Driving-sensing integral piezoelectric chip pump

A piezoelectric chip and sensing technology, applied in the field of tiny precision piezoelectric pumps, can solve the problems of increasing the cost of use, increasing the system volume, weight and complexity, hindering the popularization and application of piezoelectric chip pumps, and achieving accurate output flow and Pressure, easy to obtain, the effect of online monitoring

Active Publication Date: 2011-10-12
ZHEJIANG NORMAL UNIVERSITY +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, simply adjusting the driving voltage and frequency cannot obtain high output accuracy. Flow and pressure measuring instruments are required in occasions requiring high flow and pressure control, such as drug controlled release, chemical analysis, and fuel cells...

Method used

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  • Driving-sensing integral piezoelectric chip pump
  • Driving-sensing integral piezoelectric chip pump
  • Driving-sensing integral piezoelectric chip pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0015] like figure 1 As shown, the wafer type piezoelectric vibrator 1 is installed inside the pump body 2 and clamped by the pump cover 3; the pump body 2 and the pump cover 3 are connected by screws 4, and the pump body 2 and the pump cover 3 are connected by a sealing ring 5 Clamp the piezoelectric vibrator; the pump body 2 is provided with an inlet valve 7 and an outlet valve 8 ;

[0016] like figure 1 , figure 2 As shown, the wafer-type piezoelectric vibrator 1 is formed by bonding a piezoelectric wafer 10 and a metal substrate 11; the electrodes on the surface of the piezoelectric wafer 10 are divided into a driving unit 101 and a sensing unit 102. The driving unit 101 and the The sensing unit 102 is connected to the control power source 9 through the wire group 92 and the wire group 91 respectively.

[0017] like image 3 , Figure 4 As shown, when the control power supply 9 is turned on and enters a steady state operation, the driving unit 101 of the piezoelectri...

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PUM

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Abstract

The invention relates to a driving-sensing integral piezoelectric chip pump which comprises at least one wafer type piezoelectric vibrator formed by connecting a piezoelectric chip with a metal substrate are spliced, a pump body, a pump cover, a group of check valves for controlling the flow direction and a control power source. The driving-sensing integral piezoelectric chip pump provided by theinvention is characterized in that an electrode at the surface of the piezoelectric chip in the piezoelectric vibrator is divided into a drive unit and a sensing unit, when the drive unit is subjected to bending deflection caused by external voltages, the piezoelectric ceramics of the sensing unit is also subjected to bending deflection and generates electric energy, and a voltage signal generated by the sensing unit is subjected to conversion processing so as to be used for representing the output pressure and flow of the piezoelectric pump. The driving-sensing integral piezoelectric chip pump provided by the invention has the advantages that the two functions of driving and sensing monitoring are realized by use of the same wafer type piezoelectric vibrator, the online monitoring on theoutput performance of the piezoelectric pump can be realized without extra pressure and flow measurement devices, the accurate output flow and pressure are easy to obtain.

Description

technical field [0001] The invention belongs to a tiny precision piezoelectric pump applied in the field of microfluidic transmission and control, in particular to a driving-sensing integrated piezoelectric wafer pump. Background technique [0002] As an important branch of piezoelectric drives, piezoelectric wafer pumps are widely used in medical treatment, chemical analysis, aerospace due to their simple structure, small size, fast response, no electromagnetic interference, easy operation, and good flow / pressure controllability. , automobile engine and fuel cell fuel supply, micro-electro-hydraulic system and other aspects have broad application prospects, and its research and development has attracted extensive attention from scholars all over the world. In order to meet the application requirements in different fields, piezoelectric wafer pumps with various structural forms have been proposed. Although the structure and performance of the proposed piezoelectric pumps ar...

Claims

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Application Information

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IPC IPC(8): F04B43/04
Inventor 王淑云阚君武程光明温建明张忠华曾平
Owner ZHEJIANG NORMAL UNIVERSITY
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