A high-precision alumina ceramic arm positioning fixture and processing method thereof

Abstract

The present invention discloses a high-precision alumina ceramic arm positioning fixture, including a suction cup base, a vent hole connected to an external vacuum device and a sealed airway cavity connected to the vent hole are arranged on the suction cup base, and an adsorption structure connected to the sealed airway cavity and a positioning adjustment structure for adjusting and positioning are arranged on the suction cup base. A method for processing a ceramic arm using a high-precision alumina ceramic arm positioning fixture is also disclosed. The high-precision alumina ceramic arm positioning fixture adopts adsorption positioning and can adopt a high-flatness suction cup base, which can further improve the processing accuracy of the ceramic arm and make its surface degree reach below 0.02mm. The complicated operation of wax sticking clamping and positioning is avoided, positioning is convenient, and production efficiency is greatly improved. At the same time, the positioning fixture is provided with an adjustment positioning structure to realize universal design, which can meet the clamping and positioning requirements of ceramic arms of different specifications and save production costs.

Description

Technical Field

[0001] The invention relates to the technical field of ceramics, and mainly to a high-precision alumina ceramic arm positioning fixture and a processing method thereof. Background Art

[0002] The ceramic robotic arm, also known as the end effector, ceramic manipulator, etc., mainly plays the role of conveying and handling in semiconductor equipment. It is equivalent to the hand of the robot of the semiconductor equipment, responsible for transporting silicon wafers to the designated location.

[0003] With the rapid development of the semiconductor industry in recent years, the requirements for such products have changed towards thinner thickness and higher surface accuracy.

[0004] The surface flatness of traditional alumina ceramic arms is mainly processed by wax clamping. Due to the thin thickness of the product (generally 1~5mm), and the need to heat the wax during the bonding process, slight deformation of the product often occurs during the bonding process. The surface flatness after bonding cannot reach an accuracy below 0.02mm, making it difficult to meet the needs of high-precision market products.

[0005] Therefore, it is necessary to develop a new surface flatness processing method for alumina ceramic arms with thin thickness and high surface precision, which can improve the processing precision of ceramic arm products, so that the surface flatness of alumina ceramic arms can reach an accuracy of less than 0.02mm, and it is easy to process. Summary of the invention

[0006] The purpose of the present invention is to solve the problems that the surface flatness of alumina ceramic arms processed by wax clamping is deformed, the surface flatness after bonding cannot reach an accuracy below 0.02mm, and it is difficult to meet the needs of high-precision market products. A method for processing the surface flatness of high-precision alumina ceramic arms is provided, which can improve the processing accuracy of ceramic arm products, so that the surface flatness of alumina ceramic arms can reach an accuracy below 0.02mm, and the processing is convenient.

[0007] The technical solution adopted by the present invention to achieve its first invention purpose is: a high-precision alumina ceramic arm positioning fixture, including a suction cup base, a vent hole connected to an external vacuum device and a closed airway cavity connected to the vent hole are provided on the suction cup base, and an adsorption structure connected to the sealed airway cavity and a positioning adjustment structure for adjusting the positioning are provided on the suction cup base. The high-precision alumina ceramic arm positioning fixture utilizes the vacuum negative pressure adsorption principle, by providing a suction cup base, and providing a vent hole, a closed airway cavity and an adsorption structure on the suction cup base, so that the alumina ceramic arm to be finely processed can be adsorbed, clamped and positioned, thereby ensuring high-precision processing in the machining center without movement or deformation, thereby effectively improving the machining accuracy of the ceramic arm product. Due to the use of adsorption positioning, a high-flatness suction cup base can be used, which can further improve the machining accuracy of the ceramic arm, so that its surface degree can reach below 0.02mm. Moreover, the use of this positioning fixture avoids the complicated operation of wax sticking clamping and positioning, facilitates positioning, and greatly improves production efficiency. At the same time, the positioning fixture is provided with an adjustable positioning structure to achieve a universal design, which can meet the clamping and positioning requirements of ceramic arms of different specifications and save production costs.

[0008] Preferably, the suction cup base includes a base body and a replaceable and adjustably arranged adsorption plane on the base body, the base body is provided with an airway cavity, and the adsorption plane covers the base body to form a closed airway cavity. The adsorption plane is arranged on the suction cup base, and preferably the adsorption plane is arranged separately from the base body, so that corresponding adsorption planes can be arranged according to the adsorption and positioning needs of different types of ceramic arms, which can meet the requirements of universal design, and can realize the clamping and positioning needs of ceramic arms of different specifications and models through one base body. Moreover, since only the adsorption plane needs to be replaced, the cost is saved, and the accuracy of the suction cup base itself can be guaranteed at the same time, and there is no need to process the base body differently, thereby reducing the influence of cumulative errors on the accuracy.

[0009] Preferably, the adsorption plane is provided with at least one layer, an adsorption area is provided on the adsorption plane, and the adsorption structure is provided in the adsorption area of ​​the adsorption plane; when the adsorption plane is provided with multiple layers, the adsorption structures on different adsorption planes are provided in a staggered manner. The adsorption plane is used to directly position the ceramic arm for adsorption, so the adsorption plane needs to meet high precision requirements. At the same time, different products require different adsorption forces. In order to achieve different adsorption forces for adsorption clamping, and the adsorption force can be adjusted as needed, the adsorption plane can be provided with one or more layers, and the adsorption structures on the multiple layers of adsorption plane can be staggered, so that the adsorption structures can overlap completely or partially, and be connected up and down, thereby achieving the adjustment of the adsorption force and the adsorption position.

[0010] Preferably, the adsorption structure adopts an adsorption slot structure, and the adsorption structure includes a handle slot, two arm slots and a connecting slot that are interconnected. Preferably, the adsorption structure can adopt an adsorption slot structure, and the adsorption slot is opened on the adsorption plane mainly according to the shape of the ceramic arm.

[0011] Preferably, the adsorption structure adopts an adsorption hole structure, and the adsorption structure includes a plurality of adsorption holes. As another preferred embodiment, the adsorption structure can adopt an adsorption hole structure, and a plurality of adsorption holes are arranged on the adsorption plane, which can also achieve adsorption positioning of the ceramic arm.

[0012] Preferably, the adsorption structure adopts a capillary structure, and the adsorption structure includes a plurality of capillary holes. Of course, the adsorption structure can also be a capillary structure, which can also achieve adsorption and positioning of the ceramic arm.

[0013] Preferably, the positioning adjustment structure includes a plurality of positioning grooves arranged on the suction cup base and positioning blocks adjustable in the positioning grooves, as well as an adjusting member for adjusting the positioning. In order to achieve rapid positioning during the clamping process, the positioning adjustment structure includes a plurality of positioning grooves and positioning blocks arranged on the suction cup base, and the horizontal and height positions of the positioning blocks are adjusted, and the locking positioning is achieved through the adjusting member after the positioning is adjusted, so that the rapid positioning of the ends and side positions of ceramic arms of different specifications can be met. During clamping, only the ceramic arm needs to be placed at the position defined by the positioning block to ensure effective adsorption and positioning of the ceramic arm during the subsequent adsorption process, thereby ensuring the processing accuracy requirements.

[0014] Preferably, a slide groove is arranged inside the positioning groove, and the positioning block is slidably adjusted inside the slide groove and can be adjusted in the horizontal and height directions through an adjusting member.

[0015] Preferably, a pneumatic adjustment block is also provided on the suction cup base, and an air valve is provided on the pneumatic adjustment block; a sliding groove is provided on the suction cup base, and the toggle adjustment block is slidably provided in the sliding groove; and a conical positioning surface is provided on the pneumatic adjustment block. In order to realize floating adjustment and positioning of the ceramic arm during processing and ensure that the position of the ceramic arm will not deform or move during the adsorption process, a pneumatic adjustment block is provided on the suction cup base, and the pneumatic adjustment block is pushed by the air valve to realize precise positioning of one end of the U-shaped groove of the ceramic arm.

[0016] The technical solution adopted by the present invention to achieve the second invention object is: a method for processing a ceramic arm using a high-precision alumina ceramic arm positioning fixture, comprising the following steps: Step 1: The alumina ceramic material to be processed is subjected to stress release and annealing treatment; Step 2: Process the characteristic contour of the alumina ceramic material in step 1, roughen it, release some stress, and form a rough-processed semi-finished ceramic arm; Step 3: Finish the semi-finished ceramic arm in step 2 to reduce its surface flatness to less than 0.02 mm: place the semi-finished ceramic arm on the adsorption plane of the suction cup base, quickly position it, evacuate the inside of the sealed airway cavity, and use the adsorption structure to form a negative pressure to adsorb and position the semi-finished ceramic arm, and then place it in the machining center for finishing to form a finished alumina ceramic arm.

[0017] The ceramic arm is clamped and positioned by a high-precision alumina ceramic arm positioning fixture, which reduces the problems of complicated operation, easy deformation, and machining accuracy that cannot meet production needs caused by wax sticking clamping. This processing method can first anneal the ceramic material to release the residual stress of the material, and at the same time add a roughing process to remove the peripheral margin of the protrusion on the ceramic arm to release some stress, thereby reducing deformation during the processing and improving the finishing accuracy. It is also convenient and quick to operate, which improves production efficiency.

[0018] The beneficial effects of the present invention are as follows: the high-precision alumina ceramic arm positioning fixture adopts adsorption positioning and can adopt a high-flatness suction cup base, which can further improve the processing accuracy of the ceramic arm and make its surface degree reach below 0.02mm. The complex operation of wax sticking clamping positioning is avoided, positioning is convenient, and production efficiency is greatly improved. At the same time, the positioning fixture is provided with an adjustment positioning structure to realize universal design, which can meet the clamping and positioning requirements of ceramic arms of different specifications and save production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the high-precision alumina ceramic arm positioning fixture of the present invention.

[0020] Figure 2 It is a schematic diagram of the exploded structure of the high-precision alumina ceramic arm positioning fixture of the present invention.

[0021] Figure 3 It is a schematic diagram of an application structure of the high-precision alumina ceramic arm positioning fixture of the present invention.

[0022] Figure 4 It is a structural schematic diagram of the finished alumina ceramic arm in the present invention.

[0023] Figure 5 It is a structural schematic diagram of the high-precision alumina ceramic arm positioning fixture in Example 2 of the present invention.

[0024] Figure 6 yes Figure 5 A cross-sectional view of .

[0025] Figure 7 It is a structural schematic diagram of the high-precision alumina ceramic arm positioning fixture in Example 3 of the present invention.

[0026] Figure 8 It is a structural schematic diagram of the high-precision alumina ceramic arm positioning fixture in Example 4 of the present invention.

[0027] Fig. 9 It is a structural schematic diagram of the semi-finished alumina ceramic arm of the present invention after removing the margin around the boss.

[0028] In the figure: 1. finished alumina ceramic arm, 11. connecting arm, 12. arm body, 13. arm claw, 14. connecting groove, 15. flared U-shaped structure, 16. protrusion; 2. Suction cup base, 20. Base body, 21. Vacuum adsorption end, 22. Extension end, 23. Side, 24. Adsorption plane, 25. Positioning groove, 251. First positioning groove, 252. Second positioning groove, 253. Third positioning groove, 26. Slide groove; 3. adsorption structure, 31. handle groove, 32. arm groove, 33. connection groove, 34. adsorption area, 35. adsorption hole, 36. capillary hole; 4. vent hole, 5. closed airway cavity, 6. positioning block, 61. first positioning block, 62. second positioning block, 63. third positioning block; 7. Pneumatic adjustment block, 71. Conical positioning surface, 8. Air valve, 9. Air pipe joint, 10. Sliding groove, 30. Adjusting bolt. DETAILED DESCRIPTION

[0029] The various aspects of the present invention are described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0030] Embodiment 1: exist Figure 1 , Figure 2 In the embodiment shown, a high-precision alumina ceramic arm positioning fixture includes a suction cup base 2, on which a vent hole 4 and a sealed airway cavity 5 connected to the vent hole 4 are provided, and on which a suction structure 3 for adsorbing the alumina ceramic arm is provided, and the adsorption structure 3 is connected to the sealed airway cavity 5. The vent hole 4 is provided with an air pipe joint 9, through which an external vacuum pump can be connected, so that the sealed airway cavity 5 is evacuated by the vacuum pump, so that the semi-finished alumina ceramic arm to be processed can be adsorbed and positioned by the adsorption structure 3. A positioning adjustment structure for adjusting the positioning is also provided on the suction cup base 2.

[0031] The suction cup base 2 includes a base body 20 and a suction plane 24 that is replaceable and adjustable on the base body 20. The base body 20 is provided with an airway cavity, and the suction plane 24 covers the base body 20 to form a closed airway cavity 5. The suction plane 24 is provided with at least one layer, and the suction plane 24 is provided with a suction area 34, and the suction structure 3 is provided in the suction area 34 of the suction plane 24; when the suction plane 24 is provided with multiple layers, the suction structures 3 on different suction planes 24 are staggered and connected. In this embodiment, the suction plane is provided with one layer.

[0032] The adsorption structure 3 adopts an adsorption slot structure, which includes a handle slot 31 and two arm slots 32. The two arm slots 32 are arranged in a U shape in the same direction as the ceramic arm. The handle slot 32 is vertically arranged at the bottom of the two arm slots U shape and are connected to each other. A connecting slot 33 is arranged between the two arm slots 32.

[0033] The suction cup base 2 is arranged in a rectangular parallelepiped structure as a whole, and the suction cup base 2 includes a vacuum adsorption end 21, an extension end 22, two side surfaces 23 and an adsorption plane 24. The material of the suction cup base 2 can be preferably stainless steel to ensure that the flatness of the adsorption plane is less than 0.02mm. The adsorption plane 24 can be arranged integrally with the suction cup base 2, or it can be arranged separately. The adsorption structure 3 is arranged on the adsorption plane 24. In this embodiment, the adsorption plane 24 and the suction cup base are arranged in a split and replaceable manner, and different adsorption planes can be replaced as needed to meet the needs of adsorption processing of alumina ceramic arms of different models and specifications. Different flatness processing needs can be met.

[0034] In another embodiment, the adsorption plane 24 is a multi-layer structure, for example, it can be set to two layers, and the adsorption structures 3 on each layer of the adsorption plane 24 are staggered, so that the size of the adsorption force and the adsorption position can be adjusted.

[0035] The positioning adjustment structure comprises a plurality of positioning grooves 25 arranged on the suction cup base 2, positioning blocks 6 adjustably arranged in the positioning grooves 25, and an adjusting member for adjusting the positioning. In this embodiment, the adjusting member is an adjusting bolt 30.

[0036] The positioning groove 25 is provided with a slide groove 26 inside, and the positioning stopper 6 is slidably arranged inside the slide groove 26 and can be adjusted in the horizontal and height directions through an adjusting member.

[0037] A plurality of positioning grooves 25 are provided on the suction cup base 2, and a sliding adjustable positioning block 6 is provided on the positioning groove 25. In this embodiment, three positioning grooves are provided on the suction cup base 2, namely, a first positioning groove 251, a second positioning groove 252 and a third positioning groove 253. The first positioning groove 251 and the second positioning groove 252 are arranged side by side at the vacuum adsorption end 21 on the suction cup base 1, and the third positioning groove 253 is arranged on the suction cup base 2 on one side. A slide groove 26 is provided inside the positioning groove 25. The positioning block 6 is connected to the slide groove on the suction cup base 2 by an adjusting bolt 30, and the height direction of the positioning block 6 can be adjusted by adjusting the bolt 30. The horizontal direction adjustment can be achieved by cooperating between the positioning block and the slide groove inside the positioning groove at different positions.

[0038] A first positioning block 61 is slidably and adjustably arranged in the first positioning groove 251, a second positioning block 62 is slidably and adjustably arranged in the second positioning groove 252, and a third positioning block 63 is slidably and adjustably arranged in the third positioning groove 253. The first positioning block 61, the second positioning block 62 and the third positioning block 63 are used to realize the initial clamping and positioning of the alumina ceramic arm, and the oxide ceramic arm can be quickly positioned. In order to realize the universality of the suction cup base, the positioning block is slidably and adjustably arranged, so that alumina ceramic arms of different specifications can be clamped and positioned.

[0039] The adjustable positioning block 6 is preferably made of stainless steel. Since the alumina ceramic arms to be processed have different models and specifications, the positioning block is adjustable, that is, it can be adjusted up and down to meet the positioning needs of products of different heights and specifications, and can also be adjusted in the width direction to meet the positioning needs of products of different widths. The specific first positioning block, the second positioning block and the third positioning block are respectively matched with the positioning grooves on the suction cup base through two fastening bolts, so as to quickly position the alumina ceramic arms to be processed longitudinally and transversely. The fastening bolts are preferably made of stainless steel.

[0040] like Figure 4 As shown, a finished alumina ceramic arm 1 includes a connecting arm 11, an arm body 12 and two arm claws 13, wherein the connecting arm 11 is provided with a connecting groove 14, the two arm claws 13 are connected to the arm body 12 and are arranged in a flared U-shaped structure 15, a plurality of protrusions 16 are arranged on the arm body 12, wherein two protrusions 16 are arranged at one end close to the connecting end 11, and protrusions 16 are also arranged on the two arm claws 13, respectively, and all the protrusions 16 are arranged on the same surface of the alumina ceramic arm and at the same height.

[0041] A method for machining the surface flatness of an alumina ceramic arm using a high-precision alumina ceramic arm positioning fixture specifically comprises the following steps: Step 1: Perform stress release treatment on the alumina ceramic material to be processed; Step 2: Annealing: annealing the alumina ceramic material to be processed to form a semi-finished ceramic material for processing products; Annealing operation: First, place the alumina ceramic material to be annealed on a ceramic annealing gasket with a flatness of micron level, and clamp the alumina ceramic material with the ceramic annealing gasket up and down. During the annealing process, the micron-level ceramic annealing gasket is used to support and prevent distortion (two pieces, with semi-finished alumina ceramic material in the middle); then put the ceramic annealing gasket and the alumina ceramic material to be annealed into the annealing furnace for annealing, and release the stress of the alumina ceramic material annealing. After the ceramic material annealing stress is released, the deformation amplitude of the processing process is reduced and the processing accuracy is improved.

[0042] Step 3: Processing feature contours and roughing process: Use a machining center to roughen the contours and boss features of the alumina ceramic product annealed in step 2 to release some stress; like Fig. 9 As shown, the margin around the boss is removed by a flat grinding machine, thereby reducing the deformation during the subsequent vacuum adsorption finishing process, and forming a rough-processed semi-finished ceramic arm; Step 4: Finish the rough-machined semi-finished ceramic arm in step 3 to make its surface flatness less than 0.02 mm; like Figure 3 As shown, the roughly machined semi-finished ceramic arm is placed on the adsorption plane of the suction cup base, and the semi-finished ceramic arm is quickly positioned on three sides by the first positioning block, the second positioning block and the third positioning block.

[0043] The positioned semi-finished ceramic arm and the suction cup base are placed together in a machining center to perform fine machining on the surface of the semi-finished ceramic arm.

[0044] Turn on the vacuum pump, and continuously evacuate the closed airway cavity inside the suction cup base through the air pipe joint through the vacuum pump, so that the semi-finished ceramic arm is firmly adsorbed on the adsorption plane 24 through the adsorption structure, thereby minimizing its deformation during the processing and clamping process and ensuring the high-precision processing accuracy requirements of the product.

[0045] The machining center is started to fine-process the surface of the semi-finished ceramic arm, and finally a high-precision alumina ceramic arm 1 is formed.

[0046] This processing method adds an annealing process before fine processing to release the residual stress of the material, and adds a roughing process to reduce the deformation of the material during processing, thereby improving the processing accuracy and achieving a surface flatness of less than 0.02mm.

[0047] Embodiment 2: exist Figure 5 , Figure 6 In the embodiment shown, a high-precision alumina ceramic arm positioning fixture includes a suction cup base 2, on which a vent hole 4 and a sealed airway cavity 5 connected to the vent hole 4 are provided, and on which a suction structure 3 for adsorbing the alumina ceramic arm is provided, and the adsorption structure 3 is connected to the sealed airway cavity 5. The vent hole 4 is provided with an air pipe joint 9, through which an external vacuum pump can be connected, so that the sealed airway cavity 5 is evacuated by the vacuum pump, so that the semi-finished alumina ceramic arm to be processed can be adsorbed and positioned by the adsorption structure 3. A positioning adjustment structure for adjusting the positioning is also provided on the suction cup base 2.

[0048] The suction cup base 2 includes a base body 20 and a suction plane 24 that is replaceable and adjustably arranged on the base body 20 . An airway cavity is arranged on the base body 20 . The suction plane 24 covers the base body 20 to form a closed airway cavity 5 .

[0049] The adsorption structure 3 adopts an adsorption slot structure, and the adsorption slot structure 3 includes a handle slot 31 and two arm slots 32. The two arm slots 32 are arranged in a U shape in the same direction as the ceramic arm. The handle slot 32 is vertically arranged at the bottom of the two arm slots U shape and connected to each other. A connecting slot 33 is arranged between the two arm slots 32.

[0050] The suction cup base 2 is configured as a rectangular parallelepiped structure, and the suction cup base 2 includes a vacuum adsorption end 21, an extension end 22, two side surfaces 23, and an adsorption plane 24. The material of the suction cup base 2 can be preferably stainless steel to ensure that the flatness of the adsorption plane is less than 0.02 mm. The adsorption plane 24 can be integrally configured with the suction cup base 2 or separately configured. The adsorption structure 3 is disposed on the adsorption plane 24.

[0051] The positioning adjustment structure comprises a plurality of positioning grooves 25 arranged on the suction cup base 2, positioning blocks 6 adjustably arranged in the positioning grooves 25, and an adjusting member for adjusting the positioning. In this embodiment, the adjusting member is an adjusting bolt 30.

[0052] A plurality of positioning grooves 25 are provided on the suction cup base 2, and a sliding adjustable positioning block 6 is provided on the positioning groove 25. In this embodiment, three positioning grooves are provided on the suction cup base 2, namely, a first positioning groove 251, a second positioning groove 252 and a third positioning groove 253. The first positioning groove 251 and the second positioning groove 252 are arranged side by side at the vacuum adsorption end 21 on the suction cup base 1, and the third positioning groove 253 is arranged on the suction cup base 2 on one side. A slide groove 26 is provided inside the positioning groove 25. The positioning block 6 is connected to the slide groove on the suction cup base 2 by an adjusting bolt 30, and the height direction of the positioning block 6 can be adjusted by adjusting the bolt 30. The horizontal direction adjustment can be achieved by cooperating between the positioning block and the slide groove inside the positioning groove at different positions.

[0053] A first positioning block 61 is slidably and adjustably arranged in the first positioning groove 251, a second positioning block 62 is slidably and adjustably arranged in the second positioning groove 252, and a third positioning block 63 is slidably and adjustably arranged in the third positioning groove 253. The first positioning block 61, the second positioning block 62 and the third positioning block 63 are used to realize the initial clamping and positioning of the alumina ceramic arm, and the oxide ceramic arm can be quickly positioned. In order to realize the universality of the suction cup base, the positioning block is slidably and adjustably arranged, so that alumina ceramic arms of different specifications can be clamped and positioned.

[0054] The adjustable positioning block 6 is preferably made of stainless steel. Since the alumina ceramic arms to be processed have different models and specifications, the positioning block is adjustable, that is, it can be adjusted up and down to meet the positioning needs of products of different heights and specifications, and can also be adjusted in the width direction to meet the positioning needs of products of different widths. The specific first positioning block, the second positioning block and the third positioning block are respectively matched with the positioning grooves on the suction cup base through two fastening bolts, so as to quickly position the alumina ceramic arms to be processed longitudinally and transversely. The fastening bolts are preferably made of stainless steel.

[0055] In order to achieve dynamic floating precise positioning of the alumina ceramic arm, a pneumatic adjustment block 7 is also provided on the suction cup base 2. The pneumatic adjustment block 7 is arranged on the center line of the length direction of the suction cup base 2 and is arranged toward one end of the extension end 22. The pneumatic adjustment block 7 is arranged in cooperation with the inner side of the flared U-shaped structure between the two arms of the alumina ceramic arm. Specifically, a sliding groove 10 is provided on the suction cup base 2, and the pneumatic adjustment block 7 is arranged inside the sliding groove 10 and can move axially along the sliding groove. The height of the pneumatic adjustment block 7 can be adjusted, and a conical positioning surface 71 is provided on the side where the pneumatic adjustment block cooperates with the flared U-shaped structure of the alumina ceramic arm. The conical positioning surfaces increase successively from bottom to top, thereby meeting the adjustment and positioning needs of alumina ceramic arms of different models and sizes.

[0056] The pneumatic adjustment block 7 is provided with an air valve 8, and the air valve 8 is connected to an external vacuum system. The pneumatic adjustment block 7 is inflated through the air valve 8, thereby driving the micro-movement of the pneumatic adjustment block, thereby realizing dynamic floating precise positioning of the alumina ceramic arm, and then the closed airway cavity is evacuated through the vacuum system to form a negative pressure, and the alumina ceramic arm positioned on the suction cup base is adsorbed and positioned through the adsorption structure, thereby minimizing its deformation during the processing and clamping process, ensuring the high-precision processing accuracy requirements of the product, and facilitating high-precision processing of the surface flatness of the alumina ceramic arm.

[0057] like Figure 4 As shown, a finished alumina ceramic arm 1 includes a connecting arm 11, an arm body 12 and two arm claws 13, wherein the connecting arm 11 is provided with a connecting groove 14, the two arm claws 13 are connected to the arm body 12 and are arranged in a flared U-shaped structure 15, a plurality of protrusions 16 are arranged on the arm body 12, wherein two protrusions 16 are arranged at one end close to the connecting end 11, and protrusions 16 are also arranged on the two arm claws 13, respectively, and all the protrusions 16 are arranged on the same surface of the alumina ceramic arm and at the same height.

[0058] A method for machining the surface flatness of an alumina ceramic arm using a high-precision alumina ceramic arm positioning fixture specifically comprises the following steps: Step 1: Perform stress release treatment on the alumina ceramic material to be processed; Step 2: Annealing: annealing the alumina ceramic material to be processed to form a semi-finished ceramic material for processing products; Annealing operation: First, place the alumina ceramic material to be annealed on a ceramic annealing gasket with a flatness of micron level, and clamp the alumina ceramic material with the ceramic annealing gasket up and down. During the annealing process, the micron-level ceramic annealing gasket is used to support and prevent distortion (two pieces, with semi-finished alumina ceramic material in the middle); then put the ceramic annealing gasket and the alumina ceramic material to be annealed into the annealing furnace for annealing, and release the stress of the alumina ceramic material annealing. After the ceramic material annealing stress is released, the deformation amplitude of the processing process is reduced and the processing accuracy is improved.

[0059] Step 3: Processing feature contours and roughing process: Use a machining center to roughen the contours and boss features of the alumina ceramic product annealed in step 2 to release some stress; The margin around the boss is removed by a flat grinding machine, thereby reducing the deformation during the subsequent vacuum adsorption finishing process, and forming a rough-processed semi-finished ceramic arm; Step 4: Finish the rough-machined semi-finished ceramic arm in step 3 to make its surface flatness less than 0.02 mm; like Figure 3 As shown, the roughly processed semi-finished ceramic arm is placed on the adsorption plane of the suction cup base, and the semi-finished ceramic arm is quickly positioned on three sides by the first positioning block, the second positioning block and the third positioning block, and the pneumatic adjustment block 7 is slidably adjusted to position the expanded U-shaped groove of the semi-finished ceramic arm.

[0060] The positioned semi-finished ceramic arm and the suction cup base are placed together in a machining center to perform fine machining on the surface of the semi-finished ceramic arm.

[0061] Turn on the vacuum pump, and continuously evacuate the closed airway cavity inside the suction cup base through the air pipe joint through the vacuum pump, so that the semi-finished ceramic arm is firmly adsorbed on the adsorption plane 24 through the adsorption structure, thereby minimizing its deformation during the processing and clamping process and ensuring the high-precision processing accuracy requirements of the product.

[0062] The machining center is started to fine-process the surface of the semi-finished ceramic arm, and finally a high-precision alumina ceramic arm 1 is formed.

[0063] This processing method adds an annealing process before fine processing to release the residual stress of the material, and adds a roughing process to reduce the deformation of the material during processing, thereby improving the processing accuracy and achieving a surface flatness of less than 0.02mm.

[0064] Embodiment 3: exist Figure 7In the embodiment shown, a finished alumina ceramic arm 1 includes a connecting arm 11, an arm body 12 and two arm claws 13. The connecting arm 11 is provided with a connecting groove 14. The two arm claws 13 are connected to the arm body 12 and are arranged in a flared U-shaped structure 15. A plurality of protrusions 16 are arranged on the arm body 12, wherein two protrusions 16 are arranged at one end close to the connecting end 11, and protrusions 16 are also arranged on the two arm claws 13. All protrusions 16 are arranged on the same surface of the alumina ceramic arm and at the same height. A positioning adjustment structure for adjusting the positioning is also arranged on the suction cup base 2.

[0065] The suction cup base 2 includes a base body 20 and a suction plane 24 that is replaceable and adjustably arranged on the base body 20 . An airway cavity is arranged on the base body 20 . The suction plane 24 covers the base body 20 to form a closed airway cavity 5 .

[0066] A high-precision alumina ceramic arm positioning fixture includes a suction cup base 2, a vent hole 4 and a sealed airway cavity 5 connected to the vent hole 4 are provided on the suction cup base 2, and an adsorption structure 3 for adsorbing the alumina ceramic arm is provided on the suction cup base 2, and the adsorption structure 3 is connected to the sealed airway cavity 5. The vent hole 4 is provided with an air pipe joint 9, and an external vacuum pump can be connected through the air pipe joint 9, so that the sealed airway cavity 5 is evacuated by the vacuum pump, so that the semi-finished alumina ceramic arm to be finely processed can be adsorbed and positioned through the adsorption structure 3.

[0067] The adsorption structure 3 adopts an adsorption hole structure, which includes an adsorption area 34 . The adsorption area 34 is consistent with the structure of the ceramic arm. A plurality of adsorption holes 35 are evenly distributed on the adsorption area 34 . The adsorption holes 35 are connected to the sealed airway cavity 5 .

[0068] The suction cup base 2 is configured as a rectangular parallelepiped structure, and the suction cup base 2 includes a vacuum adsorption end 21, an extension end 22, two side surfaces 23, and an adsorption plane 24. The material of the suction cup base 2 can be preferably stainless steel to ensure that the flatness of the adsorption plane is less than 0.02 mm. The adsorption plane 24 can be integrally configured with the suction cup base 2 or separately configured. The adsorption structure 3 is disposed on the adsorption plane 24.

[0069] The positioning adjustment structure comprises a plurality of positioning grooves 25 arranged on the suction cup base 2, positioning blocks 6 adjustably arranged in the positioning grooves 25, and an adjusting member for adjusting the positioning. In this embodiment, the adjusting member is an adjusting bolt 30.

[0070] A plurality of positioning grooves 25 are provided on the suction cup base 2, and a sliding adjustable positioning block 6 is provided on the positioning groove 25. In this embodiment, three positioning grooves are provided on the suction cup base 2, namely, a first positioning groove 251, a second positioning groove 252 and a third positioning groove 253. The first positioning groove 251 and the second positioning groove 252 are arranged side by side at the vacuum adsorption end 21 of the suction cup base 1, and the third positioning groove 253 is arranged on the suction cup base 2 on one side. The positioning block 6 is connected to the slide groove on the suction cup base 2 by an adjusting bolt 30, and the height direction of the positioning block 6 can be adjusted by adjusting the bolt 30, and the horizontal direction can be adjusted by cooperating with the positioning block at different positions of the slide groove inside the positioning groove.

[0071] A first positioning block 61 is slidably and adjustably arranged in the first positioning groove 251, a second positioning block 62 is slidably and adjustably arranged in the second positioning groove 252, and a third positioning block 63 is slidably and adjustably arranged in the third positioning groove 253. The first positioning block 61, the second positioning block 62 and the third positioning block 63 are used to realize the initial clamping and positioning of the alumina ceramic arm, and the oxide ceramic arm can be quickly positioned. In order to realize the universality of the suction cup base, the positioning block is slidably and adjustably arranged, so that alumina ceramic arms of different specifications can be clamped and positioned.

[0072] The adjustable positioning block 6 is preferably made of stainless steel. Since the alumina ceramic arms to be processed have different models and specifications, the positioning block is adjustable, that is, it can be adjusted up and down to meet the positioning needs of products of different heights and specifications, and can also be adjusted in the width direction to meet the positioning needs of products of different widths. The specific first positioning block, the second positioning block and the third positioning block are respectively matched with the positioning grooves on the suction cup base through two fastening bolts, so as to quickly position the alumina ceramic arms to be processed longitudinally and transversely. The fastening bolts are preferably made of stainless steel.

[0073] A method for machining the surface flatness of an alumina ceramic arm using a high-precision alumina ceramic arm positioning fixture specifically comprises the following steps: Step 1: Perform stress release treatment on the alumina ceramic material to be processed; Step 2: Annealing: annealing the alumina ceramic material to be processed to form a semi-finished ceramic material for processing products; Annealing operation: First, place the alumina ceramic material to be annealed on a ceramic annealing gasket with a flatness of micron level, and clamp the alumina ceramic material with the ceramic annealing gasket up and down. During the annealing process, the micron-level ceramic annealing gasket is used to support and prevent distortion (two pieces, with semi-finished alumina ceramic material in the middle); then put the ceramic annealing gasket and the alumina ceramic material to be annealed into the annealing furnace for annealing, and release the stress of the alumina ceramic material annealing. After the ceramic material annealing stress is released, the deformation amplitude of the processing process is reduced and the processing accuracy is improved.

[0074] Step 3: Processing feature contours and roughing process: Use a machining center to roughen the contours and boss features of the alumina ceramic product annealed in step 2 to release some stress; The margin around the boss is removed by a flat grinding machine, thereby reducing the deformation during the subsequent vacuum adsorption finishing process, and forming a rough-processed semi-finished ceramic arm; Step 4: Finish the rough-machined semi-finished ceramic arm in step 3 to make its surface flatness less than 0.02 mm; The roughly processed semi-finished ceramic arm is placed on the adsorption plane of the suction cup base, and the semi-finished ceramic arm is quickly positioned on three sides by the first positioning block, the second positioning block and the third positioning block.

[0075] The positioned semi-finished ceramic arm and the suction cup base are placed together in a machining center to perform fine machining on the surface of the semi-finished ceramic arm.

[0076] Turn on the vacuum pump, and continuously evacuate the closed airway cavity inside the suction cup base through the air pipe joint through the vacuum pump, so that the semi-finished ceramic arm is firmly adsorbed on the adsorption plane 24 through the adsorption structure, that is, through a plurality of adsorption holes 35, thereby minimizing its deformation during the processing and clamping process and ensuring the high-precision processing accuracy requirements of the product.

[0077] The machining center is started to fine-process the surface of the semi-finished ceramic arm, and finally a high-precision alumina ceramic arm 1 is formed.

[0078] This processing method adds an annealing process before fine processing to release the residual stress of the material, and adds a roughing process to reduce the deformation of the material during processing, thereby improving the processing accuracy. The surface flatness can reach less than 0.02mm. Embodiment 4: exist Figure 8In the illustrated embodiment, a finished alumina ceramic arm 1 comprises a connecting arm 11, an arm body 12 and two arm claws 13, wherein the connecting arm 11 is provided with a connecting groove 14, the two arm claws 13 are connected to the arm body 12 and are arranged in a flared U-shaped structure 15, a plurality of protrusions 16 are arranged on the arm body 12, wherein two protrusions 16 are arranged at one end close to the connecting end 11, and protrusions 16 are also arranged on the two arm claws 13, respectively, and all the protrusions 16 are arranged on the same surface of the alumina ceramic arm and at the same height.

[0079] A high-precision alumina ceramic arm positioning fixture includes a suction cup base 2, on which a vent hole 4 and a sealed airway cavity 5 connected to the vent hole 4 are provided, and on which a suction structure 3 for adsorbing the alumina ceramic arm is provided, and the adsorption structure 3 is connected to the sealed airway cavity 5. The vent hole 4 is provided with an air pipe joint 9, through which an external vacuum pump can be connected, so that the sealed airway cavity 5 is evacuated by the vacuum pump, so that the semi-finished alumina ceramic arm to be processed can be adsorbed and positioned by the adsorption structure 3. A positioning adjustment structure for adjusting the positioning is also provided on the suction cup base 2.

[0080] The suction cup base 2 includes a base body 20 and a suction plane 24 that is replaceable and adjustably arranged on the base body 20 . An airway cavity is arranged on the base body 20 . The suction plane 24 covers the base body 20 to form a closed airway cavity 5 .

[0081] The adsorption structure 3 adopts a capillary structure, and the capillary structure includes an adsorption area 34 . The adsorption area 34 is consistent with the structure of the ceramic arm. A plurality of capillary holes 36 are arranged on the adsorption area 34 , and the capillary holes 36 are connected to the sealed airway cavity 5 .

[0082] The suction cup base 2 is configured as a rectangular parallelepiped structure, and the suction cup base 2 includes a vacuum adsorption end 21, an extension end 22, two side surfaces 23, and an adsorption plane 24. The material of the suction cup base 2 can be preferably stainless steel to ensure that the flatness of the adsorption plane is less than 0.02 mm. The adsorption plane 24 can be integrally configured with the suction cup base 2 or separately configured. The adsorption structure 3 is disposed on the adsorption plane 24.

[0083] The positioning adjustment structure comprises a plurality of positioning grooves 25 arranged on the suction cup base 2, positioning blocks 6 adjustably arranged in the positioning grooves 25, and an adjusting member for adjusting the positioning. In this embodiment, the adjusting member is an adjusting bolt 30.

[0084] A plurality of positioning grooves 25 are provided on the suction cup base 2, and a sliding adjustable positioning block 6 is provided on the positioning groove 25. In this embodiment, three positioning grooves are provided on the suction cup base 2, namely, a first positioning groove 251, a second positioning groove 252 and a third positioning groove 253. The first positioning groove 251 and the second positioning groove 252 are arranged side by side at the vacuum adsorption end 21 of the suction cup base 1, and the third positioning groove 253 is arranged on the suction cup base 2 on one side. The positioning block 6 is connected to the slide groove on the suction cup base 2 by an adjusting bolt 30, and the height direction of the positioning block 6 can be adjusted by adjusting the bolt 30, and the horizontal direction can be adjusted by cooperating with the positioning block at different positions of the slide groove inside the positioning groove.

[0085] A first positioning block 61 is slidably and adjustably arranged in the first positioning groove 251, a second positioning block 62 is slidably and adjustably arranged in the second positioning groove 252, and a third positioning block 63 is slidably and adjustably arranged in the third positioning groove 253. The first positioning block 61, the second positioning block 62 and the third positioning block 63 are used to realize the initial clamping and positioning of the alumina ceramic arm, and the oxide ceramic arm can be quickly positioned. In order to realize the universality of the suction cup base, the positioning block is slidably and adjustably arranged, so that alumina ceramic arms of different specifications can be clamped and positioned.

[0086] The adjustable positioning block 6 is preferably made of stainless steel. Since the alumina ceramic arms to be processed have different models and specifications, the positioning block is adjustable, that is, it can be adjusted up and down to meet the positioning needs of products of different heights and specifications, and can also be adjusted in the width direction to meet the positioning needs of products of different widths. The specific first positioning block, the second positioning block and the third positioning block are respectively matched with the positioning grooves on the suction cup base through two fastening bolts, so as to quickly position the alumina ceramic arms to be processed longitudinally and transversely. The fastening bolts are preferably made of stainless steel.

[0087] A method for machining the surface flatness of an alumina ceramic arm using a high-precision alumina ceramic arm positioning fixture specifically comprises the following steps: Step 1: Perform stress release treatment on the alumina ceramic material to be processed; Step 2: Annealing: annealing the alumina ceramic material to be processed to form a semi-finished ceramic material for processing products; Annealing operation: First, place the alumina ceramic material to be annealed on a ceramic annealing gasket with a flatness of micron level, and clamp the alumina ceramic material with the ceramic annealing gasket up and down. During the annealing process, the micron-level ceramic annealing gasket is used to support and prevent distortion (two pieces, with semi-finished alumina ceramic material in the middle); then put the ceramic annealing gasket and the alumina ceramic material to be annealed into the annealing furnace for annealing, and release the stress of the alumina ceramic material annealing. After the ceramic material annealing stress is released, the deformation amplitude of the processing process is reduced and the processing accuracy is improved.

[0088] Step 3: Processing feature contours and roughing process: Use a machining center to roughen the contours and boss features of the alumina ceramic product annealed in step 2 to release some stress; The margin around the boss is removed by a flat grinding machine, thereby reducing the deformation during the subsequent vacuum adsorption finishing process, and forming a rough-processed semi-finished ceramic arm; Step 4: Finish the rough-machined semi-finished ceramic arm in step 3 to make its surface flatness less than 0.02 mm; The roughly processed semi-finished ceramic arm is placed on the adsorption plane of the suction cup base, and the semi-finished ceramic arm is quickly positioned on three sides by the first positioning block, the second positioning block and the third positioning block.

[0089] The positioned semi-finished ceramic arm and the suction cup base are placed together in a machining center to perform fine machining on the surface of the semi-finished ceramic arm.

[0090] Turn on the vacuum pump and continuously evacuate the closed airway cavity inside the suction cup base through the air pipe joint through the vacuum pump, so that the semi-finished ceramic arm is firmly adsorbed on the adsorption plane 24 through the adsorption structure, that is, through a plurality of capillary holes 36, thereby minimizing its deformation during the processing and clamping process and ensuring the high-precision processing accuracy requirements of the product.

[0091] The machining center is started to fine-process the surface of the semi-finished ceramic arm, and finally a high-precision alumina ceramic arm 1 is formed.

[0092] This processing method adds an annealing process before fine processing to release the residual stress of the material, and adds a roughing process to reduce the deformation of the material during processing, thereby improving the processing accuracy. The surface flatness can reach less than 0.02mm. The above specific implementation modes / embodiments are specific implementation modes of the present invention, which are used to illustrate the concept of the present invention, are explanatory and exemplary, and should not be interpreted as limiting the implementation modes of the present invention and the scope of the present invention. In addition to the embodiments described herein, those skilled in the art can also adopt other obvious technical solutions based on the contents disclosed in the claims and the specification of this application, and these technical solutions include any obvious replacement and modification of the embodiments described herein, which are within the protection scope of the present invention.

Claims

1. A high-precision alumina ceramic arm positioning fixture, characterized by: The invention comprises a suction cup base (2), on which a vent hole (4) connected to an external vacuum device and a sealed airway cavity (5) connected to the vent hole (4) are arranged, and on which a suction cup base (2) a suction structure (3) connected to the sealed airway cavity (50) and a positioning adjustment structure for achieving positioning adjustment are arranged.

2. The high-precision alumina ceramic arm positioning fixture according to claim 1 is characterized in that: The suction cup base (2) comprises a base body (20) and a suction plane (24) which is replaceably and adjustably arranged on the base body (20); an airway cavity is arranged on the base body (20); and the suction plane (24) covers the base body (20) to form a closed airway cavity (5).

3. The high-precision alumina ceramic arm positioning fixture according to claim 1 is characterized in that: The adsorption plane (24) is provided with at least one layer, an adsorption area (34) is provided on the adsorption plane (24), and the adsorption structure (3) is provided in the adsorption area (34) of the adsorption plane (24); when the adsorption plane (24) is provided with multiple layers, the adsorption structures (3) on different adsorption planes (24) are arranged in a staggered and connected manner.

4. The high-precision alumina ceramic arm positioning fixture according to any one of claims 1 to 3, characterized in that: The adsorption structure (3) adopts an adsorption groove structure, and the adsorption structure (3) comprises a handle groove (31), two arm grooves (32) and a connection groove (33) which are interconnected.

5. The high-precision alumina ceramic arm positioning fixture according to any one of claims 1 to 3, characterized in that: The adsorption structure (3) adopts an adsorption hole structure, and the adsorption structure (3) comprises a plurality of adsorption holes (35).

6. The high-precision alumina ceramic arm positioning fixture according to any one of claims 1 to 3, characterized in that: The adsorption structure (3) adopts a capillary structure, and the adsorption structure (3) comprises a plurality of capillary holes (36).

7. The high-precision alumina ceramic arm positioning fixture according to any one of claims 1 to 3, characterized in that: The positioning adjustment structure comprises a plurality of positioning grooves (25) arranged on the suction cup base (2), positioning blocks (6) adjustably arranged in the positioning grooves (25), and an adjustment member for achieving positioning adjustment.

8. The high-precision alumina ceramic arm positioning fixture according to claim 7, characterized in that: The positioning groove (25) is provided with a slide groove (26) inside, and the positioning stopper (6) is slidably arranged inside the slide groove (26) and can be adjusted in the horizontal and height directions through an adjusting member.

9. The high-precision alumina ceramic arm positioning fixture according to any one of claims 1 to 3, characterized in that: A pneumatic adjustment block (7) is also provided on the suction cup base (2), and an air valve (8) is provided on the pneumatic adjustment block (7); a sliding groove (10) is provided on the suction cup base (2), and the toggle adjustment block (7) is slidably arranged in the sliding groove (10); and a conical positioning surface (71) is provided on the pneumatic adjustment block (7).

10. A method for machining a ceramic arm using the positioning fixture according to any one of claims 1 to 9, characterized in that The following steps are involved: Step 1: The alumina ceramic material to be processed is subjected to stress release and annealing treatment; Step 2: Process the characteristic contour of the alumina ceramic material in step 1, roughen it, release some stress, and form a rough-processed semi-finished ceramic arm; Step 3: Finish the semi-finished ceramic arm in step 2 to reduce its surface flatness to less than 0.02 mm: place the semi-finished ceramic arm on the adsorption plane of the suction cup base for rapid positioning, evacuate the sealed airway cavity, and use the adsorption structure to form a negative pressure to adsorb and position the semi-finished ceramic arm, and perform finish processing in the machining center to form a finished alumina ceramic arm.

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