Micro-channel plate hydrogen directional reduction equipment and method

Abstract

The invention relates to microchannel plate hydrogen directional reduction equipment and a microchannel plate hydrogen directional reduction method. The equipment comprises a micro-channel plate hydrogen reduction device which comprises a chamber for placing a micro-channel plate and reducing hydrogen; a first pipe; one end of the second pipeline is connected with the first pipeline, and the other end of the second pipeline is connected with the microchannel plate hydrogen reduction device; the second pipeline is further provided with a flow and pressure measuring system and a valve. The valve is arranged at the downstream of the flow and pressure measuring system; the exhaust hole is formed in the micro-channel plate hydrogen reduction device; and when the valve is closed, gas in the micro-channel plate is communicated with external gas only through the exhaust hole. The technical problem to be solved is how to provide the device and the method, so that the bulk resistance of the micro-channel plate is stable, and the deformation of the micro-channel plate is reduced or even avoided.

Description

Technical Field

[0001] The invention belongs to the field of optoelectronic technology, and in particular relates to a microchannel plate hydrogen directional reduction device and method. Background Art

[0002] In recent years, with the development of low-light-level night vision technology and the strong driving force of market traction, users have higher and higher requirements for the resolution of low-light-level image intensifiers. In theory, the smaller the channel aperture of the corresponding microchannel plate (MCP), the shorter the channel center distance, and the higher the resolution. One problem caused by the miniaturization of the channel aperture is that when the aspect ratio is optimal, the MCP substrate with high resolution is thinner and the mechanical strength is reduced, which makes the MCP have poor body resistance stability during the production process and is easy to deform and scrap.

[0003] In production, the hydrogen reduction process of MCP plays a vital role in the stability of its bulk resistance and the degree of deformation. At present, the existing technology uses the method of diffusion hydrogen reduction to process MCP, that is, when the material reaches the required temperature, it will start to inject hydrogen with a certain pressure and flow into the reaction chamber, and the hydrogen will enter the vacuum furnace cavity through the air inlet pipe directly inserted into the furnace body from the top of the furnace body. Once the hydrogen enters the furnace cavity, the hydrogen will be adsorbed on the surface of the MCP and diffuse into the inside of the MCP channel, thereby realizing the reduction of the MCP and obtaining a specific bulk resistance. A document discloses a device and method for pressure-controlled hydrogen reduction of a microchannel plate, which uses its pressure control system to control the reaction gas pressure in the closed reaction chamber during the hydrogen reduction process, ensuring that the reaction chamber is in a controllable constant pressure state during the entire hydrogen reduction process, and to a certain extent, the bulk resistance of each piece of MCP after hydrogen reduction can be made smaller. Summary of the invention

[0004] The purpose of the present invention and the technical problem to be solved are achieved by adopting the following technical solutions. A microchannel plate hydrogen directional reduction device proposed in the present invention comprises:

[0005] A microchannel plate hydrogen reduction device, comprising a chamber for placing the microchannel plate and reducing hydrogen;

[0006] First pipeline;

[0007] A second pipeline, one end of which is connected to the first pipeline, and the other end of which is connected to the microchannel plate hydrogen reduction device; a flow and pressure measurement system and a valve are also provided on the second pipeline; the valve is provided downstream of the flow and pressure measurement system;

[0008] The exhaust hole is arranged on the microchannel plate hydrogen reduction device; when the valve is closed, the gas inside the chamber for placing the microchannel plate and reducing hydrogen is connected to the outside only through the exhaust hole.

[0009] The purpose of the present invention and the solution to its technical problems can be further achieved by adopting the following technical measures.

[0010] Preferably, in the aforementioned device, the number of exhaust holes provided in the microchannel plate hydrogen reduction device is 4 to 6; and the aperture of each exhaust hole is 4 to 6 mm.

[0011] Preferably, in the aforementioned equipment, the microchannel plate hydrogen reduction device comprises a cover portion and a support portion; the cover portion and the support portion are detachably connected together, and the support portion is provided with a slot for placing the microchannel plate; the exhaust hole is provided on the upper surface of the cover portion; a protrusion is provided on the bottom of the upper surface of the cover portion; the protrusion is used to cooperate with the slot to clamp the edging area of ​​the microchannel plate.

[0012] Preferably, in the aforementioned device, the cover portion and the support portion are made of copper material.

[0013] Preferably, the aforementioned device further comprises a shell, wherein a groove is provided on the upper surface of the shell; the bottom of the groove is a hollow structure; the microchannel plate hydrogen reduction device is connected to the groove; a first inlet is provided on the shell wall, and the first inlet is connected to the first pipeline.

[0014] Preferably, the aforementioned device, among others, comprises a plurality of microchannel plate hydrogen reduction devices.

[0015] Preferably, in the aforementioned device, a hydrogen homogenizing device is further provided between the first pipeline and the second pipeline; the hydrogen homogenizing device comprises:

[0016] Homogenization chamber;

[0017] A second inlet, which is disposed on the wall of the homogenization chamber;

[0018] A third pipe is arranged in the homogenizing chamber along the inner wall of the homogenizing chamber; one end of the third pipe is connected to the first pipe through the second inlet; and a plurality of small holes are also arranged on the third pipe;

[0019] An outlet is arranged on a wall of the homogenization chamber away from the second inlet, and the second pipe is connected with the homogenization chamber through the outlet.

[0020] Preferably, in the aforementioned equipment, the hydrogen homogenization device further comprises a pressure control system for controlling the gas pressure of the hydrogen homogenization device within a constant range.

[0021] Preferably, the aforementioned device further comprises:

[0022] A control system, wherein the control system is connected to at least the gas supply system, the flow and pressure measurement system and the valve, and is capable of regulating the gas flow of the gas supply system, monitoring the gas flow and pressure of the gas branch pipeline in real time, and opening or closing the valve.

[0023] The purpose of the present invention and the technical problems solved by the present invention are also achieved by the following technical solutions. According to a method for directional hydrogen reduction of a microchannel plate proposed by the present invention, during the reduction reaction between the microchannel plate and hydrogen, the pressure at the inlet port of the microchannel plate is greater than the pressure at the outlet port of the microchannel plate, so as to promote the directional flow of hydrogen in the microchannel plate.

[0024] By means of the above technical solution, the microchannel plate hydrogen directional reduction device and method proposed by the present invention have at least the following advantages:

[0025] 1. The present invention provides a microchannel plate hydrogen directional reduction device, which can force hydrogen to flow through the inside of the MCP channel in a directional manner and then flow out through the MCP channel. The degree of contact between hydrogen and various parts of the inner wall of the channel is close to the same, thereby ensuring sufficient reduction along the inner wall of the MCP channel, uniform reduction along the axial and radial dimensions of the MCP, achieving stable MCP body resistance, reducing process time, and effectively controlling MCP deformation to improve the qualified rate.

[0026] 2. The present invention provides a microchannel plate hydrogen directional reduction device. Preferably, the device also includes a pressure control system that can control the concentration of hydrogen flowing through the MCP channel within a constant range, so that the MCP hydrogen reduction is more stable and the body resistance is reduced.

[0027] 3. The present invention provides a microchannel plate hydrogen directional reduction device. Preferably, the device comprises a microchannel plate hydrogen reduction device and is provided with a hydrogen homogenization device. The hydrogen is homogenized before entering the microchannel plate hydrogen reduction device, so that the concentration of hydrogen flowing into different microchannel plate hydrogen reduction devices is the same, thereby reducing the difference in bulk resistance between different microchannel plates, maintaining the bulk resistance between different microchannel plates stable, and further reducing microchannel deformation.

[0028] 4. The present invention proposes a method for directional hydrogen reduction of a microchannel plate, which forces hydrogen to flow in the direction of decreasing pressure by adjusting and controlling the gas environment pressure at the inlet and outlet ends of the microchannel plate, thereby promoting a directional flow of hydrogen in the microchannel plate, thereby keeping the body resistance in the channel of the microchannel plate stable, reducing or even avoiding the deformation of the microchannel plate.

[0029] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the structure of a microchannel plate hydrogen directional reduction device;

[0031] Figure 2 This is a schematic diagram of the internal structure of a microchannel plate hydrogen directional reduction device;

[0032] Figure 3 A top view of a microchannel plate hydrogen reduction device;

[0033] Figure 4 A schematic diagram of the structure of a microchannel plate hydrogen reduction device;

[0034] Figure 5 is a top view of the support portion;

[0035] Figure 6 is a cross-sectional view of a microchannel plate hydrogen reduction device;

[0036] Figure 7 It is a schematic diagram of the structure of a hydrogen homogenization device;

[0037] Figure 8 The figure shows the body resistance test curves of the embodiment and the comparative example. DETAILED DESCRIPTION

[0038] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the following is a detailed description of the microchannel plate hydrogen directional reduction device and method proposed by the present invention in combination with the accompanying drawings and preferred embodiments. Its specific implementation method, structure, characteristics and effects are as follows.

[0039] Hereinafter, the microchannel plate may be abbreviated as "MCP".

[0040] With the development of research in the field of optoelectronic technology, the microchannel plates used therein are becoming thinner and thinner. The thin microchannel plates prepared by traditional technology have uncontrollable body resistance, which not only causes the microchannel plates to deform and reduces the qualified rate of the microchannel plates, but also causes the resolution and other performances of the optoelectronic devices prepared by using the microchannel plates to be seriously affected. Therefore, there is an urgent need in the art for a new device and method for preparing microchannel plates so that the body resistance stability of the prepared microchannel plates is good.

[0041] The inventors found that the conventional technology and devices for preparing microchannel plates generally adopt the method of diffusing hydrogen to reduce the microchannel plates. After research, the inventors found that due to the small channel aperture of the microchannel plates used in the optoelectronic field today, the conventional method of free diffusion of hydrogen to reduce the microchannel plates cannot reach the inside of the channel, resulting in a relatively full reduction at both ends of the channel with low body resistance, while the degree of reduction at the center of the channel is weak and the body resistance is high, causing the MCP body resistance to be unstable. Moreover, the uniformity of reduction along the axial and radial scales of the MCP is inconsistent, causing the thinner and larger MCP plates to be more easily deformed. The prior art discloses a device and method for pressure-controlled hydrogen reduction of a microchannel plate, which can only achieve the constancy of the hydrogen pressure and flow rate in the closed reaction chamber, and cannot ensure the uniformity of the contact between hydrogen and the inside of the MCP channel, and thus cannot ensure the full reduction of the MCP and cannot control the deformation of the MCP.

[0042] The object of the present invention is to provide a microchannel plate hydrogen directional reduction device, so that the pressure at the inlet port of the microchannel plate is less than the pressure at the outlet port of the microchannel plate, and hydrogen is forced to flow through the inside of the MCP channel. The degree of contact between hydrogen and various parts of the inner wall of the channel is close to the same, thereby ensuring sufficient reduction along the inner wall of the MCP channel, uniform reduction along the axial and radial dimensions of the MCP, achieving stable MCP body resistance, reducing process time, and effectively controlling MCP deformation to improve the qualified rate.

[0043] Based on the above, the present invention provides a microchannel plate hydrogen directional reduction device and method. The technical problem to be solved is how to provide a microchannel plate hydrogen directional reduction device, through which the body resistance formed after the MCP hydrogen reduction reaction is stabilized and the MCP deformation is effectively controlled.

[0044] like Figure 1 and Figure 2 As shown, some embodiments of the present invention provide a microchannel plate hydrogen reduction device, the device includes a microchannel plate hydrogen reduction device 1, the microchannel plate hydrogen reduction device has a chamber inside for placing the microchannel plate and reducing hydrogen; the device also includes a first pipeline 2; a second pipeline 3, one end of the second pipeline is connected to the first pipeline, and the other end is connected to the microchannel plate hydrogen reduction device; the second pipeline is also provided with a flow and pressure measurement system 4 and a valve 5; the valve is arranged downstream of the flow and pressure measurement system. Preferably, in some embodiments, it is also provided with a shell 6 to protect the internal device, and a groove 7 is provided on the upper surface of the shell; the bottom of the above-mentioned groove is a hollow structure; the microchannel plate hydrogen reduction device is connected to the groove; a first inlet 8 is provided on the shell wall, and the first inlet is connected to the first pipeline.

[0045] Preferably, in some embodiments of the aforementioned technical solution, there are multiple first inlets on the shell, and the gas enters the first pipeline through the first inlets at different locations, which helps to evenly distribute the gas in the first pipeline.

[0046] In order to increase the sealing and stability between the microchannel plate hydrogen reduction device and the shell, preferably, in some embodiments, the microchannel plate hydrogen reduction device and the groove are provided with a matching snap-fitting structure; in other embodiments, the microchannel plate hydrogen reduction device and the groove are provided with external threads and internal threads that can be screwed together.

[0047] The top view of the microchannel plate hydrogen reduction device is as follows Figure 3 As shown, an exhaust hole 9 is provided on the top. In the device of the present invention, when the valve is closed, the gas inside the microchannel plate is connected to the external environment only through the exhaust hole; when the hydrogen pressure and flow rate of the second pipeline do not reach the preset requirements, the valve is closed, and the hydrogen introduced into the device cannot flow into the microchannel plate hydrogen reduction device; when the hydrogen pressure and flow rate of the second pipeline reach the preset requirements, the valve is opened, and the hydrogen enters the microchannel plate hydrogen reduction device through the first pipeline and the second pipeline in sequence, contacts and reacts with the microchannel plate, and the generated tail gas flows out from the exhaust hole.

[0048] Due to the microchannel plate hydrogen directional reduction device provided by the present invention, hydrogen flows into the microchannel plate hydrogen reduction device through the first pipeline and the second pipeline, and the top of the microchannel plate hydrogen reduction device is connected to the external environment, and the gas pressure at the part of the microchannel plate connected to the second pipeline must be higher than the part connected to the device and the external environment, so hydrogen will inevitably flow through the inside of the microchannel plate channel, and the tail gas will flow out from the exhaust hole at the top of the microchannel plate hydrogen reduction device. Therefore, the device of the present invention can make hydrogen flow through the inside of the microchannel plate channel in a directional manner, and the degree of contact between hydrogen and various parts of the inner wall of the channel tends to be consistent, thereby ensuring sufficient reduction along the inner wall of the MCP channel, uniform reduction along the axial and radial dimensions of the MCP, achieving stable MCP body resistance, and effectively controlling MCP deformation.

[0049] In order to maintain the pressure difference between the inside and outside of the microchannel plate hydrogen reduction device and enable the exhaust gas to be discharged smoothly, ensure the directional flow of hydrogen from the microchannel plate hydrogen reduction chamber and the smooth reaction, the microchannel plate hydrogen reduction device is preferably provided with 4 to 6 exhaust holes; and the aperture of each exhaust hole is 4 to 6 mm; further preferably, after the microchannel plate is placed on the device, the distance between the exhaust hole and the microchannel plate is ≥3 cm.

[0050] Preferably, in some embodiments, in order to facilitate the installation of the microchannel plate, the microchannel plate hydrogen reduction device is configured as follows: Figure 4As shown, it includes a cover 10 and a support 11; further preferably, the cover and the support are detachably connected together. In order to increase the sealing performance of the connection between the cover and the support so that the hydrogen flows along the internal channel of the microchannel plate, in some embodiments, the cover and the support are provided with a snap-fit ​​structure that can snap into each other; in other embodiments, the inner side of the cover is provided with an internal thread, the outer side of the support is provided with an external thread, and the support and the cover are connected by threads. The exhaust hole is provided on the upper surface of the cover.

[0051] like Figure 4 and 5 As shown, in some embodiments, the support portion includes a support column 13 and a platform 14, and the support column is fixedly connected to the platform; the external thread is arranged on the support column, and the slot 12 is arranged on the platform for placing the microchannel plate.

[0052] like Figure 6 As shown, in order to further improve the stability and sealing of the cover and the support part, in some embodiments, a countersunk groove 15 is further provided on the cover, and a screw hole 16 corresponding to the cover is provided on the support part. The screws pass through the countersunk groove of the cover and are screwed into the screw hole of the support part, so that the stability and sealing of the cover and the support part are better.

[0053] In order to prevent the microchannel plate from axial movement during the hydrogen reduction process, in some embodiments, the microchannel plate is clamped and fixed by a clip at the slot; further preferably, in some embodiments, a protrusion is provided at the bottom of the upper surface of the cover; the protrusion is used to cooperate with the slot to clamp the edge area of ​​the microchannel plate; further preferably, in some embodiments, the cover is formed by a top cover, a side wall, and a hollow annular bottom cover connected to the side wall, and after the annular bottom cover is combined with the support part, it cooperates with the support part to clamp the edge area of ​​the microchannel plate.

[0054] Preferably, in the above technical solution, the microchannel plate hydrogen reduction device is made of high temperature and high pressure resistant materials; further preferably, the cover and the support are made of copper, because copper has a low hardness and will not damage the MCP, especially when the microchannel plate is clamped and fixed by the cover and the support, the MCP can be protected from damage. Further preferably, the fixture is made of brass, which is easy to process and reduces the production cost of the fixture.

[0055] The aforementioned technical solution, preferably, in some embodiments, the microchannel plate hydrogen directional reduction equipment is provided with a plurality of microchannel plate hydrogen reduction devices to improve production efficiency.

[0056] Preferably, in the aforementioned technical solution, in order to ensure that the concentration of hydrogen introduced into each microchannel plate hydrogen reduction device is the same, that is, the concentration of hydrogen contacted by all microchannel plates during the hydrogen reduction reaction remains consistent to reduce the body resistance between the microchannel plates, a hydrogen homogenization device is also provided between the second pipeline and the first pipeline, and the hydrogen is homogenized by the hydrogen homogenization device before flowing into the second pipeline to ensure that the concentration of hydrogen contacted by each microchannel plate is the same.

[0057] like Figure 7 As shown, in some embodiments, the hydrogen homogenization device includes:

[0058] Homogenization chamber 17; in some embodiments, the homogenization chamber is a prism, and in other embodiments, the homogenization chamber is a cylinder.

[0059] The second inlet 18 is arranged on the wall of the homogenization chamber; in some embodiments, the second inlet is arranged on the bottom wall of the homogenization chamber, and in some embodiments, the second inlet is arranged on the top wall of the homogenization chamber; in some embodiments, the second inlet can be one or more, and in other embodiments, the second inlet is provided with a valve that can be closed.

[0060] The third pipe 19 is arranged in the homogenizing chamber along the inner wall of the homogenizing chamber. In some embodiments, the third pipe is arranged around the inner wall of the homogenizing chamber to help make the hydrogen diffuse more evenly in the homogenizing chamber.

[0061] One end of the third pipeline is connected to the first pipeline through the second inlet; preferably, in some embodiments, a plurality of small holes are provided on the third pipeline, which helps to improve the diffusion degree of hydrogen in the homogenization chamber.

[0062] The outlet 20 is arranged on the wall of the homogenization chamber away from the second inlet; in some embodiments, the outlet is provided with multiple ones; in other embodiments, the outlet is provided with a valve (not shown in the drawings) that can close the outlet, and the second pipeline is detachably connected or fixedly connected to the outlet.

[0063] During operation of the device of the present invention, hydrogen flows through the first pipeline and the third pipeline, and flows out from a plurality of small holes arranged on the surface of the third pipeline, so as to avoid excessive gas flow, which makes the outflow concentration of hydrogen at the top outlet of the homogenizing chamber closest to the air inlet too large. The third pipeline is arranged around the bottom of the homogenizing chamber, so that the hydrogen is evenly diffused at the bottom of the homogenizing chamber. After the hydrogen is evenly diffused, it is ensured that the concentration of hydrogen flowing into each second pipeline from each outlet at the top of the homogenizing chamber remains consistent, and then the concentration of hydrogen flowing into each microchannel plate hydrogen reduction device remains consistent, and the concentration of hydrogen contacted by each microchannel plate remains consistent.

[0064] Preferably, in the aforementioned technical solution, in order to keep the concentration of hydrogen contacted during the hydrogen reduction reaction of the microchannel plate within a constant range along the time axis, in some embodiments, the hydrogen homogenization device also includes a pressure control system 21, and the pressure control system can cooperate with the gas supply system to control the gas pressure of the hydrogen homogenization device within a constant range.

[0065] Preferably, the aforementioned technical solution, in some embodiments, further comprises: a control system (shown as marked), the control system is connected at least to the flow and pressure measurement system and the valve, can regulate the gas flow of the gas supply system, monitor the gas flow and pressure of the gas branch pipeline in real time, and can open or close the valve. In other embodiments, the control system is also connected to the pressure control system to regulate the pressure of the hydrogen homogenization device to remain within a constant range. In other embodiments, the control system is also connected to the gas supply system.

[0066] Preferably, in some embodiments, the microchannel plate hydrogen reduction device is also provided with a temperature monitoring system for monitoring the reaction temperature in the device.

[0067] The microchannel plate hydrogen directional reduction device provided by the present invention is suitable for MCP to be reduced with hydrogen and having a plate thickness of 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, and 0.7 mm.

[0068] Some embodiments of the present invention provide a method for hydrogen reduction of a microchannel plate of the aforementioned device, comprising the following steps:

[0069] 1) placing the microchannel plate to be reduced in the microchannel plate hydrogen reduction device, placing the microchannel plate directional hydrogen reduction device in a vacuum heating device, and connecting the gas supply system;

[0070] 3) The hydrogen reduction temperature of the microchannel plate is preset to be 350-450° C., the gas flow rate of the second pipeline is 0.01-0.05 L / min and the pressure is 0.01-0.05 MPa, and the reduction time is 1.5-3 h;

[0071] 4) When the temperature of the microchannel plate directional hydrogen reduction device, the hydrogen pressure and flow rate of the second pipeline reach the preset requirements, the valve is opened to introduce hydrogen into the microchannel plate hydrogen reduction device, and the microchannel plate starts the hydrogen reduction reaction;

[0072] 5) After the microchannel plate completes the hydrogen reduction reaction according to the preset reduction time, close the valve, cool it, and take out the microchannel plate.

[0073] The present invention also proposes a method for directional hydrogen reduction of a microchannel plate, which includes: during the reduction reaction between the microchannel plate and hydrogen, the gas environment pressure at the inlet port of the microchannel plate is greater than the gas environment pressure at the outlet port, thereby promoting the directional flow of hydrogen in the microchannel plate.

[0074] By means of the microchannel plate hydrogen directional reduction device and method provided by the present invention, hydrogen can be directed into a chamber where the microchannel plate is placed and reduced, and forced to flow through the inside of the MCP channel, and then flow out through the channel, and the degree of contact between hydrogen and various parts of the channel inner wall is close to the same, thereby ensuring sufficient reduction along the MCP channel inner wall, uniform reduction along the axial and radial dimensions of the MCP, achieving stable MCP body resistance, reducing process time, effectively controlling MCP deformation, and improving the qualified rate.

[0075] The present invention will be further described below in conjunction with specific embodiments, but this should not be construed as limiting the scope of protection of the present invention. Some non-essential improvements and adjustments made to the present invention by technicians in this field based on the above-mentioned contents of the present invention still fall within the scope of protection of the present invention.

[0076] Unless otherwise specified, the materials, reagents, etc. involved below are all commercially available products well known to those skilled in the art; unless otherwise specified, the methods described are all methods well known in the art. Unless otherwise defined, the technical terms or scientific terms used should have the common meanings understood by ordinary technicians in the field to which the present invention belongs.

[0077] Example 1

[0078] In this embodiment, a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.2 mm and a plate diameter of 50 mm is selected, and hydrogen reduction is performed using the microchannel plate hydrogen directional reduction device and method provided by the present invention, as follows:

[0079] The microchannel plate hydrogen directional reduction device used in this embodiment includes a shell, and the shell has 10 grooves; the microchannel plate hydrogen reduction device is arranged as shown in the attached Figure 4 As shown, the fixture includes a cover part and a support part, and the support part has a platform with a card slot, the top of the cover part has 4 exhaust holes with a hole diameter of 5mm, the distance between the cover part and the platform is 3cm, and the cover part and the support part are connected by 4 screws to improve the stability of the fixture and the sealing of the connection part.

[0080] The hydrogen reduction method of the microchannel plate of this embodiment is as follows:

[0081] 1) placing the microchannel plate to be reduced in a microchannel plate hydrogen reduction device, sealing the connection, and then sealing the microchannel plate hydrogen reduction device to a groove on the housing;

[0082] 2) placing the assembled microchannel plate hydrogen directional reduction device in a vacuum furnace chamber, and keeping the chamber isothermal, and closing the furnace door; the valve on the second pipeline is closed, and the gas supply system is connected;

[0083] 3) The control system presets the MCP hydrogen reduction temperature to 450°C, the gas flow rate of the second pipeline to 0.04L / min and the pressure to 0.03MPa, and the reduction time to 3h;

[0084] 4) When the temperature of the microchannel plate directional hydrogen reduction device, the hydrogen pressure and flow rate of the second pipeline reach the preset requirements, the valve is opened to introduce hydrogen into the microchannel plate hydrogen reduction device, and the microchannel plate starts the hydrogen reduction reaction;

[0085] 5) After the microchannel plate completes the hydrogen reduction reaction according to the preset reduction time, close the valve, cool it, and take out the microchannel plate.

[0086] The microchannel plate that has completed hydrogen reduction in this embodiment is subjected to deformation detection and volume resistance test; the test method is as follows:

[0087] Deformation detection: Place each microchannel plate after hydrogen reduction in a special container and place it flat on the purification work surface. Rotate the microchannel plate horizontally for one circle. During the rotation, visually observe whether the image of the linear lamp tube above the purification work surface is bent. If the image of the straight line is observed to be bent, it is determined to be deformed.

[0088] Volume resistance detection: Each microchannel plate after hydrogen reduction is coated. After coating, each microchannel plate is mounted on a test fixture and placed in a test device to test its volume resistance value at 500V.

[0089] The test results are shown in Table 1 and Figure 8 .

[0090] Example 2

[0091] Hydrogen reduction is carried out using equipment and methods basically the same as those in Example 1. The difference from Example 1 is that in this example, a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.3 mm and a plate diameter of 50 mm is selected, and the top of the cover of the microchannel plate hydrogen reduction device has 6 exhaust holes with a hole diameter of 5 mm.

[0092] The microchannel plate that has completed hydrogen reduction in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1, Figure 8 .

[0093] Example 3

[0094] The hydrogen reduction was carried out using equipment and methods substantially the same as those in Example 1. The difference from Example 1 is that the present embodiment selects a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.4 mm and a plate diameter of 50 mm.

[0095] The microchannel plate that has completed hydrogen reduction in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1, Figure 8 .

[0096] Example 4

[0097] The hydrogen reduction was carried out using the same equipment and method as in Example 1. The difference from Example 1 is that the present embodiment selects a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.5 mm and a plate diameter of 50 mm.

[0098] The microchannel plate that has completed hydrogen reduction in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1, Figure 8 .

[0099] Example 5

[0100] The hydrogen reduction was carried out using the same equipment and method as in Example 1. The difference from Example 1 is that the present embodiment selects a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.6 mm and a plate diameter of 50 mm.

[0101] The microchannel plate that has completed hydrogen reduction in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1, Figure 8 .

[0102] Example 6

[0103] The hydrogen reduction was carried out using equipment and methods substantially the same as those in Example 1. The difference from Example 1 is that the present embodiment selects a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.7 mm and a plate diameter of 50 mm.

[0104] The microchannel plate that has completed hydrogen reduction in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1, Figure 8 .

[0105] Example 7

[0106] Hydrogen reduction was performed using the same equipment and method as in Example 1, except that: in this example, a microchannel plate blank to be hydrogen reduced was selected with a plate thickness of 0.2 mm and a plate diameter of 25 mm, and the top of the cover of the microchannel plate hydrogen reduction device had 5 exhaust holes with a hole diameter of 4 mm, and the distance between the cover and the platform was 4 cm. During the hydrogen reduction of the microchannel plate in this example, the control system preset the MCP hydrogen reduction temperature of 430°C, the gas flow rate of the second pipeline of 0.02 L / min and the pressure of 0.02 MPa, and the reduction time of 1.5 h.

[0107] The microchannel plate that has been hydrogen-reduced in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1.

[0108] Example 8

[0109] Hydrogen reduction was performed using the same equipment and method as in Example 1, except that: in this example, a microchannel plate blank to be hydrogen reduced was selected with a plate thickness of 0.3 mm and a plate diameter of 25 mm, and the top of the cover of the microchannel plate hydrogen reduction device had 4 exhaust holes with a hole diameter of 5 mm, and the distance between the cover and the platform was 5 cm. During the hydrogen reduction of the microchannel plate in this example, the control system preset the MCP hydrogen reduction temperature of 430°C, the gas flow rate of the second pipeline of 0.02 L / min and the pressure of 0.02 MPa, and the reduction time of 1.5 h.

[0110] The microchannel plate that has been hydrogen-reduced in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1.

[0111] Example 9

[0112] The microchannel plate directional hydrogen reduction device used in this embodiment is also provided with a hydrogen homogenization device between the first pipeline and the second pipeline. Figure 7 As shown, the other structures of the microchannel plate directional hydrogen reduction device used in this embodiment are the same as those in Embodiment 1, and the process steps and methods for hydrogen reduction of the microchannel plate are the same as those in Embodiment 1.

[0113] The microchannel plate that has been hydrogen-reduced in this embodiment was subjected to deformation detection and volume resistance test; the test results are shown in Table 1.

[0114] Comparative Example 1

[0115] In this comparative example, a microchannel plate blank to be hydrogen-reduced with a plate thickness of 0.2 mm and a plate diameter of 50 mm is selected, and a diffusion hydrogen reduction device and method are used, as follows:

[0116] 1) Place the microchannel plate to be reduced in the slot of the quartz boat, and then place it in the vacuum furnace chamber, and keep the area in the vacuum furnace chamber isothermal, and close the furnace door;

[0117] 2) Open the gas supply system, directly introduce hydrogen into the vacuum furnace chamber, and make the gas pressure in the vacuum furnace chamber meet the requirements of the hydrogen reduction process;

[0118] 3) The MCP hydrogen reduction temperature is preset to 450°C, the gas flow rate of the gas branch pipeline is 0.04L / min and the pressure is 0.03MPa, and the reduction time is 2h;

[0119] The microchannel plate after hydrogen reduction in this comparative example was subjected to deformation detection and volume resistance test; the test results are shown in Tables 1 and Figure 8 .

[0120] Comparative Example 2

[0121] This comparative example is basically the same as comparative example 1, except that a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.3 mm and a plate diameter of 50 mm is selected for hydrogen reduction.

[0122] The microchannel plate after hydrogen reduction in this comparative example was subjected to deformation detection and volume resistance test; the test results are shown in Tables 1 and Figure 8 .

[0123] Comparative Example 3

[0124] This comparative example is basically the same as comparative example 1, except that a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.3 mm and a plate diameter of 50 mm is selected for hydrogen reduction.

[0125] The microchannel plate after hydrogen reduction in this comparative example was subjected to deformation detection and volume resistance test; the test results are shown in Tables 1 and Figure 8 .

[0126] Comparative Example 4

[0127] This comparative example is basically the same as comparative example 1, except that a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.3 mm and a plate diameter of 50 mm is selected for hydrogen reduction.

[0128] The microchannel plate after hydrogen reduction in this comparative example was subjected to deformation detection and volume resistance test; the test results are shown in Tables 1 and Figure 8 .

[0129] Comparative Example 5

[0130] This comparative example is basically the same as comparative example 1, except that a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.3 mm and a plate diameter of 50 mm is selected for hydrogen reduction.

[0131] The microchannel plate after hydrogen reduction in this comparative example was subjected to deformation detection and volume resistance test; the test results are shown in Tables 1 and Figure 8 .

[0132] Comparative Example 6

[0133] This comparative example is basically the same as comparative example 1, except that a microchannel plate blank to be hydrogen reduced with a plate thickness of 0.3 mm and a plate diameter of 50 mm is selected for hydrogen reduction.

[0134] The microchannel plate after hydrogen reduction in this comparative example was subjected to deformation detection and volume resistance test; the test results are shown in Tables 1 and Figure 8 .

[0135] Table 1 Test results of various indicators of microchannel plates in various embodiments and comparative examples

[0136]

[0137] It can be seen from the examples and comparative examples that the microchannel plate hydrogen directional reduction device and method provided by the present invention are suitable for hydrogen reduction reactions of microchannel plates of different specifications.

[0138] Further, if Figure 8 As shown in Table 1, it can be seen that, compared with the comparative example, the microchannel plate hydrogen directional reduction device and method of the present invention significantly reduce the body resistance, and the resistance is approximately linearly related to the plate thickness, and the body resistance is approximately the same, which shows that the reduction of the microchannel plate of the embodiment is relatively uniform and consistent. The reason for this is that: the comparative example adopts diffusion hydrogen reduction MCP, and the amount of hydrogen entering the inside of the microchannel plate is uncontrollable; the microchannel plate hydrogen directional reduction device and method adopted in this embodiment can make hydrogen directional to enter the chamber where the microchannel plate is placed and hydrogen is reduced, and because the gas environment pressure at the microchannel plate inlet port is greater than the gas environment at the microchannel plate outlet port, hydrogen is promoted to flow in a directional manner in the microchannel plate, and the degree of contact between hydrogen and various parts of the inner wall of the channel is close to the same, the reduction degree of the MCP channel axial direction is equivalent, the body resistance is approximately the same, the reduction is relatively uniform and consistent, and the stability of the MCP body resistance can be guaranteed. Furthermore, the hot hydrogen flow flows through each microporous channel along the path, effectively improving the uniformity of axial and radial reduction of large-sized MCP, thereby reducing phase change stress and structural stress, and can better control the deformation of thinner MCP structures. The hydrogen flow time is shortened, which directly reduces the probability of deformation of thinner microchannel plates, improves product quality, reduces the loss of MCP caused by the reduction process, and improves product qualification rate.

[0139] The technical features in the claims and / or the specification of the present invention may be combined, and the combination is not limited to the combination obtained by reference in the claims. The technical solution obtained by combining the technical features in the claims and / or the specification is also within the protection scope of the present invention.

[0140] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification, equivalent change and modification made to the above embodiment according to the technical essence of the present invention still falls within the scope of the technical solution of the present invention.

Claims

1. A microchannel plate hydrogen directional reduction device, characterized in that: It includes: A microchannel plate hydrogen reduction device, comprising a chamber for microchannel plate placement and hydrogen reduction; First pipeline; A second pipeline, one end of which is connected to the first pipeline, and the other end of which is connected to the microchannel plate hydrogen reduction device; a flow and pressure measurement system and a valve are also provided on the second pipeline; the valve is provided downstream of the flow and pressure measurement system; The exhaust hole is arranged on the microchannel plate hydrogen reduction device; when the valve is closed, the gas inside the chamber for placing the microchannel plate and reducing hydrogen is connected to the outside only through the exhaust hole.

2. The device according to claim 1, characterized in that The number of exhaust holes arranged in the microchannel plate hydrogen reduction device is 4 to 6, and the aperture of each exhaust hole is 4 to 6 mm.

3. The device according to claim 1, characterized in that The microchannel plate hydrogen reduction device includes a cover and a support; the cover and the support are detachably connected together, and the support is provided with a slot for placing the microchannel plate; the exhaust hole is provided on the upper surface of the cover; a protrusion is provided at the bottom of the upper surface of the cover; the protrusion is used to cooperate with the slot to clamp the edge area of ​​the microchannel plate.

4. The device according to claim 3, characterized in that The cover part and the support part are made of copper material.

5. The device according to claim 1, characterized in that It also includes a shell, the upper surface of which is provided with a groove; the bottom of the groove is a hollow structure; the microchannel plate hydrogen reduction device is connected to the groove; a first inlet is provided on the shell wall, and the first inlet is connected to the first pipeline.

6. The device according to claim 1, characterized in that The device comprises a plurality of microchannel plate hydrogen reduction devices.

7. The device according to claim 1, characterized in that A hydrogen homogenizing device is also provided between the first pipeline and the second pipeline; the hydrogen homogenizing device comprises: Homogenization chamber; A second inlet, which is disposed on the wall of the homogenization chamber; A third pipe is arranged in the homogenizing chamber along the inner wall of the homogenizing chamber; one end of the third pipe is connected to the first pipe through the second inlet; and a plurality of small holes are also arranged on the third pipe; An outlet is arranged on a wall of the homogenization chamber away from the second inlet, and the second pipe is connected with the homogenization chamber through the outlet.

8. The device according to claim 7, characterized in that The hydrogen homogenization device also includes a pressure control system for controlling the gas pressure of the hydrogen homogenization device within a constant range.

9. The device according to claim 1, characterized in that It also includes: A control system, wherein the control system is connected to at least the gas supply system, the flow and pressure measurement system and the valve, and is capable of regulating the gas flow of the gas supply system, monitoring the gas flow and pressure of the gas branch pipeline in real time, and opening or closing the valve.

10. A method for directional hydrogen reduction of a microchannel plate, characterized in that: During the reduction reaction between the microchannel plate and hydrogen, the pressure of the gas environment at the inlet port of the microchannel plate is greater than the pressure of the gas environment at the outlet port of the microchannel plate, which promotes the directional flow of hydrogen in the microchannel plate.

Images