Cleaning mechanism, cleaning equipment and laser processing device

Abstract

The invention discloses a cleaning mechanism, cleaning equipment and a laser processing device. The cleaning mechanism comprises a cleaning barrel body, and a first through hole is formed in the bottom of the cleaning barrel body; the bottom of the cleaning barrel body is fixed to the bottom plate assembly, the bottom plate assembly is provided with a bottom plate through hole communicating with the first through hole, the bottom plate through hole is used for being connected with a containing table system in a sealed mode, and the containing table system is provided with a containing table located in the cleaning barrel body and used for containing material pieces; and the first leakage-proof piece comprises a first leakage-proof bearing groove which is fixed on the bottom plate assembly and is arranged around the bottom plate through hole, and a first leakage-proof drainage piece which is communicated with the bottom of the first leakage-proof bearing groove. According to the cleaning mechanism provided by the invention, even if leakage occurs at the bottom of the cleaning barrel body, leakage can be received by the first leakage-proof receiving groove without dripping along the leakage part, the first leakage-proof receiving groove can be drained through the first leakage-proof drainage piece, overflow caused by full storage of the first leakage-proof receiving groove is avoided, and the phenomenon of water leakage of the cleaning mechanism is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing equipment, and more specifically, to a cleaning mechanism, cleaning equipment and laser processing device. Background Art

[0002] Wafer laser processing is one of the key steps in the semiconductor manufacturing process, which is used to cut individual chips on the wafer to provide a basis for subsequent packaging and testing.

[0003] Laser processing equipment generally includes a silo device, a conveying mechanism, a cleaning and coating device, a processing component, and a material unloading component. Among them, the silo device is used to store the sheets to be processed; the conveying mechanism is used to transfer materials between the silo device, the cleaning and coating device, and the processing component; the cleaning and coating device is used to complete the cleaning and gluing processes; the processing component is used to process the sheets, such as cutting and grooving the sheets with lasers. The material unloading component is used to transfer the processed sheets from the processing component to the corresponding device for cleaning. After cleaning, the conveying mechanism moves the sheets back to the silo device.

[0004] The cleaning and coating device includes a cleaning mechanism and a spraying mechanism. A rotatable placement table is arranged in the cleaning mechanism. The sheet to be cleaned and / or coated with glue is placed on the placement table. The placement table drives the sheet to rotate to complete the cleaning and coating operations.

[0005] During the cleaning process, the cleaning liquid is first received by the cleaning mechanism and then discharged through the corresponding pipeline of the cleaning mechanism. Since the bottom structure of the cleaning mechanism is basically a welded structure, if there is a quality problem at the welding seam, it will cause the cleaning mechanism to leak.

[0006] Therefore, how to prevent water leakage from the cleaning mechanism is a problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0007] In view of this, the object of the present invention is to provide a cleaning mechanism to prevent water leakage from the cleaning mechanism; Another object of the present invention is to provide a cleaning device and a laser processing apparatus having the above-mentioned cleaning mechanism.

[0008] To achieve the above object, the present invention provides the following technical solutions: A cleaning mechanism, comprising: A cleaning barrel, wherein the bottom of the cleaning barrel has a first through hole; A bottom plate assembly, the bottom of the cleaning barrel is fixed on the bottom plate assembly, and the bottom plate assembly has a bottom plate through hole connected to the first through hole, the bottom plate through hole is used to be sealed and connected to a placement table system, and the placement table system has a placement table located in the cleaning barrel for placing a sheet; The first leak-proof component includes a first leak-proof receiving groove fixed on the bottom plate assembly and arranged around the bottom plate through hole, and a first leak-proof drainage component connected to the bottom of the first leak-proof receiving groove.

[0009] Optionally, in the above-mentioned cleaning mechanism, the bottom plate assembly includes a first bottom plate and a second bottom plate arranged at the bottom of the first bottom plate; The first bottom plate is arranged in the first through hole, the bottom plate through hole comprises a second through hole arranged on the first bottom plate, and the second through hole is sealed and connected to the placement table system; The bottom of the cleaning barrel is fixed on the second bottom plate, the bottom plate through hole also includes a third through hole arranged on the second bottom plate, the first side wall of the first leak-proof receiving groove is fixed on the second bottom plate, the second side wall extends into the third through hole and extends toward the direction of the first bottom plate, and the height of the second side wall is higher than the height of the upper surface of the second bottom plate.

[0010] Optionally, in the above-mentioned cleaning mechanism, the bottom plate assembly includes a third bottom plate, the third bottom plate is arranged on the upper surface of the first bottom plate, and the edge of the third bottom plate has a first folding plate bent downward; The bottom of the cleaning barrel body has a second folding plate bent upward, and the second folding plate surrounds the first through hole. The first folding plate is located on the outer circle of the second folding plate, and together with the second folding plate and the bottom of the cleaning barrel body, forms a leak-proof groove for waterproofing, and the first folding plate and the second folding plate have an overlapping area in the height direction.

[0011] Optionally, in the above-mentioned cleaning mechanism, the second folding plate includes a second upper folding plate extending upward and a second side folding plate located at an end of the second upper folding plate and extending in the direction of the first folding plate.

[0012] Optionally, the above-mentioned cleaning mechanism further includes a second leak-proof component, which includes a second leak-proof receiving groove fixed to the outer circle of the second bottom plate and a second leak-proof drainage component connected to the bottom of the second leak-proof receiving groove.

[0013] Optionally, in the above-mentioned cleaning mechanism, the bottom wall of the second leak-proof receiving groove is fixed to the bottom of the second bottom plate, and the upper surface of the outer side wall of the second leak-proof receiving groove is higher than the upper surface of the second bottom plate.

[0014] Optionally, in the above cleaning mechanism, the side wall of the cleaning barrel is provided with a drainage mist pipe connected to the cleaning barrel; and / or, The bottom wall of the cleaning barrel is provided with a drainage pipe connected to the cleaning barrel; and / or, A partition is provided in the cleaning barrel, the partition is located between the bottom wall of the cleaning barrel and the placement table of the placement table system, and the partition is provided with a through hole; and / or, The inner side wall of the cleaning barrel is pasted with a sponge layer.

[0015] Optionally, in the above-mentioned cleaning mechanism, the bottom plate assembly is supported on the base through a support beam, and a vibration isolation member is provided between the support beam and the bottom plate assembly.

[0016] The cleaning mechanism provided by the present invention is provided with a first leak-proof component, and the first leak-proof component includes a first leak-proof receiving groove and a first leak-proof drainage component. The first leak-proof receiving groove is arranged around the bottom plate through hole. If leakage occurs at the bottom of the cleaning barrel, the liquid at the leakage will flow along the bottom plate assembly toward the bottom plate through hole. After flowing into the bottom plate through hole, it will be received by the first leak-proof receiving groove, and the liquid in the first leak-proof receiving groove will be discharged to the corresponding position through the first leak-proof drainage component. The cleaning mechanism provided by the present invention can be received by the first leak-proof receiving groove even if leakage occurs at the bottom of the cleaning barrel, and will not drip along the leakage part. The first leak-proof receiving groove can be drained away through the first leak-proof drainage component, and will not overflow due to the first leak-proof receiving groove being full, thereby avoiding the phenomenon of water leakage in the cleaning mechanism.

[0017] A cleaning device, comprising: A cleaning mechanism, which is a cleaning mechanism as described in any of the above items; A placement table system, comprising a placement table arranged inside the cleaning barrel body and a placement table driving member arranged outside the cleaning barrel body, wherein the placement table driving member is connected to the placement table through a transmission member to drive the placement table to rotate, and the transmission member is sealed and connected to the bottom plate through a hole; The spraying mechanism includes a spray head assembly arranged inside the cleaning barrel body and a spray driving component arranged outside the cleaning barrel body. The spray driving component is connected to the output end of the spray head assembly through a swing rod to drive the spray head assembly to swing, and the output end of the spray head assembly passes through the bottom plate assembly and is sealed with the bottom plate assembly.

[0018] Optionally, in the above-mentioned cleaning device, when the cleaning device is a cleaning coating device, the spray head assembly comprises at least a cleaning liquid atomizing nozzle and a glue coating nozzle; When the cleaning equipment is a cleaning device, the spray head assembly at least includes a cleaning liquid atomizing nozzle.

[0019] Optionally, in the above cleaning equipment, the spray head assembly further comprises a cleaning liquid inclined nozzle, the spraying direction of the cleaning liquid atomizing nozzle is perpendicular to the direction of the sheet, and the spraying direction of the cleaning liquid inclined nozzle forms an acute angle with the sheet.

[0020] Optionally, in the above cleaning device, the medium inlet of the glue coating nozzle includes a glue coating inlet and an anti-blocking inlet; and / or, The medium inlet of the cleaning liquid atomizing nozzle includes a cleaning liquid inlet and a compressed gas inlet.

[0021] Optionally, in the above-mentioned cleaning device, the inner wall of the cleaning barrel has a hidden space recessed outward, and when the spraying mechanism is in a non-working state, the spray head assembly is hidden in the hidden space.

[0022] The cleaning device provided by the present invention has all the technical effects of the above-mentioned cleaning mechanism, and will not be described in detail herein.

[0023] A laser processing device comprises the cleaning device as described in any one of the above items.

[0024] The laser processing device provided by the present invention has all the technical effects of the above-mentioned cleaning equipment, and will not be described in detail herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic diagram of the structure of the cleaning device disclosed in an embodiment of the present invention at a certain angle; Figure 2 It is a schematic diagram of the structure of the cleaning device disclosed in an embodiment of the present invention at another angle; Figure 3 A front view of a cleaning device disclosed in an embodiment of the present invention; Figure 4 for Figure 3 Section view along line AA; Figure 5 A partial cross-sectional view of a cleaning device disclosed in an embodiment of the present invention; Figure 6 It is a schematic diagram of the structure of the spraying mechanism disclosed in an embodiment of the present invention.

[0027] The meanings of the reference numerals in the figures are as follows: 100-spraying mechanism; 110-spraying drive member; 120-spraying head assembly; 121-cleaning liquid atomizing nozzle; 122-glue spraying nozzle; 123-cleaning liquid tilting nozzle; 130-spraying lifting device; 140-swinging rod; 200-cleaning mechanism; 201-cleaning barrel; 2011-second folding plate; 2012-hidden space; 2013-first through hole; 202-base; 203-support beam; 204-drainage mist pipe; 205-drainage pipe; 206-water curtain installation platform; 207-water curtain opening and closing device; 2071-first slider; 2072-second slider; 2073-connecting arm; 2074-water curtain Push-pull driving member; 208-second anti-leakage drainage member; 209-second anti-leakage receiving groove; 210-vibration isolation member; 211-sponge layer; 212-second bottom plate; 2121-third through hole; 213-partition plate; 214-first bottom plate; 215-first anti-leakage receiving groove; 216-third bottom plate; 2161-first folding plate; 217-enclosing plate; 218-first anti-leakage drainage member; 219-bottom plate assembly; 300 - placement table system; 310 - placement table driving component; 320 - placement table. DETAILED DESCRIPTION

[0028] The core of the present invention is to provide a cleaning mechanism to prevent water leakage from the cleaning mechanism; Another core of the present invention is to provide a cleaning device and a laser processing device having the above-mentioned cleaning mechanism.

[0029] The following embodiments are described with reference to the accompanying drawings. In addition, the embodiments shown below do not limit the invention contents described in the claims. In addition, the entire contents of the structures represented by the following embodiments are not limited to those necessary as solutions to the inventions described in the claims. It should be noted that, for ease of description, only the parts related to the inventions are shown in the accompanying drawings. The embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0030] like Figure 1-Figure 5As shown, the cleaning mechanism 200 disclosed in the embodiment of the present invention includes a cleaning barrel 201, a bottom plate assembly 219 and a first leak-proof member. Since the placement table 320 of the placement table system 300 is located inside the cleaning barrel 201, the placement table 320 is used to place the tablets to drive the tablets to rotate and complete the cleaning and / or gluing work, and the placement table driving member 310 of the placement table system 300 is located outside the cleaning barrel 201. In order to ensure that the placement table driving member 310 can exert a driving force on the placement table 320, it is necessary for the transmission component connecting the two to pass through the bottom of the cleaning barrel 201, so the bottom of the cleaning barrel 201 has a first through hole 2013, so that the transmission component can enter the cleaning barrel 201 and connect with the placement table 320.

[0031] The bottom of the cleaning barrel 201 is fixed to the bottom plate assembly 219, and the bottom plate assembly 219 has a bottom plate through hole connected to the first through hole 2013, so that the transmission component of the placement table system 300 can pass through the bottom plate through hole to connect with the placement table 320. The bottom plate through hole is used to be sealed and connected with the transmission component of the placement table system 300 to prevent the cleaning liquid (cleaning liquid is usually water) from leaking through the bottom plate through hole.

[0032] The first leak-proof member includes a first leak-proof receiving groove 215 fixed on the bottom plate assembly 219 and arranged around the bottom plate through hole and a first leak-proof drainage member 218 connected to the bottom of the first leak-proof receiving groove 215. Since the bottom plate assembly 219 is fixed to the bottom of the cleaning barrel 201, when the cleaning liquid inside the cleaning barrel 201 leaks, it will flow to the bottom plate through hole and leak through the bottom plate through hole. In this embodiment, the first leak-proof receiving groove 215 is added to the bottom of the bottom plate assembly 219, which can receive the leaked cleaning liquid and discharge it to the corresponding position through the first leak-proof drainage member 218. The first leak-proof drainage member 218 can be a discharge pipeline, and the first leak-proof drainage member 218 is connected to the discharge port at the bottom of the first leak-proof receiving groove 215.

[0033] The cleaning mechanism provided by the present invention is provided with a first leak-proof component, and the first leak-proof component includes a first leak-proof receiving groove 215 and a first leak-proof drainage component 218. The first leak-proof receiving groove 215 is arranged around the bottom plate through hole. If leakage occurs at the bottom of the cleaning barrel 201, the liquid at the leakage will flow along the bottom plate assembly 219 toward the bottom plate through hole. After flowing into the bottom plate through hole, it will be received by the first leak-proof receiving groove 215, and the liquid in the first leak-proof receiving groove 215 will be discharged to the corresponding position through the first leak-proof drainage component 218. The cleaning mechanism provided by the present invention can be received by the first leak-proof receiving groove 215 even if leakage occurs at the bottom of the cleaning barrel 201, and will not drip along the leakage part. The first leak-proof receiving groove 215 can be drained away through the first leak-proof drainage component 218, and will not overflow due to the first leak-proof receiving groove 215 being full, thereby avoiding the phenomenon of water leakage in the cleaning mechanism.

[0034] Furthermore, the bottom plate assembly 219 includes a first bottom plate 214 and a second bottom plate 212 disposed at the bottom of the first bottom plate 214. The first bottom plate 214 and the second bottom plate 212 are stacked, and the first bottom plate 214 is located above the second bottom plate 212.

[0035] The first bottom plate 214 is disposed in the first through hole 2013, and the bottom plate through hole includes a second through hole disposed on the first bottom plate 214, and the second through hole is sealed and connected to the placement table system 300. The bottom of the cleaning barrel 201 is fixed on the second bottom plate 212, and the edge of the second bottom plate 212 is located outside the outer wall of the cleaning barrel 201. Taking the cross section of the cleaning barrel 201 as an example, the second bottom plate 212 is also circular, and the diameter of the second bottom plate 212 is larger than the diameter of the cleaning barrel 201, and the two can be coaxially arranged, so that the edge of the second bottom plate 212 can be located outside the outer wall of the cleaning barrel 201.

[0036] The bottom plate through hole also includes a third through hole 2121 arranged on the second bottom plate 212. The first side wall of the first leak-proof receiving groove 215 is fixed on the second bottom plate 212, and the second side wall extends into the third through hole 2121 and extends toward the first bottom plate 214. The second side wall can abut against the bottom of the first bottom plate 214, and can also have some gap between the second side wall and the first bottom plate 214. Of course, it can also be directly fixed to the bottom of the first bottom plate 214, as long as the two side walls of the first leak-proof receiving groove 215 have a certain height and can accommodate a certain volume of cleaning liquid.

[0037] It should be noted that, in order to improve the leak-proof effect, the height of the second side wall of the first leak-proof receiving groove 215 can be designed to be higher than the height of the upper surface of the second bottom plate 212. The height of the second side wall of the first leak-proof receiving groove 215 is higher than the height of the first side wall, so that the cleaning liquid in the first leak-proof receiving groove 215 cannot overflow through one side of the second side wall. The connection between the first side wall of the first leak-proof receiving groove 215 and the second bottom plate 212 can be sealed, so that even if the first leak-proof drainage member 218 has poor drainage, causing the liquid level in the first leak-proof receiving groove 215 to rise, it will not leak out.

[0038] In a specific embodiment of the present invention, the bottom plate assembly 219 also includes a third bottom plate 216, which is arranged on the upper surface of the first bottom plate 214, and the edge of the third bottom plate 216 has a first folding plate 2161 bent downward, so that the cleaning liquid above the third bottom plate 216 will flow toward the outer edge of the third bottom plate 216. Since the edge of the third bottom plate 216 is the first folding plate 2161 bent downward, it will flow along the first folding plate 2161 to the bottom wall of the cleaning barrel 201.

[0039] Although the first bottom plate 214 is embedded in the first through hole 2013 of the cleaning barrel 201, there is a possibility that the cleaning liquid enters between the first bottom plate 214 and the second bottom plate 212 through the gap between the edge of the first bottom plate 214 and the inner wall of the first through hole 2013. If there is a gap at the joint between the first bottom plate 214 and the second bottom plate 212, the cleaning liquid will pass through the gap between the first bottom plate 214 and the second bottom plate 212 and flow toward the third through hole 2121 of the second bottom plate 212.

[0040] In this embodiment, a third bottom plate 216 is added and fixed on the first bottom plate 214, and then a first folding plate 2161 is provided on the third bottom plate 216, so that the third bottom plate 216 can completely cover the first through hole 2013 of the cleaning barrel 201, that is, completely cover the gap between the edge of the first bottom plate 214 and the inner wall of the first through hole 2013, thereby reducing the risk of leakage.

[0041] Furthermore, the bottom of the cleaning barrel 201 has a second folded plate 2011 that is bent upward, and the second folded plate 2011 surrounds a first through hole 2013. The first folded plate 2161 is located at the outer circle of the second folded plate 2011, and together with the second folded plate 2011 and the bottom of the cleaning barrel 201, it forms a leak-proof groove for waterproofing, and the first folded plate 2161 and the second folded plate 2011 have an overlapping area in the height direction. As the liquid level rises, the cleaning liquid on the bottom wall of the cleaning barrel 201 will flow toward the first through hole 2013 and will be blocked by the first folded plate 2161; so that the liquid level outside the first folded plate 2161 is higher than the liquid level inside the first folded plate 2161, so as to facilitate the discharge of the cleaning liquid in the cleaning barrel 201.

[0042] Even if some of the cleaning liquid passes through the first folded plate 2161, it will be blocked by the second folded plate 2011 bent upward, so that the cleaning liquid is temporarily contained in the anti-leakage groove to prevent the cleaning liquid from entering the first through hole 2013. Even if leakage occurs at the connection between the second folded plate 2011 and the bottom wall of the cleaning barrel 201, causing the cleaning liquid to continue to flow toward the center, it will be received by the first anti-leakage receiving groove 215 and discharged.

[0043] The second folding plate 2011 may include a second upper folding plate extending upward and a second side folding plate located at the end of the second upper folding plate and extending toward the first folding plate 2161, further increasing the difficulty of the cleaning liquid passing over the second folding plate 2011. It should be noted that the second folding plate 2011 only needs to include a portion bent upward and can increase the difficulty of liquid passing through, and is not limited to the structure shown in the figure.

[0044] In order to further improve the leak-proof effect, Figure 4 and Figure 5 As shown, in a specific embodiment of the present invention, the cleaning mechanism 200 may further include a second leak-proof component, which includes a second leak-proof receiving groove 209 fixed to the outer ring of the second bottom plate 212 and a second leak-proof drainage component 208 connected to the bottom of the second leak-proof receiving groove 209.

[0045] When leakage occurs on the central side (the connection between the second folding plate 2011 and the bottom wall of the cleaning barrel body 201) and the outside (the connection between the bottom wall and the side wall of the cleaning barrel body 201), the leaked cleaning liquid has two flow paths. One is to flow along the second bottom plate 212 toward the third through hole 2121, and leak to the outside from the third through hole 2121; the other is to flow along the second bottom plate 212 toward the outer edge of the second bottom plate 212, and seep to the outside from the edge of the second bottom plate 212.

[0046] It is understood in the art that even if there is a problem of cleaning liquid leaking from the third through hole 2121 to the outside, it can be received by the first leak-proof receiving groove 215 and directed to be discharged to the corresponding collection position. Similarly, even if there is a phenomenon of cleaning liquid leaking from the outer edge of the second bottom plate 212, it can be received by the second leak-proof receiving groove 209 and directed to be discharged to the corresponding collection position through the second leak-proof drainage member 208. The second leak-proof drainage member 208 can also be a discharge pipeline connected to the bottom of the second leak-proof receiving groove 209.

[0047] Furthermore, the bottom wall of the second leak-proof receiving groove 209 is fixed to the bottom of the second bottom plate 212, and the upper surface of the outer wall of the second leak-proof receiving groove 209 is higher than the upper surface of the second bottom plate 212, so as to prevent a certain volume of cleaning liquid from being stored when the second leak-proof receiving groove 209 has poor drainage, and to avoid overflow from the second leak-proof receiving groove 209 after seepage of a smaller volume.

[0048] When the cleaning mechanism cleans and / or glues the sheet, the sprayed cleaning liquid and / or glue will fill the interior of the cleaning barrel 201. If the top opening of the cleaning barrel 201 is not blocked, the scattered cleaning liquid and / or glue will float out of the cleaning barrel 201, affecting the life of the equipment and polluting the environment.

[0049] like Figure 1 and Figure 2 As shown, in order to prevent the cleaning liquid and / or glue from floating out of the cleaning barrel 201, in this embodiment, the cleaning mechanism may further include a water curtain assembly disposed at the top opening of the cleaning barrel 201, and the water curtain assembly may cover and open the top opening of the cleaning barrel 201. When the cleaning mechanism is working, the top opening of the cleaning barrel 201 may be closed by the water curtain assembly to prevent the cleaning liquid and / or glue from floating out; when taking and placing the sheet, the water curtain assembly is opened so that the sheet can be taken and placed through the top opening of the cleaning barrel 201.

[0050] Further, the water curtain assembly may include a water curtain installation platform 206, a water curtain opening and closing device 207, and a water curtain. The water curtain installation platform 206 is arranged on the top outer side of the cleaning barrel 201, and the water curtain installation platform 206 is used to provide an installation basis for the water curtain opening and closing device 207. It should be noted that the water curtain installation platform 206 needs to be arranged on the top outer side of the cleaning barrel 201, and cannot block the top opening of the cleaning barrel 201.

[0051] The water curtain opening and closing device 207 includes a water curtain push-pull driving member 2074 and a water curtain connecting member connected to the output end of the water curtain push-pull driving member 2074. It should be noted that the water curtain push-pull driving member 2074 can be a cylinder, and the reciprocating linear motion output by the cylinder drives the water curtain connecting member to reciprocate. One end of the water curtain is fixed to the water curtain connecting member, and the water curtain is moved by pulling one end of the water curtain through the water curtain connecting member to achieve the movement of the water curtain.

[0052] It should be noted that one end of the water curtain is fixed to the water curtain connector, and the other end can be wound on a spring roller, which is fixed to one end of the water curtain mounting platform 206. When the water curtain is pulled toward the other end of the water curtain mounting platform 206 by the water curtain connector, the spring roller rotates to release the water curtain wound thereon (the spring of the spring roller stores energy), so that the water curtain can cover the top opening of the washing barrel 201. When the water curtain is opened, the water curtain connector drives one end of the water curtain to move toward the direction of the spring roller, and the spring roller resets and reverses to wind up and store the water curtain. In addition, the water curtain can also be a folding shutter structure (i.e., a wave-shaped structure), one end of the water curtain is fixed to one end of the water curtain installation platform 206, and when the water curtain is closed, the water curtain can be pulled to the other end of the water curtain installation platform 206 through the water curtain connector, so that the water curtain is flattened to cover the top opening of the cleaning barrel 201; when the water curtain is opened, the water curtain connector drives one end of the water curtain to move, so as to fold the water curtain and store it at one end of the water curtain installation platform 206. The water curtain can also be a plate-like structure, which drives the plate-like structure to move, and when it moves to the top opening of the cleaning barrel 201, the top opening of the cleaning barrel 201 is covered, and when the top opening of the cleaning barrel 201 is removed, the top opening is exposed.

[0053] The water curtain connection member may include a first slider 2071, a second slider 2072 and a connection arm 2073, wherein the connection arm 2073 connects the first slider 2071 and the second slider 2072. Both sides of the water curtain installation platform 206 are provided with slide rails respectively slidably matched with the first slider 2071 and the second slider 2072. One of the first slider 2071 and the second slider 2072 is connected to the output end of the water curtain push-pull driving member 2074, and the water volume is fixed on the connection arm 2073.

[0054] After the sheet is cleaned, the mist of the cleaning liquid and / or glue inside the cleaning barrel 201 cannot fall for a long time, and will still drift to the outside after the water curtain is opened. Based on this, in this embodiment, a drainage mist pipe 204 connected to the cleaning barrel 201 is provided on the side wall of the cleaning barrel 201. Before the water curtain is opened, the mist inside the cleaning barrel 201 can be drained through the drainage mist pipe 204, and then the water curtain is opened. It can be understood by those skilled in the art that the drainage mist pipe 204 should be connected to the negative pressure device to remove the mist inside the cleaning barrel 201 by negative pressure.

[0055] The bottom wall of the cleaning barrel 201 is provided with a drainage pipe 205 connected to the cleaning barrel 201, and the drainage pipe 205 is used to drain the cleaning liquid discharged during the cleaning process. The inner wall of the cleaning barrel 201 can be attached with a sponge layer 211, which can absorb part of the water mist generated during the cleaning process. At the same time, the sponge layer 211 also has a sound-absorbing effect, which can reduce the noise during the cleaning process.

[0056] like Figure 3 As shown, the bottom plate assembly 219 is supported on the base 202 by the support beam 203, and a vibration isolator 210 is provided between the support beam 203 and the bottom plate assembly 219. By providing the vibration isolator 210, the vibration can be effectively reduced and isolated, and the vibration generated by the cleaning mechanism can be prevented from affecting the processing platform of the laser processing device.

[0057] Further, such as Figure 4 and Figure 5 As shown, a partition 213 is provided in the cleaning barrel 201, and the partition 213 is located between the bottom wall of the cleaning barrel 201 and the placement table 320 of the placement table system 300, and the partition 213 is provided with a through hole, and the sprayed cleaning liquid falls to the bottom of the cleaning barrel 201 through the through hole of the partition 213, and is discharged through the drainage pipe 205. In this embodiment, by providing the partition 213, it is not easy to accumulate water on the partition 213. Even if the drainage is not smooth, the water level will be blocked by the partition 213 below the partition 213.

[0058] The partition 213 can be fixed on the first bottom plate 214. The thickness of the first bottom plate 214 is thicker than the bottom wall of the cleaning barrel 201. Combined with the second folding plate 2011 bent upward of the cleaning barrel 201, a certain distance is created between the partition 213 and the bottom wall of the cleaning barrel 201 to accommodate the cleaning liquid that is not discharged immediately and to keep the area above the partition 213 dry.

[0059] The partition 213 is an annular structure, and its inner circle and the outer circle can be bent upward to form a structure that guides the flow toward the middle, thereby increasing the water collection slope and allowing the cleaning liquid to flow out of the partition 213 through the through holes as quickly as possible.

[0060] The embodiment of the present invention further discloses a cleaning device, which includes a cleaning mechanism 200, a placement table system 300 and a spraying mechanism 100. The cleaning mechanism 200 is the cleaning mechanism 200 disclosed in the above embodiment. Since the cleaning device disclosed in this embodiment has the above cleaning mechanism, it has all the technical effects of the above cleaning mechanism, which will not be described in detail herein.

[0061] The placement table system 300 includes a placement table 320 disposed inside the cleaning mechanism 200 and a placement table driver 310 disposed outside the cleaning mechanism 200. The placement table driver 310 is connected to the placement table 320 through a transmission component to drive the placement table 320 to rotate, and the transmission component is sealed with a bottom plate through a hole. The placement table 320 also includes a ceramic suction cup, which is used to fix the sheet so that the sheet is kept stable when the placement table 320 drives the sheet to rotate. The placement table system 300 is the same as the prior art and will not be described in detail herein.

[0062] like Figure 6 As shown, the spraying mechanism 100 includes a spraying head assembly 120 disposed inside the cleaning mechanism 200 and a spraying driving member 110 disposed outside the cleaning mechanism 200. The spraying head assembly 120 is used to spray cleaning liquid or glue liquid according to the corresponding process.

[0063] The spray drive 110 is connected to the output end of the spray head assembly 120 through the swing rod 140 to drive the spray head assembly 120 to swing. The output end of the spray head assembly 120 passes through the bottom plate assembly 219 and is sealed and connected to the bottom plate assembly 219. The spray drive 110 can be any driving device capable of outputting rotational motion, not limited to a motor, a rotary air pump, etc. The swing rod 140 can be an integrated bending structure or a machined structure, which is not limited herein.

[0064] The spray head assembly 120 corresponding to the cleaning coating device can spray both cleaning liquid and glue liquid. Based on this, when the cleaning device is a cleaning coating device, the spray head assembly 120 at least includes a cleaning liquid atomizing nozzle 121 and a glue coating nozzle 122.

[0065] When the web is coated with glue, the placement table 320 is first used to drive the web to rotate, and then the spray drive 110 drives the spray head assembly 120 to swing back and forth between the center and edge of the web, and at the same time, the cleaning liquid atomizing nozzle 121 sprays the cleaning liquid to clean the web before the web is coated with glue. After the cleaning is completed, the cleaning liquid atomizing nozzle 121 stops spraying the cleaning liquid, and the placement table 320 drives the web to rotate at a high speed to spin off the cleaning liquid on the surface of the web through centrifugal force. After drying, the spray drive 110 drives the spray head assembly 120 to swing back and forth between the center and edge of the web, and at the same time, the glue spraying nozzle 122 sprays the glue to complete the gluing work.

[0066] When the cleaning device is a cleaning apparatus, the spray head assembly 120 at least includes a cleaning liquid atomizing nozzle 121. That is, the cleaning apparatus only needs to clean the processed sheet, so the spray head assembly 120 only needs to be provided with a cleaning liquid atomizing nozzle 121, and its cleaning action is the same as that of the cleaning coating apparatus, which will not be described in detail herein.

[0067] In a specific embodiment of the present invention, the spray head assembly 120 also includes a cleaning liquid inclined nozzle 123, the spray direction of the cleaning liquid atomizing nozzle 121 is perpendicular to the direction of the sheet, and the spray direction of the cleaning liquid inclined nozzle 123 is at an acute angle to the sheet. In this embodiment, both the cleaning liquid atomizing nozzle 121 and the cleaning liquid inclined nozzle 123 can spray cleaning liquid, and the two nozzles can be used at the same time, or one of them can be used. Due to the cleaning liquid atomizing nozzle 121 and the cleaning liquid inclined nozzle 123, there is also a difference in the cleaning effect of the two. The cleaning liquid sprayed by the cleaning liquid inclined nozzle 123 acts on the sheet along an acute angle, which makes it easier to wash away the dirt on the surface of the sheet, but due to the inclined spray, its impact force is smaller than that of the vertical spray. Therefore, the cleaning liquid inclined nozzle 123 and the cleaning liquid atomizing nozzle 121 are used in combination, which can take into account the advantages of the two spray angles and produce a better cleaning effect on the sheet.

[0068] The medium inlet of the glue spray nozzle 122 includes a glue spray inlet and an anti-blocking inlet. The glue spray inlet is used to connect with the glue pump to achieve the function of spraying glue. The anti-blocking inlet can be connected with a cleaning liquid pump, so that after the glue spraying is completed, the cleaning liquid is pumped into the anti-blocking inlet, and the glue spraying port of the glue spray nozzle 122 that is stuck is flushed open by the cleaning liquid to prevent the glue from drying and blocking the glue spraying port, which affects the use.

[0069] The medium inlet of the cleaning liquid atomizing nozzle 121 includes a cleaning liquid inlet and a compressed air inlet. The cleaning liquid inlet is used to connect to a cleaning liquid pump to achieve the function of spraying cleaning liquid, and the compressed air inlet can be connected to a compressed air source or a compressor. During the drying process after the web is cleaned, compressed air can be filled into the compressed air inlet, and compressed air can be sprayed onto the web. Combined with the centrifugal drying process of the placement table 320, the drying process of the web can be accelerated.

[0070] In order to avoid the influence of the spray head assembly 120 on the loading and unloading of the sheet, in this embodiment, Figure 2 As shown, the inner wall of the cleaning barrel 201 has a hidden space 2012 that is recessed outwards. When the spray mechanism 100 is in a non-working state, the spray head assembly 120 is hidden in the hidden space 2012 to leave space above the placement table 320. When the spray head assembly 120 needs to spray cleaning liquid and / or glue, the spray drive 110 drives the spray head assembly 120 to the working position.

[0071] After the glue spraying is completed, the glue spray head 122 needs to spray cleaning liquid to clean the glue spraying port of the glue spray head 122 to prevent the glue from sticking to the glue spraying port and affecting the use. In the process of cleaning the glue spray head 122, the cleaning liquid needs to be sprayed, and some of the glue is also flushed out. If the spraying range is too large, it will contaminate the placement table 320 and even the sheet on the placement table 320.

[0072] like Figure 5As shown, based on this, in this embodiment, a baffle plate 217 is provided in the hidden space 2012, and the baffle plate 217 is used to shield the glue spraying port of the spray head assembly 120. When cleaning the glue spray head 122, the spray head assembly 120 can be swung to the position of the baffle plate 217 through the spray driving member 110, and then the cleaning liquid is sprayed to clean the glue spraying port. The sprayed cleaning liquid and glue liquid will be prevented from splashing to a larger range by the baffle plate 217. There should be a gap between the bottom of the baffle plate 217 and the bottom of the hidden space 2012, so that the sprayed cleaning liquid can flow into the cleaning barrel 201 through the gap and be discharged by the drainage pipe 205.

[0073] Furthermore, the spraying mechanism 100 may also include a spraying lifting device 130, and the spraying driving component 110 is arranged at the output end of the spraying lifting device 130 to drive the spraying driving component 110 to perform lifting and lowering movements. When cleaning the glue spraying nozzle 122, the spraying driving component 110 can be swung to the position of the enclosure plate 217 by the spraying driving component 110, and then the spraying lifting device 130 drives the spraying head assembly 120 to descend, so that the glue spraying port of the glue spraying nozzle 122 is lowered to the inside of the enclosure plate 217, and then the cleaning liquid is sprayed to clean the glue spraying port, which can completely prevent the sprayed cleaning liquid and glue from spreading to the outside. When the spraying head assembly 120 needs to be used, the spraying lifting device 130 is required to drive the spraying driving component 110 to rise, and then swing in the direction above the placement table 320 to prevent collision with the enclosure plate 217.

[0074] The embodiment of the present invention further discloses a laser processing device, which includes the cleaning device disclosed in the above embodiment. Since the above cleaning device is provided, all the technical effects of the above cleaning device are obtained, which will not be described in detail herein.

[0075] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements. The elements defined by the sentence "includes a..." do not exclude the existence of other identical elements in the process, method, commodity or device that includes the elements.

[0076] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0077] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0078] The principles and implementation methods of the present invention are described in this article using specific examples. The description of the above embodiments is only used to help understand the method and core ideas of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A cleaning mechanism, characterized in that: include: A cleaning barrel (201), wherein the bottom of the cleaning barrel (201) has a first through hole (2013); A bottom plate assembly (219), the bottom of the cleaning barrel (201) being fixed on the bottom plate assembly (219), and the bottom plate assembly (219) having a bottom plate through hole in communication with the first through hole (2013), the bottom plate through hole being used for sealingly connecting with a placement table system (300), the placement table system (300) having a placement table (320) located in the cleaning barrel (201) and used for placing a sheet; The first leak-proof component comprises a first leak-proof receiving groove (215) fixed on the bottom plate assembly (219) and arranged around the bottom plate through holes, and a first leak-proof drainage component (218) connected to the bottom of the first leak-proof receiving groove (215).

2. The cleaning mechanism according to claim 1, characterized in that: The bottom plate assembly (219) comprises a first bottom plate (214) and a second bottom plate (212) arranged at the bottom of the first bottom plate (214); The first bottom plate (214) is arranged in the first through hole (2013), the bottom plate through hole comprises a second through hole arranged on the first bottom plate (214), and the second through hole is sealedly connected to the placement table system (300); The bottom of the cleaning barrel body (201) is fixed on the second bottom plate (212); the bottom plate through hole further comprises a third through hole (2121) provided on the second bottom plate (212); the first side wall of the first leak-proof receiving groove (215) is fixed on the second bottom plate (212); the second side wall extends into the third through hole (2121) and extends in the direction of the first bottom plate (214); and the height of the second side wall is higher than the height of the upper surface of the second bottom plate (212).

3. The cleaning mechanism according to claim 2, characterized in that: The bottom plate assembly (219) comprises a third bottom plate (216), the third bottom plate (216) being arranged on the upper surface of the first bottom plate (214), and the edge of the third bottom plate (216) having a first folding plate (2161) bent downward; The bottom of the cleaning barrel body (201) has a second folding plate (2011) that is folded upward, the second folding plate (2011) surrounds the first through hole (2013), the first folding plate (2161) is located on the outer circle of the second folding plate (2011) and together with the second folding plate (2011) and the bottom of the cleaning barrel body (201) surrounds a leak-proof groove for waterproofing, and the first folding plate (2161) and the second folding plate (2011) have an overlapping area in the height direction.

4. The cleaning mechanism according to claim 3, characterized in that: The second folding plate (2011) comprises a second upper folding plate extending upward and a second side folding plate located at the end of the second upper folding plate and extending in the direction of the first folding plate (2161).

5. The cleaning mechanism according to claim 2, characterized in that: It also includes a second leak-proof component, which includes a second leak-proof receiving groove (209) fixed to the outer ring of the second bottom plate (212) and a second leak-proof drainage component (208) connected to the bottom of the second leak-proof receiving groove (209).

6. The cleaning mechanism according to claim 5, characterized in that: The bottom wall of the second anti-leakage receiving groove (209) is fixed to the bottom of the second bottom plate (212), and the upper surface of the outer side wall of the second anti-leakage receiving groove (209) is higher than the upper surface of the second bottom plate (212).

7. The cleaning mechanism according to any one of claims 1 to 6, characterized in that: The side wall of the cleaning barrel (201) is provided with a drainage mist pipe (204) connected to the cleaning barrel (201); and / or, The bottom wall of the cleaning barrel (201) is provided with a drainage pipe (205) communicating with the cleaning barrel (201); and / or, A partition (213) is provided in the cleaning barrel (201), the partition (213) is located between the bottom wall of the cleaning barrel (201) and the placement table (320) of the placement table system (300), and the partition (213) is provided with a through hole; and / or, The inner wall of the cleaning barrel (201) is adhered with a sponge layer (211).

8. The cleaning mechanism according to any one of claims 1 to 6, characterized in that: The bottom plate assembly (219) is supported on the base (202) via a support beam (203), and a vibration isolation member (210) is provided between the support beam (203) and the bottom plate assembly (219).

9. A cleaning device, characterized in that: include: A cleaning mechanism (200), which is the cleaning mechanism (200) according to any one of claims 1 to 8; A placement table system (300) comprises a placement table (320) arranged inside the cleaning barrel (201) and a placement table driving component (310) arranged outside the cleaning barrel (201), wherein the placement table driving component (310) is connected to the placement table (320) via a transmission component to drive the placement table (320) to rotate, and the transmission component is sealedly connected to the bottom plate via a hole; The spraying mechanism (100) comprises a spray head assembly (120) arranged inside the cleaning barrel (201) and a spray driving component (110) arranged outside the cleaning barrel (201); the spray driving component (110) is connected to the output end of the spray head assembly (120) via a swing rod (140) to drive the spray head assembly (120) to swing; and the output end of the spray head assembly (120) passes through the bottom plate assembly (219) and is sealed to the bottom plate assembly (219).

10. The cleaning device according to claim 9, characterized in that When the cleaning device is a cleaning coating device, the spray head assembly (120) comprises at least a cleaning liquid atomizing nozzle (121) and a glue coating nozzle (122); When the cleaning equipment is a cleaning device, the spray head assembly (120) comprises at least a cleaning liquid atomizing nozzle (121).

11. The cleaning device according to claim 10, characterized in that: The spray head assembly (120) further comprises a cleaning liquid inclined spray head (123); the spray direction of the cleaning liquid atomizing spray head (121) is perpendicular to the direction of the material sheet; and the spray direction of the cleaning liquid inclined spray head (123) forms an acute angle with the material sheet.

12. The cleaning device according to claim 10, characterized in that: The medium inlet of the glue coating nozzle (122) comprises a glue coating inlet and an anti-blocking inlet; and / or, The medium inlet of the cleaning liquid atomizing nozzle (121) comprises a cleaning liquid inlet and a compressed gas inlet.

13. The cleaning device according to claim 9, characterized in that: The inner wall of the cleaning barrel (201) has a hidden space (2012) that is recessed outwards, and when the spraying mechanism (100) is in a non-working state, the spraying head assembly (120) is hidden in the hidden space (2012).

14. A laser processing device, characterized in that: Comprising a cleaning device as described in any one of claims 9-13.

Images