Cantilever-type piezoelectric diaphragm pump

Abstract

The invention discloses a cantilever-type piezoelectric diaphragm pump. The cantilever-type piezoelectric diaphragm pump is composed of a vibration excitation unit, a pump cavity body and a flow channel structure. The vibration excitation unit is composed of a pump body, an adjustable pressing mechanism, a piezoelectric vibrator, a vibration transmission piston and a PET diaphragm. The piezoelectric vibrator is composed of a copper substrate and a piezoelectric ceramic piece. Compared with the traditional method of periphery fixing or wave joint supporting of a circular oscillator, the method of cantilever supporting of the rectangular piezoelectric vibrator has the advantages that deflection is large, tail end output amplitude is large, and simple harmonic frequency is low. Meanwhile, the length of a cantilever of the rectangular piezoelectric vibrator is adjustable, and therefore a vibration system has different vibration characteristics so as to meet different requirements for output performance. The adopted PET diaphragm material has the advantages of being good in abrasive resistance, dimensional stability and electrical insulation, nontoxic, impermeable, light in weight and the like, and further has the advantages of being safe and reliable, free of pollution and the like as a pump cavity vibrating diaphragm for conveying chemical and medical liquid. The piezoelectric vibrator is not contacted with the conveyed liquid directly, and therefore the piezoelectric pump can work at high working voltage and is good in output performance.

Description

Technical field [0001] The present invention relates to a piezoelectric pump, in particular to a cantilever type piezoelectric diaphragm pump. Background technique [0002] With the continuous deepening of research on piezoelectric pumps at home and abroad, the performance of piezoelectric pumps has also been greatly improved. Piezoelectric pumps have the advantages of simple structure, low energy consumption, small size and light weight. Compared with traditional mechanical pumps, they have obvious advantages in fluid transportation situations in the fields of biomedicine, fine chemicals, and pharmaceutical research. [0003] At present, most of the single-cavity or multi-cavity piezoelectric pumps developed in China directly use the vibration deformation of the piezoelectric vibrator to change the volume of the pump cavity to achieve the purpose of fluid transportation. The advantage of this structure is that it is simple, compact and easy to miniaturize. However, the pr...

AI Technical Summary

Problems solved by technology

However, the piezoelectric vibrator is usually prepared by bonding the piezoelectric crystal sheet and the substrate together. When the fluid flows through the pump cavity, it directly contacts the piezoelectric vibrator. Therefore, in practical applications, the harmful substances that may be produced during the manufacture of the piezoelectric pump will be harmful. Pollution to the medical and pharmaceutical industry, the metal substrate of the piezoelectric pump may also cause chemical damage to some sensitive reagents during the fluid delivery process

[0004] In addition to the pollution of the piezoelectric material to the fluid, in order to ensure the safety of medical treatment, the working voltage of the piezoelectric pump cannot be too high, which often makes the output performance of the pump fail to meet the expected requirements

In addition, most of the traditional piezoelectric pumps use circular vibrators to be fixed around the periphery or supported by corrugations, which have the problems of small deflection of the vibrator, small output amplitude, and high simple harmonic frequency.

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