Piezoelectric pump and preparation method thereof

Abstract

The present invention discloses a piezoelectric pump and a preparation method thereof. The piezoelectric pump comprises a valve plate, wherein the valve plate comprises: a plate body, a moving part and a supporting part. The plate body is provided with a plurality of hollow parts, and a moving part is provided in a space enclosed by the plurality of hollow parts on the plate body, and a supporting part is provided between the moving part and the hollow parts. The piezoelectric pump of the present invention can not only improve the structural strength of the valve plate, but also ensure the uniformity of the force on the valve plate, prevent the valve plate from being twisted during vibration, improve the one-way cut-off property and reliability of the valve plate, prevent the valve plate from vibration fatigue, and increase the service life of the valve plate.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid pump manufacturing, and more specifically, to a piezoelectric pump and a preparation method thereof. Background Art

[0002] Piezoelectric pump is a new type of fluid device that uses the inverse piezoelectric effect of piezoelectric ceramics to provide power through the vibration of piezoelectric vibrators. Piezoelectric pumps have the advantages of compact structure, easy miniaturization, easy integration, high control accuracy, fast response speed, low power consumption, long life, and high reliability. They are widely used in biomedicine, heat dissipation and cooling, portable detection equipment and other fields.

[0003] However, the valve plates of existing piezoelectric micro pumps generally use cantilever beams or wheel valves and umbrella structures. However, the cantilever beam structure valve plates have poor one-way cutoff performance and low reliability of piezoelectric pumps. Wheel valves have good one-way cutoff performance, but they have high flatness requirements and are prone to stress fatigue during vibration, which affects the life of the pump. Umbrella valve piezoelectric pumps are too large to make the structure more compact. Summary of the invention

[0004] An object of the present invention is to provide a new technical solution for a piezoelectric pump and a method for preparing the same, which can at least solve the problems of poor unidirectional cutoff, low reliability and easy fatigue due to vibration of the piezoelectric micropump in the prior art.

[0005] According to a first aspect of the present invention, a piezoelectric pump is provided, comprising a valve plate, wherein the valve plate comprises: a plate body, a moving part and a supporting part, the plate body is provided with a plurality of hollow parts, the moving part is provided in a space enclosed by the plurality of hollow parts on the plate body, and the supporting part is provided between the moving part and the hollow parts.

[0006] Optionally, the plate body, the moving part and the supporting part configure the valve plate into a double-support beam structure.

[0007] Optionally, the valve plate has at least two moving parts, and each of the moving parts has the same structure.

[0008] Optionally, the periphery of each of the moving parts includes a plurality of the hollow parts, the plurality of the hollow parts are arranged in a square shape, and the supporting part is provided between two adjacent hollow parts.

[0009] Optionally, the piezoelectric pump further comprises a piezoelectric vibration component, a cavity plate, a first pressure plate and a second pressure plate which are sequentially stacked, the valve sheet is arranged between the first pressure plate and the second pressure plate, the cavity plate is provided with a cavity which penetrates along the thickness direction thereof, and the piezoelectric vibration component can vibrate relative to the cavity plate;

[0010] When the piezoelectric vibration component vibrates relative to the cavity plate, the moving part can be opened or closed relative to the first pressure plate or the second pressure plate to configure the valve plate into a one-way stop valve.

[0011] Optionally, the first pressing plate is provided with a first guide hole and a second guide hole, the second pressing plate is provided with a third guide hole and a fourth guide hole, the moving part comprises a first moving body and a second moving body, the first moving body corresponds to the first guide hole and the third guide hole respectively, the second moving body corresponds to the second guide hole and the fourth guide hole respectively, when the piezoelectric vibration component vibrates toward the side away from the cavity plate, the first moving body moves toward the first pressing plate to make the first guide hole and the third guide hole connected, and the second moving body closes the second guide hole to make the second guide hole and the fourth guide hole non-conductive;

[0012] When the piezoelectric vibration component vibrates toward the side of the cavity plate, the second moving body moves toward the second pressure plate to connect the second guide hole with the fourth guide hole, and the first moving body closes the third guide hole to prevent the first guide hole from being connected with the third guide hole.

[0013] Optionally, a diameter of the first guide hole is larger than a diameter of the second guide hole, and a diameter of the third guide hole is smaller than a diameter of the fourth guide hole.

[0014] Optionally, an orthographic projection area of ​​the first moving body on the second pressing plate covers the third guide hole and is smaller than the first guide hole, and an orthographic projection area of ​​the second moving body on the second pressing plate covers the second guide hole and is smaller than the fourth guide hole.

[0015] Optionally, the piezoelectric pump further comprises a bottom plate, a plurality of fifth guide holes are provided on the bottom plate, the bottom plate is arranged on the second pressure plate, and at least two of the fifth guide holes correspond to the third guide hole and the fourth guide hole respectively.

[0016] Optionally, the piezoelectric vibration component comprises: a piezoelectric element, a vibration plate and a vibration membrane which are stacked in sequence, and the piezoelectric element, the vibration plate and the vibration membrane are adhesively connected in sequence.

[0017] Optionally, an adhesive film is provided between the vibration membrane and the vibration plate.

[0018] A second aspect of the present invention provides a method for preparing a piezoelectric pump, which is used to prepare the piezoelectric pump described in the above embodiment, characterized in that the preparation method comprises:

[0019] A plurality of hollow parts are arranged on the sheet body and penetrate through the sheet body along the thickness direction;

[0020] A moving part is arranged in the space surrounded by the plurality of hollow parts on the sheet body;

[0021] A supporting portion is arranged between the moving portion and the hollow portion.

[0022] Optionally, the method for preparing the piezoelectric pump further includes:

[0023] Adhere the piezoelectric vibration component, the cavity plate, the first pressing plate, the valve plate and the second pressing plate in sequence;

[0024] Laser welding is performed on each side of a valve body formed by bonding the cavity plate, the first pressing plate, the valve sheet and the second pressing plate to form the piezoelectric pump.

[0025] Optionally, the method for preparing the piezoelectric pump further includes: bonding the bottom plate to the second pressing plate, and bonding the cavity plate, the first pressing plate, the valve sheet, the second pressing plate and the bottom plate by using an adhesive film.

[0026] The piezoelectric pump of the present invention is composed of a valve body, a moving part and a supporting part. The moving part and the hollow part are connected by the supporting part, which can not only improve the structural strength of the valve plate, but also ensure the uniformity of the force applied to the valve plate, prevent the valve plate from twisting during vibration, improve the one-way cut-off property and reliability of the valve plate, prevent the valve plate from vibration fatigue, and increase the life of the valve plate.

[0027] Further features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0029] Figure 1 is a structural explosion diagram of a piezoelectric pump according to an embodiment of the present invention;

[0030] Figure 2 is a schematic structural diagram of a valve plate of a piezoelectric pump according to an embodiment of the present invention;

[0031] Figure 3 is a cross-sectional view of fluid suction of a piezoelectric pump according to an embodiment of the present invention;

[0032] Figure 4 FIG. 4 is a cross-sectional view of fluid discharge of a piezoelectric pump according to an embodiment of the present invention.

[0033] Reference numerals:

[0034] Piezoelectric pump 100;

[0035] Piezoelectric vibration component 10; piezoelectric element 11; vibration plate 12; vibration film 13; adhesive film 14;

[0036] Cavity plate 20; Cavity 21;

[0037] A first pressing plate 30; a first guide hole 31; a second guide hole 32;

[0038] Valve plate 40; plate body 41; moving part 42; first moving body 421; second moving body 422; supporting part 43; hollow part 44;

[0039] The second pressing plate 50; the third guide hole 51; the fourth guide hole 52;

[0040] Bottom plate 60; fifth guide hole 61. DETAILED DESCRIPTION

[0041] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless otherwise specifically stated.

[0042] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

[0043] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0044] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0045] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0046] In the specification and claims of the present invention, if the term "first" or "second" is involved, it may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the related objects are in an "or" relationship.

[0047] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0048] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" involved should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] The piezoelectric pump 100 according to the embodiment of the present invention is described in detail below with reference to the accompanying drawings.

[0050] like Figure 1 and Figure 2 As shown, the piezoelectric pump 100 according to an embodiment of the present invention includes a valve plate 40, wherein the valve plate 40 includes: a plate body 41, a moving portion 42 and a supporting portion 43, a plurality of hollow portions 44 are provided on the plate body 41, the moving portion 42 is provided in the space enclosed by the plurality of hollow portions 44 on the plate body 41, and a supporting portion 43 is provided between the moving portion 42 and the hollow portion 44.

[0051] In other words, Figure 1 and Figure 2 As shown, the piezoelectric pump 100 according to the embodiment of the present invention includes a valve plate 40, wherein the valve plate 40 is mainly composed of a plate body 41, a moving part 42 and a supporting part 43, and a plurality of hollow parts 44 are provided on the plate body 41, and the plurality of hollow parts 44 can be used for the introduction or export of fluid. The moving parts 42 are provided in the space surrounded by the plurality of hollow parts 44 on the plate body 41, and the fluid can push the moving part 42 on the valve plate 40 open under the action of pressure to achieve the introduction or export of fluid. A supporting part 43 is provided between the moving part 42 and the hollow part 44. By providing the supporting part 43, the moving part 42 can be subjected to more uniform force, and the moving part 42 of the valve plate 40 will not be distorted due to the impact of the liquid in the pump, thereby improving the life of the valve plate 40. In addition, due to the provision of the supporting part 43, the structural strength of the valve plate 40 can be effectively improved, the response time of the valve plate 40 can be reduced, and it is more conducive to the improvement of the performance of the micro pump.

[0052] Therefore, according to the piezoelectric pump 100 of the embodiment of the present invention, the valve plate 40 is connected to the moving part 42 and the hollow part 44 by the support part 43, which can not only improve the structural strength of the valve plate 40, but also ensure the uniformity of the force on the valve plate 40, prevent the valve plate 40 from twisting during vibration, improve the unidirectional cutoff property and reliability of the valve plate 40, prevent the valve plate 40 from vibration fatigue, and increase the service life of the valve plate 40.

[0053] According to one embodiment of the present invention, Figure 1 and Figure 2 As shown, the valve plate 40 can be constructed into a double-support beam structure by the plate body 41, the moving part 42 and the supporting part 43. The supporting part 43 connects the moving part 42 and the hollow part 44, which can not only improve the structural strength of the valve plate 40, but also ensure the uniformity of the force on the valve plate 40, prevent the valve plate 40 from being twisted during the vibration process, improve the one-way cut-off property and reliability of the valve plate 40, prevent the valve plate 40 from vibration fatigue, and increase the life of the valve plate 40.

[0054] In one embodiment of the present invention, the valve plate 40 has at least two moving parts 42, each of which has the same structure. The periphery of each moving part 42 includes a plurality of hollow parts 44, which are arranged in a square shape, and a support part 43 is provided between two adjacent hollow parts 44.

[0055] In other words, Figure 2 As shown, there can be at least two moving parts 42 of the valve plate 40, and each moving part 42 has the same structure. In the present invention, there can be two moving parts 42 of the valve plate 40, and the two moving parts 42 have the same structure. The periphery of each moving part 42 includes four hollow parts 44, and the four hollow parts 44 are arranged in a square shape, wherein two opposite hollow parts 44 are long strip holes, and the other two hollow parts 44 are square holes, and a support part 43 is provided between the square hole and the long strip hole. The provision of the hollow parts 44 can ensure that the fluid can be introduced or exported in the piezoelectric pump 100 through the hollow parts 44, and the one-way cut-off performance of the piezoelectric pump 100 is achieved through the vibration of the two moving parts 42.

[0056] According to one embodiment of the present invention, the piezoelectric pump 100 further includes a piezoelectric vibration component 10, a cavity plate 20, a first pressure plate 30, a valve plate 40, and a second pressure plate 50 which are sequentially stacked; a cavity 21 which penetrates along the thickness direction of the cavity plate 20 is provided in the cavity plate 20, and the piezoelectric vibration component 10 can vibrate relative to the cavity plate 20. When the piezoelectric vibration component 10 vibrates relative to the cavity plate 20, the moving part 42 can be opened or closed relative to the first pressure plate 30 or the second pressure plate 50, so as to configure the valve plate 40 into a one-way stop valve.

[0057] In other words, see Figure 1 and Figure 2 The piezoelectric pump 100 according to the embodiment of the present invention is mainly composed of a piezoelectric vibration component 10, a cavity plate 20, a first pressure plate 30, a valve plate 40 and a second pressure plate 50 which are stacked in sequence, wherein a cavity 21 which penetrates along the thickness direction of the cavity plate 20 is provided in the cavity plate 20. The piezoelectric vibration component 10 can vibrate relative to the cavity plate 20 after an electric field is applied. Figure 2 As shown, the valve plate 40 is mainly composed of a plate body 41, a moving part 42 and a supporting part 43. A plurality of hollow parts 44 are provided on the plate body 41, and the plurality of hollow parts 44 can be used for the introduction or export of fluid. The moving parts 42 are provided in the space surrounded by the plurality of hollow parts 44 on the plate body 41. Under the action of pressure, the fluid can push the moving part 42 on the valve plate 40 open to achieve the introduction or export of fluid. The moving part 42 corresponds to the position of the cavity 21, and a supporting part 43 is provided between the moving part 42 and the hollow part 44. By providing the supporting part 43, the moving part 42 can be subjected to more uniform force, and the moving part 42 of the valve plate 40 will not be distorted due to the impact of the liquid in the pump, thereby improving the life of the valve plate 40. In addition, due to the provision of the supporting part 43, the structural strength of the valve plate 40 can be effectively improved, the response time of the valve plate 40 can be reduced, and it is more conducive to the improvement of the performance of the micro pump.

[0058] like Figure 3 and Figure 4 As shown, when the piezoelectric vibration assembly 10 vibrates relative to the cavity plate 20, the moving part 42 can be opened or closed relative to the first pressure plate 30 or the second pressure plate 50, so that the valve plate 40 is configured as a one-way stop valve. The present invention adopts a double-support beam valve plate 40 composed of a plate body 41, a moving part 42 and a supporting part 43, and the moving part 42 and the hollow part 44 are connected by the supporting part 43, which can not only improve the structural strength of the valve plate 40, but also ensure the uniformity of the force on the valve plate 40, prevent the valve plate 40 from being twisted during the vibration process, improve the one-way stop performance and reliability of the valve plate 40, prevent the valve plate 40 from vibration fatigue, and increase the life of the valve plate 40.

[0059] In the present invention, an elliptical hole is opened in the middle of the cavity plate 20 as the cavity 21. The cavity plate 20 can be made of plastic material, for example, PC (polycarbonate), PET (polyethylene terephthalate), PP (polypropylene) and the like. The valve plate 40 can be made of technical material or plastic material.

[0060] Therefore, according to the piezoelectric pump 100 of the embodiment of the present invention, a double-support cross-beam valve plate 40 is formed by a plate body 41, a moving part 42 and a supporting part 43, and the moving part 42 and the hollow part 44 are connected by the supporting part 43, which can not only improve the structural strength of the valve plate 40, but also ensure the uniformity of the force on the valve plate 40, prevent the valve plate 40 from twisting during vibration, improve the unidirectional cut-off property and reliability of the valve plate 40, prevent the valve plate 40 from vibration fatigue, and increase the service life of the valve plate 40.

[0061] According to one embodiment of the present invention, the first pressing plate 30 is provided with a first guide hole 31 and a second guide hole 32, the second pressing plate 50 is provided with a third guide hole 51 and a fourth guide hole 52, the moving part 42 includes a first moving body 421 and a second moving body 422, and the periphery of each moving part 42 is respectively surrounded by a plurality of hollow parts 44, the first moving body 421 corresponds to the first guide hole 31 and the third guide hole 51, and the second moving body 422 corresponds to the second guide hole 32 and the fourth guide hole 52, when the piezoelectric vibration component 10 is away from the cavity plate 20 In the case of side vibration, the first moving body 421 moves toward the first pressure plate 30 to connect the first guide hole 31 and the third guide hole 51, and the second moving body 422 closes the second guide hole 32 to prevent the second guide hole 32 and the fourth guide hole 52 from being conductive; when the piezoelectric vibration component 10 vibrates toward the side toward the cavity plate 20, the second moving body 422 moves toward the second pressure plate 50 to connect the second guide hole 32 and the fourth guide hole 52, and the first moving body 421 closes the third guide hole 51 to prevent the first guide hole 31 and the third guide hole 51 from being conductive.

[0062] That is to say, Figure 1 As shown, the first pressure plate 30 is provided with a first guide hole 31 and a second guide hole 32, and the second pressure plate 50 is provided with a third guide hole 51 and a fourth guide hole 52. The valve plate 40 has two moving parts 42, which are respectively a first moving body 421 and a second moving body 422, and the periphery of each moving part 42 can be respectively surrounded by a plurality of hollow parts 44. Among them, the first moving body 421 of the valve plate 40 corresponds to the first guide hole 31 and the third guide hole 51, respectively, and the second moving body 422 of the valve plate 40 corresponds to the second guide hole 32 and the fourth guide hole 52, respectively.

[0063] like Figure 3As shown, when the piezoelectric vibration component 10 vibrates toward the side away from the cavity plate 20, the first moving body 421 moves toward the first pressure plate 30. At this time, the volume of the cavity 21 in the cavity plate 20 increases, and the pressure in the cavity 21 decreases. The fluid in the cavity 21 pushes the first moving body 421 on the valve plate 40 upward due to the pressure, so that the fluid enters the pump cavity (cavity 21), so that the first guide hole 31 and the third guide hole 51 are connected. The fluid in the cavity 21 will use the water pressure to press the second moving body 422 of the valve plate 40 onto the second guide hole 32 of the first pressure plate 30, and the second moving body 422 closes the second guide hole 32, so that the second guide hole 32 and the fourth guide hole 52 are not connected, so that the fluid in the cavity 21 cannot enter the second guide hole 32, and the fluid can only enter the cavity 21 through the first moving part 42 on the valve plate 40.

[0064] like Figure 4 As shown, when the piezoelectric vibration component 10 vibrates toward the side of the cavity plate 20, the second moving body 422 moves toward the second pressure plate 50, the volume of the cavity 21 in the cavity plate 20 decreases, the pressure in the cavity 21 increases, and the fluid in the cavity 21 vibrates the second moving body 422 on the valve plate 40 downward due to the pressure, so that the fluid enters the pump cavity (cavity 21), and the second guide hole 32 and the fourth guide hole 52 are connected. At the same time, the first moving part 42 on the valve plate 40 will be pressed against the third guide hole 51 on the second pressure plate 50 under the action of water pressure, and the first moving body 421 closes the third guide hole 51, so that the first guide hole 31 and the third guide hole 51 are not connected, thereby ensuring that the fluid in the cavity 21 can only flow out through the second moving body 422 on the valve plate 40, realizing the function of micro pump to transport liquid. Therefore, under the continuous reciprocating motion of the piezoelectric vibration component 10, the fluid can only enter and flow out of the pump cavity through the fifth guide hole 61 of the bottom plate 60, thereby achieving the unidirectional fluidity of the micro pump.

[0065] According to one embodiment of the present invention, Figure 1 , Figure 3 and Figure 4 As shown, the aperture of the first guide hole 31 is larger than that of the second guide hole 32, and the aperture of the third guide hole 51 is smaller than that of the fourth guide hole 52, which effectively ensures that the first moving body 421 and the second moving body 422 can effectively realize the unidirectional cutoff of the piezoelectric pump 100 during the vibration process of the piezoelectric vibration component 10.

[0066] According to one embodiment of the present invention, the orthographic projection area of ​​the first moving body 421 on the second pressure plate 50 covers the third guide hole 51 and is smaller than the first guide hole 31 , and the orthographic projection area of ​​the second moving body 422 on the second pressure plate 50 covers the second guide hole 32 and is smaller than the fourth guide hole 52 .

[0067] In other words, Figure 1 , Figure 3 and Figure 4 As shown, the first pressing plate 30 is an upper pressing plate, and two square holes, one large and one small, are provided on the upper pressing plate to realize the one-way opening and closing of the valve plate 40, wherein the orthographic projection area of ​​the first moving body 421 on the second pressing plate 50 covers the third guide hole 51 and is smaller than the first guide hole 31. The second pressing plate 50 is a lower pressing plate, and two square holes, one large and one small, are provided on the lower pressing plate to realize the one-way opening and closing of the valve plate 40, and the orthographic projection area of ​​the second moving body 422 on the second pressing plate 50 covers the second guide hole 32 and is smaller than the fourth guide hole 52. The large hole on the first pressing plate 30 corresponds to the small hole on the second pressing plate 50, and the small hole on the first pressing plate 30 corresponds to the large hole on the second pressing plate 50.

[0068] like Figure 3 As shown, when the piezoelectric vibration component 10 vibrates toward the side away from the cavity plate 20, the first moving body 421 moves toward the first pressure plate 30. At this time, the volume of the cavity 21 in the cavity plate 20 increases, and the pressure in the cavity 21 decreases. The fluid in the cavity 21 pushes the first moving body 421 on the valve plate 40 upward due to the pressure, so that the fluid enters the pump cavity (cavity 21), so that the first guide hole 31 and the third guide hole 51 are connected. The fluid in the cavity 21 will use the water pressure to press the second moving body 422 of the valve plate 40 onto the second guide hole 32 of the first pressure plate 30, and the second moving body 422 closes the second guide hole 32, so that the second guide hole 32 and the fourth guide hole 52 are not connected, so that the fluid in the cavity 21 cannot enter the second guide hole 32, and the fluid can only enter the cavity 21 through the first moving part 42 on the valve plate 40.

[0069] like Figure 4 As shown, when the piezoelectric vibration component 10 vibrates toward the side of the cavity plate 20, the second moving body 422 moves toward the second pressure plate 50, the volume of the cavity 21 in the cavity plate 20 decreases, the pressure in the cavity 21 increases, and the fluid in the cavity 21 vibrates the second moving body 422 on the valve plate 40 downward due to the pressure, so that the fluid enters the pump cavity (cavity 21), and the second guide hole 32 and the fourth guide hole 52 are connected. At the same time, the first moving part 42 on the valve plate 40 will be pressed against the third guide hole 51 on the second pressure plate 50 under the action of water pressure, and the first moving body 421 closes the third guide hole 51, so that the first guide hole 31 and the third guide hole 51 are not connected, thereby ensuring that the fluid in the cavity 21 can only flow out through the second moving body 422 on the valve plate 40, realizing the function of micro pump to transport liquid. Therefore, under the continuous reciprocating motion of the piezoelectric vibration component 10, the fluid can only enter and flow out of the pump cavity through the fifth guide hole 61 of the bottom plate 60, thereby achieving the unidirectional fluidity of the micro pump.

[0070] According to one embodiment of the present invention, Figure 2As shown, the first moving body 421 and the second moving body 422 have the same structure, and the periphery of each moving part 42 includes four hollow parts 44, and the four hollow parts 44 are arranged in a square shape, wherein two opposite hollow parts 44 are long strip holes, and the other two hollow parts 44 are square holes, and a support part 43 is arranged between the square holes and the long strip holes. The arrangement of the hollow parts 44 can ensure that the fluid can be introduced or exported in the piezoelectric pump 100 through the hollow parts 44, and the one-way cutoff performance of the piezoelectric pump 100 is achieved through the vibration of the first moving body 421 and the second moving body 422.

[0071] According to an embodiment of the present invention, the valve plate 40 is a square structure, and the supporting portion 43 is a supporting rib.

[0072] That is, see Figure 2 The valve plate 40 can adopt a square structure to increase the cross-sectional area of ​​the inlet and outlet and improve the output flow of the piezoelectric micropump. The support portion 43 can be designed as a support rib. The valve plate 40 adopts a double-support beam type valve plate 40 hollow structure in the middle. When the moving part 42 of the valve plate 40 vibrates, the support ribs connect the maximum shape of the moving part 42, and there are two ribs on each side, so that the moving part 42 is more evenly stressed, and the moving part 42 will not be distorted due to the impact of the liquid in the pump, which affects the life of the valve plate 40. And because the support ribs are distributed on both sides of the moving part 42, the structural strength of the valve plate 40 will be improved, the response time of the valve plate 40 will be reduced, and it will be more conducive to the improvement of the performance of the micropump.

[0073] According to one embodiment of the present invention, Figure 1 As shown, the piezoelectric pump 100 further includes a bottom plate 60, which can be made of plastic material, such as PC (polycarbonate), PET (polyethylene terephthalate), PP (polypropylene), etc. A plurality of fifth guide holes 61 (for example, two fifth guide holes 61) are provided on the bottom plate 60, and the bottom plate 60 is provided on the second pressing plate 50, and at least two fifth guide holes 61 correspond to the third guide hole 51 and the fourth guide hole 52, respectively, so as to realize the introduction or export of the fluid in the piezoelectric pump 100.

[0074] According to an embodiment of the present invention, the piezoelectric vibration component 10 includes: a piezoelectric element 11, a vibration plate 12 and a vibration membrane 13 which are sequentially stacked, and the piezoelectric element 11, the vibration plate 12 and the vibration membrane 13 are sequentially bonded and connected.

[0075] In other words, see Figure 1The piezoelectric vibration component 10 is mainly composed of a piezoelectric element 11, a vibration plate 12 and a vibration membrane 13 which are stacked in sequence, wherein the vibration plate 12 is made of metal material to improve the performance of the piezoelectric ceramic. The vibration membrane 13 is made of plastic material, such as PC, PET, PP, etc. The piezoelectric element 11, the vibration plate 12 and the vibration membrane 13 are bonded and connected in sequence. In the present invention, the piezoelectric element 11 is a square ceramic sheet, which is bonded to the vibration plate 12 to form a piezoelectric vibrator, thereby improving the sealing of the piezoelectric vibration component 10.

[0076] According to one embodiment of the present invention, Figure 1 As shown, an adhesive film 14 is provided between the vibration membrane 13 and the vibration plate 12. The adhesive film 14 can be waterproof sealant, UV anaerobic adhesive, low-temperature structural adhesive, etc. After the valve body is laminated and bonded, the layers are melted into one piece around the side of the valve body by laser welding process, which can ensure the sealing of the valve body and enhance the structural strength of the valve body.

[0077] In summary, the piezoelectric pump 100 according to the embodiment of the present invention adopts a double-support cross-beam valve plate 40 composed of a plate body 41, a moving part 42 and a supporting part 43, and the moving part 42 and the hollow part 44 are connected by the supporting part 43, which can not only improve the structural strength of the valve plate 40, but also ensure the uniformity of the force on the valve plate 40, prevent the valve plate 40 from twisting during vibration, improve the unidirectional cut-off property and reliability of the valve plate 40, prevent the valve plate 40 from vibration fatigue, and increase the life of the valve plate 40.

[0078] Of course, for those skilled in the art, other structures and working principles of the piezoelectric pump 100 are understandable and achievable, and will not be described in detail in the present invention.

[0079] According to a second aspect of the present invention, Figure 1 As shown, a method for preparing a piezoelectric pump 100 is provided, which is used to prepare the piezoelectric pump 100 in the above embodiment, and the preparation method comprises:

[0080] S1, a plurality of hollow portions 44 are provided on the sheet body 41 and penetrate the sheet body 41 in the thickness direction thereof;

[0081] S2. A moving part 42 is provided in a space enclosed by a plurality of hollow parts 44 on the sheet body 41;

[0082] S3. A supporting portion 43 is provided between the moving portion 42 and the hollow portion 44 .

[0083] That is to say, Figure 1As shown, the preparation method of the piezoelectric pump 100 of the present invention is mainly used to prepare the piezoelectric pump 100 in the above-mentioned embodiment. In the preparation method, first, a plurality of hollow parts 44 that penetrate along the thickness direction can be set on the sheet body 41, and the plurality of hollow parts 44 can be used for the introduction or export of fluid. Then, a moving part 42 can be set in the space surrounded by the plurality of hollow parts 44 on the sheet body 41, and the fluid can push the moving part 42 on the valve sheet 40 under the action of pressure to achieve the introduction or export of fluid. A support part 43 is set between the moving part 42 and the hollow part 44. By setting the support part 43, the moving part 42 can be more evenly stressed, and the moving part 42 of the valve sheet 40 will not be distorted due to the impact of the liquid in the pump, thereby improving the life of the valve sheet 40. And due to the setting of the support part 43, the structural strength of the valve sheet 40 can be effectively improved, the response time of the valve sheet 40 can be reduced, and it is more conducive to the improvement of the performance of the micro pump.

[0084] According to one embodiment of the present invention, the preparation method of the present invention further comprises:

[0085] The piezoelectric vibration component 10, the cavity plate 20, the first pressing plate 30, the valve plate 40 and the second pressing plate 50 are glued and connected in sequence;

[0086] Laser welding is performed on each side of the valve body formed by bonding the cavity plate 20 , the first pressing plate 30 , the valve sheet 40 and the second pressing plate 50 to form the piezoelectric pump 100 .

[0087] In other words, see Figure 1 , the preparation method of the piezoelectric pump 100 according to the embodiment of the present invention is used to prepare the piezoelectric pump 100 in the above embodiment. In the preparation method of the piezoelectric pump 100 of the present invention, first, the piezoelectric vibration component 10, the cavity plate 20, the first pressing plate 30, the valve plate 40 and the second pressing plate 50 can be glued and connected in sequence. Then, laser welding is performed on each side of the valve body formed after the cavity plate 20, the first pressing plate 30, the valve plate 40 and the second pressing plate 50 are bonded to form the piezoelectric pump 100. The present invention melts and welds the cavity plate 20, the first pressing plate 30, the valve plate 40 and the second pressing plate 50 into a whole. The welding form can be spot welding or line welding, so as to further ensure the strength of the valve body.

[0088] According to one embodiment of the present invention, Figure 1As shown, the preparation method of the piezoelectric pump 100 also includes: bonding the bottom plate 60 to the second pressing plate 50, and bonding the cavity plate 20, the first pressing plate 30, the valve plate 40, the second pressing plate 50 and the bottom plate 60 with a film 14. The connection between the piezoelectric vibrator and the valve body adopts a film 14 bonding process, and the film 14 can be a high-viscosity backing adhesive, UV anaerobic adhesive, low-temperature structural adhesive, etc. After the valve body is laminated and bonded, the layers are melted into one by a laser welding process around the side of the valve body, which can not only ensure the sealing of the valve body, but also enhance the structural strength of the valve body.

[0089] In summary, according to the method for preparing the piezoelectric pump 100 of the embodiment of the present invention, the connection between the piezoelectric vibrator and the valve body adopts the adhesive film 14 bonding process, and the adhesive film 14 can be a high-viscosity adhesive, UV anaerobic adhesive, low-temperature structural adhesive, etc. After the valve body is laminated and bonded, the layers are melted into one by laser welding around the side of the valve body, which can ensure the sealing of the valve body and enhance the structural strength of the valve body.

[0090] Although some specific embodiments of the present invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A piezoelectric pump (100), characterized in that: The invention comprises a valve plate (40), wherein the valve plate (40) comprises: a plate body (41), a moving part (42) and a supporting part (43); a plurality of hollow parts (44) are provided on the plate body (41); the moving part (42) is provided in a space enclosed by the plurality of hollow parts (44) on the plate body (41); and the supporting part (43) is provided between the moving part (42) and the hollow parts (44).

2. The piezoelectric pump (100) according to claim 1, characterized in that: The plate body (41), the moving part (42) and the supporting part (43) configure the valve plate (40) into a double-support cross-beam structure.

3. The piezoelectric pump (100) according to claim 1, characterized in that: The valve plate (40) has at least two moving parts (42), and each moving part (42) has the same structure.

4. The piezoelectric pump (100) according to claim 1, characterized in that: The periphery of each of the moving parts (42) comprises a plurality of hollow parts (44), the plurality of hollow parts (44) are arranged in a square shape, and the support part (43) is provided between two adjacent hollow parts (44).

5. The piezoelectric pump (100) according to claim 1, characterized in that: It also comprises a piezoelectric vibration component (10), a cavity plate (20), a first pressing plate (30) and a second pressing plate (50) which are sequentially stacked, the valve plate (40) being arranged between the first pressing plate (30) and the second pressing plate (50), the cavity plate (20) being provided with a cavity (21) penetrating along the thickness direction thereof, and the piezoelectric vibration component (10) being vibrable relative to the cavity plate (20); When the piezoelectric vibration component (10) vibrates relative to the cavity plate (20), the moving part (42) can be opened or closed relative to the first pressure plate (30) or the second pressure plate (50) to configure the valve plate (40) into a one-way stop valve.

6. The piezoelectric pump (100) according to claim 5, characterized in that: The first pressing plate (30) is provided with a first guide hole (31) and a second guide hole (32), the second pressing plate (50) is provided with a third guide hole (51) and a fourth guide hole (52), the moving part (42) comprises a first moving body (421) and a second moving body (422), the first moving body (421) corresponds to the first guide hole (31) and the third guide hole (51) respectively, the second moving body (422) corresponds to the second guide hole (32) and the fourth guide hole (52) respectively, when the piezoelectric vibration component (10) vibrates toward the side away from the cavity plate (20), the first moving body (421) moves toward the first pressing plate (30) to make the first guide hole (31) and the third guide hole (51) communicate, and the second moving body (422) closes the second guide hole (32) to make the second guide hole (32) and the fourth guide hole (52) not conduct; When the piezoelectric vibration component (10) vibrates toward the side of the cavity plate (20), the second moving body (422) moves toward the second pressure plate (50) to connect the second guide hole (32) and the fourth guide hole (52), and the first moving body (421) closes the third guide hole (51) to prevent the first guide hole (31) and the third guide hole (51) from being conductive.

7. The piezoelectric pump (100) according to claim 6, characterized in that: The aperture of the first guide hole (31) is larger than the aperture of the second guide hole (32), and the aperture of the third guide hole (51) is smaller than the aperture of the fourth guide hole (52).

8. The piezoelectric pump (100) according to claim 6, characterized in that: The orthographic projection area of ​​the first moving body (421) on the second pressing plate (50) covers the third guide hole (51) and is smaller than the first guide hole (31); the orthographic projection area of ​​the second moving body (422) on the second pressing plate (50) covers the second guide hole (32) and is smaller than the fourth guide hole (52).

9. The piezoelectric pump (100) according to claim 6, characterized in that: The invention also comprises a bottom plate (60) on which a plurality of fifth guide holes (61) are provided. The bottom plate (60) is arranged on the second pressing plate (50), and at least two of the fifth guide holes (61) correspond to the third guide hole (51) and the fourth guide hole (52), respectively.

10. The piezoelectric pump (100) according to claim 5, characterized in that: The piezoelectric vibration component (10) comprises: a piezoelectric element (11), a vibration plate and a vibration membrane (13) which are stacked in sequence, and the piezoelectric element (11), the vibration plate and the vibration membrane (13) are adhesively connected in sequence.

11. The piezoelectric pump (100) according to claim 10, characterized in that: An adhesive film (14) is provided between the vibration film (13) and the vibration plate.

12. A method for preparing a piezoelectric pump (100), for preparing the piezoelectric pump (100) according to any one of claims 1 to 11, characterized in that: The preparation method comprises: A plurality of hollow portions (44) are provided on the sheet body (41) and penetrate the sheet body along the thickness direction thereof; A moving part (42) is arranged in the space enclosed by the plurality of hollow parts (44) on the sheet body (41); A supporting portion (43) is provided between the moving portion (42) and the hollow portion (44).

13. The method for preparing the piezoelectric pump (100) according to claim 12, characterized in that: Also includes: The piezoelectric vibration component (10), the cavity plate (20), the first pressing plate (30), the valve plate (40) and the second pressing plate (50) are sequentially glued and connected; Laser welding is performed on each side of a valve body formed by bonding the cavity plate (20), the first pressure plate (30), the valve sheet (40) and the second pressure plate (50) to form the piezoelectric pump (100).

14. The method for preparing the piezoelectric pump (100) according to claim 12, characterized in that: Also includes: The bottom plate (60) is bonded to the second pressure plate (50), and the cavity plate (20), the first pressure plate (30), the valve plate (40), the second pressure plate (50) and the bottom plate (60) are bonded by using an adhesive film (14).

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