A cooling back plate for magnetron sputtering coating equipment and a processing method thereof

Abstract

The present invention belongs to the technical field of cooling back plates, and discloses a cooling back plate for magnetron sputtering coating equipment and a processing method thereof, comprising a back plate main body, with a water inlet pipe and a water outlet pipe fixedly installed on both sides of the back plate main body respectively, a spoiler component is arranged inside the back plate main body, the spoiler component comprises a moving shaft arranged inside the back plate main body, a plurality of moving shafts are arranged, a first rotating shaft is installed inside each moving shaft through a rotating component, a first rotating plate is fixedly connected to an outer wall of the first rotating shaft, when the magnetron sputtering coating equipment is working, a motor is started by controlling the PLC to drive the moving shaft to slide up and down, and the movement of the moving shaft drives the first rotating plate to move through the first rotating shaft, thereby spoiling the coolant inside the back plate main body, so that it can fully flow inside the back plate main body, preventing the coolant from forming eddy currents or turbulence, so as to accelerate the circulation of the coolant and improve the heat dissipation efficiency.

Description

Technical Field

[0001] The invention belongs to the technical field of cooling back plates, and in particular relates to a cooling back plate for magnetron sputtering coating equipment and a processing method thereof. Background Art

[0002] Cooling backplanes play a key role in a variety of industrial equipment and systems, especially in situations where efficient thermal management is required, such as magnetron sputtering coating equipment, semiconductor manufacturing equipment, lasers, etc.

[0003] In the application of magnetron sputtering coating equipment, when the target material is bombarded by high-energy particles, a large amount of heat will be generated. This heat is quickly transferred to the cooling back plate through conduction. The coolant circulation system in the cooling back plate takes the heat away and dissipates it to the surrounding environment, thereby keeping the target material and the equipment at a low temperature.

[0004] After searching, such as patent: CN214842696U, a high-efficiency cooling backplane device for liquid crystal semiconductor film formation, including a cooling backplane and a cooling box, a target material is arranged above the cooling backplane, the cooling backplane is arranged above the cooling box, a water inlet pipe connected to the inner cavity is fixedly connected to the left end face of the cooling box, a water inlet flange is fixedly connected to the mouth of the water inlet pipe, a water outlet pipe connected to the inner cavity is fixedly connected to the right end face of the cooling box, a water outlet flange is fixedly connected to the mouth of the water outlet pipe, the cooling box includes a plurality of groups of mounting grooves, each group of the mounting grooves includes a placement plate, each group of the placement plates is provided with a permanent magnet, the placement plate is movably connected to the permanent magnet, the permanent magnet is in contact with the cooling backplane, two groups of monitoring chips are arranged in the cooling box, and a plurality of groups of spoiler mechanisms are arranged in the cooling box, aiming to solve the problem that the target material is easily damaged when encountering high temperature;

[0005] In actual use, the vertical stirring of the coolant by the stirring blades can easily cause the coolant to form eddies or turbulence inside the cooling backplate. These non-laminar flow conditions will cause the coolant to be unevenly distributed in the backplate, resulting in overheating or overcooling in some areas, thus affecting the overall heat dissipation effect. Summary of the invention

[0006] The object of the present invention is to provide a cooling back plate for magnetron sputtering coating equipment and a processing method thereof, so as to solve the problems raised in the above-mentioned background technology.

[0007] In order to achieve the above-mentioned object, the present invention provides the following technical solution: a cooling back plate for a magnetron sputtering coating device, comprising a back plate body, a water inlet pipe and a water outlet pipe are respectively fixedly installed on both sides of the back plate body, and a spoiler assembly is arranged inside the back plate body;

[0008] In which, the spoiler component includes a movable shaft arranged inside the back plate body, and there are multiple movable shafts. A first rotating shaft is installed inside each of the movable shafts through a rotating component, and a first rotating plate is fixedly connected to the outer wall of the first rotating shaft. A threaded rod is threadedly connected inside the bottom end of each movable shaft, and a first gear is fixedly installed at the bottom end of the threaded rod. A chain is meshedly connected to the outer wall of the first gear, and a second gear is meshedly connected to the inside of the chain. A second rotating shaft is fixedly installed inside the second gear, and a motor is installed on the top of the second rotating shaft, and the motor is arranged inside the back plate body.

[0009] As a further technical solution of the present invention, a first filter plate is fixedly mounted on the outer wall of the first rotating shaft.

[0010] As a further technical solution of the present invention, the rotating assembly includes a third rotating shaft installed inside the movable shaft, the bottom end of the third rotating shaft is embedded in the interior of the threaded rod, a slider is fixedly installed inside the threaded rod, the slider is slidably installed inside the slide groove, the slide groove is opened on the outer wall of the third rotating shaft, and a first bevel gear is fixedly installed on the top of the third rotating shaft, the top of the first bevel gear is meshed and connected with a second bevel gear, and the second bevel gear is fixedly installed at one end of the first rotating shaft.

[0011] As a further technical solution of the present invention, a collar is installed on the outer wall of the movable shaft, and a second rotating plate is fixedly connected to the outer wall of the collar, and a plurality of second rotating plates are provided.

[0012] As a further technical solution of the present invention, the collar is rotatably connected to the movable shaft.

[0013] As a further technical solution of the present invention, a second filter plate is fixedly mounted on the outer wall of the collar.

[0014] As a further technical solution of the present invention, a guide plate is arranged inside the back plate body, and the guide plate is arranged on one side of the water inlet pipe, and two guide plates are symmetrically arranged.

[0015] As a further technical solution of the present invention, the inner wall of the chain is meshedly connected with a fourth gear, a fourth rotating shaft is fixedly installed inside the fourth gear, a third gear is fixedly installed on the outer wall of the fourth rotating shaft, one side of the third gear is meshedly connected with a rack plate, a connecting plate is fixedly installed on the top of the rack plate, and the connecting plate is fixedly installed on the bottom end of the guide plate.

[0016] As a further technical solution of the present invention, the connecting plate is slidably installed inside the back plate body, and a spring is installed on one side of the connecting plate.

[0017] A method for processing a cooling back plate for a magnetron sputtering coating device comprises the following steps:

[0018] S1: When the magnetron sputtering coating equipment is working, the coolant is discharged into the back plate body through the water inlet pipe, and is evenly distributed in the back plate body through the guide plate;

[0019] S2: At the same time, the motor is started by controlling the PLC, the start of the motor drives the rotation of the second rotating shaft, the rotation of the second rotating shaft drives the rotation of the second gear, the rotation of the second gear drives the rotation of the first gear and the third gear through the chain transmission, the rotation of the first gear drives the rotation of the threaded rod, the rotation of the threaded rod drives the moving shaft to slide up and down, the movement of the moving shaft drives the first rotating plate to move through the first rotating shaft, and disturbs the coolant inside the back plate body;

[0020] S3: When the moving shaft moves up and down on the outer wall of the threaded rod, the movement of the moving shaft drives the third rotating shaft to move up and down inside the threaded rod, and at the same time, the slide groove slides on the outer wall of the slider, and the third rotating shaft is forced to rotate through its guidance. The rotation of the third rotating shaft drives the rotation of the first bevel gear, and the rotation of the first bevel gear drives the rotation of the second bevel gear. The rotation of the second bevel gear drives the rotation of the first rotating shaft, and the rotation of the first rotating shaft drives the rotation of the first rotating plate and the first filter plate, so that when the moving shaft drives the first rotating plate and the first filter plate to move up and down, the first rotating plate and the first filter plate rotate at the same time;

[0021] S4: When the chain rotates, the fourth gear rotates, the rotation of the fourth gear drives the rotation of the fourth rotating shaft, the rotation of the fourth rotating shaft drives the rotation of the third gear, the rotation of the third gear drives the movement of the rack plate, the movement of the rack plate drives the movement of the connecting plate, the movement of the connecting plate drives the movement of the guide plate, so that the guide plate moves on one side of the water inlet pipe, increasing the contact time and area between the coolant and the wall surface of the inner chamber of the back plate body;

[0022] S5: Finally, the water is discharged through the outlet pipe for circulation to cool the back plate body.

[0023] The beneficial effects of the present invention are as follows:

[0024] 1. The present invention sets a spoiler component. When the magnetron sputtering coating equipment is working, the motor is started by controlling the PLC. The start of the motor drives the rotation of the second rotating shaft. The rotation of the second rotating shaft drives the rotation of the second gear. The rotation of the second gear drives the rotation of the first gear through a chain transmission. The rotation of the first gear drives the rotation of the threaded rod. The rotation of the threaded rod drives the moving shaft to slide up and down. The movement of the moving shaft drives the first rotating plate to move through the first rotating shaft, thereby disturbing the coolant inside the back plate body so that it can fully flow inside the back plate body, preventing the coolant from forming eddies or turbulence, so as to accelerate the circulation of the coolant and improve the heat dissipation efficiency.

[0025] 2. The present invention arranges a rotating assembly, when the movable shaft moves up and down on the outer wall of the threaded rod, the movement of the movable shaft drives the third rotating shaft to move up and down inside the threaded rod, and at the same time the slide groove slides on the outer wall of the slider, and the third rotating shaft is forced to rotate through its guidance, and the rotation of the third rotating shaft drives the rotation of the first bevel gear, and the rotation of the first bevel gear drives the rotation of the second bevel gear, and the rotation of the second bevel gear drives the rotation of the first rotating shaft, and the rotation of the first rotating shaft drives the rotation of the first rotating plate and the first filter plate, so that when the movable shaft drives the first rotating plate and the first filter plate to move up and down, the first rotating plate and the first filter plate rotate at the same time, further improving the stirring effect on the coolant, thereby improving the heat dissipation effect of the cooling back plate.

[0026] 3. The present invention provides a guide plate. When the coolant is discharged from the water inlet pipe into the back plate body, the guide plate guides the coolant to the middle and both sides, so that the coolant flows over a wider distribution range and covers the entire cavity inside the back plate body, thereby enhancing the cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 It is a schematic cross-sectional view of the overall structure of the present invention;

[0029] Figure 3 It is a schematic cross-sectional view of the structure of the back plate body of the present invention;

[0030] Figure 4 For the present invention Figure 3 A schematic diagram of the structure enlargement in the middle;

[0031] Figure 5 This is a schematic diagram of the structure of the guide plate of the present invention;

[0032] Figure 6 It is a schematic cross-sectional view of the structure of the movable axis of the present invention;

[0033] Figure 7 For the present invention Figure 6 A magnified schematic diagram of the structure at B in the middle;

[0034] Figure 8 It is a schematic diagram of the structure of the movable axis of the present invention.

[0035] In the figure: 1. back plate body; 2. water inlet pipe; 3. water outlet pipe; 4. moving shaft; 5. first rotating shaft; 6. first rotating plate; 7. threaded rod; 8. first gear; 9. chain; 10. second gear; 11. second rotating shaft; 12. motor; 13. first filter plate; 14. collar; 15. second rotating plate; 16. second filter plate; 17. third rotating shaft; 18. first bevel gear; 19. second bevel gear; 20. slide groove; 21. slider; 22. guide plate; 23. connecting plate; 24. rack plate; 25. third gear; 26. fourth rotating shaft; 27. fourth gear; 28. spring. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] like Figures 1 to 8 As shown, in an embodiment of the present invention, a cooling back plate for a magnetron sputtering coating device comprises a back plate body 1, a water inlet pipe 2 and a water outlet pipe 3 are respectively fixedly installed on both sides of the back plate body 1, and a spoiler assembly is arranged inside the back plate body 1;

[0038] Among them, the spoiler component includes a movable shaft 4 arranged inside the back panel body 1, and there are multiple movable shafts 4. A first rotating shaft 5 is installed inside each movable shaft 4 through a rotating component. The outer wall of the first rotating shaft 5 is fixedly connected to a first rotating plate 6. The inside of the bottom end of each movable shaft 4 is threadedly connected to a threaded rod 7, and the bottom end of the threaded rod 7 is fixedly installed with a first gear 8. The outer wall of the first gear 8 is meshedly connected with a chain 9, and the inside of the chain 9 is meshedly connected with a second gear 10. The inside of the second gear 10 is fixedly installed with a second rotating shaft 11, and a motor 12 is installed at the top of the second rotating shaft 11. The motor 12 is arranged inside the back panel body 1.

[0039] The threaded rod 7 is configured as a reciprocating threaded rod 7;

[0040] Both sides of the bottom of the moving shaft 4 are provided with limit sliders 21, and the limit sliders 21 are slidably connected inside the back plate body 1;

[0041] When the magnetron sputtering coating equipment is working, the motor 12 is started by controlling the PLC, the start of the motor 12 drives the rotation of the second rotating shaft 11, the rotation of the second rotating shaft 11 drives the rotation of the second gear 10, the rotation of the second gear 10 drives the first gear 8 to rotate through the chain 9, the rotation of the first gear 8 drives the rotation of the threaded rod 7, the rotation of the threaded rod 7 drives the moving shaft 4 to slide up and down, the movement of the moving shaft 4 drives the first rotating plate 6 to move through the first rotating shaft 5, disturbs the coolant inside the back plate body 1, so that it can fully flow inside the back plate body 1, prevents the coolant from forming eddy currents or turbulence, so as to accelerate the circulation of the coolant and improve the heat dissipation efficiency.

[0042] like Figure 6 and Figure 8 As shown, a first filter plate 13 is fixedly mounted on the outer wall of the first rotating shaft 5 .

[0043] By contacting the coolant with the first filter plate 13, some impurities in the coolant can be filtered, reducing the wear and corrosion of the internal components of the cooling system by the impurities, thereby extending the service life of the entire cooling system.

[0044] like Figure 6 and Figure 7 As shown, the rotating assembly includes a third rotating shaft 17 installed inside the movable shaft 4, the bottom end of the third rotating shaft 17 is embedded in the threaded rod 7, a slider 21 is fixedly installed inside the threaded rod 7, the slider 21 is slidably installed inside the slide groove 20, the slide groove 20 is opened on the outer wall of the third rotating shaft 17, and a first bevel gear 18 is fixedly installed on the top of the third rotating shaft 17, and the top of the first bevel gear 18 is meshedly connected with a second bevel gear 19, and the second bevel gear 19 is fixedly installed at one end of the first rotating shaft 5.

[0045] When the movable shaft 4 moves up and down on the outer wall of the threaded rod 7, the movement of the movable shaft 4 drives the third rotating shaft 17 to move up and down inside the threaded rod 7. At the same time, the slide groove 20 slides on the outer wall of the slider 21, and the third rotating shaft 17 is forced to rotate through its guidance. The rotation of the third rotating shaft 17 drives the rotation of the first bevel gear 18. The rotation of the first bevel gear 18 drives the rotation of the second bevel gear 19. The rotation of the second bevel gear 19 drives the rotation of the first rotating shaft 5. The rotation of the first rotating shaft 5 drives the rotation of the first rotating plate 6 and the first filter plate 13. When the movable shaft 4 drives the first rotating plate 6 and the first filter plate 13 to move up and down, the first rotating plate 6 and the first filter plate 13 rotate at the same time, further improving the stirring effect on the coolant, thereby improving the heat dissipation effect of the cooling backplate.

[0046] like Figure 8 As shown, a collar 14 is installed on the outer wall of the movable shaft 4, and a second rotating plate 15 is fixedly connected to the outer wall of the collar 14, and a plurality of second rotating plates 15 are provided.

[0047] When the movable shaft 4 moves up and down, the ring 14 is driven to move up and down. The movement of the ring 14 drives the movement of the second rotating plate 15, so that the second rotating plate 15 stirs the coolant. When used together with the first rotating plate 6, it helps to break the temperature stratification phenomenon in the coolant and make the temperature more evenly distributed inside the entire cooling back plate.

[0048] like Figure 6 and Figure 8 As shown, the collar 14 and the moving shaft 4 are rotatably connected.

[0049] The coolant flows in a direction perpendicular to the rotation of the collar 14 . When the coolant flows, it can drive the second rotating plate 15 to rotate about the center of the collar 14 , which helps to reduce local overheating or overcooling and improve the overall cooling effect.

[0050] like Figure 6 and Figure 8 As shown, a second filter plate 16 is fixedly mounted on the outer wall of the collar 14 .

[0051] like Figures 2 to 5 As shown, a guide plate 22 is arranged inside the back plate body 1. The guide plate 22 is arranged on one side of the water inlet pipe 2, and two guide plates 22 are symmetrically arranged.

[0052] When the coolant is discharged from the water inlet pipe 2 into the back plate body 1, it is guided by the guide plate 22 to be distributed to the middle and both sides, so that the coolant flows in a wider range and covers the entire cavity inside the back plate body 1, thereby enhancing the cooling effect.

[0053] like Figure 3 and Figure 4 As shown, the inner wall of the chain 9 is meshedly connected with the fourth gear 27, the inner part of the fourth gear 27 is fixedly installed with the fourth rotating shaft 26, the outer wall of the fourth rotating shaft 26 is fixedly installed with the third gear 25, one side of the third gear 25 is meshedly connected with the rack plate 24, the top end of the rack plate 24 is fixedly installed with the connecting plate 23, and the connecting plate 23 is fixedly installed at the bottom end of the guide plate 22.

[0054] When the chain 9 rotates, the fourth gear 27 rotates, and the rotation of the fourth gear 27 drives the rotation of the fourth rotating shaft 26, and the rotation of the fourth rotating shaft 26 drives the rotation of the third gear 25, and the rotation of the third gear 25 drives the movement of the rack plate 24, and the movement of the rack plate 24 drives the movement of the connecting plate 23, and the movement of the connecting plate 23 drives the movement of the guide plate 22, so that the guide plate 22 moves on one side of the water inlet pipe 2, increasing the contact time and area between the coolant and the wall surface of the inner chamber of the back plate body 1, thereby more fully absorbing and dissipating heat.

[0055] like Figure 3 , Figure 4 and Figure 5 As shown, the connecting plate 23 is slidably installed inside the back plate body 1 , and a spring 28 is installed on one side of the connecting plate 23 .

[0056] The third gear 25 is configured as a sector gear;

[0057] When the third gear 25 rotates and engages with the rack plate 24, it drives the connecting plate 23 to move. When the connecting plate 23 moves, the spring 28 deforms to store elastic potential energy. When the third gear 25 rotates and disengages from the rack plate 24, the elastic potential energy is released by the spring 28 to reset the rack plate 24, so that the guide plate 22 moves back and forth, preventing the coolant from forming eddy currents or stagnation in the back plate body 1, reducing the occurrence of dead zones, and ensuring that the entire chamber can be evenly cooled, thereby helping to improve the overall cooling efficiency.

[0058] A method for processing a cooling back plate for a magnetron sputtering coating device comprises the following steps:

[0059] S1: When the magnetron sputtering coating device is working, the coolant is discharged into the back plate body 1 through the water inlet pipe 2, and is evenly distributed in the back plate body 1 through the guide plate 22;

[0060] S2: At the same time, the motor 12 is started by controlling the PLC, the start of the motor 12 drives the second rotating shaft 11 to rotate, the rotation of the second rotating shaft 11 drives the second gear 10 to rotate, the rotation of the second gear 10 drives the first gear 8 and the third gear 25 to rotate through the chain 9, the rotation of the first gear 8 drives the threaded rod 7 to rotate, the rotation of the threaded rod 7 drives the moving shaft 4 to slide up and down, the movement of the moving shaft 4 drives the first rotating plate 6 to move through the first rotating shaft 5, and disturbs the coolant inside the back plate body 1;

[0061] S3: When the movable shaft 4 moves up and down on the outer wall of the threaded rod 7, the movement of the movable shaft 4 drives the third rotating shaft 17 to move up and down inside the threaded rod 7, and at the same time, the slide groove 20 slides on the outer wall of the slider 21, and the third rotating shaft 17 is forced to rotate through its guidance, and the rotation of the third rotating shaft 17 drives the rotation of the first bevel gear 18, and the rotation of the first bevel gear 18 drives the rotation of the second bevel gear 19, and the rotation of the second bevel gear 19 drives the rotation of the first rotating shaft 5, and the rotation of the first rotating shaft 5 drives the rotation of the first rotating plate 6 and the first filter plate 13, so that when the movable shaft 4 drives the first rotating plate 6 and the first filter plate 13 to move up and down, the first rotating plate 6 and the first filter plate 13 rotate at the same time;

[0062] S4: When the chain 9 rotates, the fourth gear 27 rotates, the rotation of the fourth gear 27 drives the rotation of the fourth rotating shaft 26, the rotation of the fourth rotating shaft 26 drives the rotation of the third gear 25, the rotation of the third gear 25 drives the movement of the rack plate 24, the movement of the rack plate 24 drives the movement of the connecting plate 23, the movement of the connecting plate 23 drives the movement of the guide plate 22, so that the guide plate 22 moves on one side of the water inlet pipe 2, increasing the contact time and area between the coolant and the wall surface of the inner chamber of the back plate body 1;

[0063] S5: Finally, the water is discharged through the water outlet pipe 3 to circulate and cool the back plate body 1.

[0064] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling back plate for a magnetron sputtering coating device, comprising a back plate body (1), characterized in that: A water inlet pipe (2) and a water outlet pipe (3) are fixedly mounted on both sides of the back plate body (1), and a spoiler assembly is arranged inside the back plate body (1); The spoiler assembly comprises a movable shaft (4) arranged inside the back plate body (1), wherein the movable shaft (4) is provided with a plurality of movable shafts (4), each of which is provided with a first rotating shaft (5) installed inside through a rotating assembly, the outer wall of the first rotating shaft (5) is fixedly connected with a first rotating plate (6), the bottom end of each movable shaft (4) is threadedly connected inside with a threaded rod (7), the bottom end of the threaded rod (7) is fixedly installed with a first gear (8), the outer wall of the first gear (8) is meshedly connected with a chain (9), the inside of the chain (9) is meshedly connected with a second gear (10), the inside of the second gear (10) is fixedly installed with a second rotating shaft (11), the top end of the second rotating shaft (11) is provided with a motor (12), and the motor (12) is arranged inside the back plate body (1).

2. The cooling back plate for magnetron sputtering coating equipment according to claim 1, characterized in that: A first filter plate (13) is fixedly mounted on the outer wall of the first rotating shaft (5).

3. The cooling back plate for magnetron sputtering coating equipment according to claim 1, characterized in that: The rotating assembly comprises a third rotating shaft (17) installed inside the movable shaft (4), the bottom end of the third rotating shaft (17) is embedded in the inside of the threaded rod (7), a slider (21) is fixedly installed inside the threaded rod (7), the slider (21) is slidably installed inside the slide groove (20), the slide groove (20) is opened on the outer wall of the third rotating shaft (17), a first bevel gear (18) is fixedly installed on the top end of the third rotating shaft (17), the top end of the first bevel gear (18) is meshedly connected with a second bevel gear (19), and the second bevel gear (19) is fixedly installed on one end of the first rotating shaft (5).

4. The cooling back plate for magnetron sputtering coating equipment according to claim 1, characterized in that: A collar (14) is installed on the outer wall of the movable shaft (4), and a second rotating plate (15) is fixedly connected to the outer wall of the collar (14), and a plurality of second rotating plates (15) are provided.

5. The cooling back plate for magnetron sputtering coating equipment according to claim 4, characterized in that: The collar (14) and the movable shaft (4) are rotatably connected.

6. The cooling back plate for magnetron sputtering coating equipment according to claim 4, characterized in that: A second filter plate (16) is fixedly mounted on the outer wall of the collar (14).

7. The cooling back plate for magnetron sputtering coating equipment according to claim 1, characterized in that: A guide plate (22) is arranged inside the back plate body (1), and the guide plate (22) is arranged on one side of the water inlet pipe (2), and two guide plates (22) are symmetrically arranged.

8. The cooling back plate for magnetron sputtering coating equipment according to claim 1, characterized in that: The inner wall of the chain (9) is meshedly connected with a fourth gear (27), a fourth rotating shaft (26) is fixedly installed inside the fourth gear (27), a third gear (25) is fixedly installed on the outer wall of the fourth rotating shaft (26), one side of the third gear (25) is meshedly connected with a rack plate (24), a connecting plate (23) is fixedly installed on the top end of the rack plate (24), and the connecting plate (23) is fixedly installed on the bottom end of the guide plate (22).

9. The cooling back plate for magnetron sputtering coating equipment according to claim 8, characterized in that: The connecting plate (23) is slidably mounted inside the back plate body (1), and a spring (28) is mounted on one side of the connecting plate (23).

10. A method for processing a cooling back plate for a magnetron sputtering coating device, the method being applicable to the cooling back plate for a magnetron sputtering coating device as claimed in claims 1 to 9, characterized in that: The following steps are involved: S1: When the magnetron sputtering coating device is working, the coolant is discharged into the back plate body (1) through the water inlet pipe (2), and is evenly distributed in the back plate body (1) through the guide plate (22); S2: At the same time, the motor (12) is started by controlling the PLC, the start of the motor (12) drives the second rotating shaft (11) to rotate, the rotation of the second rotating shaft (11) drives the second gear (10) to rotate, the rotation of the second gear (10) drives the first gear (8) and the third gear (25) to rotate through the chain (9), the rotation of the first gear (8) drives the threaded rod (7), the rotation of the threaded rod (7) drives the moving shaft (4) to slide up and down, the movement of the moving shaft (4) drives the first rotating plate (6) to move through the first rotating shaft (5), and disturbs the coolant inside the back plate body (1); S3: When the movable shaft (4) moves up and down on the outer wall of the threaded rod (7), the movement of the movable shaft (4) drives the third rotating shaft (17) to move up and down inside the threaded rod (7), and at the same time, the slide groove (20) slides on the outer wall of the slider (21), and the third rotating shaft (17) is forced to rotate through its guidance. The rotation of the third rotating shaft (17) drives the rotation of the first bevel gear (18), and the rotation of the first bevel gear (18) drives the rotation of the second bevel gear (19). The rotation of the second bevel gear (19) drives the rotation of the first rotating shaft (5), and the rotation of the first rotating shaft (5) drives the rotation of the first rotating plate (6) and the first filter plate (13), so that when the movable shaft (4) drives the first rotating plate (6) and the first filter plate (13) to move up and down, the first rotating plate (6) and the first filter plate (13) rotate at the same time; S4: When the chain (9) rotates, the fourth gear (27) rotates, the rotation of the fourth gear (27) drives the rotation of the fourth rotating shaft (26), the rotation of the fourth rotating shaft (26) drives the rotation of the third gear (25), the rotation of the third gear (25) drives the movement of the rack plate (24), the movement of the rack plate (24) drives the movement of the connecting plate (23), the movement of the connecting plate (23) drives the movement of the guide plate (22), so that the guide plate (22) moves on one side of the water inlet pipe (2), thereby increasing the contact time and area between the coolant and the inner chamber wall of the back plate body (1); S5: Finally, the water is discharged through the water outlet pipe (3) and circulated to cool the back plate body (1).

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