A vacuum evaporation coating equipment

Abstract

The present invention relates to a vacuum evaporation coating device, which belongs to the field of electron beam evaporation coating devices, comprising a box body, a vacuum chamber is arranged in the box body, a crucible and a planetary mechanism are arranged in the vacuum chamber, the vacuum chamber comprises an upper cavity and a lower cavity, the upper cavity and the lower cavity are distributed up and down, a gate valve is arranged at the connection between the upper cavity and the lower cavity, and the connection and disconnection of the upper cavity and the lower cavity are controlled by the gate valve; a vacuum port is arranged on one side of the upper cavity, the vacuum port is connected to a first vacuum system, and the upper cavity is evacuated by the first vacuum system, and the lower cavity is connected to a second vacuum system. The present invention facilitates the taking out and putting in of the planetary disk through a pull-out type, thereby improving the convenience of operation; in the process of opening the cover body, the cover body is first rotated and then translated, and the rotated cover body is parallel to the cover body in the closed state, so that the overall volume is reduced, that is, the occupied space of the cover body is reduced.

Description

Technical Field

[0001] The invention relates to vacuum evaporation coating equipment, and belongs to the field of electron beam evaporation coating equipment. Background Art

[0002] Electron beam evaporation is a type of vacuum evaporation coating. It is a method that uses electron beams to directly heat the evaporation material under vacuum conditions, vaporizes the evaporation material and transports it to the substrate, and condenses on the substrate to form a thin film. In the electron beam heating device, the heated material is placed in a water-cooled crucible to prevent the evaporation material from reacting with the crucible wall to affect the quality of the film. Therefore, the electron beam evaporation deposition method can prepare high-purity films. At the same time, multiple crucibles can be placed in the same evaporation deposition device to achieve simultaneous or separate evaporation and deposition of multiple different substances. Through electron beam evaporation, any material can be evaporated, and different materials require different types of enrichment to obtain the desired evaporation rate. Electron beam evaporation can evaporate high-melting point materials. It has higher thermal efficiency, higher beam density, and faster evaporation speed than general resistance heating evaporation. The film produced has high purity and good quality, and the thickness can be more accurately controlled. It can be widely used in the preparation of high-purity films and various optical material films such as conductive glass. The characteristic of electron beam evaporation is that it will not or rarely cover both sides of the target three-dimensional structure, and usually only deposits on the target surface. This is the difference between electron beam evaporation and sputtering.

[0003] The Chinese utility model patent with the announcement number CN212223086U discloses an electron beam evaporation table, including a box, a rotating device, a crucible and an electron gun. The box is a cavity with a vacuum chamber inside, the rotating device is pivotally mounted on the top of the cavity, the rotating device is placed with a substrate, the crucible is arranged below the rotating device, and there are multiple crucibles. The crucible is placed with a target material, and the electron gun is arranged in the cavity. The electron gun can apply high temperature to the target material. By setting a rotating device, multiple substrates can be placed in the cavity at the same time. Under the same cavity volume, the utility model can place more substrates, and the target material can be evaporated by an electron beam through the electron gun, so that the substrate can achieve coating of different thicknesses and coating of different materials, and coating of multiple materials can be carried out at the same time; and by setting a rotating device in a cavity of relative volume, a suitable space can be reasonably optimized, and the process requirements and production capacity requirements can be met, and maintenance is also convenient. However, there are still the following deficiencies in the prior art: 1. The planetary disc cannot be pulled out, which is inconvenient for taking out and putting in the product; 2. The door is a rotating one and needs to be opened manually, which not only poses a certain safety hazard, but also takes up a large area when the door is opened, taking up more working space; 3. After long-term work, the crucible is prone to get stuck. When the crucible is repaired, the vacuum in the cavity will be broken, that is, the product will come into contact with the air, resulting in product scrapping.

[0004] Therefore, there is a need for a vacuum evaporation coating device that is convenient for taking out and putting in materials, avoids product scrapping when the crucible is repaired, and improves safety. Summary of the invention

[0005] The technical problem to be solved by the present invention is: in order to overcome the deficiencies of the prior art, a vacuum evaporation coating device is provided which is convenient for taking out and putting in materials, avoids product scrapping when the crucible is repaired, and improves safety.

[0006] The technical solution adopted by the present invention to solve the above problems is: a vacuum evaporation coating device, comprising a box body, a vacuum chamber is arranged in the box body, a crucible and a planetary mechanism are arranged in the vacuum chamber, the vacuum chamber comprises an upper cavity and a lower cavity, the upper cavity and the lower cavity are distributed up and down, a gate valve is arranged at the connection between the upper cavity and the lower cavity, and the connection and disconnection of the upper cavity and the lower cavity are controlled by the gate valve; A vacuum port is provided on one side of the upper cavity, the vacuum port is connected to a first vacuum system, and the upper cavity is evacuated by the first vacuum system, and the lower cavity is evacuated by the second vacuum system; The crucible is located in the lower cavity, and the planetary mechanism is located in the upper cavity; One side of the upper cavity is open, and a cover body is provided at the opening to seal the cover, the cover body is located outside the box body, the cover body is connected to the box body through an opening and closing mechanism, and the opening and closing of the cover body is realized by the opening and closing mechanism; The opening and closing mechanism includes a rotating assembly and two slide rails, the two slide rails are respectively arranged above and below the cover body, the two slide rails are horizontally fixed on the outer wall of the box body, the cover body is fixed with two connecting seats, the two connecting seats correspond to the two slide rails one by one, the connecting seats are slidably connected to the slide rails, and the two connecting seats are connected to the rotating assembly; The planetary mechanism comprises a planetary disk and a telescopic assembly, wherein the telescopic assembly is connected to the planetary disk, and two telescopic assemblies are provided, and the two telescopic assemblies are symmetrically arranged on both sides of the planetary disk, and the movement of the planetary disk is realized by the telescopic assembly.

[0007] Preferably, the rotating assembly includes a rotating rod and two moving seats, the two moving seats are slidably connected to the two slide rails respectively, the rotating rod is vertically arranged on one side of the cover body, two first push blocks are fixedly arranged on the rotating rod, the two first push blocks correspond one to one with the two connecting seats, one of the first push blocks is connected to a driving source, the first push block is pushed by the driving source, so that the first push block drives the rotating rod to rotate, the second push block is fixedly arranged on the rotating rod, the second push block is rotatably connected to the cover body, the two ends of the rotating rod are respectively rotatably connected to the two moving seats, the connecting seat is rotatably connected with a rotating block, the rotating block is rotatably connected to the moving seat, and the rotating block is hinged to the first push block through a connecting rod.

[0008] Preferably, the driving source is a cylinder, the cylinder body of the cylinder is rotatably connected to one of the moving seats, and the piston end of the cylinder is rotatably connected to one of the first push blocks. Preferably, the gate valve comprises a valve seat and a valve plate, wherein the valve plate is movably inserted into the valve seat, and the valve plate is connected to a moving system, through which the valve plate can be extended and retracted.

[0009] Preferably, the moving system includes a lead screw, a guide rod, a telescopic frame and a push plate, the lead screw is a double-threaded type, two sliders are threadedly connected to the lead screw, the telescopic frame is horizontally arranged, the two ends of one side of the telescopic frame are respectively hinged to the two sliders, the two ends of the other side of the telescopic frame are both slidably connected to the push plate, the push plate is fixedly connected to the valve plate, the lead screw is driven by the valve motor, the guide rod is parallel to the lead screw, the guide rod passes through the two sliders in sequence, and the guide rod is fixedly connected to the valve seat.

[0010] Preferably, the telescopic assembly includes a support bar and a fixed frame, the support bar is arranged horizontally, a roller is provided on the support bar, a plurality of rollers are provided, and the plurality of rollers are distributed along the length direction of the support bar, the planetary disk is connected to the support bar, the fixed frame is fixedly connected to the upper cavity, a slide groove is provided on one side of the fixed frame, and the roller is arranged in the slide groove.

[0011] Preferably, two positioning pins are detachably fixedly provided on the fixing frame, and the roller is located between the two positioning pins.

[0012] Preferably, the planetary disk includes a support ring and three brackets, the axis of the support ring is arranged vertically, the support ring is fixedly set on the support bar, the support ring is provided with a rotating seat for rotation, the rotating seat is connected to a driving source, and the driving source drives the rotating seat to rotate around the axis of the support ring, and the three brackets are evenly distributed circumferentially with the axis of the support ring as the center, one end of the bracket is fixedly set on the rotating seat, and a rotating wheel is installed on the other end of the bracket, the wheel surface of the rotating wheel abuts against the top of the support ring, and a rotating disk is fixedly set on the rotating shaft of the rotating wheel.

[0013] Preferably, the driving source is a planetary motor.

[0014] Preferably, the first vacuum system is a cryogenic pump.

[0015] Compared with the prior art, the advantages of the present invention are: 1. The pull-out planetary plate makes it easy to take out and put in products, which improves the convenience of operation; 2. When the cover is opened, the cover is first rotated and then translated, and the cover after rotation is parallel to the cover in the closed state, thereby reducing the overall volume, that is, reducing the space occupied by the cover; 3. When the crucible needs to be repaired, keep the product in a vacuum environment to prevent the product from being scrapped due to contact with air; 4. The cryopump is set on one side of the upper cavity to avoid the corner of the vacuum channel, shorten the vacuum channel distance, and improve the vacuum efficiency, thereby improving the overall work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a vacuum evaporation coating device of the present invention; Figure 2 It is a schematic diagram of the connection structure between the vacuum chamber and the planetary mechanism; Figure 3 It is a schematic diagram of the connection structure between the lower cavity and the gate valve; Figure 4 for Figure 3 AA direction cross-sectional view; Figure 5 It is a schematic diagram of the connection structure between the cover body and the opening and closing mechanism; Figure 6 It is a schematic diagram of the connection structure between the cover body and the rotating assembly; Figure 7 for Figure 6 A magnified view of part B; Figure 8 It is a schematic diagram of the structure of the planetary mechanism; Fig. 9 It is a structural schematic diagram of the telescopic component; Fig.10 is a side view of the telescopic assembly; Fig.11 for Fig.10 CC direction cross-sectional view; Fig.12 Schematic diagram of the structure of a planetary disk.

[0017] in: Box body 1, vacuum chamber 2, planetary mechanism 3, cover body 4, opening and closing mechanism 5, manhole 6, product 7; Upper cavity 21, lower cavity 22, gate valve 23, vacuum port 24, opening 25; Valve seat 231, valve plate 232, lead screw 233, guide rod 234, telescopic frame 235, push plate 236, slider 237, valve motor 238; Planetary disk 31, telescopic assembly 32; Support ring 311, bracket 312, rotating seat 313, planetary motor 314, rotating wheel 315, rotating disk 316; Support bar 321, fixing frame 322, roller 323, slide slot 324, positioning pin 325; Rotating assembly 51, slide rail 52, connecting seat 53; Rotating rod 511 , moving seat 512 , first pushing block 513 , second pushing block 514 , cylinder 515 , rotating block 516 , connecting rod 517 . DETAILED DESCRIPTION

[0018] like Figure 1-12 As shown, a vacuum evaporation coating device in this embodiment includes a box body 1, a vacuum chamber 2 is arranged in the box body 1, and a crucible and a planetary mechanism 3 are arranged in the vacuum chamber 2; The vacuum chamber 2 comprises an upper cavity 21 and a lower cavity 22, the upper cavity 21 and the lower cavity 22 are distributed up and down, and a gate valve 23 is provided at the connection between the upper cavity 21 and the lower cavity 22, and the connection and disconnection of the upper cavity 21 and the lower cavity 22 are controlled by the gate valve 23; The gate valve 23 includes a valve seat 231 and a valve plate 232. The valve plate 232 is movably inserted into the valve seat 231. The valve plate 232 is connected to a moving system, and the valve plate 232 is extended and retracted by the moving system. Here, when the valve plate 232 is extended, the upper cavity 21 and the lower cavity 22 are disconnected, that is, the upper cavity 21 and the lower cavity 22 form two relatively sealed spaces. When the valve plate 232 is retracted, the upper cavity 21 and the lower cavity 22 are connected. The moving system includes a lead screw 233, a guide rod 234, a telescopic frame 235 and a push plate 236. The lead screw 233 is a double-threaded type. Two sliders 237 are threadedly connected to the lead screw 233. The telescopic frame 235 is arranged horizontally. The two ends of one side of the telescopic frame 235 are respectively hinged to the two sliders 237. The two ends of the other side of the telescopic frame 235 are slidably connected to the push plate 236. The push plate 236 is fixedly connected to the valve plate 232. The lead screw 233 is driven by a valve motor 238. The guide rod 234 is parallel to the lead screw 233. The guide rod 234 passes through the two sliders in sequence. The guide rod 234 is fixedly connected to the valve seat 231. When the valve motor 238 is started, the lead screw 233 is driven to rotate. In fact, the threads of the two sliders 237 are rotated in opposite directions, so that the sliders 237 move closer or farther on the lead screw 233, thereby extending or shortening the telescopic frame 235. During the extension or shortening of the telescopic frame 235, the end of the telescopic frame 235 and the push plate 236 rotate relative to each other, and the push plate 236 moves toward or away from the lead screw 233. The movement of the push plate 236 drives the valve plate 232 to move synchronously, that is, the extension and retraction of the valve plate 232 are realized. A vacuum port 24 is provided on one side of the upper cavity 21, and a first vacuum system is connected to the vacuum port 24, and the upper cavity 21 is evacuated by the first vacuum system, and the first vacuum system is a cryopump. The lower cavity 22 is connected to a second vacuum system, and the lower cavity 22 is evacuated by the second vacuum system; The crucible is located in the lower cavity 22, and the planetary mechanism 3 is located in the upper cavity 21. The planetary mechanism 3 is used to place the product 7, and the crucible generates an electron beam to apply high temperature to the product 7; During operation, the product 7 is placed on the planetary mechanism 3. At this time, the valve plate 232 is retracted into the valve seat 231, that is, the upper cavity 21 and the lower cavity 22 are connected, and the upper cavity 21 and the lower cavity 22 are evacuated through the first vacuum system, and an electron beam is generated through the crucible and acts on the product 7 to achieve evaporation coating of the product 7; When the crucible needs to be repaired during operation, the valve plate 232 extends, that is, the upper cavity 21 and the lower cavity 22 are disconnected. When the crucible is taken out from the lower cavity 22, the upper cavity 21 is still in a vacuum state, thereby preventing the product 7 from being scrapped due to contact with air during the maintenance of the crucible. After the crucible is repaired, it is put into the second cavity again, and the second cavity is evacuated by the second vacuum system. Then, the valve plate 232 is retracted, so that the upper cavity 21 and the lower upper cavity 21 are connected again, that is, the evaporation coating action of the product 7 can be carried out; Here, in the prior art, the vacuum channel has a 90-degree turning angle, and the vacuum channel distance is relatively long. However, arranging the cryopump on one side of the upper chamber 21 can not only avoid the turning angle, but also shorten the vacuum channel distance, that is, improve the vacuum efficiency, thereby improving the overall work efficiency. The upper cavity 21 has an opening 25 on one side, and a cover 4 is provided at the opening 25 as a sealing cover. The cover 4 is located outside the box 1, and is connected to the box 1 through an opening and closing mechanism 5. The cover 4 is opened and closed by the opening and closing mechanism 5. A manhole 6 is provided on the cover 4. The opening and closing mechanism 5 includes a rotating assembly 51 and two slide rails 52, the two slide rails 52 are respectively arranged above and below the cover body 4, and the two slide rails 52 are both horizontally fixedly arranged on the outer wall of the box body 1. Two connecting seats 53 are fixedly arranged on the cover body 4, and the two connecting seats 53 correspond to the two slide rails 52 one by one. The connecting seats 53 are slidably connected with the slide rails 52, and the two connecting seats 53 are connected to the rotating assembly 51. When the cover body 4 is opened, the cover body 4 is first rotated outward by the rotating assembly 51, that is, the cover body 4 is The cover 4 is separated from the opening 25. By calculation, the cover 4 is still parallel to the cover 4 in the closed state. Then, the cover 4 is pushed to make the cover 4 and the slide rail 52 move relative to each other, that is, the cover 4 moves along the slide rail 52 to one side of the upper cavity 21, so that the staff can take out or put in the product 7 from the opening 25. When the cover 4 needs to be closed, the cover 4 is pushed in the reverse direction to move to the position facing the opening 25. Then, the cover 4 is rotated in the reverse direction by the rotating assembly 51 and the sealing cover is set at the opening 25 to seal the opening 25. The rotating assembly 51 includes a rotating rod 511 and two moving seats 512, and the two moving seats 512 are slidably connected to the two slide rails 52 respectively. The rotating rod 511 is vertically arranged on one side of the cover body 4. Two first push blocks 513 are fixedly arranged on the rotating rod 511. The two first push blocks 513 correspond to the two connecting seats 53 one by one. One of the first push blocks 513 is connected to a driving source, and the first push block 513 is pushed by the driving source, so that the first push block 513 drives the rotating rod 511 to rotate. The rotating rod 511 is fixedly provided with a second push block 514, and the second push block 514 The cover body 4 is rotatably connected, and the two ends of the rotating rod 511 are rotatably connected with the two moving seats 512 respectively. The driving source is a cylinder 515. The cylinder body of the cylinder 515 is rotatably connected with one of the moving seats 512. The piston end of the cylinder 515 is rotatably connected with one of the first push blocks 513. The connecting seat 53 is rotatably connected with a rotating block 516. The rotating block 516 is rotatably connected with the moving seat 512. The rotating block 516 is hinged with the first push block 513 through a connecting rod 517. The second push block 514 is located on the side of the rotating block 516 close to the rotating rod 511. When the cover 4 is opened, the first push block 513 is driven to rotate by the cylinder 515, that is, the rotating rod 511 is driven to rotate to a set angle, and the rotation of the rotating rod 511 drives the second push block 514 to rotate. At the same time, the rotation of the rotating rod 511 also drives the rotating block 516 and the moving seat 512 to rotate relative to each other through the connecting rod 517. The cover 4 is rotated by the rotation of the second push block 514 and the rotating block 516. Then, the cover 4 is pushed to make the moving seat 512 translate on the slide rail 52. When the cover 4 is closed, the opening action is opposite to that of the cover 4; Here, when the cover body 4 is separated from the upper cavity 21, it is driven by the cylinder 515 to avoid manual operation. When the vacuum in the upper cavity 21 is not completely released and the cover body 4 is forcibly opened, there are certain safety hazards. In this way, safety can be improved. Moreover, after the cover body 4 is rotated, it is still parallel to the closed state of the cover body 4. Then, through the translation of the cover body 4, compared with the prior art in which the cover body is directly opened by rotation, the overall volume is reduced, that is, the space occupied by the cover body 4 is reduced; The planetary mechanism 3 includes a planetary disc 31 and a telescopic assembly 32, wherein the telescopic assembly 32 is connected to the planetary disc 31, and the planetary disc 31 is moved by the telescopic assembly 32, that is, when the product 7 needs to be put in or taken out, after the cover 4 is opened, the planetary disc 31 is extended from the opening 25 of the upper cavity 21 to the outside of the box body 1 by the telescopic assembly 32, which is convenient for the staff to operate, that is, the convenience is improved, and when the planetary disc 31 needs to be reset, the planetary disc 31 is transported from the opening 25 of the upper cavity 21 to the upper cavity 21 by the telescopic assembly 32 again; The telescopic components 32 are provided with two, and the two telescopic components 32 are symmetrically arranged on both sides of the planetary disk 31; The telescopic assembly 32 includes a support bar 321 and a fixing frame 322, wherein the support bar 321 is arranged horizontally, and the support bar 321 is horizontally slidably connected to the fixing frame 322; The support bar 321 is provided with a roller 323, and the roller 323 is provided in plurality, and the plurality of rollers 323 are distributed along the length direction of the support bar 321, the planetary disk 31 is connected to the support bar 321, the fixing frame 322 is fixedly connected to the upper cavity 21, and the roller 323 is rollingly connected to the fixing frame 322; A slide groove 324 is provided on one side of the fixing frame 322, and the roller 323 is provided in the slide groove 324; The fixing frame 322 is detachably fixed with two positioning pins 325 , and the roller 323 is located between the two positioning pins 325 ; When the planetary disc 31 needs to be moved out, the positioning pin 325 on the side close to the moving-out direction is removed, so that the roller 323 can roll in the slide groove 324, that is, the movement of the support bar 321 is realized, and the movement of the support bar 321 drives the planetary disc 31 to move synchronously. When the planetary disc 31 is reset, the removed positioning pin 325 is fixed on the fixing frame 322 again, that is, the positioning of the support bar 321 along its own length direction is realized; The planetary disk 31 includes a support ring 311 and three brackets 312. The axis of the support ring 311 is arranged vertically. The support ring 311 is fixedly set on the support bar 321. The support ring 311 is provided with a rotating seat 313 for rotation. The rotating seat 313 is connected to a driving source. The driving source drives the rotating seat 313 to rotate around the axis of the support ring 311. The driving source is a planetary motor 314. The three brackets 312 are evenly distributed circumferentially with the axis of the support ring 311 as the center. One end of the bracket 312 is fixedly set on the rotating seat 313, and the other end of the bracket 312 is installed with a rotating wheel 315. The wheel surface of the rotating wheel 315 abuts against the top of the support ring 311. The rotation of the rotating wheel 315 A rotating disk 316 is fixedly arranged on the moving shaft, and the product 7 is placed on the rotating disk 316. Multiple products 7 are placed on the same rotating disk 316. The multiple products 7 on the same rotating disk 316 are evenly distributed around the rotating shaft axis of the rotating wheel 315. The planetary motor 314 drives the rotating seat 313 to rotate, so that the bracket 312 drives the rotating wheel 315 to rotate around the axis of the supporting ring 311 on the top of the supporting ring 311, and the friction force causes the rotating wheel 315 to roll, that is, the rotating shaft of the rotating wheel 315 rotates, and the rotation of the rotating shaft drives the rotating disk 316 to rotate synchronously, and the rotation of the rotating disk 316 drives the product 7 to rotate synchronously, so that the product 7 is heated evenly and the uniformity of the evaporation coating of the product 7 is improved; To sum up, the pull-out planetary disk 31 is used to facilitate the removal and placement of the product 7, thereby improving the convenience of operation. Moreover, during the opening process of the cover body 4, the cover body 4 is first rotated and then translated, and the rotated cover body 4 is parallel to the cover body 4 in the closed state, thereby reducing the overall volume, that is, reducing the space occupied by the cover body 4. Secondly, when the crucible needs to be repaired, the product 7 is always in a vacuum environment to avoid the product 7 being scrapped due to contact with the air. In addition, the cryogenic pump is arranged on one side of the upper cavity 21 to avoid the corner of the vacuum channel and shorten the vacuum channel distance, that is, the vacuum efficiency is improved, thereby improving the overall work efficiency.

[0019] In addition to the above embodiments, the present invention also includes other implementation modes. Any technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.

Claims

1. A vacuum evaporation coating device, comprising a housing (1), wherein a vacuum chamber (2) is arranged in the housing (1), wherein a crucible and a planetary mechanism (3) are arranged in the vacuum chamber (2), characterized in that: The vacuum chamber (2) comprises an upper cavity (21) and a lower cavity (22), the upper cavity (21) and the lower cavity (22) being arranged vertically, a gate valve (23) being provided at the connection between the upper cavity (21) and the lower cavity (22), and the connection and disconnection between the upper cavity (21) and the lower cavity (22) are controlled by the gate valve (23); A vacuum port (24) is provided on one side of the upper cavity (21); the vacuum port (24) is connected to a first vacuum system, and the upper cavity (21) is evacuated by the first vacuum system; the lower cavity (22) is connected to a second vacuum system, and the lower cavity (22) is evacuated by the second vacuum system; The crucible is located in the lower cavity (22), and the planetary mechanism (3) is located in the upper cavity (21); One side of the upper cavity (21) is provided with an opening (25); a sealing cover is provided at the opening (25) with a cover body (4); the cover body (4) is located outside the box body (1); the cover body (4) is connected to the box body (1) via an opening and closing mechanism (5); and the cover body (4) is opened and closed via the opening and closing mechanism (5); The opening and closing mechanism (5) comprises a rotating assembly (51) and two slide rails (52), the two slide rails (52) being respectively arranged above and below the cover body (4), the two slide rails (52) being both horizontally fixedly arranged on the outer wall of the box body (1), the cover body (4) being fixedly provided with two connecting seats (53), the two connecting seats (53) corresponding one to the two slide rails (52), the connecting seats (53) being slidably connected to the slide rails (52), and the two connecting seats (53) being both connected to the rotating assembly (51); The planetary mechanism (3) comprises a planetary disk (31) and a telescopic assembly (32), wherein the telescopic assembly (32) is connected to the planetary disk (31), and two telescopic assemblies (32) are provided, and the two telescopic assemblies (32) are symmetrically arranged on both sides of the planetary disk (31), and the movement of the planetary disk (31) is achieved through the telescopic assembly (32).

2. The vacuum evaporation coating device according to claim 1, characterized in that: The rotating assembly (51) comprises a rotating rod (511) and two moving seats (512), the two moving seats (512) being slidably connected to the two slide rails (52) respectively, the rotating rod (511) being vertically arranged on one side of the cover body (4), and two first push blocks (513) being fixedly arranged on the rotating rod (511), the two first push blocks (513) corresponding to the two connecting seats (53) one by one, one of the first push blocks (513) being connected to a driving source, and the first push block (513) being pushed by the driving source, so that the first push block (513) is moved. The block (513) drives the rotating rod (511) to rotate. A second push block (514) is fixedly arranged on the rotating rod (511). The second push block (514) is rotatably connected to the cover body (4). The two ends of the rotating rod (511) are respectively rotatably connected to two moving seats (512). A rotating block (516) is rotatably connected to the connecting seat (53). The rotating block (516) is rotatably connected to the moving seat (512). The rotating block (516) is hinged to the first push block (513) via a connecting rod (517).

3. The vacuum evaporation coating device according to claim 2, characterized in that: The driving source is a cylinder (515), a cylinder body of the cylinder (515) is rotatably connected to one of the movable seats (512), and a piston end of the cylinder (515) is rotatably connected to one of the first pushing blocks (513).

4. The vacuum evaporation coating device according to claim 1, characterized in that: The gate valve (23) comprises a valve seat (231) and a valve plate (232); the valve plate (232) is movably inserted into the valve seat (231); the valve plate (232) is connected to a moving system, and the moving system enables the extension and retraction of the valve plate (232).

5. The vacuum evaporation coating device according to claim 4, characterized in that: The moving system comprises a lead screw (233), a guide rod (234), a telescopic frame (235) and a push plate (236); the lead screw (233) is of a double-thread type; two sliders (237) are threadedly connected to the lead screw (233); the telescopic frame (235) is arranged horizontally; two ends of one side of the telescopic frame (235) are respectively hinged to the two sliders (237); two ends of the other side of the telescopic frame (235) are both slidably connected to the push plate (236); the push plate (236) is fixedly connected to the valve plate (232); the lead screw (233) is driven by a valve motor (238); the guide rod (234) is parallel to the lead screw (233); the guide rod (234) passes through the two sliders (237) in sequence; and the guide rod (234) is fixedly connected to the valve seat (231).

6. The vacuum evaporation coating device according to claim 1, characterized in that: The telescopic assembly (32) comprises a support bar (321) and a fixing frame (322); the support bar (321) is arranged horizontally; a roller (323) is provided on the support bar (321); a plurality of rollers (323) are provided, and the plurality of rollers (323) are distributed along the length direction of the support bar (321); the planetary disc (31) is connected to the support bar (321); the fixing frame (322) is fixedly connected to the upper cavity (21); a slide groove (324) is provided on one side of the fixing frame (322); and the roller (323) is arranged in the slide groove (324).

7. The vacuum evaporation coating device according to claim 6, characterized in that: Two positioning pins (325) are detachably fixedly provided on the fixing frame (322), and the roller (323) is located between the two positioning pins (325).

8. The vacuum evaporation coating device according to claim 1, characterized in that: The planetary disk (31) comprises a support ring (311) and three brackets (312); the axis of the support ring (311) is arranged vertically; the support ring (311) is fixedly arranged on a support bar (321); a rotating seat (313) is arranged for the rotation of the support ring (311); the rotating seat (313) is connected to a driving source; the rotating seat (313) is driven by the driving source to rotate around the axis of the support ring (311); the three brackets (312) are evenly distributed in the circumferential direction with the axis of the support ring (311) as the center; one end of the bracket (312) is fixedly arranged on the rotating seat (313); the other end of the bracket (312) is mounted with a rotating wheel (315); the wheel surface of the rotating wheel (315) abuts against the top of the support ring (311); and a rotating disk (316) is fixedly arranged on the rotating shaft of the rotating wheel (315).

9. The vacuum evaporation coating device according to claim 8, characterized in that: The driving source is a planetary motor (314).

10. The vacuum evaporation coating device according to claim 1, characterized in that: The first vacuum system is a cryogenic pump.

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