Evaporation device and evaporation system with same

Abstract

The invention discloses an evaporation device and an evaporation system with the evaporation device, and the evaporation device comprises a crucible body which is provided with an accommodating cavity for accommodating an evaporation material; the eruption assembly is movably arranged on the crucible body, the eruption assembly is provided with an eruption channel, the eruption channel is communicated with the containing cavity and the external environment, the eruption channel is provided with an eruption outlet facing the external environment, and when the eruption assembly moves relative to the crucible body, the projection of the eruption outlet on the crucible body has different positions. According to the evaporation device, the problem that the thickness of a film layer is not uniform in the evaporation process can be solved, so that a large-size OLED screen can be manufactured by adopting a higher generation line, and the price of an OLED is reduced.

Description

Technical Field

[0001] The present invention relates to the field of evaporation technology, and in particular to an evaporation device and an evaporation system having the same. Background Art

[0002] OLED display devices are increasingly used in mobile phones, tablets and other fields due to their low energy consumption, self-luminescence, wide viewing angle, fast response speed and unique flexibility. Due to the high price of OLED, OLED screens are currently mostly used in the mobile phone field, and are less used in the fields of car, computer monitors and TVs. In order to reduce the price of OLED, higher generation lines are needed to produce large-size OLED screens, but higher generation lines have higher requirements for evaporation uniformity.

[0003] During the evaporation process of the mass production line, as the material consumption and temperature change, the thickness of the evaporated film layer will be uneven. The existing film layer compensation can only compensate for the average thickness, that is, increase the overall thickness of the film layer, and has little effect on improving the uneven thickness. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes an evaporation device, which can improve the problem of uneven film thickness during the evaporation process, so that a higher generation line can be used to produce large-size OLED screens to reduce the price of OLED.

[0005] The present invention also aims to provide an evaporation system having the above evaporation device.

[0006] An evaporation device according to an embodiment of the first aspect of the present invention comprises: The crucible body has a containing cavity for containing the evaporation material; An ejection component can be movably arranged on the crucible body, and the ejection component has an ejection channel, which connects the accommodating chamber with the external environment, and the ejection channel has an ejection outlet facing the external environment. When the ejection component moves relative to the crucible body, the projection of the ejection outlet on the crucible body has different positions.

[0007] According to some embodiments of the present invention, the spray assembly is rotatably disposed on the crucible body, the rotation axis of the spray assembly is a first axis, and the spray outlet is spaced apart from the first axis.

[0008] According to some embodiments of the present invention, the spraying assembly includes a base and a nozzle, the base can be rotatably arranged on the crucible body, the first axis is the rotation axis of the base, the nozzle is connected to a position on the base deviating from the first axis, and the spraying outlet is arranged on the nozzle.

[0009] According to some embodiments of the present invention, a driving assembly is further included, wherein the driving assembly is connected to the ejection assembly to drive the ejection assembly to rotate relative to the crucible body.

[0010] According to some embodiments of the present invention, the driving assembly includes an active transmission member and a driven rotating member, the driven rotating member is connected to the spraying assembly, and the active transmission member cooperates with the driven rotating member to drive the driven rotating member to rotate.

[0011] According to some embodiments of the present invention, the active transmission member is a gear or a rack; The driven rotating member is a gear.

[0012] According to some embodiments of the present invention, the crucible body includes a main body and a cover body forming the accommodating cavity, and the spraying assembly is disposed on the cover body; It also includes a heat insulation component, which is arranged on a side of the cover body away from the accommodating cavity and covers the cover body. The heat insulation component is provided with an avoidance hole for avoiding the spraying component.

[0013] According to some embodiments of the present invention, the heat insulation component includes a first heat insulation member and a second heat insulation member, the first heat insulation member is connected to an end of the spray assembly away from the cover body and covers the spray assembly, and the first heat insulation member is provided with a first avoidance hole for avoiding the spray outlet; The second thermal insulation member is disposed on a side of the cover body away from the accommodating cavity and covers the cover plate. The second thermal insulation member is provided with a second avoidance hole, and the projection of the second avoidance hole on the first thermal insulation member falls into the first thermal insulation member.

[0014] According to some embodiments of the present invention, there are a plurality of first thermal insulation members, and the plurality of first thermal insulation members are arranged at intervals along the thickness direction of the cover plate; There are a plurality of the second thermal insulation members, and one second thermal insulation member is stacked between two adjacent first thermal insulation members.

[0015] According to some embodiments of the present invention, a rectifying plate is further included, wherein the rectifying plate is arranged in the accommodating chamber to divide the accommodating chamber into a first chamber and a second chamber, the spraying assembly is arranged in the first chamber, and the rectifying plate is provided with a plurality of rectifying holes arranged at intervals and passing through the first chamber and the second chamber.

[0016] According to some embodiments of the present invention, the crucible body is provided with a mounting hole, the base is mounted in the mounting hole, and the outer circumference of the base close to the accommodating cavity is smaller than the outer circumference of the base away from the accommodating cavity.

[0017] In the present application, an evaporation device is provided, which can be used for evaporation of evaporation materials. The crucible body of the evaporation device has a containing cavity, which can be used to contain the evaporation material. The crucible body is placed in a vacuum environment and the crucible body is heated at a high temperature to evaporate the evaporation material. By setting a spray assembly that can be movably arranged on the crucible body, the evaporation material that has been heated and evaporated can be sprayed onto the surface of the substrate. The spray channel connecting the containing cavity and the external environment allows the evaporation material to enter the external environment from the containing cavity. When the spray assembly moves relative to the crucible body, the projection of the spray outlet on the crucible body has different positions, that is, the position of the spray outlet can change relative to the crucible body. In this way, when the monitoring device monitors that the film thickness on the substrate is uneven, the thinner area of ​​the film layer can be compensated by changing the position of the spray outlet, thereby improving the problem of uneven film thickness during the evaporation process, so that a higher generation line can be used to produce large-size OLED screens and reduce the price of OLEDs.

[0018] The evaporation system according to the second embodiment of the present invention comprises the evaporation device in the above embodiment.

[0019] According to the evaporation system of the embodiment of the present invention, by adopting the evaporation device in the above embodiment, the problem of uneven film thickness during the evaporation process is improved, so that a higher generation line can be used to produce large-size OLED screens, reducing the price of OLED.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of an evaporation device according to an embodiment of the present application; Figure 2 is a cross-sectional schematic diagram of an evaporation device according to an embodiment of the present application; Figure 3 yes Figure 2 The enlarged view of point A in the middle; Figure 4 is a schematic structural diagram of an evaporation device according to an embodiment of the present application without a second heat insulating member; Figure 5 is a schematic diagram of the structure of the driving component and the spraying component of the evaporation device according to an embodiment of the present application; Figure 6 is a top view of the driving assembly and the spray assembly of the evaporation device according to an embodiment of the present application; Figure 7 is a structural schematic diagram of a cover body of an evaporation device according to an embodiment of the present application; Figure 8is a top view of a rectifying plate of an evaporation device according to an embodiment of the present application.

[0022] Reference numerals: Evaporation device 100, Crucible body 10, body 11, cover body 12, mounting hole 12a, support block 121, accommodating cavity 13, first cavity 131, second cavity 132, Spraying assembly 20, base 21, nozzle 22, spraying channel 23, spraying outlet 23a, Driving assembly 30, active transmission member 31, driven rotating member 32, The heat insulation component 40, the first heat insulation component 41, the first avoidance hole 41a, the second heat insulation component 42, the second avoidance hole 42a, Rectifier plate 50 and rectifying hole 51. DETAILED DESCRIPTION

[0023] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific processes and examples of materials, but those of ordinary skill in the art can be aware of the applicability of other processes and / or the use of other materials.

[0025] OLED display devices are increasingly used in mobile phones, tablets and other fields due to their low energy consumption, self-luminescence, wide viewing angle, fast response speed and unique flexibility. Due to the high price of OLED, OLED screens are currently mostly used in the mobile phone field, and are less used in the fields of car, computer monitors and TVs. In order to reduce the price of OLED, higher generation lines are needed to produce large-size OLED screens, but higher generation lines have higher requirements for evaporation uniformity.

[0026] During the evaporation process of the mass production line, as the material consumption and temperature change, the thickness of the evaporated film layer will be uneven, and the uneven thickness of the evaporated film layer will cause uneven display. Since the performance of the strong microcavity top emission device is more sensitive to the thickness of the evaporated film layer, the uneven thickness of the evaporated film layer will have a greater impact on the top emission product. The greater the inhomogeneity of the film thickness will reduce the margin of the total white light color deviation, further causing the loss of yield. The existing technology can monitor the change of the film thickness through monitoring equipment and make an average compensation for the film thickness, but the average compensation can only compensate for the overall thickness of the film layer, that is, increase the overall thickness of the film layer, and cannot only compensate for the thinner area of ​​the film layer. Therefore, the improvement effect on the uneven thickness is small.

[0027] Based on this, the present invention proposes an evaporation device 100 which can improve the problem of uneven film thickness during the evaporation process, so that a higher generation line can be used to produce large-size OLED screens to reduce the price of OLEDs.

[0028] Figure 1-Figure 8 Schematic diagram of the structure of the evaporation device 100 according to an embodiment of the present invention. Figure 1-Figure 3 , an evaporation device 100 is used for evaporation of evaporation materials.

[0029] Vacuum evaporation, or evaporation for short, refers to a process in which a coating material (or film material) is evaporated and gasified by a certain heating evaporation method under vacuum conditions, and the particles fly to the surface of the substrate and condense into a film. Evaporation is an earlier and more widely used vapor deposition technology, with the advantages of simple film formation method, high film purity and density, and unique film structure and performance.

[0030] Evaporation materials are mainly divided into three categories: metal and non-metal particles, oxides and fluorides. Specific materials include: Metal and non-metal particles: aluminum, nickel, copper, silver, titanium, silicon, vanadium, magnesium, tin, chromium, indium, silver copper, gold, microcrystalline silver powder, etc.

[0031] Oxides: titanium-tantalum alloy, zirconium-titanium alloy, silicon-aluminum alloy, aluminum oxide, zirconium dioxide, titanium pentoxide, quartz rings, quartz sheets, erbium oxide, lanthanum titanate, etc.

[0032] Fluorides: magnesium fluoride, dysprosium fluoride, lanthanum fluoride, etc.

[0033] The industrial chain of evaporation materials includes upstream raw materials, midstream production and supply links, and downstream applications in solar cells, flat panel displays, optical components, light-emitting diodes, OLED lighting components and other fields.

[0034] Reference Figure 2The evaporation device 100 includes a crucible body 10 having a receiving cavity 13 for receiving the evaporation material. The evaporation material is evaporated by placing the crucible body 10 in a vacuum environment and heating the crucible body 10 at a high temperature.

[0035] Reference Figure 1-Figure 3 The evaporation device 100 further includes a spray assembly 20, which is movably disposed on the crucible body 10. Specifically, the spray assembly 20 may not be relatively displaced with the crucible body 10; illustratively, the spray assembly 20 may be rotatably connected to the crucible body 10. The spray assembly 20 may also be relatively displaced with the crucible body 10; illustratively, the spray assembly 20 may move along a certain path on the crucible body 10. The spray assembly 20 may be detachably connected to the crucible body 10 through a connector, and may be limited by a limiter, etc.

[0036] Reference Figure 3 The spraying assembly 20 has a spraying channel 23, which connects the accommodating chamber 13 with the external environment, so that the evaporation material can be sprayed from the accommodating chamber 13 to the substrate in the external environment through the spraying channel 23.

[0037] It is understandable that the path of the eruption channel 23 can be a straight line, oblique line, curve, broken line, irregular line, etc. The caliber of the eruption channel 23 can be always the same, or it can be gradually reduced along its path, or it can be divided into different caliber sections along its path, etc.

[0038] Reference Figure 3 The ejection channel 23 has an ejection outlet 23a facing the external environment, that is, during the evaporation process, particles of the evaporation material fly from the ejection outlet 23a to the surface of the substrate and condense into a film.

[0039] Reference Figure 3 When the ejection assembly 20 moves relative to the crucible body 10, for example, when the ejection assembly 20 rotates relative to the crucible body 10, or when the ejection assembly 20 is relatively displaced relative to the crucible body 10, the projection of the ejection outlet 23a on the crucible body 10 has different positions, that is, the position of the ejection outlet 23a relative to the crucible body 10 can change. In this way, when the monitoring device detects that the film thickness on the substrate is uneven, the position of the ejection outlet 23a can be changed to compensate for the thinner film area, thereby improving the problem of uneven film thickness during the evaporation process, so that higher generation lines can be used to produce large-size OLED screens and reduce the price of OLEDs.

[0040] Therefore, refer to Figure 1-Figure 3The evaporation device 100 according to the present invention can be used for evaporation of evaporation materials. The crucible body 10 of the evaporation device 100 has a containing chamber 13, and the containing chamber 13 can be used to contain the evaporation material. The crucible body 10 is placed in a vacuum environment, and the crucible body 10 is heated at a high temperature to evaporate the evaporation material. By setting a spraying component 20 that can be movably arranged on the crucible body 10, the evaporation material that has been heated and evaporated can be sprayed onto the surface of the substrate. The spraying channel 23 that connects the containing chamber 13 with the external environment allows the evaporation material to enter the external environment from the containing chamber 13. When the ejection assembly 20 moves relative to the crucible body 10, the projection of the ejection outlet 23a on the crucible body 10 has different positions, that is, the position of the ejection outlet 23a relative to the crucible body 10 can change. In this way, when the monitoring equipment detects that the film thickness on the substrate is uneven, the position of the ejection outlet 23a can be changed to compensate for the thinner area of ​​the film layer, thereby improving the problem of uneven film thickness during the evaporation process, so that higher generation lines can be used to produce large-size OLED screens, thereby reducing the price of OLEDs.

[0041] In some embodiments, reference Figure 1 and Figure 2 There are multiple spray assemblies 20, and the multiple spray assemblies 20 are arranged at intervals along the length direction of the crucible body 10. Preferably, the multiple spray assemblies 20 are evenly arranged along the length direction of the crucible body 10.

[0042] In some embodiments of the present invention, reference Figure 2 and Figure 3 The spray assembly 20 can be rotatably disposed on the crucible body 10, the rotation axis of the spray assembly 20 is the first axis, and the spray outlet 23a is spaced from the first axis.

[0043] By rotatably arranging the spray assembly 20 on the crucible body 10, the spray assembly 20 and the crucible body 10 are not relatively positioned, thus improving the sealing of the crucible body 10. The spray outlet 23a is spaced apart from the first axis, so that when the spray assembly 20 and the crucible body 10 rotate relative to each other, the position of the spray outlet 23a can change. Specifically, the position trajectory of the spray outlet 23a is a circle with the first axis as the center and the distance between the spray outlet 23a and the first axis as the radius.

[0044] Specifically, the interval between the ejection outlet 23a and the first axis may be an interval between the geometric center of the ejection outlet 23a and the first axis; or an interval between the edge of the ejection outlet 23a and the first axis. Exemplarily, the edge of the ejection outlet 23a may be an edge close to the first axis, or an edge away from the first axis.

[0045] The distance between the spray outlet 23a and the first axis can be set according to actual conditions. For example, the spray outlet 23a can be set between the first axis and the edge of the spray assembly 20.

[0046] In some embodiments of the present invention, reference Figure 2 and Figure 3 The spray assembly 20 includes a base 21 and a nozzle 22. The base 21 can be rotatably arranged on the crucible body 10. The first axis is the rotation axis of the base 21. The nozzle 22 is connected to a position on the base 21 that deviates from the first axis. The spray outlet 23a is arranged on the nozzle 22.

[0047] By rotatably setting the base 21 on the crucible body 10 and taking the first axis as the rotation axis, the spray assembly 20 can be rotatably set on the crucible body 10 with the first axis as the rotation axis. The nozzle 22 is connected to the base 21 at a position deviating from the first axis, that is, during the rotation of the base 21, the position of the nozzle 22 on the crucible body 10 will change, and the spray outlet 23a is set on the nozzle 22, and during the rotation of the base 21, the position of the spray outlet 23a on the crucible body 10 will change.

[0048] Specifically, the nozzle 22 and the base 21 can be fixedly connected, and illustratively, the nozzle 22 and the base 21 can be welded, etc.; the nozzle 22 and the base 21 can also be detachably connected, and illustratively, the nozzle 22 and the base 21 can be connected by snap connection, thread connection, connecting piece, etc.; the nozzle 22 and the base 21 can also be integrally formed and connected. Preferably, the nozzle 22 and the base 21 are integrally formed and connected, which improves the structural strength and sealing of the spray assembly 20.

[0049] It is understandable that the ejection outlet 23a can be provided at any position of the nozzle 22. For example, the ejection outlet 23a can be provided at the side of the nozzle 22 or at the end away from the base 21. Preferably, the ejection outlet is provided at the end of the nozzle 22 away from the base 21.

[0050] In some embodiments, the nozzle 22 is in a hollow cylindrical shape and is disposed along the depth direction of the crucible body 10. Of course, it is understandable that the nozzle 22 can also be configured in other shapes as long as it can spray the evaporation material.

[0051] In some embodiments of the present invention, reference Figure 4-Figure 6 The evaporation device 100 further includes a driving assembly 30 , which is connected to the spray assembly 20 to drive the spray assembly 20 to rotate relative to the crucible body 10 .

[0052] By providing the driving assembly 30 and connecting the driving assembly 30 to the spraying assembly 20, the spraying assembly 20 can be driven to rotate relative to the crucible body 10, so as to facilitate the adjustment of the position of the spraying outlet 23a.

[0053] In some embodiments, the drive component 30 can be connected to the controller of the monitoring device. When the monitoring device detects that the thickness of the film layer is uneven, it can send a drive instruction to the drive component 30, so that the drive component 30 drives the spray component 20 to rotate, and adjusts the rotation angle of the spray component 20 according to the position information of the thinner film layer obtained by the monitoring setting, so that the spray component 20 can be close to the position where the film layer is thinner, and the thickness compensation is performed at the position where the film layer is thinner, thereby improving the accuracy of the compensation.

[0054] It is understandable that the driving assembly 30 can directly drive the spraying assembly 20 to rotate, or can drive the intermediate transmission assembly to indirectly drive the spraying assembly 20 to rotate, etc.

[0055] In some embodiments of the present invention, reference Figure 5 and Figure 6 The driving assembly 30 includes an active transmission member 31 and a driven rotating member 32. The driven rotating member 32 is connected to the spraying assembly 20. The active transmission member 31 cooperates with the driven rotating member 32 to drive the driven rotating member 32 to rotate.

[0056] By providing an active transmission member 31 and a driven rotating member 32 that mesh with each other, and connecting the driven rotating member 32 to the spray assembly 20, the active transmission member 31 can be driven so that the active transmission member 31 transmits power to the driven rotating member 32, and then to the spray assembly 20, so as to drive the spray assembly 20 to rotate. The provision of the active transmission member 31 and the driven rotating member 32 can change the driving position and driving mode of the spray assembly 20, and facilitate driving.

[0057] Specifically, the driven rotating member 32 and the spray assembly 20 can be fixedly connected, and for example, the driven rotating member 32 and the spray assembly 20 can be welded, etc.; the driven rotating member 32 and the spray assembly 20 can also be detachably connected, and for example, the driven rotating member 32 and the spray assembly 20 can be connected by snap-fit ​​connection, threaded connection, connector connection, etc.; the driven rotating member 32 and the spray assembly 20 can also be integrally connected. Preferably, the driven rotating member 32 and the spray assembly 20 are integrally connected, which improves the structural strength and sealing of the spray assembly 20.

[0058] In some embodiments, the active transmission member 31 may be fixedly connected to the driven rotating member 32. For example, the driven rotating member 32 and the active transmission member 31 may be welded, snap-fitted, threaded, connected by a connector, integrally formed, etc. The active transmission member 31 may also mesh with the driven rotating member 32.

[0059] In some embodiments, the driving assembly 30 further includes a driving member, which provides power for the rotation of the spraying assembly 20. The driving mode of the driving member can be linear driving, and illustratively, the driving member can be a linear motor, a cylinder, etc.; the driving mode of the driving member can also be rotational driving, and illustratively, the driving member can be a rotational motor, etc.

[0060] In some embodiments of the present invention, reference Figure 5 and Figure 6 The active transmission member 31 is a gear or a rack; the driven rotating member 32 is a gear.

[0061] By setting the active transmission member 31 as a gear or a rack and the driven rotating member 32 as a gear, the active transmission member 31 and the driven rotating member 32 can mesh and cooperate, and the linear motion or rotational motion of the active transmission member 31 can drive the driven rotating member 32 to rotate, and at the same time, the transmission stability is higher.

[0062] When the active transmission member 31 is a rack, a linear drive member can be used to drive the rack to move in a straight line, thereby driving the driven rotating member 32 to rotate, thereby changing the driving direction; when the active transmission member 31 is a gear, a rotary drive member can be used to drive the gear to rotate, thereby driving the driven rotating member 32 to rotate, thereby changing the driving position.

[0063] In some embodiments, the nozzle 22, the driven rotating member 32 and the base 21 are integrally formed and connected in sequence.

[0064] In some embodiments, the active transmission member 31 and the driven rotating member 32 may also be sprocket chains or the like.

[0065] In some embodiments of the present invention, reference Figure 2 and Figure 3 The crucible body 10 includes a main body 11 and a cover body 12 forming an accommodating cavity 13, and the spraying assembly 20 is arranged on the cover body 12; it also includes a heat insulation assembly 40, which is arranged on a side of the cover body 12 away from the accommodating cavity 13 and covers the cover body 12. The heat insulation assembly 40 is provided with an avoidance hole for avoiding the spraying assembly 20.

[0066] By providing the body 11 and the cover 12, the body 11 and the cover 12 enclose a receiving chamber 13, which can accommodate the evaporation material. The cover 12 is separated from the body 11, which facilitates opening and closing of the receiving chamber 13. By providing the heat insulation component 40 on the side of the cover 12 away from the receiving chamber 13, the influence of high temperature on the substrate can be reduced. The avoidance hole is used to avoid the spraying component 20, so that the spraying component 20 can spray the evaporation material onto the substrate.

[0067] Specifically, refer to Figure 7A support block 121 is provided on the side of the cover body 12 away from the accommodating chamber 13, and the heat insulation assembly 40 is provided on the support block 121. Further, the support block 121 can be provided in plurality to stably support the heat insulation assembly 40. Further, there are multiple spray assemblies 20, and the multiple support blocks 121 are staggered with the multiple spray assemblies 20, which further improves the stability of the support assembly. The heat insulation assembly 40 can be overlapped with the support block 121 for easy disassembly and assembly, and can also be connected by a connector to improve the connection stability.

[0068] In some embodiments, the support block 121 can be fixedly connected to the cover body 12. For example, the support block 121 and the cover body 12 can be welded, etc.; the support block 121 and the cover body 12 can also be detachably connected. For example, the support block 121 and the cover body 12 can be connected by snap connection, thread connection, connector, etc.; the support block 121 and the cover body 12 can also be integrally formed. Preferably, the support block 121 and the cover body 12 are integrally formed to improve stability.

[0069] In some embodiments of the present invention, reference Figure 2 and Figure 3 The thermal insulation component 40 includes a first thermal insulation component 41 and a second thermal insulation component 42. The first thermal insulation component 41 is connected to one end of the spraying component 20 away from the cover body 12 and covers the spraying component 20. The first thermal insulation component 41 is provided with a first avoidance hole 41a for avoiding the spraying outlet 23a; the second thermal insulation component 42 is provided on the side of the cover body 12 away from the accommodating cavity 13 and covers the cover body 12. The projection of the second avoidance hole 42a on the first thermal insulation component 41 falls into the first thermal insulation component 41.

[0070] By connecting the first thermal insulation member 41 to the end of the spray assembly 20 away from the cover body 12 and covering the spray assembly 20, the first thermal insulation member 41 can block the connection gap between the spray assembly 20 and the cover body 12, so that heat is not easily transferred to the substrate through the connection gap. A second thermal insulation member 42 is arranged on the side of the cover body 12 away from the accommodating cavity 13, so that heat is not easily transferred to the substrate through the cover body 12, and the substrate is not easily damaged. The projection of the second avoidance hole 42a on the first thermal insulation member 41 falls into the first thermal insulation member 41, that is, the first thermal insulation member 41 and the second thermal insulation member 42 are arranged in a stacked manner, so that the heat on the side of the cover body 12 away from the accommodating cavity is not easily transferred to the substrate.

[0071] Specifically, the first thermal insulation member 41 can partially cover the spray assembly 20, or can completely cover the spray assembly 20, as long as it can cover the connection gap between the spray assembly 20 and the cover body 12, so as to prevent heat from reaching the substrate through the connection gap. The second thermal insulation member 42 can partially cover the cover body 12, or can completely cover the cover body 12. Preferably, the second thermal insulation member 42 completely covers the cover body 12, leaving only the second avoidance hole 42a.

[0072] The size of the first avoidance hole 41a can be completely the same as the outer peripheral size of the eruption outlet 23a, or it can be slightly larger than the outer peripheral size of the eruption outlet 23a. Preferably, the size of the first avoidance hole 41a is slightly larger than the outer peripheral size of the eruption outlet 23a to prevent heat from being conducted to the first thermal insulation component 41.

[0073] In some embodiments of the present invention, reference Figure 2 , Figure 3 and Figure 5 There are multiple first thermal insulation members 41, and the multiple first thermal insulation members 41 are arranged at intervals along the thickness direction of the cover plate; there are multiple second thermal insulation members 42, and one second thermal insulation member 42 is stacked between two adjacent first thermal insulation members 41.

[0074] By providing a plurality of first heat insulating members 41 and a plurality of second heat insulating members 42 stacked with the first heat insulating members 41, the amount of heat transferred to the substrate is further reduced.

[0075] Specifically, the plurality of first thermal insulation members 41 can be connected to the spray assembly 20 through a connecting member, and illustratively, the plurality of first thermal insulation members 41 can be connected to the spray assembly 20 through bolts. The plurality of first thermal insulation members 41 can be arranged at intervals through gaskets. Of course, it is understood that the plurality of first thermal insulation members 41 can also be connected to the connecting member at intervals through a fixing member.

[0076] It is understandable that the shape of the first heat insulation board is not limited, and may be round, square, irregular, etc. The first heat insulation board may be a board with high reflectivity, and the material of the first heat insulation member 41 may be the same as that of the crucible.

[0077] In some embodiments of the present invention, reference Figure 2 and Figure 8 The evaporation device 100 also includes a rectifying plate 50, which is disposed in the accommodating chamber 13 to divide the accommodating chamber 13 into a first chamber 131 and a second chamber 132. The spray assembly 20 is disposed in the first chamber 131, and the rectifying plate 50 is provided with a plurality of rectifying holes 51 arranged at intervals and penetrating the first chamber 131 and the second chamber 132.

[0078] By setting the rectifying plate 50, the pressure of the evaporation material entering the spraying assembly 20 is adjusted, which is conducive to uniform spraying. The accommodating chamber 13 is divided into a first chamber 131 and a second chamber 132 by the rectifying plate 50, and the spraying assembly 20 is arranged in the first chamber 131. In this way, the evaporation material enters the first chamber 131 after being rectified by the rectifying plate 50, and the pressure is uniform, which is conducive to uniform spraying of the spraying assembly 20. The evaporation material is rectified through the rectifying hole 51.

[0079] It can be understood that the rectifying plate 50 can be arranged at any position in the accommodating chamber 13, as long as the accommodating chamber 13 can be divided into the first chamber 131 and the second chamber 132, and the spray assembly 20 is located in the first chamber 131. Exemplarily, the rectifying plate 50 can be arranged in parallel with the cover body 12. In this case, the rectifying plate 50 can be arranged close to the cover body 12, or arranged away from the cover body 12, or arranged in the middle of the bottom of the cover body 12 and the body 11. Preferably, the rectifying plate 50 is arranged close to the cover body 12 to prevent the evaporation material from flooding the rectifying plate 50. The rectifying plate 50 can also be arranged at a certain angle with the cover body 12. Exemplarily, the angle between the rectifying plate 50 and the cover body 12 can be 5°, 8°, 10°, 15°, 20°, etc.

[0080] The rectifier plate 50 and the main body 11 can be fixedly connected, for example, the rectifier plate 50 and the main body 11 can be welded, integrally formed, etc.; the rectifier plate 50 and the main body 11 can also be detachably connected, for example, the rectifier plate 50 and the main body 11 can be snap-connected, threaded, connected by a connector, etc.

[0081] It is understandable that the shape of the rectifying hole 51 can be circular, square, triangular, irregular, etc., which is not limited here. In the present application, the rectifying hole 51 is set to be circular. The diameter of the rectifying hole 51 can be larger than the diameter of the ejection outlet 23a.

[0082] The plurality of rectifying holes 51 may be arranged at random intervals or at the same intervals. Preferably, the plurality of rectifying holes 51 are evenly arranged along the length direction of the rectifying plate 50 , and the plurality of rectifying holes 51 are evenly arranged along the width direction of the rectifying plate 50 .

[0083] In some embodiments of the present invention, reference Figure 3 and Figure 7 The crucible body 10 is provided with a mounting hole 12 a , and the base 21 is mounted in the mounting hole 12 a . The outer circumference of the base 21 close to the accommodating cavity 13 is smaller than the outer circumference of the base 21 away from the accommodating cavity 13 .

[0084] The installation hole 12a is provided to facilitate installation of the base 21. By setting the outer circumference of the base 21 close to the accommodating cavity 13 to be smaller than the outer circumference of the side away from the accommodating cavity 13, it is convenient to overlap the base 21 with the installation hole 12a, and prevent the base 21 from falling into the accommodating cavity 13, so as to facilitate further fixed installation.

[0085] Specifically, the size of the outer periphery of the base 21 gradually increases from the direction close to the accommodating cavity 13 to the direction away from the accommodating cavity 13. Exemplarily, the longitudinal section of the base 21 is an inverted trapezoidal structure.

[0086] In some embodiments, a boss may be provided in the mounting hole 12a, and the boss may be provided in a rotational direction, and the base 21 and the body 11 may be rotatably connected via a bearing, etc.

[0087] The evaporation system according to the second embodiment of the present invention comprises the evaporation device 100 in the above embodiment.

[0088] According to the evaporation system of the embodiment of the present invention, by adopting the evaporation device 100 in the above embodiment, the problem of uneven film thickness during the evaporation process is improved, so that a higher generation line can be used to produce large-size OLED screens, reducing the price of OLED.

[0089] The evaporation system provided in this embodiment may further include an evaporation chamber and an evaporation substrate. When performing vacuum evaporation, the evaporation system can move and spray the evaporation material onto the evaporation substrate, and a desired film layer can be formed through a mask. The evaporation system provided in this embodiment includes the evaporation device 100 in the above embodiment, so the evaporation system provided in this embodiment also has the beneficial effects described in the above embodiment, which will not be repeated here.

[0090] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0091] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0092] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or means that the first feature is lower in level than the second feature.

[0093] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0094] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An evaporation device for evaporation of evaporation materials, characterized in that: include: The crucible body has a containing cavity for containing the evaporation material; An ejection component can be movably arranged on the crucible body, and the ejection component has an ejection channel, which connects the accommodating chamber with the external environment, and the ejection channel has an ejection outlet facing the external environment. When the ejection component moves relative to the crucible body, the projection of the ejection outlet on the crucible body has different positions.

2. The evaporation device according to claim 1, characterized in that The spray assembly can be rotatably disposed on the crucible body, the rotation axis of the spray assembly is a first axis, and the spray outlet is spaced apart from the first axis.

3. The evaporation device according to claim 2, characterized in that: The spray assembly includes a base and a nozzle. The base is rotatably arranged on the crucible body. The first axis is the rotation axis of the base. The nozzle is connected to a position on the base deviating from the first axis. The spray outlet is arranged on the nozzle.

4. The evaporation device according to claim 1, characterized in that: The device also includes a driving component, which is connected to the ejection component to drive the ejection component to rotate relative to the crucible body.

5. The evaporation device according to claim 4, characterized in that: The driving assembly includes an active transmission member and a driven rotating member, the driven rotating member is connected to the spraying assembly, and the active transmission member cooperates with the driven rotating member to drive the driven rotating member to rotate.

6. The evaporation device according to claim 5, characterized in that The active transmission member is a gear or a rack; The driven rotating member is a gear.

7. The evaporation device according to claim 1, characterized in that The crucible body comprises a main body and a cover body forming the accommodating cavity, and the spraying assembly is arranged on the cover body; It also includes a heat insulation component, which is arranged on a side of the cover body away from the accommodating cavity and covers the cover body. The heat insulation component is provided with an avoidance hole for avoiding the spraying component.

8. The evaporation device according to claim 7, characterized in that The heat insulation component comprises a first heat insulation member and a second heat insulation member, wherein the first heat insulation member is connected to an end of the spray assembly away from the cover body and covers the spray assembly, and the first heat insulation member is provided with a first avoidance hole for avoiding the spray outlet; The second thermal insulation member is disposed on a side of the cover body away from the accommodating cavity and covers the cover plate. The second thermal insulation member is provided with a second avoidance hole, and the projection of the second avoidance hole on the first thermal insulation member falls into the first thermal insulation member.

9. The evaporation device according to claim 8, characterized in that There are a plurality of first heat insulating members, and the plurality of first heat insulating members are arranged at intervals along the thickness direction of the cover plate; There are a plurality of the second thermal insulation members, and one second thermal insulation member is stacked between two adjacent first thermal insulation members.

10. The evaporation device according to claim 1, characterized in that It also includes a rectifying plate, which is arranged in the accommodating chamber to divide the accommodating chamber into a first chamber and a second chamber. The spraying assembly is arranged in the first chamber, and the rectifying plate is provided with a plurality of rectifying holes arranged at intervals and passing through the first chamber and the second chamber.

11. The evaporation device according to claim 3, characterized in that: The crucible body is provided with a mounting hole, the base is mounted in the mounting hole, and the outer circumference of the base on a side close to the accommodating cavity is smaller than the outer circumference of the base on a side away from the accommodating cavity.

12. An evaporation system, characterized in that: The evaporation device comprises the evaporation device according to any one of claims 1 to 11.

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