Series-parallel hybrid-driven piezoelectric pump

Abstract

The invention relates to a series-parallel hybrid-driven piezoelectric pump, and belongs to the fields of fluid transmission and control. Upper and lower pump bodies are connected through screws; 2 to 20 piezoelectric vibrators are connected between pump cavities of the two pump bodies in a pressed mode; valve sheets are adhered to the pump cavities of the upper and lower pump bodies and the inlets of valve cavities; the inlet of the upper pump body and the adjacent pump cavity, two adjacent pump cavities, and the valve cavities and the adjacent pump cavities are communicated through inter-cavity flow channels; the valve cavities are communicated with outlets; a series pump I is formed by the pump cavities and the piezoelectric vibrators; the inlet of the lower pump body and the adjacent pump cavity, two adjacent pump cavities, and the valve cavities and the adjacent pump cavities are communicated through inter-cavity flow channels; a series pump II is formed by the pump cavities and the piezoelectric vibrators; the inlets of the series pumps I and II are communicated; and the valve cavities of the series pumps I and II are communicated and communicated with the outlet on the upper valve body. The pump has the advantages that a series-parallel pump is formed by a plurality of piezoelectric vibrators of which the two sides drive fluid simultaneously, so that the pump is high in flow, pressure and energy efficiency, low in pulsation and suitable for constructing a piezoelectric hydraulic driver with high system back pressure.

Description

technical field [0001] The invention belongs to a micro precision piezoelectric pump used in the field of microfluid transmission and control, in particular to a series-parallel hybrid drive piezoelectric pump. Background technique [0002] As an important part of microelectromechanical systems, the research on piezoelectric pumps has been widely concerned by scholars at home and abroad. The original piezoelectric pump was only for the purpose of microfluidic output. After decades of development, some types of piezoelectric pumps have been used in chemical analysis, biopharmaceuticals, medical drug controlled release and other microfluidic delivery and control. . In addition to simple fluid transportation, in recent years, people have also based on piezoelectric pump-driven micro-hydraulic systems, referred to as piezoelectric hydraulic drivers or piezoelectric hydraulic motors: such as Chinese patents 200810051156.7, 200920093242.4, 201020180067.5, etc., the purpose of whi...

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Problems solved by technology

The reason is: the deformation of the piezoelectric vibrator is extremely small, and the actual fluid is compressible. The piezoelectric hydraulic drive must use an accumulator to provide back pressure to increase the system stiffness and avoid the hydraulic cylinder piston from crawling; due to the piezoelectric vibrator or pump chamber diaphragm When one side is in contact with the fluid, the back pressure of the system at this time has become the load of the piezoelectric vibrator, which seriously reduces the overall effective power output of the driver. When the system back pressure is too large, it will also cause damage to the chip piezoelectric vibrator. Therefore, the existing Multi-vibrator piezo pumps have low energy efficiency and reliability

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