The invention relates to a piezoelectric
wafer pump, and belongs to the technical field of piezoelectric pumps, the piezoelectric
wafer pump comprises a piezoelectric
actuator and a plurality of groups of double-cavity diaphragm pumps driven by the piezoelectric
actuator, the piezoelectric
actuator comprises a
comb finger type
resonator, a bolt connector and a screw connector, the
comb finger type
resonator comprises a cross beam and a plurality of driving arms distributed on the top surface of the cross beam at equal intervals, the bolt connector is arranged on the driving arm located on the outermost side, and the screw connector is arranged on the driving arm located on the inner side. The double-cavity
diaphragm pump is positioned between two adjacent driving arms and is suspended above the top surface of the cross beam; piezoelectric patches are horizontally arranged on the top face and the bottom face of the cross beam and the bottom ends of the two side faces of the driving arm in pairs, and all the piezoelectric patches are connected in series or in parallel. The
comb finger type driver is adopted to drive the multiple sets of double-cavity diaphragm pumps, only one driving power source is needed, the complexity and the control requirement of the driving power source needed by the multi-pump-body resonant
piezoelectric pump can be effectively lowered, and the output performance and the working reliability are improved.