A coating fixture and process based on physical vapor deposition technology

Abstract

The present application relates to a coating jig and process based on physical vapor deposition technology, belonging to the field of coating technology, comprising a jig body, wherein the upper and lower ends of the jig body are respectively provided with a first electrode plate assembly and a second electrode plate assembly which are arranged oppositely, a metal sputtering target is arranged on the side of the first electrode plate assembly close to the second electrode plate, a workpiece is arranged on the side of the second electrode plate assembly close to the first electrode plate, a collimator is arranged between the first electrode plate assembly and the second electrode plate assembly inside the jig body, the second electrode plate assembly can be rotatably assembled at the lower end of the jig body by a driving assembly, oppositely arranged air inlet pipe assemblies are respectively arranged on both sides of the jig body, the two air inlet pipe assemblies are both located above the two sides of the second electrode plate, the upper end of the jig body is provided with air outlet pipes on both sides of the first electrode plate assembly, heating parts are arranged inside the two air inlet pipe assemblies, argon gas can be heated and passed into the jig body, while preheating the workpiece, the convection formed by the two air inlet pipe assemblies can generate pressure on the workpiece.

Description

Technical Field

[0001] The present application relates to the field of film coating technology, and in particular to a film coating fixture and process based on physical vapor deposition technology. Background Art

[0002] Physical vapor deposition is a technology that uses physical methods under vacuum conditions to vaporize the surface of solid or liquid materials into gaseous atoms, molecules or partially ionize them into ions, and deposits a thin film with certain special functions on the surface of the substrate through low-pressure gas.

[0003] PVD technology is mainly divided into three categories: vacuum evaporation coating, vacuum sputtering coating and vacuum ion coating, specifically including: vacuum evaporation coating, vacuum sputtering coating and ion coating. The existing vacuum sputtering coating technology generally refers to the use of particles to bombard the surface of the target material so that the atoms on the target surface obtain enough energy to escape, and the sputtered target material is deposited on the surface of the substrate to form a coating.

[0004] The existing coating device is generally provided with a collimator inside. Although the collimator can make the target material fall vertically on the surface of the workpiece, there is still obstruction. The existing coating equipment is generally provided with a rotating frame, which will cause the workpiece to be placed unstable. Summary of the invention

[0005] The present application provides a coating fixture and process based on physical vapor deposition technology, which can solve the problem that the existing coating equipment with a rotating frame is not stable enough when setting a workpiece.

[0006] The technical solution of the present application is as follows: A coating jig based on physical vapor deposition technology, comprising a jig body, wherein the upper and lower ends of the jig body are respectively provided with a first electrode plate assembly and a second electrode plate assembly which are arranged oppositely, a metal sputtering target is provided on the side of the first electrode plate assembly close to the second electrode plate, and a workpiece is provided on the side of the second electrode plate assembly close to the first electrode plate, a collimator is provided between the first electrode plate assembly and the second electrode plate assembly inside the jig body, the second electrode plate assembly can be rotatably assembled at the lower end of the jig body by a driving assembly, oppositely arranged air intake pipe assemblies are respectively provided on both sides of the jig body, the two air intake pipe assemblies are both located above the two sides of the second electrode plate, the upper end of the jig body is provided with air outlet pipes on both sides of the first electrode plate assembly, heating parts are provided inside the two air intake pipe assemblies, argon gas can be heated and passed into the jig body, and while preheating the workpiece, convection formed by the two air intake pipe assemblies can generate pressure on the workpiece.

[0007] By adopting the above scheme, when argon gas is introduced, the heating part is used to heat the argon gas, and the heated argon gas fills the interior of the fixture body, so that the fixture is evenly heated. At the same time, before coating, the workpiece can be preheated in advance to improve the adhesion of the film layer on the surface of the workpiece. In addition, the two air inlet pipes are arranged opposite to each other, and the argon gas flows ejected from the two air inlet pipes can form convection above the second electrode plate. After the two air flows meet, downward pressure is generated on the workpiece arranged on the second electrode plate, so that when argon gas is introduced into the device, not only the fixture body can be evenly heated and the workpiece can be preheated, but also the stability of the workpiece when it is placed can be improved.

[0008] In one embodiment of the present application, the first plate assembly includes: A first placement rack, wherein the first placement rack is embedded in the upper end of the fixture body; A first electrode plate body, wherein the first electrode plate body is assembled inside the first placement rack, and the metal sputtering target is arranged inside the first placement rack and is located at a side of the first electrode plate body close to the second electrode plate assembly; A first metal column, wherein one end of the first metal column is electrically connected to the first electrode body.

[0009] By adopting the above solution, the metal sputtering target is arranged on one side of the first electrode body close to the second electrode assembly, so that the metal sputtering target can automatically fall onto the second electrode assembly during sputtering and form a uniform film layer on the surface of the workpiece.

[0010] In one embodiment of the present application, the second plate assembly includes: A rotating seat, the rotating seat is rotatably mounted on the lower end of the fixture body, and a connecting metal column is fixedly connected to a side of the rotating seat away from the first electrode body; A second electrode plate body, wherein the second electrode plate body is fixedly assembled on a side of the rotating seat close to the first electrode plate body, and the connecting metal column is electrically connected to the second electrode plate body; A bearing seat, wherein a second metal column is arranged inside the bearing seat, and an end surface of one end of the second metal column is in contact with the connecting metal column.

[0011] By adopting the above scheme, when the workpiece is set on the second electrode plate body, the rotating seat can drive the second electrode plate body to rotate. At the same time, when the rotating seat rotates, one end surface of the second metal column can always contact the connecting metal column, so that the second electrode plate body can also ensure the circuit connectivity during the rotation process.

[0012] In one embodiment of the present application, the driving component includes: A driving motor, the driving motor is fixedly mounted on one side of the outside of the fixture body, and a driving gear is coaxially fixedly connected to the driving shaft of the driving motor; The gear ring is coaxially sleeved on the outside of the rotating seat, and the driving gear transmits the torque to the driving gear through the transmission gear set to drive the gear ring to rotate.

[0013] By adopting the above solution, when driving the second pole plate body to rotate, the driving motor can mesh with the transmission gear set and transmit power to the gear ring, thereby driving the gear ring to rotate, and further driving the rotating seat and the workpiece to rotate.

[0014] In one embodiment of the present application, the collimator includes a fixing ring, a plurality of hexagonal collimation channels are provided inside the fixing ring, and the collimation channels extend in a vertical direction.

[0015] By adopting the above scheme, a collimator is arranged on the first electrode plate body and the second electrode plate body, and a collimator channel extending in the vertical direction is arranged inside the collimator, so that the target particles sputtered in various directions can be screened by the collimator channel, and only the vertically falling target particles can reach the surface of the workpiece, so that the target particles can only fall vertically on the workpiece surface, and the film layer quality is better.

[0016] In one embodiment of the present application, the coating fixture based on physical vapor deposition technology further includes a clamping member, and the clamping member is provided with two groups and is respectively arranged on both sides of the rotating seat, and the clamping member includes: A threaded rod, the threaded rod is horizontally arranged, one end of which is inserted into one side of the rotating seat and is threadedly connected to the rotating seat; The bracket is vertically arranged, the other end of the threaded rod is rotatably assembled on the lower end of the bracket, and a rotatable clamping block assembly is provided on the upper end of the bracket.

[0017] By adopting the above scheme, clamping block assemblies with adjustable spacing are arranged on both sides of the rotating seat, so that the clamping block assemblies can be used to clamp the edge of the workpiece, which further improves the stability of the workpiece during coating without affecting the coating of the workpiece.

[0018] In one embodiment of the present application, the clamping block assembly comprises: A rotating shaft, which is vertically arranged and has one end rotatably connected to the upper end of the bracket; A connecting part, wherein the connecting part is a truncated cone-shaped member, one end of the connecting part is coaxially connected and fixed with the other end of the rotating shaft; The clamping part is a columnar component, one end of the clamping part is coaxially connected and fixed with the other end of the connecting part, and the projection area of ​​one end of the connecting part on the clamping part is smaller than the projection area of ​​the other end of the connecting part on the clamping part.

[0019] By adopting the above scheme, when the workpiece is clamped, the side surfaces of the two clamping parts of the clamping block assembly can press against the edge of the workpiece, and the connecting part will not block the workpiece, thereby ensuring the coating effect of the workpiece and further improving the placement stability of the workpiece.

[0020] In one embodiment of the present application, the horizontal distance d1 between the rotation axis and the upper end surface of the bracket and the horizontal distance d2 between the rotation axis and the outer edge of the clamping portion satisfy d1 <d2。

[0021] By adopting the above solution, when the clamping block assembly clamps the workpiece, since the horizontal distance d1 between the rotating shaft and the upper end surface of the bracket is smaller than the horizontal distance d2 between the rotating shaft and the outer edge of the clamping portion, it is ensured that the bracket will not block the surface of the workpiece.

[0022] In one embodiment of the present application, the air intake pipe assembly includes: An air intake pipe, wherein a plurality of groups of electric heating wires are arranged inside the air intake pipe along the length direction of the air intake pipe, and the plurality of groups of electric heating wires form the heating part; A one-way valve is arranged at one end of the air intake pipe and is connected to the air intake pipe.

[0023] By adopting the above scheme, multiple groups of heating wires are arranged inside the air intake pipe, so that the argon gas can be heated and heated when passing through the heating part inside the air intake pipe, so that the device can heat the fixture body and preheat the workpiece at the same time.

[0024] The present invention also relates to a coating process based on physical vapor deposition technology, and its technical solution is as follows: A coating process based on physical vapor deposition technology includes the following steps: Step 1: inspect the workpiece using the inspection equipment, and polish, clean and dry the workpiece surface; Step 2: Place the workpiece in the coating jig, and introduce argon gas heated to 150°C-250°C by the heating unit to exhaust the air inside the coating jig, while preheating the workpiece and the coating jig; Step 3, adjusting the flow rate of argon gas, and performing three main bombardments on the preheated workpiece, each bombardment lasting 2-4 minutes; Step 4, introducing the reaction gas acetylene, and further adjusting the flow rate of argon gas, and performing ten sub-bombardments on the workpiece after the main bombardment, and correspondingly adjusting the voltage of the first electrode plate assembly and the second electrode plate assembly during the ten sub-bombardments, performing coating, and obtaining a finished workpiece; The duration of the first and second sub-bombardments was 5-10 minutes, the duration of the third to eighth sub-bombardments was 10-30 minutes, and the duration of the ninth and tenth sub-bombardments was 60-120 minutes. During the first and second sub-bombardment processes, the duty ratio of the first plate assembly and the second plate assembly is 10%-50%; During the third to tenth sub-bombardment, the duty ratio of the first plate assembly and the second plate assembly is 30%-70%; Step 5: The finished workpiece is inspected and shipped after the inspection is completed.

[0025] By adopting the above scheme, during the ten bombardments, by controlling the time of argon gas introduction, and controlling the empty ratio of the first electrode plate assembly and the second electrode plate assembly according to the argon gas introduction time, the device can deposit a pure metal layer with good ductility when sputtering the target material onto the surface of the workpiece, thereby improving the bonding of the film layer, and gradually changing the structure and composition of the film layer, so as to form a coating in a specified resistance range.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. By heating the argon gas and passing it into the fixture body, the heated argon gas will expel the air inside the fixture body and preheat the workpiece, thereby improving the adhesion of the film layer on the workpiece. At the same time, by limiting the ventilation direction of the two argon gases, the argon gases collide above the workpiece. The colliding airflow will produce downward pressure on the workpiece, thereby improving the stability of the workpiece when it is coated inside the equipment.

[0027] 2. By setting a collimator and a rotating seat, the collimator is used to limit the angle at which the target particles reach the workpiece surface, so that the composition and structure of the film can be accurately controlled, and the deposition rate and quality of the film can be improved. At the same time, by setting a rotating seat that can rotate, the adverse effect of the shielding part of the collimator above the workpiece on the workpiece film layer is avoided, so that the workpiece will not have defects when coated and the film layer is more uniform.

[0028] 3. During sputtering coating, the target material is bombarded multiple times, and during the bombardment, the bombardment time is controlled and the duty cycle of the power supply is adjusted synchronously, so that the device can coat the workpiece more evenly and form a metal layer in the specified resistance area on the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a front cross-sectional view of a coating fixture based on physical vapor deposition technology provided in the present application; Figure 2 It is a top view of a collimator of a coating fixture based on physical vapor deposition technology provided in this application; Figure 3 It is a front view of a clamping block assembly of a coating fixture based on physical vapor deposition technology provided in this application; Figure 4 This is a front view of a bracket of a coating fixture based on physical vapor deposition technology provided in this application; Figure 5 This is a front view of an intake pipe of a coating fixture based on physical vapor deposition technology provided in this application; Figure 6 yes Figure 1 A magnified schematic diagram of part A; Figure 7 This is a flow chart of a coating process based on physical vapor deposition technology provided in this application.

[0030] Description of the reference numerals: 1. fixture body; 11. first electrode plate assembly; 111. first placement rack; 112. first electrode plate body; 113. first metal column; 12. second electrode plate assembly; 121. rotating seat; 1211. connecting metal column; 122. second electrode plate body; 123. bearing seat; 1231. second metal column; 13. collimator; 131. collimation channel; 14. air intake pipe assembly; 141. heating unit ; 1411, heating wire; 142, one-way valve; 15, driving assembly; 151, driving motor; 1511, driving gear; 152, gear ring; 153, transmission gear set; 16, exhaust pipe; 17, clamping member; 171, threaded rod; 172, bracket; 173, clamping block assembly; 1731, rotating shaft; 1732, connecting part; 1733, clamping part; 2, metal sputtering target; 3, workpiece; 4, power supply. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-7 The coating fixture and process based on physical vapor deposition technology provided in this application are further described in detail.

[0032] See also Figure 1A coating jig based on physical vapor deposition technology provided in an embodiment of the present application includes a jig body 1, wherein the upper and lower ends of the jig body 1 are respectively provided with a first electrode plate assembly 11 and a second electrode plate assembly 12 which are arranged opposite to each other, a metal sputtering target 2 is arranged on the side of the first electrode plate assembly 11 close to the second electrode plate, and a workpiece 3 is arranged on the side of the second electrode plate assembly 12 close to the first electrode plate, a collimator 13 is arranged between the first electrode plate assembly 11 and the second electrode plate assembly 12 inside the jig body 1, and the second electrode plate assembly 12 can be rotatably assembled at the lower end of the jig body 1 by a driving assembly 15, and oppositely arranged air inlet pipe assemblies 14 are respectively arranged on both sides of the jig body 1, and the two inlet pipe assemblies 14 are arranged opposite to each other. The air pipe assemblies 14 are located above both sides of the second electrode plate. The upper end of the fixture body 1 is provided with air outlet pipes 16 on both sides of the first electrode plate assembly 11. The two air inlet pipe assemblies 14 are provided with heating parts 141 inside, which can heat the argon gas and pass it into the fixture body 1. While preheating the workpiece 3, the convection formed by the two air inlet pipe assemblies 14 can generate pressure on the workpiece 3. By arranging relative air inlet pipes and arranging heating parts 141 inside the air inlet pipes, the argon gas can be preheated when it passes into the device, thereby improving the adhesion of the workpiece 3. At the same time, when the two relative argon gas flows collide, they can generate downward pressure on the surface of the workpiece 3, thereby improving the stability of the workpiece 3 when it is placed.

[0033] In this embodiment, a power source 4 and a controller (not shown) are also included. The power source 4 is electrically connected to the first electrode assembly 11, the second electrode assembly 12 and the driving assembly 15, and the output parameters of the power source 4 are controlled by the controller. The specific electrical connection method is an existing conventional technical means, so it is not described here. It may also include an air pump and an air tank, wherein the air pump is disposed in the air tank, wherein argon gas is disposed in the air tank, and the air pump extracts the argon gas in the air tank and passes the argon gas into the interior of the fixture body 1 through the air inlet pipe assembly 14 .

[0034] Please continue reading Figure 1 The first electrode assembly 11 includes: a first placement rack 111, a first electrode body 112 and a first metal column 113. The first placement rack 111 is embedded in the upper end of the fixture body 1, and the first electrode body 112 is assembled inside the first placement rack 111. The metal sputtering target 2 is arranged inside the first placement rack 111 and is located on the side of the first electrode body 112 close to the second electrode assembly 12. One end of the first metal column 113 is electrically connected to the first electrode body 112. The metal sputtering target 2 is placed on one side of the first electrode body 112 by setting, so that the first electrode body 112 forms an electric field after being energized. After ionization by the electric field, the argon gas forms particles and hits the metal sputtering target 2, generating target particles that fall and are deposited on the surface of the workpiece 3.

[0035] Please continue reading Figure 1 The second electrode plate assembly 12 includes: a rotating seat 121, a second electrode plate body 122 and a bearing seat 123, the rotating seat 121 is rotatably assembled on the lower end of the fixture body 1, and a connecting metal column 1211 is fixedly connected to the side of the rotating seat 121 away from the first electrode plate body 112, and the second electrode plate body 122 is fixedly assembled on the side of the rotating seat 121 close to the first electrode plate body 112, and the connecting metal column 1211 is electrically connected to the second electrode plate body 122, and a second metal column 1231 is arranged inside the bearing seat 123, and an end face of the second metal column 1231 is in contact with the connecting metal column 1211. By setting the end face of the second metal column 1231 in contact with the connecting metal column 1211, when the rotating seat 121 rotates, the second metal column 1231 can also be connected to the second electrode plate body 122 through the contact metal column, so that the device can connect the circuit of the second electrode plate body 122.

[0036] In this embodiment, the contact metal pillar can be electrically connected to the second electrode body 122 by means of a wire or a metal guide rod.

[0037] Please continue reading Figure 1 The driving assembly 15 includes: a driving motor 151 and a gear ring 152. The driving motor 151 is fixedly assembled on one side of the outside of the fixture body 1. A driving gear 1511 is coaxially fixedly connected to the driving shaft of the driving motor 151. The gear ring 152 is coaxially sleeved on the outside of the rotating seat 121. The driving gear 1511 transmits torque to the driving gear 1511 through a transmission gear set 153 to drive the gear ring 152 to rotate, wherein the driving gear 1511 set may include one or more transmission gears, and a cavity may also be provided on the inner wall of the fixture body 1. Multiple transmission gears are rotatably assembled on the inner wall of the cavity and mesh with each other. The transmission gear also meshes with the driving gear 1511. The driving motor 151 can drive the driving gear 1511 to rotate, and drive the transmission gear to rotate, thereby driving the gear ring 152 to rotate, so as to realize the rotation of the rotating seat 121.

[0038] See also Figure 2 The collimator 13 includes a fixing ring, and a plurality of hexagonal collimation channels 131 are provided inside the fixing ring. The collimation channels 131 extend in a vertical direction. By setting the vertical collimation channels 131, the sputtered target particles are screened so that the target particles can be vertically deposited on the surface of the workpiece 3.

[0039] See also Figure 1 , Figure 3 and Figure 4, the coating fixture based on physical vapor deposition technology further includes a clamping member 17. There are two sets of clamping members 17, which are respectively arranged on both sides of the rotating seat 121. The clamping member 17 includes: a threaded rod 171 and a bracket 172. The threaded rod 171 is horizontally arranged, one end is inserted into one side of the rotating seat 121 and is threadedly connected to the rotating seat 121. The bracket 172 is vertically arranged. The other end of the threaded rod 171 is rotatably assembled at the lower end of the bracket 172. The upper end of the bracket 172 is provided with a rotatable clamping block assembly 173. By arranging two clamping members 17 on the side of the workpiece 3, the device can clamp the edge of the workpiece 3 without blocking the workpiece 3, so as to improve the stability of the workpiece 3.

[0040] Please continue to refer to Figure 3 , the clamping block assembly 173 includes: a rotating shaft 1731, a connecting portion 1732 and a clamping portion 1733. The rotating shaft 1731 is vertically arranged, and one end is rotatably connected to the upper end of the bracket 172. The connecting portion 1732 is a frustum-shaped member. One end of the connecting portion 1732 is coaxially connected and fixed to the other end of the rotating shaft 1731. The clamping portion 1733 is a columnar member. One end of the clamping portion 1733 is coaxially connected and fixed to the other end of the connecting portion 1732. The projected area of one end of the connecting portion 1732 on the clamping portion 1733 is smaller than the projected area of the other end of the connecting portion 1732 on the clamping portion 1733. By setting the shapes of the connecting portion 1732 and the clamping portion 1733, it is ensured that when the connecting portion 1732 abuts against the workpiece 3 on the clamping portion 1733, it will not block the surface of the workpiece 3, ensuring the integrity of the coating of the workpiece 3.

[0041] Please refer to Figure 6 , the horizontal distance d1 between the rotating shaft 1731 and the upper end face of the bracket 172 and the horizontal distance d2 between the rotating shaft 1731 and the outer edge of the clamping portion 1733 satisfy d1 < d2. By limiting the horizontal distance between the moving shaft and the upper end face of the bracket 172, it will not block the workpiece 3 during the coating process of the workpiece 3.

[0042] Please refer to Figure 5 , the air inlet pipe assembly 14 includes: an air inlet pipe and a one-way valve 142. A plurality of electric heating wires 1411 are arranged inside the air inlet pipe along the length direction of the air inlet pipe. The plurality of electric heating wires 1411 form the heating portion 141. The one-way valve 142 is arranged at one end of the air inlet pipe and is communicated with the air inlet pipe. By arranging the electric heating wires 1411 inside the air inlet pipe, the argon gas is heated by the electric heating wires 1411, so that the argon gas can preheat the fixture body 1 and the workpiece 3.

[0043] In summary, when the device is used to coat the workpiece 3, the distance between the two clamping parts 1733 is first adjusted according to the size of the workpiece 3 until the edge of the clamping part 1733 abuts against the edge of the workpiece 3. Before coating, argon gas heated by the heating part 141 can be introduced first, and the heated argon gas is used to discharge the air inside the fixture body 1, and the fixture body 1 and the workpiece 3 are preheated; After preheating, during coating, the two air inlet pipe assemblies 14 are continued to be used to introduce argon gas into the interior of the fixture body 1. The collision of the two argon gas flows can continuously generate downward pressure on the workpiece 3, thereby improving the stability of the placement of the workpiece 3. The electric field generated by the two electrode assemblies ionizes the argon gas, and the ionized particles collide with the metal sputtering target 2, causing the target particles to sputter out and fall on the surface of the workpiece 3 to form a dense film layer.

[0044] See also Figure 7 The present invention also relates to a coating process based on physical vapor deposition technology, and its technical solution is as follows: comprising the following steps: Step 1: inspect the workpiece 3 using a detection device, and polish, clean and dry the surface of the workpiece 3; Step 2: Place the workpiece 3 in the coating jig, and introduce argon gas heated to 150° C.-250° C. by the heating unit 141 to exhaust the air inside the coating jig and preheat the workpiece 3 and the coating jig at the same time; Step 3, adjusting the flow rate of argon gas, and performing three main bombardments on the preheated workpiece 3, each bombardment lasting 2-4 minutes; Step 4, introducing the reaction gas acetylene, and further adjusting the flow rate of argon gas, and performing ten sub-bombardments on the workpiece 3 after the main bombardment, and correspondingly adjusting the voltage of the first electrode plate assembly 11 and the second electrode plate assembly 12 during the ten sub-bombardments, performing coating, and obtaining the finished workpiece 3; The duration of the first and second sub-bombardments was 5-10 minutes, the duration of the third to eighth sub-bombardments was 10-30 minutes, and the duration of the ninth and tenth sub-bombardments was 60-120 minutes. During the first and second sub-bombardment processes, the duty ratio of the first plate assembly 11 and the second plate assembly 12 is 10%-50%; During the third to tenth sub-bombardment processes, the duty ratio of the first plate assembly 11 and the second plate assembly 12 is 30%-70%; Step five: The finished workpiece 3 is subjected to a hanging inspection and shipped after the inspection is completed.

[0045] Among them, during the ten bombardment processes, the negative voltage between the first plate assembly 11 and the second plate assembly 12 is 100-200V; In the main bombardment process, the flow rate of argon gas is 200-400 sccm, and in the secondary bombardment process, the flow rate of argon gas is 100-300 sccm; Among them, in step 4, the fixture body 1 can also be provided with a vent pipe for acetylene to pass through. During the third sub-bombardment, the flow rate of acetylene is 100-300sccm; during the fourth sub-bombardment, the flow rate of acetylene is 200-400sccm; during the fifth to eighth sub-bombardment, the flow rate of acetylene is 400-600sccm; during the ninth to tenth sub-bombardment, the flow rate of acetylene is 500-700sccm.

[0046] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A coating fixture based on physical vapor deposition technology, characterized in that: The jig body (1) comprises a jig main body (1), wherein the upper end and the lower end of the jig main body (1) are respectively provided with a first electrode plate assembly (11) and a second electrode plate assembly (12) which are arranged opposite to each other, a metal sputtering target (2) is provided on a side of the first electrode plate assembly (11) close to the second electrode plate, and a workpiece (3) is provided on a side of the second electrode plate assembly (12) close to the first electrode plate, and a collimator (13) is provided inside the jig main body (1) between the first electrode plate assembly (11) and the second electrode plate assembly (12), and the second electrode plate assembly (12) can be rotatably assembled to the first electrode plate assembly (15) by a driving assembly (15). At the lower end of the jig body (1), oppositely arranged air intake pipe assemblies (14) are respectively arranged on both sides of the jig body (1), and the two air intake pipe assemblies (14) are both located above the two sides of the second electrode plate. At the upper end of the jig body (1), air outlet pipes (16) are respectively arranged on both sides of the first electrode plate assembly (11). A heating part (141) is arranged inside the two air intake pipe assemblies (14), which can heat argon gas and pass it into the jig body (1). While preheating the workpiece (3), the convection formed by the two air intake pipe assemblies (14) can generate pressure on the workpiece (3).

2. The coating fixture based on physical vapor deposition technology according to claim 1, characterized in that: The first electrode plate assembly (11) comprises: A first placement rack (111), the first placement rack (111) being embedded in the upper end of the fixture body (1); A first electrode plate body (112), the first electrode plate body (112) being assembled inside the first placement rack (111), the metal sputtering target (2) being arranged inside the first placement rack (111) and being located on a side of the first electrode plate body (112) close to the second electrode plate assembly (12); A first metal column (113), one end of the first metal column (113) is electrically connected to the first electrode body (112).

3. The coating fixture based on physical vapor deposition technology according to claim 2, characterized in that: The second electrode plate assembly (12) comprises: A rotating seat (121), the rotating seat (121) being rotatably mounted on the lower end of the fixture body (1), and a connecting metal column (1211) being fixedly connected to a side of the rotating seat (121) away from the first electrode body (112); A second electrode plate body (122), the second electrode plate body (122) is fixedly assembled on a side of the rotating seat (121) close to the first electrode plate body (112), and the connecting metal column (1211) is electrically connected to the second electrode plate body (122); A bearing seat (123), wherein a second metal column (1231) is provided inside the bearing seat (123), and an end surface of one end of the second metal column (1231) is in contact with the connecting metal column (1211).

4. The coating fixture based on physical vapor deposition technology according to claim 3, characterized in that: The driving assembly (15) comprises: A driving motor (151), the driving motor (151) being fixedly mounted on one side of the outside of the fixture body (1), and a driving gear (1511) being coaxially fixedly connected to a driving shaft of the driving motor (151); The gear ring (152) is coaxially sleeved on the outside of the rotating seat (121), and the driving gear (1511) transmits torque to the driving gear (1511) through the transmission gear set (153) to drive the gear ring (152) to rotate.

5. The coating fixture based on physical vapor deposition technology according to claim 4, characterized in that: The collimator (13) comprises a fixing ring, a plurality of collimating channels (131) having a hexagonal cross-sectional shape are provided inside the fixing ring, and the collimating channels (131) extend in a vertical direction.

6. The coating fixture based on physical vapor deposition technology according to claim 3, characterized in that: The coating fixture based on physical vapor deposition technology also includes a clamping member (17), wherein two groups of the clamping members (17) are provided and are respectively arranged on both sides of the rotating seat (121), and the clamping member (17) includes: A threaded rod (171), wherein the threaded rod (171) is arranged horizontally, one end of which is inserted into one side of the rotating seat (121) and is threadedly connected to the rotating seat (121); The bracket (172) is vertically arranged, the other end of the threaded rod (171) is rotatably assembled on the lower end of the bracket (172), and a rotatable clamping block assembly (173) is provided on the upper end of the bracket (172).

7. The coating fixture based on physical vapor deposition technology according to claim 6, characterized in that: The clamping block assembly (173) comprises: A rotating shaft (1731), the rotating shaft (1731) is vertically arranged, and one end of the rotating shaft (1731) is rotatably connected to the upper end of the bracket (172); A connecting portion (1732), wherein the connecting portion (1732) is a truncated cone-shaped component, and one end of the connecting portion (1732) is coaxially connected and fixed to the other end of the rotating shaft (1731); The clamping portion (1733) is a columnar member, one end of the clamping portion (1733) is coaxially connected and fixed to the other end of the connecting portion (1732), and the projection area of ​​one end of the connecting portion (1732) on the clamping portion (1733) is smaller than the projection area of ​​the other end of the connecting portion (1732) on the clamping portion (1733).

8. The coating fixture based on physical vapor deposition technology according to claim 7, characterized in that: The horizontal distance d1 between the rotating shaft (1731) and the upper end surface of the bracket (172) and the horizontal distance d2 between the rotating shaft (1731) and the outer edge of the clamping portion (1733) satisfy d1 <d2。 9. The coating fixture based on physical vapor deposition technology according to claim 1, characterized in that: The air intake pipe assembly (14) comprises: An air intake pipe, wherein a plurality of groups of electric heating wires (1411) are arranged inside the air intake pipe along the length direction of the air intake pipe, and the plurality of groups of electric heating wires (1411) form the heating portion (141); A one-way valve (142) is arranged at one end of the air intake pipe and is in communication with the air intake pipe.

10. A coating process based on physical vapor deposition technology, characterized in that: The following steps are involved: Step 1: inspect the workpiece (3) using a detection device, and clean and dry the surface of the workpiece (3); Step 2, placing the workpiece (3) in the coating jig as described in claims 1 to 9, and introducing argon gas heated to 150° C. to 250° C. by the heating unit (141) to exhaust the air inside the coating jig, and preheating the workpiece (3) and the coating jig at the same time; Step 3, adjusting the flow rate of argon gas, and performing three main bombardments on the preheated workpiece, each bombardment lasting 2-4 minutes; Step 4, introducing the reaction gas acetylene and further adjusting the flow rate of argon gas, performing ten sub-bombardments on the workpiece (3) after the main bombardment, and correspondingly adjusting the voltage of the first electrode plate assembly (11) and the second electrode plate assembly (12) during the ten sub-bombardments to perform coating and obtain a finished workpiece; The duration of the first and second sub-bombardments was 5-10 minutes, the duration of the third to eighth sub-bombardments was 10-30 minutes, and the duration of the ninth and tenth sub-bombardments was 60-120 minutes. During the first and second sub-bombardment processes, the duty cycle of the first electrode assembly (11) and the second electrode assembly (12) is 10%-50%; During the third to tenth sub-bombardment processes, the duty cycle of the first electrode assembly (11) and the second electrode assembly (12) is 30%-70%; Step 5: The finished workpiece is inspected and shipped after the inspection is completed.

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