parameters according to the process parameters sent by the terminal device, thereby making the entire set of equipment automated, intelligent and digital.

[0161] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0162] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0163] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A separation device, suitable for a preset material pile (200) in a silo (90), wherein a plurality of sheet materials are stacked in a vertical direction to form the preset material pile (200); the circumference of the sheet materials is in contact with the cavity wall of the silo (90) or there is a gap; characterized in that: The separation device comprises: A spray assembly (10), the spray assembly (10) being used to spray a liquid flow toward a preset material pile (200) in the material bin (90) so as to blow away and separate a plurality of sheet materials in the preset material pile (200), thereby allowing each sheet material to be individually suspended in the liquid in the material bin (90); An adsorption component (20), wherein the adsorption portion of the adsorption component (20) is located above the liquid in the silo (90) so as to sequentially suck out and adsorb each of the sheet materials individually suspended in the liquid in the silo (90) from the liquid in the silo (90); a conveying component (30), at least a portion of which is movably arranged and is used to contact the sheet material adsorbed by the adsorption component (20) so as to convey the sheet material adsorbed by the adsorption component (20); The spraying angle of at least part of the liquid flow sprayed by the spraying assembly (10) is adjustable in the horizontal plane.

2. The separation device according to claim 1, characterized in that: The injection assembly (10) comprises a first injection member (11) and a second injection member (12), wherein the first injection member (11) and the second injection member (12) are both located on the same side of the preset material pile (200); The first injection member (11) has a plurality of first injection holes (111), and at least some of the plurality of first injection holes (111) are distributed in a vertical direction; The second injection member (12) has a plurality of second injection holes (121), at least some of which are distributed in the vertical direction; the second injection member (12) is rotatably arranged around a preset axis, and the preset axis is extended in the vertical direction.

3. The separation device according to claim 2, characterized in that: The first injection member (11) comprises a plurality of first injection hole groups, the plurality of first injection hole groups are distributed in a horizontal direction; each of the first injection hole groups comprises a plurality of first injection holes (111), the plurality of first injection holes (111) of each of the first injection hole groups are distributed in a vertical direction; and / or The second injection member (12) comprises one or more second injection hole groups, and the plurality of second injection hole groups are distributed in the horizontal direction; each of the second injection hole groups comprises a plurality of second injection holes (121), and the plurality of second injection holes (121) of each of the second injection hole groups are distributed in the vertical direction; and / or The injection assembly (10) comprises two injection units, each of which comprises at least one second injection member (12); the two injection units are respectively located on both sides of the first injection member (11).

4. The separation device according to claim 1, characterized in that: The adsorption component (20) comprises a suction cup (21), the suction cup (21) comprises an adsorption portion, and the bottom surface of the suction cup (21) is an adsorption surface; and / or The conveying assembly (30) comprises a conveying belt (311) and two first transmission wheels (312), the conveying belt (311) being wound around the two first transmission wheels (312) and being tensioned; the two first transmission wheels (312) dividing the conveying belt (311) into an upper conveying belt section (3111) and a lower conveying belt section (3112); the lower surface of the lower conveying belt section (3112) is used to contact the sheet material adsorbed by the adsorption assembly (20).

5. The separation device according to claim 1, characterized in that: The separation device further comprises a sensing component (60), at least a portion of which is in communication connection with at least a portion of the conveying component (30), so that when the sensing component (60) contacts the sheet material adsorbed by the adsorption component (20), the conveying component (30) is controlled to convey the sheet material adsorbed by the adsorption component (20).

6. The separation device according to claim 5, characterized in that: The sensing component (60) comprises: a floating portion (61), the floating portion (61) being used to contact the sheet material adsorbed by the adsorption component (20), the floating portion (61) being arranged to float up and down, so that when the floating portion (61) contacts the sheet material adsorbed by the adsorption component (20), the sheet material generates an upward force on the floating portion (61), so that the floating portion (61) floats upward; A sensing member (62) is communicatively connected with at least a portion of the conveying assembly (30), and the sensing member (62) is used to sense the floating portion (61) floating upward, so as to control the conveying assembly (30) to convey the sheet material adsorbed by the adsorption assembly (20).

7. The separation device according to claim 6, characterized in that The floating part (61) is a roller structure, the axial direction of the floating part (61) is perpendicular to the conveying direction of the conveying component (30), and the rolling circumference of the floating part (61) is in contact with the sheet material adsorbed by the adsorption component (20).

8. The separation device according to claim 6, characterized in that: The separation device further comprises a fourth support member (44) and a roller assembly; along the conveying direction of the conveying assembly (30), the conveying assembly (30) has a first side and a second side arranged opposite to each other; the direction from the first side to the second side of the conveying assembly (30) is the same as the conveying direction of the conveying assembly (30); the fourth support member (44) is located on the first side of the conveying assembly (30); the induction member (62) is arranged on the fourth support member (44), and the floating portion (61) is arranged on the fourth support member (44) in a floating manner up and down; The roller assembly comprises one or more roller units; the plurality of roller units are distributed along the conveying direction of the conveying assembly (30); the roller unit comprises a plurality of rollers (63), the distribution direction of the plurality of rollers (63) of the roller unit is perpendicular to the conveying direction of the conveying assembly (30), and the axial direction of each roller (63) is perpendicular to the conveying direction of the conveying assembly (30); Each of the rollers (63) is disposed on the fourth support member (44) in a floating manner up and down, and the rolling circumference of each of the rollers (63) is used to contact the sheet material adsorbed by the adsorption component (20), so that when the adsorption component (20) sucks the sheet material out of the liquid in the silo (90) and adsorbs it, at least part of the rollers (63) of the roller unit are in contact with the sheet material adsorbed by the adsorption component (20).

9. The separation device according to claim 1, characterized in that: The separation device further comprises a conveying component (70), at least part of which is movably arranged, and a feeding end of the conveying component (70) is connected to or adjacent to a discharging end of the conveying component (30), so that the conveying component (30) conveys the sheet material to the conveying component (70), and the conveying component (70) conveys the sheet material thereon; the conveying direction of the conveying component (70) is the same as or parallel to the conveying direction of the conveying component (30).

10. The separation device according to claim 9, characterized in that The conveying assembly (70) comprises a conveyor belt (71) and two second transmission wheels (72), wherein the conveyor belt (71) is wound around the two second transmission wheels (72) and is tensioned; the two second transmission wheels (72) divide the conveyor belt (71) into an upper conveyor belt section (711) and a lower conveyor belt section (712), wherein the upper surface of the upper conveyor belt section (711) is used for contacting with the sheet material.

11. A separation device, characterized in that: The invention comprises a silo (90) and a separation device as described in any one of claims 1 to 10, wherein the silo (90) is movably arranged along a preset horizontal direction so as to be closer to or farther away from the separation device; and the silo (90) is movably arranged along a vertical direction so as to gradually move upward in the vertical direction as the sheet material in a preset material pile (200) in the silo (90) gradually decreases.

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