Cavity door hinge device for large vacuum chamber

Abstract

The invention discloses a cavity door hinge device for a large vacuum chamber. The cavity door hinge device comprises a first rotating shaft, a bearing supporting seat group, a vacuum chamber fixing support seat group and a vacuum chamber adjusting bolt group, wherein the first rotating shaft is used for correcting left-right direction deviation and up-down direction deviation of a vacuum chamber cavity door; the bearing supporting seat group and the vacuum chamber fixing support seat group are sequentially arranged at the two ends of the first rotating shaft from inside to outside; the vacuum chamber adjusting bolt group is arranged on the vacuum chamber fixing support seat group; the second transmission shaft group is used for correcting the deviation of the vacuum chamber door in the front-back direction, the vacuum chamber door fixing support group is used for supporting the second transmission shaft group and is fixed with the vacuum chamber door, and the vacuum chamber door adjusting bolt group is arranged on the vacuum chamber door fixing support group; compared with a traditional single-shaft type rotating hinge, the double-shaft type rotating hinge is adopted, and multi-position adjustment of the vacuum chamber door can be achieved; the problem that multiple sets of hinges of the large vacuum chamber door are not concentric in the axial direction in the installation and use abrasion process is solved.

Description

Technical Field

[0001] The invention belongs to the technical field of high vacuum chamber hinges, and in particular relates to a chamber door hinge device for a large vacuum chamber. Background Art

[0002] For large vacuum chambers with side opening doors, such as semiconductor vacuum chambers and coating machine vacuum chambers, side opening doors are required for conveying and installing workpieces, and the work is performed frequently and reciprocatingly. Usually, a side opening door is used as a connecting device between the door panel and the vacuum chamber by a hinge device, so that the door panel can rotate relative to the vacuum chamber, thereby opening or closing an opening of the vacuum chamber.

[0003] The existing common hinges are two or more sets of identical but independently installed single-axis door hinge devices. This technology has the following disadvantages:

[0004] 1) When the door panel is large and heavy, the axis forces of multiple sets of hinges are uneven, and the sleeves are inconsistently worn after multiple openings and closings, which causes the axis to shift. When the axis shifts, the door panel cannot be closed normally, affecting the sealing of the vacuum chamber and the static vacuum and dynamic vacuum.

[0005] 2) The existing hinge device is directly fixed on the vacuum chamber door and can only be kept in the current position and cannot be further fine-tuned. As a result, when the airtight structure set on the door panel leaks due to the inclination of the chamber door, the required vacuum degree cannot be achieved;

[0006] 3) The prior art uses two or more sets of hinge devices installed on the upper and lower parts of the cavity door along the longitudinal position, and the multiple sets of hinge devices are multiple independent rotating shafts, and it is difficult to make the axes of the multiple independent rotating shafts concentric.

[0007] In summary, when a failure occurs in the side-opening door panel of the vacuum chamber in the prior art, it is difficult to maintain and the maintenance cost is high. Summary of the invention

[0008] In view of the problems existing in the prior art, the present invention proposes a chamber door hinge device for a large vacuum chamber, aiming to achieve alignment and tight fit between the vacuum chamber flange and the vacuum chamber door flange and high vacuum sealing, and to solve the problem of misalignment between the vacuum chamber door flange and the vacuum chamber flange due to wear of the hinge during the long-term use of the vacuum chamber door, thereby causing poor vacuum sealing.

[0009] A chamber door hinge device for a large vacuum chamber, the chamber door hinge device comprising: a first rotating shaft (1) for correcting deviations of the vacuum chamber chamber door in the left-right direction and in the up-down direction; a bearing support seat group (2) and a vacuum chamber fixed support seat group (3) arranged at two ends of the first rotating shaft (1) from the inside to the outside, and a vacuum chamber adjusting bolt group (4) arranged on the vacuum chamber fixed support seat group (3); the vacuum chamber fixed support seat group (3) is used to be fixed to the vacuum chamber cavity body at two ends of the first rotating shaft (1); a second transmission shaft group (5) for correcting deviations of the vacuum chamber chamber door in the front-back direction, the second transmission shaft group (5) being parallel to the first rotating shaft (1); a vacuum chamber door fixed support seat group (6) for supporting the second transmission shaft group (5) and fixing it to the vacuum chamber chamber door, and a vacuum chamber door adjusting bolt group (7) arranged on the vacuum chamber door fixed support seat group (6); and an intermediate hinge shaft connecting member (8) arranged between the first rotating shaft (1) and the second transmission shaft group shaft (5).

[0010] Furthermore, the vacuum chamber fixed support group (3) comprises: a first vacuum chamber fixed support (3-1) arranged at the upper end of the first rotating shaft (1) and a second vacuum chamber fixed support (3-2) arranged at the lower end of the first rotating shaft; the vacuum chamber adjusting bolt group (4) comprises: a first vacuum chamber adjusting bolt group (4-1) arranged on the first vacuum chamber fixed support (3-1) and a second vacuum chamber adjusting bolt group (4-2) arranged on the second vacuum chamber fixed support (3-2); the first vacuum chamber adjusting bolt group (4-1) is arranged on two sides of a right angle in an obliquely upward direction on the outer side of the first vacuum chamber fixed support (3-1); and the second vacuum chamber adjusting bolt group (4-2) is arranged on two sides of a right angle in an obliquely downward direction on the outer side of the second vacuum chamber fixed support (3-2).

[0011] Furthermore, the first vacuum chamber adjusting bolt (4-1) group is arranged on two side edges at right angles in the oblique upper direction of the outer side of the first vacuum chamber fixed support (3-1), specifically: the first vacuum chamber adjusting bolt group (4-1) is divided into an upper adjusting bolt group (4-1-1) and a side adjusting bolt group (4-1-2), the upper adjusting bolt group (4-1-1) is arranged on the upper side line at right angles in the oblique upper direction of the outer side of the first vacuum chamber fixed support (3-1), and the side adjusting bolt group (4-1-2) is arranged on the side line at right angles in the oblique upper direction of the outer side of the first vacuum chamber fixed support (3-1); the upper adjusting bolt group (4-1-1) and the side adjusting bolt group (4-1-2) are respectively provided with a pressure screw and a tension screw, the pressure screw is used to press the chamber door downward, and the tension screw is used to pull the door upward.

[0012] Furthermore, the second vacuum chamber adjusting bolt group (4-2) is arranged on two side edges at right angles in the obliquely downward direction of the outer side of the second vacuum chamber fixed support (3-2), specifically: the second vacuum chamber adjusting bolt group (4-2) is divided into a lower adjusting bolt group (4-2-1) and a side adjusting bolt group (4-2-2), the lower adjusting bolt group (4-2-1) is arranged on the lower side line at right angles in the obliquely downward direction of the outer side of the second vacuum chamber fixed support, and the side adjusting bolt group is arranged on the side line at right angles in the obliquely downward direction of the outer side of the second vacuum chamber fixed support (3-2); the lower adjusting bolt group (4-2-1) and the side adjusting bolt group (4-2-2) are respectively provided with a pressure screw and a tension screw, the pressure screw is used to press the chamber door upward, and the tension screw is used to pull the door downward.

[0013] Furthermore, the vacuum chamber door fixing support group (6) includes: a first vacuum chamber door fixing support (6-1) arranged on the first vacuum chamber door fixing support (3-1), and a second vacuum chamber door fixing support (6-2) arranged on the second vacuum chamber door fixing support; the vacuum chamber door adjusting bolt group (7) includes: a first vacuum chamber door adjusting bolt (7-1) arranged on the first vacuum chamber door fixing support (6-1); and a second vacuum chamber door adjusting bolt (7-2) arranged on the second vacuum chamber door fixing support (6-2).

[0014] Furthermore, the first vacuum chamber door adjusting bolt (7-1) is arranged along the axial direction of the upper second transmission shaft group (5-1); and the second vacuum chamber door adjusting bolt (7-2) is arranged along the axial direction of the lower second transmission shaft group (5-2).

[0015] Furthermore, the first vacuum chamber door adjusting bolt (7-1) and the second vacuum chamber door adjusting bolt (7-2) are provided with a pressure screw and a tension screw. When the chamber door tilts forward, the pressure screw pushes the chamber door backward; when the chamber door tilts backward, the tension screw pulls the chamber door forward.

[0016] Advantages and effects of the present invention

[0017] 1. The chamber door hinge device of the present invention is used for a large vacuum chamber. Compared with the traditional single-axis rotating hinge, a double-axis rotating hinge is adopted, which can realize the multi-position adjustment of the vacuum chamber door and improve the sealing performance of the vacuum chamber; by adding the position adjustment bolt 4 of the vacuum chamber fixed support group 3, the up, down, left and right positions of the bearing support 2 of the first rotating shaft 1 can be adjusted, thereby solving the axial non-concentricity problem of multiple hinges of the large vacuum chamber door caused by the installation and use wear process.

[0018] 2. The lower bearing support 2-2 of the first rotating shaft of the present invention adopts a combination of a wear-resistant sliding bearing and a thrust ball bearing, which improves the smoothness of rotation and reduces the wear of the sliding bearing, simplifies the maintenance of the hinge device of the large vacuum chamber, and increases the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is an appearance diagram of the application effect of the vacuum chamber door hinge device of the present invention;

[0020] Figure 2a This is a main classification diagram of the components of the vacuum chamber door hinge device of the present invention;

[0021] Figure 2b A detailed classification diagram of the components of the vacuum chamber door hinge device of the present invention;

[0022] Figure 2c It is a cross-sectional view of the components of the vacuum chamber door hinge device of the present invention;

[0023] Figure 2d It is an exploded view of the components of the vacuum chamber door hinge device of the present invention;

[0024] Figure 3 This is a front view of the vacuum chamber door tilted in the left and right directions;

[0025] Figure 4 This is a side view of the vacuum chamber door tilting in the front-to-back direction;

[0026] Figure 5 It is a partial enlarged view of the hinge device of the vacuum chamber door of the present invention;

[0027] Figure 6 This is a schematic diagram of a combination of a wear-resistant sliding bearing and a thrust ball bearing used in the lower bearing support of the first rotating shaft of the present invention.

[0028] In the figure: 1: first transmission shaft; 2: bearing support seat; 2-1: upper bearing support seat; 2-1-1: upper sliding bearing; 2-2: lower bearing support seat; 2-2-1: lower sliding bearing; 2-2-2: thrust bearing; 3: vacuum chamber fixed support group; 3-1: first vacuum chamber fixed support; 3-2: second vacuum chamber fixed support; 4: vacuum chamber adjusting bolt group; 4-1: first vacuum chamber adjusting bolt group; 4-1-1: first upper adjusting bolt group; 4-1-2: first side adjusting bolt group; 4-2: second vacuum chamber adjusting bolt group; 4-2-2: second side adjusting bolt group; 4-2-1: second lower adjusting bolt group; 5: second transmission shaft group; 5-1: upper second transmission shaft group; 5-2: lower second transmission shaft group; 6: vacuum chamber door fixing support group; 6-1: first vacuum chamber door fixing support; 6-2: second vacuum chamber door fixing support; 7: vacuum chamber door adjusting bolt group; 7-1: first vacuum chamber door adjusting bolt; 7-2: second vacuum chamber door adjusting bolt; 8: intermediate hinge shaft connecting piece; 8-1: upper intermediate hinge shaft connecting piece; 8-2: lower intermediate hinge shaft connecting piece. DETAILED DESCRIPTION

[0029] Design principle of the present invention

[0030] 1. Design difficulties of the present invention: One difficulty is that the volume and weight of the chamber door of the vacuum chamber are unusual. The weight of the chamber door ranges from several hundred kilograms to one ton. The overweight door body causes the door shaft of the chamber door to be easily eccentric due to wear. The second difficulty is that the sealing effect of the vacuum chamber is required to be very high. The reason for vacuum leakage is often because the seal between the chamber door and the chamber body is not tight enough. The reason for the tight seal is that the door shaft of the chamber door is worn, causing the chamber door to tilt left and right, up and down, and front and back.

[0031] 2. Innovations of the present invention: One innovation: using a transmission shaft (first transmission shaft 1) to replace the multiple transmission shafts arranged along the door shaft in the prior art, specifically, at both ends of the first transmission shaft 1, an upper bearing support seat 2-1 and a lower bearing support seat 2-2 are arranged, thereby ensuring the coaxiality of the upper bearing support seat 2-1 and the lower bearing support seat 2-2; The second innovation: using a double-axis door hinge to replace the single-axis door hinge, and the first transmission shaft 1 and the second transmission shaft group 2 are connected by an intermediate hinge shaft connecting member 8, and the intermediate hinge shaft connecting member 8 ensures that the first transmission shaft 1 and the second transmission shaft group 2 are both independent of each other and support each other: when the first transmission shaft 1 and the second transmission shaft group 2 are connected by the intermediate hinge shaft connecting member 8, the first transmission shaft 1 and the second transmission shaft group 2 are .... When a vacuum chamber adjusting bolt group 4-1 and a second vacuum chamber adjusting bolt group 4-2 adjust the up-down position and left-right position of the chamber door, the thrust or pulling force of the first vacuum chamber adjusting bolt group 4-1 and the second vacuum chamber adjusting bolt group 4-2 is transmitted to the chamber door through the intermediate hinge shaft connecting member 8, thereby correcting the up-down or left-right inclination of the chamber door, which is mutual support; when the front and rear position of the chamber door is adjusted by the upper second transmission shaft group 5-1 and the lower second transmission shaft group 5-2, the first transmission shaft 1 ensures that the upper bearing support seat 2-1 and the lower bearing support seat 2-2 at both ends of the shaft will not affect the coaxiality due to the adjustment of the front and rear position of the chamber door, which is independent of each other. The third innovation point: using dynamic position adjustment instead of fixed position adjustment; the dynamic position adjustment includes the position adjustment when the door shaft is worn due to the excessive weight of the door body during long-term use. Due to the use of dual-axis transmission, multi-position adjustment is achieved; the multi-position adjustment refers to adjustment in six dimensions: up, down, left, right, front and back. Compared with the prior art, the dynamic adjustment of the position of the door of the present invention makes the vacuum seal durable for a long time.

[0032] 3. Double transmission shaft design principle: ① Fix the vacuum chamber fixed support group 3 and the vacuum chamber cavity; ② The upper bearing support seat 2-1 and the lower bearing support seat 2-2 are respectively connected to the vacuum chamber fixed support group 3; ③ The two ends of the first transmission shaft 1 are respectively connected to the upper bearing support seat 2-1 and the lower bearing support seat 2-2; ④ Install the vacuum chamber door fixed support group 6 on the vacuum chamber fixed support group 3; ⑤ Install the second transmission shaft group 5 on the vacuum chamber door fixed support group 6; ⑥ Use the intermediate hinge shaft connecting piece 8 to connect the first transmission shaft 1 and the second transmission shaft group 5 respectively; ⑦ Install the vacuum chamber door adjusting bolt group 7 on the second transmission shaft group 5; ⑧ Use the vacuum chamber door fixed support group 6 to connect the chamber door.

[0033] Based on the above invention principle, the present invention designs a chamber door hinge device for a large vacuum chamber, such as Figure 1-6As shown, the chamber door hinge device includes: a first rotating shaft 1 for correcting the left-right direction deviation and the up-down direction deviation of the vacuum chamber chamber door, a bearing support seat group 2 and a vacuum chamber fixed support group 3 arranged at both ends of the first rotating shaft 1 from the inside to the outside, and a vacuum chamber adjusting bolt group 4 arranged on the vacuum chamber fixed support group 3; the vacuum chamber fixed support group 3 is used to be fixed to the vacuum chamber cavity at both ends of the first rotating shaft 1; a second transmission shaft group 5 for correcting the front-back direction deviation of the vacuum chamber door, the second transmission shaft group 5 is parallel to the first rotating shaft 1; a vacuum chamber door fixed support group 6 for supporting the second transmission shaft group 5 and fixing it to the vacuum chamber door, and a vacuum chamber door adjusting bolt group 7 arranged on the vacuum chamber door fixed support group 6; an intermediate hinge shaft connecting member 8 arranged between the first rotating shaft 1 and the second transmission shaft group shaft 5.

[0034] like Figure 2a , 2b As shown, the vacuum chamber fixed support group 3 is: a first vacuum chamber fixed support 3-1 arranged at the upper end of the first rotating shaft 1 and a second vacuum chamber fixed support 3-2 arranged at the lower end of the first rotating shaft 1; the vacuum chamber adjusting bolt group 4 is: a first vacuum chamber adjusting bolt group 4-1 arranged on the first vacuum chamber fixed support 3-1, and a second vacuum chamber adjusting bolt group 4-2 arranged on the second vacuum chamber fixed support 3-2; the first vacuum chamber adjusting bolt group 4-1 is arranged on the two sides of a right angle in the oblique upper direction of the outer side of the first vacuum chamber fixed support 3-1; the second vacuum chamber adjusting bolt group 4-2 is arranged on the two sides of a right angle in the oblique lower direction of the outer side of the second vacuum chamber fixed support 3-2.

[0035] like Figure 2a , 2b As shown in , 2c, and 2d, the first vacuum chamber adjusting bolt group 4-1 is arranged on two side edges at right angles to the upper outer side of the first vacuum chamber fixed support 3-1, specifically: the first vacuum chamber adjusting bolt group 4-1 is divided into an upper adjusting bolt group 4-1-1 and a side adjusting bolt group 4-1-2, the upper adjusting bolt group 4-1-1 is arranged on the upper side line at right angles to the upper outer side of the first vacuum chamber fixed support 3-1, and the side adjusting bolt group 4-1-2 is arranged on the side line at right angles to the upper outer side of the first vacuum chamber fixed support 3-1; the upper adjusting bolt group 4-1-1 and the side adjusting bolt group 4-1-2 are respectively provided with a pressure screw and a tension screw, the pressure screw is used to press the chamber door downward, and the tension screw is used to pull the door upward.

[0036] like Figure 2a , 2bAs shown in , 2c, 2d, the second vacuum chamber adjusting bolt group 4-2 is arranged on the two side edges at right angles in the oblique downward direction of the outer side of the second vacuum chamber fixed support 3-2, specifically: the second vacuum chamber adjusting bolt group 4-2 is divided into a lower adjusting bolt group 4-2-1 and a side adjusting bolt group 4-2-2, the lower adjusting bolt group 4-2-1 is arranged on the lower side line at right angles in the oblique downward direction of the outer side of the second vacuum chamber fixed support, and the side adjusting bolt group is arranged on the side line at right angles in the oblique downward direction of the outer side of the second vacuum chamber fixed support 3-2; the lower adjusting bolt group 4-2-1 and the side adjusting bolt group 4-2-2 are respectively provided with a pressure screw and a tension screw, the pressure screw is used to press the chamber door upward, and the tension screw is used to pull the door downward.

[0037] like Figure 2a , 2b As shown in , 2c and 2d, the vacuum chamber door fixing support group 6 comprises: a first vacuum chamber door fixing support 6-1 arranged on the first vacuum chamber door fixing support 3-1, and a second vacuum chamber door fixing support 6-2 arranged on the second vacuum chamber door fixing support 3-2; the vacuum chamber door adjusting bolt group 7 comprises: a first vacuum chamber door adjusting bolt 7-1 arranged on the first vacuum chamber door fixing support 6-1; and a second vacuum chamber door adjusting bolt 7-2 arranged on the second vacuum chamber door fixing support 6-2.

[0038] like Figure 2a , 2b As shown in Figures 2c and 2d, the first vacuum chamber door adjusting bolt 7-1 is arranged along the axial direction of the upper second transmission shaft group 5-1; the second vacuum chamber door adjusting bolt 7-2 is arranged along the axial direction of the lower second transmission shaft group 5-2.

[0039] like Figure 2a , 2b As shown in Figures 2c and 2d, the first vacuum chamber door adjusting bolt 7-1 and the second vacuum chamber door adjusting bolt (7-2) are provided with a pressure screw and a tension screw. When the chamber door tilts forward, the pressure screw pushes the chamber door backward; when the chamber door tilts backward, the tension screw pulls the chamber door forward.

[0040] Embodiment 1

[0041] First, the vacuum chamber fixed support group 3 is fixedly connected to the vacuum chamber cavity, and the vacuum chamber door fixed support group 6 is connected to the vacuum chamber door, and then the first rotating shaft 1, the second rotating shaft group 5, and the corresponding bearings and bolts are assembled in sequence.

[0042] The vacuum chamber fixed support group 3 is divided into a first vacuum chamber fixed support 3-1 and a second vacuum chamber fixed support 3-2. The first vacuum chamber fixed support 3-1 is provided with a first upper adjustment bolt group 4-1-1 and a first side adjustment bolt group 4-1-2 on two sides; and the second vacuum chamber fixed support 3-2 is provided with a second side adjustment bolt group 4-2-2 and a second lower adjustment bolt group 4-2-1 on two sides.

[0043] The first vacuum chamber fixed support 3-1 and the second vacuum chamber fixed support 3-2 of the first rotating shaft 1 are adjusted up and down by the first upper adjusting bolt group 4-1-1 and the second lower adjusting bolt group 4-2-1;

[0044] The left and right adjustment of the first vacuum chamber fixed support 3-1 and the second vacuum chamber fixed support 3-2 of the first rotating shaft is realized through the first side adjusting bolt group 4-1-2 and the second side adjusting bolt group 4-2-2;

[0045] The front and rear adjustment of the vacuum chamber door is achieved through the first vacuum chamber door adjusting bolt 7-1 and the second vacuum chamber door adjusting bolt 7-2;

[0046] This enables the vacuum chamber flange and the vacuum chamber door flange to be aligned and closely matched, ensuring high vacuum sealing and solving the problem of poor vacuum sealing caused by the misalignment of the vacuum chamber door flange and the vacuum chamber flange due to the wear of the hinges during the long-term use of the vacuum chamber door.

[0047] It should be emphasized that the above specific embodiments are merely explanations of the present invention, and they are not limitations of the present invention. After reading this specification, those skilled in the art can make modifications to the above embodiments without any creative contribution as needed, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A chamber door hinge device for a large vacuum chamber, the chamber door hinge device comprising: A first rotating shaft (1) for correcting deviations of a vacuum chamber door in the left-right direction and in the up-down direction, a bearing support seat group (2) and a vacuum chamber fixed support seat group (3) arranged in sequence at both ends of the first rotating shaft (1) from the inside to the outside, and a vacuum chamber adjusting bolt group (4) arranged on the vacuum chamber fixed support seat group (3); the vacuum chamber fixed support seat group (3) is used to be fixed to the vacuum chamber cavity body at both ends of the first rotating shaft (1); a second transmission shaft group (5) for correcting deviations of the vacuum chamber door in the front-back direction, the second transmission shaft group (5) being parallel to the first rotating shaft (1); a vacuum chamber door fixed support seat group (6) for supporting the second transmission shaft group (5) and fixing it to the vacuum chamber door, and a vacuum chamber door adjusting bolt group (7) arranged on the vacuum chamber door fixed support seat group (6); and an intermediate hinge shaft connecting member (8) arranged between the first rotating shaft (1) and the second transmission shaft group shaft (5).

2. A chamber door hinge device for a large vacuum chamber according to claim 1, characterized in that: The vacuum chamber fixed support group (3) comprises: a first vacuum chamber fixed support (3-1) arranged at the upper end of the first rotating shaft (1) and a second vacuum chamber fixed support (3-2) arranged at the lower end of the first rotating shaft; the vacuum chamber adjusting bolt group (4) comprises: a first vacuum chamber adjusting bolt group (4-1) arranged on the first vacuum chamber fixed support (3-1) and a second vacuum chamber adjusting bolt group (4-2) arranged on the second vacuum chamber fixed support (3-2); the first vacuum chamber adjusting bolt group (4-1) is arranged on two sides of a right angle in an obliquely upward direction on the outer side of the first vacuum chamber fixed support (3-1); and the second vacuum chamber adjusting bolt group (4-2) is arranged on two sides of a right angle in an obliquely downward direction on the outer side of the second vacuum chamber fixed support (3-2).

3. A chamber door hinge device for a large vacuum chamber according to claim 2, characterized in that: The first vacuum chamber adjusting bolt (4-1) group is arranged on two side edges at right angles in the oblique upper direction of the outer side of the first vacuum chamber fixed support (3-1), specifically: the first vacuum chamber adjusting bolt group (4-1) is divided into a first upper adjusting bolt group (4-1-1) and a first side adjusting bolt group (4-1-2), the upper adjusting bolt group (4-1-1) is arranged on the upper side line at right angles in the oblique upper direction of the outer side of the first vacuum chamber fixed support (3-1), and the side adjusting bolt group (4-1-2) is arranged on the side line at right angles in the oblique upper direction of the outer side of the first vacuum chamber fixed support (3-1); the upper adjusting bolt group (4-1-1) and the side adjusting bolt group (4-1-2) are respectively provided with a pressure screw and a tension screw, the pressure screw is used to press the chamber door downward, and the tension screw is used to pull the door upward.

4. A door hinge device for a large vacuum chamber according to claim 2, characterized in that: The second vacuum chamber adjusting bolt group (4-2) is arranged on two right-angled side edges of the outer side of the second vacuum chamber fixed support (3-2) in the oblique downward direction. Specifically, the second vacuum chamber adjusting bolt group (4-2) is divided into a lower adjusting bolt group (4-2-1) and a side adjusting bolt group (4-2-2). The lower adjusting bolt group (4-2-1) is arranged on the lower right-angled side edge line of the outer side of the second vacuum chamber fixed support, and the side adjusting bolt group is arranged on the side right-angled side edge line of the outer side of the second vacuum chamber fixed support (3-2). The lower adjusting bolt group (4-2-1) and the side adjusting bolt group (4-2-2) are respectively provided with a pressure screw and a tension screw. The pressure screw is used to press the chamber door upward, and the tension screw is used to pull the door downward.

5. The door hinge device for a large vacuum chamber according to claim 2, characterized in that: The vacuum chamber door fixing support group (6) comprises: a first vacuum chamber door fixing support (6-1) arranged on the first vacuum chamber door fixing support (3-1), and a second vacuum chamber door fixing support (6-2) arranged on the second vacuum chamber door fixing support; the vacuum chamber door adjusting bolt group (7) comprises: a first vacuum chamber door adjusting bolt (7-1) arranged on the first vacuum chamber door fixing support (6-1); and a second vacuum chamber door adjusting bolt (7-2) arranged on the second vacuum chamber door fixing support (6-2).

6. A chamber door hinge device for a large vacuum chamber according to claim 5, characterized in that: The first vacuum chamber door adjusting bolt (7-1) is arranged along the axial direction of the upper second transmission shaft group (5-1); and the second vacuum chamber door adjusting bolt (7-2) is arranged along the axial direction of the lower second transmission shaft group (5-2).

7. A door hinge device for a large vacuum chamber according to claim 5, characterized in that: The first vacuum chamber door adjusting bolt (7-1) and the second vacuum chamber door adjusting bolt (7-2) are provided with a pressure screw and a tension screw. When the chamber door tilts forward, the pressure screw pushes the chamber door backward; when the chamber door tilts backward, the tension screw pulls the chamber door forward.

Images