A method for evaporating metal film on infrared laser window

Abstract

The present invention discloses a method for evaporating a metal film on an infrared laser window, which includes the following steps: Step 1: The infrared laser window before coating is locked by a base plate jig and a cover plate jig to form an integral product; Step 2: The infrared laser window before coating that has been locked by the base plate jig and the cover plate jig is placed in a coating frame as an integral product, and then the coating frame is placed in a coating ball cover for coating processing; Step 3: The integral product after coating is placed in a cleaning machine for cleaning, and after drying and draining, the base plate jig and the cover plate jig are disassembled to take out the coated infrared laser window. The present invention is clamped and unclamped once, avoiding the defects of the infrared laser window caused by repeated clamping and unloading of the clamp; using metal hafnium as a high refractive index coating material has the advantages of high temperature resistance, strong corrosion resistance and pure film quality. It can not only meet the high transmittance performance of the product, but also maintain stable performance under high temperature conditions.

Description

Technical Field

[0001] The invention relates to the technical field of infrared laser window preparation technology, and in particular to a method for evaporating a metal film on an infrared laser window. Background Art

[0002] As a widely used substrate material in the field of semiconductors and infrared optics, single crystal silicon has the advantages of high stability, low cost and good infrared transmittance. Compared with germanium, zinc sulfide and zinc selenide, it has a higher cost-effectiveness. However, due to the loss characteristics and high refractive index of silicon itself, its overall infrared transmittance performance in the mid-infrared is poor, only about 50%, which seriously affects its effect as an infrared optical window.

[0003] The anti-reflection film induces the transmission of electromagnetic waves in a specific band, thereby achieving the effect of anti-reflection, which can effectively improve the optical transmittance and reduce the electromagnetic wave loss. Therefore, coating the infrared anti-reflection film on the silicon substrate and improving the mid-infrared transmittance performance of the silicon substrate are of great significance for its application as an optical window. However, the current anti-reflection film is not resistant to high temperatures, has low corrosion resistance, and is not pure in quality. It cannot meet the high transmittance performance of the product, nor can it maintain stable performance under high temperature conditions. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a method for evaporating metal film on infrared laser window sheet which is resistant to high temperature, has strong corrosion resistance and pure film quality, and can meet the high transmittance performance of products and maintain stable performance under high temperature conditions, in view of the problem that the current antireflection film is not resistant to high temperature, has weak corrosion resistance and is impure in film quality, can not meet the high transmittance performance of products and can not maintain stable performance under high temperature conditions.

[0005] The technical problem to be solved by the present invention can be achieved by the following technical solutions:

[0006] A method for evaporating a metal film on an infrared laser window comprises the following steps:

[0007] Step 1: Place the infrared laser window sheet before coating into the circular groove of the bottom plate jig. After placement, cover the bottom plate jig with the cover plate jig. The bottom plate jig and the cover plate jig are positioned in a unique direction using positioning pins. The bottom plate jig, the infrared laser window sheet before coating and the cover plate jig are locked as a whole using locking screws. A circular hole is provided on the cover plate jig. The position and shape of the circular hole are the same as the position and shape of the circular groove of the bottom plate jig and correspond one to one.

[0008] Step 2: Place the infrared laser window before coating, which has been locked by the base plate fixture and the cover plate fixture, as a whole product in the coating frame, and then place the coating frame in the coating ball cover for coating processing. The specific coating process is as follows:

[0009]

[0010] Step 3: Put the whole product after coating into a cleaning machine for cleaning, and after spinning and draining, disassemble the bottom plate jig and the cover plate jig to take out the coated infrared laser window.

[0011] In a preferred embodiment of the present invention, the circular grooves are in a plurality and arranged in a lattice on the bottom plate jig; the circular holes are in a plurality and arranged in a lattice on the cover plate jig.

[0012] In a preferred embodiment of the present invention, at least one water guide groove is provided on the bottom plate fixture, and each water guide groove is connected to the circular grooves arranged in a straight line, so that during cleaning, pure water and lotion can quickly and smoothly enter the infrared laser window piece for cleaning.

[0013] In a preferred embodiment of the present invention, during cleaning, the whole product is placed in a cleaning machine in a vertical position, so that pure water and detergent can flow in quickly and flow out easily during the process of spinning and draining.

[0014] Due to the adoption of the above technical solution, the present invention uses a base plate jig and a cover plate jig to integrate some smaller infrared laser window pieces into one, which is convenient for engineering preparation (cleaning in one, coating in one), reduces the tediousness of manual operation, and only requires one-time clamping and one-time unclamping, thus avoiding defects in the infrared laser window pieces caused by repeated installation and unloading of the jig.

[0015] The present invention uses metal hafnium as a high refractive index coating material, which has the advantages of high temperature resistance, strong corrosion resistance and pure film quality, and can not only meet the high transmittance performance of the product, but also maintain stable performance under high temperature conditions.

[0016] The main advantages of using metal coating for the infrared laser window of the present invention are:

[0017] 1. Improve chemical stability: Metal coating can improve the material's resistance to acids, alkalis and organic solvents, making it stable in harsh environments.

[0018] 2. Enhanced mechanical strength: Metal-coated materials have high mechanical strength and can withstand high pressure and recoil regeneration.

[0019] 3. High temperature resistance: Metal coatings can usually be used in high temperature environments, or even higher temperatures. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the bottom plate fixture structure of the present invention.

[0021] Figure 2 for Figure 1 AA section view.

[0022] Figure 3 It is a schematic diagram of the structure of the cover plate fixture of the present invention.

[0023] Figure 4 for Figure 1 BB cross-sectional view.

[0024] Figure 5 This is an optical schematic diagram of the infrared laser window prepared by the present invention. DETAILED DESCRIPTION

[0025] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] A method for evaporating a metal film on an infrared laser window comprises the following steps:

[0027] Step 1: See Figures 1 to 4 , put the infrared laser window piece into the circular groove 11 of the bottom plate fixture 10 with tweezers. The number of the circular grooves 11 is several and they are arranged in a dot matrix on the bottom plate fixture 10; a plurality of water guide grooves 12 are arranged on the bottom plate fixture 10, and each water guide groove 12 is connected to the circular grooves 11 arranged in a straight line, so that during cleaning, pure water and lotion can quickly and smoothly enter the infrared laser window piece for cleaning; in addition, two positioning holes 13 and four screw holes 14 are provided on the bottom plate fixture 10.

[0028] After the infrared laser window piece before coating is placed, the cover plate jig 20 is placed on the base plate jig 10. The base plate jig 10 and the cover plate jig 10 are positioned in a unique direction using positioning pins. The base plate jig 10, the infrared laser window piece before coating and the cover plate jig 20 are locked as a whole using locking screws. A plurality of circular holes 21 are also provided on the cover plate jig 20. The plurality of circular holes 21 are arranged in a dot matrix on the cover plate jig 20. The positions and shapes of the plurality of circular holes 21 are the same as the positions and shapes of the plurality of circular grooves 11 of the base plate jig 10 and correspond one to one. In addition, two positioning holes 22 and four light holes 23 are also provided on the cover plate jig 20. The two positioning holes 22 correspond to the two positioning holes 13 one by one, and the four optical holes 23 correspond to the four screw holes 14 one by one. Two positioning pins are inserted into the two positioning holes 22 and the two positioning holes 13 respectively to position the cover plate jig 20 and the bottom plate jig 10 in a unique direction, and then four screws are respectively passed through the four optical holes 23 and screwed into the four screw holes 14 to define the cover plate jig 20 and the bottom plate jig 10 together;

[0029] Step 2: Place the infrared laser window piece before coating, which has been locked by the base plate fixture 10 and the cover plate fixture 20, as a whole product in the coating frame, and then place the coating frame in the coating ball cover for coating processing. The specific coating process is as follows:

[0030]

[0031] Step three: put the whole product after coating into the cleaning machine for cleaning. During cleaning, the whole product is placed in the cleaning machine in a vertical position to facilitate the rapid inflow of pure water and detergent and the outflow during the spinning and draining process. After spinning and draining, disassemble the bottom plate jig and the cover plate jig to take out the coated infrared laser window.

[0032] The infrared laser window with good coating has been tested and its optical effect can be found in Figure 5 .

Claims

1. A method for evaporating a metal film on an infrared laser window, characterized in that: The steps include: Step 1: Place the infrared laser window sheet before coating into the circular groove of the bottom plate jig. After placement, cover the bottom plate jig with the cover plate jig. The bottom plate jig and the cover plate jig are positioned in a unique direction using positioning pins. The bottom plate jig, the infrared laser window sheet before coating and the cover plate jig are locked as a whole using locking screws. A circular hole is provided on the cover plate jig. The position and shape of the circular hole are the same as the position and shape of the circular groove of the bottom plate jig and correspond one to one. Step 2: Place the infrared laser window before coating, which has been locked by the base plate fixture and the cover plate fixture, as a whole product in the coating frame, and then place the coating frame in the coating ball cover for coating processing. The specific coating process is as follows: Step 3: Put the whole product after coating into a cleaning machine for cleaning, and after spinning and draining, disassemble the bottom plate jig and the cover plate jig to take out the coated infrared laser window.

2. The method for evaporating a metal film on an infrared laser window according to claim 1, characterized in that: The number of the circular grooves is several and they are arranged in a dot matrix on the bottom plate jig; the number of the circular holes is several and they are arranged in a dot matrix on the cover plate jig.

3. The method for evaporating a metal film on an infrared laser window according to claim 2, characterized in that: At least one water guide groove is arranged on the bottom plate fixture, and each water guide groove is connected to the circular grooves arranged in a straight line.

4. The method for evaporating a metal film on an infrared laser window according to claim 3, characterized in that: During cleaning, the whole product is placed vertically into the cleaning machine.

Images