Bearing device

Abstract

The embodiment of the invention provides a bearing device, and relates to the technical field of substrate bearing. The bearing device comprises a bearing part, the bearing part comprises two side plates and a base, the two side plates are oppositely arranged at intervals in the first direction, the two ends of the base are connected with the two side plates respectively, the base is provided with a plurality of installation grooves distributed at intervals in the second direction, and the extension direction of the installation grooves is parallel to the first direction. The substrate is not opposite to the side plate, when the bearing device containing the substrate is contained in the cleaning equipment, cleaning liquid in the cleaning equipment can make contact with the substrate in a larger area, the cleaning efficiency of the substrate is improved, and the substrate is cleaned more thoroughly.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate bearing, and in particular to a bearing device. Background Art

[0002] The carrier is one of the essential equipment in the substrate manufacturing process. It is usually used to store substrates and move them to various processing workstations. For example, when the carrier carrying the substrate is placed in a cleaning device, the substrate can be cleaned.

[0003] When the substrate is mounted on some existing carriers, the carrier has a relatively large blocking area for the substrate. When the carrier is placed in a cleaning device to clean the substrate, the cleaning efficiency of the substrate is relatively low. Summary of the invention

[0004] The purpose of the present invention includes providing a carrier device, which can reduce the blocking area of ​​the carrier device for the substrate, and when the carrier device is in a cleaning device to clean the substrate, it can improve the cleaning efficiency of the substrate and make the substrate cleaned more thoroughly.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a carrying device, comprising:

[0007] The bearing member includes two side panels and a base, the two side panels are spaced apart and arranged opposite to each other along a first direction, the two ends of the base are respectively connected to the two side panels and jointly define a bearing space, and the base is provided with a plurality of mounting grooves spaced apart along a second direction, the extension direction of the mounting grooves is parallel to the first direction, and the first direction forms an angle with the second direction.

[0008] In an optional embodiment, the base includes a plurality of bottom connecting rods and a bearing structure, the plurality of bottom connecting rods are arranged at intervals along the second direction, the two ends of each bottom connecting rod are respectively connected to the two side panels, the bearing structure extends along the second direction, the bearing structure is connected to the plurality of bottom connecting rods and is located in the bearing space, and the bearing structure is provided with a plurality of mounting grooves arranged at intervals along the second direction.

[0009] In an optional embodiment, there are multiple bearing structures, the multiple bearing structures are arranged at intervals along the first direction, and the multiple installation grooves of the multiple bearing structures are arranged in a one-to-one correspondence.

[0010] In an optional embodiment, the bearing structure is detachably connected to the bottom connecting rod, and / or the bottom connecting rod is detachably connected to the side plate.

[0011] In an optional embodiment, the mounting groove includes a first bottom wall and two first side walls, the two first side walls are spaced apart from the first bottom wall along the second direction, and an avoidance chamfer is provided at one end of the first side wall away from the first bottom wall.

[0012] In an optional embodiment, a limiting portion is provided on one side opposite to the two side panels, the limiting portion extends along the second direction, the limiting portion is provided with a plurality of limiting grooves arranged at intervals along the second direction, and the plurality of limiting grooves are arranged one-to-one correspondingly to the plurality of installation grooves in the second direction.

[0013] In an optional embodiment, a plurality of limiting portions are provided on each side panel, and the plurality of limiting portions are arranged at intervals along the third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0014] In an optional embodiment, the side plate is provided with a leaching port penetrating the side plate along the first direction;

[0015] A immersion port is provided between two adjacent limiting parts, and / or a plurality of limiting parts are provided with immersion ports on a side close to the base in the third direction, and / or a plurality of limiting parts are provided with immersion ports on a side away from the base in the third direction.

[0016] In an optional embodiment, the limiting groove includes a second bottom wall and two second side walls, the two second side walls are spaced apart from the second bottom wall along the second direction, and an avoidance chamfer is provided at one end of the second side wall away from the second bottom wall.

[0017] In an optional embodiment, the supporting member also includes a first side connecting rod and a second side connecting rod located above the base, the first side connecting rod and the second side connecting rod are arranged at intervals on both sides of the base along the second direction, and both ends of the first side connecting rod and both ends of the second side connecting rod are respectively connected to the two side panels.

[0018] In an optional embodiment, the supporting device further includes a carrier, which is used to be placed in the mounting groove, and the carrier is used to mount the substrate. When the carrier is placed in the mounting groove, the first direction is parallel to the end face of the carrier in the thickness direction, and the carrier forms an angle with the side panel.

[0019] In an optional embodiment, the carrier includes a carrier plate and a cover plate, the cover plate is covered on the carrier plate and detachably connected to the carrier plate, the carrier plate is provided with a first mounting slot for mounting the substrate, a first overflow channel is provided on a side of the carrier plate close to the cover plate, one end of the first overflow channel is connected to the first mounting slot, and the other end of the first overflow channel passes through one side of the carrier plate.

[0020] In an optional embodiment, the cover plate is provided with a second mounting slot opposite to the first mounting slot, and the first mounting slot and the second mounting slot together define an installation space for installing the substrate.

[0021] In an optional embodiment, a first through hole is formed on an end surface of the first mounting slot, and a second through hole is formed on an end surface of the second mounting slot.

[0022] In an optional embodiment, a plurality of first overflow channels arranged at intervals are provided on the circumference of the first mounting slot.

[0023] In an optional embodiment, there are multiple first installation slots and they are arranged at intervals along a preset direction, a second overflow channel is provided between any two adjacent first installation slots, and the two adjacent first installation slots are connected through the second overflow channel.

[0024] In an optional embodiment, the cover plate is provided with a first matching flow channel opposite to the first overflow flow channel. When the cover plate is disposed on the carrier plate, the first overflow flow channel and the first matching flow channel are opposite to each other and jointly define an overflow channel.

[0025] In an optional embodiment, the bearing member is made of at least one of Teflon, aluminum, stainless steel, titanium alloy, pure nickel, nickel-based alloy, tungsten alloy, ceramic material, and tungsten-copper alloy.

[0026] An embodiment of the present invention provides a carrying device including a carrying member, the carrying member including two side plates and a base, the two side plates are spaced apart and arranged opposite to each other along a first direction, two ends of the base are respectively connected to the two side plates, the base is provided with a plurality of mounting grooves spaced apart and arranged along a second direction, the extension direction of the mounting grooves is parallel to the first direction, when the substrate is installed in the mounting grooves, the substrate is not opposite to the side plates, when the carrying device with the substrate is placed in a cleaning device, the cleaning liquid in the cleaning device can contact the substrate over a larger area, thereby improving the cleaning efficiency of the substrate, so that the substrate can be cleaned more cleanly. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A schematic diagram of the structure of the carrying device provided in this embodiment;

[0029] Figure 2 A schematic diagram of the structure of the carrier provided in this embodiment;

[0030] Figure 3 A schematic diagram of the structure of the side panel provided in this embodiment;

[0031] Figure 4A schematic diagram of the structure of the bottom connecting rod provided in this embodiment;

[0032] Figure 5 A schematic diagram of the structure of the bearing structure provided in this embodiment at a first viewing angle;

[0033] Figure 6 A schematic diagram of the structure of the bearing structure provided in this embodiment at a second viewing angle;

[0034] Figure 7 A schematic diagram of the structure of the carrier provided in this embodiment when viewed from the front;

[0035] Figure 8 A schematic diagram of the structure of the carrier provided in this embodiment when viewed from the side;

[0036] Fig. 9 A schematic diagram of the axial structure of the carrier provided in this embodiment;

[0037] Fig.10 A schematic diagram of the axial structure of the cover plate provided in this embodiment;

[0038] Fig.11 An exploded schematic diagram of the vehicle provided in this embodiment.

[0039] Icons: 1-carrying device; 100-carrying member; 101-carrying space; 110-side plate; 111-limiting part; 1111-limiting groove; 1112-second bottom wall; 1113-second side wall; 112-immersion port; 113-hook; 120-base; 121-bottom connecting rod; 1211-matching hole; 122-carrying structure; 1221-installation groove; 1222-first bottom wall; 1223-first side wall; 1224-connecting hole; 130-first One side connecting rod; 140-second side connecting rod; 200-carrier; 210-carrier plate; 211-first mounting slot; 2111-first through hole; 212-first overflow channel; 213-second overflow channel; 214-first connecting portion; 215-second mounting hole; 220-cover plate; 221-second mounting slot; 2211-second through hole; 222-first matching channel; 223-second matching channel; 224-second connecting portion; 225-first mounting hole. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0043] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0044] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0045] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0046] When some existing substrates are installed in a carrier of a carrier device, the substrates are opposite to the side plates of the carrier. Therefore, when the carrier device is placed in a cleaning device to clean the substrates, since the side plates are opposite to the substrates, the side plates have a larger blocking area for the substrates. Therefore, the side plates will largely block the cleaning liquid from contacting the substrates. Therefore, the cleaning efficiency of the substrates is low.

[0047] In this embodiment, the supporting device can reduce the blocking area of ​​the substrate by the supporting device. When the supporting device in this embodiment is in the cleaning device to clean the substrate, the cleaning efficiency of the substrate can be improved, so that the substrate can be cleaned more cleanly.

[0048] It should be noted that, generally speaking, in order to prevent the substrate from being damaged by the supporting parts, the substrate is generally installed in a carrier, and the operator installs the carrier with the substrate installed in the mounting groove. Therefore, in this embodiment, the substrate is installed in the mounting groove, which can be understood as the substrate is directly installed in the mounting groove or the substrate is indirectly installed in the mounting groove through a carrier.

[0049] The specific structure of a carrying device provided by an embodiment of the present invention and the corresponding technical effects it brings are described in detail below in conjunction with the patent drawings.

[0050] It should be noted that the substrate in this embodiment can be understood not only as a silicon wafer or a lens, but also as other sheet-like structures, and the lens can be a flat lens, a concave lens, a convex lens, or a concave-convex lens. In other words, the carrying device 1 in this embodiment can be used not only to carry semiconductor silicon wafers or optical lenses, but also to carry and adapt any sheet-like structure.

[0051] by Figure 1 For reference, the first direction described below in this embodiment is direction a, the second direction is direction b, and the third direction is direction c.

[0052] Please refer to Figure 1-Figure 2 A carrying device 1 provided in this embodiment includes a carrying member 100, and the carrying member 100 includes two side panels 110 and a base 120. The two side panels 110 are spaced apart and arranged opposite to each other along a first direction. Both ends of the base 120 are respectively connected to the two side panels 110 and jointly define a carrying space 101. The base 120 is provided with a plurality of mounting grooves 1221 spaced apart along a second direction. The extending direction of the mounting grooves 1221 is parallel to the first direction, and the first direction forms an angle with the second direction, wherein the mounting grooves 1221 are located in the carrying space 101, that is, the substrate can be placed in the carrying space 101 of the carrying member 100 and can be placed in the mounting grooves 1221.

[0053] In this embodiment, the first direction is perpendicular to the second direction.

[0054] It can be understood that since the extension direction of the above-mentioned installation groove 1221 is parallel to the first direction, that is, when the substrate is installed in the installation groove 1221, the substrate is not opposite to the side plate 110. At this time, the substrate and the gap between the two side plates 110 are opposite to each other. Compared with the substrate and the side plates 110 being opposite to each other, the blocking area of ​​the side plates 110 for the substrate can be reduced. That is to say, when the supporting device 1 is placed in the cleaning equipment, the cleaning liquid in the cleaning equipment can contact the substrate with a larger area, thereby improving the cleaning efficiency of the substrate, so that the substrate can be cleaned more cleanly.

[0055] In order to improve the connection strength of the two side panels 110 in the carrier 100, ensure the stability of the carrier 100, and protect the substrate installed in the installation groove 1221, in some optional embodiments, the carrier 100 also includes a first side connecting rod 130 and a second side connecting rod 140 located above the base 120, and the first side connecting rod 130 and the second side connecting rod 140 are arranged at intervals on both sides of the base 120 along the second direction, and both ends of the first side connecting rod 130 and the second side connecting rod 140 are respectively connected to the two side panels 110. That is to say, the two ends of the first side connecting rod 130 are respectively connected to the two side plates 110, and the two ends of the second side connecting rod 140 are respectively connected to the two side plates 110. That is to say, when the substrate is installed in the mounting groove 1221, the substrate is opposite to the first side connecting rod 130 or the second side connecting rod 140. It can be understood that compared with the substrate being directly opposite to the side plate 110, the first side connecting rod 130 and the second side connecting rod 140 have less obstruction on the substrate. When the supporting device 1 is placed in the cleaning equipment, the substrate can be fully in contact with the cleaning liquid in the cleaning equipment, thereby improving the cleaning efficiency of the substrate.

[0056] Optionally, in order to facilitate disassembly and assembly by operators, both ends of the first side connecting rod 130 are detachably connected to the two side panels 110 , and both ends of the second side connecting rod 140 are also detachably connected to the two side panels 110 .

[0057] The first side connecting rod 130 and the second side connecting rod 140 can be connected to the side plate 110 by threaded fasteners. Of course, in some other optional embodiments, the first side connecting rod 130 and the second side connecting rod 140 can also be connected in a non-detachable manner.

[0058] It should be noted that the number of the above-mentioned first side connecting rods 130 can be one or more. When the number of the first side connecting rods 130 is multiple, the multiple first side connecting rods 130 are arranged at intervals along the third direction. Similarly, the number of the second side connecting rods 140 can also be one or more. When the number of the second side connecting rods 140 is multiple, the multiple second side connecting rods 140 are arranged at intervals along the third direction.

[0059] It should be noted that, the number "a plurality" in this embodiment can be understood as two or more than two.

[0060] Please refer to Figure 2 , Figure 4-Figure 6The base 120 includes a plurality of bottom connecting rods 121 and a bearing structure 122. The plurality of bottom connecting rods 121 are arranged at intervals along the second direction. Both ends of each bottom connecting rod 121 are respectively connected to the two side panels 110. The bearing structure 122 extends along the second direction. The bearing structure 122 is connected to the plurality of bottom connecting rods 121 and is located in the bearing space 101. The bearing structure 122 is provided with a plurality of mounting grooves 1221 arranged at intervals along the second direction.

[0061] It can be understood that by arranging the bearing structure 122 on the bottom connecting rod 121, and since the bearing structure 122 is provided with a mounting groove 1221 extending along the first direction, the mounting groove 1221 can be arranged so that the substrate mounted on the mounting groove 1221 is opposite to the first side connecting rod 130 or the second side connecting rod 140, and the first side connecting rod 130 and the second side connecting rod 140 have less obstruction on the substrate. When the bearing device 1 is placed in a cleaning device, the substrate can be fully in contact with the cleaning liquid in the cleaning device to improve the cleaning efficiency of the substrate.

[0062] It should be noted that the mounting groove 1221 on the supporting structure 122 penetrates along the first direction so that the substrate can be accommodated in the mounting groove 1221 .

[0063] Optionally, in order to ensure the stability of substrate installation, there are multiple supporting structures 122, and the multiple supporting structures 122 are arranged at intervals along the first direction, and the multiple installation grooves 1221 on the multiple supporting structures 122 are arranged one by one, that is, the multiple installation grooves 1221 of the multiple supporting structures 122 can be divided into multiple columns, and the multiple columns of installation grooves 1221 are arranged at intervals in the second direction. It should be noted that the installation grooves 1221 in each column extend along the first direction, that is, the multiple installation grooves 1221 in each column are arranged at intervals along the first direction. Therefore, when the substrate is installed on the carrier 100, each substrate is installed in a column of installation grooves 1221 at the same time.

[0064] It can be understood that since the supporting structures 122 extend along the second direction and there are multiple supporting structures 122, and the multiple supporting structures 122 are arranged at intervals along the first direction, there are gaps between the supporting structures 122. When the supporting device 1 is placed in the cleaning equipment, the cleaning liquid in the cleaning equipment can penetrate into the supporting space from the gaps, so that the cleaning liquid can more easily contact the substrate, thereby improving the cleaning efficiency of the substrate.

[0065] Optionally, in order to facilitate the installation of the substrate or carrier 200, the installation groove 1221 includes a first bottom wall 1222 and two first side walls 1223. The two first side walls 1223 are arranged on the first bottom wall 1222 at intervals along the second direction. The first side wall 1223 is provided with an avoidance chamfer at one end away from the first bottom wall 1222. In other words, the spacing between the avoidance chamfers of the two first side walls 1223 gradually increases in the direction away from the first bottom wall 1222. It can be understood that due to the setting of the avoidance chamfer, it is convenient for the operator to place the substrate or carrier 200.

[0066] It should be noted that the avoidance chamfer can be a straight chamfer or an arc chamfer.

[0067] Optionally, in some embodiments, in order to facilitate operators to disassemble and assemble the supporting component 100, the supporting structure 122 and the bottom connecting rod 121 are detachably connected, and the supporting structure 122 and the bottom connecting rod 121 can be threadedly connected by threaded fasteners. In this embodiment, a plurality of connecting holes 1224 are provided on the supporting structure 122, and the connecting holes 1224 are located between any two adjacent installation grooves 1221. The bottom connecting rod 121 is provided with a matching hole 1211, and one of the connecting holes 1224 and the matching hole 1211 is a threaded hole.

[0068] In this embodiment, the number of supporting structures 122 is two, that is, each bottom connecting rod 121 is provided with two matching holes 1211 in the first direction, and each bottom connecting rod 121 is connected to two supporting structures 122. Therefore, the number of connecting holes 1224 on the supporting structure 122 is the same as the number of bottom connecting rods 121.

[0069] The bottom connecting rod 121 is detachably connected to the side plate 110 . Similarly, the bottom connecting rod can also be connected to the side plate 110 via threaded fasteners.

[0070] Please refer to Figure 2-Figure 3 In order to improve the installation stability of the substrate in the carrier 100, in this embodiment, a limiting portion 111 is provided on the opposite side of the two side plates 110, and the limiting portion 111 extends along the second direction. The limiting portion 111 is provided with a plurality of limiting grooves 1111 arranged at intervals along the second direction, and the plurality of limiting grooves 1111 are arranged one-to-one with the plurality of mounting grooves 1221 in the second direction. It can be understood that the plurality of limiting grooves 1111 on a limiting portion 111 are arranged one-to-one with the plurality of columns of mounting grooves 1221 arranged at intervals in the second direction in the second direction. It can be understood that the limiting grooves 1111 of the two side plates 110 and the mounting grooves 1221 on the bearing structure 122 are both used to support the outer periphery of the limiting substrate so that the substrate is opposite to the first side connecting rod 130 or the second side connecting rod 140, thereby reducing the blocking area of ​​the substrate by the carrier 100.

[0071] Optionally, in order to facilitate the installation of the substrate or carrier 200, the limiting groove 1111 includes a second bottom wall 1112 and two second side walls 1113. The two second side walls 1113 are arranged on the second bottom wall 1112 at intervals along the second direction. The second side wall 1113 is provided with an avoidance chamfer at one end away from the second bottom wall 1112. In other words, the spacing between the avoidance chamfers of the two side walls gradually increases in the direction away from the second bottom wall 1112. It can be understood that due to the setting of the avoidance chamfer, it is convenient for operators to place the substrate or carrier 200.

[0072] In order to ensure that the side plate 110 provides stable support for the installation of the substrate, a plurality of limiting portions 111 are provided on each side plate 110. The plurality of limiting portions 111 are arranged at intervals along the third direction. In this embodiment, the first direction, the second direction and the third direction are perpendicular to each other.

[0073] In this embodiment, in order to further reduce the obstruction of the carrier 100 to the substrate, the side plate 110 is provided with an immersion port 112 that penetrates through itself along the first direction. It can be understood that when the carrier device 1 is placed in the cleaning equipment, the cleaning liquid in the cleaning equipment can contact the substrate through the immersion port 112.

[0074] In some embodiments, in order to further reduce the obstruction of the side plate 110 to the substrate, an immersion port 112 is opened between two adjacent limiting portions 111, and multiple limiting portions 111 are also provided with an immersion port 112 on the side close to the base 120 in the third direction, and multiple limiting portions 111 are also provided with an immersion port 112 on the side away from the base 120 in the third direction.

[0075] In this embodiment, two limiting parts 111 are provided on each side plate 110, a washing port 112 is provided between the two limiting parts 111, and the two limiting parts 111 are also provided with a washing port 112 on the side close to the base 120 in the third direction, and the two limiting parts 111 are also provided with a washing port 112 on the side away from the base 120 in the third direction, and the multiple washing ports 112 on the two side plates 110 are provided one by one. The multiple limiting grooves 1111 on the two limiting parts 111 on each side plate 110 can be divided into multiple columns, and each column has two limiting grooves 1111.

[0076] It can be understood that the substrate in this embodiment can be a polygonal substrate, a circular substrate or an elliptical substrate. The polygon can be understood as other polygonal structures such as a triangle, a quadrilateral, a pentagon, etc. It can be understood that when the substrate is directly installed on the carrier 100, each substrate is mainly installed in the same column of mounting grooves 1221 and the same column of limiting grooves 1111. Therefore, for substrates of different shapes, the shape of the mounting groove 1221 and the shape of the limiting groove 1111 can be adjusted to adapt to the outer periphery of the substrate. Of course, the spacing between any adjacent supporting structures 122 can also be adjusted to adjust the spacing between adjacent mounting grooves 1221 in the same column of mounting grooves 1221 to adapt to substrates of different shapes. The spacing between any two adjacent limiting portions 111 can also be adjusted to adjust the spacing between adjacent limiting grooves 1111 in the same column of limiting grooves 1111 to adapt to substrates of different shapes.

[0077] Some existing carriers 100 are made of Stainless Steel, which is easy to deform when heated. After cleaning in the cleaning device, it is difficult to remove the carrier 100 from the cleaning device when the carrier 100 is deformed. In addition, the substrate or carrier 200 is easily deformed.

[0078] Optionally, the bearing member 100 in this embodiment is made of at least one of Teflon, aluminum, stainless steel, titanium alloy, pure nickel, nickel-based alloy, tungsten alloy, ceramic material, and tungsten-copper alloy.

[0079] It can be understood that Teflon, aluminum, stainless steel, titanium alloy, pure nickel, nickel-based alloy, tungsten alloy, ceramic material, tungsten-copper alloy has excellent corrosion resistance and non-stickiness, is suitable for parts in contact with chemical cleaning fluids, and has good hardness and is not prone to deformation when exposed to high temperatures. Therefore, the carrier 100 made of one of the materials selected from Teflon, aluminum, stainless steel, titanium alloy, pure nickel, nickel-based alloy, tungsten alloy, ceramic material, and tungsten-copper alloy is not prone to deformation after cleaning.

[0080] Optionally, in order to facilitate the grasping device to grasp the carrier 100 in this embodiment, the side plate 110 may also be provided with a hook 113, that is, the grasping device can grasp the carrier 100 through the hook 113 to facilitate the movement of the carrier 100.

[0081] Please refer to Figure 7-Figure 11Optionally, the carrying device 1 in this embodiment further includes a carrier 200, which is used to be placed in the mounting groove 1221. The carrier 200 is used to install a substrate. When the carrier 200 is placed in the mounting groove 1221, the first direction is parallel to the end face of the carrier 200 in the thickness direction, and the carrier 200 is at an angle to the side plate 110. In this embodiment, when the carrier 200 is loaded into the carrier 100, the carrier 200 is vertically arranged to the side plate 110. Of course, the vertical in this embodiment should not be understood as vertical in a strict sense, as long as the carrier 200 is approximately vertical to the side plate 110.

[0082] When the carrier 200 is placed in a row of mounting grooves 1221 , the thickness direction of the carrier 200 is parallel to the second direction. Of course, the parallel in this embodiment should not be understood as parallel in a strict sense, as long as the thickness direction of the carrier 200 is roughly parallel to the second direction.

[0083] It is understandable that each carrier 200 can be placed in a row of mounting grooves 1221 on the base 120. In this embodiment, a row of mounting grooves 1221 refers to a row of mounting grooves 1221 arranged along the first direction. The carrier 200 is also installed in the limiting grooves 1111 on the side panels 110. It is understandable that when the carrier 200 is placed on the carrier 100, it can enter the upper limiting grooves 1111 on the side panels 110 in advance and move downward until it enters the row of mounting grooves 1221, and the two sides of the carrier 200 in the first direction are respectively located in the row of limiting grooves 1111 on the two side panels 110.

[0084] Since the carrier 100 in this embodiment has a plurality of rows of mounting grooves 1221 spaced apart along the second direction and a plurality of rows of limiting grooves 1111 spaced apart along the second direction, the carrier 100 can simultaneously mount a plurality of carriers 200 .

[0085] In detail, the carrier 200 includes a carrier plate 210 and a cover plate 220, the cover plate 220 is covered on the carrier plate 210 and is detachably connected to the carrier plate 210, the carrier plate 210 is provided with a first mounting slot 211 for mounting a substrate, that is, the substrate can be mounted in the first mounting slot 211, and a first overflow channel 212 is provided on a side of the carrier plate 210 close to the cover plate 220, one end of the first overflow channel 212 is connected to the first mounting slot 211, and the other end of the first overflow channel 212 passes through one side of the carrier plate 210. It can be understood that when the carrier 200 with the substrate is mounted on the carrier 100 and the carrier 100 is located in the cleaning equipment, after the cleaning liquid enters the carrier 200, the liquid for cleaning the carrier 200 can flow out of the carrier 210 through the first overflow channel, thereby avoiding the cleaning liquid remaining on the substrate to form bubbles.

[0086] It should be noted that the end surface of the carrier 200 in the thickness direction may be understood as a side surface of the carrier plate 210 away from the cover plate 220 or a side surface of the cover plate 220 away from the carrier plate 210 .

[0087] The cover plate 220 is provided with a second mounting slot 221 opposite to the first mounting slot 211. The first mounting slot 211 and the second mounting slot 221 jointly define an installation space for installing the substrate. It can be understood that the first mounting slot 211 can be pre-installed in the first mounting slot 211, and then the cover plate 220 is covered on the carrier plate 210. At this time, the two side surfaces of the substrate are restricted by the end faces of the first mounting slot 211 and the second mounting slot 221 to prevent the substrate from escaping from the installation space.

[0088] In order to reduce the blocking area of ​​the cover plate 220 and the carrier plate 210 on the substrate, a first through hole 2111 is opened on the end face of the first mounting slot 211, and a second through hole 2211 is opened on the end face of the second mounting slot 221. The first through hole 2111 is opposite to the second through hole 2211. It can be understood that after the substrate is loaded into the installation space, the substrate can be exposed through the first through hole 2111 and the second through hole 2211. After the carrier 200 with the substrate is installed on the carrier 100, and the carrier 100 is in the cleaning equipment, the cleaning liquid in the cleaning equipment can contact the substrate through the first through hole 2111 or the second through hole 2211, thereby achieving the cleaning of the substrate.

[0089] It should be noted that, in this embodiment, a plurality of first overflow channels 212 arranged at intervals are provided around the first mounting slot 211, so as to facilitate timely discharge of the cleaning liquid through the plurality of first overflow channels 212 and avoid the cleaning liquid remaining on the substrate to form bubbles.

[0090] In detail, in this embodiment, the first mounting slot 211 has three first overflow channels 212 , two of which extend along the width direction of the carrier plate 210 , and another one of which extends along the length direction of the carrier plate 210 .

[0091] Optionally, there are multiple first mounting slots 211 and they are arranged at intervals along a preset direction. A second overflow channel 213 is provided between any two adjacent first mounting slots 211, and the two adjacent first mounting slots 211 are connected through the second overflow channel 213. It can be understood that the provision of the second overflow channel 213 enhances the fluidity of the cleaning liquid between adjacent first mounting slots 211, thereby facilitating the discharge of the cleaning liquid from the substrate.

[0092] Furthermore, since there are multiple first mounting slots 211 , multiple substrates can be mounted in one carrier 200 .

[0093] In this embodiment, there are two first mounting slots 211 on the carrier 210 , and the preset direction is the length direction of the carrier 210 , that is, the extension direction of the second overflow channel 213 between the two first mounting slots 211 is parallel to the length direction of the carrier 210 .

[0094] Therefore, three first overflow channels 212 and one second overflow channel 213 are respectively distributed around one first mounting slot 211 , which can improve the overflow effect of the carrier 210 and make the cleaning liquid on the substrate flow in time until it flows out of the carrier 200 .

[0095] It should be noted that the cover plate 220 in this embodiment is also provided with two second mounting slots 221 , and the two second mounting slots 221 correspond one-to-one to the two first mounting slots 211 .

[0096] Optionally, in some embodiments, the cover plate 220 is provided with a first matching flow channel 222 opposite to the first overflow flow channel 212. When the cover plate 220 is covered on the carrier plate 210, the first overflow flow channel 212 and the first matching flow channel 222 are opposite to each other and jointly define an overflow channel. It can be understood that by providing the first matching flow channel 222 on the cover plate 220, the overflow effect of the installation space in the carrier 200 can be further increased, and the cleaning liquid on the substrate can be discharged in time through the first matching flow channel 222.

[0097] In this embodiment, the number of the first matching channels 222 on the cover plate 220 is the same as the number of the first overflow channels 212 on the carrier plate 210 and corresponds one to one.

[0098] Of course, in order to increase the fluidity of the cleaning liquid between adjacent first mounting slots 211, optionally, a second matching channel 223 opposite to the second overflow channel 213 is provided between the two second mounting slots 221 on the cover plate 220. When the cover plate 220 is covered on the carrier plate 210, the second overflow channel 213 is opposite to the second matching channel 223. Through the setting of the second matching channel 223, the fluidity of the cleaning liquid between the two first mounting slots 211 is increased, and the cleaning liquid on the substrate can also be discharged in time.

[0099] It should be noted that the shape of the first mounting slot 211 in the present embodiment is a rectangular slot, that is, the first mounting slot 211 in the present embodiment is used to install a rectangular substrate. Of course, in some optional embodiments, the shape of the first mounting slot 211 can also be other shapes. For example, when used to install a pentagonal substrate, the first mounting slot 211 is roughly pentagonal in shape. When used to install a hexagonal or other polygonal substrate, the first mounting slot 211 is hexagonal or polygonal. Alternatively, the shape of the first mounting slot 211 can also be a circular or elliptical slot to adapt to a circular substrate or an elliptical substrate. The specific shape of the first mounting slot 211 is not specifically limited herein.

[0100] Of course, in some optional embodiments, the side of the cover plate 220 close to the carrier plate 210 may also be flat, that is, the cover plate 220 may not be provided with the second mounting slot 221, the first matching channel 222 and the second matching channel 223, and the cover plate 220 may only be provided with the second through hole 2211 opposite to the first through hole 2111. Of course, in some other optional embodiments, the cover plate 220 may not be provided with the second mounting slot 221, the first matching channel 222, the second matching channel 223 and the second through hole 2211, that is, the cover plate 220 may also be a complete plate-like structure.

[0101] Optionally, a first connecting portion 214 is provided on a side of the carrier 210 close to the cover plate 220, and a first mounting hole 225 is provided on the cover plate 220. The first connecting portion 214 on the carrier 210 is plugged into the first mounting hole 225, that is, the carrier 210 is connected to the first mounting hole 225 on the cover plate 220 through the first connecting portion 214 to achieve connection with the cover plate 220. In the present embodiment, there are two first connecting portions 214 on the carrier 210, and the two first connecting portions 214 are respectively provided on both sides in the width direction of the carrier 210, and the two first connecting portions 214 are also respectively provided on both sides in the length direction of the carrier 210. The carrier 210 in the present embodiment is roughly a rectangular plate, and therefore, the connecting line of the two first connecting portions 214 roughly passes through the diagonal line of the side of the carrier 210 close to the cover plate 220.

[0102] Optionally, in order to ensure the connection strength between the carrier 210 and the cover 220 , a second connecting portion 224 is provided on a side of the cover 220 close to the carrier 210 , and the carrier 210 is provided with a second mounting hole 215 for plugging and mating with the second connecting portion 224 .

[0103] In some embodiments, the cover plate 220 has two second connection portions 224 and two first mounting holes 225, and the two second connection portions 224 and the two first mounting holes 225 on the cover plate 220 are alternately arranged at uniform intervals along the circumference of the cover plate 220, that is, one first mounting hole 225 on the cover plate 220 is provided with two second connection portions 224 on both sides of the circumference of the cover plate 220, and the two first connection portions 214 and the two second mounting holes 215 on the carrier plate 210 are alternately arranged at uniform intervals along the circumference of the carrier plate 210, and one second mounting hole 215 on the carrier plate 210 is provided with two first connection portions 214 on both sides of the circumference of the carrier plate 210.

[0104] In summary, a carrying device 1 provided in an embodiment of the present invention includes a carrying member 100 and a carrier 200, the carrying member 100 includes two side panels 110 and a base 120, the two side panels 110 are spaced apart and arranged opposite to each other along a first direction, two ends of the base 120 are respectively connected to the two side panels 110, the base 120 is provided with a plurality of mounting grooves 1221 spaced apart and arranged along a second direction, the extension direction of the mounting grooves 1221 is parallel to the first direction, when the substrate is installed in the mounting grooves 1221, the substrate is not opposite to the side panels 110, when the carrying device 1 with the substrate is placed in a cleaning device, the cleaning liquid in the cleaning device can contact the substrate over a larger area, thereby improving the cleaning efficiency of the substrate, so that the substrate can be cleaned more cleanly. Furthermore, since the carrier 100 in this embodiment is made of Teflon material, deformation of the carrier 100 after cleaning in the cleaning equipment can be avoided, and the carrier 200 of the carrier device 1 is provided with a first mounting slot 211 to ensure that the substrate is stably assembled in the carrier 200, and the first mounting slot 211 is surrounded by a first overflow channel 212 and a second overflow channel 213. Therefore, after the cleaning liquid enters the carrier 200, the liquid for cleaning the carrier 200 can flow out of the carrier plate 210 through the first overflow channel, thereby avoiding the cleaning liquid remaining on the substrate to form bubbles.

[0105] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A carrying device, characterized in that: include: The bearing member includes two side panels and a base, the two side panels are spaced apart and arranged opposite to each other along a first direction, the two ends of the base are respectively connected to the two side panels and jointly define a bearing space, the base is provided with a plurality of mounting grooves spaced apart along a second direction, the extension direction of the mounting grooves is parallel to the first direction, and the first direction forms an angle with the second direction.

2. The carrying device according to claim 1, characterized in that: The base includes a plurality of bottom connecting rods and a bearing structure, wherein the plurality of bottom connecting rods are arranged at intervals along the second direction, and both ends of each of the bottom connecting rods are respectively connected to the two side panels, and the bearing structure extends along the second direction, and the bearing structure is connected to the plurality of bottom connecting rods and is located in the bearing space, and the bearing structure is provided with a plurality of mounting grooves arranged at intervals along the second direction.

3. The carrying device according to claim 2, characterized in that: There are multiple bearing structures, and the multiple bearing structures are arranged at intervals along the first direction. The multiple installation grooves of the multiple bearing structures are arranged in a one-to-one correspondence.

4. The carrying device according to claim 2, characterized in that: The bearing structure is detachably connected to the bottom connecting rod, and / or the bottom connecting rod is detachably connected to the side plate.

5. The carrying device according to claim 1, characterized in that: The mounting groove includes a first bottom wall and two first side walls. The two first side walls are arranged on the first bottom wall at intervals along the second direction. An avoidance chamfer is arranged at one end of the first side wall away from the first bottom wall.

6. The carrying device according to claim 1, characterized in that: A limiting portion is provided on one side opposite to the two side plates, and the limiting portion extends along the second direction. The limiting portion is provided with a plurality of limiting grooves arranged at intervals along the second direction, and the plurality of limiting grooves are arranged one-to-one with the plurality of mounting grooves in the second direction.

7. The carrying device according to claim 6, characterized in that: A plurality of the limiting portions are disposed on each of the side plates, and the plurality of the limiting portions are arranged at intervals along the third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

8. The carrying device according to claim 7, characterized in that: The side plate is provided with a leaching port penetrating through the side plate along the first direction; The immersion port is opened between two adjacent limiting parts, and / or the immersion port is set on the side of multiple limiting parts close to the base in the third direction, and / or the immersion port is set on the side of multiple limiting parts away from the base in the third direction.

9. The carrying device according to claim 6, characterized in that: The limiting groove includes a second bottom wall and two second side walls. The two second side walls are arranged on the second bottom wall at intervals along the second direction. An avoidance chamfer is arranged at one end of the second side wall away from the second bottom wall.

10. The carrying device according to claim 1, characterized in that: The supporting member also includes a first side connecting rod and a second side connecting rod located above the base, the first side connecting rod and the second side connecting rod are arranged at intervals on both sides of the base along the second direction, and both ends of the first side connecting rod and the second side connecting rod are respectively connected to the two side panels.

11. The carrying device according to claim 1, characterized in that: The carrying device also includes a carrier, which is used to be placed in the mounting groove and used to install the substrate. When the carrier is placed in the mounting groove, the first direction is parallel to the end face of the carrier in the thickness direction, and the carrier forms an angle with the side plate.

12. A carrying device according to claim 11, characterized in that: The carrier includes a carrier plate and a cover plate, wherein the cover plate is covered on the carrier plate and detachably connected to the carrier plate, the carrier plate is provided with a first mounting slot for mounting the substrate, a first overflow channel is provided on a side of the carrier plate close to the cover plate, one end of the first overflow channel is connected to the first mounting slot, and the other end of the first overflow channel passes through one side of the carrier plate.

13. A carrying device according to claim 12, characterized in that: The cover plate is provided with a second mounting slot opposite to the first mounting slot, and the first mounting slot and the second mounting slot together define an installation space for installing the substrate.

14. A carrying device according to claim 13, characterized in that: A first through hole is formed on the end surface of the first mounting slot, and a second through hole is formed on the end surface of the second mounting slot.

15. A carrying device according to claim 12, characterized in that: A plurality of first overflow channels arranged at intervals are provided on the circumference of the first mounting slot.

16. A carrying device according to claim 12, characterized in that: There are a plurality of first mounting slots which are arranged at intervals along a preset direction. A second overflow channel is provided between any two adjacent first mounting slots, and any two adjacent first mounting slots are connected through the second overflow channel.

17. The carrying device according to claim 12, characterized in that: The cover plate is provided with a first matching flow channel opposite to the first overflow flow channel. When the cover plate is covered on the carrier plate, the first overflow flow channel and the first matching flow channel are opposite to each other and jointly define an overflow channel.

18. The carrying device according to claim 1, characterized in that: The bearing member is made of at least one of Teflon, aluminum, stainless steel, titanium alloy, pure nickel, nickel-based alloy, tungsten alloy, ceramic material, and tungsten-copper alloy.

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