A vertical continuous vacuum coating equipment

Abstract

The present invention belongs to the field of vacuum coating, and particularly relates to a vertical continuous vacuum coating device, including: a plurality of coating bins, a coating cavity is arranged in the coating bin, the plurality of coating bins are connected in sequence, the coating cavities in the plurality of coating bins are connected in sequence, and a valve for controlling the connection or isolation of the coating cavities of the two adjacent coating bins is arranged between them; a shelf for carrying workpieces, the shelf is vertically arranged in the coating cavity; a transmission mechanism for controlling the movement of the shelf in the coating cavity and between adjacent coating cavities, the transmission mechanism is arranged in the coating cavity, and the transmission mechanism is connected to the shelf by transmission; a coating mechanism for coating processing, the coating mechanism is arranged in the coating cavity. In the present invention, based on the vertical arrangement of the shelf, the coating bin can utilize the space in the height direction to accommodate, coat and transport the shelf, and can achieve higher production efficiency in a limited space.

Description

Technical Field

[0001] The invention belongs to the field of vacuum coating, and in particular relates to a vertical continuous vacuum coating device. Background Art

[0002] Vacuum coating equipment is a kind of equipment that uses vacuum coating technology to vacuum coat workpieces. During processing, it uses a series of technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency or magnetron to evaporate or sputter metals, alloys or compounds in a vacuum, so that they condense and deposit on the surface of the workpiece to form a thin film. With the continuous advancement of technological innovation, vacuum coating equipment has evolved from single coating chamber to multi-coating chamber continuous vacuum coating equipment. This transformation has not only significantly improved production efficiency, but also greatly improved film quality and achieved breakthrough progress in cost control.

[0003] As disclosed in a prior patent, a pipeline transmission continuous vacuum coating production line structure (application number CN202110996253.9) includes a shelf and a processing assembly; at least one of the processing assemblies has an internal processing space, which is used for a processing tube to coat the workpiece to be processed; and at least one isolation valve for isolating or connecting different spaces; multiple processing tubes are arranged in sequence, and isolation valves are arranged between adjacent processing tubes. After adjacent processing tubes are connected by isolation valves, their internal processing spaces are connected to form a channel for the shelf to be transported. However, in the prior patent, the shelf is in a lying posture to vacuum coat the processing tube and to transport between multiple processing tubes; this makes the length of the processing tube longer, especially when multiple sections of processing tubes are assembled and used, more ground space is required to accommodate its length, which is a problem in a production environment with limited space length. Summary of the invention

[0004] In order to solve the above problems, the object of the present invention is to provide a vertical continuous vacuum coating equipment, which utilizes the space in the height direction more effectively and can achieve higher production efficiency in a limited space.

[0005] In order to achieve the above object, the technical solution of the present invention is as follows.

[0006] A vertical continuous vacuum coating device, characterized by comprising:

[0007] A plurality of coating chambers, each of which is provided with a coating chamber, the plurality of coating chambers are connected in sequence, the coating chambers in the plurality of coating chambers are connected in sequence, and a valve for controlling the connection or isolation of the coating chambers of two adjacent coating chambers is provided between the two adjacent coating chambers;

[0008] A shelf for carrying workpieces, wherein the shelf is vertically arranged in the coating chamber;

[0009] A transmission mechanism for controlling the movement of the shelf in the coating chamber and between adjacent coating chambers, wherein the transmission mechanism is disposed in the coating chamber and is in transmission connection with the shelf;

[0010] A coating mechanism for coating processing, wherein the coating mechanism is arranged in the coating cavity.

[0011] In the vacuum coating equipment, a transmission mechanism is used to control the movement of the shelves in and between the coating chambers, so that the shelves can be vacuum coated continuously in sequence in multiple coating chambers. Based on the vertical arrangement of the shelves, the coating chambers can use the space in the height direction to accommodate, coat and transport the shelves, thereby achieving higher production efficiency in a limited space.

[0012] Furthermore, the transmission mechanism includes:

[0013] A shelf conveying and pushing component for pushing the shelf, wherein the shelf conveying and pushing component is installed in the coating chamber;

[0014] Used for a shelf conveying drive assembly, the shelf conveying drive assembly is installed on the coating bin, the shelf conveying drive assembly includes a conveying drive rod for extending into the coating cavity, and the conveying drive rod is drivingly connected to the shelf conveying push assembly.

[0015] Furthermore, the device also includes a guide mechanism for guiding the shelf, the guide mechanism is arranged on the upper side of the coating chamber, and the upper end of the shelf is movably connected to the guide mechanism;

[0016] Or, the device further comprises a guide mechanism for guiding the shelf, the guide mechanism is arranged at the lower side of the coating chamber, and the lower end of the shelf is movably connected to the guide mechanism;

[0017] Or, the device further comprises a guide mechanism for guiding the shelf, the guide mechanism is provided on both the upper and lower sides of the coating chamber, and both the upper and lower ends of the shelf are movably connected to the guide mechanism;

[0018] Furthermore, the guide mechanism includes a first guide frame and a second guide frame, the first guide frame is provided with a first guide groove, the second guide frame is provided with a second guide groove, the first guide frame and the second guide frame are arranged in parallel, and the first guide groove and the second guide groove are combined to form a guide channel for guiding the shelf.

[0019] Furthermore, the device also includes a plurality of positioning mechanisms for locking the position of the shelf, and the plurality of positioning mechanisms are respectively arranged in the plurality of coating cavities.

[0020] Furthermore, the positioning mechanism includes:

[0021] A positioning piece for positioning the shelf, the positioning piece extends into the coating cavity and corresponds to the position of the shelf;

[0022] A positioning drive assembly is disposed on the coating chamber and is drivingly connected to the positioning member.

[0023] Furthermore, the device also includes a plurality of rotation drive mechanisms for driving the shelves located in the coating chamber to drive the workpieces to rotate, and the plurality of rotation drive mechanisms are respectively arranged in the plurality of coating chambers.

[0024] Furthermore, the rotation drive mechanism comprises:

[0025] A driving member for extending into the coating chamber to drive the shelf to drive the workpiece to rotate;

[0026] A lifting drive assembly installed on the coating bin to drive the driving member to be separated from or connected to the shelf, wherein the lifting drive assembly is drivingly connected to the driving member;

[0027] A rotary drive assembly is used to be installed on the coating bin to drive the driving member to rotate, and the rotary drive assembly is drivingly connected to the driving member.

[0028] Further, the driving member includes a rotating sleeve and a lifting rod, one end of the lifting rod is formed with a driving end for driving the shelf to rotate, the rotating sleeve is arranged on the outside of the lifting rod, and the lifting drive assembly is drivingly connected to the other end of the lifting rod to drive the lifting rod to rise and fall on the rotating sleeve;

[0029] The rotary drive assembly is drivingly connected to the rotary sleeve, and drives the rotary sleeve to drive the lifting rod to rotate.

[0030] Furthermore, the device also includes a plurality of signal transmission mechanisms for obtaining shelf position information, and the plurality of signal transmission mechanisms are respectively arranged in the plurality of coating chambers.

[0031] Furthermore, the signal transmission mechanism includes:

[0032] A transfer rod, wherein one end of the transfer rod is formed with a first transfer end for extending into the coating cavity;

[0033] A trigger member corresponding to the position of the shelf in the coating chamber, wherein the trigger member is arranged on the first transmission end;

[0034] Travel switch;

[0035] A first insulating sleeve is used to be fixed on the coating bin, the travel switch is fixedly arranged on the first insulating sleeve, the first insulating sleeve is rotatably mounted on the transmission rod, and the other end of the transmission rod passes through the first insulating sleeve to form a second transmission end for triggering the travel switch, and the second transmission end corresponds to the position of the travel switch.

[0036] The beneficial effect of the present invention is that, in the vacuum coating equipment, the conveying mechanism is used to control the movement of the shelves in the coating chamber and between the coating chambers, so that the shelves are vacuum coated continuously in sequence in multiple coating chambers; and based on the vertical arrangement of the shelves, the coating chamber can use the space in the height direction to accommodate, coat and transport the shelves, thereby achieving higher production efficiency in a limited space. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of the present invention.

[0038] Figure 2 It is a structural schematic diagram of the hidden shelf of the present invention.

[0039] Figure 3 It is a structural schematic diagram of the transmission mechanism, the guide mechanism and the coating chamber of the present invention.

[0040] Figure 4 It is a structural schematic diagram of the transmission mechanism and the guide mechanism of the present invention.

[0041] Figure 5 It is a structural schematic diagram of the transmission mechanism of the present invention.

[0042] Figure 6 It is a structural schematic diagram of the pushing member of the present invention.

[0043] Figure 7 It is a structural schematic diagram of the positioning mechanism of the present invention.

[0044] Figure 8 It is a structural schematic diagram of the rotary drive mechanism of the present invention.

[0045] Fig. 9 It is a cross-sectional view of the rotary drive mechanism of the present invention.

[0046] Fig.10 It is a cross-sectional view of the signal transmission mechanism of the present invention.

[0047] Fig.11 It is a structural schematic diagram of a shelf of the present invention.

[0048] Fig.12 It is a cross-sectional view of a shelf of the present invention.

[0049] Figure Number:

[0050] 1. Coating chamber; 11. Coating chamber; 12. Valve; 13. Valve cylinder;

[0051] 2. Transmission mechanism; 21. Shelf conveying and pushing assembly; 211. Screw rod; 212. Second bevel gear; 213. Pushing member; 2131. Pushing body; 2132. Pushing part; 2133. Rotating part; 2134. Second return torsion spring; 2135. First rebound part; 2136. Second rebound part; 214. Pushing guide member; 2141. First guide bearing; 22. Shelf conveying and driving assembly; 221. Conveying driving rod; 222. Conveying driving motor; 223. First bevel gear; 23. Shielding member; 24. Second insulating sleeve; 25. Third insulating sleeve;

[0052] 3. Coating mechanism; 31. Vacuum tube; 32. Heating tube; 33. Target tube assembly; 331. Target tube; 332. Target tube drive assembly; 34. Process gas pipe;

[0053] 4. Guide mechanism; 41. First guide frame; 411. First guide groove; 42. Second guide frame; 421. Second guide groove;

[0054] 5. Positioning mechanism; 51. Positioning member; 52. Positioning drive assembly; 521. Positioning cylinder; 53. Fourth insulating sleeve;

[0055] 6. Rotation drive mechanism; 61. Driving member; 611. Rotation sleeve; 6111. Sliding groove; 6112. Second gear; 6113. Fifth insulating sleeve; 612. Lifting rod; 6121. Driving end; 6122. Sliding protrusion; 6123. Sixth insulating sleeve; 62. Lifting drive assembly; 621. Lifting cylinder; 622. Rotation bearing; 63. Rotation drive assembly; 631. Rotation motor; 632. First gear;

[0056] 7. Signal transmission mechanism; 71. Transmission rod; 711. First transmission end; 712. Second transmission end; 713. First reset torsion spring; 72. Trigger; 721. Trigger tooth; 722. Arc-shaped trigger surface; 73. Travel switch; 74. First insulating sleeve; 741. Reset part; 75. Switch control member;

[0057] 8. Shelf; 81. Upper bracket; 811. Driving position; 812. Positioning part; 813. Shelf positioning groove; 82. Lower bracket; 83. Connecting rod; 84. Bearing assembly; 841. Loading tray; 842. Lower tray; 843. Bearing rod; 844. Rotating rod; 8441. Rotating driving end; 8442. Driving protrusion; 8443. Rotating positioning groove; 845. Sun gear; 846. Planetary gear; 847. Limiting rod; 848. Transmission sleeve rod; 85. Shelf guide assembly; 851. Second guide bearing. DETAILED DESCRIPTION

[0058] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0059] See also Figure 1-12 This embodiment provides a vertical continuous vacuum coating device, comprising:

[0060] A plurality of coating chambers 1, each of which is provided with a coating chamber 11, the plurality of coating chambers 1 are connected in sequence, the coating chambers 11 in the plurality of coating chambers 1 are connected in sequence, and a valve 12 for controlling the connection or isolation of the coating chambers 11 of the two adjacent coating chambers 1 is provided between the two adjacent coating chambers 1;

[0061] A shelf 8 for carrying workpieces, wherein the shelf 8 is vertically arranged in the coating chamber 11;

[0062] A transmission mechanism 2 for controlling the movement of the shelf 8 in the coating chamber 11 and between adjacent coating chambers 11, wherein the transmission mechanism 2 is disposed in the coating chamber 11 and is in transmission connection with the shelf 8;

[0063] The coating mechanism 3 is used for coating processing, and the coating mechanism 3 is arranged in the coating cavity 11.

[0064] It should be noted that in Figure 1 , Figure 2 The coating chamber 1 shown in the figure is a part of the coating chamber 1, which can be understood as a partial structure of the left or right half.

[0065] In the vacuum coating equipment, the conveying mechanism 2 is used to control the movement of the shelf 8 in the coating chamber 11 and between the coating chambers 11, so that the shelf 8 can be vacuum coated continuously in sequence in multiple coating chambers 1; and it should be noted that for the factory building, its height space is completely sufficient or even surplus for the coating equipment. The factor limiting the coating equipment lies in the length of the factory building. For the continuous coating equipment, the combination of seven or eight coating chambers 1 may be as few as a dozen or even dozens of coating chambers 1, which cannot be accommodated by general small and medium-sized factory buildings; therefore, in the present application, by arranging the shelf 8 vertically, the coating chamber 1 can use the space in the height direction to accommodate, coat and transport the shelf 8, so as to achieve higher production efficiency in a limited space.

[0066] Specifically, the valve 12 is drivingly connected to the valve cylinder 13 , and the valve cylinder 13 controls the valve 12 to move between the two coating chambers 11 , so as to control the connection or isolation of the two adjacent coating chambers 11 .

[0067] See also Figure 1 , 10 In this embodiment, the device further includes a plurality of signal transmission mechanisms 7 for obtaining position information of the shelf 8, and the plurality of signal transmission mechanisms 7 are respectively arranged in the plurality of coating chambers 11. When the shelf 8 is transported between the coating chambers 11, the corresponding signal transmission mechanism 7 triggered by the shelf 8 is used to determine the coating chamber 11 into which the shelf 8 specifically enters, and then the transmission mechanism 2 in the coating chamber 11 can be used to control the transport of the shelf 8 in the coating chamber 11, and control the transport of the shelf 8 between the coating chamber 11 and the next coating chamber 11.

[0068] In this embodiment, the signal transmission mechanism 7 includes:

[0069] A transfer rod 71, wherein one end of the transfer rod 71 is formed with a first transfer end 711 for extending into the coating chamber 11;

[0070] A trigger member 72 for corresponding to the position of the shelf 8 in the coating chamber 11, wherein the trigger member 72 is disposed on the first transmission end 711;

[0071] Travel switch 73;

[0072] The first insulating sleeve 74 is used to be fixed on the coating chamber 1, and the travel switch 73 is fixedly arranged on the first insulating sleeve 74. The first insulating sleeve 74 is rotatably sleeved on the transfer rod 71, and the other end of the transfer rod 71 passes through the first insulating sleeve 74 to form a second transfer end 712 for triggering the travel switch 73, and the second transfer end 712 corresponds to the position of the travel switch 73. When the shelf 8 is transported to enter the next coating chamber 11, the trigger member 72 will be pushed to drive the transfer rod 71 to rotate through the trigger member 72, and then the second transfer end 712 at the other end of the transfer rod 71 is used to trigger the travel switch 73, so as to obtain the position information of the shelf 8 when it is transferred between the coating chambers 11, so as to ensure more accurate transportation of the shelf 8; and based on the setting of the first insulating sleeve 74, the current can be effectively prevented from being transferred to the travel switch 73, so as to ensure the reliability of the travel switch 73.

[0073] In this embodiment, the signal transmission mechanism 7 further includes a switch control member 75 for triggering a travel switch 73 . One end of the switch control member 75 is fixedly mounted on the second transmission end 712 , and the other end of the switch control member 75 corresponds to the position of the travel switch 73 .

[0074] In this embodiment, a first reset torsion spring 713 is sleeved on the second transmission end 712 , a reset portion 741 is provided on the first insulating sleeve 74 , and one end of the first reset torsion spring 713 is abutted against or connected to the reset portion 741 .

[0075] In this embodiment, the trigger member 72 includes a rotating portion 2133 and a trigger tooth 721 corresponding to the position of the shelf 8 in the coating chamber 11 , the trigger tooth 721 is fixedly disposed on the rotating portion 2133 , and the rotating portion 2133 is fixedly sleeved on the first transmission end 711 .

[0076] In this embodiment, a curved trigger surface 722 corresponding to the position of the shelf 8 in the coating chamber 11 is disposed on one side of the trigger tooth 721 .

[0077] See also Figure 3 , 4 The device also includes a guide mechanism 4 for guiding the shelf 8. The guide mechanism 4 is arranged on the upper side of the coating chamber 11. The upper end of the shelf 8 is movably connected to the guide mechanism 4. Based on the setting of the guide mechanism 4, the shelf 8 can be more stable during the transmission movement.

[0078] In this embodiment, the guide mechanism 4 includes a first guide frame 41 and a second guide frame 42, the first guide frame 41 is provided with a first guide groove 411, the second guide frame 42 is provided with a second guide groove 421, the first guide frame 41 and the second guide frame 42 are arranged in parallel, and the first guide groove 411 and the second guide groove 421 are combined to form a guide channel for guiding the shelf 8. The shelf can be guided by the guide channel composed of the first guide groove 411 and the second guide groove 421.

[0079] See also Figure 1-6 In this embodiment, the transmission mechanism 2 includes:

[0080] A shelf conveying and pushing component 21 for pushing the shelf 8, wherein the shelf conveying and pushing component 21 is installed in the coating chamber 11;

[0081] The shelf conveying drive assembly 22 is used, and the shelf conveying drive assembly 22 is installed on the coating warehouse 1. The shelf conveying drive assembly 22 includes a conveying drive rod 221 for extending into the coating cavity 11. The conveying drive rod 221 is drivingly connected to the shelf conveying push assembly 21.

[0082] The shelf conveying driving assembly 22 located outside the coating chamber 1 is used to drive the shelf conveying pushing assembly 21 located in the coating chamber 11, so as to drive the shelf conveying pushing assembly 21 to push the shelf 8, thereby controlling the transmission of the shelf 8 in the coating chamber 11, so that the shelf 8 can move in the coating chamber 11 and between the coating chambers 11.

[0083] In this embodiment, the transmission mechanism 2 further includes a shielding member 23 for shielding the shelf conveying and pushing assembly 21, the shielding member 23 is fixed to the guide mechanism 4, and the shelf conveying and pushing assembly 21 is located between the shielding member 23 and the guide mechanism 4. The setting of the shielding member 23 can effectively shield and protect the shelf conveying and pushing assembly 21.

[0084] In this embodiment, the movable sleeve on the conveying driving rod 221 is provided with a second insulating sleeve 24 for isolating the surface current of the coating chamber 1 .

[0085] In this embodiment, a third insulating sleeve 25 is movably sleeved on the conveying driving rod 221 to prevent current from being conducted along the conveying driving rod 221 .

[0086] In this embodiment, the shelf conveying drive assembly 22 further includes a conveying drive motor 222 , and the conveying drive motor 222 is drivingly connected to the conveying drive rod 221 .

[0087] In this embodiment, the conveying driving rod 221 is sleeved with a first bevel gear 223; the shelf conveying pushing assembly 21 includes a screw rod 211, a second bevel gear 212, and a pushing member 213 for pushing the shelf 8, the second bevel gear 212 is fixedly sleeved on the screw rod 211, and the first bevel gear 223 is meshed with the second bevel gear 212, and the pushing member 213 is movably sleeved on the thread of the screw rod 211. Specifically, the third insulating sleeve 25 is fixedly sleeved on the conveying driving rod 221, and the first bevel gear 223 is fixedly sleeved at the end of the third insulating sleeve 25.

[0088] In this embodiment, a pushing guide member 214 is rotatably provided on the upper end of the pushing member 213 .

[0089] In this embodiment, the pushing guide member 214 includes a first guide bearing 2141 rotatably disposed on the upper end of the pushing member 213 .

[0090] In this embodiment, the pushing member 213 includes a pushing body 2131, a pushing portion 2132, a rotating portion 2133, and a second return torsion spring 2134. The rotating portion 2133 is fixedly arranged at the lower end of the pushing body 2131, and the pushing portion 2132 is rotatably sleeved on the rotating portion 2133; a first rebound portion 2135 is also arranged at the lower end of the pushing body 2131, and a second rebound portion 2136 is arranged on the pushing portion 2132. The second return torsion spring 2134 is sleeved on the rotating portion 2133, and the two ends of the second return torsion spring 2134 are respectively connected to or abutted against the first rebound portion 2135 and the second rebound portion 2136.

[0091] See also Figure 1 ,7 In this embodiment, the device also includes a plurality of positioning mechanisms 5 for locking the position of the shelf 8, and the plurality of positioning mechanisms 5 are respectively arranged in the plurality of coating chambers 11.

[0092] In this embodiment, the positioning mechanism 5 includes:

[0093] A positioning member 51 for positioning the shelf 8, wherein the positioning member 51 extends into the coating chamber 11 and corresponds to the position of the shelf 8;

[0094] The positioning drive component 52 is arranged on the coating chamber 1 , and the positioning drive component 52 is drivingly connected to the positioning member 51 .

[0095] Based on the setting of the above-mentioned positioning mechanism 5, when the shelf 8 moves to the coating position of the coating chamber 11, the positioning drive component 52 is used to drive the positioning member 51 to move to position the shelf 8, so as to ensure that the shelf 8 is always stably located in the correct coating position during coating, so as to improve the stability of the coating process.

[0096] In this embodiment, a fourth insulating sleeve 53 is provided on the movable sleeve of the positioning member 51 for isolating the surface current of the coating chamber 1 .

[0097] In this embodiment, the positioning drive assembly 52 includes a positioning cylinder 521 , and the positioning cylinder 521 is drivingly connected to the positioning member 51 .

[0098] See also Figure 1 , 8 9. In the present embodiment, the device further comprises a plurality of rotation drive mechanisms 6 for driving the shelf 8 located in the coating chamber 11 to drive the workpiece to rotate. The plurality of rotation drive mechanisms 6 are respectively arranged in the plurality of coating chambers 11.

[0099] In this embodiment, the rotation drive mechanism 6 includes:

[0100] A driving member 61 for extending into the coating chamber 11 to drive the shelf 8 to drive the workpiece to rotate;

[0101] A lifting drive assembly 62 for being installed on the coating bin 1 to drive the driving member 61 to be disconnected from or connected to the shelf 8, wherein the lifting drive assembly 62 is drivingly connected to the driving member 61;

[0102] A rotation driving assembly 63 is used to be installed on the coating chamber 1 to drive the driving member 61 to rotate, and the rotation driving assembly 63 is drivingly connected to the driving member 61.

[0103] When the shelf 8 moves into the coating chamber 11, after being positioned by the positioning mechanism 5, the lifting drive assembly 62 is used to control the driving member 61 to move to a transmission connection with the shelf 8, and then the rotating drive assembly 63 is used to control the driving member 61 to rotate, and then rotate with the workpiece on the shelf 8 to ensure the coating effect of the workpiece during the continuous coating process.

[0104] In this embodiment, the driving member 61 includes a rotating sleeve 611 and a lifting rod 612. A driving end 6121 for driving the shelf 8 to rotate is formed at one end of the lifting rod 612. The rotating sleeve 611 is sleeved on the outside of the lifting rod 612. The lifting driving assembly 62 is connected to the other end of the lifting rod 612 through a rotating bearing 622 to drive the lifting rod 612 to rise and fall on the rotating sleeve 611.

[0105] The rotary drive assembly 63 is connected to the rotary sleeve 611, and drives the rotary sleeve 611 to rotate the lifting rod 612. The lifting drive assembly 62 drives the lifting rod 612 to rise and fall on the rotary sleeve 611, so as to control the lifting rod 612 to be disconnected from or connected to the shelf 8; and when the lifting rod 612 is connected to the shelf 8, the rotary drive assembly 63 drives the rotary sleeve 611 to rotate, so as to drive the lifting rod 612 to rotate through the rotary sleeve 611.

[0106] In this embodiment, a sliding groove 6111 is provided on the inner side of the rotating sleeve 611 along the axial direction, and a sliding protrusion 6122 is provided on the outer side of the lifting rod 612, and the sliding protrusion 6122 is slidably provided in the sliding groove 6111. The rotating sleeve 611 and the lifting rod 612 can cooperate with each other through the sliding groove 6111 and the sliding protrusion 6122, so that the two can only move relative to each other in the axial direction; specifically, the sliding groove 6111 is provided on both sides of the inner side of the rotating sleeve 611, and the sliding protrusion 6122 is provided on both sides of the lifting rod 612.

[0107] In this embodiment, the rotation drive assembly 63 includes a rotation motor 631 and a first gear 632, wherein the rotation motor 631 is drivingly connected to the first gear 632; a second gear 6112 is sleeved on the outer side of the rotation sleeve 611, and the first gear 632 meshes with the second gear 6112. The rotation motor 631 drives the first gear 632 to rotate, and when the first gear 632 rotates, it drives the second gear 6112 meshed with it to rotate, and then drives the rotation sleeve 611 to rotate through the second gear 6112.

[0108] In this embodiment, the lifting drive assembly 62 includes a lifting cylinder 621, and the lifting cylinder 621 is drivingly connected to the other end of the lifting rod 612. Specifically, a rotary bearing 622 is fixed to the other end of the lifting cylinder 621, and the rotary bearing 622 is sleeved on the other end of the lifting rod 612, so that when the lifting cylinder 621 drives the lifting rod 612, the lifting rod 612 can also rotate relatively.

[0109] In this embodiment, a fifth insulating sleeve 6113 for isolating the surface current of the coating chamber 1 is provided on the outer side of the rotating sleeve 611 ; the coating chamber 1 is connected to the fifth insulating sleeve 6113 .

[0110] In this embodiment, a sixth insulating sleeve 6123 is sleeved at one end of the lifting rod 612 for preventing current from being conducted through the lifting rod 612 , and the driving end 6121 is located at the end of the sixth insulating sleeve 6123 .

[0111] In this embodiment, the coating mechanism 3 includes a vacuum tube 31, a heating tube 32, a target tube assembly 33, and a process gas pipe 34, wherein the heating tube 32, the target tube assembly 33, and the process gas pipe 34 are all arranged in the coating chamber 11, and the vacuum tube 31 is connected to the coating chamber 11.

[0112] In this embodiment, the target tube assembly 33 includes a target tube 331 and a target tube driving assembly 332 for driving the target tube 331 to rotate, wherein the target tube driving assembly 332 is fixed to the coating chamber 1 and is drivingly connected to the target tube 331. Specifically, the target tube driving assembly 332 is composed of a motor, a gear and other structures, and can drive the target tube 331 to rotate.

[0113] See also Fig.11 , 12 In this embodiment, the shelf 8 comprises:

[0114] An upper bracket 81, wherein the upper bracket 81 is provided with a driving position 811 for the shelf conveying and pushing assembly 21 to drive the shelf conveying and pushing assembly 21 to move in the coating chamber 11;

[0115] Lower bracket 82;

[0116] A connecting rod 83, two ends of which are respectively fixed to the upper bracket 81 and the lower bracket 82;

[0117] The supporting component 84 includes an upper material tray 841, a lower material tray 842 and a plurality of supporting rods 843 for supporting workpieces, both ends of the plurality of supporting rods 843 are respectively connected to the upper material tray 841 and the lower material tray 842, and the upper material tray 841 and the lower material tray 842 are respectively connected to the upper bracket 81 and the lower bracket 82.

[0118] Specifically, the shelf is a multi-rod framed shelf in the present embodiment. For framed shelves, in other implementations, there are also single-rod framed shelves, that is, no load-bearing components are provided, and the shelves are directly connected to the upper bracket and the lower bracket through a load-bearing rod; in other implementations, there are also frameless shelves, that is, the lower bracket and the connecting rod are eliminated. This type of frameless shelf also includes single-rod and multi-rod (load-bearing components) types. The lower end of the connecting rod of the single rod or the lower end of the multi-rod (load-bearing component) can cooperate with the lifting and positioning structure at the lower side of the coating cavity 11, so that when the shelf is in the coating position, the lifting and positioning structure at the lower side of the coating cavity 11 can position the lower end of the connecting rod or the lower end of the multi-rod (load-bearing component).

[0119] When the coating process is carried out, the shelf conveying and pushing assembly 21 in the coating cavity 11 can drive the shelf 8 to vertically convey the coating between the coating cavities 11 through the driving position 811 of the upper bracket 81, thereby meeting the continuous movement coating requirements of the continuous furnace with multiple coating cavities 11; and based on the setting of the bearing assembly 84 including multiple bearing rods 843 between the upper bracket 81 and the lower bracket 82, more workpieces can be carried for coating through the multiple bearing rods 843, and the coating efficiency of the workpieces is higher; and based on the setting of the connecting rod 83, the stability of the shelf 8 can also be effectively improved, making the reliability of the shelf 8 better.

[0120] In this embodiment, there are two connecting rods 83 , one end of the two connecting rods 83 is fixed to the two ends of the lower bracket 82 respectively, and the other ends of the two connecting rods 83 are fixed to the upper bracket 81 , and the bearing assembly 84 is located between the two connecting rods 83 .

[0121] In this embodiment, the supporting component 84 also includes a rotating rod 844, one end of which is connected to the loading tray 841, and the other end of which is rotatably connected to the upper bracket 81, and the other end of which passes through the upper side of the upper bracket 81 to form a rotating driving end 8441.

[0122] In this embodiment, the supporting assembly 84 also includes a sun gear 845 and multiple planetary gears 846, and the sun gear 845 and the multiple planetary gears 846 can be rotatably arranged in the upper material tray 841. The multiple planetary gears 846 are arranged around the circumference of the sun gear 845 to engage with the sun gear 845. One end of the multiple supporting rods 843 extends into the upper material tray 841 to be respectively connected with the multiple planetary gears 846; a limiting rod 847 for limiting the rotation of the sun gear 845 is also provided on the lower material tray 842, one end of the limiting rod 847 passes through the lower material tray 842 to be connected with the lower bracket 82, and the other end of the limiting rod 847 extends into the upper material tray 841 to be connected with the sun gear 845.

[0123] In this embodiment, the bearing assembly 84 also includes a transmission sleeve 848 , the two ends of which are respectively connected to the upper material tray 841 and the lower material tray 842 , and the transmission sleeve 848 is rotatably sleeved on the outer side of the limiting rod 847 .

[0124] In this embodiment, a positioning portion 812 for positioning the shelf 8 is further provided on the upper side of the upper bracket 81 .

[0125] In this embodiment, a shelf positioning groove 813 is provided on the positioning portion 812 .

[0126] In this embodiment, the transmission sleeve 848 and the upper bracket 81 are rotatably connected via a bearing.

[0127] In this embodiment, more than two driving protrusions 8442 are provided on the rotation driving end 8441 .

[0128] In this embodiment, a rotation positioning groove 8443 is further provided on the rotation driving end 8441 , and more than two driving protrusions 8442 are respectively located on both sides of the rotation positioning groove 8443 .

[0129] In this embodiment, the driving position 811 is a driving slot disposed on the left side or the right side of the upper bracket 81 .

[0130] In this embodiment, the number of the driving slots is more than two.

[0131] In this embodiment, a shelf guide assembly 85 for guiding the movement of the shelf 8 is disposed on the upper bracket 81 or the lower bracket 82 .

[0132] In this embodiment, the shelf guide assembly 85 includes a plurality of second guide bearings 851 , and the second guide bearings 851 are rotatably disposed on the upper side of the upper bracket 81 .

[0133] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vertical continuous vacuum coating equipment, characterized in that: include: A plurality of coating chambers, each of which is provided with a coating chamber, the plurality of coating chambers are connected in sequence, the coating chambers in the plurality of coating chambers are connected in sequence, and a valve for controlling the connection or isolation of the coating chambers of two adjacent coating chambers is provided between the two adjacent coating chambers; A shelf for carrying workpieces, wherein the shelf is vertically arranged in the coating chamber; A transmission mechanism for controlling the movement of the shelf in the coating chamber and between adjacent coating chambers, wherein the transmission mechanism is disposed in the coating chamber and is in transmission connection with the shelf; A coating mechanism for coating processing, wherein the coating mechanism is arranged in the coating cavity.

2. The vertical continuous vacuum coating equipment according to claim 1, characterized in that: The transmission mechanism comprises: A shelf conveying and pushing component for pushing the shelf, wherein the shelf conveying and pushing component is installed in the coating chamber; Used for a shelf conveying drive assembly, the shelf conveying drive assembly is installed on the coating bin, the shelf conveying drive assembly includes a conveying drive rod for extending into the coating cavity, and the conveying drive rod is drivingly connected to the shelf conveying push assembly.

3. The vertical continuous vacuum coating equipment according to claim 1, characterized in that: The device also includes a guide mechanism for guiding the shelf, the guide mechanism is arranged on the upper side of the coating chamber, and the upper end of the shelf is movably connected to the guide mechanism; Or, the device further comprises a guide mechanism for guiding the shelf, the guide mechanism is arranged at the lower side of the coating chamber, and the lower end of the shelf is movably connected to the guide mechanism; Alternatively, the device further comprises a guiding mechanism for guiding the shelf, the guiding mechanism is provided on both upper and lower sides of the coating chamber, and both upper and lower ends of the shelf are movably connected to the guiding mechanism.

4. The vertical continuous vacuum coating equipment according to claim 1, characterized in that: The device also includes a plurality of positioning mechanisms for locking the positions of the shelves, and the plurality of positioning mechanisms are respectively arranged in the plurality of coating cavities.

5. The vertical continuous vacuum coating equipment according to claim 4, characterized in that: The positioning mechanism comprises: A positioning piece for positioning the shelf, the positioning piece extends into the coating cavity and corresponds to the position of the shelf; A positioning drive assembly is disposed on the coating chamber and is drivingly connected to the positioning member.

6. The vertical continuous vacuum coating equipment according to claim 1, characterized in that: The device also includes a plurality of rotation drive mechanisms for driving the shelves located in the coating chamber to drive the workpieces to rotate, and the plurality of rotation drive mechanisms are respectively arranged in the plurality of coating chambers.

7. The vertical continuous vacuum coating equipment according to claim 6, characterized in that: The rotary drive mechanism comprises: A driving member for extending into the coating chamber to drive the shelf to drive the workpiece to rotate; A lifting drive assembly installed on the coating bin to drive the driving member to be separated from or connected to the shelf, wherein the lifting drive assembly is drivingly connected to the driving member; A rotary drive assembly is used to be installed on the coating bin to drive the driving member to rotate, and the rotary drive assembly is drivingly connected to the driving member.

8. The vertical continuous vacuum coating equipment according to claim 7, characterized in that: The driving member includes a rotating sleeve and a lifting rod, one end of the lifting rod is formed with a driving end for driving the shelf to rotate, the rotating sleeve is arranged on the outside of the lifting rod, and the lifting drive assembly is drivingly connected to the other end of the lifting rod to drive the lifting rod to rise and fall on the rotating sleeve; The rotary drive assembly is drivingly connected to the rotary sleeve, and drives the rotary sleeve to drive the lifting rod to rotate.

9. The vertical continuous vacuum coating equipment according to claim 1, characterized in that: The device also includes a plurality of signal transmission mechanisms for obtaining shelf position information, and the plurality of signal transmission mechanisms are respectively arranged in a plurality of coating chambers.

10. The vertical continuous vacuum coating equipment according to claim 9, characterized in that: The signal transmission mechanism comprises: A transfer rod, wherein one end of the transfer rod is formed with a first transfer end for extending into the coating cavity; A trigger member corresponding to the position of the shelf in the coating chamber, wherein the trigger member is arranged on the first transmission end; Travel switch; A first insulating sleeve is used to be fixed on the coating bin, the travel switch is fixedly arranged on the first insulating sleeve, the first insulating sleeve is rotatably mounted on the transmission rod, and the other end of the transmission rod passes through the first insulating sleeve to form a second transmission end for triggering the travel switch, and the second transmission end corresponds to the position of the travel switch.

Images