A multi-view observation system and method for coordinated ultraviolet, visible and near-infrared three-wavelength observation

Abstract

This invention discloses a multi-view observation system with coordinated ultraviolet, visible, and near-infrared wavelengths. The system uses a beam splitter to divide a laser beam into a pump beam and a probe beam, adjusts the delay of the probe beam, and uses a polarization beam splitter and a CCD to acquire reflectivity information. Different wavelengths of probe light are generated through frequency doubling and combining using a BBO crystal, and specific wavelengths are filtered. Transmitted light passes through the sample and enters the imaging objective lens, where a transmission image is acquired through a filter and a CCD. Finally, the three-dimensional contour of the object is reconstructed on a computer. This invention combines variable polarization reflective imaging and variable wavelength transmission imaging techniques to more accurately capture the dynamic changes of materials during laser ablation, improving imaging accuracy. Furthermore, the multi-view imaging technology allows for the capture of polarization information from different angles, providing a more comprehensive perspective analysis and reconstruction of the object's three-dimensional structure and dynamic changes.

Description

Technical Field

[0001] This invention belongs to the technical field of femtosecond laser imaging, specifically relating to a multi-view observation system and method with coordinated ultraviolet, visible and near-infrared three wavelengths. Background Technology

[0002] In observing the ultrafast dynamics of femtosecond laser processing, ultrafast observation systems can be categorized into reflection-based and transmission-based imaging systems based on the incident mode of the probe light. Reflection-based imaging can calculate the plasma density during material surface ablation based on the temporal variation of the probe light's reflectivity, thereby exploring ultrafast dynamic processes such as free electron excitation and material phase transitions during laser-material interaction. Transmission-based imaging, on the other hand, can not only observe laser-induced plasma density changes within transparent materials but also study the spatiotemporal evolution of plasma / shock waves by observing laser-induced plasma eruptions, revealing the laser processing mechanism and providing a direct reflection of the efficiency and progress of the laser processing process.

[0003] When light passes through or reflects different materials, its polarization state changes. This property gives polarized light unique advantages in detection and analysis. In materials science, different polarized light can reveal the anisotropic properties of materials, detect internal stress and strain, and assess structural integrity and mechanical properties. In biomedical imaging, polarized light can penetrate tissues, improve imaging contrast, help distinguish different cells and tissues, provide clearer images, and aid in disease diagnosis and research. Furthermore, polarized light reduces reflection interference in remote sensing and environmental monitoring, enabling more accurate detection of water and atmospheric particle composition. Because different materials or structures respond differently to different polarized light, traditional imaging often yields only relatively blurry results, while using polarized light detection significantly improves imaging accuracy. Besides polarization state, the wavelength of light also has a significant impact on detection results. Since the dielectric function of a material is determined by both electron density and electron relaxation time, measuring the transmittance of a probe light of a single wavelength is insufficient to simultaneously calculate both electron density and electron relaxation time. Moreover, when using the same wavelength as the pump light for measurement, plasma interference may occur. Therefore, using multiple wavelengths to detect the ultrafast laser ablation process and inversely solving for the free electron density and electron relaxation time is a necessary method.

[0004] Electron relaxation time describes the time required for an electron to return from an excited state to its ground state, and it is closely related to phase transitions on a material surface under different polarized light. Under femtosecond laser irradiation, various phase transitions often occur on material surfaces. During these transitions, the optical properties of the material (such as refractive index and absorption coefficient) change significantly, and these changes are closely related to the electron relaxation time. For example, during the insulator-metal phase transition, the mobility and density of electrons change abruptly, leading to a significant alteration in the electron relaxation time. Because the optical properties of a material change with the electron relaxation time, multi-view imaging technology can capture the polarization information of an object from different angles, providing a more comprehensive perspective for analyzing and reconstructing the object's three-dimensional structure and dynamic changes. This multi-view imaging method not only enhances the stereoscopic characteristics of two-dimensional imaging but also allows for detailed analysis of the internal details and phase transition processes of objects during rapid changes. Currently, although there are relatively mature three-dimensional imaging methods on the market, most are concentrated in the macroscopic field, and research combining frequency and wavelength variations for three-dimensional observation in the ultrafast (picosecond-level) to microscopic fields is scarce. Summary of the Invention

[0005] The purpose of this invention is to address the aforementioned shortcomings in the prior art by providing a multi-view observation system and method that combines ultraviolet, visible, and near-infrared wavelengths, thereby solving the problem of the lack of existing three-dimensional observation technology in the ultrafast (picosecond-level) to microscopic fields while simultaneously combining it with three-dimensional imaging technology in the variable frequency and variable wavelength fields.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] Firstly, a multi-view observation system with coordinated ultraviolet, visible, and near-infrared wavelengths includes:

[0008] An ultrashort pulse laser source; the ultrashort pulse laser beam emitted by the ultrashort pulse laser source is split into a pump beam and a probe beam by the beam splitter-combiner I;

[0009] Pump beam optical path; the pump beam enters the pump beam optical path and is focused on the sample surface for sample surface ablation;

[0010] The probe beam optical path includes a reflective probe beam optical path and a transmissive probe beam optical path. The probe beam enters the probe beam optical path and, after passing through a delay device, is split into a reflective probe beam and a transmissive probe beam by a beam splitter-combiner II. The reflective probe beam enters the reflective probe beam optical path to acquire the time-domain reflectivity information of the sample when excited by pump light. The transmissive probe beam enters the transmissive probe beam optical path to acquire information on laser-induced plasma eruptions observed at different wavelengths.

[0011] An image receiver is used to receive temporal information on reflectivity when a sample is excited by pump light and information on laser-induced plasma eruptions observed at different wavelengths.

[0012] Furthermore, the pump beam path includes a polarizing beam splitter I and a lens I; the pump beam adjusts the magnitude of the light field through the polarizing beam splitter I, and then focuses it onto the sample surface through the lens I for sample surface ablation.

[0013] Furthermore, the reflective probe light path includes a polarizing beam splitter II, an imaging objective lens I, and a CCD I; the reflective probe light passes through the polarizing beam splitter II, adjusts the s-polarized light and p-polarized light on the reflective probe light path and illuminates the sample surface, and is reflected back to the CCD I through the imaging objective lens I to obtain the temporal information of reflectivity when the pump light excites the sample.

[0014] Furthermore, the transmission-type probe optical path includes lens II, BBO crystal I, BBO crystal II, lens II, short-pass filter, lens III, imaging objective II, dichroic mirror, 343nm bandpass filter, 515nm bandpass filter, CCD II, and CCD III; BBO crystal I, BBO crystal II, short-pass filter, and lens III are all disposed on the reflection path of lens II; imaging objective II is disposed on the side of the sample; a dichroic mirror is disposed behind imaging objective II; a 343nm bandpass filter and CCD II are disposed on one beam splitting path of the dichroic mirror, and a 515nm bandpass filter and CCD III are disposed on the other beam splitting path of the dichroic mirror.

[0015] Furthermore, both BBO crystal I and BBO crystal II are positioned in front of the focal point of lens II.

[0016] Furthermore, the wavelength of the reflective detection light is 1030 nm.

[0017] Furthermore, the imaging objective I is a 20× or 50× objective.

[0018] Furthermore, the image receiver is a computer.

[0019] Secondly, a multi-view observation method that coordinates ultraviolet, visible, and near-infrared wavelengths specifically includes the following steps:

[0020] S1. The ultrashort pulse laser beam emitted by the ultrashort pulse laser source is split into a pump beam and a probe beam by the beam splitter-combiner.

[0021] S2. The pump beam is adjusted by the polarizing beam splitter I to adjust the size of the light field, and then focused onto the sample surface by the lens I for sample surface ablation.

[0022] S3. After passing through the delay device, the probe beam is then split into a reflective probe beam and a transmissive probe beam by the beam splitter-combiner II.

[0023] S4. The reflected probe light is adjusted by the polarization beam splitter II to s-polarize and p-polarize the reflected light path and then illuminates the sample surface. It is then reflected back to CCD I by the imaging objective I to obtain the time-domain information of the reflectivity when the pump light excites the sample.

[0024] S5. The transmitted probe light passes through lens II and BBO crystal I to generate photons with a wavelength of 515nm. The 1030nm and 515nm photons simultaneously enter BBO crystal II and are combined to generate photons with a wavelength of 343nm. The 1030nm, 515nm and 343nm photons are filtered out by a short-pass filter to remove the 1030nm photons. The 515nm and 343nm photons are focused by lens III, pass through the side of the sample and enter imaging objective II. After being split by a dichroic mirror, the 343nm and 515nm light passes through a 343nm bandpass filter and a 515nm bandpass filter, respectively, and enters CCD II and CCD III, respectively, to obtain information on laser-induced plasma eruption at different wavelengths.

[0025] S6. The image receiver receives the time-domain information of reflectivity when the sample is excited by the pump light and the information of laser-induced plasma eruption observed at different wavelengths. It then uses the image three-dimensional contour extraction method to extract and restore the three-dimensional contour of the sample object surface and draw it into a three-dimensional image.

[0026] The ultraviolet-visible-near-infrared three-wavelength coordinated multi-view observation system and method provided by this invention have the following beneficial effects:

[0027] 1. The system of this invention splits the laser beam into a pump beam and a probe beam using a beam splitter, adjusts the delay of the probe beam, and uses a polarization beam splitter and CCD to obtain reflectivity information; it generates probe light of different wavelengths through frequency doubling and combining using a BBO crystal, and uses a filter to filter specific wavelengths; the transmitted light passes through the sample and enters the imaging objective lens, and a transmission image is obtained through the filter and CCD, and finally the three-dimensional contour of the object is reconstructed on the computer. This invention achieves high-precision, multi-view, and multi-wavelength dynamic imaging and analysis.

[0028] 2. Improve imaging accuracy: By combining variable polarization reflective imaging and variable wavelength transmission imaging techniques, the dynamic changes of materials during laser ablation can be captured more accurately, thus improving imaging accuracy.

[0029] 3. Multi-view analysis: Multi-view imaging technology can capture the polarization information of an object from different angles, providing a more comprehensive perspective for analyzing and reconstructing the object's three-dimensional structure and dynamic changes. This multi-view imaging method not only enhances the stereoscopic characteristics of two-dimensional imaging but also enables detailed analysis of the object's internal details and phase transition processes during rapid changes.

[0030] 4. Multi-wavelength detection: Utilizing probe light of multiple wavelengths to observe the ultrafast laser ablation process can effectively avoid plasma interference and improve the accuracy and reliability of measurements. Through multi-wavelength detection, the free electron density and electron relaxation time can be calculated in reverse, yielding more comprehensive material information.

[0031] 5. High temporal resolution: This invention uses a femtosecond laser as the light source, with a pulse duration on the order of femtoseconds, which enables the system to have high temporal resolution and observe subtle changes in ultrafast dynamic processes.

[0032] 6. Dynamic Phase Transition Analysis: Under femtosecond laser irradiation, various phase transition processes occur on the surface of materials. This system, through polarization-dependent detection, can monitor changes in the optical properties of materials in real time, and thus analyze the dynamic relationship between electronic relaxation time and phase transition processes.

[0033] 7. Multifunctional integration: This invention integrates two imaging methods, reflection and transmission, and combines them with a multi-frequency, multi-view observation system to achieve comprehensive analysis of dynamic changes on the surface and inside of materials, making it suitable for a variety of materials and application scenarios.

[0034] 8. This invention greatly improves both the accuracy and scope of observation, and can be applied to fields such as physical property control and high-resolution imaging. Attached Figure Description

[0035] Figure 1 This is the optical path diagram of the multi-view observation system with ultraviolet-visible-near-infrared three-wavelength coordination in Embodiment 1 of the present invention.

[0036] Figure 2 This is a reflection image of Ti at 40 ps with different polarized light in a specific embodiment of the present invention. Figure 2 (a) shows the result of processing with vertically polarized light. Figure 2 (b) shows the result of processing with horizontally polarized light.

[0037] Figure 3 This is a transmission image of Ti at 40 ps using light of different wavelengths in a specific embodiment of the present invention. Figure 3 (a) shows the observation results at a wavelength of 515 nm. Figure 3 (b) shows the observation results at a wavelength of 343 nm.

[0038] The components include: 1. Ultrashort pulse laser source; 2. Beam splitter-splitter I; 3. Beam splitter-splitter II; 4. Lens I; 5. Delay device; 6. Polarizing beam splitter I; 7. Polarizing beam splitter II; 8. CCD I; 9. BBO crystal I; 10. BBO crystal II; 11. Lens II; 12. Lens III; 13. Short-wavelength pass filter; 14. Imaging objective I; 15. Imaging objective II; 16. 343nm bandpass filter; 17. 515nm bandpass filter; 18. Dichroic mirror; 19. CCD II; 20. CCD III; 21. Computer. Detailed Implementation

[0039] The specific embodiments of the present invention are described below to enable those skilled in the art to understand the present invention. However, it should be understood that the present invention is not limited to the scope of the specific embodiments. For those skilled in the art, various changes are obvious as long as they are within the spirit and scope of the present invention as defined and determined by the appended claims. All inventions utilizing the concept of the present invention are protected.

[0040] Example 1

[0041] This embodiment provides a multi-view observation system with coordinated ultraviolet, visible, and near-infrared wavelengths. This system achieves high-precision, multi-view, and multi-wavelength dynamic imaging. (Reference) Figures 1-3 Specifically, it includes an ultrashort pulse laser source 1, a pump beam optical path, a probe beam optical path, and an image receiver.

[0042] in;

[0043] Ultrashort pulse laser source 1; used to emit an ultrashort pulse laser beam, which is split into a pump beam and a probe beam by a beam splitter-combiner mirror I2;

[0044] Pump beam optical path; The pump beam enters the pump beam optical path and is focused on the sample surface for sample surface ablation.

[0045] The probe beam optical path includes a reflective probe beam optical path and a transmissive probe beam optical path. The probe beam enters the probe beam optical path and, after passing through the delay device 5, is split into a reflective probe beam and a transmissive probe beam by the beam splitter-combiner mirror II 3. The reflective probe beam enters the reflective probe beam optical path to acquire the time-domain information of reflectivity when the sample is excited by the pump light. The transmissive probe beam enters the transmissive probe beam optical path to acquire information on laser-induced plasma eruptions observed at different wavelengths.

[0046] An image receiver is used to receive temporal information on reflectivity when a sample is excited by pump light and information on laser-induced plasma eruptions observed at different wavelengths.

[0047] Specifically, in this embodiment, the ultrashort pulse laser source 1 generates an ultrashort pulse laser beam of 1030nm. The ultrashort pulse laser beam passes through the beam splitter-combiner mirror I2 and is divided into a pump beam and a probe beam.

[0048] Pump beam optical path;

[0049] The pump beam path includes a polarizing beam splitter I6 and a lens I4. The pump beam is adjusted by the polarizing beam splitter I6 and then focused onto the sample surface by the lens I4 for sample surface ablation.

[0050] Detection beam path;

[0051] In actual operation, after the detection beam passes through the delay device 5, it is further divided into a reflective detection beam and a transmissive detection beam by the beam splitter-combiner mirror II 3. The reflective detection beam enters the reflective detection beam path, and the transmissive detection beam enters the transmissive detection beam path.

[0052] Reflective detection optical path;

[0053] The reflective probe light path includes a polarizing beam splitter II7, an imaging objective I14, and a CCD I8. In actual operation, the wavelength of the reflective probe light is 1030nm. The reflective probe light passes through the polarizing beam splitter II7, which adjusts the s-polarized light and p-polarized light on the reflective probe light path and illuminates the sample surface. The light is then reflected back to the CCD I by the imaging objective I14 to obtain the temporal information of the reflectivity of the sample when the pump light excites it.

[0054] As a preferred embodiment, for reflective pump detection, imaging objective I14 uses a 20× or 50× objective lens to detect surface reflectivity evolution information.

[0055] Transmissive detection optical path;

[0056] The transmission probe optical path includes lens II 11, BBO crystal I 9, BBO crystal II 10, lens II 11, short-wave pass filter 13, lens III 12, imaging objective II 15, dichroic mirror 18, 343nm bandpass filter 16, 515nm bandpass filter 17, CCD II 19, and CCD III 20.

[0057] In the specific configuration, BBO crystal I9, BBO crystal II10, short-pass filter 13, and lens III12 are all positioned on the reflection path of lens II11; imaging objective II15 is positioned on the side of the sample, and a dichroic mirror 18 is positioned behind imaging objective II15. A 343nm bandpass filter 16 and CCD II19 are positioned on one beam splitting path of dichroic mirror 18, and a 515nm bandpass filter 17 and CCD III20 are positioned on the other beam splitting path of dichroic mirror 18.

[0058] As a preferred embodiment, in order to ensure that they are not located at the lens focal point and to avoid damaging the BBO crystal, the positions of BBO crystal I9 and BBO crystal II10 are both located in front of the focal point of lens II11, wherein BBO crystal II10 only needs to be slightly off the lens focal point.

[0059] As a preferred embodiment, the imaging objective II15 is used to focus the transmitted light after it passes through the side of the sample, and is used to detect the processing morphology under different wavelengths of detection light after processing with different polarized light.

[0060] In actual operation, the transmitted probe light passes through lens II 11 and BBO crystal I 9 times to generate photons with a wavelength of 515nm; the 1030nm and 515nm photons simultaneously enter BBO crystal II 10, and are combined to generate photons with a wavelength of 343nm; the 1030nm, 515nm and 343nm photons are filtered out by short-pass filter 13; the 515nm and 343nm photons are focused by lens III 12, pass through the side of the sample and enter imaging objective II 15; after being split by dichroic mirror 18, the 343nm and 515nm light pass through 343nm bandpass filter 16 and 515nm bandpass filter 17 respectively, and enter CCD II 19 and CCD III 20 respectively, to obtain information on laser-induced plasma eruption at different wavelengths.

[0061] The image receiver, preferably computer 21 in this embodiment, is connected to CCDⅠ, CCDⅡ19 and CCDⅢ20 respectively, and is used to receive the time-domain information of reflectivity when the sample is excited by pump light and the information of laser-induced plasma eruption observed at different wavelengths.

[0062] Example 2

[0063] This embodiment, based on the system in Embodiment 1, provides a multi-view observation method that combines ultraviolet, visible, and near-infrared three-wavelength synergy. This method utilizes a combination of variable polarization reflective imaging and variable wavelength transmission imaging techniques to more accurately capture the dynamic changes of materials during laser ablation, improving imaging accuracy. Through multi-view imaging technology, polarization information of the object can be captured from different angles, providing a more comprehensive perspective for analyzing and reconstructing the object's three-dimensional structure and dynamic changes. This not only enhances the stereoscopic characteristics of two-dimensional imaging but also enables detailed analysis of the object's internal details and phase transition processes during rapid changes. Specifically, it includes the following steps:

[0064] S1. The ultrashort pulse laser beam emitted by the ultrashort pulse laser source 1 is split into a pump beam and a probe beam by the beam splitter-combiner mirror;

[0065] S2. The pump beam is adjusted by the polarizing beam splitter I6 to adjust the size of the light field, and then focused onto the sample surface by the lens I4 for sample surface ablation.

[0066] S3. After passing through the delay device 5, the probe beam is then split into a reflective probe beam and a transmissive probe beam by the beam splitter-combiner mirror II3.

[0067] S4. The reflected probe light is adjusted by the polarization beam splitter II7 to s-polarize the light and p-polarize the light in the reflected light path and then illuminates the sample surface. It is then reflected back to CCD I by the imaging objective I14 to obtain the time-domain information of reflectivity when the pump light excites the sample.

[0068] S5. The transmitted probe light passes through lens II 11 and BBO crystal I 9 times to generate photons with a wavelength of 515nm; the 1030nm and 515nm photons simultaneously enter BBO crystal II 10 and are combined to generate photons with a wavelength of 343nm; the 1030nm, 515nm and 343nm photons are filtered out by short-pass filter 13; the 515nm and 343nm photons are focused by lens III 12, pass through the side of the sample and enter imaging objective II 15; after being split by dichroic mirror 18, the 343nm and 515nm light pass through 343nm bandpass filter 16 and 515nm bandpass filter 17 respectively, and enter CCD II 19 and CCD III 20 respectively, to obtain information on laser-induced plasma eruption at different wavelengths.

[0069] S6. The image receiver receives the time-domain information of reflectivity when the sample is excited by the pump light and the information of laser-induced plasma eruption observed at different wavelengths. It then uses the image three-dimensional contour extraction method to extract and restore the three-dimensional contour of the sample object surface and draw it into a three-dimensional image.

[0070] In this embodiment, steps S4 and S5 can be parallel steps.

[0071] Example 3

[0072] Based on the system of Example 1 and the method of Example 2, this embodiment provides the following specific selection parameters for a multi-view observation system with coordinated ultraviolet-visible-near-infrared three wavelengths:

[0073] The ultrashort pulse laser has a center wavelength of 1030nm, a frequency of 40Hz, a single pulse width of 265fs, and a maximum output power of 3.5W. The beam splitter-beam combiner splits the 1030nm femtosecond laser into two lasers of equal power, which are used as the pump beam and the probe beam, respectively.

[0074] BBO crystal I9 is ​​a type I phase-matched crystal with a frequency doubling mode of o+o→e, and its dimensions are 3×3×30mm. 3 The 1030nm femtosecond laser, after passing through lens I4 (far from the focal point), is frequency doubled to produce an output power of 1W and a center wavelength of λ. 1 / 2=515nm frequency-doubled femtosecond laser;

[0075] The frequency-doubled 515nm and 1030nm lasers simultaneously enter BBO crystal II10 (positioned in front of the focal point of lens I4). Under high flux, their combined frequency produces an output power of 200mW with a center wavelength of λ. 1 / 2 =343nm femtosecond laser;

[0076] The beam then passes through a short-pass filter to filter out the 1030nm beam; the 515nm and 343nm beams are focused by imaging objective II 15 and then split into two observation paths of 515nm and 343nm by dichroic mirror 18, 343nm bandpass filter 16 and 515nm bandpass filter 17, respectively, and enter CCD II 19 and CCD III 20.

[0077] The polarizing beam splitter II7 separates two mutually perpendicular linearly polarized beams, which are then focused onto the sample surface by the imaging objective I14 to form a clear image. By adjusting the polarizing beam splitter II7, reflected observation light with different polarization states is obtained and finally enters CCD I8.

[0078] The polarizing beam splitter I6 is used to adjust the intensity of the incident pump light. By adjusting the polarizing beam splitter I6, the flux and magnitude of the pump light are adjusted, and finally, the light is incident on the sample surface at a 45° angle through the lens I4.

[0079] Finally, the information from CCD I, II, and III is integrated on computer 21, and the three-dimensional contour of the object surface is extracted and restored using the image three-dimensional contour extraction method, and drawn into a three-dimensional image.

[0080] Although specific embodiments of the invention have been described in detail with reference to the accompanying drawings, this should not be construed as limiting the scope of protection of this patent. Various modifications and variations that can be made by a person skilled in the art without inventive effort within the scope described in the claims still fall within the scope of protection of this patent.

Claims

1. A multi-view observation system with coordinated ultraviolet, visible, and near-infrared wavelengths, characterized in that, include: Ultrashort pulse laser source (1); the ultrashort pulse laser beam emitted by the ultrashort pulse laser source (1) is divided into a pump beam and a probe beam by a beam splitter-combiner mirror I (2); Pump beam optical path; the pump beam enters the pump beam optical path and is focused on the sample surface for sample surface ablation; The probe beam optical path includes a reflective probe beam optical path and a transmissive probe beam optical path. The probe beam enters the probe beam optical path and, after passing through the delay device (5), is split into a reflective probe beam and a transmissive probe beam by the beam splitter-combiner mirror II (3). The reflective probe beam enters the reflective probe beam optical path to obtain the reflectivity time-domain information when the pump light excites the sample. The transmissive probe beam enters the transmissive probe beam optical path to obtain information on laser-induced plasma eruption at different wavelengths. An image receiver is used to receive temporal information of reflectivity when a sample is excited by pump light and information on laser-induced plasma eruption observed at different wavelengths. The pump beam path includes a polarizing beam splitter I (6) and a lens I (4); the pump beam adjusts the size of the light field through the polarizing beam splitter I (6) and then focuses it onto the sample surface through the lens I (4) for sample surface ablation; The reflective probe light path includes a polarizing beam splitter II (7), an imaging objective I (14), and a CCD I (8); the reflective probe light passes through the polarizing beam splitter II (7), adjusts the s-polarized light and p-polarized light on the reflective probe light path and illuminates the sample surface, and is reflected back to the CCD I (8) through the imaging objective I (14) to obtain the time-domain information of reflectivity when the pump light excites the sample; The transmissive probe optical path includes lens II (11), BBO crystal I (9), BBO crystal II (10), lens II (11), short-pass filter (13), lens III (12), imaging objective II (15), dichroic mirror (18), 343nm bandpass filter (16), 515nm bandpass filter (17), CCD II (19), and CCD III (20); the BBO crystal I (9), BBO crystal II (10), and short-pass filter ( 13) and lens III (12) are both arranged on the reflection path of lens II (11); imaging objective II (15) is arranged on the side of the sample; a dichroic mirror (18) is arranged behind the imaging objective II (15); a 343nm bandpass filter (16) and CCD II (19) are arranged on one beam splitting path of the dichroic mirror (18), and a 515nm bandpass filter (17) and CCD III (20) are arranged on the other beam splitting path of the dichroic mirror (18).

2. The multi-view observation system with coordinated ultraviolet-visible and near-infrared three wavelengths according to claim 1, characterized in that: The positions of BBO crystal I (9) and BBO crystal II (10) are both located in front of the focal point of lens II (11).

3. The multi-view observation system with coordinated ultraviolet-visible and near-infrared three wavelengths according to claim 1, characterized in that: The wavelength of the reflective detection light is 1030 nm.

4. The multi-view observation system with coordinated ultraviolet-visible and near-infrared three wavelengths according to claim 1, characterized in that: The imaging objective I (14) is a 20× or 50× objective.

5. The multi-view observation system with coordinated ultraviolet-visible and near-infrared three wavelengths according to claim 1, characterized in that: The image receiver is a computer.

6. An observation method for a multi-view observation system with coordinated ultraviolet-visible and near-infrared three wavelengths according to any one of claims 1 to 5, characterized in that, Includes the following steps: S1. The ultrashort pulse laser beam emitted by the ultrashort pulse laser source (1) is divided into a pump beam and a probe beam by the beam splitter-combiner (2). S2. The pump beam is adjusted by the polarizing beam splitter I (6) and then focused onto the sample surface by the lens I (4) for sample surface ablation. S3. After the probe beam passes through the delay device (5), it is then split into a reflective probe beam and a transmissive probe beam by the beam splitter-combiner mirror II (3). S4. The reflected probe light is adjusted by the polarization beam splitter II (7) to adjust the s-polarized light and p-polarized light on the reflected light path and illuminate the sample surface. Then it is reflected back to CCD I (8) by the imaging objective I (14) to obtain the time domain information of reflectivity when the pump light excites the sample. S5. The transmissive probe light is frequency-doubled by lens II (11) and BBO crystal I (9) to generate photons with a wavelength of 515nm; the 1030nm and 515nm photons enter BBO crystal II (10) at the same time and are combined to generate photons with a wavelength of 343nm; the 1030nm, 515nm and 343nm photons are filtered out by short-pass filter (13); the 515nm and 343nm photons are focused by lens III (12), pass through the side of the sample and enter imaging objective II (15); after being split by dichroic mirror (18), the 343nm and 515nm light pass through 343nm bandpass filter (16) and 515nm bandpass filter (17) respectively, and enter CCD II (19) and CCD III (20) respectively to obtain information on laser-induced plasma eruption at different wavelengths; S6. The image receiver receives the time-domain information of reflectivity when the sample is excited by the pump light and the information of laser-induced plasma eruption observed at different wavelengths. It then uses the image three-dimensional contour extraction method to extract and restore the three-dimensional contour of the sample object surface and draw it into a three-dimensional image.

Images