Chemical mechanical grinding device

Abstract

The invention relates to the field of chemical mechanical grinding, and discloses a chemical mechanical grinding device which comprises a machine body, a grinding head, a cleaning brush and a grinding head driving device. The grinding assembly is mounted in the machine body and used for grinding the parts; the first driving mechanism is installed in the grinding assembly and used for driving the rotating plate to rotate, and a grinding pad is installed on one face of the rotating plate; the second driving mechanism is installed at the inner bottom of the grinding assembly and used for driving the rotating plate to swing; the liquid spraying mechanism is installed on one side of the inner wall of the machine body and used for conveying liquid to the surface of the grinding pad. The rotating plate can be driven to rotate through the first driving mechanism, the support and the rotating shaft can be driven to rotate with the supporting rod as a rotating shaft through the second driving mechanism, then the rotating plate is driven to rotate, the rotating plate can be adjusted to be in a horizontal state at the moment, and therefore the machining precision is improved.

Description

Technical Field

[0001] The invention relates to the field of chemical mechanical polishing, in particular to a chemical mechanical polishing device. Background Art

[0002] Chemical Mechanical Planarization (CMP) is a precision machining technology that combines chemical and mechanical effects. It is widely used in semiconductor manufacturing, optical component processing, and precision machinery manufacturing. This process uses chemical solutions to assist grinding during the grinding process, which can not only flatten the surface of the workpiece, but also improve the surface quality and reduce surface defects. During the chemical mechanical polishing process, the polishing pad contacts the surface of the workpiece and achieves uniform material removal through rotation and oscillation combined with the action of the chemical solution.

[0003] However, existing chemical mechanical polishing devices still have some shortcomings in practical applications: the contact between the rotating plate and the polishing pad of the polishing device is not always uniform, which may lead to inconsistent surface polishing effects and affect the quality of the workpiece. Secondly, many existing devices lack effective adjustment mechanisms, especially when adjusting the angle between the rotating plate and the polishing pad, which often cannot be accurately controlled, resulting in errors and instability in the polishing process. Summary of the invention

[0004] In view of the deficiencies of the prior art, the present invention provides a chemical mechanical polishing device, which solves the problems of uneven contact and insufficient adjustment accuracy during the polishing process in the prior art, which lead to polishing errors and instability.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a chemical mechanical polishing device, comprising: A machine body, inside which a grinding head and a cleaning brush are installed; A grinding assembly, which is installed inside the machine body and is used to grind the parts; A driving mechanism 1, which is installed inside the grinding assembly and is used to drive the rotating plate to rotate, and a grinding pad is installed on one side of the rotating plate; A second driving mechanism, which is installed at the inner bottom of the grinding assembly and is used to drive the rotating plate to swing; The liquid spraying mechanism is installed on one side of the inner wall of the machine body and is used to transport liquid to the surface of the polishing pad.

[0006] Preferably, the grinding assembly includes a base, the rotating plate is located at the inner bottom of the base, the bottom surface of the rotating plate is slidably connected to a bracket, and the driving mechanism is installed at the inner bottom of the bracket.

[0007] Preferably, the driving mechanism 1 includes a motor 1, the output end of the motor 1 is fixedly connected to a worm, one side of the worm is rotatably connected to a support plate, the support plate and the motor 1 are both fixedly connected to the bottom of the bracket, one side of the worm is connected to a worm wheel, the middle part of the worm wheel is fixedly connected to a rotating shaft, the bottom of the rotating shaft is rotatably connected to the bracket, and the top is fixedly connected to the middle part of the bottom surface of the rotating plate.

[0008] Preferably, the second driving mechanism includes a second motor, the output end of the second motor is fixedly connected to a gear, one side of the gear is meshingly connected to a gear ring, the gear ring is fixedly connected to the bottom of the bracket, the top of the outer wall of the rotating shaft is rotatably connected to a sleeve, one side of the sleeve is fixedly connected to a support rod, and one end of the support rod is rotatably connected to the top of the inner side wall of the base.

[0009] Preferably, a holder is fixedly connected to the top of the inner side wall of the base, a slot is provided in the middle of one side of the holder, and one end of the support rod is rotatably connected to the inside of the slot.

[0010] Preferably, an adjustment mechanism is provided on the bottom surface of the base, and the adjustment mechanism includes a bottom plate and a motor four, the bottom plate is fixedly connected to the bottom surface of the base, the output end of the motor four is fixedly connected to a bidirectional screw, one side of the bidirectional screw is rotatably connected to a fixing plate, both sides of the outer wall of the bidirectional screw are meshingly connected with connecting blocks, both sides of the connecting blocks on both sides are fixedly connected with push blocks, the top surfaces of the push blocks on both sides are respectively in contact with both sides of the bottom surface of the bottom plate, and the cross-section of the bottom plate is set to a V shape, the motor four and the fixing plate are fixedly connected to the inside of the machine body, and the push block and the connecting block are slidably connected to the inside of the machine body.

[0011] Preferably, a slide rail is fixedly connected to the bottom surface of the bottom plate, and slide grooves are provided on the top surfaces of the push blocks on both sides, and the outer wall of the slide rail is slidably connected to the inner wall of the slide groove.

[0012] Preferably, a retaining ring is fixedly connected to the inside of the base, the cross-section of the retaining ring is set to a convex shape, and a drain port and a wire inlet hole are respectively opened in the middle and bottom of one side of the base, the wire inlet hole is used to insert the power cord, the bottom of the drain port and the top surface of one side of the retaining ring are on the same horizontal line, and a drain pipe is installed inside the drain port.

[0013] Preferably, the liquid spraying mechanism includes a cross arm, which is installed on the top surface of the machine body, a support block is installed on one side of the interior of the cross arm, a nozzle is installed on the bottom of the support block, a liquid outlet pipe is connected to the top of the support block, a liquid storage tank is fixedly connected to the top surface of the cross arm, a liquid inlet pipe is connected to one side of the liquid storage tank, and the liquid inlet pipe, liquid storage tank, liquid outlet pipe, support block and nozzle are interconnected.

[0014] Preferably, a sliding rod is fixedly connected to one side of the support block, a spring is sleeved on the outer wall of the sliding rod, a pull plate is fixedly connected to one side of the sliding rod, the pull plate is slidably connected to the inside of the cross arm, a motor three is fixedly connected to the bottom of the cross arm, an eccentric wheel is fixedly connected to the output end of the motor three, and the outer wall of the eccentric wheel is in contact with one side of the pull plate.

[0015] The present invention provides a chemical mechanical polishing device having the following beneficial effects: 1. The present invention can drive the rotating plate to rotate through the driving mechanism 1, and can drive the bracket and the rotating shaft to rotate along the support rod as the rotating axis through the driving mechanism 2, thereby driving the rotating plate to rotate. At this time, the rotating plate can be adjusted to be in a horizontal state, thereby improving the processing accuracy.

[0016] 2. The present invention can drive the bidirectional screw to rotate by driving motor 4, and at this time, it can drive the push blocks on both sides to approach or move away from each other. Since the cross-section of the bottom plate is set to be V-shaped, when the two push blocks are close to each other, the bottom plate can be squeezed to make it close to the grinding head. When the push blocks on both sides move away from each other, the bottom plate will move away from the grinding head, thereby adjusting the distance between the grinding pad on the rotating plate and the grinding head, ensuring that the distance between the grinding pad and the grinding head adapts to different process requirements, thereby improving the stability and consistency of the grinding process.

[0017] 3. The present invention connects the liquid inlet pipe with the delivery pump, so that the liquid can be delivered to the top surface of the grinding pad. The driving motor three can drive the eccentric wheel to rotate. When the long diameter side of the eccentric wheel contacts the pull plate, the pull plate can slide inside the cross arm, and then the slide rod is pulled to drive the support block to approach the motor three. At this time, the spring is compressed. When the short diameter side of the eccentric wheel contacts the pull plate, the elastic force of the spring will push the support block away from the motor three, and then the nozzle will move back and forth, thereby improving the uniformity of the liquid distribution on the grinding pad, which is beneficial to ensure the accuracy of chemical mechanical grinding. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a schematic diagram of the structure of the polishing pad of the present invention; Figure 3 It is a schematic diagram of the internal structure of the base of the present invention; Figure 4 It is a schematic diagram of the structure of the retaining ring part of the present invention; Figure 5 This is a structural breakdown diagram of the rotating shaft of the present invention; Figure 6 This is a structural breakdown diagram of the gear portion of the present invention; Figure 7 This is a disassembled diagram of the bottom plate structure of the present invention; Figure 8 This is a structural breakdown diagram of the cross arm portion of the present invention.

[0019] Among them, 1, body; 2, grinding head; 3, cleaning brush; 4, grinding assembly; 41, base; 42, rotating plate; 43, bracket; 44, rotating shaft; 45, driving mechanism 1; 451, motor 1; 452, worm; 453, support plate; 454, worm gear; 46, driving mechanism 2; 461, motor 2; 462, gear; 463, gear ring; 464, sleeve; 465, support rod; 466, holder; 467, slot; 5, spray mechanism; 51, horizontal arm; 52, support block; 53, nozzle; 54, liquid storage tank; 55, liquid inlet pipe; 56, liquid outlet pipe; 57, slide rod; 58, spring; 59, pull plate; 560, motor three; 561, eccentric wheel; 6, adjustment mechanism; 61, bottom plate; 62, motor four; 63, two-way screw; 64, fixing plate; 65, connecting block; 66, push block; 67, slide rail; 68, slide groove; 7, grinding pad; 8, retaining ring; 9, drain pipe; 10, drain port; 11, wire inlet hole. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the specification of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] In order to better understand the present invention, the above contents are described in detail below in conjunction with specific embodiments.

[0022] Please see attached Figure 1 -Attached Figure 8 The embodiment of the present invention provides a chemical mechanical polishing device, including: a body 1, in which a polishing head 2 and a cleaning brush 3 are installed; a polishing assembly 4, which is installed inside the body 1 and is used to polish parts; a driving mechanism 1 45, which is installed inside the polishing assembly 4 and is used to drive a rotating plate 42 to rotate, and a polishing pad 7 is installed on one side of the rotating plate 42; a driving mechanism 2 46, which is installed at the inner bottom of the polishing assembly 4 and is used to drive the rotating plate 42 to swing; a liquid spraying mechanism 5, which is installed on one side of the inner wall of the body 1 and is used to transport liquid to the surface of the polishing pad 7.

[0023] In this embodiment, the driving mechanism 1 45 is installed in the grinding assembly 4, and is used to drive the rotating plate 42 and the grinding pad 7 to rotate. The grinding head 2 can clamp the workpiece, and the driving mechanism 2 46 can be used to drive the rotating plate 42 to swing. At this time, the horizontality of the rotating plate 42 can be adjusted, thereby improving the processing accuracy while adapting to different process requirements.

[0024] Please see attached Figure 3 -Attached Figure 5 The grinding assembly 4 includes a base 41, a rotating plate 42 is located at the inner bottom of the base 41, a bracket 43 is slidably connected to the bottom of the rotating plate 42, and a driving mechanism 45 is installed at the inner bottom of the bracket 43. The driving mechanism 45 includes a motor 451, a worm 452 is fixedly connected to the output end of the motor 451, a support plate 453 is rotatably connected to one side of the worm 452, the support plate 453 and the motor 451 are both fixedly connected to the bottom of the bracket 43, a worm wheel 454 is connected to one side of the worm 452, a rotating shaft 44 is fixedly connected to the middle of the worm wheel 454, the bottom of the rotating shaft 44 is rotatably connected to the bracket 43, and the top is fixedly connected to the middle of the bottom surface of the rotating plate 42.

[0025] In this embodiment, the driving motor 451 can drive the worm 452 to rotate, and then the worm 452 drives the worm wheel 454 to rotate the rotating shaft 44, and then the rotating shaft 44 drives the rotating plate 42 to rotate, and then the rotating plate 42 can drive the grinding pad 7 to rotate. At this time, the grinding pad 7 can be used to drive the workpiece at the bottom of the grinding head 2 for mechanical grinding.

[0026] Please see attached Figure 3 -Attached Figure 6 The second driving mechanism 46 includes a second motor 461, the output end of the second motor 461 is fixedly connected to a gear 462, one side of the gear 462 is meshedly connected to a gear ring 463, the gear ring 463 is fixedly connected to the bottom of the bracket 43, the top of the outer wall of the rotating shaft 44 is rotatably connected to a sleeve 464, one side of the sleeve 464 is fixedly connected to a support rod 465, one end of the support rod 465 is rotatably connected to the top of the inner side wall of the base 41. A clamping seat 466 is fixedly connected to the top of the inner side wall of the base 41, a clamping slot 467 is provided in the middle of one side of the clamping seat 466, and one end of the support rod 465 is rotatably connected to the inside of the clamping slot 467.

[0027] In this embodiment, the driving motor 461 can drive the gear 462 to rotate, and the gear 462 can drive the gear ring 463 and the bracket 43 to move. Therefore, when the driving motor 461 rotates forward or reversely, it can drive the gear ring 463 to swing, and then drive the rotating shaft 44, the rotating plate 42, the grinding pad 7 and the support rod 465 to rotate along the middle part of the swinging seat 466 as the rotation axis. At this time, the purpose of adjusting the level of the grinding pad 7 can be achieved, thereby ensuring the grinding accuracy.

[0028] Please see attached Figure 3 , Figure 4 and Figure 7The bottom surface of the base 41 is provided with an adjustment mechanism 6, which includes a bottom plate 61 and a motor 4 62. The bottom plate 61 is fixedly connected to the bottom surface of the base 41. The output end of the motor 4 62 is fixedly connected to a bidirectional screw 63. A fixed plate 64 is rotatably connected to one side of the bidirectional screw 63. Both sides of the outer wall of the bidirectional screw 63 are meshedly connected with a connecting block 65. Both sides of the connecting blocks 65 are fixedly connected with push blocks 66. The top surfaces of the push blocks 66 on both sides are in contact with both sides of the bottom surface of the bottom plate 61, and the cross section of the bottom plate 61 is set to be V-shaped. The motor 4 62 and the fixed plate 64 are fixedly connected to the inside of the body 1. The push blocks 66 and the connecting blocks 65 are slidably connected to the inside of the body 1. The bottom surface of the bottom plate 61 is fixedly connected to a slide rail 67. The top surfaces of the push blocks 66 on both sides are provided with a slide groove 68. The outer wall of the slide rail 67 is slidably connected to the inner wall of the slide groove 68.

[0029] In this embodiment, the bidirectional screw 63 is driven to rotate by driving motor 4 62, and the bidirectional screw 63 can be used to make the push blocks 66 on both sides approach or move away from each other, and cooperate with the bottom plate 61 with a V-section. Therefore, when the push blocks 66 on both sides approach each other, the push blocks 66 will squeeze the bottom plate 61 to move it upward, thereby driving the base 41 and the grinding pad 7 to approach the grinding head 2, and when the push blocks 66 on both sides move away from each other, the grinding pad 7 will move away from the grinding head 2, thereby achieving the purpose of adjusting the grinding pressure, and a slide rail 67 is also installed at the bottom of the bottom plate 61, so the stability of the operation of the bottom plate 61 can be improved by the mutual engagement of the slide groove 68 and the slide rail 67.

[0030] Please see attached Figure 3 , Figure 4 and Figure 8 The base 41 is fixedly connected with a retaining ring 8 inside, and the cross section of the retaining ring 8 is set to be convex, and the middle and bottom of one side of the base 41 are respectively provided with a liquid discharge port 10 and a wire inlet hole 11, and the wire inlet hole 11 is used to insert the power line, and the bottom of the liquid discharge port 10 is at the same horizontal line as the top surface of one side of the retaining ring 8, and a liquid discharge pipe 9 is installed inside the liquid discharge port 10. The liquid spraying mechanism 5 includes a cross arm 51, which is installed on the top surface of the body 1, a support block 52 is installed on one side of the inside of the cross arm 51, a nozzle 53 is installed on the bottom of the support block 52, and a liquid outlet pipe 56 is connected to the top of the support block 52, and a liquid storage tank 54 is fixedly connected to the top surface of the cross arm 51, and a liquid inlet pipe 55 is connected to one side of the liquid storage tank 54, and the liquid inlet pipe 55, the liquid storage tank 54, the liquid outlet pipe 56, the support block 52 and the nozzle 53 are connected to each other. A slide rod 57 is fixedly connected to one side of the support block 52, and a spring 58 is sleeved on the outer wall of the slide rod 57. A pull plate 59 is fixedly connected to one side of the slide rod 57. The pull plate 59 is slidably connected to the inside of the cross arm 51. A motor three 560 is fixedly connected to the bottom of the cross arm 51, and an eccentric wheel 561 is fixedly connected to the output end of the motor three 560. The outer wall of the eccentric wheel 561 contacts one side of the pull plate 59.

[0031] In this embodiment, the liquid inlet pipe 55 is connected to the delivery pump. At this time, the delivery pump can deliver the liquid along the liquid inlet pipe 55 to the liquid storage tank 54, and guide the liquid into the support block 52 through the liquid outlet pipe 56 and finally spray it out from the nozzle 53. The sprayed liquid will be on the surface of the polishing pad 7, and after the driving motor 3 560 drives the eccentric wheel 561 to rotate, when the long diameter side of the eccentric wheel 561 contacts the pull plate 59, the pull plate 59 will pull the slide bar 57 to make the support block 52 and the nozzle 53 close to the motor 3 560, and at this time the spring 58 is Compression, when the short diameter side of the eccentric wheel 561 contacts the pull plate 59, the elastic force of the spring 58 pushes the support block 52 away from the motor three 560, so that the nozzle 53 can move back and forth along the cross arm 51, thereby improving the uniformity of the distribution of the liquid on the grinding pad 7, which is beneficial to ensure the accuracy of chemical mechanical grinding; and when the liquid falls from the grinding pad 7, it will fall into the cavity formed by the enclosure between the retaining ring 8 and the inner wall of the base 41. At this time, the collected waste liquid can be recovered by connecting the waste liquid collection pipe with the drain pipe 9.

[0032] Working principle: When in use, first turn on the motor 451, use the motor 451 to drive the worm 452 to rotate, use the worm 452 to drive the worm wheel 454 to rotate, and then the worm wheel 454 will drive the rotating shaft 44, the rotating plate 42 and the grinding pad 7 to rotate; Then the liquid inlet pipe 55 is connected to the delivery pump. At this time, the delivery pump can deliver the liquid along the liquid inlet pipe 55 to the liquid storage tank 54, and then enter the support block 52 through the liquid outlet pipe 56, and finally spray out from the nozzle 53 and fall on the top surface of the polishing pad 7, and then drive the cleaning brush 3; At this time, the workpiece can be grasped by the grinding head 2, and then the grinding head 2 is moved to drive the workpiece to move and contact with the grinding pad 7, and the chemical mechanical grinding of the workpiece can be achieved; When it is necessary to adjust the horizontality of the rotating plate 42 and the grinding pad 7, the second motor 461 is driven, and the second motor 461 is used to drive the gear 462 to rotate. At this time, the gear 462 can drive the gear ring 463 to move, and then the gear ring 463 will drive the bracket 43, the rotating shaft 44, the rotating plate 42, the grinding pad 7, the sleeve 464 and the support rod 465 to rotate along the middle part of the holder 466 as the rotating axis, and the rotating plate 42 and the grinding pad 7 can be driven to swing back and forth by the forward and reverse rotation of the second motor 461, thereby achieving the purpose of adjusting the level; The driving motor 4 62 can drive the bidirectional screw 63 to rotate, and the bidirectional screw 63 will drive the connecting blocks 65 and the push blocks 66 on both sides to move closer to or farther away from each other. Since the bottom plate 61 is set in a V shape, when the push blocks 66 on both sides are close to each other, the push blocks 66 on both sides will squeeze the bottom plate 61, so that the bottom plate 61 drives the base 41 to move upward, and the grinding pad 7 will be close to the grinding head 2. When the push blocks 66 on both sides are away from each other, the grinding pad 7 will be away from the grinding head 2. When the liquid is sprayed out from the nozzle 53, the motor three 560 is driven. At this time, the motor three 560 can drive the eccentric wheel 561 to rotate. When the long diameter side of the eccentric wheel 561 contacts the pull plate 59, the pull plate 59 slides inside the cross arm 51 and pulls the slide bar 57 to drive the support block 52 to slide inside the cross arm 51. At this time, the support block 52 drives the nozzle 53 to approach the motor three 560 and compresses the spring 58. When the short diameter side of the eccentric wheel 561 contacts the pull plate 59, the elastic force of the spring 58 pushes the support block 52 away from the motor three 560, so that the nozzle 53 can move back and forth along the cross arm 51, thereby improving the uniformity of the distribution of the liquid on the polishing pad 7, which is beneficial to ensure the accuracy of chemical mechanical polishing.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A chemical mechanical polishing device, characterized in that: include: A machine body (1) having a grinding head (2) and a cleaning brush (3) installed therein; A grinding assembly (4), which is installed inside the machine body (1) and is used to grind components; A driving mechanism 1 (45) is installed inside the grinding assembly (4) and is used to drive the rotating plate (42) to rotate, wherein a grinding pad (7) is installed on one side of the rotating plate (42); A second driving mechanism (46) is mounted on the inner bottom of the grinding assembly (4) and is used to drive the rotating plate (42) to swing; A liquid spraying mechanism (5) is mounted on one side of the inner wall of the machine body (1) and is used to transport liquid to the surface of the polishing pad (7).

2. A chemical mechanical polishing device according to claim 1, characterized in that: The grinding assembly (4) comprises a base (41), the rotating plate (42) is located at the inner bottom of the base (41), the bottom surface of the rotating plate (42) is slidably connected to a bracket (43), and the driving mechanism (45) is installed at the inner bottom of the bracket (43).

3. A chemical mechanical polishing device according to claim 2, characterized in that: The driving mechanism 1 (45) comprises a motor 1 (451), the output end of the motor 1 (451) being fixedly connected to a worm (452), one side of the worm (452) being rotatably connected to a support plate (453), the support plate (453) and the motor 1 (451) being fixedly connected to the bottom of a bracket (43), one side of the worm (452) being connected to a worm wheel (454), the middle of the worm wheel (454) being fixedly connected to a rotating shaft (44), the bottom of the rotating shaft (44) being rotatably connected to the bracket (43), and the top of the rotating shaft (44) being fixedly connected to the middle of the bottom surface of the rotating plate (42).

4. A chemical mechanical polishing device according to claim 3, characterized in that: The second driving mechanism (46) comprises a second motor (461), the output end of the second motor (461) is fixedly connected to a gear (462), one side of the gear (462) is meshingly connected to a gear ring (463), the gear ring (463) is fixedly connected to the bottom of the bracket (43), the top of the outer wall of the rotating shaft (44) is rotatably connected to a sleeve (464), one side of the sleeve (464) is fixedly connected to a support rod (465), and one end of the support rod (465) is rotatably connected to the top of the inner side wall of the base (41).

5. A chemical mechanical polishing device according to claim 4, characterized in that: A clamping seat (466) is fixedly connected to the top of the inner side wall of the base (41), a clamping slot (467) is provided in the middle of one side of the clamping seat (466), and one end of the support rod (465) is rotatably connected to the inside of the clamping slot (467).

6. A chemical mechanical polishing device according to claim 5, characterized in that: The bottom surface of the base (41) is provided with an adjustment mechanism (6), the adjustment mechanism (6) comprising a bottom plate (61) and a motor (62), the bottom plate (61) being fixedly connected to the bottom surface of the base (41), the output end of the motor (62) being fixedly connected to a bidirectional screw (63), one side of the bidirectional screw (63) being rotatably connected to a fixing plate (64), both sides of the outer wall of the bidirectional screw (63) being meshingly connected to connecting blocks (65), both sides of the connecting blocks (65) being fixedly connected to push blocks (66), the top surfaces of the push blocks (66) on both sides being in contact with both sides of the bottom surface of the bottom plate (61), and the cross section of the bottom plate (61) being arranged in a V-shape, the motor (62) and the fixing plate (64) being fixedly connected to the inside of the machine body (1), and the push blocks (66) and the connecting blocks (65) being slidably connected to the inside of the machine body (1).

7. A chemical mechanical polishing device according to claim 6, characterized in that: The bottom surface of the bottom plate (61) is fixedly connected to a slide rail (67), the top surfaces of the push blocks (66) on both sides are provided with slide grooves (68), and the outer wall of the slide rail (67) is slidably connected to the inner wall of the slide groove (68).

8. A chemical mechanical polishing device according to claim 7, characterized in that: A retaining ring (8) is fixedly connected to the interior of the base (41), the retaining ring (8) having a convex cross-section, and a liquid discharge port (10) and a wire inlet hole (11) are respectively provided in the middle and bottom of one side of the base (41), the wire inlet hole (11) being used to insert a power cord, the bottom of the liquid discharge port (10) and the top surface of one side of the retaining ring (8) being on the same horizontal line, and a liquid discharge pipe (9) is installed inside the liquid discharge port (10).

9. The chemical mechanical polishing device according to claim 1, characterized in that: The liquid spraying mechanism (5) comprises a cross arm (51), the cross arm (51) being mounted on the top surface of the machine body (1), a support block (52) being mounted on one side of the interior of the cross arm (51), a spray head (53) being mounted on the bottom of the support block (52), a liquid outlet pipe (56) being connected to the top of the support block (52), a liquid storage tank (54) being fixedly connected to the top surface of the cross arm (51), a liquid inlet pipe (55) being connected to one side of the liquid storage tank (54), and the liquid inlet pipe (55), the liquid storage tank (54), the liquid outlet pipe (56), the support block (52) and the spray head (53) being connected to one another.

10. The chemical mechanical polishing device according to claim 9, characterized in that: A sliding rod (57) is fixedly connected to one side of the support block (52), and a spring (58) is sleeved on the outer wall of the sliding rod (57). A pulling plate (59) is fixedly connected to one side of the sliding rod (57), and the pulling plate (59) is slidably connected to the inside of the cross arm (51). A motor three (560) is fixedly connected to the bottom of the cross arm (51), and an eccentric wheel (561) is fixedly connected to the output end of the motor three (560), and the outer wall of the eccentric wheel (561) is in contact with one side of the pulling plate (59).

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