Driving-sensing integral piezoelectric chip pump

Abstract

The invention relates to a driving-sensing integral piezoelectric chip pump which comprises at least one wafer type piezoelectric vibrator formed by connecting a piezoelectric chip with a metal substrate are spliced, a pump body, a pump cover, a group of check valves for controlling the flow direction and a control power source. The driving-sensing integral piezoelectric chip pump provided by theinvention is characterized in that an electrode at the surface of the piezoelectric chip in the piezoelectric vibrator is divided into a drive unit and a sensing unit, when the drive unit is subjected to bending deflection caused by external voltages, the piezoelectric ceramics of the sensing unit is also subjected to bending deflection and generates electric energy, and a voltage signal generated by the sensing unit is subjected to conversion processing so as to be used for representing the output pressure and flow of the piezoelectric pump. The driving-sensing integral piezoelectric chip pump provided by the invention has the advantages that the two functions of driving and sensing monitoring are realized by use of the same wafer type piezoelectric vibrator, the online monitoring on theoutput performance of the piezoelectric pump can be realized without extra pressure and flow measurement devices, the accurate output flow and pressure are easy to obtain.

Description

technical field [0001] The invention belongs to a tiny precision piezoelectric pump applied in the field of microfluidic transmission and control, in particular to a driving-sensing integrated piezoelectric wafer pump. Background technique [0002] As an important branch of piezoelectric drives, piezoelectric wafer pumps are widely used in medical treatment, chemical analysis, aerospace due to their simple structure, small size, fast response, no electromagnetic interference, easy operation, and good flow / pressure controllability. , automobile engine and fuel cell fuel supply, micro-electro-hydraulic system and other aspects have broad application prospects, and its research and development has attracted extensive attention from scholars all over the world. In order to meet the application requirements in different fields, piezoelectric wafer pumps with various structural forms have been proposed. Although the structure and performance of the proposed piezoelectric pumps ar...

AI Technical Summary

Problems solved by technology

Therefore, simply adjusting the driving voltage and frequency cannot obtain high output accuracy. Flow and pressure measuring instruments are required in occasions requiring high flow and pressure control, such as drug controlled release, chemical analysis, and fuel cells. Real-time monitoring, which not only increases the cost of use, but also increases the volume, weight and complexity of the system, which seriously hinders the popularization and application of piezoelectric wafer pumps in micro-electromechanical systems and portable products

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