A fixture for thin plate products

By designing a thin plate product fixture including positioning frame components, mounting devices, handles and elastic clamping devices, the problem of clamping and storage difficulties of thin plate products in the prior art is solved, and reliable clamping and vertical storage of the product is realized, which is suitable for process production under high temperature conditions.

CN119748351APending Publication Date: 2025-04-04JIANGSU PANGU SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202510204733.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-24
Publication Date
2025-04-04

AI Technical Summary

Technical Problem

The prior art is difficult to effectively clamp and store large-area thin plate products, especially under high temperature conditions, which can easily lead to bending and deformation and affect product quality.

Method used

A thin plate product fixture is designed, including positioning frame components, mounting devices, handles and elastic clamping devices. The corresponding edges of the thin plate are clamped by an elastic clamping device, and the clamp is fixed in the storage rack or process cavity by means of a mounting device to realize vertical storage and process production of products.

Benefits of technology

It realizes reliable clamping and vertical storage of thin plate products, and is suitable for process production under high temperature conditions, avoids bending and deformation, and improves product quality and yield.

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Abstract

The present invention discloses a thin plate product clamp, which can store and place the product vertically after clamping the thin plate, and can be directly used for process production in the vertical direction under a characteristic environment. It includes: a positioning frame assembly, which includes two horizontal frames and two vertical frames, the two vertical frames are an upper frame and a lower frame, and the two horizontal frames and the two vertical frames are fixed end to end to form a rectangular frame structure; a pair of mounting devices are respectively arranged on both sides of the upper frame and are arranged with side convexities; a pair of handles; and a plurality of elastic clamping devices, each group of elastic clamping devices clamps the corresponding edge of the product by elasticity; the upper frame and the lower frame are respectively arranged with a plurality of elastic clamping devices in the length direction, and the elastic clamping devices on the upper frame and the lower frame respectively clamp the corresponding positions of the corresponding edges of the thin plate product, and the longitudinal frames on both sides are respectively provided with raised handles in the middle of the length direction.
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Description

Technical Field

[0001] The invention relates to the technical field of thin plate clamps, in particular to a thin plate product clamp. Background Art

[0002] In the semiconductor field, some large-area thin-plate products will bend and deform when placed horizontally due to their own material and weight. Such bending and deformation will have an irreversible impact on product quality, seriously affecting product yield and output. At the same time, in some specific processes (especially processes under high temperature conditions, such as high-temperature baking, etc.), it is necessary to ensure that such thin plates are placed vertically to avoid bending and deformation during the process production, which will affect product quality. At present, there is no clamping fixture that can effectively clamp such thin-plate products and can be used for vertical storage and placement of products, as well as vertical process production. Summary of the invention

[0003] In view of the above problems, the present invention provides a thin plate product clamp, which can store and place the product vertically after clamping the thin plate, and can be directly used for process production in the vertical direction under a characteristic environment.

[0004] A thin plate product fixture, characterized in that it comprises:

[0005] A positioning frame assembly, comprising two transverse frames and two longitudinal frames, wherein the two longitudinal frames are an upper frame and a lower frame, and the two transverse frames and the two longitudinal frames are fixed end to end to form a rectangular frame structure;

[0006] A pair of mounting devices are disposed on both sides of the upper frame and are arranged in a side convex manner;

[0007] A pair of handles;

[0008] and a plurality of elastic clamping devices, each set of elastic clamping devices clamps the corresponding edges of the product by elasticity;

[0009] The upper frame and the lower frame are respectively arranged with a plurality of elastic clamping devices in the length direction. The elastic clamping devices on the upper frame and the lower frame respectively clamp the corresponding positions of the corresponding edges of the thin plate products. Raised handles are respectively arranged in the middle of the length direction of the longitudinal frames on both sides.

[0010] It is further characterized by:

[0011] The upper frame is provided with side-convex mounting devices on both sides in the length direction, and each set of mounting devices is used to place the fixture on a storage rack or fix it inside the process chamber;

[0012] The mounting device is a circular roller, a column, or a convex shape such as a square, a trapezoid, or a triangle, and the mounting device is fixed to the corresponding end of the upper frame by bolts, so that the corresponding shape structure of the mounting device can be quickly adjusted according to the actual mounting position;

[0013] The positioning frame assembly is an integrated structural member;

[0014] Alternatively, the positioning frame assembly is formed by four sets of frames being fixedly assembled by fasteners, which enables the positioning frame assembly to be quickly assembled according to the shape of the product, thereby making the entire fixture more versatile;

[0015] Each group of elastic clamping devices includes an upper pressure block, a lower pad, a guide column, a linear spring, a manual knob, and a guide bushing. The position where the elastic clamping device needs to be installed on the corresponding frame is provided with a guide column through hole and a lower pad mounting hole. The guide column penetrates the guide column through hole from bottom to top and convexes upward. The guide bushing includes an outer convex guide ring and a lower convex guide sleeve. The lower convex guide sleeve of the guide bushing is sleeved on the guide column and then inserted into the guide column through hole. The outer wall of the lower convex guide sleeve is arranged tightly against the inner wall of the guide column through hole. The outer convex guide ring is pressed onto the upper surface of the frame. The bottom sleeve of the guide column is provided with a spring baffle. A linear spring is provided between the bottom of the lower convex guide sleeve and the spring baffle. , the linear spring is sleeved on the corresponding bottom periphery of the guide column, the outer end of the lower pad is fixedly mounted on the mounting hole of the lower pad by a fastening bolt, the inner end of the lower pad is convex inside the inner edge of the frame, the upper pressure block is fixedly mounted on the inner end of the manual knob in the length direction, the middle part of the manual knob in the length direction is fixedly connected to the upper convex end of the guide column by a connecting bolt, in an unclamped state, the upper pressure block is pressed onto the upper surface of the corresponding frame, in a clamped state, the manual knob rotates toward the lower pad, the lower part of the corresponding edge of the thin plate product is supported on the upper surface of the lower pad, the bottom of the upper pressure block is pressed onto the upper part of the corresponding edge of the thin plate product, and the upper pressure block is arranged directly above the lower pad;

[0016] The number of elastic clamping devices of the upper frame and the lower frame along the length direction is not less than three, ensuring that the left, middle and right positions of the corresponding edges of the thin plate products are reliably elastically clamped;

[0017] Thick feet are fixed on the back of the four corners of the rectangular frame structure. When personnel take and place thin plate products on the fixture, the fixture is vacated at a safe distance above the work surface, so that the product does not touch the excess work surface during the taking and placing process, and the product is reduced from contacting with excess objects during the taking and placing process, which may cause scratches, marks, and dust particles on the product. When multiple fixtures are placed and fixed in batches, the feet also play the role of equal spacing limit, preventing the fixtures from shaking and colliding during the process to damage the product, and also making way for mechanisms such as the fixture's elastic clamping device;

[0018] The positioning frame assembly is set according to the shape of the thin plate product, including rectangle, circle, ellipse, and irregular polygon.

[0019] After adopting the structure of the present invention, the corresponding edges of the thin plate products are clamped by the elastic clamping device, so that the thin plate products are reliably clamped, and then the clamp is placed on the storage rack or fixed inside the process chamber through the mounting device; so that the clamp can manually clamp the thin plate products effectively, and after clamping, the products can be stored vertically. At the same time, the clamping fixture can be directly used for process production in the vertical direction under characteristic environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0021] Figure 2 is a cross-sectional schematic diagram of the elastic clamping device of the present invention;

[0022] Figure 3 It is a three-dimensional schematic diagram of the elastic clamping device of the present invention without clamping a thin plate product;

[0023] Figure 4 It is a three-dimensional schematic diagram of the elastic clamping device of the present invention clamping a thin plate product;

[0024] The names corresponding to the serial numbers in the figure are as follows:

[0025] Positioning frame assembly 10, guide column through hole 101, lower pad installation hole 102, longitudinal frame 11, upper frame 12, lower frame 13, mounting device 20, handle 30, elastic clamping device 40, upper pressure block 41, lower pad 42, guide column 43, linear spring 44, manual knob 45, guide bushing 46, outer convex guide ring 461, lower convex guide sleeve 462, spring baffle 47, connecting bolt 48, thin plate product 50, standing foot 60. DETAILED DESCRIPTION

[0026] A fixture for thin plate products, see Figure 1-Figure 4 , which includes a positioning frame assembly 10, a pair of mounting devices 20, a pair of handles 30; and a plurality of elastic clamping devices 40.

[0027] In a specific embodiment, the positioning frame assembly 10 includes two transverse frames and two longitudinal frames 11, the two longitudinal frames are an upper frame 12 and a lower frame 13, and the two transverse frames and the two longitudinal frames 11 are fixed end to end to form a rectangular frame structure;

[0028] Four sets of elastic clamping devices 40 are arranged in the length direction of the upper frame 12 and the lower frame 13, respectively. The elastic clamping devices 40 on the upper frame 12 and the lower frame 13 clamp the corresponding positions of the corresponding edges of the thin plate product 50, and the middle of the length direction of the longitudinal frames 11 on both sides are respectively provided with raised handles 30, which are used for people to carry the clamp;

[0029] A pair of mounting devices 20 are disposed on both sides of the upper frame 12 and are disposed in a side convex manner;

[0030] Each set of elastic clamping devices 40 uses elasticity to clamp the corresponding edge of the thin plate product 50;

[0031] A plurality of elastic clamping devices 40 are arranged in the length direction of the upper frame 12 and the lower frame 13. The elastic clamping devices 40 on the upper frame 12 and the lower frame 13 clamp the corresponding positions of the corresponding edges of the thin plate product 50 respectively, and raised handles 30 are respectively provided in the middle of the length direction of the longitudinal frames 11 on both sides.

[0032] In specific implementation: side convex mounting devices 20 are respectively fixed on both sides of the length direction of the upper frame 12, and each set of mounting devices is used to place the fixture on the storage rack or fix it inside the process chamber;

[0033] The mounting device 20 is a circular roller, a column, or a convex shape such as a square, a trapezoid, or a triangle. The mounting device 20 is fixed to the corresponding end of the upper frame 12 by bolts, which allows the corresponding shape structure of the mounting device to be quickly adjusted according to the actual mounting position;

[0034] The positioning frame assembly 10 is formed by four sets of frames fixed together by fasteners, which enables the positioning frame assembly 10 to be quickly assembled according to the shape of the product, making the entire fixture highly versatile.

[0035] In a specific embodiment, each group of elastic clamping devices 40 includes an upper pressure block 41, a lower cushion block 42, a guide column 43, a linear spring 44, a manual knob 45, and a guide bushing 46. A guide column through hole 101 and a lower cushion block mounting hole 102 are provided at the position where the elastic clamping device 40 needs to be installed on the corresponding frame. The guide column 46 penetrates the guide column through hole 101 from bottom to top and convexes upward. The guide bushing 46 includes an outer convex guide ring 461 and a lower convex guide sleeve 462. The lower convex guide sleeve 462 of the guide bushing 46 is sleeved on the guide column 43 and then inserted into the guide column through hole 101. The outer wall of the lower convex guide sleeve 462 is arranged in close contact with the inner wall of the guide column through hole 101. The outer convex guide ring 461 is pressed onto the upper surface of the frame. The bottom of the guide column 43 is sleeved with a spring baffle 47. The bottom of the lower convex guide sleeve 462 A linear spring 44 is arranged between the lower part and the spring stopper 47. The linear spring 44 is sleeved on the corresponding bottom periphery of the guide column 43. The outer end of the lower pad 42 is fixed to the lower pad mounting hole 102 by a fastening bolt. The inner end of the lower pad 42 is convex to the inner edge of the frame. The inner end of the manual knob 45 in the length direction is fixed with an upper pressing block 41. The middle part of the manual knob 45 in the length direction is fixed to the upper convex end of the guide column 46 by a connecting bolt 48. In the unclamped state, the upper pressing block is pressed on the upper surface of the corresponding frame. In the clamped state, the manual knob 45 rotates toward the lower pad 42. The lower part of the corresponding edge of the thin plate product 50 is supported on the upper surface of the lower pad 42. The bottom of the upper pressing block 41 is pressed on the upper part of the corresponding edge of the thin plate product 50, and the upper pressing block 41 is arranged directly above the lower pad 42.

[0036] Thick feet 60 are fixed on the back of the four corners of the rectangular frame structure. When personnel take and place thin plate products on the fixture, the fixture is lifted up at a certain safe distance above the work surface so that the product does not touch the excess work surface during the taking and placing process, thereby reducing the risk of products contacting excess objects during the taking and placing process, causing scratches, marks, and dust particles on the products. When multiple fixtures are placed and fixed in batches, the feet 60 also play a role of equal spacing limit, preventing the fixtures from shaking and colliding during the process, thereby preventing the products from being damaged. At the same time, it also makes way for mechanisms such as the fixture's elastic clamping device 40.

[0037] In addition, the positioning frame assembly 10 is set according to the shape of the thin plate product 50, including a rectangle, a circle, an ellipse, and an irregular polygon.

[0038] Its working principle is as follows: the corresponding edges of thin plate products are clamped by an elastic clamping device so that the thin plate products can be reliably clamped. The elasticity of the elastic clamping device itself is used to clamp the product to prevent the product from shaking or falling off during transportation. Due to its elastic nature, it can be compatible with different product thicknesses within a specified range. The clamp is then placed on a storage rack or fixed inside a process chamber through a mounting device. This allows the clamp to manually clamp thin plate products effectively. After clamping, the product can be stored vertically. At the same time, the clamping fixture can be directly used for process production in the vertical direction under characteristic environments.

[0039] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0040] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A thin plate product fixture, characterized in that: It includes: A positioning frame assembly, comprising two transverse frames and two longitudinal frames, wherein the two longitudinal frames are an upper frame and a lower frame, and the two transverse frames and the two longitudinal frames are fixed end to end to form a rectangular frame structure; A pair of mounting devices are disposed on both sides of the upper frame and are arranged in a side convex manner; A pair of handles; and a plurality of elastic clamping devices, each set of elastic clamping devices clamps the corresponding edges of the product by elasticity; The upper frame and the lower frame are respectively arranged with a plurality of elastic clamping devices in the length direction. The elastic clamping devices on the upper frame and the lower frame respectively clamp the corresponding positions of the corresponding edges of the thin plate products. Raised handles are respectively arranged in the middle of the length direction of the longitudinal frames on both sides.

2. A thin plate product fixture according to claim 1, characterized in that: Side convex mounting devices are respectively fixedly mounted on both sides of the upper frame in the length direction, and each set of mounting devices is used to place the fixture on a storage rack or fix it inside a process chamber.

3. A thin plate product fixture according to claim 1, characterized in that: The mounting device is a circular roller, a column, or a convex shape such as a square, a trapezoid, or a triangle. The mounting device is fixed to the corresponding end of the upper frame by bolts, so that the corresponding shape structure of the mounting device can be quickly adjusted according to the actual mounting position.

4. A thin plate product fixture according to claim 1, characterized in that: The positioning frame assembly is an integrated structural component.

5. The thin plate product fixture according to claim 1, characterized in that: Alternatively, the positioning frame assembly is formed by four sets of frames fixed together by fasteners, which enables the positioning frame assembly to be quickly assembled according to the shape of the product.

6. A thin plate product fixture according to claim 1, characterized in that: Each group of elastic clamping devices includes an upper pressure block, a lower pad, a guide column, a linear spring, a manual knob, and a guide bushing. The position where the elastic clamping device needs to be installed on the corresponding frame is provided with a guide column through hole and a lower pad mounting hole. The guide column penetrates the guide column through hole from bottom to top and convexes upward. The guide bushing includes an outer convex guide ring and a lower convex guide sleeve. The lower convex guide sleeve of the guide bushing is sleeved on the guide column and then inserted into the guide column through hole. The outer wall of the lower convex guide sleeve is arranged tightly against the inner wall of the guide column through hole. The outer convex guide ring is pressed onto the upper surface of the frame. The bottom sleeve of the guide column is provided with a spring baffle. A linear spring is provided between the bottom of the lower convex guide sleeve and the spring baffle. The linear spring is sleeved on the corresponding bottom periphery of the guide column, the outer end of the lower pad is fixedly mounted on the mounting hole of the lower pad by a fastening bolt, the inner end of the lower pad is protruding inside the inner edge of the frame, the upper pressure block is fixedly mounted on the inner end of the manual knob in the length direction, the middle part of the manual knob in the length direction is fixedly connected to the upper convex end of the guide column by a connecting bolt, in an unclamped state, the upper pressure block is pressed on the upper surface of the corresponding frame, in the clamped state, the manual knob rotates toward the lower pad, the lower part of the corresponding edge of the thin plate product is supported on the upper surface of the lower pad, the bottom of the upper pressure block is pressed on the upper part of the corresponding edge of the thin plate product, and the upper pressure block is arranged directly above the lower pad.

7. A thin plate product fixture according to claim 1, characterized in that: The number of the elastic clamping devices on the upper frame and the lower frame along the length direction is not less than three.

8. The thin plate product fixture according to claim 1, characterized in that: Thick standing feet are respectively fixed on the back sides of the four corners of the rectangular frame structure.

9. The thin plate product fixture according to claim 1, characterized in that: The positioning frame assembly is set according to the shape of the thin plate product, including rectangle, circle, ellipse, and irregular polygon.