Evaporation source baffle

Abstract

The invention provides an evaporation source baffle which comprises a base, a placing part and a baffle assembly, the placing part is connected with the base, the placing part and the base are spaced in the height direction of the base, the placing part is used for placing an evaporation source, the baffle assembly is connected with the base, and the baffle assembly comprises a first shielding part and a second shielding part, the first shielding part is located between the second shielding part and the placing part, the first shielding part is provided with an opening, the first shielding part and the second shielding part can rotate around a first axial direction, the first axial direction is parallel to the height direction of the base, and the baffle assembly has a first state and a second state; in the first state, the placing part, the first shielding part and the second shielding part are arranged in the height direction of the base at a time, and in the second state, the second shielding part is spaced from the opening in the plane orthogonal to the height direction of the base. The evaporation source baffle can assist in adjusting the overall uniformity of a film surface and improve the quality of a film layer.

Description

Technical Field

[0001] The invention relates to the technical field of film coating equipment, and in particular to an evaporation source baffle. Background Art

[0002] With the continuous advancement of thin-film battery technology, its application in photovoltaics, optoelectronics and other fields is becoming more and more extensive. Thin-film batteries have become a research hotspot in the field of new energy due to their lightness, flexibility and low cost. However, in the preparation process of thin-film batteries, coating uniformity is a technical problem that has long plagued the industry.

[0003] In related technologies, especially when processing large-area substrates, how to ensure the uniformity of the film layer is the key to improving the conversion efficiency and reliability of thin-film batteries. At present, commonly used evaporation sources include point sources and line sources. During the coating process, these evaporation sources often lead to uneven thickness and composition distribution of the coating layer on the substrate due to factors such as uneven heat distribution and difficulty in controlling the evaporation rate of the material. This unevenness can seriously affect the performance of thin-film batteries, such as reducing the photoelectric conversion efficiency, increasing the series resistance, and reducing the battery life. Summary of the invention

[0004] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0005] To this end, an embodiment of the present invention provides an evaporation source baffle, which can assist in adjusting the overall uniformity of the film surface and improve the quality of the film layer.

[0006] The evaporation source baffle according to an embodiment of the present invention comprises:

[0007] Base;

[0008] a placement portion, the placement portion being connected to the base and spaced apart from the base in a height direction of the base, and the placement portion being used to place an evaporation source;

[0009] A baffle assembly, the baffle assembly is connected to the base, the baffle assembly includes a first shielding portion and a second shielding portion, the first shielding portion and the second shielding portion are arranged at intervals in the height direction of the base, and the first shielding portion is located between the second shielding portion and the placement portion, the first shielding portion has an opening, the first shielding portion and the second shielding portion are both rotatable around a first axial direction, the first axial direction is parallel to the height direction of the base, the baffle assembly has a first state and a second state,

[0010] In the first state, the placement portion, the first shielding portion, and the second shielding portion are arranged in one place in the height direction of the base;

[0011] In the second state, the second shielding portion is spaced apart from the opening in a plane perpendicular to the height direction of the base.

[0012] The evaporation source baffle of the embodiment of the present invention can effectively control the heat distribution and the evaporation rate of the material by utilizing the spaced arrangement of the first shielding portion and the second shielding portion, reduce the fluctuation of the film thickness and the uneven distribution of components, improve the uniformity of the film layer, and thus improve the performance of the thin-film battery; enhance the stability and reliability of the overall structure; improve the adjustability of the evaporation source to adapt to different process requirements; simplify operation and maintenance, and reduce manufacturing costs.

[0013] In some embodiments, the baffle assembly includes a support member, the support member includes a first support portion and a second support portion, the first support portion is connected to the base, the second support portion is connected to the first support portion, and the second support portion is movable relative to the first support portion along the height direction of the base, and the first shielding portion and the second shielding portion are both connected to the second support portion.

[0014] In some embodiments, the support member further includes a third support portion, the third support portion is connected to the second support portion, and the third support portion is movable relative to the second support portion along the height direction of the base, and the second shielding portion is connected to the third support portion.

[0015] In some embodiments, the first shielding portion includes a shielding frame, a first shielding plate and a second shielding plate, the first shielding plate and the second shielding plate are both connected to the shielding frame, and the first shielding plate and the second shielding plate are movable along the width direction of the shielding frame, and in the first state, the first shielding plate adjacent to the second shielding plate on one side and the second shielding plate adjacent to the first shielding plate on the other side define the opening.

[0016] In some embodiments, the first shielding plate and the second shielding plate are spaced apart in a height direction of the base.

[0017] In some embodiments, a first concave arc portion is provided on a side of the first baffle plate adjacent to the second baffle plate, and a second concave arc portion is provided on a side of the second baffle plate adjacent to the first baffle plate. In the first state, the first concave arc portion and the second concave arc portion define the opening.

[0018] In some embodiments, the distance between the first shielding plate and the base is equal to the distance between the second shielding plate and the base.

[0019] In some embodiments, there are multiple first shielding plates, which are sequentially connected along the length direction of the shielding frame; there are multiple second shielding plates, which are sequentially connected along the length direction of the shielding frame.

[0020] In some embodiments, the first shielding plate includes a first matching portion and a second matching portion, the first matching portion and the second matching portion are arranged opposite to each other along the length direction of the shielding frame, and in two adjacent first shielding plates, the first matching portion of one first shielding plate is connected to the second matching portion of the other first shielding plate;

[0021] The second shielding plate includes a third matching portion and a fourth matching portion, and the third matching portion and the fourth matching portion are arranged relatively to each other along the length direction of the shielding frame. In two adjacent second shielding plates, the third matching portion of one second shielding plate is connected to the fourth matching portion of the other second shielding plate.

[0022] In some embodiments, the baffle assembly also includes a first flexible portion and a second flexible portion, the first flexible portion is connected to the plurality of the first baffles and is located on a side of the first baffle adjacent to the second baffle, and the second flexible portion is connected to the plurality of the second baffles and is located on a side of the second baffle adjacent to the first baffle. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of the structure of the evaporation source baffle according to an embodiment of the present invention.

[0024] Figure 2 It is a schematic structural diagram of an evaporation source baffle according to another embodiment of the present invention.

[0025] Figure 3 It is a cross-sectional schematic diagram of a first shielding plate of an evaporation source baffle in an embodiment of the present invention.

[0026] Figure 4 It is a cross-sectional schematic diagram of a first shielding plate of an evaporation source baffle according to another embodiment of the present invention.

[0027] Figure 5 yes Figure 2 An enlarged schematic diagram of A is shown in FIG.

[0028] Reference numerals:

[0029] 1. Base,

[0030] 2. Placement Department,

[0031] 3. baffle assembly, 31. first shielding portion, 311. opening, 312. shielding frame, 313. first shielding plate, 3131. first concave arc portion, 3132. first matching portion, 3133. second matching portion, 314. second shielding plate, 3141. second concave arc portion, 3142. third matching portion, 3143. fourth matching portion, 32. second shielding portion, 33. support member, 331. first supporting portion, 332. second supporting portion, 333. third supporting portion, 34. first flexible portion, 35. second flexible portion. DETAILED DESCRIPTION

[0032] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0033] like Figure 1-Figure 5 As shown, the evaporation source baffle of the embodiment of the present invention includes: a base 1, a placement portion 2 and a baffle assembly 3.

[0034] The placement portion 2 is connected to the base 1, and the placement portion 2 and the base 1 are spaced apart in the height direction of the base 1. The placement portion 2 is used to place the evaporation source. The baffle assembly 3 is connected to the base 1, and the baffle assembly 3 includes a first shielding portion 31 and a second shielding portion 32. The first shielding portion 31 and the second shielding portion 32 are spaced apart in the height direction of the base 1 (such as Figure 1 The first shielding portion 31 is located between the second shielding portion 32 and the placement portion 2, the first shielding portion 31 has an opening 311, the first shielding portion 31 and the second shielding portion 32 are both rotatable around a first axial direction, the first axial direction is parallel to the height direction of the base 1, the baffle assembly 3 has a first state and a second state, in the first state, the placement portion 2, the first shielding portion 31 and the second shielding portion 32 are arranged once in the height direction of the base 1; in the second state, in a plane orthogonal to the height direction of the base 1, the second shielding portion 32 is spaced apart from the opening 311.

[0035] Specifically, Figure 1As shown, the base 1 serves as the basis of the entire evaporation source baffle, and the base 1 provides a stable support for the evaporation source baffle. The placement portion 2 is connected to the base 1 and is located above the base 1. The main function of the placement portion 2 is to place the evaporation source to ensure the stability of the evaporation source during the coating process. The first shielding portion 31 is located below the second shielding portion 32 to facilitate the adjustment of the position of the second shielding portion 32 according to the use state. That is, in the first state, the second shielding portion 32 can be used to shield the opening 311 on the first shielding portion 31 to facilitate the effective control of the direction and rate of material flow; in the second state, the second shielding portion 32 is rotated by a certain angle so that the second shielding portion 32 does not shield the opening 311, thereby facilitating the evaporation coating process.

[0036] It is understandable that the placement portion 2 can be connected to the base 1 in a detachable manner, such as by plugging or screwing, or can be fixed to the base 1 by fixing or welding, so as to improve the stability and durability of the overall structure and ensure that the evaporation source will not affect the uniformity of the film layer due to vibration or movement during the coating process. The baffle assembly 3 is connected to the base 1 by bolts or other fixing methods, which facilitates the installation and adjustment of the baffle assembly 3 and improves the reliability of the assembly. The rotatability of the baffle assembly 3 allows the shielding range of the evaporation source to be adjusted as needed during the coating process, thereby optimizing the uniformity of the film layer. The spaced arrangement of the first shielding portion 31 and the second shielding portion 32 can effectively control the heat distribution and the evaporation rate of the material, and reduce the fluctuation of the film thickness and the problem of uneven distribution of components.

[0037] It should be noted that the baffle assembly 3 further includes at least one rotation driving device, such as a motor, etc. Then the first shielding portion 31 and the second shielding portion 32 are connected to the rotation driving device, so that when the rotation driving device is started, the first shielding portion 31 and the second shielding portion 32 can be driven to rotate, thereby adjusting the relative position between the first shielding portion 31 and the second shielding portion 32. Preferably, there are two rotation driving devices, and the two rotation driving devices are respectively connected to the first shielding portion 31 and the second shielding portion 32, so as to more accurately control the rotation angle of the first shielding portion 31 and the second shielding portion 32.

[0038] Therefore, the evaporation source baffle of the embodiment of the present invention can utilize the spaced arrangement of the first shielding portion 31 and the second shielding portion 32 to effectively control the heat distribution and the material evaporation rate, reduce the fluctuation of the film thickness and the uneven distribution of components, improve the uniformity of the film layer, and thus improve the performance of the thin-film battery; enhance the stability and reliability of the overall structure; improve the adjustability of the evaporation source to adapt to different process requirements; simplify operation and maintenance, and reduce manufacturing costs.

[0039] In some embodiments, the baffle assembly 3 includes a support member 33, the support member 33 includes a first support portion 331 and a second support portion 332, the first support portion 331 is connected to the base 1, the second support portion 332 is connected to the first support portion 331, and the second support portion 332 is movable relative to the first support portion 331 along the height direction of the base 1, and the first shielding portion 31 and the second shielding portion 32 are both connected to the second support portion 332.

[0040] Specifically, Figure 1 As shown, the lower end of the first support portion 331 is connected to the base 1, and the upper end of the first support portion 331 is connected to the lower end of the second support portion 332. The first shielding portion 31 and the second shielding portion 32 are both connected to the upper end of the second support portion 332. The movability of the second support portion 332 relative to the first support portion 331 enables the baffle assembly 3 to adjust the position of the shielding portion according to actual needs, thereby adapting to different coating process parameters and characteristics of the evaporation source.

[0041] It is understandable that the first support part 331 and the second support part 332 can be connected by a driving device with a linear displacement function, such as a linear module, a cylinder, an oil cylinder, etc. In other words, the second support part 332 can move in the up and down direction relative to the first support part 331 to adjust the positions of the first shielding part 31 and the second shielding part 32, and can achieve better uniformity of the film layer at different coating stages or on different substrate materials, thereby optimizing the distribution of the evaporated material and improving the uniformity of the film layer.

[0042] In some embodiments, the support member 33 also includes a third support portion 333 , which is connected to the second support portion 332 and movable relative to the second support portion 332 along the height direction of the base 1 , and the second shielding portion 32 is connected to the third support portion 333 .

[0043] It is understandable that the lower end of the third support portion 333 is connected to the upper end of the second support portion 332, and the second shielding portion 32 is connected to the upper end of the third support portion 333, so that when the third support portion 333 moves in the up and down direction relative to the second support portion 332, the second shielding portion 32 is driven to move. The second support portion 332 and the third support portion 333 can also be connected by a driving device with a linear displacement function to realize the movement function of the third support portion 333. In other words, the first shielding portion 31 and the second shielding portion 32 can be driven by the driving device to adjust the distance between them, so as to be applicable to different scenes.

[0044] In some embodiments, the first shielding portion 31 includes a shielding frame 312, a first shielding plate 313 and a second shielding plate 314, the first shielding plate 313 and the second shielding plate 314 are both connected to the shielding frame 312, and the first shielding plate 313 and the second shielding plate 314 are connected along the width direction of the shielding frame 312 (such as Figure 1 In the first state, the first shielding plate 313 is movable in the front-to-rear direction (in the longitudinal direction), and in the first state, the first shielding plate 313 is adjacent to the second shielding plate 314 and the second shielding plate 314 is adjacent to the first shielding plate 313 to define an opening 311.

[0045] Specifically, Figure 1 As shown, the shielding frame 312 is connected to the second support portion 332, so that when the second support portion 332 moves in the up-down direction, the shielding frame 312 is driven to move. The first shielding plate 313 and the second shielding plate 314 are connected to the shielding frame 312, and the first shielding plate 313 and the second shielding plate 314 can move in the front-back direction respectively, that is, when the first shielding plate 313 moves forward and the second shielding plate 314 moves backward, an opening 311 is formed between the first shielding plate 313 and the second shielding plate 314.

[0046] It is understandable that, according to actual coating requirements, the distance between the first shielding plate 313 and the second shielding plate 314 can be adjusted to control the size of the opening 311. In other words, according to different coating requirements, the size of the opening 311 can be adaptively adjusted to limit the mapping diffusion angle of the coating material of the evaporation source after passing through the opening 311, which can assist in adjusting the overall uniformity of the film surface and improve the film quality when coating a large-area substrate.

[0047] It should be noted that the first shielding plate 313 and the second shielding plate 314 can be connected to the shielding frame 312 by bolts or the like, that is, the shielding frame 312 is provided with threaded holes, and the front side wall and the rear side wall of the shielding frame 312 are provided with through holes, and the first shielding plate 313 and the second shielding plate 314 are respectively fitted in the through holes of the front side wall and the rear side wall of the shielding frame 312, and the first shielding plate 313 and the second shielding plate 314 are fixed to the shielding frame 312 by bolts and the threaded holes. When the position of the first shielding plate 313 and the second shielding plate 314 needs to be adjusted, the bolts are loosened, and after the position of the first shielding plate 313 and the second shielding plate 314 is moved, the bolts are tightened.

[0048] In some embodiments, the first shielding plate 313 and the second shielding plate 314 are arranged at intervals in the height direction of the base 1. Figure 3 As shown, the first shielding plate 313 and the second shielding plate 314 can be stacked up and down to facilitate the first shielding plate 313 and the second shielding plate 314 to perform secondary shielding on the evaporation source.

[0049] In some embodiments, a first concave arc portion 3131 is provided on a side of the first baffle plate 313 adjacent to the second baffle plate 314 , and a second concave arc portion 3141 is provided on a side of the second baffle plate 314 adjacent to the first baffle plate 313 . In the first state, the first concave arc portion 3131 and the second concave arc portion 3141 define an opening 311 .

[0050] It is understandable that if Figure 1 As shown, the first concave arc portion 3131 is arranged at the rear side of the first shielding plate 313, and the second concave arc portion 3141 is arranged at the front side of the second shielding plate 314. When the first shielding plate 313 moves forward and the second shielding plate 314 moves backward, the size of the opening 311 can be adjusted by changing the distance between the first concave arc portion 3131 and the second concave arc portion 3141, thereby ensuring that it can be used in a variety of coating conditions. In addition, when it is necessary to shield the evaporation source, the first shielding portion 31 and the second shielding portion 32 can be overlapped to prevent the evaporation source from passing through the first shielding portion 31. In addition, in the first state, the first shielding portion 31 can be used to shield the evaporation source for the first time, and the second shielding portion 32 can be used to shield the evaporation source again, thereby ensuring the shielding effect.

[0051] In some other embodiments, the distance between the first shielding plate 313 and the base 1 is equal to the distance between the second shielding plate 314 and the base 1 .

[0052] Specifically, Figure 4 As shown, the first shielding plate 313 and the second shielding plate 314 are arranged at the same level, so that in the first state, the rear side of the first shielding plate 313 abuts against the front side of the second shielding plate 314, thereby realizing the function of shielding the evaporation source for the first time. The first shielding plate 313 is moved forward and the second shielding plate 314 is moved backward, so that an opening 311 is defined between the rear side wall of the first shielding plate 313 and the front side wall of the second shielding plate 314, so that the size of the opening 311 can be adjusted to ensure the coating effect.

[0053] In some embodiments, there are multiple first shielding plates 313, and the multiple first shielding plates 313 are sequentially connected along the length direction of the shielding frame 312; there are multiple second shielding plates 314, and the multiple second shielding plates 314 are sequentially connected along the length direction of the shielding frame 312 (such as Figure 1 The left and right directions in the figure are connected in sequence.

[0054] It is understandable that if Figure 2 and Figure 5As shown, a plurality of first shielding plates 313 are arranged in sequence along the left-right direction, and each of the plurality of first shielding plates 313 can be independently moved along the front-back direction. Similarly, each second shielding plate 314 can also be moved along the front-back direction. Thus, the size of the opening 311 can be adjusted by respectively moving the first shielding plates 313 and the second shielding plates 314, and the shape of the opening 311 can also be adjusted according to the actual coating requirements, thereby improving the coating quality.

[0055] In some embodiments, the first shielding plate 313 includes a first matching portion 3132 and a second matching portion 3133, and the first matching portion 3132 and the second matching portion 3133 are arranged relatively to each other along the length direction of the shielding frame 312. In two adjacent first shielding plates 313, the first matching portion 3132 of one first shielding plate 313 is connected to the second matching portion 3133 of the other first shielding plate 313; the second shielding plate 314 includes a third matching portion 3142 and a fourth matching portion 3143, and the third matching portion 3142 and the fourth matching portion 3143 are arranged relatively to each other along the length direction of the shielding frame 312. In two adjacent second shielding plates 314, the third matching portion 3142 of one second shielding plate 314 is connected to the fourth matching portion 3143 of the other second shielding plate 314.

[0056] Specifically, Figure 2 and Figure 5 As shown, taking the first baffle plate 313 as an example, the first matching portion 3132 and the second matching portion 3133 are respectively placed on the left and right side walls of the first baffle plate 313, and the first matching portion 3132 and the second matching portion 3133 can match together to form a plurality of first baffle plates 313 connected in sequence as an integral structure.

[0057] It can be understood that the first matching portion 3132 is a dovetail groove, and the second matching portion 3133 is a dovetail protrusion adapted to the dovetail groove, and through the matching of the dovetail protrusion and the dovetail groove, multiple first shielding plates 313 can be connected in sequence, and each first shielding plate 313 can move in the front-to-back direction. Similarly, the third matching portion 3142 is a dovetail groove, and the fourth matching portion 3143 is a dovetail protrusion, so that multiple second shielding plates 314 can also be connected in sequence, and each second shielding plate 314 does not interfere with each other in the front-to-back direction.

[0058] In some embodiments, the baffle assembly 3 also includes a first flexible portion 34 and a second flexible portion 35, the first flexible portion 34 is connected to the plurality of first baffle plates 313 and is located on a side of the first baffle plate 313 adjacent to the second baffle plate 314, and the second flexible portion 35 is connected to the plurality of second baffle plates 314 and is located on a side of the second baffle plate 314 adjacent to the first baffle plate 313.

[0059] It is understandable that if Figure 2 As shown, the extension direction of the first flexible portion 34 and the extension direction of the second flexible portion 35 are both consistent with the left and right directions, the first flexible portion 34 is connected to multiple first shielding plates 313 and is located at the rear end of the first shielding plates 313, and the second flexible portion 35 is connected to multiple second shielding plates 314 and is located at the front end of the second shielding plates 314.

[0060] That is to say, since each first baffle plate 313 and each second baffle plate 314 can be moved independently in the front-to-back direction, multiple first baffle plates 313 and multiple second baffle plates 314 can define openings 311 of different sizes according to different coating working conditions, that is, the arcs of the front and rear side walls of the opening 311 can be different arcs.

[0061] It should be noted that the first flexible portion 34 and the second flexible portion 35 may be made of a heat-resistant polymer material, such as polyimide, polyetheretherketone, and the like.

[0062] Therefore, the evaporation source baffle of the embodiment of the present invention adopts an assembleable opening and closing design to achieve shape adjustment of the opening 311, and simultaneously adjust the size, position and shape of the opening 311, thereby limiting the mapping diffusion angle of the coating material of the evaporation source after passing through the opening 311, which can assist in adjusting the overall uniformity of the film surface when coating a large area substrate and improve the quality of the film layer.

[0063] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0064] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0065] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0067] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0068] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. An evaporation source baffle, characterized in that: include: Base; a placement portion, the placement portion being connected to the base and spaced apart from the base in a height direction of the base, and the placement portion being used to place an evaporation source; A baffle assembly, the baffle assembly is connected to the base, the baffle assembly includes a first shielding portion and a second shielding portion, the first shielding portion and the second shielding portion are arranged at intervals in the height direction of the base, and the first shielding portion is located between the second shielding portion and the placement portion, the first shielding portion has an opening, the first shielding portion and the second shielding portion are both rotatable around a first axial direction, the first axial direction is parallel to the height direction of the base, the baffle assembly has a first state and a second state, In the first state, the placement portion, the first shielding portion, and the second shielding portion are arranged in one place in the height direction of the base; In the second state, the second shielding portion is spaced apart from the opening in a plane perpendicular to the height direction of the base.

2. The evaporation source baffle according to claim 1, characterized in that: The baffle assembly includes a support member, which includes a first support portion and a second support portion, the first support portion is connected to the base, the second support portion is connected to the first support portion, and the second support portion is movable relative to the first support portion along the height direction of the base, and the first shielding portion and the second shielding portion are both connected to the second support portion.

3. The evaporation source baffle according to claim 2, characterized in that: The support member further includes a third support portion, the third support portion is connected to the second support portion, and the third support portion is movable relative to the second support portion along a height direction of the base, and the second shielding portion is connected to the third support portion.

4. The evaporation source baffle according to claim 3, characterized in that: The first shielding portion includes a shielding frame, a first shielding plate and a second shielding plate. The first shielding plate and the second shielding plate are both connected to the shielding frame, and the first shielding plate and the second shielding plate are movable along the width direction of the shielding frame. In the first state, the first shielding plate adjacent to the side of the second shielding plate and the second shielding plate adjacent to the side of the first shielding plate define the opening.

5. The evaporation source baffle according to claim 4, characterized in that: The first shielding plate and the second shielding plate are arranged at intervals in a height direction of the base.

6. The evaporation source baffle according to claim 5, characterized in that: A first concave arc portion is provided on a side of the first shielding plate adjacent to the second shielding plate, and a second concave arc portion is provided on a side of the second shielding plate adjacent to the first shielding plate. In the first state, the first concave arc portion and the second concave arc portion define the opening.

7. The evaporation source baffle according to claim 4, characterized in that: The distance between the first shielding plate and the base is equal to the distance between the second shielding plate and the base.

8. The evaporation source baffle according to claim 5 or 7, characterized in that: There are multiple first shielding plates, which are sequentially connected along the length direction of the shielding frame; there are multiple second shielding plates, which are sequentially connected along the length direction of the shielding frame.

9. The evaporation source baffle according to claim 8, characterized in that: The first shielding plate comprises a first matching portion and a second matching portion, the first matching portion and the second matching portion are arranged opposite to each other along the length direction of the shielding frame, and in two adjacent first shielding plates, the first matching portion of one first shielding plate is connected to the second matching portion of the other first shielding plate; The second shielding plate includes a third matching portion and a fourth matching portion, and the third matching portion and the fourth matching portion are arranged relatively to each other along the length direction of the shielding frame. In two adjacent second shielding plates, the third matching portion of one second shielding plate is connected to the fourth matching portion of the other second shielding plate.

10. The evaporation source baffle according to claim 9, characterized in that: The baffle assembly also includes a first flexible portion and a second flexible portion, the first flexible portion is connected to the plurality of first baffles and is located on a side of the first baffle adjacent to the second baffle, the second flexible portion is connected to the plurality of second baffles and is located on a side of the second baffle adjacent to the first baffle.

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