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551 results about "Piezoelectric pump" patented technology

Electronic vaporiser system

An electronic cigarette vaporiser system including a vaporiser and a single piezo-electric pump that both withdraws liquid from a cartridge and also pumps controlled amounts of liquid into a reservoir in the vaporizer. The piezo-pump can be in a case that enables the vapouriser to be stored, and the cartridge is attached to or inserted into the case. The case both re-fills the vapouriser with liquid and re-charges a battery in the vapouriser.
Owner:AYR LTD

Piezoelectric pump and blood-pressure-information measurement device provided therewith

A piezoelectric pump (100A) is provided with the following: an actuator (130) containing a piezoelectric element (134) and a vibrating sheet (131); a first diaphragm (140), positioned opposite the actuator (130), with a first connecting hole (141) provided therein; a pump chamber (192) comprising the space between the actuator (130) and the first diaphragm (140); and a second diaphragm (150) positioned opposite the first diaphragm (140). The part of the second diaphragm (150) opposite the first connecting hole (141) is provided with an opposing wall part (151) that prevents a fluid that has been introduced into the pump chamber (192) via the first connecting hole (141) from flowing back towards an intake side via the first connecting hole (141).
Owner:OMRON HEALTHCARE CO LTD

Piezoelectric pump, cooling device, and electronic apparatus

Disclosed is a piezoelectric pump. The piezoelectric pump includes a pump body, a drive unit, a detection section, and a control unit. The pump body includes a hole for introducing a fluid from outside thereinto and jetting the fluid from inside, a wall portion disposed so as to face the hole, and a piezoelectric body provided on the wall portion to vibrate the wall portion. The drive unit drives the piezoelectric body. The detection section detects a signal corresponding to a discharge rate of the fluid from the hole. The control unit controls a drive voltage and a drive frequency of the drive unit on the basis of the signal.
Owner:SONY CORP

Series-parallel hybrid-driven piezoelectric pump

The invention relates to a series-parallel hybrid-driven piezoelectric pump, and belongs to the fields of fluid transmission and control. Upper and lower pump bodies are connected through screws; 2 to 20 piezoelectric vibrators are connected between pump cavities of the two pump bodies in a pressed mode; valve sheets are adhered to the pump cavities of the upper and lower pump bodies and the inlets of valve cavities; the inlet of the upper pump body and the adjacent pump cavity, two adjacent pump cavities, and the valve cavities and the adjacent pump cavities are communicated through inter-cavity flow channels; the valve cavities are communicated with outlets; a series pump I is formed by the pump cavities and the piezoelectric vibrators; the inlet of the lower pump body and the adjacent pump cavity, two adjacent pump cavities, and the valve cavities and the adjacent pump cavities are communicated through inter-cavity flow channels; a series pump II is formed by the pump cavities and the piezoelectric vibrators; the inlets of the series pumps I and II are communicated; and the valve cavities of the series pumps I and II are communicated and communicated with the outlet on the upper valve body. The pump has the advantages that a series-parallel pump is formed by a plurality of piezoelectric vibrators of which the two sides drive fluid simultaneously, so that the pump is high in flow, pressure and energy efficiency, low in pulsation and suitable for constructing a piezoelectric hydraulic driver with high system back pressure.
Owner:ZHEJIANG NORMAL UNIVERSITY

Remotely Activated Piezoelectric Pump for Delivery of Biological Agents to the Intervertebral Disc and Spine

ActiveUS20110092948A1Without significant loss of power efficiencyHighly miniaturized devicesBone implantMedical devicesMathematical modelBone fusion
The present disclosure describes a remotely activated piezoelectric pump for delivery of biological agents to the intervertebral disc and spine in order to achieve spinal fusion. A spinal pump is implanted on the vertebrae of a patient and a spinal cage is inserted in between two adjacent vertebrae after removal of the vertebrae disc. A piezoelectric motor drives the pump and pushes osteogenetic agent through the spinal cage and into a sponge disposed within the cage. The pump is charged by an external removable induction belt worn by the patient. Delivery duration and delivery frequency may be changed before implantation of the spine pump according to the specific needs of the patient. The current device employs a mathematical model that enables the regulation as well as attenuation of the bone fusion process by extending and generalizing the model to enhance and optimize the delivery of osteogenetic agent in a regulated manner.
Owner:COGNOS THERAPEUTICS INC

Piezoelectric oscillator active valve type piezoelectric pump

The present invention relates to a piezoelectric vibrator active valve type piezoelectric pump which belongs to micro electromechanical liquid field. The invention uses three piezoelectric vibrators, the pump body has a water intake and a water discharging port that respectively connected with the pump chamber, a top press cover, the pump body and a lower press cover are interconnected, an inlet valve and an outlet valve drive the edge of piezoelectric vibrator connect with the pump body by a flexible material sealing ring, a valve port flexible ring is fixed on the periphery of the valve port, the pump chamber drives the drive the edge of piezoelectric vibrator connect with the pump body by a flexible material sealing ring. The advantages of the pump are that it can change the mode that the inlet and outlet valves of conventional piezoelectric pump is passive in opening and closing, and it adopts active mode to control the opening and closing of the piezoelectric pump valves, reduces the lag performance for the opening and closing of the pump valves, thereby improves and advances the output property for the piezoelectric pump, and realizes the change for the pumping direction by adjusting the phase of the control signals.
Owner:JILIN UNIV

Piezoelectric stack pump provided with sensor

The invention relates to a piezoelectric stack pump provided with a sensor, and belongs to the field of application of microfluid transmission and control. A piezoelectric stack used for driving and a piezoelectric sensor used for measuring are installed inside a pump body; one end of the pump body is provided with a tightening bolt; the piezoelectric sensor and the piezoelectric stack are pressed on an ejector block by the tightening bolt through an anti-twist baffle piece; the ejector block is connected with the diaphragm of a pump cavity and a piston through bolts; an inlet valve and an outlet valve are arranged on a pump cover; and the piezoelectric sensor and the piezoelectric stack are respectively connected with a control power supply through guide lines. In the piezoelectric stack pump, the built-in piezoelectric pressure sensor is used for detecting deformation information of the piezoelectric stack and transforming the deformation information into pump flow and pressure, the on-line monitoring on the output performance of the piezoelectric pump can be realized without other pressure / flow measurement instruments, and accurate output flow and pressure can be easily obtained.
Owner:ZHEJIANG NORMAL UNIVERSITY

Fluid control apparatus and method for adjusting fluid control apparatus

In a method for adjusting a fluid control apparatus, in a pressing step, a piezoelectric pump is placed on a stage with a cover plate facing upward, the stage is moved up, and a center portion of a principal surface of the cover plate on a side opposite to a diaphragm is pressed with a pressing pin. As a result, the cover plate and the base plate are shaped so as to warp convexly toward the diaphragm side, and a portion joined to a flexible plate is pulled, such that the flexible plate is caused to warp convexly toward the diaphragm side. Thus, residual tensile stress occurs in a movable portion of the flexible plate. Therefore, due to the residual tensile stress, the tensile stress of the movable portion of the flexible plate is increased.
Owner:MURATA MFG CO LTD

Miniature fluid cooling system and miniature fluid driving device

The invention provides a micro liquid cooling system, comprising a heat absorber, a heat radiator and a plurality of transferring tubes, a micro liquid drop generator and a piezoelectric pump furthermore. Transferring tubes connects the heat absorber, the heat radiator, the micro liquid drop generator and the piezoelectric pump into one loop having coolant fluid filled therein. The coolant fluid circulates in the loop under commonly driving of the micro liquid drop generator and the piezoelectric pump. The micro cooling system can be used in electronic devices with relatively small internal space and has great cooling performance when cooling electronic elements.
Owner:FU ZHUN PRECISION IND SHENZHEN +1

Driving-sensing integral piezoelectric chip pump

The invention relates to a driving-sensing integral piezoelectric chip pump which comprises at least one wafer type piezoelectric vibrator formed by connecting a piezoelectric chip with a metal substrate are spliced, a pump body, a pump cover, a group of check valves for controlling the flow direction and a control power source. The driving-sensing integral piezoelectric chip pump provided by theinvention is characterized in that an electrode at the surface of the piezoelectric chip in the piezoelectric vibrator is divided into a drive unit and a sensing unit, when the drive unit is subjected to bending deflection caused by external voltages, the piezoelectric ceramics of the sensing unit is also subjected to bending deflection and generates electric energy, and a voltage signal generated by the sensing unit is subjected to conversion processing so as to be used for representing the output pressure and flow of the piezoelectric pump. The driving-sensing integral piezoelectric chip pump provided by the invention has the advantages that the two functions of driving and sensing monitoring are realized by use of the same wafer type piezoelectric vibrator, the online monitoring on theoutput performance of the piezoelectric pump can be realized without extra pressure and flow measurement devices, the accurate output flow and pressure are easy to obtain.
Owner:ZHEJIANG NORMAL UNIVERSITY +2

Drag-reducing valveless piezoelectric pump with drag-reducing fluids

The invention discloses a drag-reducing valveless piezoelectric pump with drag-reducing fluids. The drag-reducing valveless piezoelectric pump comprises a side wall of a pump body, an upper pump cover and a pump base which define a pump cavity, wherein a piezoelectric vibrator is arranged in the pump cavity; a first direct flow pipe and a second direct flow pipe are arranged on the side wall of the pump body and are communicated with the pump cavity and the outside; and the at least one drag-reducing fluid is arranged on the pump base. In general, the piezoelectric vibrator is parallel to the pump base and divides the pump cavity into two independent units, and the number of the drag-reducing fluids is determined according to the size of the pump base. The drag-reducing valveless piezoelectric pump with the drag-reducing fluids has a large output quantity and an adjustable flow rate, can be used for realizing tiny flow output and large flow output, and has a function of pumping the mixed fluids besides a function of pumping a single fluid of the conventional valveless piezoelectric pump, so that the application range of the valveless piezoelectric pump is broadened.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Valve-free piezoelectric pump of logarithmic spiral combined tube

The invention discloses a valve-free piezoelectric pump of a logarithmic spiral combined tube in the field of microfluid transmission and control, comprising a pump body, a pump cover and a piezoelectric vibrator, wherein the pump body is provided with an inlet flow pipe, an outlet flow pipe and a pump cavity; the inlet flow pipe and the outlet flow pipe have the same structure, are coaxially arranged, have the equal distance with the circle center of the pump cavity and comprise confluence taper tubes and two shunt logarithmic spiral tube communicated with the large ends of the confluence taper tubes respectively; the included angle of center lines of the two shunt logarithmic spiral tubes is 120 degrees; the center lines of the two shunt logarithmic spiral tube are symmetrical to the center lines of the confluence taper tubes; and the contour lines of the shunt logarithmic spiral tube are two adjacent logarithmic spiral lines with a wrap angle of 45 degrees, which are determined by the logarithmic spiral equation of rho=rho0*ek theta. The valve-free piezoelectric pump has small size and high flow resistance coefficient ratio; the flow vortex in the pump is extremely small and has no damage to the transported medium; compared with the valve-free piezoelectric with other structure, the unidirectional flow resistivity is reduced greatly, so that the energy consumption is low and the energy-saving effect is remarkable; and the valve pressure free electric pump has simple structure and controls the flow rate more easily.
Owner:JIANGSU UNIV

Piezoelectric Pump

A piezoelectric pump having a first opening in a center portion of a pump body, and a second opening apart from the center. An outer peripheral portion of a metal diaphragm is fixed to the pump body, and a piezoelectric element having a size that covers the first opening and does not cover the second opening is bonded to a back center portion of the diaphragm. By applying a voltage near the resonance frequency to the piezoelectric element, a portion of the diaphragm opposing the first opening and a portion of the diaphragm opposing the second opening are bent in opposite directions so that fluid is drawn in from one of the first opening and the second opening and is discharged from the other opening. Such a piezoelectric pump can increase the discharging pressure, and can reliably discharge the fluid even under a condition where the pressure on the discharging side is high.
Owner:MURATA MFG CO LTD

High flow piezoelectric pump

The present invention relates to a high flow piezoelectric pump. A piezoelectric pump for pumping a fluid at a high flow rate includes a housing and an actuator located within the housing. An electric voltage applied to the actuator causes the actuator to apply a force to a first diaphragm that is proximate to the actuator. A piston assembly is located within the housing and is moveable between at least a first position and a second position. A first fluid chamber is defined by the housing, the first diaphragm, and the piston assembly. A coupling fluid is located within the first fluid chamber for coupling the first diaphragm to the piston assembly. A second fluid chamber is defined by the housing and the piston assembly. An inlet valve is in communication with the second fluid chamber and an outlet valve is in communication with the second fluid chamber.
Owner:GM GLOBAL TECH OPERATIONS LLC

Piezoelectric hydraulic linear motor

The invention relates to a piezoelectric hydraulic linear motor which pertains to the field of mechanical-electrical-hydraulic integration. An inlet of a piezoelectric pump is connected with an accumulator by a pipeline; the accumulator is also connected with a reversing valve by the pipeline; the reversing valve is connected with an outlet of the piezoelectric pump by the pipeline; the reversing valve is also connected with a cavity body of a hydraulic cylinder. The piezoelectric hydraulic linear motor has the advantages of novel structure, being capable of effectively converting the micro-amplitude reciprocating vibration of piezoelectric ceramic to the micro liner motion of a piston of the hydraulic cylinder by utilizing fluid media to transmit power, obtaining relatively large driving power and motion displacement and realizing precise driving and control by a method of accumulating a liquid drop for one time; meanwhile, the piezoelectric hydraulic motor has simple structure and control, small volume and good sealing property and can be applied to marking parts.
Owner:JILIN UNIV

Negative pressure wound therapy device

A housing of a pump unit is fixed to a drape of a wound dressing by a joint portion. A suction chamber that is brought into a negative pressure by driving of a piezoelectric pump directly communicates with a closed space through an opening and an inlet. Hence, a therapy device does not need to include a pipe that allows the closed space and the pump unit to communicate with each other. Therefore, since the therapy device does not need to include the pipe that allows the pump unit to communicate with the closed space, detachment of the pump unit from the wound dressing owing to coming-off of the pipe is avoided. Since the housing is fixed to the drape by the joint portion, the pump unit can be prevented from detaching from the wound dressing.
Owner:MURATA MFG CO LTD

Wiring structure of vibrator, and piezoelectric pump

The invention relates a wiring structure of a vibrator and a piezoelectric pump. On the basis of the recognition that it is difficult to obtain sufficient reliability of connecting parts with a conductive adhesive material only while attention is paid to using the conductive adhesive material instead of soldering, a wiring structure is obtained in which a connecting terminal and a film-like electrode are adhered to each other by a conductive adhesive material, and a pressing member which applies a force in a direction in which the connecting terminal is pressed against the film-like electrode is caused to abut on the connecting terminal.
Owner:ALPS ALPINE CO LTD

Implantable Pump System

InactiveUS20090312785A1Facilitating obesity controlRealize automatic adjustmentSurgeryDilatorsGastric bandEngineering
A remotely adjustable gastric band system is provided. The system includes a gastric band, an implantable fluid reservoir, and a fluid handling device including a piezoelectric pump, and a drive or controller assembly. The piezoelectric pump includes a diaphragm having a compressible spring positioned at an actuator side of the diaphragm, and a space occupying layer disposed between the compressible spring and the actuator side.
Owner:APOLLO ENDOSURGERY INC

Cooling device and heating and colling apparatus

An analyzing device includes a heating device, a cooling device, and a controller. The cooling device includes a piezoelectric pump, a check valve, an exhaust valve, and an air tank. The analyzing device heats a subject by the heating device. The cooling device drives the piezoelectric pump while the heating device heating the subject. With this, the outside air is sucked through a suction port and the air that is discharged from the piezoelectric pump is accommodated in the air tank through the check valve. Then, the pressure in the air tank is increased. Thereafter, the cooling device stops driving of the piezoelectric pump. With this, the air in the air tank is discharged toward the subject via the exhaust valve so as to cool the subject.
Owner:MURATA MFG CO LTD

Non-resonant self-adaptive reversible micro piezoelectric pump device

The invention relates to a non-resonant self-adaptive reversible micro piezoelectric pump device, and belongs to the field of fluid transmission and control. A self-adaptive piezoelectric pump is composed of an upper cover, a pump body, a lower cover, a sealing ring and piezoelectric vibrators as a whole, wherein the three piezoelectric vibrators are connected and sealed with the sealing ring through bolts, and flow channels in the two sides communicate with a middle pump cavity through valve seats at the two sides; and a sensing unit with a small area and a drive unit with a large area are divided on a surface electrode of piezoelectric ceramic by the piezoelectric vibrators through an electrode division method. The non-resonant self-adaptive reversible micro piezoelectric pump device hasthe following characteristics and advantages: the drive voltages and frequency of the piezoelectric vibrators of a power part are changed through monitoring the working states of the piezoelectric vibrators, so that self-adaptive accurate control for an output flow can be realized, and high integration level / output accuracy is achieved; and the opening degree of a drive valve part is monitored, and each cycle period only contains a suction process and an exhaust process, so that the phenomenon of fluid backflow is avoided, and the non-resonant self-adaptive reversible micro piezoelectric pumpdevice is stable in outflow, small in pulsation and high in energy conversion efficiency due to the non-resonant characteristic.
Owner:ZHEJIANG NORMAL UNIVERSITY

Drive Circuit for Piezoelectric Pump and Cooling System That Uses This Drive Circuit

A drive circuit of a piezoelectric pump that is both light and compact, that can drive a piezoelectric pump with a low level of undesired noise, and that can further realize with low power consumption a coolant device capable of reliable operation at the time of activation. A piezoelectric element of the piezoelectric pump is driven by the output signal of an amplifier that takes as input a signal that is generated by a sine wave oscillator of the same frequency that drives the piezoelectric element. The amplifier is driven by a high voltage obtained by conversion from a low-voltage power supply by a voltage-boosting converter, whereby the piezoelectric element is driven by a low-frequency sine wave of high voltage. The frequency of the sine wave oscillation is further adjusted by a signal from a first control circuit at the time of activation. In addition, the amplitude of the sine wave oscillation is adjusted by the output signal of a second control circuit that takes as input a signal from temperature sensor for sensing the temperature of the heat-generating body.
Owner:NEC CORP

Cantilever-type piezoelectric diaphragm pump

The invention discloses a cantilever-type piezoelectric diaphragm pump. The cantilever-type piezoelectric diaphragm pump is composed of a vibration excitation unit, a pump cavity body and a flow channel structure. The vibration excitation unit is composed of a pump body, an adjustable pressing mechanism, a piezoelectric vibrator, a vibration transmission piston and a PET diaphragm. The piezoelectric vibrator is composed of a copper substrate and a piezoelectric ceramic piece. Compared with the traditional method of periphery fixing or wave joint supporting of a circular oscillator, the method of cantilever supporting of the rectangular piezoelectric vibrator has the advantages that deflection is large, tail end output amplitude is large, and simple harmonic frequency is low. Meanwhile, the length of a cantilever of the rectangular piezoelectric vibrator is adjustable, and therefore a vibration system has different vibration characteristics so as to meet different requirements for output performance. The adopted PET diaphragm material has the advantages of being good in abrasive resistance, dimensional stability and electrical insulation, nontoxic, impermeable, light in weight and the like, and further has the advantages of being safe and reliable, free of pollution and the like as a pump cavity vibrating diaphragm for conveying chemical and medical liquid. The piezoelectric vibrator is not contacted with the conveyed liquid directly, and therefore the piezoelectric pump can work at high working voltage and is good in output performance.
Owner:JILIN UNIV

Piezoelectric Pump and Stirling Refrigerator/Freezer

A piezoelectric pump includes a casing formed of a plurality of metallic members welded and thus joined together, a piezoelectric element dividing an internal space of the casing into a working space and a back pressure space, and internal components formed of resin, and provided between the casing and the piezoelectric element and holding the piezoelectric element. The internal components are formed of workable and moldable resin. The internal component defines a perimeter of the working space and the internal component defines a perimeter of the back pressure space. The internal components are arranged opposite each other to form a recess therebetween to receive and thus hold the piezoelectric element therein.
Owner:SHARP KK

Piezoelectric pump and operating method thereof

ActiveUS20160377072A1Suppressing back flow of fluidEnhancing fluid transmission efficiencyPositive displacement pump componentsFlexible member pumpsEngineeringVALVE PORT
A piezoelectric pump includes a piezoelectric element, a vibrating piece, a valve and a flow guiding member. The vibrating piece has a central zone attached to the piezoelectric element, a peripheral zone, a first recess, a stopper and a position limiting wall both protruding from the first recess, and a through groove disposed between the central zone and the peripheral zone and connected through the first recess. The valve is attached to the peripheral zone and has a non-straight through slit. The flow guiding member is attached to the valve and has a second recess and a channel both recessed in the flow guiding member, and a through hole. The channel is connected through the second recess and the through hole. A projection of the second recess projected on the plane which the valve exists covers the non-straight through slit. An operating method of a piezoelectric pump is further provided.
Owner:KOGE MICRO TECH CO LTD

Diaphragm pump and cooling system with the diaphragm pump

A diaphragm pump enabling an increase in pump efficiency by reducing the pressure loss of liquid and reduction in thickness. The flow passage in piezoelectric pump (1) includes a pressure chamber (50) formed into a flat shape in cross section and a suction side flow passage (70a) and discharge side flow passage (70b). The suction side flow passage (70a) and the discharge side flow passage (70b) are disposed at both ends of the pressure chamber (50) so that the axes thereof are aligned with each other. The check valves (20a, 20b) are respectively disposed on the suction side flow passage (70a) and the discharge side flow passage (70b), and are tilted relative to the flow direction of the liquid.
Owner:NEC CORP

Integrated precise medicine transportation pump

The invention relates to an integrated precise medicine feeding pump, belonging to the medicine feeding pump. Wherein, the inner space of case is mounted with a multi-vibrator piezoelectric pump, whose inlet channel is connected to a porous medicine guide tube; the flexible medicine chamber storage via the flexible medicine chamber is connected to the inlet of pump and inside the case; and said porous medicine guide tube is inside said flexible medicine chamber. The invention has the advantages that: it uses multi-chamber or single chamber multi-vibrator piezoelectric pump to improve the output pressure and flux to make the pressure is higher than the needed pressure in working to confirm the coherence of medicine filling, realize the accurate control and improve the operation safety.
Owner:JILIN UNIV

Self-sensing piezoelectric diaphragm pump

The invention relates to a self-sensing piezoelectric diaphragm pump which at least comprises a compound sheet type piezoelectric vibrator, a pump body, a pump cover, one set of one-way valves of controlling the fluid moving direction, and a control power supply. The self-sensing piezoelectric diaphragm pump is characterized in that the compound sheet type piezoelectric vibrator is formed by sequentially adhering a PZT (Piezoelectric Transducer) piezoelectric wafer (used as a driver), a metal substrate and a PVDF (Polyvinylidene Fluoride) piezoelectric film (used as a sensor), wherein the piezoelectric driver and the piezoelectric sensor are respectively connected with a control power supply through leads, when the piezoelectric driver is bent for deformation under the action of an external voltage, the piezoelectric sensor is bent for deformation and generates electric energy, a voltage signal generated by the electric energy is properly converted and processed and then is used for characterizing output pressure and flow of the piezoelectric pump. The invention has the advantages that two functions of driving and sensing monitoring are realized by using the compound sheet type piezoelectric vibrator, and the output performance of the piezoelectric pump can be monitored in real time without other pressure and flow measurer apparatuses.
Owner:ZHEJIANG NORMAL UNIVERSITY

Resonance drive type piezoelectric pump

The invention discloses a novel piezoelectric pump, wherein a piezoelectric vibrator 3 is used as a drive force source, and forms a resonance system together with a resonance amplification mechanism 4, a resonance transmission mechanism 5, a fluid drive mechanism 7, a driven fluid and the like. Under an external alternating voltage, the deformation of the piezoelectric vibrator 3 acts on the driven fluid after being amplified through the resonance of the system, therefore, the one-way transmission of the fluid is realized. The piezoelectric vibrator 3 can adopt a general dual-wafer bending vibrator structure or single-wafer bending vibrator structure (seen in a picture 2), and can also adopt a single-wafer vibrator, dual-wafer vibrator parallel-connection or serial-connection combined structure.
Owner:JILIN UNIV

Micromechanical piezoelectric jet gyroscope

The invention relates to a micromechanical piezoelectric jet gyroscope, which belongs to a micromachining technology manufactured gyroscope generating jet flow by a piezoelectric pump, and is used for the stable system of robots, helmets, cameras and other micro-carriers. The jet gyroscope provided by the invention is composed of a sensitive element, a base, a shell, a signal processing circuit, insulators and gaskets. The power supply and signal are led out through wiring of the glass filled insulators on the base. The sensitive element comprises a piezoelectric ceramic micropump, a jet cavity and Pt film thermistors, and is formed by bonding of an upper silicon plate and a lower silicon plate. The upper silicon plate is provided with a vibrating diaphragm, a pump chamber, the jet cavity and the Pt film thermistors, and the lower silicon plate has a structure symmetric with the upper silicon plate but has no Pt film thermistor. The lower silicon plate is coated with an electrode and is bonded with the upper silicon plate to form the airtight jet cavity. The signal processing circuit consists of a piezoelectric pump drive circuit, a bridge circuit, an amplification circuit, a filter circuit and a compensation circuit.
Owner:BEIJING INFORMATION SCI & TECH UNIV
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