A vacuum coating equipment with continuous feeding

Abstract

The present invention proposes a vacuum coating equipment with continuous loading, including a coating chamber, a sample library chamber and a loading and unloading device, wherein the coating chamber is sealed and connected with the sample library chamber; a plurality of samples are stored in the sample library chamber, and the loading and unloading device is used to move the samples in the sample library chamber into the coating chamber for coating, and move the coated samples into the sample library chamber for storage. The present invention stores multiple samples in the sample library chamber, and uses the loading and unloading device to transfer the samples to be coated in the sample library chamber to the coating chamber for coating, and transfer the coated samples to the sample library chamber for temporary storage, and then continue to transfer the samples to be coated in the sample library chamber to the coating chamber for coating, so as to realize continuous loading of the vacuum coating equipment, and there is no need to open the box door during the loading and unloading process, and the vacuum environment inside the coating chamber will not be destroyed, which can greatly improve the efficiency of continuous coating and reduce the energy consumption required for multiple vacuum pumping.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, and in particular to a vacuum coating device with continuous feeding. Background Art

[0002] Vacuum coating technology is a method of evaporating or sputtering metals, alloys or compounds in a vacuum so that they solidify and deposit on the object to be coated (called a substrate, substrate or matrix). This is called vacuum coating.

[0003] Most of the existing vacuum coating equipment do not have the function of continuous loading, that is, each time the coating part completes a coating process, the coating chamber needs to be depressurized, and then the chamber door is opened to transfer the coated part to the next process station; each time the chamber door is opened for loading, the vacuum environment of the coating chamber will be destroyed. When the next coated part is placed in the coating chamber, it takes a lot of time to evacuate the coating chamber. On the one hand, the efficiency of continuous vacuum coating is reduced, and on the other hand, multiple vacuuming of the coating chamber causes a lot of energy consumption. Summary of the invention

[0004] The present invention proposes a vacuum coating equipment with continuous loading, which solves the problem that the vacuum coating equipment in the prior art does not have the function of continuous loading, and the vacuum environment of the coating chamber will be destroyed each time the box door is opened for loading, resulting in low continuous vacuum coating efficiency and high energy consumption required for multiple vacuuming.

[0005] The technical solution of the present invention is achieved in this way:

[0006] The present invention provides a vacuum coating equipment with continuous loading, comprising a coating chamber, a sample library chamber and a loading and unloading device, wherein the coating chamber is sealed and connected with the sample library chamber; a plurality of samples are stored in the sample library chamber, and the loading and unloading device is used to move the samples in the sample library chamber into the coating chamber for coating, and move the coated samples into the sample library chamber for storage.

[0007] The present invention stores multiple samples in a sample library chamber, and uses a loading and unloading device to transfer the samples to be coated in the sample library chamber to the coating chamber for coating, and transfers the coated samples to the sample library chamber for temporary storage, and then continues to transfer the samples to be coated in the sample library chamber to the coating chamber for coating, which can realize continuous loading of the vacuum coating equipment, and there is no need to open the box door during the loading and unloading process, and the vacuum environment inside the coating chamber will not be destroyed, which can greatly improve the continuous coating efficiency and reduce the energy consumption required for multiple vacuum pumping.

[0008] Specifically, a sample rack is provided in the sample library chamber, and a plurality of layers of plates are provided on the sample rack. The layers are used to place a sample tray, and the sample tray contains samples.

[0009] Specifically, the loading and unloading device includes a lifting mechanism, a sample moving mechanism and a gripping mechanism. The lifting mechanism is connected to the sample rack and is used to drive the sample rack to lift and lower. The sample moving mechanism is located on one side of the sample rack and is used to move in or out the sample tray on the target layer of the sample rack. The gripping mechanism is located in the coating chamber and is used to grab and move out the sample tray on the target layer of the sample rack, move the sample tray to a designated position in the coating chamber to coat the sample, and put the sample tray back to its original position after coating. Through the cooperation of the lifting mechanism, the sample moving mechanism and the gripping mechanism, the sample tray on the target layer of the sample rack can be transferred to the coating chamber to coat the sample, and after coating, the sample tray can be transferred to the sample rack of the sample library chamber, thereby realizing the fully automated loading and unloading process of the vacuum coating equipment.

[0010] Furthermore, the lifting mechanism includes a driving component and a telescopic rod, the driving component is used to drive the telescopic rod to extend and retract; the top end of the telescopic rod is connected to the bottom end of the sample rack; a plurality of first guide shafts are installed between the sample rack and the driving component, the first guide shaft is slidably sleeved with a first linear bearing, and the first linear bearing is connected to the telescopic rod; the telescopic rod is driven to extend and retract by the driving component, and the sample rack is driven to rise and fall in cooperation with the first guide shaft and the first linear bearing, so that the layer height corresponding to the sample to be coated corresponds to the entrance height of the coating chamber, so that the sample moving mechanism cooperates with the grabbing mechanism to transfer the sample tray on the layer to the coating chamber.

[0011] Furthermore, a plurality of vertical second guide shafts are provided in the sample library chamber, and a second linear bearing is slidably sleeved on the second guide shaft. The second linear bearing is fixedly connected to the sample rack. By setting the second guide shaft and the second linear bearing, the lifting path of the sample rack can be conveniently constrained and guided.

[0012] Specifically, the sample transfer mechanism includes a sample transfer rod and a linear module. The linear module is used to drive the sample transfer rod to move horizontally toward or away from the sample tray. The end of the sample transfer rod is detachably connected to the sample tray through a connecting component. By driving the sample transfer rod to move, the sample tray on the target layer on the sample rack can be pushed out or pulled back.

[0013] Furthermore, the connecting assembly includes a non-circular connecting block and a connecting seat, the connecting block is fixed to the end of the sample transfer rod, a limiting hole for the connecting block to pass through is opened on the connecting seat, the inner contour of the limiting hole matches the outer contour of the connecting block, and a stopper is provided on the end of each layer of the sample rack away from the connecting block; a rotating motor is installed at the head end of the sample transfer rod, and the rotating motor is used to drive the sample transfer rod to rotate axially, and the rotating motor is fixedly installed on the linear module; when the sample to be coated on the sample rack needs to be transferred to the coating chamber, the rotating motor can be used to drive the sample transfer rod to rotate a certain angle first, so that the connecting block at the end of the sample transfer rod cannot pass through the connecting seat. The limiting hole on the connecting seat is then driven by the linear module to drive the rotary motor and the sample transfer rod to move in the direction close to the sample tray, and the sample tray is pushed out of the sample rack by the connecting block at the end of the sample transfer rod; when the coated sample tray needs to be transferred to the sample rack, the linear module can be used to drive the rotary motor and the sample transfer rod to move in the direction close to the sample tray until the connecting block at the end of the sample transfer rod passes through the limiting hole on the connecting seat, and then the rotary motor is used to drive the sample transfer rod to rotate a certain angle so that the connecting block cannot pass through the limiting hole, and then the linear module can be used to drive the rotary motor and the sample transfer rod to move in the direction away from the coating chamber, and the coated sample tray is pulled back to the sample rack.

[0014] Specifically, the grabbing mechanism includes a lifting component and a grabbing head. The end of the telescopic shaft of the lifting component is connected to the grabbing head. The lifting component is used to drive the grabbing head to lift and lower to grab the sample tray carrying the sample.

[0015] Further, the grab head includes a first clamping plate and a second clamping plate, the first clamping plate is fixedly mounted at the end of the lifting assembly, and the second clamping plate is connected to the first clamping plate by a connecting column; a support plate is provided on the top surface of the sample tray, and the support plate and the sample tray are connected by a plurality of supporting columns, the spacing between the support plate and the sample tray is greater than the thickness of the second clamping plate, and the distance between the first clamping plate and the second clamping plate matches the thickness of the support plate; a slot is provided on the side of the support plate away from the sample transfer mechanism corresponding to the position of the connecting column, the slot is provided along the displacement direction of the sample tray, the inner diameter of the slot matches the outer diameter of the connecting column, and the opening end of the slot is trumpet-shaped. When the sample transfer rod pushes out the sample tray on the sample rack, as the sample tray is displaced, the connecting column will gradually get stuck in the slot on the outside of the support plate until the sample tray is completely separated from the sample rack and enters the coating chamber, and at the same time, the first clamping plate and the second clamping plate at the upper and lower ends of the connecting column will clamp the upper and lower surfaces of the support plate to limit the support plate; the opening end of the slot is set to be trumpet-shaped to facilitate the guidance of the connecting column into the slot.

[0016] Furthermore, conical positioning holes are provided on both sides of the end of the missing groove, and an installation groove is opened on the bottom surface of the second clamping plate at the positions corresponding to the two positioning holes, a positioning block is vertically slidably embedded in the installation groove, a compression spring is provided between the positioning block and the installation groove, and a chamfered structure is provided on the bottom outer side of the positioning block; by providing positioning holes on both sides of the end of the missing groove and providing two corresponding retractable positioning blocks on the bottom surface of the second clamping plate, the positioning block is conveniently inserted into the positioning hole, which can avoid displacement of the sample tray on the grabbing head; by designing the positioning block to be conical and providing a chamfered structure on the bottom outer side of the positioning block, the positioning block is conveniently inserted into / out of the positioning hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of a vacuum coating device with continuous feeding of the present invention;

[0019] Figure 2 This is a schematic diagram of the connection structure of the lifting mechanism, the sample moving mechanism and the sample library chamber in an embodiment of the present invention;

[0020] Figure 3 It is a schematic diagram of the structure of the sample rack in an embodiment of the present invention;

[0021] Figure 4 Schematic diagram of the connection structure between the sample transfer rod and the sample tray in an embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the installation structure of the sample tray and the support plate in an embodiment of the present invention;

[0023] Figure 6 It is a structural schematic diagram of a grabbing head in an embodiment of the present invention;

[0024] In the figure: 1. coating chamber; 2. sample library chamber; 3. sample rack; 4. layer plate; 5. sample tray; 6. lifting mechanism; 7. sample transfer mechanism; 8. grabbing mechanism; 9. driving component; 10. telescopic rod; 11. first guide shaft; 12. first linear bearing; 13. second guide shaft; 14. second linear bearing; 15. sample transfer rod; 16. linear module; 17. connecting block; 18. connecting seat; 19. limiting hole; 20. stopper; 21. rotating motor; 22. lifting assembly; 23. telescopic shaft; 24. first clamping plate; 25. second clamping plate; 26. connecting column; 27. support plate; 28. support column; 29. ​​notch; 30. positioning hole; 31. positioning block. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] Reference Figures 1 to 6 An embodiment of the present invention provides a vacuum coating device with continuous loading, including a coating chamber 1, a sample library chamber 2 and a loading and unloading device. The coating chamber 1 is sealed and connected to the sample library chamber 2; a plurality of samples are stored in the sample library chamber 2, and the loading and unloading device is used to move the samples in the sample library chamber 2 into the coating chamber 1 for coating, and move the coated samples into the sample library chamber 2 for storage.

[0027] The present invention stores multiple samples in the sample library chamber 2, and uses a loading and unloading device to transfer the samples to be coated in the sample library chamber 2 to the coating chamber 1 for coating, and transfers the coated samples to the sample library chamber 2 for temporary storage, and then continues to transfer the samples to be coated in the sample library chamber 2 to the coating chamber 1 for coating, which can realize continuous loading of the vacuum coating equipment, and there is no need to open the box door during the loading and unloading process, and the vacuum environment inside the coating chamber 1 will not be destroyed, which can greatly improve the continuous coating efficiency and reduce the energy consumption required for multiple vacuum pumping.

[0028] Specifically, Figure 2 , 3 As shown, a sample rack 3 is provided in the sample library chamber 2, and a plurality of layers 4 are provided on the sample rack 3 (six layers in this embodiment, and the specific number of layers can be flexibly adjusted according to actual conditions), and the layers 4 are used to place a sample tray 5, and the sample tray 5 contains samples.

[0029] Specifically, Figure 1 , 2As shown, the loading and unloading device includes a lifting mechanism 6, a sample moving mechanism 7 and a grabbing mechanism 8. The lifting mechanism 6 is connected to the sample rack 3 and is used to drive the sample rack 3 to lift and lower. The sample moving mechanism 7 is located at one side of the sample rack 3 and is used to move in or out the sample tray 5 on the target layer 4 of the sample rack 3. The grabbing mechanism 8 is located in the coating chamber 1 and is used to grab and move out the sample tray 5 on the target layer 4 of the sample rack 3, move the sample tray 5 to a designated position in the coating chamber 1 to coat the sample, and put the sample tray 5 back to its original position after coating. Through the cooperation of the lifting mechanism 6, the sample moving mechanism 7 and the grabbing mechanism 8, the sample tray 5 on the target layer 4 on the sample rack 3 can be transferred to the coating chamber 1 to coat the sample, and after coating, the sample tray 5 can be transferred to the sample rack 3 of the sample library chamber 2, thereby realizing the fully automated loading and unloading process of the vacuum coating equipment.

[0030] Furthermore, if Figure 2 As shown, the lifting mechanism 6 includes a driving component 9 and a telescopic rod 10, and the driving component 9 is used to drive the telescopic rod 10 to extend and retract; the top end of the telescopic rod 10 is connected to the bottom end of the sample rack 3; a plurality of first guide shafts 11 are installed between the sample rack 3 and the driving component 9, and a first linear bearing 12 is slidably sleeved on the first guide shaft 11, and the first linear bearing 12 is connected to the telescopic rod 10; the telescopic rod 10 is driven to extend and retract by the driving component 9, and the sample rack 3 is driven to rise and fall in cooperation with the first guide shaft 11 and the first linear bearing 12, so that the height of the layer plate 4 corresponding to the sample to be coated corresponds to the entrance height of the coating chamber 1, so that the sample moving mechanism 7 cooperates with the grabbing mechanism 8 to transfer the sample tray 5 on the layer plate 4 to the coating chamber 1.

[0031] During the specific implementation process, the lifting mechanism 6 is located below the sample library chamber 2, and a linear bearing is installed at the position where the top end of the telescopic rod 10 passes through the bottom surface of the sample library chamber 2. The outer sleeve of the telescopic rod 10 is provided with a bellows, and the top end of the bellows is sealed with the linear bearing, and the bottom end of the bellows is sealed with the driving component 9. The purpose of this design is to avoid pressure relief at the position where the bottom surface of the sample library chamber 2 passes through the telescopic rod 10 and affects the vacuum environment without affecting the extension and retraction of the telescopic rod 10.

[0032] In a specific implementation process, the driving component 9 can be a hydraulic cylinder, a pneumatic cylinder or a linear motor.

[0033] Furthermore, if Figure 2 , 3 As shown, four vertical second guide shafts 13 are provided in the sample library chamber 2, and a second linear bearing 14 is slidably sleeved on the second guide shaft 13. The second linear bearing 14 is fixedly connected to the sample rack 3. By setting the second guide shaft 13 and the second linear bearing 14, the lifting path of the sample rack 3 can be conveniently constrained and guided.

[0034] Specifically, Figure 2 As shown, the sample transfer mechanism 7 includes a sample transfer rod 15 and a linear module 16. The linear module 16 is used to drive the sample transfer rod 15 to move in a horizontal direction toward or away from the sample tray 5. The end of the sample transfer rod 15 is detachably connected to the sample tray 5 through a connecting assembly. By driving the sample transfer rod 15 to move through the linear module 16, the sample tray 5 on the target layer 4 on the sample rack 3 can be pushed out or pulled back.

[0035] In a specific implementation process, the linear module 16 can use a linear motor, a hydraulic cylinder or a pneumatic cylinder as a driving source, and utilize a worm gear transmission assembly to drive the sample transfer rod 15 to move.

[0036] Furthermore, if Figure 4 As shown, the connecting assembly includes a non-circular connecting block 17 and a connecting seat 18, wherein the connecting block 17 is fixed to the end of the sample transfer rod 15, and a limiting hole 19 is provided on the connecting seat 18 for the connecting block 17 to pass through, and the inner contour of the limiting hole 19 matches the outer contour of the connecting block 17; a rotating motor 21 is installed at the head end of the sample transfer rod 15, and the rotating motor 21 is used to drive the sample transfer rod 15 to rotate along the axial direction, and the rotating motor 21 is fixedly installed on the linear module 16; when it is necessary to transfer the sample to be coated on the sample rack 3 to the coating chamber 1, the rotating motor 21 can be used to drive the sample transfer rod 15 to rotate a certain angle first, so that the connecting block 17 at the end of the sample transfer rod 15 cannot pass through the limiting hole 19 on the connecting seat 18, and then the linear module can be used to rotate the sample transfer rod 15 ... 16 drives the rotary motor 21 and the sample transfer rod 15 to move toward the direction close to the sample tray 5, and the sample tray 5 is pushed out of the sample rack 3 by the connecting block 17 at the end of the sample transfer rod 15; when the coated sample tray 5 needs to be transferred to the sample rack 3, the linear module 16 can be used to drive the rotary motor 21 and the sample transfer rod 15 to move toward the direction close to the sample tray 5 until the connecting block 17 at the end of the sample transfer rod 15 passes through the limiting hole 19 on the connecting seat 18, and then the rotary motor 21 drives the sample transfer rod 15 to rotate a certain angle so that the connecting block 17 cannot pass through the limiting hole 19, and then the linear module 16 can drive the rotary motor 21 and the sample transfer rod 15 to move toward the direction away from the coating chamber 1, and the coated sample tray 5 is pulled back to the sample rack 3.

[0037] In the specific implementation process, Figure 3As shown, a stopper 20 is provided at one end above each layer plate 4 of the sample rack 3 away from the connecting block 17, and a box door is provided on the side of the sample library chamber 2, so as to open the box door conveniently to take out the sample tray 5 carrying the coated sample, and put the sample tray 5 carrying the sample to be coated on the sample rack 3 in the sample library chamber 2. When putting in the sample tray 5, it is necessary to ensure that the connecting seat 18 on the sample tray 5 is located at the end close to the sample transfer rod 15. In order to prevent the connecting seat 18 from being located at the end away from the sample transfer rod 15 after the sample tray 5 is put in, a stopper 20 is provided at one end above each layer plate 4 of the sample rack 3 away from the connecting block 17, so as to prevent the sample tray 5 from being placed upside down when being loaded into the sample rack 3, resulting in the subsequent connection block 17 at the end of the sample transfer rod 15 being unable to cooperate with the connecting seat 18 on the sample tray 5.

[0038] During the specific implementation process, a sliding sleeve is installed at the side wall of the sample storage chamber 2 where the sample transfer rod 15 passes through. The sliding sleeve allows the sample transfer rod 15 to slide and rotate. The outer sleeve of the sample transfer rod 15 is provided with a bellows, one end of the bellows is sealed with the sliding sleeve, and the other end of the bellows is sealed with the rotating motor 21. The purpose of providing the bellows is to avoid pressure relief and affect the vacuum environment at the position where the side wall of the sample storage chamber 2 passes through the sample transfer rod 15 without affecting the displacement of the sample transfer rod 15.

[0039] In a specific implementation process, a slide groove is provided on the top surface of each layer of the layer plate 4 to constrain and guide the displacement direction of the sample tray 5 .

[0040] Specifically, the grabbing mechanism 8 includes a lifting component 22 and a grabbing head. The end of the telescopic shaft 23 of the lifting component 22 is connected to the grabbing head. The lifting component 22 is used to drive the grabbing head to lift and lower to grab the sample tray 5 carrying the sample.

[0041] In a specific implementation process, the lifting component 22 can be a hydraulic cylinder, a pneumatic cylinder or a linear motor.

[0042] Furthermore, if Figure 5 , 6As shown, the grabbing head includes a first clamping plate 24 and a second clamping plate 25, the first clamping plate 24 is fixedly mounted at the end of the lifting assembly 22, and the second clamping plate 25 is connected to the first clamping plate 24 by a connecting column 26; a support plate 27 is provided on the top surface of the sample tray 5, and the support plate 27 and the sample tray 5 are connected by a plurality of supporting columns 28, the spacing between the support plate 27 and the sample tray 5 is greater than the thickness of the second clamping plate 25 (to facilitate the first clamping plate 24 to be inserted into the gap between the support plate 27 and the sample tray 5), and the distance between the first clamping plate 24 and the second clamping plate 25 matches the thickness of the support plate 27; a notch 29 is provided on the side of the support plate 27 away from the sample moving mechanism 7 at the position corresponding to the connecting column 26, and the notch 29 is provided along the displacement direction of the sample tray 5, the inner diameter of the notch 29 matches the outer diameter of the connecting column 26, and the opening end of the notch 29 is trumpet-shaped. When the sample transfer rod 15 pushes out the sample tray 5 on the sample rack 3, as the sample tray 5 moves, the connecting column 26 will gradually get stuck in the notch 29 on the outside of the support plate 27 until the sample tray 5 is completely separated from the sample rack 3 and enters the coating chamber 1. At the same time, the first clamping plate 24 and the second clamping plate 25 at the upper and lower ends of the connecting column 26 will clamp on the upper and lower surfaces of the support plate 27 to limit the support plate 27; the open end of the notch 29 is set to be trumpet-shaped to facilitate guiding the connecting column 26 into the notch 29.

[0043] Furthermore, if Figure 5 , 6 As shown, conical positioning holes 30 are provided on both sides of the end of the notch 29, and a mounting groove is opened on the bottom surface of the second clamping plate 25 at the positions corresponding to the two positioning holes 30, and a positioning block 31 is vertically slidably embedded in the mounting groove (the positioning block 31 can be completely retracted into the mounting groove), a compression spring (not shown in the figure) is provided between the positioning block 31 and the mounting groove, and a chamfered structure is provided on the outer side of the bottom of the positioning block 31; by providing positioning holes 30 on both sides of the end of the notch 29 and providing two corresponding retractable positioning blocks 31 on the bottom surface of the second clamping plate 25, it is convenient for the positioning block 31 to be inserted into the positioning hole 30, and displacement of the sample tray 5 on the grabbing head can be avoided; by designing the positioning block 31 to be conical, and providing a chamfered structure on the outer side of the bottom of the positioning block 31, it is convenient for the positioning block 31 to be inserted into / out of the positioning hole 30.

[0044] The working process of the vacuum coating equipment in this embodiment is as follows:

[0045] First, open the door of the sample library chamber 2, load six sample trays 5 carrying samples to be coated onto the six layers 4 of the sample rack 3 in sequence, close the door, and evacuate the sample library chamber 2 and the coating chamber 1;

[0046] After the vacuuming is completed, the control cabinet automatically controls the lifting mechanism 6 to drive the sample rack 3 to rise to a certain height, so that the height of the sample tray 5 on the first layer 4 is aligned with the height of the sample transfer rod 15, and then controls the rotary motor 21 to drive the sample transfer rod 15 to rotate 90° (at this time, the connecting block 17 at the end of the sample transfer rod 15 cannot pass through the limiting hole 19 on the connecting seat 18), and controls the linear module 16 to drive the sample transfer rod 15 to move in the direction close to the sample tray 5, and wait for the connecting block 17 at the end of the sample transfer rod 15 to abut against the connecting seat 18 on the sample tray 5, and continue to drive the sample transfer rod 15 to move and push the sample tray 5 out of the sample rack 3. With the displacement of the sample tray 5, the connecting column 26 in the coating chamber 1 will be stuck in the notch 29 on the outer side of the support plate 27, until the positioning hole 30 on the bottom surface of the second clamping plate 25 is stuck in the positioning holes 30 on both sides of the notch 29, that is, the connection between the grabbing head and the sample tray 5 is completed, and at this time, the sample tray 5 has been completely pushed out of the sample rack 3 and is in the coating chamber 1;

[0047] The linear module 16 is controlled to drive the sample transfer rod 15 to retract into the sample library chamber 2, and the rotary motor 21 is controlled to drive the sample transfer rod 15 to rotate 90° in the opposite direction (at this time, the connecting block 17 at the end of the sample transfer rod 15 can pass through the limiting hole 19 on the connecting seat 18); then the lifting assembly 22 is controlled to drive the grabbing head and the sample tray 5 to descend to the specified coating height position, and the sample on the sample tray 5 is coated by the coating machine in the coating chamber 1;

[0048] After the coating is completed, the lifting assembly 22 is controlled to drive the grab head to rise to the initial position; then the linear module 16 is controlled to drive the sample transfer rod 15 to extend into the coating chamber 1, and after the connecting block 17 at the end of the sample transfer rod 15 passes through the limiting hole 19 on the connecting seat 18 on the sample tray 5, the rotary motor 21 is controlled to rotate 90° (at this time, the connecting block 17 at the end of the sample transfer rod 15 cannot pass through the limiting hole 19 on the connecting seat 18), and then the linear module 16 is controlled to drive the sample transfer rod 15 to retract into the sample library chamber 2, and the sample transfer rod The connecting block 17 at the end of the sample transfer rod 15 will pull the sample tray 5 back to the first layer plate 4 of the sample rack 3; then the rotary motor 21 is controlled to drive the sample transfer rod 15 to rotate 90° in the opposite direction (at this time, the connecting block 17 at the end of the sample transfer rod 15 can pass through the limiting hole 19 on the connecting seat 18), and finally the linear module 16 is controlled to drive the sample transfer rod 15 to continue to retract, so that the connecting block 17 at the end of the sample transfer rod 15 exits the limiting hole 19 on the connecting seat 18, and thus the coating process of the sample on the first layer plate 4 of the sample rack 3 is completed;

[0049] Then, the lifting mechanism 6 is controlled to drive the sample rack 3 to rise to a certain height, so that the height of the sample tray 5 on the second layer plate 4 is aligned with the height of the sample transfer rod 15, and the above steps are continued to complete the coating of the sample on the second layer plate 4 on the sample rack 3;

[0050] By analogy, after the coating process of 36 layers of samples on the sample rack is completed, the coating chamber 1 and the sample library chamber 2 can be depressurized, and the door of the sample library chamber 2 can be opened to take out all the sample trays 5 carrying the coated samples on the sample rack 3, and the sample trays 5 carrying the samples to be coated are loaded into the sample rack 3 in turn to continue coating the next group of samples.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum coating device with continuous feeding, characterized in that: The invention comprises a coating chamber (1), a sample library chamber (2) and a loading and unloading device, wherein the coating chamber (1) is sealed and connected to the sample library chamber (2); a plurality of samples are stored in the sample library chamber (2); the loading and unloading device is used to move the samples in the sample library chamber (2) into the coating chamber (1) for coating, and to move the coated samples into the sample library chamber (2) for storage.

2. The vacuum coating equipment with continuous feeding as claimed in claim 1, characterized in that: A sample rack (3) is arranged in the sample library chamber (2), and a plurality of layers of plates (4) are arranged on the sample rack (3), and the layers (4) are used to place a sample tray (5).

3. The vacuum coating equipment with continuous feeding as claimed in claim 2, characterized in that: The loading and unloading device comprises a lifting mechanism (6), a sample moving mechanism (7) and a grabbing mechanism (8); the lifting mechanism (6) is connected to the sample rack (3) and is used to drive the sample rack (3) to lift and lower; the sample moving mechanism (7) is located on one side of the sample rack (3) and is used to move in or out a sample tray (5) on a target layer (4) of the sample rack (3); the grabbing mechanism (8) is located in the coating chamber (1) and is used to grab and move out the sample tray (5) on the target layer (4) of the sample rack (3), move the sample tray (5) to a designated position in the coating chamber (1) to coat the sample, and put the sample tray (5) back to its original position after coating.

4. The vacuum coating equipment with continuous feeding as claimed in claim 3, characterized in that: The lifting mechanism (6) comprises a driving component (9) and a telescopic rod (10), wherein the driving component (9) is used to drive the telescopic rod (10) to extend and retract; the top end of the telescopic rod (10) is connected to the bottom end of the sample rack (3); a plurality of first guide shafts (11) are installed between the sample rack (3) and the driving component (9), a first linear bearing (12) is slidably sleeved on the first guide shaft (11), and the first linear bearing (12) is connected to the telescopic rod (10).

5. The vacuum coating equipment with continuous feeding as claimed in claim 4, characterized in that: A plurality of vertical second guide shafts (13) are arranged in the sample library chamber (2); a second linear bearing (14) is slidably sleeved on the second guide shaft (13); and the second linear bearing (14) is fixedly connected to the sample rack (3).

6. The continuous feeding vacuum coating equipment according to claim 3, characterized in that: The sample transfer mechanism (7) comprises a sample transfer rod (15) and a linear module (16), wherein the linear module (16) is used to drive the sample transfer rod (15) to move in a horizontal direction towards or away from a sample tray (5), and the end of the sample transfer rod (15) is detachably connected to the sample tray (5) via a connecting assembly.

7. The continuous feeding vacuum coating equipment according to claim 6, characterized in that: The connecting assembly comprises a non-circular connecting block (17) and a connecting seat (18), wherein the connecting block (17) is fixed to the end of the sample transfer rod (15), and a limiting hole (19) is provided on the connecting seat (18) for the connecting block (17) to pass through, and the inner contour of the limiting hole (19) matches the outer contour of the connecting block (17), and a stopper (20) is provided on the end of each layer plate (4) of the sample rack (3) away from the connecting block (17); a rotating motor (21) is installed at the head end of the sample transfer rod (15), and the rotating motor (21) is used to drive the sample transfer rod (15) to rotate along the axial direction, and the rotating motor (21) is fixedly installed on the linear module (16).

8. The vacuum coating equipment with continuous feeding as claimed in claim 3, characterized in that: The gripping mechanism (8) comprises a lifting component (22) and a gripping head. The end of a telescopic shaft (23) of the lifting component (22) is connected to the gripping head. The lifting component (22) is used to drive the gripping head to lift and lower so as to grip a sample tray (5) carrying a sample.

9. The vacuum coating equipment with continuous loading as claimed in claim 8, characterized in that: The grabbing head comprises a first clamping plate (24) and a second clamping plate (25), wherein the first clamping plate (24) is fixedly mounted at the end of the lifting assembly (22), and the second clamping plate (25) is connected to the first clamping plate (24) via a connecting column (26); a support plate (27) is provided on the top surface of the sample tray (5), and the support plate (27) is connected to the sample tray (5) via a plurality of supporting columns (28), and the spacing between the support plate (27) and the sample tray (5) is greater than the thickness of the second clamping plate (25), and the distance between the first clamping plate (24) and the second clamping plate (25) matches the thickness of the support plate (27); a notch (29) is provided on one side of the support plate (27) away from the sample moving mechanism (7) at a position corresponding to the connecting column (26), and the notch (29) is provided along the displacement direction of the sample tray (5), the inner diameter of the notch (29) matches the outer diameter of the connecting column (26), and the opening end of the notch (29) is trumpet-shaped.

10. The vacuum coating equipment with continuous loading as claimed in claim 9, characterized in that: Conical positioning holes (30) are provided on both sides of the end of the notch (29); a mounting groove is provided on the bottom surface of the second clamping plate (25) at positions corresponding to the two positioning holes (30); a positioning block (31) is vertically slidably embedded in the mounting groove; a compression spring is provided between the positioning block (31) and the mounting groove; and a chamfered structure is provided on the outer side of the bottom of the positioning block (31).

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